WO2012133838A1 - ガラス基板の製造方法 - Google Patents
ガラス基板の製造方法 Download PDFInfo
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- WO2012133838A1 WO2012133838A1 PCT/JP2012/058710 JP2012058710W WO2012133838A1 WO 2012133838 A1 WO2012133838 A1 WO 2012133838A1 JP 2012058710 W JP2012058710 W JP 2012058710W WO 2012133838 A1 WO2012133838 A1 WO 2012133838A1
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- WIPO (PCT)
- Prior art keywords
- temperature
- sheet glass
- cooling
- glass
- cooling rate
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/067—Forming glass sheets combined with thermal conditioning of the sheets
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B18/00—Shaping glass in contact with the surface of a liquid
- C03B18/02—Forming sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B17/00—Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
- C03B17/06—Forming glass sheets
- C03B17/064—Forming glass sheets by the overflow downdraw fusion process; Isopipes therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B25/00—Annealing glass products
- C03B25/04—Annealing glass products in a continuous way
- C03B25/10—Annealing glass products in a continuous way with vertical displacement of the glass products
- C03B25/12—Annealing glass products in a continuous way with vertical displacement of the glass products of glass sheets
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/235—Heating the glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Definitions
- the present invention relates to a method for manufacturing a glass substrate.
- Patent Document 1 Japanese Unexamined Patent Application Publication No. 2009-196879
- molten glass is poured into a molded body, and then the molten glass is allowed to overflow from the top of the molded body.
- the overflowed molten glass flows down along both side surfaces of the molded body and joins at the lower end of the molded body to form sheet-like glass (sheet glass).
- sheet glass is cooled while being pulled downward by the pulling roller.
- the cooled sheet glass is cut into a desired length to become a glass substrate.
- a semiconductor element such as a thin film transistor (TFT) is formed on a glass substrate for a flat panel display such as a liquid crystal display.
- TFT thin film transistor
- the glass substrate is heat-treated at a high temperature, so that the glass substrate undergoes structural relaxation and the volume shrinks due to thermal shrinkage.
- the thermal contraction rate is large, there arises a problem that a circuit pattern formed on the glass substrate is shifted.
- Patent Document 1 As a means for solving this problem, a method disclosed in Patent Document 1 has been proposed. In this method, in the slow cooling process of the downdraw method, the average cooling rate from the annealing point to the temperature of “annealing point ⁇ 50 ° C.” from the average cooling rate from the temperature of “annealing point + 100 ° C.” to the annealing point. The cooling rate is lowered. With this configuration, a glass having a small heat shrinkage rate can be obtained. As described above, in Patent Document 1, the cooling rate in the flow direction of the sheet glass is defined in consideration of the thermal shrinkage rate. However, it is necessary to improve the thermal shrinkage rate while further improving the productivity. It was. Moreover, in patent document 1, it was not able to make sheet thickness of sheet glass uniform, making the thermal contraction rate favorable, and also reducing the curvature and distortion of sheet glass.
- An object of the present invention is to provide a method for producing a glass substrate that, when producing a glass substrate using the downdraw method, improves the production amount of the glass substrate and enables production of a glass substrate having a good thermal shrinkage rate. provide.
- the method for manufacturing a glass substrate according to the present invention includes a forming step and a cooling step.
- the molten glass is formed into a sheet glass by a downdraw method.
- the cooling step the sheet glass is cooled.
- the cooling process includes a first cooling process, a second cooling process, and a third cooling process.
- cooling is performed at the first average cooling rate until the temperature of the central region of the sheet glass reaches the annealing point.
- cooling is performed at the second average cooling rate until the temperature in the central region reaches the strain point of ⁇ 50 ° C. from the annealing point.
- the third cooling step cooling is performed at the third average cooling rate until the temperature in the central region changes from the strain point of ⁇ 50 ° C. to the strain point of ⁇ 200 ° C.
- the first average cooling rate is 5.0 ° C./second or more.
- the first average cooling rate is faster than the third average cooling rate.
- the third average cooling rate is faster than the second average cooling rate.
- the smaller the second average cooling rate the smaller the thermal shrinkage of the sheet glass. Therefore, by making the second average cooling rate the slowest among the first to third average cooling rates, the thermal contraction rate of the sheet glass can be effectively reduced. Thereby, while improving the production amount of a glass substrate, a suitable glass substrate can be manufactured.
- region of sheet glass is an area
- the edge part of sheet glass is an area
- the first average cooling rate is preferably in the range of 5.0 ° C./second to 50 ° C./second.
- the first average cooling rate is more preferably in the range of 5.0 ° C./second to 45 ° C./second, and further preferably in the range of 5.0 ° C./second to 40 ° C./second. preferable.
- the first cooling step includes a first temperature at which the temperature of the end portion in the width direction of the sheet glass is lower than the temperature of the central region sandwiched between the end portions and the temperature of the central region is uniform. It is preferable that after a control process and a 1st temperature control process are performed, the 2nd temperature control process which makes the temperature of the width direction of a sheet glass become low toward an edge part from a center part.
- the viscosity of the end portion of the sheet glass is increased.
- contraction of the width direction of sheet glass can be suppressed.
- the plate thickness can be made uniform by making the temperature of the end portion in the width direction of the sheet glass lower than the temperature of the central region.
- region becomes uniform and plate
- the first temperature control step is preferably performed immediately below the formed body in order to make the plate thickness more uniform, and is preferably performed until the sheet glass is cooled to the vicinity of the glass softening point.
- “near the glass softening point” is preferably a temperature region from “glass softening point ⁇ 20 ° C.” to “glass softening point + 20 ° C.”.
- the second cooling step includes a third temperature control step in which the temperature gradient between the end portion in the width direction of the sheet glass and the central portion is reduced as the vicinity of the glass strain point is approached.
- the second temperature control step a temperature gradient is formed in which the temperature in the width direction of the sheet glass decreases from the center toward the end.
- the temperature gradient formed in the second temperature control step becomes smaller in the process of cooling the sheet glass toward the vicinity of the glass strain point.
- the sheet glass can be cooled by the tensile stress while maintaining the flatness of the sheet glass. Therefore, in the second temperature control step and the third temperature control step, the warp and distortion of the sheet glass can be reduced by controlling the temperature distribution in the width direction of the sheet glass.
- the strain after cooling can be reduced by cooling so as to reduce the temperature gradient in the width direction toward the temperature region near the glass strain point.
- the temperature difference between the end portion in the width direction and the center portion of the sheet glass in the cooling step is minimized. If the sheet glass has a temperature difference at the glass strain point, the sheet glass is distorted after being cooled to room temperature. That is, in the temperature region in the vicinity of the glass strain point, the strain in the sheet glass can be reduced by reducing the temperature difference in the width direction between the end portion and the center portion in the width direction of the sheet glass.
- the temperature gradient in the width direction of the sheet glass gradually decreases as it goes downstream in the flow direction of the sheet glass.
- a temperature gradient in the width direction of the sheet glass is formed so that the temperature in the width direction of the sheet glass gradually decreases from the central portion toward the end portion.
- the temperature gradient in the width direction of the sheet glass gradually decreases as the temperature in the width direction of the sheet glass gradually decreases from the central portion toward the end portion, and toward the downstream in the flow direction of the sheet glass. It is more preferable to decrease gradually.
- the temperature in the width direction of the sheet glass gradually decreases in a convex shape from the central portion toward the end portion.
- the temperature in the width direction of the sheet glass gradually decreases in a convex shape from the center portion toward the end portion and goes downstream in the flow direction of the sheet glass. More preferably, the temperature gradient gradually decreases.
- the second cooling step includes a third temperature control step in which the temperature gradient between the end portion and the center portion of the sheet glass in the width direction is reduced as the vicinity of the glass strain point is approached.
- the third cooling step includes a fourth temperature control step in which the temperature in the width direction of the sheet glass is lowered from the end portion in the width direction of the sheet glass toward the center portion.
- the cooling amount of the sheet glass increases as it goes from the end portion of the sheet glass to the central portion. Therefore, as described above, tensile stress acts on the central portion of the sheet glass in the flow direction and the width direction of the sheet glass. Therefore, since it can cool, maintaining the flatness of sheet glass, the curvature of sheet glass can be reduced.
- the temperature gradient is formed so that the temperature of the sheet glass gradually decreases in a convex shape from the end in the width direction toward the center.
- the second average cooling rate is 0.5 ° C./second to 5.5 ° C./second
- the third average cooling rate is 1.5 ° C./second to 7.0 ° C./second. Is preferred.
- the productivity is deteriorated.
- the second average cooling rate exceeds 5.5 ° C./second, the thermal shrinkage rate of the sheet glass increases. Moreover, the curvature and distortion of sheet glass will worsen.
- the productivity is deteriorated. Further, if the third average cooling rate exceeds 7.0 ° C./second, cracks may occur in the sheet glass. Moreover, the curvature of sheet glass will worsen.
- the second average cooling rate is preferably in the range of 1.0 ° C./second to 3.0 ° C./second, and the third average cooling rate is 2.0 ° C./second to 5.5 ° C. It is preferable that it is (degreeC / sec).
