WO2012137251A1 - 表示装置用薄膜半導体装置及びその製造方法 - Google Patents
表示装置用薄膜半導体装置及びその製造方法 Download PDFInfo
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- WO2012137251A1 WO2012137251A1 PCT/JP2011/002037 JP2011002037W WO2012137251A1 WO 2012137251 A1 WO2012137251 A1 WO 2012137251A1 JP 2011002037 W JP2011002037 W JP 2011002037W WO 2012137251 A1 WO2012137251 A1 WO 2012137251A1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78663—Amorphous silicon transistors
- H01L29/78669—Amorphous silicon transistors with inverted-type structure, e.g. with bottom gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78678—Polycrystalline or microcrystalline silicon transistor with inverted-type structure, e.g. with bottom gate
Definitions
- the present invention relates to a thin film semiconductor device for a display device and a manufacturing method thereof, and more particularly to a channel protection type thin film semiconductor device for a display device and a manufacturing method thereof.
- an organic EL display using an organic material EL (Electroluminescence) as one of the next generation flat panel displays replacing the liquid crystal display has been attracting attention.
- an active matrix display device such as an organic EL display
- a thin film semiconductor device for a display device hereinafter simply referred to as “thin film semiconductor device” called a thin film transistor (TFT: Thin Film Transistor) is used.
- an organic EL display is a current-driven display device unlike a voltage-driven liquid crystal display, and development of a thin film semiconductor device having excellent on / off characteristics as a drive circuit for an active matrix display device has been urgently developed. Yes.
- a bottom gate type thin film semiconductor device in which a gate electrode is formed on the substrate side from the channel layer can be reduced in cost. Is generally used.
- This bottom gate type thin film semiconductor device includes a channel etching type thin film semiconductor device that etches a channel layer serving as a current conduction path, and a channel protection type (etching stopper type) thin film semiconductor that protects the channel layer from etching processing.
- a channel etching type thin film semiconductor device that etches a channel layer serving as a current conduction path
- etching stopper type channel protection type
- the channel etching type thin film semiconductor device has an advantage that the number of photolithography steps can be reduced and the manufacturing cost is lower than that of the channel protection type thin film semiconductor device.
- the channel protective thin film semiconductor device can prevent damage to the channel layer due to the etching process, and can suppress an increase in variation in characteristics within the substrate surface.
- the channel protection type thin film semiconductor device is advantageous for high definition because the channel layer can be thinned and the parasitic resistance component can be reduced to improve the on-state characteristics.
- the channel protection type thin film semiconductor device is suitable for a thin film semiconductor device in a current drive type organic EL display device using an organic EL element, for example, and the manufacturing cost is increased as compared with the channel etching type thin film semiconductor device. Even so, attempts have been made to employ it in pixel circuits of organic EL display devices (for example, Non-Patent Document 1).
- Patent Document 1 As a channel protection type thin film semiconductor device that realizes excellent on-characteristics, a thin film semiconductor device having a channel layer with a convex structure has been proposed (for example, Patent Document 1).
- Patent Document 1 when a current flows between the source and drain electrodes via the lower portions on both sides of the convex shape of the channel layer, the convexity of the channel layer is generated. Since the lower portions on both sides of the shape are formed to be thinner than the convex upper portion of the channel layer, the resistance component in the vertical direction of the channel layer can be reduced. Therefore, the transverse resistance at the lower part of the convex shape of the channel layer can be kept low, and the on-current can be increased. Further, the convex upper portion of the channel layer becomes a resistance between the source electrode and the drain electrode. Thereby, the movement of the charge in the back channel between the source electrode and the drain electrode is suppressed.
- Patent Document 2 discloses a method of forming a functional layer constituting a thin film semiconductor device by applying it by a wet process using a liquid containing a desired material. By this method, the throughput is high and the manufacturing cost of the display device can be reduced as compared with the conventional method of forming a functional layer by processing under vacuum by CVD or sputtering.
- Patent Document 1 since the technique disclosed in Patent Document 1 only suppresses the movement of charges by using the convex upper portion of the channel layer as a resistance, the source electrode and the drain are within a range in which the movement of charges can be suppressed as a resistance. It only suppresses the movement of charge in the back channel between the electrodes.
- the channel protective layer when a channel protective layer is deposited by CVD or sputtering using an inorganic material such as a silicon oxide film as the channel protective layer and formed into a desired pattern using wet etching or dry etching, the channel protective layer includes There is a positive fixed charge. Therefore, a weak voltage (Vf) is applied to the channel layer (near the interface between the channel protective layer and the channel layer) located below the channel protective layer due to the fixed charge. In this case, if the voltage (Vf) due to the fixed charge becomes equal to or higher than the threshold voltage (Vbc) of the back channel of the channel layer, the parasitic transistor operates when the TFT is turned off via the back channel of the channel layer. Leakage current flows and off characteristics deteriorate.
- Patent Document 1 has a problem that even if the off-state current can be reduced due to the convex shape, it cannot be significantly reduced until the resistance limit is exceeded.
- the residue of the organic material acts as a parasitic resistance that blocks the movement of carriers, so the on-current decreases. Furthermore, since the thickness of the organic material residue is not necessarily uniform in each thin film semiconductor device existing on the substrate, there is a problem that variation in on-characteristics in the thin film semiconductor device is remarkably increased. As a result, the advantage of the channel protection type thin film semiconductor device with small characteristic variation is lost.
- Patent Document 1 and Patent Document 2 each have the function of increasing the on-current and the function of reducing the cost, but at the same time, the side effect of increasing the off-current and the on-current There is a side effect of reducing the characteristics and increasing the characteristic variation.
- the present invention has been made in view of the above problems, and provides a thin film semiconductor device for a display device and a manufacturing method thereof that can improve on-off characteristics in a channel protection type semiconductor device structure. Objective.
- one embodiment of a thin film semiconductor device includes a substrate, a gate electrode formed on the substrate, a gate insulating film formed on the gate electrode, and the gate insulation.
- a channel layer formed on the film and having a convex shape on the surface; a channel protective layer formed on the convex shape of the channel layer and containing an organic material containing silicon, oxygen, and carbon; and a convexity of the channel layer. It is formed at the interface between the upper surface of the shape and the channel protective layer, contains carbon as a main component, and the carbon that is the main component is an interface layer that is carbon derived from the organic material, and ends of the channel protective layer.
- a thin film semiconductor device for a display device that can improve an on-current while reducing an off-current exceeding a limit of a layer as a resistance.
- FIG. 1 is a cross-sectional view schematically showing the configuration of a thin film semiconductor device 10 for a display device according to a first embodiment of the present invention.
- FIG. 2A is a cross-sectional view schematically showing a substrate preparation step in the method for manufacturing the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- FIG. 2B is a cross-sectional view schematically showing a gate electrode forming step in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2C is a cross-sectional view schematically showing a gate insulating film forming step in the method for manufacturing the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- FIG. 1 is a cross-sectional view schematically showing the configuration of a thin film semiconductor device 10 for a display device according to a first embodiment of the present invention.
- FIG. 2A is a cross-sectional view schematically showing a substrate preparation step in
- FIG. 2D is a cross-sectional view schematically showing a channel layer forming step in the method for manufacturing the thin film semiconductor device for display device 10 according to the first embodiment of the present invention.
- FIG. 2E is a cross-sectional view schematically showing a channel protective layer applying step in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2F is a cross-sectional view schematically showing a pre-baking step of the channel protective layer in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2G is a cross-sectional view schematically showing the exposure and development steps of the channel protective layer in the method for manufacturing the thin film semiconductor device for display device 10 according to the first embodiment of the present invention.
- FIG. 2H is a cross-sectional view schematically showing a post-baking step of the channel protective layer in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2I is a cross-sectional view schematically showing an etching step (first stage) in the method for manufacturing the thin film semiconductor device for display device 10 according to the first embodiment of the present invention.
- FIG. 2J is a cross-sectional view schematically showing an etching step (second stage) in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2K is a cross-sectional view schematically showing a contact layer forming step in the method for manufacturing the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- FIG. 2L is a cross-sectional view schematically showing a source / drain metal film forming step in the method for manufacturing the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 2M is a cross-sectional view schematically showing a contact layer patterning step and a source and drain electrode patterning step in the method for manufacturing the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- 3A is a cross-sectional TEM image of a region A surrounded by a broken line in FIG.
- FIG. 3B is a schematic diagram for explaining a cross-sectional structure of a region B surrounded by a broken line in FIG. 3A.
- FIG. 4 is a cross-sectional view of a thin film semiconductor device for a display device according to a modification of the first embodiment of the present invention.
- FIG. 5 is a view showing the concentration distribution of carbon and sulfur contained in the film constituting the thin film semiconductor device for a display device according to the modification shown in FIG.
- FIG. 6A is a diagram for explaining the operation of the thin film semiconductor device 100 for a display device according to the conventional example.
- FIG. 6B is a diagram for explaining the first function and effect of the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 7A is a diagram for explaining the operation of the thin film semiconductor device 200 for a display device according to a comparative example.
- FIG. 7B is a cross-sectional TEM image of a region D surrounded by a broken line in FIG. 7A.
- FIG. 7C is a diagram for explaining a second effect of the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- FIG. 8A is a diagram illustrating a change in logarithm of the drain current Ids with respect to the gate voltage Vgs in the thin film semiconductor device 100 for a display device according to the comparative example.
- FIG. 8B is a diagram showing a change in logarithm of the drain current Ids with respect to the gate voltage Vgs in the thin film semiconductor device for display device 100 according to the first embodiment of the present invention.
- FIG. 9A is a diagram showing a change in logarithm of the drain current Ids with respect to the gate voltage Vgs.
- FIG. 9B is a diagram illustrating a change in the drain current Ids with respect to the drain voltage Vds.
- FIG. 10A is a cross-sectional view schematically showing an etching step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second embodiment of the present invention.
- FIG. 10B is a cross-sectional view schematically showing an oxygen plasma processing step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second embodiment of the present invention.
- FIG. 10C is a cross-sectional view schematically showing a contact layer forming step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second embodiment of the present invention.
- FIG. 10D is a cross-sectional view schematically showing a source / drain metal film forming step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second exemplary embodiment of the present invention.
- FIG. 10B is a cross-sectional view schematically showing an oxygen plasma processing step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second embodiment of the present invention.
- FIG. 10C is a cross-sectional view schematically showing a contact layer forming step in the method for manufacturing the thin film semiconductor device for display device 10A according to the second embodiment of the present invention.
