WO2013065423A1 - ダイヤフラムポンプ - Google Patents
ダイヤフラムポンプ Download PDFInfo
- Publication number
- WO2013065423A1 WO2013065423A1 PCT/JP2012/074708 JP2012074708W WO2013065423A1 WO 2013065423 A1 WO2013065423 A1 WO 2013065423A1 JP 2012074708 W JP2012074708 W JP 2012074708W WO 2013065423 A1 WO2013065423 A1 WO 2013065423A1
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- WIPO (PCT)
- Prior art keywords
- piston
- cylinder
- outer peripheral
- diaphragm
- rolling diaphragm
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
- F04B43/0063—Special features particularities of the flexible members bell-shaped flexible members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/007—Cylinder heads
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/14—Pistons, piston-rods or piston-rod connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J3/00—Diaphragms; Bellows; Bellows pistons
- F16J3/02—Diaphragms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2280/00—Materials; Properties thereof
- F05B2280/40—Organic materials
- F05B2280/4003—Synthetic polymers, e.g. plastics
Definitions
- the present invention relates to a diaphragm pump including a rolling diaphragm, and more specifically, is suitably used when applying a chemical solution or preparing a chemical solution in a manufacturing process of a semiconductor, liquid crystal, organic EL, solar cell, LED, or the like.
- the present invention relates to a diaphragm pump.
- a pump device rolling diaphragm pump
- This rolling diaphragm pump A cylinder, A piston, Rolling diaphragm, A pump chamber which is partitioned by a rolling diaphragm in the cylinder and whose volume is changed by movement of the piston; And a decompression chamber formed by being surrounded by the cylinder, the piston and the rolling diaphragm on the back side of the rolling diaphragm.
- the rolling diaphragm has an inner peripheral part supported by the piston and an outer peripheral part supported by the cylinder through a folded part of the outer periphery of the piston.
- the flushing mode is operated at the time of liquid replacement for replacing a liquid such as a chemical liquid.
- the piston In the flushing mode, in order to completely discharge the liquid in the pump chamber, the piston is positioned as far as possible in the protruding side and is moved to the maximum protruding position.
- the folded portion formed on the leading end side of the rolling diaphragm is extended from the folded posture (bending posture) having a U-shaped cross section. It changes to the extended posture. Therefore, the liquid staying in the turning portion can be easily moved and discharged to the pump chamber side, and smooth liquid replacement can be performed.
- the bent portion 10d which is supposed to be in the extended posture by being bent (opened) by being folded (opened), has a distorted shape. It was.
- the bending portion 10 is a portion that connects the inner peripheral portion 3 c and the outer peripheral ring 3 portion g when the rolling diaphragm 3 is in the extended posture.
- the bending portion 10 has a shape as expected (regular) that is curved without distortion and smoothly connects the inner peripheral portion 3 c and the outer peripheral ring portion 3 g.
- the bending portion 10 when the piston is at the maximum projecting position does not have the extended posture (see FIG. 2) due to the smoothly curved shape as expected, but actually, FIGS. 14 (a) and 14 (b). Therefore, it was difficult for the liquid in the folded portion 3d to escape from the pump chamber. Therefore, as described above, in order to completely replace the liquid, a large amount of cleaning liquid or a chemical liquid to be added at the time of replacement and a lot of time are required. In addition, the liquid in the turn-back portion may stay and agglomerate without being sufficiently discharged, which may cause a product defect or a decrease in product yield. As an example of a product defect, there is a case where a liquid aggregated in a semiconductor manufacturing process becomes a stagnant foreign matter, which may cause a wafer defect.
- the object of the present invention is to make the rolling diaphragm bend smoothly, not to have a distorted shape when the folded portion is opened when the piston is moved as far as possible to assume an extended posture.
- An object of the present invention is to provide a diaphragm pump that can reduce the amount and time required for liquid replacement in the flushing mode so as to have an expected shape and improve liquid replacement efficiency.
- an inner peripheral portion 3c that is supported by a piston 2 that can reciprocate within the cylinder 1 and that extends along the outer peripheral surface 2e of the piston 2, and an inner periphery of the cylinder 1 that is supported by the cylinder 1
- a diaphragm pump having a pump chamber 4 whose volume changes so as to increase in volume by movement The rolling diaphragm 3 is manufactured in an extended posture corresponding to the posture when the outer peripheral portion 3e disappears by the projecting movement of the piston 2 and the folded portion 3d is opened. It is characterized by.
- the rolling diaphragm 3 is set in the extended posture when the piston 2 is at a maximum projecting position f where the piston 2 is most projected and moved.
- the piston 2 is configured to be capable of reciprocating between the maximum projecting position f and a suction position k which is the retreated position from the maximum projecting position f.
- the piston 2 is located at a position where the piston 2 is retreated from the maximum projecting position f, and the projecting from the suction position k. It is configured to be able to reciprocate between the discharge position t, which is the moved position, and the suction position k, and the rolling diaphragm 3 has the piston 2 at the discharge position t and the suction position from this. When it is on the k side, it is maintained in a folded posture having the folded portion 3d.
- the cylinder 1 in the diaphragm pump according to the first aspect, includes a cylinder body 1A that accommodates the piston 2 so as to be capable of reciprocating, and supply / exhaust passages 6a and 7a to the pump chamber 4.
- the rolling diaphragm 3 includes a thick outer ring portion 3g continuing from the distal end side of the outer peripheral portion 3e, and the cylinder head 1B.
- the cylinder main body 1A and the cylinder head 1B are connected and integrated by sandwiching the outer peripheral ring portion 3g between the two 1A and 1B.
- the invention according to claim 5 is the diaphragm pump according to claim 4, wherein the rolling diaphragm 3 includes a thin-film annular extraction portion 3f extending radially inward from an inner peripheral end of the outer peripheral ring portion 3g. It is the structure connected with the outer peripheral part 3e, It is characterized by the above-mentioned.
- the rolling diaphragm 3 since the rolling diaphragm 3 is produced in the extended posture (see FIGS. 2 and 5), the folded portion 3d is folded back regardless of the position of the piston 2 in the reciprocating range.