- the sheet glass cooled by the cooling step has a heat shrinkage rate of 100 ppm or less.
- the sheet glass cooled by the cooling step preferably has a heat shrinkage rate in the range of 20 ppm to 100 ppm, more preferably has a heat shrinkage rate in the range of 20 ppm to 95 ppm, and 20 ppm to 90 ppm. It is particularly preferred to have a thermal shrinkage within the range.
- the cooling step preferably further includes a temperature gradient control step of controlling the temperature gradient in the width direction of the sheet glass along the flow direction of the sheet glass.
- the temperature gradient control step by controlling the cooling rate in the flow direction of the sheet glass so as to be the above-mentioned first average cooling rate, second average cooling rate, and third average cooling rate, The heat shrinkage rate can be improved. Furthermore, by controlling the temperature gradient in the width direction of the sheet glass, it is possible to produce a glass substrate having a uniform plate thickness and reduced warpage and distortion. Moreover, the production amount of a glass substrate can be improved.
- the sheet glass cooled by the cooling step preferably has a strain value of 1.0 nm or less.
- the sheet glass cooled in the cooling step preferably has a strain value in the range of 0 nm to 0.95 nm, and more preferably has a strain value in the range of 0 nm to 0.90 nm.
- the sheet glass cooled by the cooling process has a warp value of 0.15 mm or less.
- the sheet glass cooled in the cooling step preferably has a warp value in the range of 0 mm to 0.10 mm, and more preferably has a warp value in the range of 0 mm to 0.05 mm.
- the sheet glass cooled in the cooling step has a thickness deviation of 15 ⁇ m or less.
- the sheet glass cooled in the cooling step preferably has a thickness deviation within the range of 0 ⁇ m to 14 ⁇ m, and more preferably has a thickness deviation within the range of 0 ⁇ m to 13 ⁇ m.
- the production amount of the glass substrate can be improved and a suitable glass substrate can be produced.
- a glass substrate for a TFT display having a predetermined heat shrinkage rate is manufactured.
- the predetermined heat shrinkage rate is 100 ppm or less.
- the glass substrate is manufactured using a downdraw method.
- the glass substrate manufacturing method mainly includes a melting step S1, a clarification step S2, a forming step S3, a cooling step S4, and a cutting step S5.
- the melting step S1 is a step in which the glass raw material is melted.
- the glass raw material is put into a melting apparatus 11 arranged upstream.
- Glass raw materials for example, SiO 2, Al 2 O 3 , B 2 O 3, CaO, SrO, a composition of BaO or the like.
- a glass material having a strain point of 660 ° C. or higher is used.
- the glass raw material is melted by the melting device 11 to become a molten glass FG.
- the melting temperature is adjusted according to the type of glass. In this embodiment, the glass raw material is melted at 1500 ° C. to 1650 ° C.
- the molten glass FG is sent to the refining device 12 through the upstream pipe 23.
- the clarification step S2 is a step of removing bubbles in the molten glass FG.
- the molten glass FG from which bubbles have been removed in the refining device 12 is then sent to the forming device 40 through the downstream pipe 24.
- the forming step S3 is a step of forming the molten glass FG into a sheet-like glass (sheet glass) SG. Specifically, the molten glass FG overflows from the molded body 41 after being continuously supplied to the molded body 41 included in the molding apparatus 40. The overflowed molten glass FG flows down along the surface of the molded body 41. The molten glass FG is then merged at the lower end of the molded body 41 and formed into a sheet glass SG.
- sheet glass sheet glass
- Cooling step S4 is a step of cooling (slow cooling) the sheet glass SG.
- the glass sheet is cooled to a temperature close to room temperature through the cooling step S4. Note that the thickness (plate thickness) of the glass substrate, the amount of warpage of the glass substrate, and the amount of strain of the glass substrate are determined according to the cooling state in the cooling step S4.
- the cutting step S5 is a step of cutting the sheet glass SG having a temperature close to room temperature into a predetermined size.
- size becomes a glass substrate through processes, such as end surface processing after that.
- the width direction of the sheet glass SG means a direction intersecting a direction (flow direction) in which the sheet glass SG flows down, that is, a horizontal direction.
- FIGS. 3 is a cross-sectional view of the molding apparatus 40.
- FIG. 4 is a side view of the molding apparatus 40.
- the forming apparatus 40 includes a passage through which the sheet glass SG passes and a space surrounding the passage.
- a space surrounding the passage is configured by a molded body chamber 20, a first cooling chamber 30, and a second cooling chamber 80.
- the molded body chamber 20 is a space for molding the molten glass FG sent from the refining device 12 into a sheet glass SG.
- the first cooling chamber 30 is a space for adjusting the thickness and the amount of warpage of the sheet glass SG, which is disposed below the molded body chamber 20.
- a part of 1st cooling process S41 mentioned later is performed.
- the upstream region of the sheet glass SG is cooled (upstream region cooling step).
- the upstream region of the sheet glass SG is a region of the sheet glass SG in which the temperature of the central portion C of the sheet glass SG is above the annealing point.
- the center part C of the sheet glass SG is the center in the width direction of the sheet glass SG.
- the upstream region includes a first temperature region and a second temperature region.
- the first temperature region is a region of the sheet glass SG until the temperature of the central portion C of the sheet glass SG becomes near the softening point.
- the second temperature region is a temperature region from the vicinity of the softening point to the vicinity of the slow cooling point from the temperature at the center C of the sheet glass SG. After passing through the first cooling chamber 30, the sheet glass SG passes through the second cooling chamber 80 described later.
- the second cooling chamber 80 is a space for adjusting the warpage and distortion amount of the sheet glass SG, which is disposed below the molded body chamber 20.
- a part of a first cooling step S41, a second cooling step S42, and a third cooling step S43, which will be described later, are executed.
- the sheet glass SG that has passed through the first cooling chamber 30 is cooled to a temperature in the vicinity of room temperature via a slow cooling point and a strain point (downstream region cooling step).
- the inside of the second cooling chamber 80 is divided into a plurality of spaces by a heat insulating member 80b.
- the molding apparatus 40 mainly includes a molded body 41, a partition member 50, a cooling roller 51, a temperature adjustment unit 60, pulling rollers 81a to 81g, heaters 82a to 82g, and a cutting device 90. ing. Furthermore, the shaping
- the molded body 41 is provided in the molded body chamber 20.
- the molded body 41 forms the molten glass FG into a sheet-like glass (sheet glass SG) by overflowing the molten glass FG.
- the molded body 41 has a substantially pentagonal shape (a shape similar to a wedge shape) in cross-sectional shape.
- the substantially pentagonal tip corresponds to the lower end portion 41 a of the molded body 41.
- the molded body 41 has an inlet 42 at the first end (see FIG. 4).
- the inlet 42 is connected to the above-described downstream pipe 24, and the molten glass FG that has flowed out of the refining device 12 is poured into the molded body 41 from the inlet 42.
- a groove 43 is formed in the molded body 41.
- the groove 43 extends in the longitudinal direction of the molded body 41. Specifically, the groove 43 extends from the first end to the second end that is the end opposite to the first end. More specifically, the groove 43 extends in the left-right direction in FIG.
- the groove 43 is deepest in the vicinity of the inlet 42 and is formed so as to become gradually shallower as it approaches the second end.
- the molten glass FG poured into the molded body 41 overflows from the pair of top portions 41 b and 41 b of the molded body 41 and flows down along the pair of side surfaces (surfaces) 41 c and 41 c of the molded body 41. Thereafter, the molten glass FG joins at the lower end 41a of the molded body 41 to become the sheet glass SG.
- the liquidus temperature of the sheet glass SG is 1100 ° C. or higher, and the liquidus viscosity is 2.5 ⁇ 10 5 poise or higher.
- the partition member 50 is a member that blocks heat transfer from the molded body chamber 20 to the first cooling chamber 30.
- the partition member 50 is arrange
- the partition member 50 is a heat insulating material. The partition member 50 blocks the movement of heat from the upper side to the lower side of the partition member 50 by partitioning the upper atmosphere and the lower atmosphere at the joining point of the molten glass FG.
- the cooling roller 51 is provided in the first cooling chamber 30. More specifically, the cooling roller 51 is disposed directly below the partition member 50. Moreover, the cooling roller 51 is arrange
- the cooling rollers 51 disposed on both sides in the thickness direction of the sheet glass SG operate in pairs. That is, both sides (width direction both ends) of sheet glass SG are inserted between two pairs of cooling rollers 51, 51,.
- the cooling roller 51 is air-cooled by an air-cooling tube passed through the inside.
- the cooling roller 51 contacts the side portions (ear portions) R and L of the sheet glass SG, and rapidly cools the side portions (ear portions) R and L of the sheet glass SG by heat conduction (rapid cooling step).
- the viscosities of the side portions R and L of the sheet glass SG in contact with the cooling roller 51 are equal to or higher than a predetermined value (specifically, 10 9.0 poise).
- the cooling roller 51 is rotationally driven by a cooling roller drive motor 390 (see FIG. 5).
- the cooling roller 51 cools the side portions R and L of the sheet glass SG and also has a function of pulling the sheet glass SG downward.