- FIG. 10D is a
- FIG. 10E is a cross-sectional view schematically showing a contact layer patterning step and a source / drain electrode patterning step in the method for manufacturing the thin film semiconductor device for a display device 10A according to the second embodiment of the present invention.
- FIG. 11 is a diagram showing an IR spectrum in the conventional example and the thin film semiconductor device for a display device according to the first and second embodiments of the present invention.
- FIG. 12A is a diagram for explaining the operation (back channel) of the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- FIG. 12B is a diagram for explaining the operation of the thin film semiconductor device 10A for a display device according to the second embodiment of the present invention.
- FIG. 13A is a diagram for explaining the operation (carrier trap) of the thin film semiconductor device 10 for display device according to the first embodiment of the present invention.
- FIG. 13B is a diagram for explaining the operation of the thin film semiconductor device 10A for a display device according to the second embodiment of the present invention.
- FIG. 14 is a diagram showing the shift amount of the threshold voltage when stress is applied in the thin film semiconductor devices 10 and 10A for display devices according to the first and second embodiments of the present invention.
- FIG. 15 is a diagram showing current-voltage characteristics in the thin film semiconductor devices 10 and 10A for display devices according to the first and second embodiments of the present invention.
- FIG. 16A is a cross-sectional view schematically showing an etching step in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16B is a cross-sectional view schematically showing a baking step (second baking step) in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16C is a cross-sectional view schematically showing a contact layer forming step in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16A is a cross-sectional view schematically showing an etching step in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16B is a cross-sectional view schematically showing a baking step (second baking step) in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16D is a cross-sectional view schematically showing a source / drain metal film forming step in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 16E is a cross-sectional view schematically showing a contact layer patterning step and a source / drain electrode patterning step in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- FIG. 17 is a cross-sectional view schematically showing a configuration of a thin film semiconductor device 10C for a display device according to the fourth embodiment of the present invention.
- FIG. 18 is a partially cutaway perspective view of the organic EL display according to the embodiment of the present invention.
- FIG. 19 is a diagram showing a circuit configuration of a pixel using the thin film semiconductor device for a display device according to the embodiment of the present invention.
- One embodiment of a thin film semiconductor device for a display device is formed on a substrate, a gate electrode formed on the substrate, a gate insulating film formed on the gate electrode, and the gate insulating film.
- the interface layer containing carbon as a main component is formed between the convex shape of the channel layer and the channel protective layer, the carrier mobility in the back channel of the channel layer can be reduced.
- the movement of fixed charges from the channel protective layer to the channel layer can be reduced.
- the leakage current at the time of OFF can be suppressed, so that the OFF characteristics can be improved.
- the film thickness on both sides of the convex shape is smaller than the film thickness of the convex shape due to the convex shape of the channel layer, so the film thickness of the channel layer below the source electrode and below the drain electrode Can be thinned. Accordingly, since the transverse resistance in the current path (front path) flowing from the source electrode and the drain electrode through the lower portions on both sides of the convex portion of the channel layer can be reduced, the on-current can be increased.
- the upper surface and the side surface of the end portion of the channel protective layer, the side surface of the interface layer formed on the side surface of the channel protective layer, and the side surface of the interface layer are formed.
- Two contact layers formed on a convex side surface of the channel layer and an upper surface of the channel layer extending from the convex side surface of the channel layer, and the source electrode is formed of the two contact layers.
- the drain electrode is formed on the other of the two contact layers.
- the lower portions on both sides of the convex shape of the channel layer serve as a charge transfer path between the source electrode, the drain electrode, and the channel layer. It is preferable.
- the film thickness difference between the film thickness at the convex portion of the channel layer and the film thickness at the lower portions on both sides of the convex shape of the channel layer is 2 nm or more. Preferably there is.
- the width of the channel protective layer is preferably the same as the width of the upper surface of the convex upper portion of the channel layer.
- the concentration of carbon contained in the interface layer is preferably 50 times or more of the concentration of carbon as an impurity contained in the channel layer. In one embodiment of the thin film semiconductor device for a display device according to the present invention, the concentration of carbon contained in the interface layer is preferably 5 ⁇ 10 20 [atoms / cm 3 ] or more.
- the organic material preferably contains sulfur.
- the carrier mobility can be further reduced by sulfur contained in the interface layer.
- the concentration of sulfur contained in the interface layer is preferably 100 times or more the concentration of sulfur as an impurity contained in the channel layer. In one embodiment of the thin film semiconductor device for a display device according to the present invention, the concentration of sulfur contained in the interface layer is preferably 5 ⁇ 10 19 [atoms / cm 3 ] or more.
- the effect of reducing the carrier mobility in the interface layer can be surely exhibited.
- the interface layer preferably has a specific resistance of 2 ⁇ 10 6 [ ⁇ ⁇ cm] or more.
- the insulation of the interface layer can be improved, the carrier mobility in the interface layer can be further reduced.
- the thickness of the interface layer is preferably 1 nm or more and 5 nm or less.
- an interface layer having a thickness of about 1 nm to 5 nm can be formed.
- the channel layer includes a first channel layer having a convex lower portion made of a polycrystalline semiconductor layer, and a non-channel formed on the first channel layer. And a second channel layer made of a crystalline semiconductor layer and having a convex shape on the surface.
- the on-characteristic can be improved by the first channel layer, and the off-characteristic can be improved by the second channel layer, so that a thin film semiconductor device for a display device that is further excellent in on-off characteristics is realized. be able to.
- the polycrystalline semiconductor layer is polycrystalline silicon and the amorphous semiconductor layer is amorphous silicon.
- the polycrystalline semiconductor layer may include a microcrystalline semiconductor layer having an average particle diameter of 10 nm to 50 nm.
- a first step of preparing a substrate, a second step of forming a gate electrode on the substrate, and a gate insulation on the gate electrode A third step of forming a film; a fourth step of forming a channel layer on the gate insulating film; and a channel protective layer is formed on the channel layer by applying an organic material containing silicon, oxygen, and carbon.
- Baking the channel protective layer in the fifth step includes carbon as a main component at the interface between the channel layer and the channel protective layer, and the carbon that is the main component is carbon derived from the organic material.
- the interface layer containing carbon as a main component is formed between the convex shape of the channel layer and the channel protective layer, the carrier mobility in the back channel of the channel layer can be reduced. The movement of fixed charges from the channel protective layer to the channel layer can be reduced. Thereby, the leakage current at the time of OFF can be suppressed.
- the film thickness on both sides of the convex shape is smaller than the film thickness of the convex shape due to the convex shape of the channel layer, so the film thickness of the channel layer below the source electrode and below the drain electrode Can be thinned. Accordingly, since the transverse resistance in the current path (front path) flowing from the source electrode and the drain electrode through the lower portions on both sides of the convex portion of the channel layer can be reduced, the on-current can be increased.
- the interface layer between the source electrode and the channel layer and between the drain electrode and the channel layer is removed by etching, between the source electrode and the channel layer, and between the drain electrode and the channel layer. There is no interfacial layer in between. Thereby, the inhibition of carrier movement in the current path flowing from the source electrode and the drain electrode through the lower portions on both sides of the convex portion of the channel layer does not occur. Accordingly, the transverse resistance can be reduced, and the on-current can be increased.
- the interface layer can be uniformly removed in the substrate plane by etching, variation in the on-characteristics of the thin film semiconductor device for display device in the substrate plane can be reduced.
- the manufacturing method according to this aspect it is possible to obtain a thin film semiconductor device for a display device that is excellent in on-characteristics and off-characteristics and has high on-characteristic variations.
- the predetermined etching method is dry etching.
- the interface layer can be easily removed by using dry etching.
- the upper and side surfaces of the end portion of the channel protective layer, the channel protective layer Two contacts on the side of the interface layer spanning the side of the channel, the convex side of the channel layer spanning the side of the interface layer, and the top of the channel layer spanning the convex side of the channel layer Forming a layer, wherein in the eighth step, the source electrode is formed on one of the two contact layers, and the drain electrode is formed on the other of the two contact layers. Preferably it is formed.
- a step of performing oxygen plasma treatment on the channel protective layer at any stage between the sixth step and the eighth step is preferable to include.
- a channel protective layer made of an organic material contains a larger amount of fixed charges and trap centers than a channel protective layer made of silicon oxide.
- a step of performing oxygen plasma treatment on the channel protective layer is provided at any stage between the sixth step and the eighth step. That is, in the sixth step, after the interface layer is formed at the interface between the channel region and the channel protective layer by baking the channel protective layer, the channel protective layer is subjected to oxygen plasma treatment.
- This oxygen plasma treatment decomposes the organic component of the channel protective layer, and oxygen atoms are inserted into the skeleton of the molecules constituting the channel protective layer.
- the channel protective layer becomes a film having a skeleton and a composition close to those of the silicon oxide film. For this reason, the chance that electrons moving from the source electrode to the drain electrode are trapped by the organic component in the channel protective layer is reduced. As a result, the threshold voltage shift is suppressed, and the reliability of the device can be improved.
- the organic component of the channel protective layer can be decomposed by the oxygen plasma treatment, the fixed charge in the channel protective layer can be reduced. Therefore, off-channel current can be suppressed by suppressing back channel conduction, so that off characteristics can be improved.
- the oxygen plasma treatment decomposes an organic component in the channel protective layer, and oxygen atoms are added to silicon contained in the channel protective layer. It is preferable that they are bonded to form silicon oxide.
- the oxygen plasma treatment includes a power density of 3 to 30 [W / cm 2 ], a temperature of 50 to 350 [° C.], and a pressure of It is preferably made in the range of 1 to 10 [Torr].
- the organic component in the channel protective layer is decomposed, and the channel protective layer can be made a film close to a silicon oxide film.
- a step of performing a second baking process on the channel protective layer at any stage between the sixth step and the eighth step is preferable to contain.
- the second baking process is performed on the channel protective layer at any stage between the sixth process and the eighth process, the organic component in the channel protective layer can be decomposed, and the channel protection is performed.
- the fixed charge in the layer can be reduced. Accordingly, back channel conduction can be suppressed, so that off current can be suppressed and off characteristics can be improved.
- the method for manufacturing a thin film semiconductor device for a display device it is preferable to include a step of performing a second baking process on the channel protective layer prior to the oxygen plasma process.
- the second baking process is performed in a temperature range of 300 to 350 [° C.].
- the organic component in the channel protective layer is decomposed, and the channel protective layer can be made a film close to a silicon oxide film.
- FIG. 1 is a cross-sectional view schematically showing the configuration of a thin film semiconductor device 10 for a display device according to a first embodiment of the present invention.
