WO2012137579A1 - レーザ加工装置 - Google Patents
レーザ加工装置 Download PDFInfo
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- WO2012137579A1 WO2012137579A1 PCT/JP2012/056393 JP2012056393W WO2012137579A1 WO 2012137579 A1 WO2012137579 A1 WO 2012137579A1 JP 2012056393 W JP2012056393 W JP 2012056393W WO 2012137579 A1 WO2012137579 A1 WO 2012137579A1
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- lens
- laser
- temperature difference
- processing
- processing apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/707—Auxiliary equipment for monitoring laser beam transmission optics
Definitions
- the present invention relates to a laser processing apparatus provided with an automatic focal length adjustment apparatus.
- the laser processing apparatus collects laser light to increase the power density and irradiates a workpiece such as a metal or a resin material to perform processing such as drilling or cutting.
- the lens that condenses the laser light is called a processing lens, and when the laser light is transmitted, part of the laser light is absorbed and the temperature rises. This heat is diffused from the central portion of the lens through which the laser light is transmitted toward the outer peripheral portion of the lens. Therefore, a temperature distribution is generated in which the temperature is high in the central portion of the processed lens and relatively low in the outer peripheral portion.
- the refractive index of the material constituting the processed lens has temperature dependence. Therefore, when the processing lens shows a temperature distribution, this temperature distribution becomes a refractive index distribution, and a so-called thermal lens effect is generated.
- the refractive index distribution changes with the time during which the laser beam is transmitted, and converges to a steady value with a predetermined time constant.
- the magnitude of the thermal lens effect also changes and then shows a tendency to saturate to a predetermined magnitude.
- the thermal lens effect changes the focal length of the processing lens and changes the beam diameter of the laser light irradiated to the workpiece. . Furthermore, since the magnitude of the thermal lens effect changes with the lapse of processing time and the beam diameter also changes with the processing time, the processing becomes unstable and causes processing defects.
- a far-infrared radiation thermometer and a thermocouple are used.
- the temperature of the laser irradiation part and the peripheral part of the processing lens is detected, and the distance between the processing lens and the work piece is corrected so as to cancel out the thermal lens effect, and the beam diameter of the laser beam on the work piece Has been proposed (for example, Patent Document 1).
- FIG. 10 is a diagram showing a configuration of a conventional laser processing apparatus described in Patent Document 1.
- FIG. 10 is a diagram showing a configuration of a conventional laser processing apparatus described in Patent Document 1.
- the temperature of the central portion of the processing lens 31 when the laser beam 32 is incident is measured by a far infrared radiation thermometer 34 installed at a position away from the processing lens 31, and the temperature of the side surface of the processing lens 31 is further measured. Is measured with a thermocouple 33.
- These temperature measurement results are input to the microcomputer 36, the necessary lens movement amount is calculated, and the position of the processing lens 31 is adjusted in the optical axis direction of the laser beam 32 by the Z-axis stage 38.
- the processing lens 31 absorbs a part of the laser beam 32 when the laser beam 32 is transmitted, and the absorbed heat flows toward the outer periphery of the processing lens 31. Thereby, the temperature of the center part of the processing lens 31 is high, and the temperature of the outer peripheral part is low. That is, the processing lens 31 has a temperature distribution in the radial direction, and at this time, a phenomenon called a thermal lens occurs.
- the material of the processing lens 31 has a temperature-dependent refractive index, and if there is a temperature distribution, the refractive index distribution exists. In other words, a thermal lens generates a lens action by this refractive index distribution.
- the temperature of the processing lens 31 itself does not become a thermal lens.
- the thermal lens of the processing lens 31 is usually a convex lens component. When a thermal lens is generated, the focal length of the processing lens 31 changes, and the beam diameter irradiated to the processing target changes.
- the temperature distribution of the processing lens 31 approaches a steady value with a certain time constant. For this reason, the size of the thermal lens changes during processing. That is, the diameter of the beam irradiated to the processing object changes during processing, which causes processing to become unstable or cause processing failure.
- thermocouple 33 a far infrared radiation thermometer 34. It was.
- JP-A-1-122688 (page 4, lines 7 to 18)
- thermocouple In a conventional laser processing apparatus provided with such an automatic focal length adjustment device, it is necessary to use two types of temperature sensors, a thermocouple and a radiation thermometer, and in particular, a radiation thermometer is relatively expensive. It is.
- a radiation thermometer is relatively expensive.
- the far infrared radiation thermometer is affected by the scattered light of the CO2 laser from the workpiece and the emitted light due to the temperature of the workpiece. There is a problem that malfunction may occur and stable machining cannot be performed.
- the present invention has been made to solve the above-described problems, and can automatically configure a focal length automatic adjustment device, and thus has an automatic focal position correction function that is inexpensive and free from malfunctions.
- An object of the present invention is to obtain a laser processing apparatus capable of performing stable processing.
- a laser processing apparatus includes a processing lens that focuses laser light on a processing target, a focal length adjustment unit that adjusts a focal length of the processing lens, and a radial direction from the center of the processing lens on the laser beam incident side.
- the contact is provided on the lens surface not irradiated with the laser light, has first and second temperature measurement points having different distances from the center of the processed lens, and detects a temperature difference at the first and second temperature measurement points.
- the size of the thermal lens of the processing lens is calculated from the temperature sensor of the formula and the potential difference corresponding to the temperature difference detected by the temperature sensor, and the laser focused on the processing target according to the calculated thermal lens size
- a control device that calculates a focal length correction amount and outputs a control signal to the focal length adjusting means so that the beam diameter of the light becomes constant.
- the temperature difference between two points on the transparent member installed in the optical path of the laser beam is detected by the contact-type temperature difference sensor, and based on the detection result of the temperature difference.
- the focus position is corrected, and it is inexpensive because an expensive far-infrared radiation thermometer is not used. Also, the influence of scattered light from the laser, reflected light from the workpiece, and radiation due to the temperature of the workpiece.
- accurate temperature can be measured under constant conditions regardless of the lens position.
- the size of the thermal lens based on the measured temperature
- thermocouple which is a temperature sensor of the laser processing apparatus which concerns on Embodiment 1 of this invention.
- connection method of the several thermocouple of the laser processing apparatus which concerns on Embodiment 1 of this invention.
- connection method of the several thermocouple of the laser processing apparatus which concerns on Embodiment 1 of this invention.
- mold temperature difference sensor of the laser processing apparatus which concerns on Embodiment 4 of this invention. It is the elements on larger scale of the thermopile type
- Embodiment 1 A preferred embodiment of a laser processing apparatus according to the present invention will be described below with reference to the drawings.
- the same reference numerals denote the same or corresponding parts.
- FIG. 1 is a partial cross-sectional view showing the configuration of the laser machining apparatus according to Embodiment 1 of the present invention.
- FIG. 1 shows the vicinity of a processing head of a laser processing apparatus, which is a cross section at the center of the processing lens, a laser oscillator that generates laser light included in the laser processing apparatus, an optical path system that guides laser light to the processing head, and the like Is omitted and not shown.
- a laser processing apparatus is a processing lens that is a processing head 1 having an outer shape such as a cylinder or a polygonal column, and a circular convex lens that focuses laser light 2 on a processing target 9.
- a lens holder 4 whose outer shape holding the processing lens 3 is cylindrical or polygonal, a temperature sensor 5, a lens driving device 6 that moves the lens holder 4 in the optical axis direction of the laser light 2, and a temperature
- a computer 7 for calculating the size of the thermal lens of the processing lens 3 from the potential difference corresponding to the temperature difference detected by the sensor 5, and a lens driving device for calculating the lens position correction amount according to the size of the thermal lens.
- 6 is provided with a control computer 8 for outputting a control signal.
- the calculation computer 7 and the control computer 8 may be a single computer (control device) integrated with both functions.
- FIG. 2 is an enlarged view showing the configuration in the vicinity of the processing lens of the laser processing apparatus according to Embodiment 1 of the present invention.
- the lens holder 4 includes a cooling water passage 10 such as a donut shape so as to surround the entire periphery of the laser light 2, and ends on both sides (the side on which the laser light 2 enters and the side on which the laser light 2 enters) of the processing lens 3.
- a shielding plate 13 such as a donut shape is provided so as to surround the entire periphery of the laser beam 2 to oppose the part.
- a thermocouple hot junction 11 as a temperature sensor 5 and a thermocouple cold junction 12 are provided on the upper surface of the processed lens 3.
- FIG. 3 is a diagram showing a method of connecting a thermocouple that is a temperature sensor of the laser processing apparatus according to Embodiment 1 of the present invention.
- thermocouple element 14 is connected between the hot junction 11 and the cold junction 12 of the thermocouple, and a plus thermocouple element 15 is connected to the hot junction 11 and the cold junction 12, respectively.
- FIGS. 4 and 5 are diagrams showing a method of connecting a plurality of thermocouples of the laser machining apparatus according to Embodiment 1 of the present invention.