- the cooling of the side portions R and L of the sheet glass SG by the cooling roller 51 affects the uniformity of the width W of the sheet glass SG and the thickness of the sheet glass SG.
- the temperature adjustment unit 60 is a unit that is provided in the first cooling chamber 30 and cools the sheet glass SG to the vicinity of the annealing point.
- the temperature adjustment unit 60 is disposed below the partition member 50 and on the top plate 80 a of the second cooling chamber 80.
- the temperature adjustment unit 60 cools the upstream region of the sheet glass SG (upstream region cooling step). Specifically, the temperature adjustment unit 60 cools the sheet glass SG so that the temperature of the central portion C of the sheet glass SG approaches the annealing point. Thereafter, the central portion C of the sheet glass SG is cooled to a temperature near room temperature through a slow cooling point and a strain point in a second cooling chamber 80 described later (downstream region cooling step).
- the temperature adjustment unit 60 has a cooling unit 61.
- a plurality of cooling units 61 (three here) are arranged in the width direction of the sheet glass SG and a plurality are arranged in the flow direction.
- the cooling units 61 are arranged one by one so as to face the surfaces of the ears R and L of the sheet glass SG, and in the central area CA (see FIG. 4 and FIG. 7) described later.
- One is arranged so as to face the surface.
- region CA of the sheet glass SG is a center part of the width direction of the sheet glass SG, Comprising: It is an area
- the central area CA of the sheet glass SG is a portion sandwiched between both side portions (both ear portions) of the sheet glass SG.
- region CA of the sheet glass SG is an area
- the pull-down rollers 81a to 81g are provided in the second cooling chamber 80, and pull down the sheet glass SG that has passed through the first cooling chamber 30 in the flow direction of the sheet glass SG.
- the pulling rollers 81a to 81g are arranged in the second cooling chamber 80 at a predetermined interval along the flow direction.
- a plurality of pulling rollers 81a to 81g are arranged on both sides in the thickness direction of the sheet glass SG (see FIG. 3) and on both sides in the width direction of the sheet glass SG (see FIG. 4). That is, the pulling rollers 81a to 81g pull down the sheet glass SG while contacting both side portions (both ear portions) R and L in the width direction of the sheet glass SG and both sides in the thickness direction of the sheet glass SG.
- the pulling rollers 81a to 81g are driven by a pulling roller driving motor 391 (see FIG. 5). Further, the pulling rollers 81a to 81g rotate inward with respect to the sheet glass SG.
- the peripheral speed of the pull-down rollers 81a to 81g is larger as the downstream pull-down roller. That is, among the plurality of lowering rollers 81a to 81g, the peripheral speed of the lowering roller 81a is the smallest, and the peripheral speed of the lowering roller 81g is the highest.
- the pull-down rollers 81a to 81g arranged on both sides in the thickness direction of the sheet glass SG operate in pairs, and the pair of pull-down rollers 81a, 81a, ... pulls the sheet glass SG downward.
- the heaters 82 a to 82 g are provided inside the second cooling chamber 80 and adjust the temperature of the internal space of the second cooling chamber 80. Specifically, a plurality of heaters 82a to 82g are arranged in the flow direction of the sheet glass SG and the width direction of the sheet glass SG. More specifically, seven heaters are arranged in the flow direction of the sheet glass SG, and three heaters are arranged in the width direction of the sheet glass. The three heaters arranged in the width direction respectively heat-treat the center region CA of the sheet glass SG and the ear portions R and L of the sheet glass SG. The outputs of the heaters 82a to 82g are controlled by a control device 91 described later.
- the atmospheric temperature in the vicinity of the sheet glass SG passing through the inside of the second cooling chamber 80 is controlled.
- the temperature of the sheet glass SG is controlled by controlling the atmospheric temperature in the second cooling chamber 80 by the heaters 82a to 82g. Further, the sheet glass SG transitions from the viscous region to the elastic region through the viscoelastic region by temperature control.
- the temperature of the sheet glass SG is cooled from the temperature near the annealing point to the temperature near room temperature by the control of the heaters 82a to 82g (downstream region cooling step).
- An ambient temperature detection means (in this embodiment, a thermocouple) 380 for detecting the ambient temperature is provided in the vicinity of each of the heaters 82a to 82g.
- the several thermocouple 380 is arrange
- the thermocouple 380 detects the temperature of the center portion C of the sheet glass SG and the temperatures of the ear portions R and L of the sheet glass SG.
- the outputs of the heaters 82a to 82g are controlled based on the ambient temperature detected by the thermocouple 380.
- the cutting device 90 cuts the sheet glass SG cooled to a temperature close to room temperature in the second cooling chamber 80 into a predetermined size.
- the cutting device 90 cuts the sheet glass SG at predetermined time intervals. Thereby, the sheet glass SG becomes a plurality of glass plates PG.
- the cutting device 90 is driven by a cutting device drive motor 392 (see FIG. 5).
- the control device 91 includes a CPU, a RAM, a ROM, a hard disk, and the like, and controls various devices included in the glass plate manufacturing apparatus 100.
- the control device 91 receives signals from various sensors (eg, thermocouple 380) and switches (eg, main power switch 381) included in the glass substrate manufacturing apparatus 100. In response, the temperature control unit 60, the heaters 82a to 82g, the cooling roller driving motor 390, the pulling roller driving motor 391, the cutting device driving motor 392, and the like are controlled.
- sensors eg, thermocouple 380
- switches eg, main power switch 381 included in the glass substrate manufacturing apparatus 100.
- the temperature control unit 60, the heaters 82a to 82g, the cooling roller driving motor 390, the pulling roller driving motor 391, the cutting device driving motor 392, and the like are controlled.
- cooling process S4 consists of several cooling process S41, S42, S43. Specifically, the first cooling step S41, the second cooling step S42, and the third cooling step S43 are sequentially performed along the flow direction of the sheet glass SG.
- temperature control is performed in the flow direction and the width direction of the sheet glass SG.
- the temperature management is performed based on a plurality of temperature profiles TP1 to TP10.
- the temperature profiles TP1 to TP10 are temperature distributions along the width direction of the sheet glass SG with respect to the ambient temperature in the vicinity of the sheet glass SG.
- the temperature profiles TP1 to TP10 are target temperature distributions. That is, the temperature management is performed so as to realize a plurality of temperature profiles TP1 to TP10.
- the temperature management is performed using the cooling roller 51, the temperature adjustment unit 60, and the heaters 82a to 82g described above.
- the temperature of the sheet glass SG is managed by controlling the atmospheric temperature of the sheet glass SG.
- the actual temperature of the sheet glass SG may be used as the temperature of the sheet glass SG, and a value calculated by simulation based on the ambient temperature of the sheet glass SG controlled by the heaters 82a to 82g is used. May be.
- the sheet glass SG is cooled at a predetermined cooling rate, thereby performing temperature management in the flow direction of the sheet glass SG.
- the predetermined cooling rate is a cooling rate corresponding to each of the cooling steps S41 to S43.
- the cooling rate of the first cooling step (first cooling rate) is the fastest.
- the cooling rate of the second cooling step (second cooling rate) is the slowest. That is, the cooling rate (third cooling rate) of the third cooling step is slower than the first cooling rate and faster than the second cooling rate (first cooling rate> third cooling rate> second cooling rate).
- edge parts R and L of the sheet glass SG are made. Different speeds are set.
- the center part cooling rate is calculated based on the amount of temperature change of the center part C of the sheet glass SG and the time required for the temperature change.
- the ear part cooling rate is calculated based on the amount of temperature change of the ear parts R and L of the sheet glass SG and the time required for the temperature change.
- FIG. 6 shows a temperature profile at a predetermined height position of the sheet glass SG.
- FIG. 7 shows the cooling rate of the sheet glass SG (0.7 mm).
- the first cooling step S41 is a step of cooling the molten glass joined immediately below the molded body 41 to a temperature near the annealing point. Specifically, in the first cooling step, the sheet glass SG at about 1,100 ° C. to 1,200 ° C. is cooled to a temperature near the annealing point (see FIG. 7).
- the annealing point is the temperature at which the viscosity is 10 13 poise, and here it is 715.0 ° C.
- the temperature management of the sheet glass SG is performed based on the first temperature profile TP1 to the fourth temperature profile TP4.
- the temperature profiles TP1 to TP4 executed in the first cooling step S41 and the cooling rate (first cooling rate) of the first cooling step will be described in detail.
- the first temperature profile TP1 is a temperature distribution realized on the most upstream side of the sheet glass SG (see FIG. 6).
- the temperature of the central region CA of the sheet glass SG is uniform, and the ear portions R and L of the sheet glass SG are lower than the temperature of the central region CA of the sheet glass SG.
- that the temperature of the central area CA is uniform means that the temperature of the central area CA is included in a predetermined temperature range.
- the predetermined temperature range is a range of the reference temperature ⁇ 20 ° C.
- the reference temperature is an average temperature in the width direction of the central area CA.
