WO2013058003A1 - 光検出装置 - Google Patents
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- WO2013058003A1 WO2013058003A1 PCT/JP2012/069730 JP2012069730W WO2013058003A1 WO 2013058003 A1 WO2013058003 A1 WO 2013058003A1 JP 2012069730 W JP2012069730 W JP 2012069730W WO 2013058003 A1 WO2013058003 A1 WO 2013058003A1
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- 238000001514 detection method Methods 0.000 title claims abstract description 16
- 239000004065 semiconductor Substances 0.000 claims abstract description 176
- 239000000758 substrate Substances 0.000 claims abstract description 151
- 238000010791 quenching Methods 0.000 claims abstract description 40
- 230000000171 quenching effect Effects 0.000 claims abstract description 40
- 239000011521 glass Substances 0.000 claims abstract description 37
- 239000012535 impurity Substances 0.000 claims description 6
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- 238000000034 method Methods 0.000 description 23
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- 229910052782 aluminium Inorganic materials 0.000 description 4
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- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
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- 230000003287 optical effect Effects 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier or surface barrier the potential barrier working in avalanche mode, e.g. avalanche photodiode
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/208—Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
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- H01L27/144—Devices controlled by radiation
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- H01L27/14601—Structural or functional details thereof
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- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
Abstract
Description
Claims (7)
- 光検出装置であって、
互いに対向する第一及び第二主面を含む半導体基板を有する半導体光検出素子と、
前記半導体光検出素子に対向配置されると共に、前記半導体基板の前記第二主面と対向する第三主面を有する搭載基板と、
前記半導体光検出素子に対向配置されたと共に、前記半導体基板の前記第一主面と対向する第四主面を有するガラス基板と、を備え、
前記半導体光検出素子は、ガイガーモードで動作すると共に前記半導体基板内に形成された複数のアバランシェフォトダイオードと、それぞれの前記アバランシェフォトダイオードに対して直列に接続されると共に前記半導体基板の前記第一主面側に配置されたクエンチング抵抗と、前記クエンチング抵抗と電気的に接続され且つ前記第一主面側から前記第二主面側まで前記半導体基板を貫通して形成された複数の貫通電極と、を含み、
前記搭載基板は、前記貫通電極毎に対応して前記第三主面側に配置された複数の第一電極と、前記複数の第一電極と電気的に接続され且つ各前記アバランシェフォトダイオードからの出力信号を処理する信号処理部と、を含んでおり、
前記貫通電極と前記第一電極とがバンプ電極を介して電気的に接続され、
前記半導体基板の側面と前記ガラス基板の側面とは面一とされている。 - 請求項1に記載の光検出装置であって、
前記ガラス基板の前記第四主面に対向する主面が平坦である。 - 請求項1又は2に記載の光検出装置であって、
前記貫通電極が、各前記アバランシェフォトダイオード間の領域に位置している。 - 請求項1~3のいずれか一項に記載の光検出装置であって、
前記半導体光検出素子は、対応する前記貫通電極に電気的に接続されると共に、前記半導体基板の前記第二主面側に配置された第二電極を、更に含み、
前記第一電極と前記第二電極とが前記バンプ電極を介して接続されている。 - 請求項4に記載の光検出装置であって、
各前記アバランシェフォトダイオードは、
第一導電体の前記半導体基板と、
前記半導体基板の前記第一主面側に形成された第二導電型の第一半導体領域と、
前記第一半導体領域内に形成され且つ前記第一半導体領域よりも不純物濃度が高い第二導電型の第二半導体領域と、
前記半導体基板の前記第一主面側に配置され且つ前記第二半導体領域と前記クエンチング抵抗とを電気的に接続する第三電極と、を有し、
前記第二電極は、前記第二主面における前記第二半導体領域に対応する領域上に形成されている。 - 請求項1~5のいずれか一項に記載の光検出装置であって、
前記貫通電極には、複数の前記クエンチング抵抗が電気的に接続されている。 - 請求項6に記載の光検出装置であって、
各前記アバランシェフォトダイオードから対応する前記クエンチング抵抗を介した前記貫通電極までの配線距離が同等である。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201280051779.9A CN103890971B (zh) | 2011-10-21 | 2012-08-02 | 光检测装置 |
US14/352,429 US9435686B2 (en) | 2011-10-21 | 2012-08-02 | Light detection device having a semiconductor light detection element, a mounting substrate, a glass substrate and a plurality of through-hole electrodes electrically connected to quenching resistors |
DE112012004387.1T DE112012004387T5 (de) | 2011-10-21 | 2012-08-02 | Lichtdetektionsvorrichtung |
US15/002,706 US9773935B2 (en) | 2011-10-21 | 2016-01-21 | Light detection device including a semiconductor light detection element, and a semiconductor light detection element having a through-hole electrode connection |
US15/213,629 US9748428B2 (en) | 2011-10-21 | 2016-07-19 | Light detection device including a semiconductor light detection element with a through-hole electrode connection, a mounting substrate and a light-transmissive substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2011-232106 | 2011-10-21 | ||
JP2011232106A JP5832852B2 (ja) | 2011-10-21 | 2011-10-21 | 光検出装置 |
Related Child Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/352,429 A-371-Of-International US9435686B2 (en) | 2011-10-21 | 2012-08-02 | Light detection device having a semiconductor light detection element, a mounting substrate, a glass substrate and a plurality of through-hole electrodes electrically connected to quenching resistors |
US15/002,706 Continuation US9773935B2 (en) | 2011-10-21 | 2016-01-21 | Light detection device including a semiconductor light detection element, and a semiconductor light detection element having a through-hole electrode connection |
US15/213,629 Continuation US9748428B2 (en) | 2011-10-21 | 2016-07-19 | Light detection device including a semiconductor light detection element with a through-hole electrode connection, a mounting substrate and a light-transmissive substrate |
Publications (1)
Publication Number | Publication Date |
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WO2013058003A1 true WO2013058003A1 (ja) | 2013-04-25 |
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Application Number | Title | Priority Date | Filing Date |
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PCT/JP2012/069730 WO2013058003A1 (ja) | 2011-10-21 | 2012-08-02 | 光検出装置 |
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US (3) | US9435686B2 (ja) |
JP (1) | JP5832852B2 (ja) |
CN (3) | CN103890971B (ja) |
DE (1) | DE112012004387T5 (ja) |
TW (2) | TWI573255B (ja) |
WO (1) | WO2013058003A1 (ja) |
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JP2013089918A (ja) | 2013-05-13 |
US20160329455A1 (en) | 2016-11-10 |
US9748428B2 (en) | 2017-08-29 |
TW201717371A (zh) | 2017-05-16 |
TW201318152A (zh) | 2013-05-01 |
CN105633192A (zh) | 2016-06-01 |
CN105609583A (zh) | 2016-05-25 |
DE112012004387T5 (de) | 2014-07-10 |
CN105609583B (zh) | 2017-12-08 |
US20160141439A1 (en) | 2016-05-19 |
US9435686B2 (en) | 2016-09-06 |
US9773935B2 (en) | 2017-09-26 |
CN103890971B (zh) | 2016-03-02 |
CN105633192B (zh) | 2018-08-28 |
TWI614882B (zh) | 2018-02-11 |
CN103890971A (zh) | 2014-06-25 |
JP5832852B2 (ja) | 2015-12-16 |
US20140263975A1 (en) | 2014-09-18 |
TWI573255B (zh) | 2017-03-01 |
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