- FIG. 4A and 4B are plan (front) views of the processing lens 3 viewed from the axial direction on which the laser light 2 is incident.
- FIG. 4A is a diagram in which a plurality (four examples) of thermocouples are connected in parallel. The case where the thermocouple of 8 examples) is connected in series is shown, respectively.
- parallel connection by averaging the potential difference (temperature difference) detected by each thermocouple, variation in heat conduction can be suppressed and accuracy can be improved.
- the detection accuracy can be increased by the number of thermocouples, which is useful when the potential difference (temperature difference) detected by one thermocouple is very small.
- FIG. 5 also shows a case where a plurality of thermocouples are connected in series.
- FIG. 4 shows an example in which the hot junction 11 and the cold junction 12 of the thermocouple are installed on a straight line along the radial direction from the center of the processing lens 3, but are installed on a straight line as shown in FIG. It is not necessary to provide another cold junction 12, and it is also effective to use a normal signal line 22 for wiring from the processing lens 3 to the outside.
- FIG. 6 is a diagram showing the temperature distribution in the radial direction of the processing lens of the laser processing apparatus according to Embodiment 1 of the present invention.
- the irradiation time of the laser light 2 on the processing lens 3 is used as a parameter, and the irradiation time becomes longer in the order of irradiation times 1, 2, and 3 shown in FIG.
- FIG. 7 is a diagram showing a change with time of the temperature difference between the hot junction and the cold junction of the thermocouple when the processing lens of the laser processing apparatus according to Embodiment 1 of the present invention is irradiated with laser light.
- a laser beam 2 is guided from a laser oscillator (not shown) to the machining head 1 via an optical system.
- the laser beam 2 incident on the processing head 1 enters the processing lens 3 in the processing head 1, and then is focused and irradiated on the processing target 9.
- Processing object 9 is, for example, a metal such as mild steel or stainless steel.
- the machining head 1 is cut in parallel with the metal surface (usually in the horizontal direction) or by moving the metal of the workpiece 9.
- the laser used here is, for example, a CO2 laser, a YAG laser, a fiber laser, a semiconductor laser, or the like.
- the processing lens 3 absorbs a part of the laser light 2 when the laser light 2 is transmitted, and the absorbed heat flows toward the lens holder 4 on the outer periphery of the processing lens 3.
- the processed lens 3 has a temperature distribution as shown in FIG. 6 in the radial direction, and the phenomenon called the thermal lens as described above occurs. Further, the temperature distribution depends on the time during which the laser beam 2 is irradiated onto the processing lens 3, and as the irradiation time becomes longer, the temperature difference in the radial direction of the processing lens 3 increases, and finally a certain temperature distribution. Become a shape.
- thermocouple Since the processing lens 3 has a temperature distribution in the radial direction, a temperature difference as shown in FIG. 7 occurs between the hot junction 11 and the cold junction 12 of the thermocouple according to the irradiation time of the laser light 2. A potential difference is generated in the thermocouple. From this potential difference, the calculation computer 7 calculates the size of the thermal lens. In accordance with the size of the thermal lens obtained by the computer 7 for calculation, the computer 8 for control controls the necessary lens position correction amount so that the laser beam 2 has a stable and constant beam diameter with respect to the workpiece 9. And a control signal is sent to the lens driving device 6.
- the size of the thermal lens is referred to in publicly known literature 1 (for example, “The Physics and Technology of Laser Resonators”, DR Hall, P. E. Jackson, ISBN: 0-85274-117-0, p181). Thus, it is expressed by the following formula (1).
- Equation (1) f is the focal length of the thermal lens, ⁇ is the thermal conductivity (physical property value), AI 0 is the unit time absorbed by the processed lens 3, and the amount of heat per unit area, A is the absorption coefficient, I 0 is the beam intensity, dn / dT is the refractive index temperature dependency (physical property value), and T is the temperature.
- this is a value obtained by multiplying Equation (1) by a coefficient corresponding to the beam profile.
- the Fourier law in the one-dimensional cylindrical coordinate system is applied, and the following equation (2) is obtained.
- ⁇ is the thermal conductivity (physical property value).
- FIG. 6 shows the time dependence of the temperature distribution in the radial direction of the processed lens 3. That is, if the temperature difference between two points and the change with time are known, the amount of heat incident on the processing lens 3 and the change with time can be known in principle. The amount of incident heat is obtained by multiplying the output of the laser light incident on the processing lens 3 by the absorptivity of the processing lens 3, and the size of the thermal lens can be found from equation (1).
- the calculation computer 7 may calculate the time dependence of the temperature distribution shown in FIG. 6 in real time, or have a pre-calculated value or a pre-measured value as a database, and the temperature difference measured in real time. The amount of incident heat, that is, the size of the thermal lens may be obtained in comparison with.
- the lens position correction amount dZ is expressed by the following equation (3) from the focal length f 0 of the processing lens 3 and the focal length f of the thermal lens of equation (1).
- the lens driving device 6 may drive the lens holder 4 using a stepping motor and a ball screw as referred to in publicly known document 2 (for example, FIG. 3 of the international patent application “WO2009 / 122758 A1”).
- the ball screw rotates by rotating the stepping motor, and the fixed plate moves up and down along the guide rod.
- a necessary stepping motor rotation amount is obtained from the lens position correction amount calculated by the control computer 8 and a control signal for rotating the stepping motor by the necessary amount is sent to the lens driving device 6.
- the position of the processing lens 3 can be corrected according to the size of the thermal lens.
- the size of the thermal lens also changes with time. For this reason, by performing these controls in real time during processing, the laser beam 2 is irradiated to the processing target 9 with a stable and constant beam diameter, thereby realizing stable processing.
- thermocouple it is important that the position where the hot junction 11 and the cold junction 12 of the thermocouple are attached is in the same individual with the same material and no contact surface.
- the Fourier law in the heat conduction theory can be used as it is to obtain the amount of heat incident on the processing lens 3 from the temperature difference between the two points.
- the thermal conductivity in the Fourier law formula is a physical property value, and an accurate value is known.
- the thermal resistance of the contact is not a physical property value but a value that varies greatly depending on the state of the contact surface, it is difficult to obtain an accurate amount of heat. Further, since heat flows in the radial direction of the processing lens 3, it is desirable that the positions of the hot junction 11 and the cold junction 12 are arranged in a straight line from the center of the processing lens 3 along the radial direction.
- thermocouple connection method for obtaining the temperature difference is connected in series as shown in FIG. 3 in order to directly convert the temperature difference into a potential difference.
- the minus side and plus side of the thermocouple wires 14 and 15 shown in FIG. 3 may be reversed.
- the temperature sensor 5 may be a platinum resistance thermometer other than a thermocouple, a thermistor, or the like.
- the hot junction 11 and the cold junction 12 which are temperature measurement points are installed at positions where the laser beam 2 is not irradiated. However, as shown in FIG. 2, a shielding plate 13 is provided to scatter the laser beam 2 and the processing object 9. The reflected light from the light is prevented from entering the temperature measurement point.
- the diameter of the beam incident on the processing lens 3 is usually about ⁇ 20 mm to ⁇ 30 mm in a CO2 laser, for example. For this reason, it is necessary to attach the hot junction 11 of the thermocouple at a radius of 10 mm or more from the center of the lens. Since the cold junction 12 of the thermocouple needs to be attached to the outside, the diameter of the processed lens 3 needs to be at least about ⁇ 2 inches to ⁇ 2.5 inches. If the amount of heat absorbed by the processing lens 3 by the laser light 2 incident on the processing lens 3 flows to other parts before passing through the hot junction 11 and the cold junction 12, the heat quantity due to the temperature difference cannot be measured accurately.
- the shielding plate 13 should be separated from the processed lens 3 by 1 mm or more. However, it is only necessary to prevent heat from flowing elsewhere by using a heat insulating material or the like.
- the thermal conductivity of ZnSe used as the processing lens 3 with a CO2 laser is 18 W / (m ⁇ K).
- a heat insulating material having a thermal conductivity of 0.9 W / (m ⁇ K) or less that is 1/20 of ZnSe may be used.
- an error of about 5% occurs in the size of the thermal lens measured by the thermocouple and calculated by the computer 7 for calculation. However, if the error is about 5%, sufficiently stable processing is possible.
- thermocouples By providing one or a plurality of thermocouples on the processing lens 3, the size of the thermal lens is obtained from the temperature difference between the two locations, and the processing lens position is controlled so as to correct this during processing. Stable processing regardless of size is possible.
- the relative position between the temperature measurement point and the processing lens 3 does not change, so that an accurate temperature is always measured under a constant condition regardless of the position of the processing lens 3. Therefore, an automatic focal length adjusting device having a simple configuration can be obtained at a low cost.
- FIG. 8 is a partial cross-sectional view showing the configuration of the laser machining apparatus according to Embodiment 2 of the present invention.