- the posture change (shape change) between the posture (bending posture) and the extended posture is maintained in a smooth state.
- the curved portion 10 formed thereby does not have a distorted shape as shown in FIG. 14, and the inner peripheral portion 3c and the outer peripheral ring portion 3g are smoothly smoothed.
- the rolling diaphragm 3 having an extended posture as expected having the curved portion 10 connected to the head is provided.
- the piston 2 can be reciprocated between the maximum projecting position f where the rolling diaphragm 3 is in the extended posture and the suction position k where it is in the folded posture. Not only can the cleaning efficiency and the liquid replacement efficiency be improved at the time of liquid replacement, but also problems caused by the liquid pool phenomenon at the time of liquid transfer can be suppressed.
- the piston 2 can be reciprocated between the discharge position t and the suction position k in which both the rolling diaphragms 3 are folded, and at the time of liquid replacement, the piston 2 is moved to the maximum projecting position.
- the piston 2 is reciprocated between the discharge position t and the suction position k (operated in the normal mode) at the time of liquid transfer. it can.
- the pumping operation is performed in a state in which the folded-back position in which the folded portion 3d is formed on the rolling diaphragm 3 is maintained, and the cross-sectional shape of the rolling diaphragm 3 (particularly the film-like portion) is constant. Therefore, the flow rate of the liquid transferred during each pumping operation can be kept constant.
- the outer ring portion 3g of the rolling diaphragm 3 can be supported using the connecting structure of the cylinder body 1A and the cylinder head 1B, which are constituent elements of the cylinder 1, the structure is further improved.
- a rational diaphragm pump P can be provided.
- the thin film annular extraction portion 3f extending radially inward from the inner peripheral end of the outer ring portion 3g is connected to the outer periphery 3e, the folded portion 3d in the thin film portion u is provided. And the bending portion 10 are more gently deformed, and there is an advantage that both the folded posture and the extended posture can be stably formed.
- the main part of the pump in the normal mode is shown, (a) is a cross-sectional view when the piston is in the discharge position after the discharge process, (b) is a cross-section when the piston is in the suck back position after the suck back process Figure
- the main part of the pump in the normal mode is shown, (a) is a cross-sectional view when the piston returns from the suck back position to the discharge position, and (b) is a cross-sectional view when the piston is in the suction position after finishing the suction process.
- the main part of the pump in the flushing mode is shown, (a) is a cross-sectional view when the piston returns to the discharge position upon activation, (b) is a cross-section when the piston is at the maximum projecting position after the overdischarge process Figure
- the main part of the pump in the flushing mode is shown, (a) is a sectional view when the piston is in the suction position after finishing all the suction steps, (b) is a section when the piston is in the maximum projecting position after the flushing step is finished.
- FIG. Flow chart showing liquid replacement procedure in diaphragm pump Schematic diagram showing a liquid pump system using a diaphragm pump Side view of a partially cut-out showing a conventional rolling diaphragm in a free state (A), (b) is the principal part figure of the pump which shows the conventional inconvenient example, respectively
- FIG. 1 shows a diaphragm pump P and a pump apparatus A having the diaphragm pump P
- FIG. 12 shows a liquid pump system B including the pump apparatus A.
- the pump device A includes a diaphragm pump (also called a rolling diaphragm pump) P, a linear actuator (motor) 8 that drives the diaphragm pump P, and the like.
- the internal structure of the linear actuator 8 is well known (the above-mentioned Patent Document 1 etc.), and detailed description and illustration are omitted.
- Reference numeral 20 denotes an engagement pin for detecting a piston position
- 25 denotes an air suction port connected to an aspirator (decompression unit) 14 (see FIG. 12).
- FIG. 1 shows a state where the piston 2 is located at the discharge position t.
- the liquid pump system B includes a chemical tank 15, a pump device A, a filter 16, a nozzle 17, a suction-side on-off valve 21, a discharge-side on-off valve 22, a suction-side channel 26, a discharge-side channel 27, and the like. It is configured.
- a suction-side opening / closing valve 21 is provided in the middle of the suction-side flow path 26 extending between the suction portion 6 of the pump apparatus A and the chemical liquid tank 15, and a discharge-side flow path 27 extending between the discharge section 7 and the nozzle 17 of the pump apparatus A.
- a suction side drive mechanism 28 for driving and opening the suction side on-off valve 21, a discharge side drive mechanism 29 for driving and opening the discharge side on-off valve 22, and a control device 30 that controls the drive state of the pump device A are provided.
- Reference numeral 31 denotes a wafer as an application target (liquid supply target) of a liquid e such as a chemical solution.
- the diaphragm pump P includes a cylinder 1, a piston 2 accommodated in the cylinder 1 so as to be reciprocally movable, a rolling diaphragm 3 provided over the cylinder 1 and the piston 2, and a cylinder. 1 includes a pump chamber 4 partitioned by a rolling diaphragm 3, a suction portion 6 and a discharge portion 7 formed in the cylinder 1, and the like.
- the piston 2 is housed in the cylinder 1 so as to be slidable in the direction of the axis C, and is linked to the linear actuator 8 via an output screw shaft 18.
- the volume of the pump chamber 4 is reduced by the projecting movement of the piston 2 in the direction of arrow A, and the volume of the pump chamber 4 is expanded by the retreating movement of the piston 2 in the direction of arrow B.
- the cylinder 1 is a cylinder body 1A bolted to a linear actuator 8, and a cylinder bolted to the cylinder body 1A via an outer peripheral ring portion 3g of a rolling diaphragm 3. And a head 1B.
- the cylinder main body 1A includes a cylinder inner peripheral surface 1a having a circular cross section, a circular cross section having a larger diameter and cross sectional area than the cylinder inner peripheral surface 1a, and a rolling inner formed on the protruding side of the cylinder inner peripheral surface 1a.
- the cylinder inner peripheral surface 1a and the rolling inner peripheral surface 1r have a common axis C.