- the first temperature profile TP1 is realized by controlling the cooling roller 51 and the temperature adjustment unit 60 in the first cooling chamber 30. Specifically, the ears R and L of the sheet glass SG are cooled by the cooling roller 51. The temperature of the ears R and L of the sheet glass SG is cooled to a temperature lower than the temperature of the central area CA by a predetermined temperature (for example, 200 ° C. to 250 ° C.). The first temperature profile TP1 makes the thickness of the sheet glass SG uniform.
- the temperature control based on the first temperature profile TP1 is preferably performed directly under the molded body in order to make the sheet thickness of the sheet glass SG more uniform, and the sheet glass SG is cooled to the vicinity of the glass softening point. It is preferable to be carried out by this time.
- “near the glass softening point” is preferably a temperature region from “glass softening point ⁇ 20 ° C.” to “glass softening point + 20 ° C.”.
- the second temperature profile TP2 and the third temperature profile TP3 are temperature distributions realized after the first temperature profile TP1 (see FIG. 6). Specifically, with respect to the flow direction of the sheet glass SG, the second temperature profile TP2 is located on the upstream side, and the third temperature profile TP3 is located on the downstream side.
- the second temperature profile TP3 and the third temperature profile TP3 have the highest temperature at the center C of the central area CA and the lowest temperatures at the ears R and L.
- the temperature gradually decreases from the center C toward the ears R and L. That is, a gradient (temperature gradient) is formed between the temperature of the central portion C and the temperatures of the ear portions R and L.
- the second profile TP2 and the third temperature profile TP3 form a gentle parabola having an upward convexity.
- the temperature gradient is a value obtained by dividing the width W of the sheet glass SG (for example, 1650 mm, see FIG.
- the temperature gradient TG3 in the third temperature profile TP3 is larger than the temperature gradient TG2 in the second temperature profile TP2.
- the difference (width direction temperature difference) between the ambient temperature of the ear portions R and L of the sheet glass SG and the ambient temperature of the center portion C in the third temperature profile TP3 is greater than the width direction temperature difference in the second temperature profile TP3.
- the third temperature profile TP3 is a parabola that is larger than the second temperature profile TP2.
- large parabolic profiles are realized so that the ear portions R and L are cooled earlier than the center portion C.
- the second temperature profile TP2 and the third temperature profile TP3 are realized by controlling the temperature adjustment unit 60 in the first cooling chamber 30.
- the fourth temperature profile TP4 is a temperature distribution realized after the third temperature profile TP3 (see FIG. 6).
- the fourth temperature profile TP4 also has the highest temperature at the center C of the central area CA and the lowest temperatures at the ears R and L.
- the fourth temperature profile TP4 also gradually decreases in temperature from the center C toward the ears R and L, and forms a gentle parabola having a convex upward.
- the temperature gradient TG4 in the fourth temperature profile TP4 is smaller than the temperature gradient TG3 in the upstream third temperature profile TP3. That is, the fourth temperature profile TP4 is a parabola that is smaller than the third temperature profile TP3.
- the fourth temperature profile TP4 is realized by controlling the heater 82a in the second cooling chamber 80.
- the ambient temperature of the ears R and L is cooled at an average cooling rate faster than the ambient temperature of the center C. That is, the average cooling rate (first ear cooling rate) of the ears R and L is higher than the average cooling rate (first center cooling rate) of the center C.
- the first center part cooling rate in the first cooling step S41 is 5.0 ° C./second to 50.0 ° C./second.
- the productivity is deteriorated. If the cooling rate exceeds 50 ° C./second, the sheet glass SG may be cracked. Moreover, the curvature value and plate
- the first central cooling rate is 8.0 ° C./second to 16.5 ° C./second.
- the first ear cooling rate in the first cooling step S41 is 5.5 ° C./second to 52.0 ° C./second.
- the first ear cooling rate is 8.3 ° C./sec to 17.5 ° C./sec.
- the second cooling step S42 is a step of cooling the sheet glass SG that has reached a temperature near the annealing point to near the strain point of ⁇ 50 ° C. (see FIG. 7).
- the strain point is a temperature at which the viscosity becomes 10 14.5 poise, and is 661.0 ° C. here.
- the strain point of ⁇ 50 ° C. is 611.0 ° C.
- the sheet glass SG at 700 ° C. to 730 ° C. is cooled to 596 ° C. to 626 ° C.
- the temperature management of the sheet glass SG is performed based on the fifth temperature profile TP5 and the sixth temperature profile TP6.
- the temperature profiles TP5 and TP6 executed in the second cooling step S42 and the cooling rate (second cooling rate) of the second cooling step will be described in detail.
- the fifth temperature profile TP5 is a temperature distribution realized after the fourth temperature profile TP4 (see FIG. 6).
- the fifth temperature profile TP5 also has the highest temperature at the center C and the lowest temperatures at the ears R and L. Further, the fifth temperature profile TP5 also has a gradually decreasing temperature from the center C toward the ears R and L, and forms a gentle parabola having a convex upward.
- the temperature gradient TG5 in the fifth temperature profile TP5 is smaller than the temperature gradient TG4 in the fourth temperature profile TP4. That is, the fifth temperature profile TP5 is a parabola smaller than the fourth temperature profile TP4.
- the fifth temperature profile TP5 is realized by controlling the heater 82b in the second cooling chamber 80.
- the sixth temperature profile TP6 has a uniform atmosphere temperature in the width direction of the sheet glass SG (atmosphere temperature from the edge portions R and L in the width direction to the center portion C).
- the sixth temperature profile TP6 has the smallest temperature gradient between the ambient temperature around the ear portions R and L and the ambient temperature around the center portion C in the width direction of the sheet glass SG, and around the ear portions R and L. This is a temperature profile in which the ambient temperature and the ambient temperature around the center C are approximately the same.
- uniform means that the ambient temperature around the ears R and L and the ambient temperature around the center C are included in a predetermined temperature range.
- the predetermined temperature range is a range of reference temperature ⁇ 5 ° C.
- the reference temperature is an average temperature in the width direction of the sheet glass SG.
- the sixth temperature profile TP6 is realized by controlling the heater 82c in the second cooling chamber 80.
- the sixth temperature profile TP6 is realized in the vicinity of the strain point.
- the vicinity of the strain point means a predetermined temperature region including the strain point (660 ° C.).
- the predetermined temperature region is a region from “(annealing point + strain point) / 2” to “strain point ⁇ 50 ° C.”.
- the sixth temperature profile TP6 is realized at at least one point in the vicinity of the strain point (one place in the flow direction).
- the ambient temperature of the central portion C of the sheet glass SG and the ear portion R are set so that the ambient temperature in the width direction of the sheet glass SG becomes substantially constant.
- L atmosphere temperature is controlled. That is, the average cooling rate (second center cooling rate) of the central portion C is slightly higher than the average cooling rate (second cooling rate) of the ears R and L.
- the second central part cooling rate in the second cooling step S42 is 0.5 ° C./second to 5.5 ° C./second.
- the productivity is deteriorated.
- the second central portion cooling rate exceeds 5.5 ° C./second, the thermal shrinkage rate of the sheet glass SG increases. Moreover, the curvature and distortion of the sheet glass SG are deteriorated.
- the second central part cooling rate is 1.0 ° C./second to 3.0 ° C./second.
- the second ear cooling rate in the second cooling step S42 is 0.3 ° C./second to 5.3 ° C./second.
- the second ear cooling rate is between 0.8 ° C./second and 2.8 ° C./second.
- the third cooling step S43 is a step of cooling the sheet glass SG having a temperature near the strain point ⁇ 50 ° C. to a temperature near the strain point ⁇ 200 ° C. (see FIG. 7). ). Specifically, in the second cooling step, the sheet glass SG at 596 ° C. to 626 ° C. is cooled to 446 ° C. to 476 ° C.
- the temperature management of the sheet glass SG is performed based on the seventh temperature profile TP7 to the tenth temperature profile TP10.
- the temperature profiles TP7 to TP10 executed in the third cooling step S43 and the cooling rate (third cooling rate) of the third cooling step will be described in detail.
- the seventh temperature profile TP7 to the tenth temperature profile TP10 are temperature distributions realized after the sixth temperature profile TP6 (see FIG. 6). Specifically, the seventh temperature profile TP7 to the tenth temperature profile TP10 are each realized along the flow direction of the sheet glass SG. More specifically, the seventh temperature profile TP7 is realized on the upstream side, and then the eighth temperature profile TP8 is realized. Next to the eighth temperature profile TP8, a ninth temperature profile TP9 is realized, and a tenth temperature profile TP10 is realized downstream.
- the temperature of the central portion C of the central region CA is the lowest, and the temperatures of the ear portions R and L are the highest.
- the temperature gradually increases from the central portion C toward the ear portions R and L. That is, a gradient (temperature gradient) is formed between the temperature of the central portion C and the temperatures of the ear portions R and L.
- the seventh temperature profile TP7 to the tenth temperature profile TP10 form a gentle parabola having a convex downward.
- the temperature gradients TG7 to TG10 in the seventh temperature profile TP7 to the tenth temperature profile TP10 gradually increase along the flow direction of the sheet glass SG.
