WO2012137480A1 - 多結晶シリコン中の炭素濃度測定方法 - Google Patents
多結晶シリコン中の炭素濃度測定方法 Download PDFInfo
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- WO2012137480A1 WO2012137480A1 PCT/JP2012/002313 JP2012002313W WO2012137480A1 WO 2012137480 A1 WO2012137480 A1 WO 2012137480A1 JP 2012002313 W JP2012002313 W JP 2012002313W WO 2012137480 A1 WO2012137480 A1 WO 2012137480A1
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- polycrystalline silicon
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- carbon concentration
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 106
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 106
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 34
- 238000011088 calibration curve Methods 0.000 claims abstract description 36
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 27
- 238000000691 measurement method Methods 0.000 claims abstract description 19
- 238000010521 absorption reaction Methods 0.000 claims abstract description 10
- 238000004566 IR spectroscopy Methods 0.000 claims abstract description 9
- 238000000862 absorption spectrum Methods 0.000 claims abstract description 7
- 238000012937 correction Methods 0.000 claims abstract description 7
- 238000005498 polishing Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 abstract description 12
- 239000013078 crystal Substances 0.000 description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 239000000523 sample Substances 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 238000005259 measurement Methods 0.000 description 10
- 239000002994 raw material Substances 0.000 description 8
- 238000000411 transmission spectrum Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 239000013074 reference sample Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000002835 absorbance Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 238000005204 segregation Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000006467 substitution reaction Methods 0.000 description 3
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 2
- 150000001721 carbon Chemical group 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 241001522296 Erithacus rubecula Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910021398 atomic carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000012844 infrared spectroscopy analysis Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 238000004857 zone melting Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
Definitions
- ASTM F1723-02 “Standard Practice for Evaluation of Polycrystalline Silicon Rods by Float-Zone Crystal Growth and Spectroscopy”
- ASTM F1391-93 “Standard TestMethod for Substitutional Atomic Carbon Content of Silicon by InfraredAbsorption”
- F.Shimura “SemiconductorSilicon Crystal Technology” Academic Press, Inc. (1989) p.148-151 Japan Electronics and Information Technology Industries Association standard (JEITA EM-3503) “Standard measurement of substitutional carbon atom concentration in silicon crystals by infrared absorption”
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
11 把持部分のFZ単結晶棒近傍領域
12,13 板状多結晶シリコン
20 FZ単結晶棒
21 コーン部
22 円板状のFZ結晶
30 シード
Claims (2)
- 多結晶シリコンロッドから板状多結晶シリコンを切り出し、
該板状多結晶シリコンの両面を鏡面研磨して2.12±0.01mmの厚みとし、
置換型炭素濃度が既知の厚み2.00±0.01mmの単結晶シリコン標準試料を用いて赤外吸収分光法により標準測定法に則って検量線を作成し、
前記鏡面研磨後の板状多結晶シリコンの所望の箇所の置換型炭素の吸収帯ピークを含む波数領域の赤外吸収スペクトルを前記検量線作成時と同一条件下で求め、
厚み補正を行うことなく前記検量線に基づいて前記板状多結晶シリコンの置換型炭素濃度を求める、ことを特徴とする多結晶シリコン中の炭素濃度測定方法。 - 多結晶シリコンロッドから少なくとも2枚の厚みの異なる板状多結晶シリコンを隣接して切り出し、
該板状多結晶シリコンのそれぞれの両面を鏡面研磨して、2.12mmよりも薄い第1の板状多結晶シリコンと2.12mmよりも厚い第2の板状多結晶シリコンを準備し、
置換型炭素濃度が既知の厚み2.00±0.01mmの単結晶シリコン標準試料を用いて赤外吸収分光法により標準測定法に則って第1の検量線を作成し、
前記鏡面研磨後の第1および第2の板状多結晶シリコンの所望の箇所の置換型炭素の吸収帯ピークを含む波数領域の赤外吸収スペクトルを前記第1の検量線作成時と同一条件下で求め、
厚み補正を行うことなく前記第1の検量線に基づいて前記第1および第2の板状多結晶シリコンの置換型炭素濃度を求め、
前記前記第1および第2の板状多結晶シリコンの置換型炭素濃度と厚みから第2の検量線を作成し、
該第2の検量線の厚み2.00±0.01mmに対応する炭素濃度を前記板状多結晶シリコンの切り出し部位の炭素濃度とする、ことを特徴とする多結晶シリコン中の炭素濃度測定方法。
Priority Applications (4)
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KR1020137026140A KR101470783B1 (ko) | 2011-04-04 | 2012-04-03 | 다결정 실리콘 중의 탄소 농도 측정 방법 |