- the cylinder head 1B has a suction path (an example of a supply / discharge path) 6a that opens to the pump chamber 4 and communicates with the suction section 6 and a discharge path (an example of the supply and discharge path) that opens to the pump chamber 4 and communicates with the discharge section 7 7a.
- the suction path 6a and the discharge path 7a are set as straight pipelines having the same position and diameter in the direction of the axis C.
- inhalation part 6 and the discharge part 7 are described as a pipe joint structure, it is not limited to the structure.
- the piston 2 includes an annular packing groove 2d formed in an intermediate portion in the moving direction (axial center C direction), and a tip portion 2b on the cylinder head 1B side therefrom.
- the base end portion 2a on the piston base side, the screw hole 2c formed in the tip end portion 2b, and the like are configured to have a straight body shape that fits into the cylinder inner peripheral surface 1a.
- the packing groove 2d is provided with an O-ring 23 made of fluorine rubber or the like and a slipper ring 24 made of a fluororesin such as polytetrafluoroethylene (PTFE) and disposed on the outer peripheral side of the O-ring 23.
- PTFE polytetrafluoroethylene
- the rolling diaphragm 3 is made of a fluororesin such as PTFE (polytetrafluoroethylene), and includes a screw shaft portion 3a, a flange head portion 3b, and a thin inner peripheral portion 3c.
- the folded portion 3d, the thin outer peripheral portion 3e, the thin-film annular extraction portion 3f, and the outer peripheral ring portion 3g are configured.
- the screw shaft portion 3a is a cylindrical portion that is inserted into the screw hole 2c of the piston 2, and a flange head portion 3b is formed at the tip thereof.
- the thin inner peripheral portion 3c is a thin and cylindrical portion that extends from the outer end portion of the flange head portion 3b along the outer peripheral surface 2e of the piston 2 toward the piston 2 root side.
- a thick outer ring portion 3g is formed in the axial center C direction on the outermost peripheral side of the rolling diaphragm 3, and a thin-film annular extraction portion 3f extends inwardly from the inner peripheral end of the outer ring portion 3g. It is extended.
- the thin outer peripheral portion 3e formed following the extraction portion 3f is a thin and cylindrical portion extending toward the base side of the piston 2 in a state along the rolling inner peripheral surface 1r.
- the piston 2 root side end of the thin inner peripheral portion 3 c and the piston 2 root side end of the thin outer peripheral portion 3 e are formed by a thin folded portion 3 d that is folded back in the cylindrical space portion 13 between the cylinder 1 and the piston 2. It is integrated through.
- the folded portion 3d has a U shape in which the cross-sectional shape is convex toward the piston 2 base side. As the piston 2 moves, the formation position of the folded portion 3d moves in the direction of the axis C, so that the rolling diaphragm 3 is smoothly deformed and the air tightness (liquid tightness) of the pump chamber 4 whose volume changes is maintained. , A known structure is adopted.
- This rolling diaphragm 3 has a screw shaft portion 3a inserted into and screwed into a screw hole 2c so that the outer peripheral portion of the flange head portion 3b comes into contact with the annular tip surface 2f of the piston 2 and a thin inner peripheral portion 3c. Can be attached to the piston 2 in a state of closely fitting with the tip 2b. Further, the outer peripheral ring portion 3g is integrally attached to the cylinder 1 while being sandwiched between the cylinder body 1A and the cylinder head 1B.
- the pump chamber 4 is a space portion surrounded by the cylinder head 1 ⁇ / b> B and the rolling diaphragm 3, and the rear side of the rolling diaphragm 3 ( A ring-shaped decompression chamber 5 that is surrounded by the rolling diaphragm 3, the piston 2, and the cylinder body 1 ⁇ / b> A and that communicates with the air suction port 25 is formed on the piston 2 base side.
- An O-ring 9 made of fluorine rubber or the like is provided between the joint surfaces of the cylinder body 1A and the outer ring portion 3g, and the space between the joint surfaces of the cylinder head 1B and the outer ring portion 3g is formed in the cylinder head 1B.
- the lip seal portion (not shown) is sealed against the surface of the outer ring portion 3g.
- the piston 2 is at the most moved position to the piston 2 base side (linear actuator 8 side), that is, at the suction position k.
- the main part of the diaphragm pump P is shown, and the front end of the flange head 3b and the front end of the cylinder body 1A are set to be substantially flush with each other in the direction of the axis C.
- the thin outer peripheral portion 3e along the rolling inner peripheral surface 1r has a relatively long length in the axial center C direction, and the thin outer portion 3e along the outer peripheral surface 2e.
- the inner peripheral part 3c has a relatively short length in the direction of the axis C.
- the suction position k does not necessarily have to be the position where the piston 2 has moved to the most proximal side of the piston 2, and may be a position before that.
- the piston 2 is at a discharge position t that is somewhat away from the suction position k in the direction of arrow A. Showing the time.
- the discharge position t is a position in which the tip of the flange head 3b reaches the peripheral edge of the piston 2 base side of the opening hole of the suction path 6a and the discharge path 7a formed in the pump chamber 4 in the direction of the axis C.
- the thin outer peripheral portion 3e along the rolling inner peripheral surface 1r has a relatively short length in the axial center C direction (shorter than that at the suction position k), and
- the thin inner peripheral portion 3c along the outer peripheral surface 2e has a relatively long length in the axis C direction (longer than that at the suction position k).
- the bending portion 10 includes an extraction portion 3f, an outer peripheral portion 3e, and a folding portion 3d (these three members (3f, 3e, 3d) are formed when the piston 2 is at the suction position k, the discharge position t, etc.) However, it is formed by deforming so as to exhibit a single cross-sectional shape with a curved surface smoothly extending from the outer ring portion 3g in the direction toward the pump chamber 4 (the direction of arrow A). That is, the rolling diaphragm 3 is deformed so that the inner peripheral part 3c extends and the position of the folded part 3d moves to the pump chamber 4 side as the piston 2 protrudes, so that the piston 2 exceeds the discharge position t. When protruding, the outer peripheral portion 3e finally disappears due to further movement of the folded portion 3d toward the pump chamber 4 side.