- FIG. 8 shows a processing head portion of the laser processing apparatus, in which a part of a laser oscillator included in the laser processing apparatus that generates laser light and an optical path system that guides the laser light to the processing head is omitted. Absent.
- the laser processing apparatus is provided with a variable curvature mirror and a mirror driving apparatus 16 for changing the curvature instead of the lens driving apparatus 6.
- the state of the mirror which changed the curvature is shown with the broken line.
- the laser light 2 is incident on the variable curvature mirror 16 through an optical system from a laser oscillator (not shown), and then guided to the machining head 1.
- the laser beam 2 incident on the processing head 1 enters the processing lens 3 in the processing head 1, and then is focused and irradiated on the processing target 9.
- Processing object 9 is, for example, a metal such as mild steel or stainless steel.
- the laser used here is, for example, a CO2 laser, a YAG laser, a fiber laser, a semiconductor laser, or the like.
- the processing lens 3 absorbs a part of the laser beam when the laser beam 2 is transmitted, and the absorbed heat flows toward the lens holder 4 on the outer periphery of the processing lens, thereby generating a thermal lens.
- the temperature sensor 5 is as shown in FIG. 3 as in the first embodiment.
- a temperature difference is generated between the hot junction 11 and the cold junction 12 of the thermocouple, and the computer 7 for calculation calculates the size of the thermal lens from the potential difference of the thermocouple at this time.
- the control computer 8 sets the necessary curvature change amount so that the laser beam 2 has a stable and constant beam diameter with respect to the workpiece 9. Calculate and send a control signal to the mirror drive device of the variable curvature mirror 16.
- a control signal obtained by converting the curvature change amount calculated by the control computer 8 in any form is sent to the mirror driving device 16, and the mirror driving device 16 causes the curvature variable mirror 16 to be changed based on the control signal.
- the mirror driving device 16 may deform the mirror by the pressure of air as referred to in publicly known document 3 (for example, FIG. 2 of Japanese Patent No. 3138613).
- the curvature of the mirror is varied by sending air to the air jacket arranged on the back of the variable curvature mirror by the control device and applying pressure.
- the pressure of air is adjusted by a solenoid valve, and the control of the solenoid valve is performed by a control device.
- the mirror driving device 16 having the same configuration as that described above can be used.
- a necessary curvature change amount is calculated by the control computer 8 and a control signal is sent to the mirror driving device 16 so as to obtain a desired curvature change.
- the mirror driving device 16 sends air to the back surface of the mirror and applies pressure to change the mirror curvature, as in the above-mentioned known document 3.
- the curvature variable mirror 16 functions to change the wavefront curvature of the laser light 2 when entering the processing lens 3 and to correct the focus change caused by the thermal lens.
- thermocouples By providing one or a plurality of thermocouples on the processing lens 3, the size of the thermal lens is obtained from the temperature difference between the two locations, and a variable curvature mirror curvature control is performed to correct this during processing. Stable processing is possible regardless of the size.
- the relative position between the temperature measurement point and the processing lens 3 does not change. Therefore, the accurate temperature is always measured under a constant condition regardless of the position of the processing lens 3. Therefore, an automatic focal length adjusting device having a simple configuration can be obtained at a low cost.
- FIG. 9 is a partial cross-sectional view showing the configuration of the laser machining apparatus according to Embodiment 3 of the present invention.
- FIG. 9 shows the vicinity of the processing head of the laser processing apparatus, and a part of the laser oscillator included in the laser processing apparatus that generates the laser light and the optical path system that guides the laser light to the processing head is omitted. Absent.
- a laser processing apparatus uses, instead of the processing lens 3, a processing lens 3, a circular window 3A of the same material and a parabolic mirror or toroidal mirror 18, and a lens.
- a window holder 4A that holds the window 3A and a folding mirror 20 are provided.
- the window 3A is provided immediately after the parabolic mirror or toroidal mirror 18, but may be provided immediately before.
- a parabolic mirror or toroidal mirror 18 may be used in addition to the processing lens 3 in order to focus the laser beam 2 on the processing target 9. Even in this case, a window 3A for passing the laser beam 2 through the machining head 1 may be provided. The window 3A also generates a thermal lens as shown in the first embodiment.
- a laser beam 2 is incident on a variable curvature mirror 16 via an optical system from a laser oscillator (not shown), and then passes through a window 3A via a folding mirror 20 and is processed by a machining head. Led to 1.
- the laser beam 2 incident on the machining head 1 is incident on a parabolic mirror or toroidal mirror 18 in the machining head 1, and then condensed and irradiated on the workpiece 9.
- Processing object 9 is, for example, a metal such as mild steel or stainless steel.
- the laser used here is, for example, a CO2 laser, a YAG laser, a fiber laser, a semiconductor laser, or the like.
- the window 3A absorbs part of the laser beam 2 when the laser beam 2 is transmitted, and the absorbed heat flows toward the window holder 4A on the outer periphery of the window 3A, thereby generating a thermal lens.
- the temperature sensor 5 is as shown in FIG. 3 as in the first embodiment.
- a temperature difference is generated between the hot junction 11 and the cold junction 12 of the thermocouple, and the computer 7 for calculation calculates the size of the thermal lens from the potential difference of the thermocouple at this time.
- the control computer 8 sets the necessary curvature change amount so that the laser beam 2 has a stable and constant beam diameter with respect to the workpiece 9. Calculate and send a control signal to the mirror drive device of the variable curvature mirror 16.
- variable curvature mirror 16 functions to change the wavefront curvature of the laser light 2 when entering the paraboloidal mirror or toroidal mirror 18 and correct the focus change caused by the thermal lens.
- the size of the thermal lens is obtained from the temperature difference between the two locations, and the curvature variable mirror curvature control is performed so as to correct this during processing. Stable processing regardless of size is possible.
- FIG. 1 A laser processing apparatus according to Embodiment 4 of the present invention will be described with reference to FIGS. 11 and 12 together with FIGS.
- the configuration of the laser machining apparatus according to Embodiment 4 of the present invention is as shown in FIG. 1 (the machining head 1 and the machining object 9 are cross sections).
- the peripheral structure of the processing lens 3 installed in the processing head 1 of the laser processing apparatus according to Embodiment 4 of the present invention is as follows.
- the laser is a CO2 laser
- the temperature sensor 5 is a thermopile type temperature difference sensor.
- the machining head 1 collects the laser beam 2 emitted from a laser light source (not shown) and irradiates the workpiece 9 and is arranged at a constant interval from the workpiece 9.
- the processing head 1 includes a processing lens 3, a lens holder 4, a thermopile type temperature difference sensor 5 (details will be described later), and a lens driving device 6. .
- the processing lens 3 is installed in the optical path of the laser light 2 and condenses the laser light 2, and a circular one-convex lens is used.
- thermopile type temperature difference sensor 5 An insulating film on which a thermopile type temperature difference sensor 5 is formed is attached to the surface of the processing lens 3 on the laser beam 2 emission side, and the processing lens 3 is held by the lens holder 4. Further, the lens holder 4 is attached to a lens driving device 6 that moves the processing lens 3 in the direction of the optical axis of the laser light 2 (indicated by an arrow).
- the control means for correcting the focal position based on the temperature difference detected by the thermopile type temperature difference sensor 5 includes a lens driving device 6 and a computer 7 for calculating the lens movement amount based on the detection result of the temperature difference.
- a control computer 8 that drives the lens driving device 6 based on the calculation result of the lens movement amount is provided.
- the lens holder 4 has a cylindrical shape and is provided with an annular cooling water channel 10 so as to surround the entire periphery of the laser beam 2. A fixed gap is maintained above and below the processing lens 3 from the processing lens 3 to be covered. An annular light shielding plate 13 is provided so that the laser beam 2 reflected on the surface of the workpiece hits the thermopile type temperature difference sensor 5 and does not cause an error in the value of the temperature difference.
- the lens holder 4 is a cylindrical one, but a lens holder 4 such as a polygonal cylinder can be used.
- thermopile type temperature difference sensor 5 is used as a contact type temperature difference sensor. Any sensor can be used as long as it can detect a temperature difference between two points on the surface of 3.
- thermocouple in which two kinds of dissimilar metals are joined, two thermocouples are attached to two points on the surface of the processing lens at different distances from the center of the processing lens 3, and the temperature difference is measured. It may be calculated.
- two platinum resistance thermometers may be attached to two points on the surface of the processing lens having different distances from the center of the processing lens 3, and the temperature difference may be calculated by individually measuring the temperature.
- a thermocouple and a platinum resistance thermometer may be used one by one and attached to two points on the surface of the processed lens 3 having different distances from the center of the processed lens 3 to measure the temperature, and the temperature difference may be obtained.
- the thermopile type temperature difference sensor 5 used in the fourth embodiment has high detection accuracy and is suitable for detecting the temperature difference on the surface of the processing lens 3.
- a single-convex lens is used as the processing lens 3.