- a thin film semiconductor device 10 for a display device is a channel protection type bottom gate type thin film transistor device, and includes a substrate 1 and a substrate 1 above.
- the substrate 1 is a glass substrate made of a glass material such as quartz glass, non-alkali glass, and high heat resistance glass.
- a silicon nitride film (SiNx), silicon oxide (SiOy) or silicon oxynitride film is formed on the substrate 1.
- An undercoat layer made of (SiOyNx) or the like may be formed.
- the undercoat layer may play a role of mitigating the influence of heat on the substrate 1 in a high-temperature heat treatment process such as laser annealing.
- the thickness of the undercoat layer is, for example, about 100 nm to 2000 nm.
- the gate electrode 2 is made of a single layer structure or a multilayer structure such as a conductive material or an alloy thereof.
- a conductive material or an alloy thereof For example, molybdenum (Mo), aluminum (Al), copper (Cu), tungsten (W), titanium (Ti), A pattern is formed in a predetermined shape on the substrate 1 using chromium (Cr), molybdenum tungsten (MoW), or the like.
- the film thickness of the gate electrode 2 is about 20 to 500 nm, for example.
- the gate insulating film 3 is made of, for example, silicon oxide (SiOy), silicon nitride (SiNx), silicon oxynitride film (SiOyNx), aluminum oxide (AlOz), tantalum oxide (TaOw), or a laminated film thereof. Is formed on the substrate 1 and the gate electrode 2 so as to cover the substrate 1 on which is formed.
- the gate insulating film 3 since a crystalline silicon thin film is used as the channel layer 4, it is preferable to use silicon oxide as the gate insulating film 3. This is because in order to maintain a good threshold voltage characteristic in the TFT, it is preferable to make the interface state between the channel layer 4 and the gate insulating film 3 good, and silicon oxide is suitable for this. .
- the film thickness of the gate insulating film 3 is, for example, 50 nm to 300 nm.
- the channel layer 4 is a semiconductor layer formed on the gate insulating film 3 and has a channel region which is a region in which carrier movement is controlled by the voltage of the gate electrode 2.
- the channel layer 4 is a polycrystalline silicon thin film formed by crystallizing amorphous silicon (amorphous silicon).
- the polycrystalline silicon thin film can be a silicon thin film having a mixed crystal structure of amorphous silicon and crystalline silicon.
- it is preferable that at least a predetermined channel region of the channel layer 4 is composed of a film having a high proportion of crystalline silicon.
- the channel layer 4 has a convex shape (convex portion) and a flat shape (flat portion) on the surface.
- the film thickness of the flat part is thinner than the film thickness of the convex part (height of the convex part).
- the convex portions of the channel layer 4 are located above the gate electrode 2, and both ends thereof are located inside the both ends of the gate electrode 2. That is, the gate length (channel length) of the gate electrode 2 is longer than the length of the channel layer 4 in the gate length direction.
- the lower portions on both sides of the convex portion of the channel layer 4, that is, the flat portion of the channel layer 4 becomes a charge transfer path between the source electrode 8 s (drain electrode 8 d) and the channel region of the channel layer 4.
- the region above the gate electrode 2 in the flat portion of the channel layer 4 is a thinned channel region.
- the film thickness difference between the film thickness of the convex part and the film thickness of the flat part is about 2 nm or more, and the film thickness of the convex part is about 20 nm to 100 nm.
- the film thickness is about 10 nm to 90 nm.
- the film thickness of the convex part can be 40 nm, and the film thickness of the flat part can be 20 nm.
- the crystal grain size of the crystalline silicon in the polycrystalline silicon thin film of the channel layer 4 is, for example, about 5 nm to 1000 nm.
- the channel protective layer 5 is a protective film that protects the channel region of the channel layer 4, and is formed on the convex shape of the channel layer 4.
- the channel protective layer 5 is a channel etching stopper (CES) for preventing the channel region of the channel layer 4 from being etched during the etching process when forming the pair of contact layers 7. Acts as a layer. That is, the upper portion of the channel protective layer 5 is etched by etching when the contact layer 7 is patterned (not shown).
- the film thickness of the channel protective layer 5 (the portion not etched by channel etching) is, for example, 300 nm to 1000 nm.
- the lower limit of the thickness of the channel protective layer 5 is determined by suppressing the influence of the margin due to channel etching and the fixed charge in the channel protective layer.
- the upper limit of the channel protective layer 5 is determined by suppressing a decrease in process reliability accompanying an increase in level difference.
- the channel protective layer 5 is an organic material layer made of an organic material mainly containing an organic material containing silicon, oxygen, and carbon, and is not an inorganic material layer mainly composed of an inorganic material such as silicon oxide or silicon nitride. .
- the channel protective layer 5 has an insulating property, and the pair of contact layers 7 are not electrically connected to each other.
- the channel protective layer 5 can be formed by patterning and solidifying a photosensitive coating type organic material.
- the organic material for forming the channel protective layer 5 includes, for example, an organic resin material, a surfactant, a solvent, and a photosensitive agent.
- organic resin material a photosensitive or non-photosensitive organic resin material composed of one or more kinds selected from polyimide, acrylic, polyamide, polyimide amide, resist, benzocyclobutene, and the like can be used.
- surfactant a surfactant made of a silicon compound such as siloxane can be used.
- solvent an organic solvent such as propylene glycol monomethyl ether acetate or 1,4-dioxane can be used.
- the photosensitizer a positive photosensitizer such as naphthoquinone diazite can be used. Note that the photosensitizer contains carbon and sulfur.
- the organic material for forming the channel protective layer 5 can be applied and formed by a coating method such as a spin coating method.
- the organic material having a predetermined shape can be selectively formed by a droplet discharge method or a printing method capable of forming a predetermined pattern such as screen printing or offset printing.
- the interface layer 6 is an insulating layer having insulating properties formed at the interface between the convex upper surface of the channel layer 4 and the channel protective layer 5.
- the specific resistance of the interface layer 6 is preferably 2 ⁇ 10 6 [ ⁇ ⁇ cm] or more.
- the interface layer 6 is a layer generated when the channel protective layer 5 is formed on the channel layer 4, and is generated at the interface between the surface layer of the channel layer 4 and the channel protective layer 5.
- the interface layer 6 contains carbon (carbon) as a main component, and the main component carbon is carbon derived from an organic material constituting the channel protective layer 5. That is, the carbon that is the main component of the interface layer 6 includes carbon contained in the organic material for forming the channel protective layer 5. Further, in the present embodiment, the interface layer 6 also contains sulfur. The detailed configuration of the interface layer 6 will be described later.
- the pair of contact layers 7 are made of an amorphous semiconductor layer containing impurities at a high concentration or a polycrystalline semiconductor layer containing impurities at a high concentration, and are formed above the channel layer 4 via a channel protective layer 5. In addition, the pair of contact layers 7 are disposed on the channel protective layer 5 so as to face each other with a predetermined interval.
- each of the pair of contact layers 7 is formed so as to extend from the upper surface of the channel protective layer 5 to the flat portion of the channel layer 4. 6 and the upper surface of the flat portion of the channel layer 4 are formed. More specifically, the two contact layers 7 are separately provided on both sides of the convex portion of the channel layer 4, and the interface layer 6 is formed on the upper and side surfaces of the end portion of the channel protective layer 5 and on the side surface of the channel protective layer 5. , The side surface of the convex portion of the channel layer 4 extending from the side surface of the interface layer 6, and the upper surface (the upper surface of the flat portion) of the channel layer 4 extending from the side surface of the convex portion of the channel layer 4.
- the pair of contact layers 7 is, for example, an n-type semiconductor layer in which amorphous silicon is doped with phosphorus (P) as an impurity, and n containing a high-concentration impurity of 1 ⁇ 10 19 [atm / cm 3 ] or more. + Layer.
- the thickness of each contact layer 7 can be set to, for example, 5 nm to 100 nm.
- the pair of source electrode 8 s and drain electrode 8 d are the upper and side portions of the end portion of the channel protective layer 5, the side portion of the interface layer 6 extending to the side portion of the channel protective layer 5, and the channel layer extending to the side portion of the interface layer 6. 4, and the upper part of the channel layer 4 formed on the side of the convex part of the channel layer 4. Further, the pair of source electrode 8s and drain electrode 8d are provided apart from each other.
- the pair of source electrode 8s and drain electrode 8d are formed above the channel layer 4 and are formed on each contact layer 7, respectively. That is, the source electrode 8 s is formed on one contact layer 7 of the pair of contact layers 7, and the drain electrode 8 d is formed on the other contact layer 7 of the pair of contact layers 7. Yes.
- the source electrode 8s and the drain electrode 8d can each have a single layer structure or a multilayer structure made of a conductive material or an alloy thereof, such as aluminum (Al), molybdenum (Mo), It is made of a material such as tungsten (W), copper (Cu), titanium (Ti), or chromium (Cr).
- the source electrode 8s and the drain electrode 8d are formed by a three-layer structure of MoW / Al / MoW.
- the film thickness of the source electrode 8s and the drain electrode 8d is, for example, about 100 nm to 500 nm.
- the thin film semiconductor device 10 for a display device according to the present embodiment is configured as described above.
- FIGS. 2A to 2M are cross-sectional views schematically showing the configuration of each step in the method for manufacturing the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- a glass substrate is prepared as the substrate 1.
- an undercoat layer made of a silicon nitride film, a silicon oxide film, a silicon oxynitride film, or the like may be formed on the substrate 1 by plasma CVD or the like.
- a gate electrode 2 having a predetermined shape is formed on the substrate 1.
- a gate metal film made of MoW is formed on the substrate 1 by sputtering, and the gate metal film is patterned using a photolithography method and a wet etching method, whereby the gate electrode 2 having a predetermined shape can be formed.
- MoW wet etching can be performed using, for example, a chemical solution in which phosphoric acid (HPO 4 ), nitric acid (HNO 3 ), acetic acid (CH 3 COOH), and water are mixed in a predetermined composition.
- a gate insulating film 3 is formed so as to cover the substrate 1 on which the gate electrode 2 is formed.
- the gate insulating film 3 made of silicon oxide is formed by plasma CVD or the like so as to cover the gate electrode 2.
- the film can be formed by introducing silane gas (SiH 4 ) and nitrous oxide gas (N 2 O) at a predetermined concentration ratio.
- a channel layer 4 made of a crystalline silicon thin film is formed on the gate insulating film 3.
- an amorphous silicon thin film made of amorphous silicon is formed on the gate insulating film 3 by plasma CVD or the like.