- the rolling diaphragm 3 When the piston 2 reaches the maximum projecting position f, the rolling diaphragm 3 is in a posture in which the take-out portion 3f, which is in the posture of changing the orientation by 90 degrees toward the base side of the piston 2, is turned to the inner side of the diameter, and the outer peripheral portion 3e and the folded portion It changes to the posture in which the bending portion 10 appears instead of the portion 3d. That is, when the piston 2 reaches the maximum projecting position f, the rolling diaphragm 3 has a take-out portion 3f or a curved portion that faces straight inward from the folded posture (see FIGS. 3 and 4) having the outer peripheral portion 3e and the folded portion 3d. Changes to the extended posture (see FIGS. 2 and 5).
- the take-out part 3f formed so as to go radially inward from the inner peripheral end of the outer ring part 3g becomes a posture that changes its orientation by 90 degrees, and the inner part of the outer ring part 3g
- the peripheral end and the outer peripheral portion 3e are smoothly connected, and the thin film portion u is not bent, and the shape can be changed smoothly.
- a normal driving method for sucking and discharging a chemical solution is called a normal mode
- a driving method performed when replacing the chemical solution is called a flushing mode.
- FIG. 6A In the normal mode, first, as shown in FIG. 6A, an origin return process is performed in which the piston 2 is moved (or maintained) to the discharge position t by a normal mode command (including activation of the pump device A). Is called. Following the return to origin step, a suction step is performed in which the piston 2 is moved back and forth to increase the volume of the pump chamber 4.
- FIG. 6B shows a state where the piston 2 is moved back and forth in the direction of arrow B and is located at the suction position k, that is, a state where the suction process is finished. At this time, the suction-side on-off valve 21 is open, and the discharge-side on-off valve 22 is closed. By this inhalation step, the chemical solution is inhaled from the inhalation unit 6 into the pump chamber 4 as indicated by an arrow C.
- FIG. 7A shows a state in which the piston 2 is projected and moved in the direction of the arrow A and is positioned at the discharge position t, that is, the end state of the discharge process.
- the suction-side on-off valve 21 is closed, and the discharge-side on-off valve 22 is open.
- the chemical solution in the pump chamber 4 is discharged from the discharge portion 7 as indicated by an arrow D.
- a suck-back process is performed in which the piston 2 at the discharge position t is slightly retracted in the direction of arrow B.
- FIG. 7B shows a state where the piston 2 is moved back and forth in the direction of the arrow B and is located at the suck back position s, that is, the end state of the suck back process.
- the suck-back process is to suck the chemical solution in the discharge side flow path 27 for a moment in order to prevent the chemical solution e from dripping from the nozzle 17 (see FIG. 12) (see arrow E in FIG. 7B). This is a known process.
- FIG. 8A shows a state in which the piston 2 that has been projected and moved from the suck-back position s has returned to the discharge position t, that is, the end state of the second origin return process.
- a suction process for expanding the volume of the pump chamber 4 by moving the piston 2 back and forth is performed.
- the suction-side on-off valve 21 is open and the discharge-side on-off valve 22 is closed, so that liquid is sucked into the pump chamber 4 from the suction passage 6a [FIG. 8B]. (See arrow).
- FIG. 8B shows an end state of the suction process in which the piston 2 is moved back and forth in the direction of arrow B and located at the suction position k.
- the pumping operation is performed in the state in which the folded portion 3d is formed in the rolling diaphragm 3 in the suction process ⁇ the discharge process, and the rolling diaphragm 3 (in particular, the film-like shape) Since the cross-sectional shape of the portion is kept constant, the flow rate of the liquid transferred during each pumping operation can be kept constant.
- the flushing mode is a driving method performed when replacing the liquid to be pumped. For example, when the liquid to be transferred in the diaphragm pump P is replaced from the chemical liquid A to the chemical liquid B, the liquid replacement is performed as shown in the flowchart of FIG.
- the suction side channel 26 is removed from the tank containing the chemical solution A. Then, until the chemical liquid A is largely discharged and the chemical liquid A is almost exhausted, “(1) chemical liquid A ejection” is performed in which a pumping operation (so-called pump emptying) for sucking and discharging air is continued. In this pump emptying, the chemical liquid A remaining in the pump chamber 4 is mixed with air and discharged like a splash, and is ejected from the pump chamber 4.
- the suction-side flow path 26 is connected to a tank containing the cleaning liquid A, and “(2) liquid replacement with the cleaning liquid A” is performed so that the cleaning liquid A can be introduced into the pump chamber 4.
- the cleaning liquid A is sucked and filled in the pump chamber 4 and left until the cleaning liquid A becomes familiar with each part in the pump chamber 4 (for example, about 5 minutes). .
- the suction-side flow path 26 is connected to a tank containing the chemical solution B, and “(5) liquid replacement with the chemical solution B” is performed so that the chemical solution B can be introduced into the pump chamber 4.
- the liquid to be pumped is replaced with the chemical liquid B from the chemical liquid A, and then the chemical liquid B is supplied to the wafer or the like by driving the diaphragm pump P in the normal mode described above.
- the process of sucking and discharging the cleaning liquid A is performed several times between the “(3) leaving after filling with the cleaning liquid A” process and the “(4) cleaning liquid A ejection” process. You may make it wash away the chemical
- a process of discarding the discharged chemical solution B without supplying it to the wafer or the like is performed several times from the start until the completeness is achieved. It is also possible to perform liquid replacement.
- the piston 2 is operated in the following manner in the above-described “(1) chemical liquid A purging” process and “(4) cleaning liquid A purging” process.
- FIG. 9B shows a state in which the piston 2 is projected and moved most (as much as possible) in the direction of the arrow B and located at the maximum discharge position (flushing position) f, that is, the end state of the overdischarge process.
- the suction-side on-off valve 21 is closed, and the discharge-side on-off valve 22 is open.