- the laser beam 2 can be condensed on the workpiece 9, and a biconvex lens can also be used.
- the insulating film on which the thermopile type temperature difference sensor 5 is formed is pasted on the surface of the processing lens 3 on the emission side of the laser light 2. If the temperature distribution change of the processing lens 3 due to the laser light 2 can be detected, It is also possible to use the processed lens 3 by attaching it to the surface on the incident side of the laser light 2.
- FIG. 11 is a plan view of a thermopile type temperature difference sensor 5 of a laser processing apparatus according to Embodiment 4 of the present invention
- FIG. 12 is a thermopile type temperature difference sensor 5 of a laser processing apparatus according to Embodiment 4 of the present invention.
- FIG. 11 shows the thermopile type temperature difference sensor 5 of the laser processing apparatus of the present invention observed from the direction of the optical axis from which the laser light 2 is emitted.
- a thermopile type temperature difference sensor 5 is formed by alternately connecting a plurality of thermocouples of two different kinds of metals in series on an annular polyimide film 44 to form a continuous thermocouple.
- Detection terminals 45 and 46 are formed at both ends.
- the polyimide film 44 forming the thermopile type temperature difference sensor 5 is adhered and pasted to the processing lens 3.
- the temperature difference of the thermopile type temperature difference sensor 5 is detected by detecting a potential difference between the detection terminals 45 and 46.
- thermocouples 47 and 48 are formed on the polyimide film 44 using two kinds of different metals, and are electrically connected at their intersections to form a thermocouple. Forming. These thermocouples are arranged so that the thermocouples are double circles. Since the laser beam 2 is irradiated in the vicinity of the center of the processing lens 3, the central portion of the processing lens 3 becomes high temperature, and the outer peripheral portion of the processing lens 3 becomes relatively low temperature. The thermocouple constituting the circle functions as the hot junction 11, and the thermocouple constituting the outer circle functions as the cold junction 12.
- the two kinds of dissimilar metals are copper and constantan (constantin: alloy consisting of 55% copper and 45% Ni), and after deposition, patterning is performed using a photoengraving method. 5 mm metal wirings 47 and 48 are formed. Two kinds of dissimilar metals are overlapped, and the contacted portion is a thermocouple, and there are 32 hot junctions 11 located on the center side of the processing lens 3 and having a relatively high temperature, located outside the processing lens 3 and relatively 31 cold junctions 12 having a low temperature are formed.
- the radius of the circle in which the hot junctions 11 are arranged is 20 mm
- the radius of the circle in which the cold junctions 12 are arranged is 25 mm
- the distance between the hot junction 11 and the cold junction 12 in the radial direction of the circle is 5 mm.
- the polyimide film 44 has a thickness of 50 ⁇ m.
- the laser beam 2 is irradiated to the processing lens 3 to which the polyimide film 44 on which the thermopile type temperature difference sensor 5 in which the hot junctions 11 and the cold junctions 12 are alternately arranged in series is attached, and the plurality of hot junctions 11 and the plurality of hot junctions 11 are arranged.
- the potential difference between the detection terminals 45 and 46 at both ends where the cold junctions 12 are arranged in series is detected.
- a potential difference due to the thermoelectric effect is detected, and further, each of the hot junction 11 and the cold junction 12 is one temperature difference sensor.
- the potential difference due to the thermoelectric effect is integrated, so even a slight temperature difference can be accurately detected as a large potential difference.
- thermocouples copper and constantan are used for thermocouples.
- the metal materials used may be different types of metals, and are generally used as thermocouple metal materials such as chromel / alumel, iron / iron. Constantan, platinum rhodium / platinum, or the like can also be used.
- the width of the metal wirings 47 and 48 is not particularly limited. From the viewpoint of wiring routing when a large number of hot junctions 11 and cold junctions 12 are arranged, wiring design is easy. It becomes.
- the film thickness of the two different types of metal wirings 47 and 48 is set to 0.5 ⁇ m, it is not particularly limited to this film thickness, and can be formed by ordinary vapor deposition, or defective such as disconnection. Any film thickness can be used if it does not occur.
- the hot junction 11 disposed on the center side of the processing lens 3 of the thermopile type temperature difference sensor 5 is set at a position 20 mm from the center of the processing lens.
- the diameter of the beam incident on the processing lens 3 is usually about 10 mm to 15 mm.
- the radius of the processing lens 3 is required to be at least about 25 mm to 30 mm.
- thermopile type temperature difference sensor 5 The position where the hot junction 11 and the cold junction 12 of the thermopile type temperature difference sensor 5 are attached needs to be in the same individual with the same material and no contact surface between them. Within the same individual, the Fourier law in the heat conduction theory can be applied, and the amount of heat given to the processing lens 3 can be calculated from the temperature difference detected by the thermopile temperature sensor 5. When there is a contact surface between the hot junction 11 and the cold junction 12, the thermal resistance value of the contact varies greatly depending on the contact state, so that the value of the amount of heat cannot be accurately calculated.
- the number of the hot junctions 11 and the cold junctions 12 and the radial distance of the hot junctions 11 and the cold junctions 12 on the processing lens 3 are not particularly limited, and the temperature difference to be detected, the sensitivity of the measuring instrument to detect the potential difference, etc. Can be determined based on In general, the radial distance of the processing lens 3 between the hot junction 11 and the cold junction 12 is 10 mm from the viewpoint of arranging the diameter of the processing lens 3 to be used and the laser beam 2 so as not to be shielded by the thermopile temperature difference sensor 5. The following is preferable. Further, the number of the hot junctions 11 and the cold junctions 12 may be one or more, and the detection sensitivity of the temperature difference can be increased as the number of the hot junctions 11 and the cold junctions 12 is increased.
- the positional relationship between the hot junction 11 and the cold junction 12 is not particularly limited, but when the adjacent hot junction 11 and the cold junction 12 are set in substantially the same direction from the center of the machining lens 3, the surface of the machining lens 3. It is possible to detect a more accurate temperature difference without being affected by the distribution of thermal conductivity in the interior. More specifically, by forming the adjacent hot junction 11 and cold junction 12 within a central angle of 60 ° from the center of the processing lens, a more accurate temperature difference can be detected.
- the thickness of the polyimide film 44 is not particularly limited, and any insulating film can be used as long as it is insulative and can form the thermopile type temperature difference sensor 5 on the surface.
- a polyimide film 44 having a thickness of about 10 to 125 ⁇ m can also be applied.
- the material is not limited to polyimide, and is made of an insulating circuit board made of thin resin and fiber having a thickness of about 0.3 mm to 2 mm and a polyimide film having a thickness of about 0.1 mm to 0.3 mm.
- An FPC board can also be used.
- the hot junction 11 and the cold junction 12 of the thermopile type temperature difference sensor 5 are installed at a position where the laser beam 2 is not irradiated. Furthermore, as shown in FIG. 2, if the light shielding plate 13 is provided to prevent the scattered light of the laser light 2, the reflected light from the processing object 9, and the infrared radiation light from entering the temperature detection point, more accurate. Suitable for temperature difference detection. At this time, in order to eliminate the influence of radiant heat from the light shielding plate 13 to the thermopile type temperature difference sensor 5, it is preferable that the light shielding plate 13 is separated from the processing lens 3 by 1 mm or more.
- the polyimide film 44 on which the thermopile type temperature difference sensor 5 is formed is attached to the processed lens 3 with an adhesive, but the method for attaching the polyimide film 44 to the processed lens 3 is as follows.
- the present invention is not limited to this, and any method can be used as long as it can adhere the polyimide film 44 on which the thermopile type temperature difference sensor 5 is formed on the processing lens 3.
- the heat insulating material having low thermal conductivity such as a fluororesin.
- the heat insulating material is processed in an annular shape and attached to the lens holder 4, and the thermopile temperature is applied with the annular insulating material using a force that sandwiches and fixes the peripheral portion of the processed lens 3 with the lens holder 4.
- the polyimide film 44 on which the difference sensor 5 is formed may be pressed onto the processing lens 3.
- the temperature difference detected when the heat absorbed by the processing lens 3 by the laser light 2 incident on the processing lens 3 flows to other parts before passing through the hot junction 11 and the cold junction 12 is the temperature difference of the thermal lens of the processing lens 3.
- the status may not be reflected. For this reason, it is necessary that there is nothing in contact with the processing lens 3 other than the hot junction 11 of the thermocouple between the center of the processing lens 3 and the cold junction 12. Only on the outer peripheral side, the processed lens 3 is held in the optical path of the laser beam 2 by the lens holder 4, and the polyimide film 44 on which the thermopile type temperature difference sensor 5 is formed is pasted on the processed lens 3 with an adhesive. Can be achieved.