- the film can be formed by introducing silane gas (SiH 4 ) and hydrogen gas (H 2 ) at a predetermined concentration ratio.
- the amorphous silicon thin film is annealed at a temperature of 500 ° C. to 900 ° C. Crystallize.
- the channel layer 4 made of a crystalline silicon thin film can be formed on the gate insulating film 3.
- the amorphous silicon thin film was crystallized by laser annealing using an excimer laser.
- laser annealing using a pulse laser having a wavelength of about 370 to 900 nm laser annealing using a continuous wave laser having a wavelength of about 370 to 900 nm, rapid thermal processing (RTP), or direct growth by CVD. It may be crystallized by such a method.
- a predetermined organic material for forming the channel protective layer 5 is applied by a predetermined coating method to form the channel protective layer 5 on the channel layer 4.
- the channel protective layer 5 can be formed on the entire surface of the channel layer 4 by applying and spin coating a predetermined organic material on the channel layer 4.
- the film thickness of the channel protective layer 5 can be controlled by the viscosity of the organic material and the coating conditions (rotation speed, blade speed, etc.).
- the above-described photosensitive coating type organic material containing silicon, oxygen, and carbon can be used as the predetermined organic material of the channel protective layer 5.
- the channel protective layer 5 is pre-baked to pre-fire the channel protective layer 5.
- heating is performed at a temperature of about 110 ° C. for about 60 seconds.
- the solvent contained in the channel protective layer 5 is vaporized.
- the interface layer 6 generated in this manner contains carbon as a main component, and the main component carbon is carbon derived from the organic material of the channel protective layer 5 formed on the channel layer 4.
- TMAH Tetra Methyl Ammonium Hydroxide
- the channel protective layer 5 may be formed by patterning the channel protective layer 5 by a photolithography method and a wet etching method.
- the lower layer portion of the channel protective layer 5 and the interface layer 6 are not removed in the development processing when the channel protective layer 5 is patterned. That is, a part of the channel protective layer 5 is generated as a residue when the channel protective layer 5 is processed. Even if the residue of the channel protective layer 5 is not left, in the development process when forming the pattern of the channel protective layer 5, the interface layer 6 cannot be removed and the interface layer 6 is exposed. It turns out that it will remain.
- post-baking is performed on the patterned channel protective layer 5 to main-fire the channel protective layer 5.
- heating is performed at a temperature of 280 ° C. to 300 ° C. for about 1 hour.
- a part of the organic component in the channel protective layer 5 is vaporized and decomposed to improve the film quality.
- the residue of the channel protective layer 5 and the interface layer 6 under the residue are removed by a predetermined etching method. That is, the channel protective layer 5 and the channel layer 4 are etched by a predetermined etching method so as to leave a layer positioned under the channel protective layer 5 having a predetermined shape which is originally set. Convex portions are formed in the channel layer 4 according to the shape.
- etching method for example, dry etching by reactive ion etching can be used. Further, this dry etching is preferably performed in two stages as shown in FIGS. 2I and 2J.
- the residue of the channel protective layer 5 located at both ends of the channel protective layer 5 and the interface layer 6 under the residue are etched using oxygen gas. Remove with.
- the residue of the channel protection layer 5 and the residue of the interface layer, which are located at both ends of the channel protection layer 5, are mixed with tetrafluoromethane ( By etching using a mixed gas of CF 4 ) and hydrogen or a mixed gas of fluorinated methane and oxygen, a region of the channel layer 4 that is not covered with the channel protective layer 5 is removed. Thereby, the channel layer 4 can be made into a convex shape.
- the etching process is performed in two stages, and as a first stage etching, the residue of the channel protective layer 5 located at both ends of the channel protective layer 5 and the interface layer 6 under the residue are removed, It is possible to prevent the shape abnormality in the channel layer 4 due to the mask that is not used. That is, if the channel layer 4 is made to have a convex shape by etching while the residue of the channel protective layer 5 and the interface layer 6 below the residue remain, the residue of the channel protective layer 5 and the interface layer 6 In some cases, the channel layer 4 cannot be formed into a desired convex shape due to an unintended mask. However, the unintended mask can be removed by performing the first-stage etching.
- the etching rate can be lowered by using a mixed gas in the second stage etching, the controllability of the film thickness at both ends of the convex shape is improved.
- the etching rate can be controlled to 40 to 1 nm / min by changing the hydrogen concentration from 0% to 50%.
- the channel layer 4 is processed into a desired convex shape while removing the residue located at both ends of the channel protective layer 5 and the interface layer 6 under the residue that could not be removed in the first stage etching. Can do.
- the channel protective layer 5 having a predetermined shape remains on the convex portion of the channel layer 4, and the channel layer 4 is formed as a portion corresponding to the etched region at the same time as the convex portion is formed on the channel layer 4. A flat portion is formed on the surface. Thereby, the channel layer 4 (flat portion) not covered with the channel protective layer 5 is exposed.
- the predetermined etching method uses etching divided into two stages, it is not always necessary to carry out the etching in two stages.
- the contact layer 7 is formed so as to extend from the upper surface of the channel protective layer 5 to the flat portion of the channel layer 4.
- the channel protective layer 5 on the convex portion of the channel layer 4 and the flat portion of the channel layer 4 are covered with amorphous silicon doped with a pentavalent element such as phosphorus by plasma CVD, for example.
- a contact layer 7 is formed.
- the source / drain metal film 8 to be the source electrode 8s and the drain electrode 8d is formed so as to cover the contact layer 7.
- the source / drain metal film 8 having a three-layer structure of MoW / Al / MoW is formed by sputtering.
- a resist material is applied on the source / drain metal film 8, and exposure and development are performed to form a resist patterned in a predetermined shape.
- wet etching is performed using this resist as a mask to pattern the source / drain metal film 8, thereby forming a source electrode 8s and a drain electrode 8d having a predetermined shape as shown in FIG. 2M.
- the contact layer 7 functions as an etching stopper.
- the resist on the source electrode 8s and the drain electrode 8d is removed.
- the contact layer 7 is patterned and the channel layer 4 is patterned into an island shape.
- a pair of contact layers 7 and island-shaped channel layers 4 having a predetermined shape can be formed.
- chlorine-based gas may be used.
- the contact layer 7 and the channel layer 4 may be patterned by dry etching using a resist mask after the source electrode 8s and the drain electrode 8d are wet etched.
- the thin film semiconductor device 10 for a display device according to the present embodiment can be manufactured.
- FIG. 3A is a cross-sectional TEM image of the thin film semiconductor device 10 for a display device manufactured by the above manufacturing method (a portion of the region A surrounded by a broken line in FIG. 2K).
- 3B is a schematic diagram for explaining a cross-sectional structure of a region B surrounded by a broken line in FIG. 3A.
- a thin interface layer 6 is formed at the interface between the channel layer 4 and the channel protective layer 5 made of a crystalline silicon thin film. I understand that. 3A shows that the interface layer 6 having a thickness of about 2 nm is formed.
- the interface layer 6 is a layer generated when the channel protective layer 5 is heated and solidified. As shown in FIG. 3B, the channel layer 4 side of the interface layer 6 is a material of the channel protective layer 5. It is considered that the silicon compound of the surfactant contained in is bonded to the silicon atoms of the channel layer 4.
- Y in Y—Si— (O) 3 is a functional group reactively bonded to the organic material, such as an amino group, an epoxy group, a methacryl group, a vinyl group, or a mercapto group.
- a SiOC-based polymer (a thin film formed with at least Si, O, and C as main components) and an S (sulfur) -based polymer (constituting elements such as Si, O, C, The thin film containing S) is present.
- the SiOC-based polymer is obtained by polymerizing a surfactant silicon compound contained in the material of the channel protective layer 5 and carbon contained in the photosensitive organic resin material.
- the S-based polymer is considered to be a thin film obtained by polymerizing a photosensitive agent, a surfactant and a photosensitive agent contained in the organic material of the channel protective layer 5.
- the interface layer 6 is considered to have a structure in which the Si—O—Si bond and the polymer are combined into a matrix.
- a channel protective layer 5 made of a bulk SiOC-based polymer.
- the interface layer 6 is made of a material different from both the channel layer 4 and the channel protective layer 5. That is, as shown in the TEM image of FIG. 3A, layers having different contrasts can be confirmed between the channel layer 4 and the channel protective layer 5. In the TEM image, the difference in contrast indicates that the density of the material is different, which means that different layers exist. Therefore, the interface layer 6 exists between the channel layer 4 and the channel protective layer 5 as a layer different from these layers.
- FIG. 4 is a cross-sectional view of a thin film semiconductor device 10C for a display device according to a modification of the first embodiment of the present invention manufactured for measuring the concentration distribution of carbon and sulfur.
- 5 is a diagram showing the concentration distribution of carbon and sulfur contained in the film constituting the thin film semiconductor device 10C for a display device shown in FIG. 4, and the thickness (depth) indicated by the arrow C in FIG. The element concentration in the) direction is measured and plotted by secondary ion mass spectrometry (SIMS).
- SIMS secondary ion mass spectrometry
- the thin film semiconductor device 10C for a display device shown in FIG. 4 is manufactured without performing the etching step (FIG. 2I) for removing the interface layer 6 in the above manufacturing method in order to measure the element concentration of the interface layer 6.
- An amorphous silicon layer 70 is formed between the contact layer 7 and the source electrode 8s (drain electrode 8d).
- the interface layer 6 has a higher carbon concentration and sulfur concentration than the other layers, and the carbon concentration contained in the interface layer 6 is 5 ⁇ 10 20 [atoms / cm 3 ] or more. In addition, it can be seen that the concentration of sulfur contained in the interface layer 6 is 5 ⁇ 10 19 [atoms / cm 3 ] or more.
- the carbon concentration contained in the interface layer 6 is 50 times or more the carbon concentration as an impurity contained in the channel layer 4. It can also be seen that the sulfur concentration contained in the interface layer 6 is 100 times or more the sulfur concentration as an impurity contained in the channel layer 4.
- the measurement results in FIG. 5 are for the thin film semiconductor device 10C for display device shown in FIG. 4, but the interface layer 6 between the channel layer 4 and the channel protective layer 5 is amorphous with the channel layer 4. Since it is the same as the interface layer 6 between the silicon layer 70 and the thin film semiconductor device 10 for a display device, the same measurement results as in FIG. 5 can be obtained.
- FIG. 6A is a diagram for explaining the operation of the thin film semiconductor device 100 for a display device according to the conventional example.