- FIG. 10A shows a state in which the piston 2 is moved back and forth in the direction of arrow B and is located at the suction position k, that is, a state in which the entire suction process is completed.
- the suction-side on-off valve 21 is open, and the discharge-side on-off valve 22 is closed.
- the chemical liquid or cleaning liquid
- the inhalation amount in this entire inhalation process is clearly larger than the inhalation amount in the inhalation process in the normal mode described above.
- FIG. 10B shows a state where the projection is moved most (as much as possible) in the direction of the arrow B and located at the maximum projection position (flushing position) f, that is, the end state of the flushing process.
- the suction-side on-off valve 21 is closed, and the discharge-side on-off valve 22 is open.
- the pump chamber 4 in which the piston 2 is in the suction position k and has the maximum volume is minimized by the projecting movement of the piston 2 to the maximum projecting position f. It is possible to discharge almost all of the filled chemical solution (or cleaning solution) (see arrow in FIG. 10B).
- the first operation immediately after startup is a series of operations shown in FIGS. 9 (a) to 10 (b). That is, the origin return process ⁇ the overdischarge process ⁇ the entire suction process ⁇ the flushing process is executed in this order. Thereafter (after the second time), the operations shown in FIGS. 10A to 10B, that is, the entire suction process ⁇ the flushing process are executed in this order.
- FIGS. 10A to 10B that is, the entire suction process ⁇ the flushing process are executed in this order.
- the conventional rolling diaphragm 3 has a posture corresponding to, for example, when the piston 2 is at the discharge position t, that is, a thin portion between the flange head portion 3b and the outer ring portion 3g as shown in FIG. It was produced in a folded posture in which a folded portion 3d and an outer peripheral portion 3e are formed in a thin film portion u.
- the rolling diaphragm 3 made of a flexible material such as a fluororesin is in a state where the piston 2 is reciprocated between the discharge position t and the suction position k. If it is in a state having 3d, the thin film portion u is smoothly deformed.
- the conventional defect has one factor in the posture when the rolling diaphragm 3 is manufactured. That is, although the conventional thin film portion u is made of a flexible material, it has a manufacturing fold (curved fold) to return to the folded posture shape shown in FIG. As a result, it was found that the corner portion 41, the reverse bent portion 42, the corrugated portion 43, and the like are generated in the vicinity of the original folded portion 3d.
- the diaphragm pump P according to the present invention is configured so that the rolling diaphragm 3 has the posture when the outer peripheral portion 3e disappears by the protruding movement of the piston 2 and the folding of the folding portion 3d is released, and the piston 2 is in the maximum protruding position f. It is characterized in that it is produced in an extended posture (see FIG. 2), which is a posture at the time of the above.
- the rolling diaphragm 3 is set so as to be in the extended posture when the piston 2 is most projected and moved (the piston 2 is at the maximum projected position f).
- the rolling diaphragm 3 in the extended posture shown in FIG. 2, the bending portion 10 having a gentle and smooth curved cross-sectional shape is formed instead of forming the folded portion 3 d and the thin outer peripheral portion 3 e. Has been. Therefore, the rolling diaphragm 3 is manufactured in a state in which a portion between the thin inner peripheral portion 3c and the outer peripheral ring portion 3g is formed in the curved portion 10 whose shape is smoothly changed.
- Reference numeral 11 denotes a male screw for screwing onto the piston 2.
- the rolling diaphragm 3 is made of a flexible material such as a fluororesin, the thin film portion u can be easily folded back. This is because the folding posture (see FIGS. 3 and 4) of the thin film portion u in which the folded portion 3d and the outer peripheral portion 3e appear is deformation in a direction that further tightens the bending of the bending portion 10 that appears at the time of manufacture. This is because it can be smoothly deformed by bending in the same direction.
- the piston 2 can be in any position including the suction position k, the discharge position t, and the maximum protruding position f. Even in this case, the thin film portion u is maintained in a state in which the cross-sectional shape such as the folded posture and the extended posture is smoothly deformed (changed). In particular, even when the piston 2 is moved to the maximum projecting position f, the thin film portion u does not have a distorted shape as shown in FIG. 14 and has a curved portion 10 that smoothly curves and deforms as expected. It becomes the rolling diaphragm 3 of the extended posture.
- the rolling diaphragm 3 has its thin film portion u smoothly changed in shape when the piston 2 is projected and moved to the maximum projecting position f. It is formed in an expected extension posture having a smooth curved portion 10.
- a diaphragm pump P that can reduce the amount and time of liquid required for liquid replacement when driven in the flushing mode and improve the liquid replacement efficiency. That is, in the flow chart shown in FIG. 11 (1) in the process of expelling the chemical solution A, when the piston 2 is projected and moved to the maximum projecting position f, the curved portion 10 formed by opening the folded portion 3d is distorted.
- the liquid pool is less likely to occur, and the chemical A is quickly expelled from the pump chamber 4.
- the cleaning liquid A is quickly ejected from the pump chamber 4. Therefore, the amount of liquid and time required for these steps can be reduced.
- (3) in the step of leaving after filling with the cleaning liquid A the shape of the curved portion 10 is smooth, so that the cleaning liquid A filled in the pump chamber 4 quickly adapts to the curved portion 10.
- the chemical solution B filled in the pump chamber 4 quickly adapts to the bending portion 10. Therefore, the time in these steps can be reduced. Therefore, the cleaning efficiency and the liquid replacement efficiency can be improved during the liquid replacement.
- the curved portion 10 formed by opening the folded portion 3d does not have a distorted shape, so that a liquid pool is less likely to occur, and the chemical solution aggregates and solidifies. This can be prevented. Therefore, it is possible to suppress problems caused by the liquid pool phenomenon during liquid transfer.
- “manufacturing” is a concept including making by cutting or making (molding).
