TWI485225B - 接著片及半導體裝置的製造方法 - Google Patents
接著片及半導體裝置的製造方法 Download PDFInfo
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- TWI485225B TWI485225B TW102108050A TW102108050A TWI485225B TW I485225 B TWI485225 B TW I485225B TW 102108050 A TW102108050 A TW 102108050A TW 102108050 A TW102108050 A TW 102108050A TW I485225 B TWI485225 B TW I485225B
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- adhesive layer
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- semiconductor device
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Landscapes
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- Adhesives Or Adhesive Processes (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
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| CN111656499A (zh) * | 2018-01-30 | 2020-09-11 | 日立化成株式会社 | 膜状粘接剂及其制造方法、以及半导体装置及其制造方法 |
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| CN109654388A (zh) * | 2018-12-06 | 2019-04-19 | 安徽皇广实业有限公司 | 一种集成高导热基材led灯具 |
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Family Cites Families (26)
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| US5366933A (en) * | 1993-10-13 | 1994-11-22 | Intel Corporation | Method for constructing a dual sided, wire bonded integrated circuit chip package |
| US6245841B1 (en) * | 1998-03-23 | 2001-06-12 | General Electric Company | Cyanate ester based thermoset compositions |
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| JP2002072009A (ja) | 2000-08-25 | 2002-03-12 | Shinko Electric Ind Co Ltd | 光合分波器 |
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| JP2005327789A (ja) * | 2004-05-12 | 2005-11-24 | Sharp Corp | ダイシング・ダイボンド兼用粘接着シートおよびこれを用いた半導体装置の製造方法 |
| JP4954569B2 (ja) * | 2006-02-16 | 2012-06-20 | 日東電工株式会社 | 半導体装置の製造方法 |
| JP2007270125A (ja) * | 2006-03-08 | 2007-10-18 | Hitachi Chem Co Ltd | 接着シート、一体型シート、半導体装置、及び半導体装置の製造方法 |
| JP5157229B2 (ja) * | 2006-04-11 | 2013-03-06 | 日立化成株式会社 | 接着シート |
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| JP2008074928A (ja) | 2006-09-20 | 2008-04-03 | Hitachi Chem Co Ltd | 半導体用接着フィルム及びこれを用いた半導体装置 |
| AU2008227642A1 (en) * | 2007-03-16 | 2008-09-25 | Hitachi Chemical Company, Ltd. | Adhesive composition for optical waveguide, adhesive film for optical waveguide and adhesive sheet for optical waveguide each using the same, and optical device using any of them |
| KR100959746B1 (ko) * | 2007-10-23 | 2010-05-25 | 제일모직주식회사 | 페녹시수지 및 에스테르계 열 가소성 수지를 이용한 반도체조립용 접착 필름 조성물 및 접착 필름 |
| JP5524465B2 (ja) * | 2007-10-24 | 2014-06-18 | 日立化成株式会社 | 接着シート及びこれを用いた半導体装置およびその製造方法 |
| US7723852B1 (en) * | 2008-01-21 | 2010-05-25 | Amkor Technology, Inc. | Stacked semiconductor package and method of making same |
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| JP2011018806A (ja) * | 2009-07-09 | 2011-01-27 | Sumitomo Bakelite Co Ltd | 半導体用フィルムおよび半導体装置の製造方法 |
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- 2013-03-05 JP JP2014503856A patent/JPWO2013133275A1/ja active Pending
- 2013-03-07 TW TW102108050A patent/TWI485225B/zh active
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2015
- 2015-08-31 JP JP2015170820A patent/JP2016021585A/ja active Pending
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2017
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Patent Citations (1)
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|---|---|---|---|---|
| JP2008274259A (ja) * | 2007-04-02 | 2008-11-13 | Hitachi Chem Co Ltd | 接着シート |
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| CN104169383A (zh) | 2014-11-26 |
| JP2017204656A (ja) | 2017-11-16 |
| KR20170105640A (ko) | 2017-09-19 |
| JP6414296B2 (ja) | 2018-10-31 |
| CN106024654B (zh) | 2019-07-02 |
| KR101953052B1 (ko) | 2019-02-27 |
| CN104169383B (zh) | 2016-11-09 |
| KR20200006197A (ko) | 2020-01-17 |
| JPWO2013133275A1 (ja) | 2015-07-30 |
| JP2016021585A (ja) | 2016-02-04 |
| US9212298B2 (en) | 2015-12-15 |
| KR102067945B1 (ko) | 2020-01-17 |
| US20150050780A1 (en) | 2015-02-19 |
| TW201346003A (zh) | 2013-11-16 |
| KR20160139043A (ko) | 2016-12-06 |
| WO2013133275A1 (ja) | 2013-09-12 |
| KR20190020191A (ko) | 2019-02-27 |
| CN106024654A (zh) | 2016-10-12 |
| KR20140126736A (ko) | 2014-10-31 |
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