WO2013015013A1 - Procédé d'inspection d'aspect et appareil pour celui-ci - Google Patents

Procédé d'inspection d'aspect et appareil pour celui-ci Download PDF

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Publication number
WO2013015013A1
WO2013015013A1 PCT/JP2012/063878 JP2012063878W WO2013015013A1 WO 2013015013 A1 WO2013015013 A1 WO 2013015013A1 JP 2012063878 W JP2012063878 W JP 2012063878W WO 2013015013 A1 WO2013015013 A1 WO 2013015013A1
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WO
WIPO (PCT)
Prior art keywords
appearance
information
inspection
image
inspected
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PCT/JP2012/063878
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English (en)
Japanese (ja)
Inventor
薫 酒井
前田　俊二
丸山　重信
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株式会社日立製作所
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Publication of WO2013015013A1 publication Critical patent/WO2013015013A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires

Definitions

  • the degree of coincidence between the three-dimensional shape data 40 and the integrated image 41 is evaluated for the feature quantity at the calculated xy coordinate position while shifting one data in each of the x direction and the y direction.
  • Each shift amount when the value becomes the highest is set as a shift amount between the three-dimensional shape data 40 and the integrated image 41 (S403).
  • a typical evaluation value for the degree of coincidence is normalized correlation.
  • the calculated deviation of the x and y coordinates is corrected, and the data is superimposed (S404).
  • Reference numeral 42 denotes an example of a three-dimensional model (corresponding to the three-dimensional model 35 in FIG. 3) generated by superimposing the three-dimensional shape data 40 and the integrated image 41.
  • the three-dimensional model 42 is generated by adding height information of the three-dimensional shape data 40 to the integrated image 41 having surface texture information.
  • FIG. 7 is an example of a conceptual diagram of defect determination processing in which different threshold values are applied to each part.
  • 71 is a view showing the surface state of the inspection object
  • 70 is a view showing the surface state of the non-defective product standard.
  • 71 representing the surface state of the inspection object is surface texture information obtained from the integrated image 34
  • 70 representing the surface state based on the non-defective product is surface texture information having no defect.
  • the distribution of the feature vector of the non-defective product standard 83 plotted in the multidimensional feature space is set as a normal part distribution, and a point whose distance from the normal part distribution is larger than the threshold value Th (84) is detected as a defect ( S806).
  • Various classifiers are prepared for classification (defect / normal two-class classification) based on multidimensional feature values. Typical examples include SVM (support vector machine), k nearest neighbor classifier, Bayes classifier, and the like.
  • FIG. 9 is a partial profile of the surface of the inspection object, and 91 is a partial profile of the corresponding non-defective standard surface.
  • a Z value cross-sectional profile in the Y direction (between AB in the figure). The Z value) is compared and compared while scanning the Z value cross-sectional profile in the Y direction (Z value between A ′ and B ′ in the figure) of the non-defective reference surface profile 91 in the X axis direction.
  • the signal processing unit 310 generates a three-dimensional model of the inspection object 5 from the signals input from the image detection units 7a and 7b and the three-dimensional displacement detection unit 7c, and generates a non-defective product reference 100. 1 and a defect determination unit 80-2 for detecting a shape defect, surface minute unevenness, surface texture defect, and the like by comparing the generated three-dimensional model with a good product standard and outputting the defect to the overall control unit 9.
  • GUI unit 11 having display means and input means.
  • the surface unevenness information (surface displacement 33) obtained by the three-dimensional displacement detector 7c is only a measurement point group.
  • the visual inspection apparatus according to the present invention presents the measurement point group to the user more visually. Examples thereof are shown in FIGS. 11A to 11C.
  • 110 is an inspection object. If the illumination angle (112 in the figure) of the illumination light 111 when acquiring the surface texture, the angle of the detection unit (114 in the figure) for detecting the reflected light 113, etc. are known with respect to the surface irregularities of the inspection object 110 From the unevenness information (surface displacement 33), it is possible to estimate how the shadow is added. In this embodiment, the shadow is estimated from the unevenness information (surface displacement 33) and displayed on the GUI unit 11 as a two-dimensional image.
  • FIG. 11C is an optical image detected by the image detector 7a or 7b.
  • the shape defect on the surface of the inspection object 110 can be displayed in the shaded image of FIG. 11A or FIG. 11B, it is difficult to display non-shape defects such as discoloration and stains on the surface of the inspection object 110.
  • FIG. 11C by displaying an optical image as shown in FIG. 11C, it is possible to display non-shape defects 117 such as discoloration and stains on the surface of the inspection object 110. Therefore, by displaying the optical image as shown in FIG. 11C side by side with the shadow image as shown in FIG. 11A or FIG. 11B, the shape defect on the surface of the inspection object 110 and the non-shape defect such as discoloration or stain on the surface can be removed. It becomes possible to display simultaneously.
  • 13A and 13B show another example of the use of the appearance inspection apparatus.
  • 140 of FIG. 14A is the appearance inspection apparatus described with reference to FIGS. 1 and 2, and a roll-shaped thin plate 141 is an inspection target.
  • the surface texture (image 142) on the entire surface of the thin plate is sequentially detected by the image detection unit described with reference to FIGS. 1 and 2 and is input to the signal processing unit 3.
  • this visual inspection apparatus it is determined only by the surface texture whether the defects on the thin plate can be eliminated by a subsequent cleaning process such as a stain or dirt on the surface, or cannot be excluded such as a hole. Defects that cannot be determined can also be determined using 3D displacement information.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Processing Or Creating Images (AREA)
  • Image Generation (AREA)