- thermopile type temperature difference sensor 5 When the thermopile type temperature difference sensor 5 is pressed and fixed to the processing lens 3 with a heat insulating material, there is a possibility that the heat insulating material contacts between the center of the processing lens 3 and the cold junction 12. On the other hand, in order to ensure sufficiently stable processing characteristics, it is necessary to make the error of the temperature difference value 5% or less. Therefore, even when the heat insulating material contacts the surface of the processed lens 3 between the center of the processed lens 3 and the cold junction 12, the temperature difference detection error is set to 5% or less to ensure stable processing characteristics.
- the outer peripheral portion of the processing lens 3 positioned outside the thermopile type temperature difference sensor 5, the contact area of the lens holder 4, and the contact area of the heat insulating material are the same, and the heat insulating material that presses the thermopile type temperature difference sensor 5 is used.
- the thermal conductivity of zinc selenide (ZnSe), which is a general material of the processed lens 3, is 5% or less of the thermal conductivity of 18 W / (m ⁇ K), that is, 0.9 W / It is necessary to set it to (m ⁇ K) or less.
- thermocouples Easier than connecting multiple thermocouples in series using ordinary thermocouple wires by forming the thermocouple into a thin film using a film deposition method such as vapor deposition of two different metal wires
- a film deposition method such as vapor deposition of two different metal wires
- thermocouples can be formed and bonded at high density, a highly sensitive thermopile type temperature difference sensor 5 can be obtained.
- FIG. 1 The distance dependency from the center of the processing lens 3 of the processing lens temperature of the laser processing apparatus according to Embodiment 4 of the present invention is as shown in FIG. Further, the laser irradiation time dependence of the temperature difference using the thermopile type temperature difference sensor 5 of the laser processing apparatus according to Embodiment 4 of the present invention is as shown in FIG.
- Laser light 2 emitted from a laser light source enters the processing lens 3 as shown in FIG. 1, is condensed, and is irradiated onto the workpiece 9.
- the processing lens 3 absorbs a part of the laser beam 2 at the center portion and the temperature becomes high, and the outer peripheral portion is in contact with and held by the lens holder 4. Therefore, as shown in FIG. 6, the temperature distribution in the radial direction from the center of the processed lens 3 is high in the central portion and relatively low in the outer peripheral portion.
- the irradiation time is increased from the irradiation time 1 to the irradiation time 3
- the temperature difference between the central portion and the outer peripheral portion of the processing lens 3 increases, and although not shown in FIG.
- the temperature difference between the central portion and the outer peripheral portion of the processed lens 3 is also constant.
- the temperature difference between the hot junction 11 and the cold junction 12 using the thermopile type temperature difference sensor 5 on the processing lens 3 gradually increases with the irradiation time of the laser beam 2 and gradually becomes a constant value. Shows a tendency to saturate.
- the calculation computer 7 selects the lens position correction amount and outputs it to the control computer 8.
- the control computer 8 drives the lens driving device 6 based on the value of the lens position correction amount, and moves the position of the processing lens 3 along the optical axis direction of the laser beam 2 (the arrow direction in FIG. 1). 3 position is corrected.
- the beam diameter on the workpiece can be kept constant, and stable laser processing can be performed.
- the temperature difference on the processing lens 3 changes depending on the irradiation time of the laser beam 2, and therefore, by performing this control at high speed in real time, a constant beam diameter that is stable on the workpiece 9 is obtained. Therefore, stable processing can be performed.
- thermopile type temperature difference sensor 5 since the polyimide film 44 on which the thermopile type temperature difference sensor 5 is formed is attached to the processing lens 3, the relative position between the temperature difference detection position and the processing lens 3 does not change. Therefore, unlike Patent Document 1, an accurate temperature difference can be detected under a constant condition regardless of the position of the processing lens 3, and stable processing can be realized.
- the far infrared radiation thermometer is not used, so that it is inexpensive, and the scattered light of the laser beam 2, the reflected light from the workpiece 9, and the workpiece are processed. Stable processing can be performed without malfunction due to the influence of radiant light or the like due to the temperature of the object 9.
- an optimum lens position correction amount is selected from the lens position correction amounts stored in the calculation computer 7 in accordance with the detected temperature difference on the processing lens 3, and the value is controlled.
- the means for obtaining the optimum lens position correction amount is not particularly limited, and the focal length change of the laser light 2 corresponding to the temperature difference change of the processing lens 3 is canceled out. Any method can be used as long as it can determine the lens position correction amount.
- the size of the thermal lens is calculated by the calculation computer 7 using physical constants such as the detected temperature difference and thermal conductivity, and further, the focal length change of the laser light 2 due to the influence of the thermal lens is canceled out.
- a control system that calculates the lens position correction amount and outputs the value to the control computer 8 can also be used.
- FIG. 13 is a partial cross-sectional view showing the configuration of the laser machining apparatus according to Embodiment 5 of the present invention.
- FIG. 13 shows a partial cross-sectional view of the machining head 1 that is installed at a certain distance from the workpiece 9 and emits the focused laser beam.
- the configuration of the laser processing apparatus is basically the same as that of the laser processing apparatus shown in the above-described fourth embodiment, and differs in the configuration of a thermopile type temperature difference sensor 5A described later formed on the processing lens 3. As a result, the output wiring connected to the computer 7 for calculation from the thermopile type temperature difference sensor 5A is different.
- FIG. 14 is a view showing a thermopile type temperature difference sensor 5A of a laser processing apparatus according to Embodiment 5 of the present invention.
- thermopile type temperature difference sensor 5 ⁇ / b> A has a plurality of thermocouples made of two different kinds of metals alternately and continuously in series on an annular polyimide film 44. They are common in that they are arranged in
- thermopile type temperature difference sensor 5 As shown in FIG. 14, an annularly arranged thermocouple is divided into four regions, and detections provided at both ends of each continuous thermocouple. The potential difference between the detection terminals 50 and 51, the detection terminals 52 and 53, the detection terminals 54 and 55, and the detection terminals 56 and 57 is detected, and between the hot junction 11 and the cold junction 12 for each of the four regions. Detect temperature difference.
- the control method of the focal position is basically the same as that of the fourth embodiment.
- the temperature of the processing lens 3 is changed by the laser beam 2, and the hot junction 11 is formed by the thermopile type temperature difference sensor 5A formed on the processing lens 3. And the temperature difference between the cold junction 12 is detected.
- the calculation computer 7 obtains a processing lens position correction value that cancels the focal length change of the laser light 2 and outputs it to the control computer 8, and the control computer 8 drives the lens driving device 6. Then, the processing lens position is corrected so that the laser beam diameter on the workpiece 9 is constant.
- thermopile type temperature difference sensor 5A detects the temperature difference between the hot junction 11 and the cold junction 12 for each of the four regions, and outputs each detection result to the computer 7 for calculation.
- the four values are the same value, and the processing lens position correction value can be obtained by a calculation computer based on the detection result.
- the detected four temperature differences have different values.
- the amount of deviation of the laser light 2 is calculated using the computer 7 for calculation, and the mirror in the optical path is aligned using an electric motor or the like, or the processing head 1
- the operator can be notified by an alarm or the like that the laser beam 2 is deviated from the center of the processing lens 3 to prompt adjustment.
- thermopile type temperature difference sensor 5A divided into four regions is used.
- the number of divisions is not limited to four, and two or more regions can be used.
- the deviation of the laser beam 2 can be calculated and applied.
- the number of the hot junctions 11 and the cold junctions 12 in each divided area is not particularly limited, and these numbers affect the accuracy of detecting the temperature difference. It suffices if it can be detected, and at least one of each is sufficient.
- thermopile type temperature difference sensor 5A since the polyimide film 44 on which the thermopile type temperature difference sensor 5A is formed is attached to the processing lens 3, the temperature difference detection position and the relative position of the processing lens 3 do not change. Therefore, unlike Patent Document 1, an accurate temperature difference can be detected under constant conditions regardless of the position of the processing lens 3, and stable processing can be realized.
- the far infrared radiation thermometer is not used, so that it is inexpensive, and the scattered light of the laser beam 2, the reflected light from the workpiece 9, and the workpiece are processed. There is no malfunction due to the influence of the radiated light due to the temperature of the object 9, and stable processing can be performed.
- FIG. 6 A laser processing apparatus according to Embodiment 6 of the present invention will be described with reference to FIG. The configuration (partial cross section) of the laser processing apparatus according to Embodiment 6 of the present invention is as shown in FIG.
- the configuration of the processing head 1 is basically the same as that of the laser processing apparatus shown in the fourth embodiment, and does not include the lens driving device 6 shown in FIG. 1, and the laser light 2 from a laser light source (not shown) is received. The difference is that the light is incident on the machining head 1 through a variable curvature mirror 16 having a curvature adjusting device connected to the control computer 8.
- the curvature variable mirror 16 can change the curvature by changing the mirror surface between a solid line and a broken line as shown by an arrow in FIG.
- the control computer 8 drives the curvature adjusting device of the variable curvature mirror 16 to adjust the curvature of the variable curvature mirror 16.