- the difference (width direction temperature difference) between the ambient temperature of the ear portions R and L of the sheet glass SG and the ambient temperature of the center portion C in the tenth temperature profile TP10 is greater than the width direction temperature difference in the seventh temperature profile TP7.
- the tenth temperature profile TP10 is a larger parabola than the seventh temperature profile TP7.
- the central portion C is cooled earlier than the ear portions R and L.
- the seventh temperature profile TP7 to the tenth temperature profile TP10 are realized by controlling the heaters 82d to 82g in the second cooling chamber 80. Specifically, the heater 82d implements the seventh temperature profile TP7, the heater 82e implements the eighth temperature profile TP8, the heater 82f implements the ninth temperature profile TP9, and the heater 82g implements the tenth temperature profile TP10. Realized.
- the ambient temperature in the center C is cooled at a faster rate than the ambient temperature in the ears R and L. That is, the average cooling rate (third center portion cooling rate) of the central portion C is faster than the average cooling rate (third ear portion cooling rate) of the ear portions R and L.
- the third central part cooling rate in the third cooling step S43 is 1.5 ° C./second to 7.0 ° C./second.
- the productivity is deteriorated.
- a 3rd center part cooling rate exceeds 7.0 degree-C / sec, a crack may generate
- the third central portion cooling rate is 2.0 ° C./second to 5.5 ° C./second.
- the third ear cooling rate in the third cooling step S43 is 1.3 ° C./second to 6.8 ° C./second.
- the third ear cooling rate is 1.5 ° C./second to 5.0 ° C./second.
- a glass substrate is manufactured under the following conditions.
- the composition (mass%) of glass shall be SiO2 60%, Al2O3 17%, B2O3 10%, CaO 3%, SrO 3%, BaO 1%.
- the liquidus temperature of the glass is 1,100 ° C., and the liquidus viscosity is 2.5 ⁇ 10 5 poise.
- the annealing point of the glass is 715.0 ° C., and the strain point is 661 ° C.
- variety of the sheet glass SG shall be 1600 mm. Further, sheet glasses SG having different thicknesses (0.3 mm, 0.4 mm, 0.5 mm, 0.7 mm) were produced.
- Tables 1 to 4 in the cooling step S4, the temperature change (° C.) of the sheet glass SG and the actual measurement value of the time (second) required for the temperature change, and the annealing point (715 ° C.) interpolated based on the actual measurement value, A value (interpolation value) related to the time to reach the strain point of ⁇ 50 ° C. (611 ° C.) and the strain point of ⁇ 200 ° C. (461 ° C.) and the cooling rate (° C./second) of the center C are shown.
- Tables 1 to 4 show values relating to sheet glass SG having thicknesses of 0.7 mm, 0.5 mm, 0.35 mm, and 0.3 mm, respectively.
- the cooling rate in the first cooling step S41 is the largest value
- the cooling rate in the third cooling step S43 is the next largest value
- the cooling rate in the second cooling step S42 is the smallest value.
- a cooling step is performed.
- Table 5 shows measured values of the thermal shrinkage rate, strain value, and warpage value of the glass substrate when the sheet glass SG is cooled at the cooling rates (° C./second) shown in Tables 1 to 4.
- the heat shrinkage rate is 100 ppm or less
- the strain value is 1.0 nm or less
- the warp value is 0.15 mm or less
- the thickness deviation is 15 ⁇ m or less. Value.
- the thermal contraction rate of a glass substrate is obtained by the marking line method.
- a marking line serving as a reference line is attached to both ends of a glass substrate serving as a sample, and then the sample is cut in half. Thereafter, one of the two samples cut into half is heat-treated, and the sample is attached to the other sample that has not been heat-treated, and the deviation of the marking line is measured.
- the heat treatment is performed twice at 550 ° C. ⁇ 60 minutes ⁇ 2. More specifically, the temperature is raised from room temperature at 10 ° C./min, held at 550 ° C.
- heat shrinkage rate heat shrinkage rate
- the strain value of the glass substrate is a value related to plane strain.
- the strain value is determined based on the magnitude of the birefringence.
- the birefringence was measured by using a birefringence measuring instrument ABR-10A manufactured by UNIOPT, and the maximum value was adopted as the strain value.
- the warpage value of the glass substrate was obtained by the following method. First, a plurality of glass pieces are cut out from a glass plate PG having a predetermined effective width cut out from a sheet glass (mother glass). Next, the glass piece is placed on a glass surface plate. A gap between each glass piece and the glass surface plate (in this embodiment, four corners of the glass piece, two central portions on the long side, and two central portions on the short side) is measured using a clearance gauge. To do.
- the thickness deviation was measured at an interval of 5 mm in the width direction using a displacement meter made by Keyence in the effective area of the glass plate.
- the sheet glass SG is cooled at different cooling rates in the three cooling steps S41 to S43 included in the sheet glass SG cooling step S4.
- the cooling rate of the first cooling step S41 is the fastest among the three cooling steps S41 to S43.
- the cooling rate of the third cooling step S43 is the second highest after the cooling rate of the first cooling step S41.
- the cooling rate of the second cooling step S42 is the slowest among the cooling steps S41 to S43.
- the average cooling rate of 1st cooling process S41 is 5.0 degree-C / sec or more.
- the cooling rate in the flow direction of the sheet glass SG affects the thermal shrinkage rate of the glass substrate.
- the influence of the cooling rate of the second cooling step S42 on the thermal contraction rate of the sheet glass SG is large. Therefore, by making the cooling rate of the second cooling step S42 the slowest among the three cooling steps S41 to S43, the thermal contraction rate of the sheet glass SG can be effectively reduced. Thereby, while being able to improve the production amount of a glass substrate, the glass substrate which has a suitable thermal contraction rate can be obtained.
- the thickness deviation, the amount of warpage, and the amount of plane strain can be suppressed within a certain range.
- the cooling temperature of the ear portions R and L of the sheet glass SG is set to a temperature lower than the cooling temperature of the central portion C of the sheet glass, Since a temperature gradient is formed in the width direction of the sheet glass, in the above embodiment, the average cooling rate (first ear cooling rate) of the ears R and L is changed to the average cooling rate of the central part C (first central part). Faster than the cooling rate). In the second cooling step S42, the average cooling rate of the center C (second center cooling rate) is made faster than the average cooling rate (second ear cooling rate) of the ears R and L, and the temperature on the upstream side.
- the temperature gradient is made smaller than the gradient gradient. Furthermore, also in the third cooling step, the average cooling rate of the central portion C (third central portion cooling rate) is made faster than the average cooling rate of the ear portions R and L (third ear portion cooling rate), Increase the slope of the temperature gradient.
- edge parts R and L of the sheet glass SG is made high by making the temperature of the ear
- the sheet glass SG In order to reduce the amount of warp of the glass substrate, it is preferable to cool the sheet glass SG so that a tensile stress is always applied to the central portion C in the width direction and the flow direction.
- a tensile stress is always applied to the central portion C in the width direction and the flow direction.
- the second cooling step S42 a temperature gradient is formed in which the temperature in the width direction of the sheet glass SG decreases from the center C toward the ears R and L. And the temperature gradient formed in 2nd cooling process S42 becomes small in the process in which the sheet glass SG is cooled toward the vicinity of a glass strain point. That is, in 2nd cooling process S42, compared with the average cooling rate of the ear
- a tensile stress is applied to the central portion C of the glass SG.
- a tensile stress acts on the center portion C of the sheet glass SG in the flow direction and the width direction of the sheet glass SG.
- the tensile stress acting in the flow direction of the sheet glass SG is larger than the tensile stress acting in the width direction of the sheet glass SG. Since the sheet glass SG can be cooled by the tensile stress while maintaining the flatness of the sheet glass SG, the amount of warpage of the glass substrate can be controlled.
- the sheet glass SG has a temperature gradient at the glass strain point, the sheet glass SG is distorted when cooled to room temperature. Therefore, the strain after cooling can be reduced by cooling the sheet glass SG so that the temperature gradient in the width direction is reduced in the second cooling step S42.
- the sheet glass SG has a temperature difference at the glass strain point, the sheet glass SG is distorted after being cooled to room temperature. Therefore, in the temperature region near the glass strain point, the strain in the sheet glass SG can be reduced by reducing the temperature difference in the width direction between the ears R, L and the center C of the sheet glass SG.
- the temperature of the width direction of the sheet glass SG becomes low toward the center part C from the ear
- the cooling amount of the sheet glass SG becomes large as it goes to the center part C from the ear
- the temperature control from the annealing point to the strain point has the most influence on the warpage amount and the strain amount.
- the cooling rate is set to the slowest in the second cooling step S42 in which the sheet glass SG is cooled from the annealing point to the strain point of ⁇ 50 ° C.
- the sheet glass SG has a ribbon shape continuous in the vertical direction, temperature control at a strain point of ⁇ 50 ° C. or less is also likely to affect the warp amount and strain amount of the sheet glass SG.
- the cooling rate in the range of strain point ⁇ 50 ° C. to strain point ⁇ 200 ° C. is set to the slowest cooling rate next to the cooling rate in the second cooling step. That is, the cooling rate in the third cooling step is the second lowest cooling rate among the three cooling steps S41 to S43.