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Abstract
Description
シリンダと、
ピストンと、
ローリングダイヤフラムと、
シリンダ内においてローリングダイヤフラムによって仕切られ、かつ、ピストンの移動によって容積変化するポンプ室と、
及びローリングダイヤフラムの背面側においてシリンダとピストンとローリングダイヤフラムとで囲まれて形成される減圧室と、を有して構成されている。
前記ローリングダイヤフラムは、ピストンに支持される内周部及びピストン外周の折返部を経てシリンダに支持される外周部を有している。
前記フラッシングモードでは、ピストンを最大突出位置まで最大限に突出移動させるので、ローリングダイヤフラムの先端側に形成される折返部は、断面U字形状の折返し姿勢(屈曲姿勢)から引き延ばされて伸展された伸展姿勢に変化する。従って、折返部に滞留している液体をポンプ室側に移動させて排出させ易くなり、円滑な液置換を行うことができる。
そこで、その原因を追究したところ、つぎのような現象のあることが分ってきた。それは、ピストンを最大突出位置に突出移動させたときには、図14に示すように、円滑な伸展姿勢となっているはずの湾曲部10に、部分的に逆方向に屈曲したようになって角部41や逆曲り部42を生じたり〔図14(a)参照〕、或いは直筒状であるべき内周部3cの根元側に盛り上がるような波打部43が形成されるようなったり〔図14(b)参照〕していることである。
また、折返部にある液が十分に排出されずに滞留して凝集することがあり、そうなると製品不良や製品歩留りの低下を招く懸念もある。製品不良の例としては、半導体製造プロセスにおいて凝集した液が滞留異物となり、ウェハ欠陥のおそれが生じる、といったケースがある。
前記ローリングダイヤフラム3は、前記ピストン2の突出移動によって前記外周部3eが消失され、かつ、前記折返部3dの折り返しが開放されるときの姿勢に相当する伸展姿勢にて作製されたものであることを特徴とする。
前記シリンダ本体1Aと前記シリンダヘッド1Bとは、これら両者1A,1Bの間に前記外周リング部3gを挟み込んで連結一体化されていることを特徴とする。
ピストン2が突出移動されて伸展姿勢になると、それによって形成される湾曲部10は、図14に示されるような歪んだ形状になることがなく、内周部3cと外周リング部3gとを滑らかに繋ぐ湾曲部10を有する期待通りの伸展姿勢のローリングダイヤフラム3となる。よって、折返部3dに溜まっている液体が突出移動方向へ流れようとすることを妨げる要素(角部41や逆曲り部42、波打部43など)がなく、スムーズに排出させることが可能となる。
その結果、ローリングダイヤフラム3を、ピストン2を可能な限り突出移動させることで伸展姿勢とするときに、折返部3dの開放によって形成される湾曲部10が歪んだ形状とならず、円滑に湾曲した期待通りの形状となるようにして、フラッシングモードにおいて液置換に要する液量や時間が軽減でき、液置換効率が改善されるダイヤフラムポンプPを提供することができる。
ここで、通常モードにおいては、ローリングダイヤフラム3に折返部3dが形成される折返し姿勢が維持された状態でポンピング動作が行われて、ローリングダイヤフラム3(特に、膜状の部分)の断面形状が一定に維持されるので、各回のポンピング動作中において移送される液の流量を一定に保つことができる。
また、請求項5のように、外周リング部3gの内周端から径内側方向に延設される薄膜環状の取出部3fが外周部3eに繋がる構成とすれば、薄膜部uにおける折返部3dと湾曲部10との形状変形がより穏やかに行われるようになり、折返し姿勢及び伸展姿勢の双方を安定的に形成させることができる利点がある。
図1にダイヤフラムポンプP及びそれを有するポンプ装置Aが、そして図12にポンプ装置Aを備える液体ポンプシステムBがそれぞれ示されている。ポンプ装置Aは、ダイヤフラムポンプ(ローリングダイヤフラムポンプとも呼ばれる)P、このダイヤフラムポンプPを駆動するリニアアクチュエータ(モータ)8などを備えて構成されている。なお、リニアアクチュエータ8の内部構造は公知(前述の特許文献1など)につき、詳細な説明や図示は省略する。
20は、ピストン位置検知用の係合ピン、25はアスピレータ(減圧手段)14(図12参照)に接続される空気吸出口である。このポンプ装置Aは、シリンダ1内で往復移動可能なピストン2をリニアアクチュエータ8で軸心C方向に往復駆動することにより、液体を吸入部6から吸入して吐出部7から吐出することができる。図1は、ピストン2が吐出位置tに位置した状態を示している。
また、吸入側の開閉弁21を駆動開閉する吸入側駆動機構28、吐出側の開閉弁22を駆動開閉する吐出側の駆動機構29、及びポンプ装置Aのそれぞれの駆動状態を司る制御装置30が設けられている。なお、31は薬液などの液体eの塗布対象(液体供給対象)としてのウェハである。
ピストン2は、軸心C方向にスライド移動可能にシリンダ1に収容されるとともに、出力用ネジ軸18を介してリニアアクチュエータ8に連動連結されている。そのピストン2の矢印イ方向への突出移動によりポンプ室4の容積が縮小され、ピストン2の矢印ロ方向への退入移動によりポンプ室4の容積が拡大される。次に、各部について説明する。
シリンダ本体1Aは、断面円形状のシリンダ内周面1aと、シリンダ内周面1aより大きい径及び断面積を有する断面円形状で、かつ、シリンダ内周面1aの突出側に形成されるローリング内周面(「シリンダの内周面」の一例)1rと、これらシリンダ内周面1aとローリング内周面1rとを繋ぐ傾斜内周面1kとを有している。シリンダ内周面1aとローリング内周面1rとは、互いに共通の軸心Cを有している。
パッキン溝2dには、フッ素ゴムなどからなるOリング23と、ポリテトラフルオロエチレン(PTFE)などのフッ素樹脂製であってOリング23の外周側に配備されるスリッパーリング24とが設けられている。基端部2aには、前述の係合ピン20が植設されている。