Abstract

L'invention porte sur un procédé d'inspection de l'aspect d'objets, qui comprend : l'acquisition d'images d'un objet à inspecter, qui comprend des informations de texture de surface pour l'objet à inspecter, par montage de l'objet à inspecter et photographie de l'objet à inspecter tout en déplaçant de façon continue l'objet à inspecter dans au moins une direction ; la reconstruction de la forme tridimensionnelle de l'objet à inspecter à partir des informations acquises de saillie/renfoncement de surface pour l'objet à inspecter ; l'obtention d'informations d'aspect pour un objet qui a une texture de surface à partir des images acquises et de la forme tridimensionnelle reconstruite de l'objet à inspecter ; l'extraction d'une pluralité de caractéristiques à partir des informations d'aspect qui ont été obtenues ; et l'évaluation de l'aspect de l'objet à inspecter par comparaison d'au moins l'une de la pluralité extraite de caractéristiques avec une caractéristique correspondant à au moins une caractéristique de données de référence préréglées.
PCT/JP2012/063878 2011-07-27 2012-05-30 Procédé d'inspection d'aspect et appareil pour celui-ci WO2013015013A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-164102 2011-07-27
JP2011164102A JP5676387B2 (ja) 2011-07-27 2011-07-27 外観検査方法及びその装置

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WO2013015013A1 true WO2013015013A1 (fr) 2013-01-31

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
EP3477244A1 (fr) * 2017-10-26 2019-05-01 United Technologies Corporation Procédé de mesure et de détection de défaut
US11156567B2 (en) * 2016-01-29 2021-10-26 Fujifilm Corporation Defect inspection apparatus, method, and program
WO2021212548A1 (fr) * 2020-04-23 2021-10-28 苏州必为智能控制科技有限公司 Appareil d'inspection visuelle 3d
CN113588672A (zh) * 2021-09-29 2021-11-02 武汉绿色塑料包装有限公司 一种塑料制品的质量检测方法