- FIG. 6B is a diagram for explaining a first function and effect of the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention shown in FIG. Note that the solid line arrow shown in FIG. 6A and the broken line arrow shown in FIG. 6B indicate the back channel (back path), that is, the flow of leakage current.
- a thin film semiconductor device 100 for a display device according to a conventional example has a channel protective layer 105 made of an inorganic material formed on a channel layer 104.
- the channel protective layer 105 is formed of an inorganic material, positive fixed charges are generated in the channel protective layer 105, and the channel layer 104 A weak voltage (Vf) is applied.
- Vf threshold voltage
- the inventors of the present application use an organic material as the channel protective layer 5 as in the thin film semiconductor device 10 for a display device shown in FIG. 6B, so that carbon is formed between the channel layer 4 and the channel protective layer 5.
- the interface layer 6 as a main component was formed.
- the interface layer 6 formed in this way contains carbon as a main component, and therefore contains more carbon than the channel layer 4.
- the interface layer 6 mainly composed of carbon exists at the interface between the convex portion of the channel layer 4 and the channel protective layer 5, the scattering is increased at the interface between the channel protective layer 5 and the channel layer 4.
- the interface layer 6 functions as a barrier that blocks the movement of carriers. That is, the resistance value at the convex portion of the channel layer 4 (upper layer portion of the channel region) can be increased. Thereby, the carrier mobility in the back channel region of the channel layer 4 can be reduced.
- the interface layer containing carbon as a main component between the convex portion of the channel layer 4 and the channel protective layer 5. 6 is formed, the carrier mobility in the back channel region of the channel layer 4 can be reduced, and the movement of fixed charges from the channel protective layer 5 to the channel layer 4 can be reduced. Thereby, the leakage current at the time of OFF can be suppressed, so that the OFF characteristics can be improved.
- FIG. 7A is a diagram for explaining the operation of the thin film semiconductor device 200 for a display device according to a comparative example.
- FIG. 7B is a cross-sectional TEM image of a region D surrounded by a broken line in FIG. 7A.
- FIG. 7C is a diagram for explaining a second effect of the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention.
- the arrow shown to FIG. 7A and the practice arrow shown to FIG. 7C represent the front channel (front path
- a thin film semiconductor device 200 for a display device according to a comparative example shown in FIG. 7A is a manufacturing process of the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention, as shown in FIG. In this configuration, the subsequent steps (FIG. 2J, FIG. 2K) are performed without performing the etching step (FIG. 2I) for removing the residue of the channel protective layer 5 and the interface layer 6 below the residue. .
- the interface layer 206 exists in the entire region on the channel layer 4 in the thin film semiconductor device 200 for display device according to the comparative example, as shown in FIGS. 7A and 7B.
- the channel protective layer 5 is formed on the interface layer 6 in a region other than the region where the channel protective layer 5 is originally formed. There is a residue.
- the etching process is not performed, no convex portion is formed in the channel layer 4 and no flat portion is formed in the channel layer 4.
- the gate insulating film 3 has a laminated structure of silicon nitride (SiN) and silicon oxide (SiO), and the channel layer 4 has a polycrystalline silicon film ( ⁇ c-Si) and an amorphous structure.
- the contact layer 7 is made of n + Si, and the drain electrode 8d (source electrode 8s) is made of molybdenum (Mo).
- the residue of the channel protective layer 5 and the interface layer between the source electrode 8 s and the channel layer 4 and between the drain electrode 8 d and the channel layer 4. 6 will exist.
- the current path when the thin film semiconductor device for display device 200 according to the comparative example is turned on is a path indicated by an arrow (front path), and the current path includes the channel protection layer 5.
- Residue and interface layer 6 are present. Accordingly, since these act as parasitic resistance (transverse resistance) that blocks the movement of carriers, the carriers in the front path that flow from the source electrode 8s and the drain electrode 8d through the lower portions on both sides of the convex portion of the channel layer 4 are used. Migration is inhibited. As a result, the on-current is lowered, and the on-characteristics are significantly lowered.
- the thickness of the residue of the channel protective layer 5 that is an organic material is not necessarily in each thin film semiconductor device existing on the substrate. It will not be uniform. As a result, the effect as a parasitic resistance that blocks the movement of carriers becomes non-uniform, and the variation in on-characteristics in the thin-film semiconductor device increases remarkably.
- the residue of the channel protective layer 5 and the residue are removed by the etching process (FIG. 2I).
- the lower interface layer 6 is removed, and a flat portion is formed by thinning the channel region of the channel layer 4.
- channel protection is provided between the source electrode 8s and the channel layer 4 and between the drain electrode 8d and the channel layer 4. There is no residue of layer 5 and no interfacial layer 6.
- the current path when the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention is on is a path indicated by an arrow (front path).
- the channel protective layer 5 residue and the interface layer 6 are not present.
- the inhibition of carrier movement in the current path flowing from the source electrode 8s and the drain electrode 8d via the lower portions on both sides of the convex portion of the channel layer 4 does not occur.
- the on-current can be increased.
- the on characteristics can be improved.
- the residue of the channel protective layer 5 and the interface layer 6 can be uniformly removed in the substrate surface by etching. That is, in each of the plurality of thin film semiconductor devices for display devices existing on the substrate, the residue of the channel protective layer 5 between the source electrode 8s and the channel layer 4 and between the drain electrode 8d and the channel layer 4 And the interface layer 6 are uniformly removed in the substrate plane. Accordingly, the variation in the on-characteristic can be reduced.
- the film thickness on both sides (flat portions) of the convex portion in the channel layer 4 can be made thinner than the thickness of the convex portion by etching, the lower portions on both sides of the convex portion of the channel layer 4 from the source electrode 8s and the drain electrode 8d.
- the thickness of the channel layer 4 at the lower part of the source electrode 8s and the lower part of the drain electrode 8d can be reduced in the current path that flows through. Accordingly, it is possible to reduce the transverse resistance in the current path (front path) that flows from the source electrode 8s and the drain electrode 8d through the lower portions on both sides of the convex portion of the channel layer 4.
- the on-current can be greatly increased without reducing the overall thickness of the channel layer 4 made of a semiconductor layer.
- the film thickness difference between the film thickness of the convex part and the film thickness of the flat part is preferably 2 nm or more.
- the interface layer 206 formed on both sides of the channel protective layer 205 (convex portion) having a predetermined shape has a thickness of about 1 nm or more and 5 nm or less, and this serves as a barrier for the current path. Increase in on-characteristics and characteristics cause variations.
- the interface layer 206 (unnecessary interface layer 206) formed on both sides of the channel protective layer 205 (convex portion) having a predetermined shape is removed, and a channel is formed as shown in FIG. 7C.
- the layer 4 may be convex, and the unnecessary interface layer 206 can be removed by making the channel layer 4 convex. That is, as a result of removing the unnecessary interface layer 206, the channel layer 4 becomes convex.
- Making the channel layer 4 convex in order to remove the interface layer 206 is another viewpoint.
- the first step is to remove the unnecessary interface layer 206, and the convex shape of the channel layer 4 is determined.
- the thickness of the flat portion in the channel layer 4 is set to 10 nm to 20 nm, and the channel layer 4 It is preferable that the film thickness difference between the convex portion and the flat portion is 2 nm or more.
- the transverse resistance in the current path (front path) flowing from the source electrode 8s and the drain electrode 8d via the lower portions on both sides of the convex portion of the channel layer 4 can be reduced, and the on-characteristic can be increased.
- FIG. 8A is a diagram illustrating a change in logarithm of the drain current Ids with respect to the gate voltage Vgs in the thin film semiconductor device 100 for a display device according to the comparative example.
- FIG. 8B is a diagram showing a change in logarithm of the drain current Ids with respect to the gate voltage Vgs in the thin film semiconductor device for display device 10 according to the first embodiment of the present invention.
- 8A and 8B show current-voltage characteristics when a source-drain bias is applied in the linear operation region.
- 8A and 8B show a plurality of curves, which are the results of measuring a plurality of thin film semiconductor devices for display devices.
- the thin film semiconductor device 10 for a display device according to the first embodiment of the present invention shown in FIG. 8B is related to the comparative example shown in FIG. As compared with the thin film semiconductor device 200 for a display device, it can be seen that the on-current is increased and the on-characteristic is improved, and the characteristic variation between elements of the thin film semiconductor device for a display device is reduced.
- the off-characteristics can be improved by forming the interface layer 6 above the convex portion of the channel layer 4.
- the interface layer 6 By not forming the interface layer 6 above the flat portion of the channel layer 4, it is possible to improve the on-characteristics and suppress the characteristic variation.
- FIGS. 9A and 9B show the influence of the effect obtained by the thin film semiconductor device 10 for a display device according to this embodiment on the current-voltage characteristics.
- FIG. 9A is a diagram showing a change in logarithm of the drain current Ids with respect to the gate voltage Vgs, and shows the transfer characteristics of the thin film semiconductor device for a display device.
- FIG. 9B is a diagram showing the change of the drain current Ids with respect to the drain voltage Vds, and shows the output characteristics of the thin film semiconductor device for display device.
- the broken line indicates the characteristics of the thin film semiconductor device 10 for display device according to the present embodiment shown in FIG. 1
- the solid line indicates the thin film semiconductor for display device according to the conventional example shown in FIG. 6A. The characteristics of the device 100 are shown.
- a thin film semiconductor device for a display device includes a switching thin film semiconductor device (selection transistor) for selecting a pixel and a thin film semiconductor for supplying current to an organic EL element in an organic EL display device (EL display). Used in devices (drive transistors). In this case, since the size of the driving transistor can be reduced due to the excellent on-characteristic of the thin film semiconductor device for display device, the aperture ratio can be improved and the yield can be improved in the EL display. Also, low power consumption can be realized.
- the bottom level of the off-current is reduced in the thin film semiconductor device for display device 10 according to the present embodiment as compared with the thin film semiconductor device for display device 100 according to the conventional example. Therefore, for example, when a thin film semiconductor device for a display device is used as a selection transistor of an EL display, it is possible to prevent a decrease in contrast due to leakage current and non-uniform image quality in a panel from the excellent off characteristics of the thin film semiconductor device for display device. And excellent data retention characteristics can be secured.
- the on / off ratio can be improved by improving the on-current and off-current characteristics as compared with the thin film semiconductor device for display device 100 according to the conventional example. Therefore, for example, when a thin film semiconductor device for a display device is used as a driving transistor of an EL display, a contrast ratio can be obtained in the EL display, and image quality can be improved.