ネジ軸部3aは、ピストン2のネジ孔2cに挿入される円柱状の部分であり、その先端にフランジ頭部3bが形成されている。薄肉の内周部3cは、フランジ頭部3bの外端部からピストン2の外周面2eに沿う状態で、ピストン2根元側に向けて延設される薄肉で円筒状の部分である。
薄肉の内周部3cのピストン2根元側端と薄肉の外周部3eのピストン2根元側端とは、シリンダ1とピストン2との間の筒状空間部13において折り返される薄肉の折返部3dを介して一体化されている。折返部3dは、その断面形状がピストン2根元側に向けて凸となるU字状を呈している。ピストン2の移動に連れて折返部3dの形成位置が軸心C方向で移動することにより、ローリングダイヤフラム3が円滑に変形し、容積変化するポンプ室4の気密性(液密性)を維持する、という公知の構造が採られている。
シリンダ本体1Aと外周リング部3gとの接合面間には、フッ素ゴムなどから成るOリング9が設けられており、シリンダヘッド1Bと外周リング部3gとの接合面間は、シリンダヘッド1Bに形成されているリップシール部(図示省略)を外周リング部3gの表面に押当てることでシールされている。
なお、吸入位置kは、必ずしも、ピストン2が最もピストン2根元側に移動した位置でなくても良く、それよりも手前の位置であっても良い。
ピストン2が吐出位置tにあるときは、ローリング内周面1rに沿う薄肉の外周部3eは軸心C方向の長さが比較的短く(吸入位置kのときより短く)なっており、かつ、外周面2eに沿う薄肉の内周部3cは軸心C方向の長さが比較的長く(吸入位置kのときより長く)なっている。
つまり、ローリングダイヤフラム3は、ピストン2の突出移動に伴って内周部3cが伸びて折返部3dの位置もポンプ室4側に移動するように変形するので、ピストン2が吐出位置tを越えて突出移動すると、折返部3dのさらなるポンプ室4側への移動によって遂には外周部3eが消失する状態が現れる。
外周リング部3gの内周端から径内側に向かうように形成されている取出部3fは、ローリングダイヤフラム3が折返し姿勢であるときには、90度向き変更する姿勢となって、外周リング部3gの内周端と外周部3eとを滑らかに繋ぐようになり、薄膜部uに屈曲部分が生じることがなく、円滑に形状変化できるようにされている。
通常モードにおいては、まず、通常モード指令(ポンプ装置Aの起動など含む)により、図6(a)に示すように、ピストン2が吐出位置tに移動(又は維持)される原点復帰工程が行われる。
原点復帰工程の次は、ピストン2が退入移動されてポンプ室4の容積を拡大させる吸入工程が行われる。図6(b)は、ピストン2が矢印ロ方向に退入移動されて吸入位置kに位置する状態、即ち、吸入工程の終了状態を示している。このとき、吸入側の開閉弁21は開いた状態で、吐出側の開閉弁22は閉じた状態である。この吸入工程により、矢印ハで示すように、吸入部6から薬液がポンプ室4に吸入される。
吐出工程が終了すると、吐出位置tにあるピストン2を矢印ロ方向に少しだけ退入移動させるサックバック工程が行われる。図7(b)は、ピストン2が矢印ロ方向に退入移動されてサックバック位置sに位置する状態、即ち、サックバック工程の終了状態を示している。なお、サックバック工程とは、ノズル17(図12参照)から薬液eが液垂れするのを防止するために、吐出側流路27の薬液を一瞬吸い込む〔図7(b)の矢印ホ参照〕という公知の工程である。
第2原点復帰工程が終了すると、ピストン2が退入移動されてポンプ室4の容積を拡大させる吸入工程が行われる。この吸入工程では、吸入側の開閉弁21は開いた状態で、吐出側の開閉弁22は閉じた状態であり、吸入路6aからポンプ室4に液体が吸入される〔図8(b)の矢印ヘ参照〕。図8(b)は、ピストン2が矢印ロ方向に退入移動されて吸入位置kに位置した吸入工程の終了状態を示している。
薬液をウェハなどに供給し続けるときには、図6(b)と図7(a)とで示されるように、吸入工程と吐出工程とによるポンピング動作のみを繰り返し行うようにしても良い。なお、これら一連の作用の説明上、図6(b)と図8(b)とを別々に設けているが、図面としては同じものである。
このように、通常モードにおいて、吸入工程→吐出工程にかけては、ローリングダイヤフラム3に折返部3dが形成される折返し姿勢が維持された状態でポンピング動作が行われて、ローリングダイヤフラム3(特に、膜状の部分)の断面形状が一定に維持されるので、各回のポンピング動作中において移送される液の流量を一定に保つことができる。
フラッシングモードは、ポンピング対象となる液体を置換する場合に行われる駆動方式である。例えば、ダイヤフラムポンプPにおいて移送する液体を薬液Aから薬液Bに置換する場合、図11に示すフロー図のように液置換が行われる。
このポンプ空打ちでは、ポンプ室4内に残存している薬液Aが空気に混ざってしぶきのようになって吐出され、ポンプ室4から追い出される。
まず、フラッシングモード指令により、図9(a)に示すように、ピストン2が吐出位置tに移動(又は維持)される原点復帰工程が行われる。
このフラッシング工程では、ピストン2が吸入位置kにあって容積最大となっているポンプ室4を、ピストン2の最大突出位置fへの突出移動によって一気に容積最小とするものであり、ポンプ室4に充填されている薬液(又は洗浄液)をほぼ全排出させることが可能である〔図10(b)の矢印リ参照〕。
次に、ローリングダイヤフラム3の作製方法や、液置換時における従来の不都合が解消される理由の詳細などについて説明する。
この場合に、フッ素樹脂などの可撓性を有する材料製であるローリングダイヤフラム3は、ピストン2が吐出位置tと吸入位置kとの間で往復移動される状態であれば、換言すれば折返部3dを有する状態であれば、薄膜部uは円滑に変形する。
しかしながら、ピストン2が最大突出位置fに突出移動されると、元あった折返部3d近辺に、図14に示すように、角部41や逆曲り部42、波打部43などが生じてしまう問題があった。
この図2に示す伸展姿勢は、ピストン2の全移動領域における一方の終端(最大突出位置f)のときのものであり、湾曲部10に作製癖(曲り癖)が若干付いていたとしても、湾曲部10をその曲がり方向とは反対側に曲げ変形させることはないから、その作製癖によって歪な断面形状になるおそれもない。