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JP6212926B2 (ja) * 2013-04-26 2017-10-18 住友金属鉱山株式会社 物体検査装置及び物体検査方法
JP6177099B2 (ja) * 2013-11-13 2017-08-09 リコーエレメックス株式会社 外観検査装置
WO2016103492A1 (fr) * 2014-12-26 2016-06-30 株式会社日立製作所 Procédé et dispositif de mesure de forme
JP6459550B2 (ja) * 2015-01-23 2019-01-30 新日鐵住金株式会社 機械設備の異常検出方法および異常検出装置
JP6528308B2 (ja) * 2015-02-05 2019-06-12 国立大学法人神戸大学 形状評価方法および形状評価装置
EP3485464B1 (fr) * 2016-07-18 2023-09-06 Universität Basel Système informatique et procédé de représentation améliorée de la brillance dans des images numériques
EP3306572A1 (fr) * 2016-10-07 2018-04-11 Schneider Electric Industries SAS Procédé de mappage 3d de point d'intérêt 2d
JP6622679B2 (ja) * 2016-10-26 2019-12-18 川崎重工業株式会社 サークルスクラッチ検査装置
JP6457574B2 (ja) 2017-03-15 2019-01-23 ファナック株式会社 計測装置
CH713798A1 (de) * 2017-05-19 2018-11-30 Reishauer Ag Maschine zur Feinbearbeitung von verzahnten Werkstücken sowie Verfahren zur Vermessung von Kenngrössen eines Feinbearbeitungswerkzeugs.
EP3511101B1 (fr) * 2018-01-10 2020-09-23 Klingelnberg GmbH Procédé de vérification d'un outil de meulage et dispositif correspondant
JP7186521B2 (ja) * 2018-06-12 2022-12-09 シチズンファインデバイス株式会社 外観検査装置の教師画像生成装置
JP7170234B2 (ja) * 2018-06-28 2022-11-14 パナソニックＩｐマネジメント株式会社 検査装置及び検査方法
WO2020038573A1 (fr) * 2018-08-23 2020-02-27 Abb Schweiz Ag Procédé d'inspection d'un objet cible, système de commande et système d'inspection
JP7260293B2 (ja) * 2018-12-04 2023-04-18 ファナック株式会社 加工品の自動検査システム
JP2020109374A (ja) * 2019-01-07 2020-07-16 日立オートモティブシステムズ株式会社 表面検査装置および表面検査方法
JP7111633B2 (ja) 2019-01-18 2022-08-02 ファナック株式会社 加工品の自動三次元測定検査システム
WO2020183836A1 (fr) * 2019-03-14 2020-09-17 株式会社Ｓｃｒｅｅｎホールディングス Dispositif de support de création de conditions d'inspection, procédé de support de création de conditions d'inspection, programme de support de création de conditions d'inspection et support d'enregistrement
JP7152973B2 (ja) * 2019-03-14 2022-10-13 株式会社Ｓｃｒｅｅｎホールディングス 検査条件作成支援装置、検査条件作成支援方法、検査条件作成支援プログラムおよび記録媒体
JP7152972B2 (ja) * 2019-03-14 2022-10-13 株式会社Ｓｃｒｅｅｎホールディングス 検査条件作成支援装置、検査条件作成支援方法、検査条件作成支援プログラムおよび記録媒体
JP7189828B2 (ja) * 2019-04-12 2022-12-14 日立Astemo株式会社 表面検査装置および表面検査方法
KR102222898B1 (ko) * 2019-06-25 2021-03-05 한국기계연구원 레이저를 이용한 가공품 검사 장치 및 검사 방법
JP2022189274A (ja) * 2021-06-11 2022-12-22 日立Astemo株式会社 外観検査装置、外観検査方法、画像生成装置および画像生成方法

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JP2004037222A (ja) * 2002-07-03 2004-02-05 Matsushita Electric Ind Co Ltd ティーチング方法、電子基板検査方法、および電子基板検査装置
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11156567B2 (en) * 2016-01-29 2021-10-26 Fujifilm Corporation Defect inspection apparatus, method, and program
EP3477244A1 (fr) * 2017-10-26 2019-05-01 United Technologies Corporation Procédé de mesure et de détection de défaut
US10878554B2 (en) 2017-10-26 2020-12-29 United Technologies Corporation Defect detection and measurement method
WO2021212548A1 (fr) * 2020-04-23 2021-10-28 苏州必为智能控制科技有限公司 Appareil d'inspection visuelle 3d
CN113588672A (zh) * 2021-09-29 2021-11-02 武汉绿色塑料包装有限公司 一种塑料制品的质量检测方法

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