- the processing lens 3 disposed in the optical path of the laser beam 2 changes its temperature distribution by the laser beam 2, and a temperature difference between the hot junction 11 and the cold junction 12 is detected by the thermopile type temperature difference sensor 5.
- the curvature variable mirror 16, the calculation computer 7, and the control computer 8 function as control means for correcting the focal position.
- the correction amount of the focal position of the processing lens 3 that cancels the focal length change of the laser light 2 and the curvature for the correction is calculated and output to the control computer 8.
- the control computer 8 receives the result and drives the curvature adjusting device of the variable curvature mirror 16 to adjust the curvature of the variable curvature mirror.
- the focal position of the laser beam 2 is changed, the beam diameter of the laser beam 2 on the workpiece 9 is kept constant, and stable machining can be achieved.
- a far infrared radiation thermometer since a far infrared radiation thermometer is not used, it is inexpensive, and the scattered light of the laser beam 2, the reflected light from the workpiece 9 and the workpiece are processed. There is no malfunction due to the influence of the radiated light due to the temperature of the object 9, and stable processing can be performed.
- thermopile type temperature difference sensor 5 has a configuration in which the thermocouple is continuous over the entire circumference shown in the fourth embodiment, but is divided into a plurality of regions shown in the fifth embodiment.
- the thermopile type temperature difference sensor 5A can also be used.
- the type of the variable curvature mirror 16 is not particularly limited.
- an AO090 / 70 mirror (trade name: manufactured by Kugler Co., Ltd.) that adjusts the curvature of the mirror by air pressure can be used.
- FIG. 7 A laser processing apparatus according to Embodiment 7 of the present invention will be described with reference to FIG.
- the configuration (partial cross section) of the laser processing apparatus according to Embodiment 7 of the present invention is as shown in FIG.
- the laser beam 2 is incident on a variable curvature mirror 16 equipped with a curvature adjusting device from a laser light source (not shown), and irradiates a condensing toroidal mirror 18 through a folding mirror 20.
- the laser beam 2 reflected by the toroidal mirror 18 is condensed and applied to the workpiece 9.
- an assist gas for removing the workpiece melted by the laser beam 2 is blown into the processing head, so that the assist gas does not flow into other parts of the laser processing apparatus.
- a window 3 ⁇ / b> A that is a transparent member that is disposed in the optical path of the laser light 2 and transmits the laser light 2 is provided between the laser processing apparatus main bodies.
- Assist gas uses argon.
- the window 3A is formed of the same ZnSe as the processing lens 3, is held by the window holder 4A, and is a thermopile type temperature difference sensor continuously connected to the surface of the window 3A on the side of the folding mirror 20 on the entire circumference.
- a polyimide film 44 having 5 formed thereon is attached.
- the laser beam 2 passes through the window 3A and enters the toroidal mirror 18. Thereafter, the light is reflected and condensed, and irradiated onto the workpiece 9.
- the window 3A slightly absorbs the laser beam 2 and the temperature rises, the focal position changes due to the thermal lens effect, and the beam diameter on the workpiece 9 changes.
- the control means includes a variable curvature mirror 16, a calculation computer 7, and a control computer 8 that can adjust the curvature by changing the mirror surface between a solid line and a broken line, as indicated by arrows in FIG. Based on the detection result of the temperature difference, the calculation computer 7 obtains the curvature change amount of the variable curvature mirror 16 for canceling the focal length change of the laser light 2, and the control computer 8 adjusts the curvature variable mirror 16.
- the focal position of the laser beam 2 is changed, the beam diameter on the workpiece 9 is kept constant, and stable machining can be achieved.
- a far infrared radiation thermometer since a far infrared radiation thermometer is not used, it is inexpensive, and the scattered light of the laser beam 2, the reflected light from the workpiece 9 and the workpiece are processed. There is no malfunction due to the influence of the radiated light due to the temperature of the object 9, and stable processing can be performed.
- window 3A is used between the toroidal mirror 18 and the folding mirror 20, it can be installed between the toroidal mirror 18 and the workpiece 9, or between the folding mirror 20 and the variable curvature mirror 16.
- the polyimide film 44 on which the thermopile type temperature difference sensor 5 is formed is used by being attached to the surface on the folding mirror 20 side of the window 3A, but it is sufficient that the temperature difference in the window 3A surface can be accurately detected. It can also be attached to the opposite side of the folding mirror 20 for use.
- the toroidal mirror 18 is not particularly limited as long as the laser beam 2 can be condensed on the workpiece 9, and a toroidal mirror, a parabolic mirror, or the like can be used.
- the assist gas is not particularly limited, and it is preferable to use a general inert gas in addition to the argon used in the seventh embodiment.
- thermopile temperature difference sensor 5 is configured to have a thermocouple continuous over the entire circumference shown in the fourth embodiment, but for each of the plurality of regions shown in the fifth embodiment.
- a thermopile type temperature difference sensor 5A divided into two can also be used.
- FIG. 15 is a plan view of window 3A of the laser machining apparatus according to Embodiment 8 of the present invention.
- thermopile type temperature difference sensor 5 is directly formed on the surface of 3A.
- the thermopile type temperature difference sensor 5 is formed directly on the window 3A by an evaporation method or the like, and uses a structure in which thermocouples are continuously connected over the entire circumference.
- the window 3A is provided with a notch 58 for easy understanding of the terminal position for detecting the potential difference, and the outer shape is not circular but is asymmetrical. As a result, the installation direction of the window 3A can be defined, and assembly and repair of the laser processing apparatus are facilitated.
- thermocouple when the thermocouple is directly formed on the window 3A, the contact state between the window 3A and the temperature difference sensor 5 is stable, so that temperature detection with higher accuracy is possible.
- the eighth embodiment unlike the Patent Document 1, since a far infrared radiation thermometer is not used, it is inexpensive, and the scattered light of the laser beam 2, the reflected light from the workpiece 9 and the workpiece are processed. There is no malfunction due to the influence of the radiated light due to the temperature of the object 9, and stable processing can be performed.
- thermopile type temperature difference sensor 5 is formed directly on the window 3A shown in the seventh embodiment.
- the thermopile type temperature difference sensor 5 is formed. Even if the thermopile type temperature difference sensor 5 is directly formed on the processing lens 3, the same effect can be obtained.
- thermopile type temperature difference sensor 5 the one having a configuration in which the thermocouple is continuous over the entire circumference shown in the fourth embodiment is used, but the thermopile type temperature difference sensor divided into a plurality of regions shown in the fifth embodiment. 5A can be used similarly.
- the workpiece 9 is, for example, a metal such as mild steel or stainless steel, carbon fiber, or a resin material.
- the computer 7 for calculation is used as the computer 7 for calculation and the computer 8 for control.
- a single computer having the functions of both is used as the computer for calculation control. You can also.
- the type of laser is not particularly limited, and a YAG laser, a fiber laser, a semiconductor laser, or the like can be used.
- the embodiments can be freely combined, or the embodiments can be changed or omitted as appropriate.
- 1 processing head 2 laser light, 3 processing lens, 3A window, 4 lens holder, 4A window holder, 5 and 5A temperature sensor (thermopile type temperature difference sensor), 6 lens driving device, 7 computer for calculation, 8 computer for control , 9 Processing object, 10 Cooling channel, 11 Warm contact, 12 Cold contact, 13 Shield plate, 16 Mirror drive device, 16 Curvature variable mirror, 18 Parabolic mirror, 18 Toroidal mirror, 20 Folding mirror, 44 Polyimide film, 45 46, detection terminals, 47, 48 metal wiring, 58 notches.