- the thin film semiconductor device 100 for a display device according to the conventional example has a drain current Ids decreasing in a region where the drain voltage Vds is small, whereas the thin film for a display device according to the present embodiment.
- the drain current Ids is increased particularly in a region where the drain voltage Vds is small. Therefore, for example, when a thin film semiconductor device for a display device is used as a selection transistor of an EL display, a charging error between a pixel potential and a data potential in a scanning line selection period can be prevented in the EL display.
- the channel protective layer 5 is formed of an organic material, the channel protective layer 5 can be formed by a coating process at a low temperature, and a thin film semiconductor device having excellent TFT characteristics can be obtained with simple equipment and low cost. There are also effects.
- the carbon concentration contained in the interface layer 6 is 5 ⁇ 10 20 [atoms / cm 3 ] or more, and the impurities contained in the channel layer 4
- the carbon concentration is preferably 50 times or more.
- the interface layer 6 contains sulfur.
- the sulfur contained in the interface layer 6 is sulfur contained in the photosensitive material of the organic material of the channel protective layer 5. That is, sulfur contained in the interface layer 6 is derived from the organic material of the channel protective layer 5. Since sulfur has a larger atomic radius than carbon and oxygen, the effect of preventing carrier movement is larger than that of carbon and oxygen. Therefore, when the interface layer 6 contains sulfur, the carrier mobility can be further reduced, and the off characteristics of the thin film semiconductor device can be further improved.
- the sulfur concentration contained in the interface layer 6 is 5 ⁇ 10 19 [atoms / cm 3 ] or more, and the impurities contained in the channel layer 4 It is preferable that it is 100 times or more of the sulfur concentration as. Thereby, the effect of reducing the carrier mobility in the interface layer 6 can be surely exhibited.
- the interface layer 6 preferably has an insulating property with a specific resistance of 2 ⁇ 10 6 [ ⁇ ⁇ cm] or more. Thereby, the carrier mobility in the interface layer 6 can be further reduced.
- the method for manufacturing the thin film semiconductor device 10 for a display device it is preferable to perform a hydrogen plasma treatment between the crystallization step of the channel layer 4 and the coating step of the channel protective layer 5.
- a hydrogen plasma treatment it is preferable to perform a hydrogen plasma treatment between the crystallization step of the channel layer 4 and the coating step of the channel protective layer 5.
- FIGS. 10A to 10E are cross-sectional views showing some steps in the method of manufacturing the thin film semiconductor device 10A for display device according to the second embodiment of the present invention.
- the configuration of the thin film semiconductor device 10A for a display device according to the second embodiment of the present invention is the same as that of the thin film semiconductor device 10 for a display device according to the first embodiment shown in FIG.
- the manufacturing method is different between the present embodiment and the first embodiment. That is, the manufacturing method of the thin film semiconductor device 10A for a display device according to the present embodiment is a source electrode from the interface layer forming step (FIG. 2F) in the manufacturing method of the thin film semiconductor device 10 for a display device according to the first embodiment. Further, in any stage between the drain electrode formation step (FIG. 2K), a step of performing oxygen plasma treatment on the channel protective layer 5 is further included.
- FIGS. 10A to 10E A method for manufacturing a thin film semiconductor device 10A for a display device according to a second embodiment of the present invention will be described.
- a substrate preparation step (FIG. 2A), a gate electrode formation step (FIG. 2B), a gate insulating film formation step (FIG. 2C), a channel Layer forming step (FIG. 2D), channel protective layer coating step (FIG. 2E), channel protective layer pre-baking step (FIG. 2F), channel protective layer exposure and development step (FIG. 2G), and channel protective layer post-baking step (FIG. 2H) are performed sequentially.
- predetermined etching is performed by the same method as described in FIG. 2I.
- the residue of the channel protective layer 5 and the interface layer 6 under the residue are removed to form the channel protective layer 5 having a predetermined shape, and the convex portion and the flat portion can be formed in the channel layer 4. it can.
- oxygen plasma treatment is performed on the channel protective layer 5.
- the oxygen plasma treatment generates oxygen plasma containing oxygen radicals (O * ) in the plasma atmosphere.
- the generated oxygen plasma decomposes the organic components in the channel protective layer 5 and the channel protective layer 5.
- Silicon oxide is generated by bonding oxygen atoms to silicon contained in the substrate.
- the oxygen plasma treatment can be performed, for example, by generating oxygen plasma with a radio frequency (RF) power using a gas containing oxygen gas as a raw material and irradiating the channel protective layer 5 with the oxygen plasma.
- RF radio frequency
- the contact layer 7 is formed so as to extend from the upper surface of the channel protective layer 5 to the flat portion of the channel layer 4 by the same method as described in FIG. 2J.
- the source / drain metal film 8 to be the source electrode 8s and the drain electrode 8d is formed so as to cover the contact layer 7 by the same method as described in FIG. 2K.
- the source / drain metal film 8 is patterned by the same method as described in FIG. 2L to form the source electrode 8s and the drain electrode 8d having a predetermined shape, and then a pair of the predetermined shape is formed.
- the contact layer 7 and the island-shaped channel layer 4 are formed.
- the thin film semiconductor device 10A for a display device according to the second embodiment of the present invention can be obtained.
- the same effects as the thin film semiconductor device 10 for a display device according to the first embodiment described above can be obtained.
- the following effects can be obtained by performing oxygen plasma treatment on the channel protective layer 5 after post-baking.
- FIG. 11 is a diagram showing an IR spectrum in a thin film semiconductor device for a display device according to a conventional example, the first embodiment, and the second embodiment.
- the thin film semiconductor device 100 for a display device uses silicon oxide formed by thermal oxidation as the channel protective layer 205.
- the channel protective layer 205 made of an inorganic material has less fixed charge in the channel protective layer 205 than the channel protective layer made of an organic material.
- the channel protective layer 5 contains an organic material
- the channel protective layer 5 according to the first embodiment includes a conventional example.
- the IR spectrum of the thin film semiconductor device 10 for a display device according to the first embodiment is that of the thin film semiconductor device 100 for a display device according to the conventional example (conventional example). Different from IR spectrum.
- the thin film semiconductor device 10A for a display device for a display device according to the present embodiment, an organic material is included in the coating material of the channel protective layer 5, and the channel protective layer 5 is subjected to oxygen plasma treatment. Therefore, the organic component in the channel protective layer 5 is decomposed, and silicon contained in the channel protective layer 5 is oxidized.
- the IR spectrum of the thin film semiconductor device for display device 10A according to the second embodiment (present invention 2) is measured, as shown in FIG.
- the IR spectrum of the thin film semiconductor device 100 for a display device according to the conventional example using an inorganic material (silicon oxide) as the protective layer is approached, and the organic component in the channel protective layer 5 is decomposed by the oxygen plasma treatment, and the channel protective layer It can be seen that 5 silicon is oxidized.
- silicon oxide silicon oxide
- the thin film semiconductor device 10A for a display device can reduce the fixed charge in the channel protective layer 5 as compared with the first embodiment, and further suppress back channel conduction. Thus, off current can be suppressed.
- FIG. 12A and FIG. 13A are diagrams for explaining the operation of the thin film semiconductor device 10 for a display device according to the first embodiment.
- 12B and 13B are diagrams for explaining the operation of the thin film semiconductor device 10A for a display device according to the second embodiment.
- FIG. 14 is a diagram showing the shift amount of the threshold voltage when stress is applied in the thin film semiconductor devices 10 and 10A for display devices according to the first and second embodiments.
- the thin film semiconductor device 10 for a display device since a fixed charge is generated in the channel protective layer 5 containing an organic material, it moves from the source electrode 8s to the drain electrode 8d. As shown in FIG. 13A, the number of electrons to be trapped increases by the organic component in the channel protective layer 5.
- the organic material in the channel protective layer 5 is decomposed by the oxygen plasma treatment, so that the skeleton of molecules constituting the channel protective layer 5 An oxygen atom is inserted into the part.
- the channel protective layer 5 becomes a film having a skeleton and composition close to that of silicon oxide. Therefore, as shown in FIG. 12B and FIG. 13B, the opportunity for electrons moving from the source electrode 8s to the drain electrode 8d to be trapped by the organic component in the channel protective layer 5 can be reduced. Thereby, since the shift amount of the threshold voltage can be suppressed, the reliability as a device can be improved.
- the curve indicated by a broken line represents the result of the thin film semiconductor device 10 for a display device according to the first embodiment in which oxygen plasma treatment is not performed (present invention 1), and the curve indicated by a solid line is The result of 10 A of thin film semiconductor devices for display apparatuses which concerns on 2nd Embodiment which performed oxygen plasma processing (this invention 2) is represented.
- the thin film semiconductor device for display device 10A according to the second embodiment in which the oxygen plasma treatment is performed (the present invention 2) is in accordance with the first embodiment in which the oxygen plasma treatment is not performed. It can be seen that the shift amount of the threshold voltage is small and the reliability as a device is high as compared with the thin film semiconductor device 10 for display device (present invention 1).
- FIG. 15 is a diagram showing current-voltage characteristics in the thin film semiconductor devices 10 and 10A for display devices according to the first and second embodiments.
- the curve indicated by a broken line represents the result of the first embodiment (present invention 1) in which oxygen plasma treatment was not performed, and the curve indicated by a solid line represents the result of oxygen plasma treatment being performed.
- the result of 2 embodiment (this invention 2) is represented.
- the present invention 2 subjected to the oxygen plasma treatment has a reduced off current and an improved off-characteristic compared to the present invention 1 not subjected to the oxygen plasma treatment. This is presumably because the back channel conduction is suppressed by reducing the fixed charges in the channel protective layer 5 by the oxygen plasma treatment.
- oxygen plasma treatment is performed on the channel protective layer 5.
- This oxygen plasma treatment has a PF power density of 3 to 30 [W / cm 2 ] and a temperature of 50. It is preferable to carry out in a range of up to 350 [° C.] and a pressure of 1 to 10 [Torr].
- the lower limit value of the RF power density is 3 [W / cm 2 ] in consideration of the penetration depth of oxygen into the channel protective layer 5, and the upper limit values of the RF power density are the channel protective layer 5 and the channel layer. Considering the damage to 4, it is 30 [W / cm 2 ].
- the lower limit value of the temperature is 50 ° C. in consideration of the efficiency of substitution of oxygen for the organic matter in the channel protective layer 5, and the upper limit value of the temperature is 350 [° C.] in order to prevent dehydrogenation from the channel layer 4. Preferably there is.