- the temperature management of the sheet glass SG is performed based on a plurality of different temperature profiles TP1 to TP4.
- TP1 to TP4 By using a plurality of different temperature profiles TP1 to TP4 in the first cooling step S41, it is possible to make the thickness of the sheet glass SG uniform and reduce the amount of warpage.
- the temperature gradient in the width direction of the sheet glass SG is controlled along the flow direction of the sheet glass SG.
- the thermal contraction rate of the sheet glass SG can be made favorable by controlling so that the cooling rate of the flow direction of the sheet glass SG becomes said average cooling rate.
- the temperature gradient in the width direction of the sheet glass SG it is possible to produce a glass substrate having a uniform plate thickness and with reduced warpage and distortion. Moreover, the production amount of a glass substrate can be improved.
- the cooling roller 51 and the temperature adjustment unit 60 used in the above embodiment may employ either air cooling or water cooling, or may be a combination of air cooling and water cooling.
- the temperature of the sheet glass SG can be brought closer to the temperature profiles TP1 to TP10, and the accuracy of temperature management can be further improved.
- the temperature management of the sheet glass SG is performed based on the ten temperature profiles TP1 to TP10.
- the temperature management of the sheet glass SG may be performed using ten or more temperature profiles.
- a temperature profile that interpolates a temperature profile that maintains the cooling rate shown in the above embodiment is used.
- the molding apparatus 40 may have a plurality of heat insulating members in the second cooling chamber 80.
- the plurality of heat insulating members are arranged on both sides in the thickness direction of the sheet glass SG between the plurality of pulling rollers 81a to 81g. Thereby, the temperature management of the sheet glass SG can be performed more accurately.
- a glass substrate (a glass substrate for low-temperature p-Si) having a composition in which the liquidus temperature is 1,200 ° C. or lower, the liquidus viscosity is 10 5 poise or higher, and the strain point is 680 ° C. or higher is manufactured. May be. Even when a glass substrate having such a composition is manufactured, a predetermined heat shrinkage rate can be obtained. Specifically, a glass substrate having a heat shrinkage rate of 40 ppm or less can be manufactured.
- the average cooling rate of each of the cooling steps S41 to S43 is maintained (that is, the first cooling step> the third cooling step> the second cooling step), and each of the cooling steps S41 to S43 is performed. It is preferable to appropriately adjust the average cooling rate.
- the temperature in the width direction of the sheet glass SG gradually decreases in a convex shape from the center C toward the ears R and L.
- the temperature in the width direction of the sheet glass SG gradually decreases in a convex shape from the central portion C toward the ear portions R and L, and as it goes downstream in the flow direction of the sheet glass SG. More preferably, the temperature gradient in the width direction of the sheet glass SG gradually decreases.
- a temperature gradient is formed so that the temperature of the width direction of the sheet glass SG may become low toward the center part C from the ear
- a temperature gradient is formed so that the temperature in the width direction of the sheet glass SG gradually decreases in a convex shape from the ears R and L toward the center C.
- the sheet glass SG cooled by cooling process S4 showed the heat shrinkage rate of 100 ppm or less. However, it is more preferable that the sheet glass SG cooled in the cooling step S4 exhibits a heat shrinkage rate within a range of 20 ppm to 100 ppm, more preferably a heat shrinkage rate within a range of 20 ppm to 95 ppm. It is particularly preferred to exhibit a heat shrinkage in the range of 90 ppm.
- the sheet glass SG cooled by cooling process S4 showed the distortion value of 1.0 nm or less.
- the sheet glass SG cooled in the cooling step S4 more preferably exhibits a strain value within the range of 0 nm to 0.95 nm, and more preferably exhibits a strain value within the range of 0 nm to 0.90 nm.
- the sheet glass SG cooled by cooling process S4 showed the curvature value of 0.15 mm or less.
- the sheet glass SG cooled in the cooling step S4 preferably exhibits a warp value within a range of 0 mm to 0.10 mm, and more preferably exhibits a warp value within a range of 0 mm to 0.05 mm.
- the sheet glass SG cooled by cooling process S4 showed the plate
- the sheet glass SG cooled in the cooling step S4 more preferably exhibits a thickness deviation within the range of 0 ⁇ m to 14 ⁇ m, and more preferably exhibits a thickness deviation within the range of 0 ⁇ m to 13 ⁇ m.
- the present invention is applicable to a glass substrate manufacturing method using a downdraw method.
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Abstract
Description
まず、図1および図2を参照して、ガラス基板の製造方法に含まれる複数の工程および複数の工程に用いられるガラス基板の製造装置100を説明する。ガラス基板の製造方法は、図1に示すように、主として、溶融工程S1と、清澄工程S2と、成形工程S3と、冷却工程S4と、切断工程S5とを含む。