EP12767547.8A EP2696192B1 (en) | 2011-04-04 | 2012-04-03 | Method for measuring carbon concentration in polycrystalline silicon |
CN201280016408.7A CN103477207B (zh) | 2011-04-04 | 2012-04-03 | 多晶硅中碳浓度的测定方法 |
US14/110,013 US8963070B2 (en) | 2011-04-04 | 2012-04-03 | Method for measuring carbon concentration in polycrystalline silicon |
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JP2011082983A JP5524894B2 (ja) | 2011-04-04 | 2011-04-04 | 多結晶シリコン中の炭素濃度測定方法 |
JP2011-082983 | 2011-04-04 |
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WO2012137480A1 true WO2012137480A1 (ja) | 2012-10-11 |
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PCT/JP2012/002313 WO2012137480A1 (ja) | 2011-04-04 | 2012-04-03 | 多結晶シリコン中の炭素濃度測定方法 |
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US (1) | US8963070B2 (ja) |
EP (1) | EP2696192B1 (ja) |
JP (1) | JP5524894B2 (ja) |
KR (1) | KR101470783B1 (ja) |
CN (1) | CN103477207B (ja) |
MY (1) | MY163263A (ja) |
WO (1) | WO2012137480A1 (ja) |
Cited By (1)
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CN103575691A (zh) * | 2013-11-27 | 2014-02-12 | 方大特钢科技股份有限公司 | 一种快速判定萤石质量的方法 |
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CN103712946A (zh) * | 2014-01-14 | 2014-04-09 | 乐山乐电天威硅业科技有限责任公司 | 低温红外光谱测定单晶硅中替位碳含量的方法 |
JP6075307B2 (ja) * | 2014-02-20 | 2017-02-08 | 信越半導体株式会社 | シリコン単結晶中の炭素濃度評価方法及び半導体デバイスの製造方法 |
CN105092511A (zh) * | 2015-08-12 | 2015-11-25 | 南京秀科仪器有限公司 | 一种测量单晶硅代位碳和间隙氧含量的方法 |
JP6528710B2 (ja) * | 2016-04-11 | 2019-06-12 | 株式会社Sumco | シリコン試料の炭素濃度測定方法およびシリコン単結晶インゴットの製造方法 |
JP6805015B2 (ja) * | 2017-02-10 | 2020-12-23 | グローバルウェーハズ・ジャパン株式会社 | 検量線の作成方法、炭素濃度測定方法及びシリコンウェハの製造方法 |
JP6662330B2 (ja) * | 2017-03-06 | 2020-03-11 | 信越半導体株式会社 | 単結晶シリコン中の炭素濃度測定方法 |
CN108317945A (zh) * | 2018-03-13 | 2018-07-24 | 卢曼斯 | 燃料发动机内部积碳厚度检测的方法 |
JP6919625B2 (ja) * | 2018-05-10 | 2021-08-18 | 信越半導体株式会社 | 不純物濃度の測定方法 |
JP6950639B2 (ja) * | 2018-07-20 | 2021-10-13 | 株式会社Sumco | シリコン単結晶の炭素濃度測定方法及び装置 |
JP6979007B2 (ja) * | 2018-12-17 | 2021-12-08 | グローバルウェーハズ・ジャパン株式会社 | シリコンウェーハの極低酸素濃度測定方法 |
CN110006841B (zh) * | 2019-04-11 | 2022-12-06 | 内蒙古神舟硅业有限责任公司 | 一种颗粒状多晶硅中o、c、ⅲ、ⅴ族元素的检测方法 |
JP7184032B2 (ja) * | 2019-12-27 | 2022-12-06 | 株式会社Sumco | シリコン試料の炭素濃度評価方法およびこの方法に使用される評価装置、シリコンウェーハ製造工程の評価方法、シリコンウェーハの製造方法ならびにシリコン単結晶インゴットの製造方法 |
CN113030000B (zh) * | 2021-03-01 | 2023-02-21 | 西安奕斯伟材料科技有限公司 | 单晶硅棒间隙氧含量的测量方法及装置 |
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JPH08105716A (ja) * | 1994-10-04 | 1996-04-23 | Toshiba Ceramics Co Ltd | ウエハの厚さ測定方法 |
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2011
- 2011-04-04 JP JP2011082983A patent/JP5524894B2/ja active Active
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2012
- 2012-04-03 US US14/110,013 patent/US8963070B2/en not_active Expired - Fee Related
- 2012-04-03 CN CN201280016408.7A patent/CN103477207B/zh not_active Expired - Fee Related
- 2012-04-03 WO PCT/JP2012/002313 patent/WO2012137480A1/ja active Application Filing
- 2012-04-03 KR KR1020137026140A patent/KR101470783B1/ko not_active IP Right Cessation
- 2012-04-03 EP EP12767547.8A patent/EP2696192B1/en not_active Not-in-force
- 2012-04-03 MY MYPI2013701367A patent/MY163263A/en unknown
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Publication number | Priority date | Publication date | Assignee | Title |
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CN103575691A (zh) * | 2013-11-27 | 2014-02-12 | 方大特钢科技股份有限公司 | 一种快速判定萤石质量的方法 |
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CN103477207A (zh) | 2013-12-25 |
JP5524894B2 (ja) | 2014-06-18 |
US20140021344A1 (en) | 2014-01-23 |
KR101470783B1 (ko) | 2014-12-09 |
EP2696192B1 (en) | 2016-05-18 |
EP2696192A1 (en) | 2014-02-12 |
US8963070B2 (en) | 2015-02-24 |
EP2696192A4 (en) | 2014-12-17 |
JP2012220212A (ja) | 2012-11-12 |
MY163263A (en) | 2017-08-30 |
CN103477207B (zh) | 2015-07-08 |
KR20140011480A (ko) | 2014-01-28 |
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