- the lower limit of the pressure is 1 [Torr] in consideration of damage to the channel protective layer 5 and the channel layer 4, and the upper limit of the pressure considers the oxygen substitution efficiency with respect to the organic matter in the channel protective layer 5.
- 10 [Torr] is desirable.
- the oxygen flow rate is 1500 [sccm (standard cc / min)]
- the power density is 1 [W / cm 2 ]
- the pressure is 1 [Torr]
- the plasma irradiation time is 10 [sec].
- the temperature was set to 120 [° C.].
- oxygen plasma treatment is used, for example, when ashing an organic resist.
- the organic component in the organic resist is decomposed and the organic resist is removed.
- the channel protective layer 5 contains silicon. Therefore, when the channel protective layer 5 is ashed, silicon remains even if the organic component in the channel protective layer 5 is decomposed. Accordingly, when ashing is performed on the channel protective layer 5 formed by coating with an organic material under the above conditions, the organic component in the channel protective layer 5 is decomposed, and the channel protective layer 5 is formed into a film close to a silicon oxide film. can do.
- FIGS. 16A to 16E are cross-sectional views illustrating some steps in the method for manufacturing the thin film semiconductor device for a display device 10B according to the third embodiment of the present invention.
- the configuration of the thin film semiconductor device 10B for a display device according to the third embodiment of the present invention is the same as that of the thin film semiconductor device 10 for a display device according to the first embodiment shown in FIG.
- the manufacturing method is different between the present embodiment and the first embodiment. That is, the manufacturing method of the thin film semiconductor device 10B for display device according to the present embodiment is the source electrode from the interface layer forming step (FIG. 2F) in the manufacturing method of the thin film semiconductor device 10 for display device according to the first embodiment. And a step of further baking (second baking) the channel protective layer 5 after post-baking at any stage between the drain electrode forming process (FIG. 2K).
- a method for manufacturing a thin film semiconductor device 10B for a display device according to a third embodiment of the present invention will now be described.
- a substrate preparation step (FIG. 2A), a gate electrode formation step (FIG. 2B), a gate insulating film formation step (FIG. 2C), a channel Layer forming step (FIG. 2D), channel protective layer coating step (FIG. 2E), channel protective layer pre-baking step (FIG. 2F), channel protective layer exposure and development step (FIG. 2G), and channel protective layer post-baking step (FIG. 2H) are performed sequentially.
- predetermined etching is performed by the same method as described in FIG. 2I.
- the residue of the channel protective layer 5 and the interface layer 6 under the residue are removed to form the channel protective layer 5 having a predetermined shape, and the convex portion and the flat portion can be formed in the channel layer 4. it can.
- the channel protective layer 5 is baked (second bake) at a temperature of 320 ° C., for example.
- the contact layer 7 is formed so as to extend from the upper surface of the channel protective layer 5 to the flat portion of the channel layer 4 by the same method as described in FIG. 2J.
- the source / drain metal film 8 to be the source electrode 8s and the drain electrode 8d is formed so as to cover the contact layer 7 by the same method as described in FIG. 2K.
- the source / drain metal film 8 is patterned by the same method as described in FIG. 2L to form the source electrode 8s and the drain electrode 8d having a predetermined shape, and then a pair of the predetermined shape is formed.
- the contact layer 7 and the island-shaped channel layer 4 are formed.
- the thin film semiconductor device 10B for a display device according to the third embodiment of the present invention can be obtained.
- the channel protective layer 5 after the post-baking and etching is further baked (second baking).
- the organic component in the channel protective layer 5 is decomposed to increase the silicon-oxygen bonds in the molecules constituting the channel protective layer.
- the channel protective layer 5 becomes a film having a skeleton and a composition close to that of silicon oxide, as in the second embodiment.
- the chance of electrons moving from the source electrode 8s to the drain electrode 8d being trapped by the organic components in the channel protective layer 5 can be reduced, and the threshold voltage shift is suppressed and the reliability of the device is improved. Can be made.
- the organic component in the channel protective layer 5 can be decomposed by performing the second baking, the fixed charge in the channel protective layer 5 can be reduced. As a result, back channel conduction can be suppressed as in the second embodiment, so that off current can be suppressed and off characteristics can be improved.
- the second baking process is preferably performed in a temperature range of 300 [° C.] to 350 [° C.].
- the baking temperature is preferably set to 300 ° C. as the lower limit. This is because the baking temperature is preferably 350 ° C. in order to prevent dehydrogenation.
- the second bake treatment is preferably performed prior to the oxygen plasma treatment.
- the second baking process is performed before the oxygen plasma process, abrupt composition change or volume change may occur in the channel protective layer 5, but by performing the second baking process prior to the oxygen plasma process, An abrupt composition change and volume change in the channel protective layer 5 can be prevented, and cracks and the like can be prevented from occurring in the channel protective layer 5.
- FIG. 17 is a cross-sectional view schematically showing a configuration of a thin film semiconductor device 10C for a display device according to the fourth embodiment of the present invention.
- the thin film semiconductor device for display device 10C according to the fourth embodiment of the present invention and the thin film semiconductor device for display device 10 according to the first embodiment of the present invention have different channel layer configurations. That is, in the thin film semiconductor device 10C for a display device according to the fourth embodiment of the present invention, the channel layer is composed of a plurality of layers.
- the same components as those shown in FIG. 1 are denoted by the same reference numerals, and the description thereof is omitted.
- the channel layer 4 in the thin film semiconductor device for a display device 10C according to the fourth embodiment of the present invention has a two-layer structure of a first channel layer 41 and a second channel layer. Yes.
- the first channel layer 41 is formed on the gate insulating film 3 below the convex shape of the second channel layer 42.
- the first channel layer 41 is formed of a polycrystalline semiconductor layer such as polycrystalline silicon.
- the first channel layer 41 that is a polycrystalline semiconductor layer includes a microcrystalline semiconductor layer having an average particle diameter of 10 nm to 50 nm.
- the second channel layer 42 is a layer formed on the first channel layer 41, corresponds to the channel layer 4 in the first embodiment, and has a convex shape (convex portion) and a flat shape (flat portion) on the surface. And have.
- the second channel layer 42 is formed by an amorphous semiconductor layer such as amorphous silicon (amorphous silicon).
- the channel layer 4 includes the first channel layer 41 (lower layer) made of an amorphous semiconductor layer and the second channel layer 42 made of a polycrystalline semiconductor layer. Therefore, it is possible to realize a thin film semiconductor device for a display device that is further excellent in on / off characteristics as compared with the first embodiment.
- the thin film semiconductor device 10C for a display device according to the present embodiment can be manufactured by the same method as in the first embodiment, and the manufacturing method in the second or third embodiment is applied. You can also
- Display device Next, an example in which the thin film semiconductor device for a display device according to each of the above embodiments is applied to a display device will be described with reference to FIGS. In this embodiment, an application example to an organic EL display device will be described.
- FIG. 18 is a partially cutaway perspective view of the organic EL display device according to the embodiment of the present invention.
- the thin film semiconductor device for a display device described above can be used as a switching transistor or a drive transistor of an active matrix substrate in an organic EL display device.
- the organic EL display device 20 includes an active matrix substrate 21, a plurality of pixels 22 arranged in a matrix on the active matrix substrate 21, and an array connected to the pixels 22 on the active matrix substrate 21.
- a plurality of pixel circuits 23 arranged in a row, an anode 24, an organic EL layer 25 and a cathode 26 (transparent electrode) sequentially stacked on the pixels 22 and the pixel circuits 23, each pixel circuit 23 and a control circuit (not shown). are provided with a plurality of source lines 27 and gate lines 28.
- the organic EL layer 25 is configured by laminating layers such as an electron transport layer, a light emitting layer, and a hole transport layer.
- FIG. 19 is a diagram showing a circuit configuration of a pixel using the thin film semiconductor device for a display device according to the embodiment of the present invention.
- the pixel 22 includes a drive transistor 31, a switching transistor 32, an organic EL element 33, and a capacitor 34.
- the drive transistor 31 is a transistor that drives the organic EL element 33
- the switching transistor 32 is a transistor for selecting the pixel 22.
- the source electrode 32S of the switching transistor 32 is connected to the source line 27, the gate electrode 32G is connected to the gate line 28, and the drain electrode 32D is connected to the capacitor 34 and the gate electrode 31G of the drive transistor 31.
- the drain electrode 31D of the drive transistor 31 is connected to the power supply line 35, and the source electrode 31S is connected to the anode of the organic EL element 33.
- the display device according to the embodiment of the present invention has been described above, but the present invention is not limited to this.
- an organic EL display device using an organic EL element is described in this embodiment mode, the present invention can also be applied to a display device including another display element using an active matrix substrate such as a liquid crystal display element.
- the display device according to the embodiment of the present invention described above can be used as a flat panel display, and can be applied to an electronic apparatus having any display unit such as a television set, a personal computer, and a mobile phone. Can do.
- the thin film semiconductor device for display device and the manufacturing method thereof according to the present invention have been described based on the embodiments.
- the thin film semiconductor device for display device and the manufacturing method thereof according to the present invention are the same as the above embodiments. It is not limited. Forms obtained by subjecting each embodiment to various modifications conceived by those skilled in the art, and forms realized by arbitrarily combining components and functions in each embodiment without departing from the spirit of the present invention It is included in the present invention.
- the thin film semiconductor device for a display device according to the present invention can be widely used for various electric devices having a display device such as a television set, a personal computer, a mobile phone, or other thin film semiconductor devices.