まず、図3および図4に、成形装置40の概略構成を示す。図3は、成形装置40の断面図である。図4は、成形装置40の側面図である。
成形体41は、成形体室20内に設けられる。成形体41は、溶融ガラスFGをオーバーフローさせることによって、溶融ガラスFGをシート状のガラス(シートガラスSG)へと成形する。
仕切り部材50は、成形体室20から第1冷却室30への熱の移動を遮断する部材である。仕切り部材50は、溶融ガラスFGの合流ポイントの近傍に配置されている。また、図3に示すように、仕切り部材50は、合流ポイントで合流した溶融ガラスFG(シートガラスSG)の厚み方向両側に配置される。仕切り部材50は、断熱材である。仕切り部材50は、溶融ガラスFGの合流ポイントの上側雰囲気および下側雰囲気を仕切ることにより、仕切り部材50の上側から下側への熱の移動を遮断する。
冷却ローラ51は、第1冷却室30内に設けられる。より具体的に、冷却ローラ51は、仕切り部材50の直下に配置されている。また、冷却ローラ51は、シートガラスSGの厚み方向両側、且つ、シートガラスSGの幅方向両側に配置される。シートガラスSGの厚み方向両側に配置された冷却ローラ51は対で動作する。すなわち、シートガラスSGの両側部(幅方向両端部)は、二対の冷却ローラ51,51,・・・によって挟み込まれる。
温度調整ユニット60は、第1冷却室30内に設けられ、シートガラスSGを徐冷点近傍まで冷却するユニットである。温度調整ユニット60は、仕切り部材50の下方であって、第2冷却室80の天板80aの上に配置される。
引下げローラ81a~81gは、第2冷却室80内に設けられ、第1冷却室30内を通過したシートガラスSGを、シートガラスSGの流れ方向へ引き下げる。引下げローラ81a~81gは、第2冷却室80の内部で、流れ方向に沿って所定の間隔を空けて配置される。引下げローラ81a~81gは、シートガラスSGの厚み方向両側(図3参照)、および、シートガラスSGの幅方向両側(図4参照)に複数配置される。すなわち、引下げローラ81a~81gは、シートガラスSGの幅方向の両側部(両耳部)R,L、かつ、シートガラスSGの厚み方向の両側に接触しながらシートガラスSGを下方に引き下げる。
ヒータ82a~82gは、第2冷却室80の内部に設けられ、第2冷却室80の内部空間の温度を調整する。具体的に、ヒータ82a~82gは、シートガラスSGの流れ方向およびシートガラスSGの幅方向に複数配置される。より具体的には、シートガラスSGの流れ方向には、7つのヒータが配置され、シートガラスの幅方向には3つのヒータが配置される。幅方向に配置される3つのヒータは、シートガラスSGの中央領域CAと、シートガラスSGの耳部R,Lとをそれぞれ熱処理する。ヒータ82a~82gは、後述する制御装置91によって出力が制御される。これにより、第2冷却室80内部を通過するシートガラスSGの近傍の雰囲気温度が制御される。ヒータ82a~82gによって第2冷却室80内の雰囲気温度が制御されることによって、シートガラスSGの温度制御が行われる。また、温度制御により、シートガラスSGは、粘性域から粘弾性域を経て弾性域へと推移する。このように、ヒータ82a~82gの制御により、第2冷却室80では、シートガラスSGの温度が、徐冷点近傍の温度から室温近傍の温度まで冷却される(下流域冷却工程)。
切断装置90は、第2冷却室80内で室温近傍の温度まで冷却されたシートガラスSGを、所定のサイズに切断する。切断装置90は、所定の時間間隔でシートガラスSGを切断する。これにより、シートガラスSGは、複数のガラス板PGになる。切断装置90は、切断装置駆動モータ392(図5を参照)によって駆動される。
制御装置91は、CPU、RAM、ROM、およびハードディスク等から構成されており、ガラス板の製造装置100に含まれる種々の機器の制御を行う。
本実施形態に係るガラス基板の製造方法では、冷却工程S4が複数の冷却工程S41,S42,S43からなる。具体的には、シートガラスSGの流れ方向に沿って、第1冷却工程S41、第2冷却工程S42、および第3冷却工程S43が順に実行される。
第1冷却工程S41は、成形体41の直下で合流した溶融ガラスを、徐冷点近傍の温度まで冷却する工程である。具体的に、第1冷却工程では、約1,100℃~1,200℃のシートガラスSGを、徐冷点近傍の温度まで冷却する(図7参照)。ここで、徐冷点は、粘度が1013ポワズとなるときの温度であり、ここでは、715.0℃である。
第1温度プロファイルTP1は、シートガラスSGの最も上流側で実現される温度分布である(図6参照)。第1温度プロファイルTP1は、シートガラスSGの中央領域CAの温度が均一であり、シートガラスSGの耳部R,Lは、シートガラスSGの中央領域CAの温度よりも低い。ここで、中央領域CAの温度が均一であるとは、中央領域CAの温度が、所定の温度域に含まれることをいう。所定の温度域とは、基準温度±20℃の範囲である。基準温度は、中央領域CAの幅方向の平均温度である。
第2温度プロファイルTP2および第3温度プロファイルTP3は、第1温度プロファイルTP1の後に実現される温度分布である(図6参照)。具体的には、シートガラスSGの流れ方向に対して、上流側に第2温度プロファイルTP2が位置し、下流側に第3温度プロファイルTP3が位置する。
第4温度プロファイルTP4は、第3温度プロファイルTP3の後に実現される温度分布である(図6参照)。第4温度プロファイルTP4もまた、中央領域CAの中心部Cの温度が最も高く、耳部R,Lの温度が最も低い。また、第4温度プロファイルTP4も、中心部Cから耳部R,Lに向かって温度が徐々に低くなり、上に凸を有するなだらかな放物線を形成する。
第1冷却工程S41では、中心部Cの雰囲気温度よりも、耳部R,Lの雰囲気温度を速い平均冷却速度で冷却している。すなわち、中心部Cの平均冷却速度(第1の中心部冷却速度)と比較して、耳部R,Lの平均冷却速度(第1の耳部冷却速度)が速い。
第2冷却工程S42は、徐冷点近傍の温度になったシートガラスSGを、歪点-50℃の近傍まで冷却する工程である(図7参照)。ここで、歪点は、粘度が1014.5ポワズとなる温度であり、ここでは、661.0℃である。また、歪点-50℃は、611.0℃である。具体的に、第2冷却工程では、700℃~730℃のシートガラスSGを、596℃~626℃まで冷却する。
第5温度プロファイルTP5は、第4温度プロファイルTP4の後に実現される温度分布である(図6参照)。第5温度プロファイルTP5もまた、中心部Cの温度が最も高く、耳部R,Lの温度が最も低い。また、第5温度プロファイルTP5も、中心部Cから耳部R,Lに向かって温度が徐々に低くなり、上に凸を有するなだらかな放物線を形成する。
第6温度プロファイルTP6は、シートガラスSGの幅方向の雰囲気温度(幅方向の耳部R,Lから中心部Cにかけての雰囲気温度)が均一である。言い換えると、第6温度プロファイルTP6は、シートガラスSGの幅方向において、耳部R,L周辺の雰囲気温度と中心部C周辺の雰囲気温度との温度勾配が最も小さく、耳部R,L周辺の雰囲気温度と中心部C周辺の雰囲気温度とが、同程度になる温度プロファイルである。
第2冷却工程S42では、シートガラスSGの幅方向の雰囲気温度がほぼ一定になるように、シートガラスSGの中心部Cの雰囲気温度と、耳部R,Lの雰囲気温度とを制御している。すなわち、耳部R,Lの平均冷却速度(第2の耳部冷却速度)と比較して、中心部Cの平均冷却速度(第2の中心部冷却速度)が若干速い。
第3冷却工程S43は、歪点-50℃近傍の温度になったシートガラスSGを、歪点-200℃近傍の温度まで冷却する工程である(図7参照)。具体的に、第2冷却工程では、596℃~626℃のシートガラスSGを、446℃~476℃まで冷却する。
第7温度プロファイルTP7~第10温度プロファイルTP10は、第6温度プロファイルTP6の後に実現される温度分布である(図6参照)。具体的に、第7温度プロファイルTP7~第10温度プロファイルTP10は、シートガラスSGの流れ方向に沿ってそれぞれ実現される。より具体的には、上流側で第7温度プロファイルTP7が実現され、次に、第8温度プロファイルTP8が実現される。第8温度プロファイルTP8の次には、第9温度プロファイルTP9が実現され、下流側で第10温度プロファイルTP10が実現される。
第3冷却工程S43では、中心部Cの雰囲気温度を、耳部R,Lの雰囲気温度よりも早い速度で冷却している。すなわち、耳部R,Lの平均冷却速度(第3の耳部冷却速度)と比較して、中心部Cの平均冷却速度(第3の中心部冷却速度)が速い。
(4-1)
上記実施形態では、シートガラスSGの冷却工程S4に含まれる三つの冷却工程S41~S43において、異なる冷却速度でシートガラスSGを冷却する。具体的には、三つの冷却工程S41~S43のうち、第1冷却工程S41の冷却速度が最も速い。また、第3冷却工程S43の冷却速度は、第1冷却工程S41の冷却速度の次に速い。さらに、第2冷却工程S42の冷却速度は、冷却工程S41~S43のうち、最も遅い。また、第1冷却工程S41の平均冷却速度は、5.0℃/秒以上である。
上記実施形態では、シートガラスSGの上流側の温度プロファイルTP1~TP5で、シートガラスSGの耳部R,Lの冷却温度を、シートガラスの中心部Cの冷却温度よりも低い温度に設定し、シートガラスの幅方向に温度勾配を形成するので、上記実施形態では、耳部R,Lの平均冷却速度(第1の耳部冷却速度)を中心部Cの平均冷却速度(第1の中心部冷却速度)よりも速くする。第2冷却工程S42では、中心部Cの平均冷却速度(第2の中心部冷却速度)を耳部R,Lの平均冷却速度(第2の耳部冷却速度)より速くし、上流側の温度勾配の傾きよりも、温度勾配を小さくする。さらに、第3の冷却工程でも、中心部Cの平均冷却速度(第3の中心部冷却速度)を、耳部R,Lの平均冷却速度(第3の耳部冷却速度)よりさらに速くし、温度勾配の傾きを大きくする。
また、上記実施形態に係るガラス基板の製造方法では、歪点近傍でシートガラスSGの幅方向の温度が均一になるように制御されている。これにより、平面歪の量(残留応力)を低減することができる。
シートガラスSGの温度制御において、徐冷点から歪点までの温度制御が反り量および歪量に最も影響を及ぼす。上記実施形態では、3つの冷却工程S41~S43のうち、徐冷点から歪点-50℃までのシートガラスSGの冷却を行う第2冷却工程S42において、冷却速度を最も遅くしている。これにより、シートガラスSGの温度制御の精度を上げることができる。
上記実施形態では、第1冷却工程S41において、複数の異なる温度プロファイルTP1~TP4に基づいて、シートガラスSGの温度管理を行っている。第1冷却工程S41において複数の異なる温度プロファイルTP1~TP4を用いることにより、シートガラスSGの板厚の均一化および反り量の低減を可能にすることができる。
上記実施形態では、冷却工程S41~S43において、シートガラスSGの幅方向の温度勾配は、シートガラスSGの流れ方向に沿って制御される。そして、シートガラスSGの流れ方向の冷却速度が上記の平均冷却速度となるように制御することにより、シートガラスSGの熱収縮率を良好にすることができる。さらに、シートガラスSGの幅方向の温度勾配を制御することにより、均一な板厚を有し、かつ、反りおよび歪が低減されたガラス基板を製造することができる。また、ガラス基板の生産量を向上させることができる。
(5-1)
上記実施形態で用いた冷却ローラ51および温度調整ユニット60は、空冷および水冷のいずれの方法を採用しても良く、また、空冷および水冷の組み合わせであってもよい。
上記実施形態では、第2冷却室80内でシートガラスSGの流れ方向に、7つのヒータが配置され、シートガラスSGの幅方向には3つのヒータが配置される。しかし、シートガラスSGの流れ方向およびシートガラスSGの幅方向には、実施形態で用いたヒータの数よりも多くのヒータを配置しても構わない。