Abstract
Description
以下、この発明のレーザ加工装置の好適な実施の形態につき図面を用いて説明する。
なお、実施の形態の説明および各図において、同一の符号を付した部分は、同一または相当する部分を示すものである。
図1は、この発明の実施の形態1に係るレーザ加工装置の構成を一部断面で示す図である。図1は、レーザ加工装置の加工ヘッドの付近を示しており、加工レンズの中心の断面であり、レーザ加工装置に含まれるレーザ光を発生するレーザ発振器、レーザ光を加工ヘッドまで導く光路系などは省略して図示していない。
上記公知文献2(図3)においては、ステッピングモータが回転することによりボールネジが回転し、固定板がガイドロッドに沿って上下に移動する。
この発明の実施の形態2に係るレーザ加工装置について図8を参照しながら説明する。図8は、この発明の実施の形態2に係るレーザ加工装置の構成を一部断面で示す図である。図8は、レーザ加工装置の加工ヘッド部を示しており、レーザ加工装置に含まれるレーザ光を発生するレーザ発振器、レーザ光を加工ヘッドまで導く光路系などの一部は省略して図示していない。
ミラー駆動装置16は、上記公知文献3と同様に、ミラーの背面にエアーを送り込み、圧力を加えミラー曲率を変化させる。
この発明の実施の形態3に係るレーザ加工装置について図9を参照しながら説明する。図9は、この発明の実施の形態3に係るレーザ加工装置の構成を一部断面で示す図である。図9は、レーザ加工装置の加工ヘッド付近を示しており、レーザ加工装置に含まれるレーザ光を発生するレーザ発振器、レーザ光を加工ヘッドまで導く光路系などの一部は省略して図示していない。
この発明の実施の形態4に係るレーザ加工装置について、前述の図1、図2とともに、図11および図12を参照しながら説明する。
この発明の実施の形態4に係るレーザ加工装置の構成は、図1(加工ヘッド1および加工対象9は断面)に示す通りである。また、この発明の実施の形態4に係るレーザ加工装置の加工ヘッド1の中に設置された加工レンズ3の周辺構造(レーザ光2を透過する透明部材である加工レンズ3付近の断面)は、図2に示す通りである。
なお、この場合、レーザはCO2レーザであり、温度センサ5はサーモパイル型温度差センサである。
なお、本実施の形態4において、レンズホルダ4は円筒状のものを用いたが、多角筒状などのレンズホルダ4を用いることができる。
また、本実施の形態4で用いたサーモパイル型温度差センサ5は、検出精度が高く、加工レンズ3の表面の温度差を検出することに適している。
また、サーモパイル型温度差センサ5を形成した絶縁性フィルムを、加工レンズ3のレーザ光2の出射側の面に貼付したが、レーザ光2による加工レンズ3の温度分布変化を検出することができればよく、加工レンズ3のレーザ光2の入射側の面に貼付して用いることもできる。
図11はこの発明の実施の形態4に係るレーザ加工装置のサーモパイル型温度差センサ5の平面図であり、図12はこの発明の実施の形態4に係るレーザ加工装置のサーモパイル型温度差センサ5の部分拡大図である。
図11において、円環状のポリイミドフィルム44上に、2種の異種金属による複数の熱電対が交互に、直列に接続して配列されてサーモパイル型温度差センサ5を形成し、連続した熱電対の両端には検出用端子45、46が形成されている。
サーモパイル型温度差センサ5を形成するポリイミドフィルム44は、加工レンズ3に接着して貼り付けられる。サーモパイル型温度差センサ5の温度差の検出は、検出用端子45、46間の電位差を検出することで行う。
レーザ光2は、加工レンズ3の中心近傍に照射されるので、加工レンズ3の中心部分が高温に、加工レンズ3の外周部分が相対的に低温になり、その結果、加工レンズ3の中心側の円を構成する熱電対が温接点11、外側の円を構成する熱電対が冷接点12として機能する。
また、金属配線47、48の幅は、特に限定するものではないが、温接点11と冷接点12を多数配列する場合の配線引きまわしの観点から0.25~1mmとすると配線設計などが容易となる。
加工レンズ3に入射するビーム直径は、たとえば、CO2レーザでは通常、半径10mmから15mm程度である。このため、熱電対の温接点11は、レーザ光2を遮光しないように、レンズ中心から半径10mm以上の位置に取り付ける必要がある。さらに、冷接点12は、これより外側に取り付ける必要があるため、加工レンズ3の半径は少なくとも25mmから30mm程度の大きさが必要となる。
一般的には、温接点11と冷接点12の加工レンズ3の径方向の距離は、用いる加工レンズ3の直径およびレーザ光2をサーモパイル型温度差センサ5で遮光しないように配置する観点から10mm以下であることが好ましい。また温接点11と冷接点12の数はそれぞれ1個以上であればよく、温接点11と冷接点12のそれぞれの数を多くするほど温度差の検出感度を高くすることができ、より好ましい。
(m・K)以下とすることが必要である。
この発明の実施の形態4に係るレーザ加工装置の加工レンズ温度の加工レンズ3中心からの距離依存性は、図6に示す通りである。また、この発明の実施の形態4に係るレーザ加工装置のサーモパイル型温度差センサ5を用いた温度差のレーザ照射時間依存性は、図7に示す通りである。
この発明の実施の形態5に係るレーザ加工装置について、主として図13を参照しながら説明する。
図13は、この発明の実施の形態5に係るレーザ加工装置の構成を一部断面で示す図である。
図14は、この発明の実施の形態5に係るレーザ加工装置のサーモパイル型温度差センサ5Aを示す図である。
一方、ここで用いるサーモパイル型温度差センサ5Aは、図14に示すように、円環状に配置した熱電対が4つの領域に分割されており、それぞれの連続した熱電対の両端に設けられた検出用端子50、51、検出用端子52、53、検出用端子54、55、および検出用端子56、57の電位差をそれぞれ検出し、4つの領域のそれぞれについて温接点11と冷接点12の間の温度差を検出する。
焦点位置の制御手法は、基本的には実施の形態4と同じであり、レーザ光2により加工レンズ3の温度が変化し、加工レンズ3上に形成したサーモパイル型温度差センサ5Aにより温接点11と冷接点12の間の温度差を検出する。この温度差の検出結果に基づいて計算用コンピュータ7によりレーザ光2の焦点距離変化を相殺する加工レンズ位置補正値を求め制御用コンピュータ8に出力し、制御用コンピュータ8によりレンズ駆動装置6を駆動して、加工レンズ位置を補正し、被加工物9上でのレーザビーム径が一定となるようにする。
また、分割した各領域の温接点11および冷接点12の数も特に限定されるものではなく、これらの数は温度差の検出精度に影響するものであるので、温度差を目的とする精度で検出することができればよく、少なくとも各1個以上であればよい。
この発明の実施の形態6に係るレーザ加工装置について、前述の図8を用いて説明する。この発明の実施の形態6に係るレーザ加工装置の構成(一部断面)は、図8に示す通りである。
レーザ光2の光路中に配置された加工レンズ3はレーザ光2により温度分布が変化し、サーモパイル型温度差センサ5により温接点11と冷接点12の間の温度差が検出される。
また、本実施の形態6によれば、特許文献1と異なり、遠赤外線放射温度計を用いないため、安価であり、またレーザ光2の散乱光、被加工物9からの反射光および被加工物9の温度による放射光などの影響での誤動作がなく、安定した加工をすることができる。
この発明の実施の形態7に係るレーザ加工装置について、前述の図9を用いて説明する。この発明の実施の形態7に係るレーザ加工装置の構成(一部断面)は、図9に示す通りである。
レーザ光2はウィンドウ3Aを透過してトロイダルミラー18に入射する。その後、反射して集光し、被加工物9上に照射される。ウィンドウ3Aはレーザ光2をわずかに吸収して温度が上昇し、熱レンズ効果により焦点位置が変化し、被加工物9上のビーム径が変化する。
また、本実施の形態7によれば、特許文献1と異なり、遠赤外線放射温度計を用いないため、安価であり、またレーザ光2の散乱光、被加工物9からの反射光および被加工物9の温度による放射光などの影響での誤動作がなく、安定した加工をすることができる。
この発明の実施の形態8に係るレーザ加工装置について図15を用いて説明する。
図15は、この発明の実施の形態8に係るレーザ加工装置のウィンドウ3Aの平面図である。
また、本実施の形態8によれば、特許文献1と異なり、遠赤外線放射温度計を用いないため、安価であり、またレーザ光2の散乱光、被加工物9からの反射光および被加工物9の温度による放射光などの影響での誤動作がなく、安定した加工をすることができる。
また、上述した各実施の形態1~8においては、計算用コンピュータ7および制御用コンピュータ8として個別のコンピュータを用いたが、両者の機能を一体として有する単独のコンピュータを計算制御用コンピュータとして用いることもできる。
この発明は、その発明の範囲内において、各実施の形態を自由に組み合わせたり、各実施の形態を適宜、変更、省略することができる。
Claims (28)
- 加工対象にレーザ光を集光させる加工レンズと、
前記加工レンズの焦点距離を調整する焦点距離調整手段と、
前記加工レンズのレーザ光の入射側の中心から径方向に、レーザ光が照射されないレンズ表面に設置され、前記加工レンズの中心からの距離が異なる第1および第2の温度測定点を有し、第1および第2の温度測定点で温度差を検出する接触式の温度センサと、
前記温度センサによって検出された温度差に対応する電位差から加工レンズの熱レンズの大きさを計算し、計算した熱レンズの大きさに応じて、加工対象に集光されるレーザ光のビーム径が一定になるように、焦点距離補正量を計算して前記焦点距離調整手段に制御信号を出力する制御装置と