特に、ピストン2が最大突出位置fに移動されても、薄膜部uは、図14に示されるような歪んだ形状になることがなく、円滑に湾曲変形する湾曲部10を有するという、期待通りの伸展姿勢のローリングダイヤフラム3となる。よって、折返部3dに溜まっている薬液が突出移動方向へ流れようとすることを妨げる要素(角部41や逆曲り部42、波打部43など)がなく、スムーズに排出させることが可能となる。
その結果、フラッシングモードで駆動した際に、液置換に要する液量や時間が軽減でき、液置換効率が改善されるダイヤフラムポンプPを提供することに成功している。
即ち、図11に示すフロー図の(1)薬液A追出しの工程において、ピストン2が最大突出位置fに突出移動された時に、折返部3dの開放によって形成される湾曲部10が歪んだ形状とならないので、液溜まり箇所が生じにくくなり、薬液Aがポンプ室4から速やかに追い出される。同様に、(4)洗浄液A追出しの工程においても、洗浄液Aがポンプ室4から速やかに追い出される。よって、これらの工程に要する液量や時間を削減することができる。
また、(3)洗浄液A充填後放置の工程において、湾曲部10の形状が滑らかな形状となっているので、ポンプ室4内に充填された洗浄液Aが速やかに湾曲部10に馴染む。同様に、(6)薬液B充填後放置の工程においても、ポンプ室4内に充填された薬液Bが速やかに湾曲部10に馴染む。よって、これらの工程における時間を削減することができる。
従って、液置換時において洗浄効率及び液置換効率を向上させることができる。
前述の実施形態1においては、吐出位置tは最大突出位置(フラッシング位置)fよりもピストン2根元側に移動した位置に設定されていたが、吐出位置tは最大突出位置fと同じ位置であっても良い。即ち、ピストン2が吐出位置t(=最大突出位置f)に到達すると、ローリングダイヤフラム3が伸展姿勢になるようにしても良い。
この別実施形態において、ダイヤフラムポンプPを通常モードで駆動すると、ピストン2は、矢印イ方向に最も(可能な限り)突出移動された吐出位置t(=最大突出位置f)と吸入位置kとの間で往復移動する。そして、ピストン2が吐出位置tに突出移動された時に、折返部3dの開放によって形成される湾曲部10が歪んだ形状とならないので、液溜まり箇所が生じにくくなり、薬液が凝集して固化することを防止することができる。従って、液移送時において液溜り現象に起因する不具合を抑制することができる。
なお、前述の説明において、「作製」とは、削り出しによって作ることや、成形(型成形)によって作ることを含む概念である。
1A シリンダ本体
1B シリンダヘッド
1r シリンダの内周面
2 ピストン
2e ピストンの外周面
3 ローリングダイヤフラム
3c 内周部
3d 折返部
3e 外周部
3f 取出部
3g 外周リング部
4 ポンプ室
6a,7a 給排路
13 筒状空間部
f 最大突出位置
k 吸入位置
t 吐出位置
Claims (5)
- シリンダ内にて往復移動可能なピストンに支持されて前記ピストンの外周面に沿う内周部、前記シリンダに支持されて前記シリンダの内周面に沿う外周部、及び前記シリンダと前記ピストンとの間の筒状空間部において折り返されることで前記内周部と前記外周部とに亘って形成される折返部を備えて可撓性を有する材料でなるローリングダイヤフラムと、前記シリンダ内において前記ローリングダイヤフラムによって仕切られるとともに、前記ピストンの突出移動で容積が減少し、かつ、前記ピストンの退入移動で容積が増大するように容積変化するポンプ室とを有するダイヤフラムポンプであって、
前記ローリングダイヤフラムは、前記ピストンの突出移動によって前記外周部が消失され、かつ、前記折返部の折り返しが開放されるときの姿勢に相当する伸展姿勢にて作製されたものであるダイヤフラムポンプ。 - 前記ローリングダイヤフラムは、前記ピストンが最も突出移動した最大突出位置にあるときに前記伸展姿勢となる状態に設定されており、前記ピストンは、前記最大突出位置と前記最大突出位置よりも前記退入移動した位置である吸入位置との間で往復移動可能に構成されている請求項1に記載のダイヤフラムポンプ。
- 前記ピストンを、これが前記最大突出位置よりも前記退入移動した位置であって、かつ前記吸入位置よりも前記突出移動した位置である吐出位置と、前記吸入位置との間で往復移動させることが可能に構成されるとともに、前記ローリングダイヤフラムは、前記ピストンが前記吐出位置及びこれより前記吸入位置側にあるときは前記折返部を有する折返し姿勢に維持されている請求項2に記載のダイヤフラムポンプ。
- 前記シリンダは、前記ピストンを往復移動可能に収容するシリンダ本体と、前記ポンプ室への給排路を備えるシリンダヘッドとを有して構成されるとともに、前記ローリングダイヤフラムは、前記外周部の先端側に続く厚肉の外周リング部を備えており、
前記シリンダ本体と前記シリンダヘッドとは、これら両者の間に前記外周リング部を挟み込んで連結一体化されている請求項1に記載のダイヤフラムポンプ。 - 前記ローリングダイヤフラムは、前記外周リング部の内周端から径内側方向に延設される薄膜環状の取出部が前記外周部に繋がる構成とされている請求項4に記載のダイヤフラムポンプ。
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EP12846454.2A EP2775143B1 (en) | 2011-11-01 | 2012-09-26 | Diaphragm pump |
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EP2775143A4 (en) | 2015-08-12 |
EP2775143A1 (en) | 2014-09-10 |
US9599222B2 (en) | 2017-03-21 |
KR20140056373A (ko) | 2014-05-09 |
US20150300491A1 (en) | 2015-10-22 |
JP2013096313A (ja) | 2013-05-20 |
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