上記実施形態では、10の温度プロファイルTP1~TP10に基づいて、シートガラスSGの温度管理を行ったが、シートガラスSGの温度管理は、10以上の温度プロファイルを用いて行ってもよい。但し、10以上の温度プロファイルを用いる場合であっても、上記実施形態で示した冷却速度を維持するような温度プロファイルを補間する温度プロファイルを用いるものとする。
成形装置40は、第2冷却室80内に複数の断熱部材を有していてもよい。複数の断熱部材は、複数の引下げローラ81a~81gのそれぞれの間で、シートガラスSGの厚み方向の両側に配置される。これにより、シートガラスSGの温度管理を、より精度よく行うことができる。
上記実施例では、液相温度が1,100℃であり、液相粘度は2.5×105poiseであり、歪点は、661℃でとなる組成を有するガラス基板を製造した。上記実施形態に係るガラス基板の製造方法では、その他の組成を有するガラス基板の製造方法にも用いることができる。
以上、本実施形態について図面に基づいて説明したが、具体的な構成は、上記の実施形態に限られるものではなく、発明の要旨を逸脱しない範囲で変更可能である。
上記実施形態では、第2冷却工程S42において、シートガラスSGの幅方向の温度が中心部Cから耳部R,Lに向かって漸減し、かつ、シートガラスSGの流れ方向の下流に向かうに従って、シートガラスSGの幅方向の温度勾配が漸減する。
上記実施形態では、第3冷却工程S43において、シートガラスSGの幅方向の温度が、耳部R,Lから中心部Cに向かって低くなるように温度勾配が形成される。しかし、第3冷却工程S43において、シートガラスSGの幅方向の温度は、耳部R,Lから中心部Cに向かって凸状に漸減するように温度勾配が形成されることがより好ましい。
上記実施例では、冷却工程S4によって冷却されたシートガラスSGは、100ppm以下の熱収縮率を示した。しかし、冷却工程S4によって冷却されたシートガラスSGは、20ppm~100ppmの範囲内の熱収縮率を示すことがより好ましく、20ppm~95ppmの範囲内の熱収縮率を示すことがさらに好ましく、20ppm~90ppmの範囲内の熱収縮率を示すことが特に好ましい。
上記実施例では、冷却工程S4によって冷却されたシートガラスSGは、1.0nm以下の歪値を示した。しかし、冷却工程S4によって冷却されたシートガラスSGは、0nm~0.95nmの範囲内の歪値を示すことがより好ましく、0nm~0.90nmの範囲内の歪値を示すことがさらに好ましい。
上記実施例では、冷却工程S4によって冷却されたシートガラスSGは、0.15mm以下の反り値を示した。しかし、冷却工程S4によって冷却されたシートガラスSGは、0mm~0.10mmの範囲内の反り値を示すことがより好ましく、0mm~0.05mmの範囲内の反り値を示すことがさらに好ましい。
上記実施例では、冷却工程S4によって冷却されたシートガラスSGは、15μm以下の板厚偏差を示した。しかし、冷却工程S4によって冷却されたシートガラスSGは、0μm~14μmの範囲内の板厚偏差を示すことがより好ましく、0μm~13μmの範囲内の板厚偏差を示すことがさらに好ましい。
12 清澄装置
40 成形装置
41 成形体
51 冷却ローラ
60 温度調整ユニット
81a~81g 引下げローラ
82a~82g ヒータ
90 切断装置
91 制御装置
100 ガラス基板の製造装置
C シートガラスの中心部
R,L シートガラスの耳部(幅方向の端部)
SG シートガラス
S3 成形工程
S4 冷却工程
S41 第1冷却工程
S42 第2冷却工程
S43 第3冷却工程
Claims (10)
- ダウンドロー法によって、溶融ガラスをシートガラスに成形する成形工程と、
前記シートガラスを冷却する冷却工程と
を備え、
前記冷却工程は、
前記シートガラスの中央領域の温度が、徐冷点になるまで、第1の平均冷却速度で冷却する第1の冷却工程と、
前記中央領域の温度が、前記徐冷点から歪点-50℃になるまで、第2の平均冷却速度で冷却する第2の冷却工程と、
前記中央領域の温度が、前記歪点-50℃から前記歪点-200℃になるまで、第3の平均冷却速度で冷却する第3の冷却工程と
を含み、
前記第1の平均冷却速度は、5.0℃/秒以上であり、
前記第1の平均冷却速度は、前記第3の平均冷却速度より速く、
前記第3の平均冷却速度は、前記第2の平均冷却速度より速い、
ガラス基板製造方法。 - 前記第1の冷却工程は、
前記シートガラスの幅方向の端部の温度が、前記端部に挟まれた中央領域の温度より低く、かつ、前記中央領域の温度が均一になるようにする第1温度制御工程と、
前記第1温度制御工程が行われた後、前記シートガラスの幅方向の温度が中央部から端部に向かって低くなるようにする第2温度制御工程と、
を含む、
請求項1に記載のガラス基板製造方法。 - 前記第2の冷却工程は、
ガラス歪点の近傍に近づくにつれて、前記シートガラスの幅方向の端部と中央部との温度勾配が低減するようにする第3温度制御工程を含む、
請求項1または2に記載のガラス基板製造方法。 - 前記第3の冷却工程は、
前記シートガラスの幅方向の温度が、前記シートガラスの幅方向の端部から中央部に向かって低くなるようにする第4温度制御工程を含む、
請求項1から3のいずれか1項に記載のガラス基板製造方法。 - 前記第2の平均冷却速度は、0.5℃/秒~5.5℃/秒であり、
前記第3の平均冷却速度は、1.5℃/秒~7.0℃/秒である、
請求項1から4のいずれか1項に記載のガラス基板製造方法。 - 前記冷却工程によって冷却された前記シートガラスは、100ppm以下の熱収縮率を有する、
請求項1から5のいずれか1項に記載のガラス基板製造方法。 - 前記冷却工程は、
前記シートガラスの幅方向の温度勾配を、前記シートガラスの流れ方向に沿って制御する温度勾配制御工程をさらに含む、
請求項1から6のいずれか1項に記載のガラス基板製造方法。 - 前記冷却工程によって冷却された前記シートガラスは、1.0nm以下の歪値を有する、
請求項7に記載のガラス基板製造方法。 - 前記冷却工程によって冷却された前記シートガラスは、0.15mm以下の反り値を有する、
請求項7または8に記載のガラス基板製造方法。 - 前記冷却工程によって冷却された前記シートガラスは、15μm以下の板厚偏差を有する、
請求項7から9のいずれか1項に記載のガラス基板製造方法。
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JP2016011239A (ja) * | 2014-06-30 | 2016-01-21 | AvanStrate株式会社 | ガラス板の製造方法、及び、ガラス板 |
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WO2016052426A1 (ja) * | 2014-09-30 | 2016-04-07 | AvanStrate株式会社 | ガラス基板の製造方法、及び、ガラス基板の製造装置 |
JP2016155741A (ja) * | 2014-12-01 | 2016-09-01 | ショット アクチエンゲゼルシャフトSchott AG | 薄板ガラスを分離する方法 |
WO2017002632A1 (ja) * | 2015-06-30 | 2017-01-05 | AvanStrate株式会社 | ディスプレイ用ガラス基板の製造方法 |
WO2020031811A1 (ja) * | 2018-08-09 | 2020-02-13 | Agc株式会社 | 板ガラスの製造方法 |
JP2020508958A (ja) * | 2017-02-28 | 2020-03-26 | コーニング インコーポレイテッド | 厚み変動を抑制したガラス物品、その製造方法、及びそのための装置 |
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JP2016011239A (ja) * | 2014-06-30 | 2016-01-21 | AvanStrate株式会社 | ガラス板の製造方法、及び、ガラス板 |
CN105392741A (zh) * | 2014-06-30 | 2016-03-09 | 安瀚视特控股株式会社 | 平板玻璃的制造方法及平板玻璃制造装置 |
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JP6007341B2 (ja) * | 2014-09-30 | 2016-10-12 | AvanStrate株式会社 | ガラス基板の製造方法、及び、ガラス基板の製造装置 |
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WO2017002632A1 (ja) * | 2015-06-30 | 2017-01-05 | AvanStrate株式会社 | ディスプレイ用ガラス基板の製造方法 |
JPWO2017002632A1 (ja) * | 2015-06-30 | 2018-04-12 | AvanStrate株式会社 | ディスプレイ用ガラス基板の製造方法 |
JP2020508958A (ja) * | 2017-02-28 | 2020-03-26 | コーニング インコーポレイテッド | 厚み変動を抑制したガラス物品、その製造方法、及びそのための装置 |
JP2021020851A (ja) * | 2017-02-28 | 2021-02-18 | コーニング インコーポレイテッド | 厚み変動を抑制したガラス物品、その製造方法、及びそのための装置 |
WO2020031811A1 (ja) * | 2018-08-09 | 2020-02-13 | Agc株式会社 | 板ガラスの製造方法 |
JPWO2020031811A1 (ja) * | 2018-08-09 | 2021-08-02 | Agc株式会社 | 板ガラスの製造方法 |
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JP5153965B2 (ja) | 2013-02-27 |
KR20130122954A (ko) | 2013-11-11 |
CN103193376B (zh) | 2016-01-20 |
JP5352728B2 (ja) | 2013-11-27 |
TWI402224B (zh) | 2013-07-21 |
US20130180288A1 (en) | 2013-07-18 |
US20150225276A1 (en) | 2015-08-13 |
TW201300332A (zh) | 2013-01-01 |
CN102822106A (zh) | 2012-12-12 |
KR20120130265A (ko) | 2012-11-29 |
KR101651318B1 (ko) | 2016-08-25 |
JP2014001133A (ja) | 2014-01-09 |
US9533908B2 (en) | 2017-01-03 |
US9038416B2 (en) | 2015-05-26 |
TWI545091B (zh) | 2016-08-11 |
CN103193376A (zh) | 2013-07-10 |
TW201332909A (zh) | 2013-08-16 |
CN102822106B (zh) | 2015-08-26 |
JPWO2012133838A1 (ja) | 2014-07-28 |
JP2013047183A (ja) | 2013-03-07 |
KR101326978B1 (ko) | 2013-11-13 |
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