を備えたことを特徴とするレーザ加工装置。 - 前記焦点距離調整手段は、
レーザ光の光軸がレンズ中心を通るように前記加工レンズを保持するレンズホルダと、
前記レンズホルダをレーザ光の光軸方向に移動させるレンズ駆動装置とを含み、
前記制御装置は、前記温度センサの第1および第2の温度測定点で検出された温度差に対応する電位差から加工レンズの熱レンズの大きさを計算し、計算した熱レンズの大きさに応じて、加工対象に集光されるレーザ光のビーム径が一定になるように、前記焦点距離補正量の代わりに、レンズ位置補正量を計算して前記レンズ駆動装置に制御信号を出力する
ことを特徴とする請求項1記載のレーザ加工装置。 - 前記焦点距離調整手段は、
入射したレーザ光を前記加工レンズへ導く曲率可変ミラーと、
前記曲率可変ミラーの曲率を可変させるミラー駆動装置とを含み、
前記制御装置は、前記温度センサの第1および第2の温度測定点で検出された温度差に対応する電位差から加工レンズの熱レンズの大きさを計算し、計算した熱レンズの大きさに応じて、加工対象に集光されるレーザ光のビーム径が一定になるように、前記焦点距離補正量の代わりに、曲率変化量を計算して前記ミラー駆動装置に制御信号を出力する
ことを特徴とする請求項1記載のレーザ加工装置。 - 前記加工レンズは、
加工対象にレーザ光を集光させる放物面ミラーあるいはトロイダルミラーと、
前記放物面ミラーあるいはトロイダルミラーの直前または直後に設けられ、レーザ光を通す円形のウィンドウとを含み、
前記焦点距離調整手段は、
入射したレーザ光を前記放物面ミラーあるいはトロイダルミラーまたは前記ウィンドウへ導く曲率可変ミラーと、
前記曲率可変ミラーの曲率を可変させるミラー駆動装置とを含み、
前記制御装置は、前記温度センサの第1および第2の温度測定点で検出された温度差に対応する電位差からウィンドウの熱レンズの大きさを計算し、計算した熱レンズの大きさに応じて、加工対象に集光されるレーザ光のビーム径が一定になるように、前記焦点距離補正量の代わりに、曲率変化量を計算して前記ミラー駆動装置に制御信号を出力する
ことを特徴とする請求項1記載のレーザ加工装置。 - 前記温度センサは、1つまたは複数の熱電対であり、
前記第1の温度測定点は、温接点であり、
前記第2の温度測定点は、冷接点である
ことを特徴とする請求項1から請求項4までのいずれかに記載のレーザ加工装置。 - 前記温度センサの第1の温度測定点は、加工レンズ中心またはウィンドウ中心に最も近い位置で、かつ加工レンズ中心またはウィンドウ中心から径方向の距離10mm以上の位置である
ことを特徴とする請求項1から請求項4までのいずれかに記載のレーザ加工装置。 - レーザ光の光軸方向から前記温度センサにレーザ光が照射されないように、前記レンズホルダに遮蔽板を設けた
ことを特徴とする請求項2記載のレーザ加工装置。 - 加工レンズ中心またはウィンドウ中心から最も近い前記温度センサの第1の温度測定点と最も遠い第2の温度測定点の間では、加工レンズまたはウィンドウに何も接触しないようにした
ことを特徴とする請求項1から請求項4までのいずれかに記載のレーザ加工装置。 - 加工レンズ中心またはウィンドウ中心から最も近い前記温度センサの第1の温度測定点と最も遠い第2の温度測定点の間では、加工レンズまたはウィンドウに接触する断熱材の熱伝導率が0.9W/(m・K)以下である
ことを特徴とする請求項1から請求項4までのいずれかに記載のレーザ加工装置。 - レーザ光源は、CO2レーザ、YAGレーザ、ファイバーレーザ、半導体レーザのいずれかである
ことを特徴とする請求項1から請求項9までのいずれかに記載のレーザ加工装置。 - レーザ光源と、
前記レーザ光源から出射されたレーザ光の光路中に設置され、前記レーザ光を透過する透明部材と、
前記透明部材の中心から第1の距離の前記透明部材の表面と前記第1の距離よりも遠い第2の距離の前記透明部材の表面との間の温度差を検出する接触型の温度差センサと、
前記温度差センサにより検出された温度差に基づいて、被加工物上に集光された前記レーザ光のビーム径を一定とするように焦点位置の補正を行う制御手段と、を備えるレーザ加工装置。 - 前記温度差センサが、前記第1の距離および前記第2の距離に形成された熱電対である請求項11に記載のレーザ加工装置。
- 前記温度差センサが、前記第1の距離に1個以上配置された前記熱電対の温接点と前記第2の距離に1個以上配置された前記熱電対の冷接点が交互に接続して配列され、前記温接点と前記冷接点の温度差を検出するサーモパイル型温度差センサである請求項12に記載にレーザ加工装置。
- 前記透明部材が前記レーザ光を集光させる加工レンズであり、
前記制御手段が前記温度差センサにより検出された前記温度差に基づいて、前記加工レンズと前記被加工物間の距離を調整し、前記加工レンズから出射された前記レーザ光の焦点位置を補正する請求項11から請求項13までのいずれか1項に記載のレーザ加工装置。 - 前記制御手段が、前記温度差に対応して、前記加工レンズの熱レンズ効果に起因する前記レーザ光の焦点距離変化を相殺するように、前記加工レンズと前記被加工物間の距離を調整することにより、前記レーザ光の焦点位置を補正する請求項14に記載のレーザ加工装置。
- 前記透明部材が前記加工レンズであり、
前記加工レンズに前記レーザ光を導く曲率可変ミラーを備え、
前記制御手段が前記温度差センサにより検出された前記温度差に基づいて、前記曲率可変ミラーの曲率を調整し、前記加工レンズから出射された前記レーザ光の焦点位置を補正する請求項11から請求項13までのいずれか1項に記載のレーザ加工装置。 - 前記制御手段が、前記温度差に対応して、前記加工レンズの熱レンズ効果に起因する前記レーザ光の焦点距離変化を相殺するように、前記曲率可変ミラーの曲率を調整することにより、前記レーザ光の焦点位置を補正する請求項16に記載のレーザ加工装置。
- 前記透明部材がウィンドウであり、
前記レーザ光を集光させる集光ミラーと、
前記集光ミラーに前記レーザ光を導く曲率可変ミラーと、を備え、
前記制御手段が前記温度差センサにより検出された前記温度差に基づいて、前記曲率可変ミラーの曲率を調整し、前記集光ミラーに反射された前記レーザ光の焦点位置を補正する請求項11から請求項14までのいずれか1項に記載のレーザ加工装置。 - 前記制御手段が、前記温度差に対応して、前記ウィンドウの熱レンズ効果に起因する前記レーザ光の焦点距離変化を相殺するように、前記曲率可変ミラーの曲率を調整することにより、前記レーザ光の焦点位置を補正する請求項18に記載のレーザ加工装置。
- 前記サーモパイル型温度差センサが前記透明部材の表面に直接形成されている請求項13から請求項19までのいずれか1項に記載のレーザ加工装置。
- 前記サーモパイル型温度差センサが絶縁性フィルム上に形成され、当該絶縁性フィルムを介して前記透明部材の表面に取り付けられている請求項13から請求項20までのいずれか1項に記載のレーザ加工装置。
- 前記サーモパイル型温度差センサの一組の隣接する前記温接点と前記冷接点が前記透明部材中心から略同一方向に形成されている請求項13から請求項21までのいずれか1項に記載のレーザ加工装置。
- 前記サーモパイル型温度差センサが複数の領域に分割されている請求項13から請求項22までのいずれか1項に記載のレーザ加工装置。
- 前記サーモパイル型温度差センサが、前記透明部材の中心から10mm以上離れて形成されている請求項13から請求項23までのいずれか1項に記載のレーザ加工装置。
- 前記透明部材を前記レーザ光の光路中に保持するホルダを備え、前記ホルダが前記サーモパイル型温度差センサと一定の間隙を保持して対向する遮光板を備える請求項13から請求項24までのいずれか1項に記載のレーザ加工装置。
- 前記透明部材が、前記サーモパイル型温度差センサの前記冷接点よりも外周側でのみ、前記ホルダによって前記レーザ光の光路中に保持されている請求項13から請求項25までのいずれか1項に記載のレーザ加工装置。
- 前記透明部材の中心から前記冷接点までの間で前記透明部材に接触する断熱材を有しており、この断熱材の熱伝導率が0.9W/(m・K)以下である請求項13から請求項26までのいずれか1項に記載のレーザ加工装置。
- 前記レーザ光源が、CO2レーザ、YAGレーザ、ファイバーレーザ、半導体レーザのいずれか1つである請求項13から請求項27までのいずれか1項に記載のレーザ加工装置。
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Also Published As
Publication number | Publication date |
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CN103459083A (zh) | 2013-12-18 |
DE112012001628B4 (de) | 2016-04-14 |
US9289850B2 (en) | 2016-03-22 |
JPWO2012137579A1 (ja) | 2014-07-28 |
CN103459083B (zh) | 2015-05-13 |
DE112012001628T5 (de) | 2014-01-16 |
US20130341309A1 (en) | 2013-12-26 |
JP5558629B2 (ja) | 2014-07-23 |
TW201249581A (en) | 2012-12-16 |
TWI478784B (zh) | 2015-04-01 |
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