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Abstract
Description
以下、本発明の実施の形態に係る表示装置用薄膜半導体装置及びその製造方法について、図面を参照しながら説明する。
まず、本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10について、以下説明する。
図1は、本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10の構成を模式的に示した断面図である。
以下、本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10の製造方法について、図2A~図2Mを用いて説明する。図2A~図2Mは、本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10の製造方法における各工程の構成を模式的に示した断面図である。
次に、上記のように製造された本実施の形態に係る表示装置用薄膜半導体装置10における界面層6の構成について、図3A及び図3Bを用いて説明する。図3Aは、上記の製造方法によって作製した表示装置用薄膜半導体装置10(図2Kの破線で囲まれる領域Aの部分)における断面TEM像である。また、図3Bは、図3Aの破線で囲まれる領域Bの断面構造を説明するための模式図である。
次に、本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10の第1の作用効果について、図6A及び図6Bを用いて説明する。図6Aは、従来例に係る表示装置用薄膜半導体装置100の作用を説明するための図である。図6Bは、図1に示す本発明の第1の実施の形態に係る表示装置用薄膜半導体装置10の第1の作用効果を説明するための図である。なお、図6Aに示す実線矢印及び図6Bに示す破線矢印は、バックチャネル(バック経路)、すなわち、リーク電流の流れを示している。
次に、本発明の第2の実施の形態に係る表示装置用薄膜半導体装置10Aについて、図10A~図10Eを用いて説明する。図10A~図10Eは、本発明の第2の実施の形態に係る表示装置用薄膜半導体装置10Aの製造方法における一部の工程を示す断面図である。
次に、本発明の第3の実施の形態に係る表示装置用薄膜半導体装置10Bについて、図16A~図16Eを用いて説明する。図16A~図16Eは、本発明の第3の実施の形態に係る表示装置用薄膜半導体装置10Bの製造方法における一部の工程を示す断面図である。
次に、本発明の第4の実施の形態に係る表示装置用薄膜半導体装置10Cについて、図17を用いて説明する。図17は、本発明の第4の実施の形態に係る表示装置用薄膜半導体装置10Cの構成を模式的に示しめした断面図である。
次に、上記の各実施の形態に係る表示装置用薄膜半導体装置を表示装置に適用した例について、図18を用いて説明する。なお、本実施の形態では、有機EL表示装置への適用例について説明する。
2、31G、32G ゲート電極
3 ゲート絶縁膜
4、104 チャネル層
5、105、205 チャネル保護層
6、206 界面層
7 コンタクト層
8 ソースドレイン金属膜
8s、31S、32S ソース電極
8d、31D、32D ドレイン電極
10、10A、10B、10C、100、200 表示装置用薄膜半導体装置
20 有機EL表示装置
21 アクティブマトリクス基板
22 画素
23 画素回路
24 陽極
25 有機EL層
26 陰極
27 ソース線
28 ゲート線
31 駆動トランジスタ
32 スイッチングトランジスタ
33 有機EL素子
34 コンデンサ
35 電源線
41 第1チャネル層
42 第2チャネル層
70 非晶質シリコン層
Claims (24)
- 基板と、
前記基板上に形成されたゲート電極と、
前記ゲート電極上に形成されたゲート絶縁膜と、
前記ゲート絶縁膜上に形成され、表面に凸形状を持つチャネル層と、
前記チャネル層の凸形状の上に形成され、シリコン、酸素及びカーボンを含む有機材料を含有するチャネル保護層と、
前記チャネル層の凸形状の上面と前記チャネル保護層との界面に形成され、カーボンを主成分として含み、その主成分であるカーボンは前記有機材料に由来するカーボンである界面層と、
前記チャネル保護層の端部の上部及び側部、前記チャネル保護層の側部につらなる前記界面層の側部、前記界面層の側部につらなる前記チャネル層の凸形状の側部、並びに前記チャネル層の前記凸形状の側部につらなる前記チャネル層の上部に沿って形成されたソース電極及びドレイン電極と、を具備する、
表示装置用薄膜半導体装置。 - さらに、前記チャネル保護層の端部の上面及び側面、前記チャネル保護層の側面につらなる前記界面層の側面、前記界面層の側面につらなる前記チャネル層の凸形状の側面、並びに前記チャネル層の前記凸形状の側面につらなる前記チャネル層の上面に形成された2つのコンタクト層を具備し、
前記ソース電極は、前記2つのコンタクト層のうちの一方の上に形成され、
前記ドレイン電極は、前記2つのコンタクト層のうちの他方の上に形成される、
請求項1記載の表示装置用薄膜半導体装置。 - 前記チャネル層の凸形状の両側の下部は、前記ソース電極及び前記ドレイン電極と前記チャネル層との間の電荷の移動経路となる、
請求項1又は請求項2記載の表示装置用薄膜半導体装置。 - 前記チャネル層の凸形状部分における膜厚と前記チャネル層の凸形状の両側の下部における膜厚との膜厚差は2nm以上である、
請求項1から請求項3のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記チャネル保護層の幅は、前記チャネル層の凸形状の上部の上面の幅と同一幅である、
請求項1から請求項4のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記界面層に含まれるカーボンの濃度は、前記チャネル層に含まれる不純物としてのカーボンの濃度の50倍以上である、
請求項1から請求項5のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記界面層に含まれるカーボンの濃度は、5×1020[atoms/cm3]以上である、
請求項1から請求項5のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記有機材料は硫黄を含む、
請求項1から請求項7のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記界面層に含まれる硫黄の濃度は、前記チャネル層に含まれる不純物としての硫黄の濃度の100倍以上である、
請求項8記載の表示装置用薄膜半導体装置。 - 前記界面層に含まれる硫黄の濃度は、5×1019[atoms/cm3]以上である、
請求項8記載の表示装置用薄膜半導体装置。 - 前記界面層は、比抵抗が2×106[Ω・cm]以上である、
請求項1から請求項10のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記界面層の厚みは、1nm以上、5nm以下である、
請求項1から請求項11のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記チャネル層は、
凸形状の下部が多結晶半導体層からなる第1チャネル層と、
前記第1チャネル層上に形成された非晶質半導体層からなり、表面に凸形状を持つ第2チャネル層と、を含む、
請求項1から請求項12のいずれか1項に記載の表示装置用薄膜半導体装置。 - 前記多結晶半導体層は多結晶シリコンであり、
前記非晶質半導体層は非晶質シリコンである、
請求項13記載の表示装置用薄膜半導体装置。 - 前記多結晶半導体層は、平均粒径が10nmから50nmの微結晶性半導体層を含む、
請求項13記載の表示装置用薄膜半導体装置。 - 基板を準備する第1工程と、
前記基板上にゲート電極を形成する第2工程と、
前記ゲート電極上にゲート絶縁膜を形成する第3工程と、
前記ゲート絶縁膜上にチャネル層を形成する第4工程と、
前記チャネル層上に、シリコン、酸素及びカーボンを含む有機材料を塗布してチャネル保護層を形成する第5工程と、
前記チャネル保護層をベークすることにより、前記チャネル層と前記チャネル保護層との界面に、カーボンを主成分として含み、その主成分であるカーボンは前記有機材料に由来するカーボンである界面層を形成する第6工程と、
所定のエッチング方法により前記チャネル層のチャネル領域を残すように前記チャネル保護層及び前記チャネル層をエッチングすることにより、前記チャネル層に凸形状を形成するとともに前記チャネル層の凸形状の上に前記チャネル保護層を残留させる第7工程と、
前記チャネル保護層の端部の上部及び側部、前記チャネル保護層の側部につらなる前記界面層の側部、前記界面層の側部につらなる前記チャネル層の凸形状の側部、並びに前記チャネル層の前記凸形状の側部につらなる前記チャネル層の上部に沿ってソース電極及びドレイン電極を形成する第8工程と、を含む、
表示装置用薄膜半導体装置の製造方法。 - 前記所定のエッチング方法は、ドライエッチングである、
請求項16に記載の表示装置用薄膜半導体装置の製造方法。 - 前記第7工程と前記第8工程との間に、
前記チャネル保護層の端部の上面及び側面、前記チャネル保護層の側面につらなる前記界面層の側部、前記界面層の側部につらなる前記チャネル層の凸形状の側面、並びに前記チャネル層の前記凸形状の側面につらなる前記チャネル層の上面に、2つのコンタクト層を形成する工程を含み、
前記第8工程において、
前記ソース電極は、前記2つのコンタクト層のうちの一方の上に形成され、前記ドレイン電極は前記2つのコンタクト層のうちの他方の上に形成される、
請求項16又は請求項17記載の表示装置用薄膜半導体装置の製造方法。 - 前記第6工程から前記第8工程の間のいずれかの段階において、前記チャネル保護層に酸素プラズマ処理を行う工程を含む、
請求項16~請求項18のいずれか1項に記載の表示装置用薄膜半導体装置の製造方法。 - 前記酸素プラズマ処理は、前記チャネル保護層内の有機成分を分解し、前記チャネル保護層に含まれるシリコンに酸素原子を結合させて酸化シリコンとする、
請求項19に記載の表示装置用薄膜半導体装置の製造方法。 - 前記酸素プラズマ処理は、パワー密度が3~30[W/cm2]、温度が50~350[℃]、圧力が1~10[Torr]の範囲にてなされる、
請求項19又は請求項20記載の表示装置用薄膜半導体装置の製造方法。 - 前記第6工程から前記第8工程の間のいずれかの段階において、前記チャネル保護層に第2ベーク処理を行う工程を含む、
請求項16~請求項18のいずれか1項に記載の表示装置用薄膜半導体装置の製造方法。 - 前記酸素プラズマ処理に先立って前記チャネル保護層に第2ベーク処理を行う工程を含む、
請求項19から請求項21のいずれか1項に記載の表示装置用薄膜半導体装置の製造方法。 - 前記第2ベーク処理は、温度が300~350[℃]の範囲にてなされる、
請求項22又は請求項23に記載の表示装置用薄膜半導体装置の製造方法。
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WO2015001755A1 (ja) | 2013-07-05 | 2015-01-08 | パナソニック株式会社 | 薄膜トランジスタ素子とその製造方法及び表示装置 |
US9865830B2 (en) * | 2015-06-16 | 2018-01-09 | Gwangju Institute Of Science And Technology | Organic thin film transistor, method for manufacturing the same and method for recoverying insulation thereof |
CN105261638A (zh) * | 2015-08-04 | 2016-01-20 | 广东顺德中山大学卡内基梅隆大学国际联合研究院 | 一种具有鳍型沟道结构的薄膜晶体管及其制备方法 |
JP2017143135A (ja) * | 2016-02-09 | 2017-08-17 | 株式会社ジャパンディスプレイ | 薄膜トランジスタ |
CN106057828A (zh) * | 2016-08-12 | 2016-10-26 | 京东方科技集团股份有限公司 | 一种基板及其制备方法、显示面板 |
CN110828578B (zh) * | 2019-10-16 | 2022-11-08 | Tcl华星光电技术有限公司 | 薄膜晶体管及其制备方法与显示装置 |
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- 2011-04-06 CN CN201180041844.5A patent/CN103109373B/zh not_active Expired - Fee Related
- 2011-04-06 WO PCT/JP2011/002037 patent/WO2012137251A1/ja active Application Filing
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2013
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JP5649720B2 (ja) | 2015-01-07 |
CN103109373A (zh) | 2013-05-15 |
CN103109373B (zh) | 2016-04-13 |
US9431543B2 (en) | 2016-08-30 |
JPWO2012137251A1 (ja) | 2014-07-28 |
US20130168678A1 (en) | 2013-07-04 |
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