WO2012108055A1 - Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée - Google Patents

Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée Download PDF

Info

Publication number
WO2012108055A1
WO2012108055A1 PCT/JP2011/052950 JP2011052950W WO2012108055A1 WO 2012108055 A1 WO2012108055 A1 WO 2012108055A1 JP 2011052950 W JP2011052950 W JP 2011052950W WO 2012108055 A1 WO2012108055 A1 WO 2012108055A1
Authority
WO
WIPO (PCT)
Prior art keywords
single crystal
modified layer
layer
crystal member
laser
Prior art date
Application number
PCT/JP2011/052950
Other languages
English (en)
Japanese (ja)
Inventor
国司　洋介
鈴木　秀樹
利香 松尾
順一 池野
Original Assignee
信越ポリマー株式会社
国立大学法人埼玉大学
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越ポリマー株式会社, 国立大学法人埼玉大学 filed Critical 信越ポリマー株式会社
Priority to PCT/JP2011/052950 priority Critical patent/WO2012108055A1/fr
Priority to JP2012556741A priority patent/JP5875122B2/ja
Priority to KR1020137021348A priority patent/KR20130103624A/ko
Publication of WO2012108055A1 publication Critical patent/WO2012108055A1/fr

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/04—After-treatment of single crystals or homogeneous polycrystalline material with defined structure using electric or magnetic fields or particle radiation
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/06—Joining of crystals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams

Definitions

  • the present invention relates to a single crystal substrate manufacturing method and an internal modified layer forming single crystal member, and more particularly, to a single crystal substrate manufacturing method and an internal modified layer forming single crystal member for cutting a single crystal substrate thinly and stably.
  • a semiconductor wafer represented by a single crystal silicon (Si) wafer a cylindrical ingot solidified from a silicon melt melted in a quartz crucible is cut into blocks of an appropriate length. Then, the peripheral edge is ground to a target diameter, and then the block-shaped ingot is sliced into a wafer shape with a wire saw to manufacture a semiconductor wafer.
  • Si single crystal silicon
  • the semiconductor wafer manufactured in this way is subjected to various processes such as circuit pattern formation in the previous process in order and used in the subsequent process.
  • the back surface is back-grinded and thinned. Accordingly, the thickness is adjusted to about 750 ⁇ m to 100 ⁇ m or less, for example, about 75 ⁇ m or 50 ⁇ m.
  • a conventional semiconductor wafer is manufactured as described above, and an ingot is cut with a wire saw, and a cutting allowance larger than the thickness of the wire saw is required for cutting, so a thin semiconductor wafer with a thickness of 0.1 mm or less It is very difficult to manufacture the product, and the product rate is not improved.
  • SiC silicon carbide
  • SiC silicon carbide
  • ingots can be easily formed with a wire saw because of its higher hardness than Si.
  • the condensing point of the laser beam is aligned with the inside of the ingot with the condensing lens, and the ingot is relatively scanned with the laser beam to form a planar modified layer by multiphoton absorption inside the ingot.
  • a substrate manufacturing method and a substrate manufacturing apparatus are disclosed in which a part of the ingot is peeled off using the modified layer as a peeling surface.
  • Patent Document 1 discloses a technique of using a multiphoton absorption of a laser beam to form a modified layer inside a silicon ingot and peeling the wafer from the silicon ingot using an electrostatic chuck.
  • a glass plate is attached to the objective lens of NA0.8, a laser beam is irradiated toward the silicon wafer for solar cells, and a modified layer is formed inside the silicon wafer.
  • a technique for fixing an acrylic resin plate with an instantaneous adhesive and peeling it is disclosed.
  • Patent Document 3 discloses, in particular, paragraphs 0003 to 0005, 0057, and 0058, a technique for dicing by forming a microcavity by condensing laser light inside a silicon wafer and causing multiphoton absorption. .
  • Patent Document 1 it is not easy to uniformly peel off a large area substrate (silicon substrate).
  • Patent Document 3 is a technique related to dicing for cutting a silicon wafer into individual chips, and it is not easy to apply this to manufacturing a thin plate-like wafer from a single crystal ingot such as silicon.
  • an object of the present invention is to provide a single crystal substrate manufacturing method and an internal modified layer forming single crystal member capable of easily manufacturing a relatively large and thin single crystal substrate.
  • a laser focusing unit is disposed in a non-contact manner on a single crystal member, and the laser beam is irradiated on the surface of the single crystal member by the laser focusing unit.
  • the step of irradiating and condensing the laser light inside the single crystal member, and the laser condensing means and the single crystal member are relatively moved to form a polycrystalline portion inside the single crystal member.
  • Forming a two-dimensional modified layer, and forming a single crystal substrate by separating the single crystal layer separated by the modified layer from the modified layer A manufacturing method is provided.
  • the laser beam irradiated from the outside of the single crystal member and condensed inside the single crystal member is constituted by an aggregate of polycrystalline portions parallel to the irradiation axis of the laser beam.
  • An internal modified layer forming single crystal member comprising a two-dimensional modified layer to be formed and a single crystal layer adjacent to the modified layer is provided.
  • FIG. 3 is a schematic cross-sectional view showing that a polycrystalline portion is formed inside a single crystal member by laser light irradiation in the first embodiment.
  • FIG. 3 is a schematic cross-sectional view for explaining that the single crystal layer is peeled from the modified layer by bonding a metal substrate to the upper and lower surfaces of the internal modified layer forming single crystal member in the first embodiment.
  • FIG. 3 is a schematic cross-sectional view for explaining that the single crystal layer is peeled from the modified layer by bonding a metal substrate to the upper and lower surfaces of the internal modified layer forming single crystal member in the first embodiment.
  • the typical perspective sectional view explaining the modification of a 1st embodiment The optical microscope photograph which shows the example of the peeling surface of a single crystal layer in 1st Embodiment.
  • FIG. 1 The optical microscope photograph of the cleaved surface of a silicon wafer in Example 1 of Test Example 1.
  • FIG. 3 an optical micrograph showing the grain size of polycrystalline grains of the modified layer.
  • Test Example 3 an optical micrograph showing the grain size of polycrystalline grains of the modified layer.
  • Test Example 3 an optical micrograph showing the grain size of polycrystalline grains of the modified layer.
  • XRD X-ray diffraction
  • Test Example 5 an optical micrograph and a spectrum diagram of a cross section of an internal modified layer-forming single crystal member.
  • FIG. 1 is a schematic bird's-eye view for explaining that laser light is condensed in the air by the laser condensing means in this embodiment
  • FIG. 2 is a single crystal member by the laser condensing means in this embodiment. It is a typical bird's-eye view explaining that the laser beam was condensed inside.
  • FIG. 3 is a schematic cross-sectional structure illustrating the single crystal substrate manufacturing method and the internal modified layer forming single crystal member 11 according to the present embodiment.
  • FIG. 4 is a schematic cross-sectional view showing that the polycrystalline portion 12p is formed inside the single crystal member by laser light irradiation.
  • FIG. 5 is a schematic perspective sectional view showing that the modified layer 12 formed by condensing the laser beam is exposed on the side wall of the internal modified layer forming single crystal member 11.
  • the single crystal substrate manufacturing method includes a step of disposing the condensing lens 15 on the single crystal member 10 as a laser condensing unit (laser condensing unit) in a non-contact manner, The step of irradiating the surface of the member 10 with the laser beam B and condensing the laser beam B inside the single crystal member 10, and the relative movement of the condenser lens 15 and the single crystal member 10, In addition, the step of forming a two-dimensional modified layer 12 composed of a polycrystalline portion, and the separation of the single crystal layer 10u divided by the modified layer 12 from the modified layer 12, FIG. Forming a single crystal substrate 10s as shown.
  • FIG. 7 is a schematic cross-sectional view for explaining that the single crystal layer 10 u is peeled from the modified layer 12.
  • the single crystal layer 10u is described as being peeled from the interface 11u with the modified layer 12.
  • the present invention is not limited to peeling from the interface 11u, and peeling is performed within the modified layer 12. It may be made to occur.
  • the condensing lens 15 is configured to correct aberration due to the refractive index of the single crystal member 10. Specifically, as shown in FIG. 1, in the present embodiment, the condensing lens 15 is configured such that when the condensing lens 15 condenses in the air, the laser light that has reached the outer peripheral portion E of the condensing lens 15 is condensed. The laser beam is corrected so as to be condensed on the condensing lens side with respect to the laser light reaching the central portion M. That is, when the light is condensed, the condensing point EP of the laser light reaching the outer peripheral portion E of the condensing lens 15 is condensed compared to the condensing point MP of the laser light reaching the central portion M of the condensing lens 15. The correction is made so that the position is close to the lens 15.
  • the condensing lens 15 includes a first lens 16 that condenses in the air, and a second lens 18 disposed between the first lens 16 and the single crystal member 10. .
  • Both the first lens 16 and the second lens 18 are lenses capable of condensing laser light in a conical shape.
  • the depth (interval) D from the surface 10t (irradiated side surface) of the single crystal member 10 on the side irradiated with the laser beam B to the modified layer 12 is mainly set to the first lens 16 and the surface 10t. It is the structure adjusted with the distance L1. Further, the thickness T of the modified layer 12 is adjusted mainly by the distance L2 between the second lens 18 and the surface 10t.
  • aberration correction in the air is mainly performed by the first lens 16, and aberration correction in the single crystal member 10 is mainly performed by the second lens 18.
  • the distances L1 and L2 are set.
  • the first lens 16 in addition to a spherical or aspherical single lens, a combination lens can be used to correct various aberrations and ensure a working distance, and the NA is 0.3 to 0.7. It is preferable.
  • the NA of the condensing lens 15 in the air defined by the light and its condensing point EP is preferably 0.3 to 0.85, and more preferably 0.5 to 0.85.
  • the thickness of the modified layer 12 is not necessary, it is possible to dispose only one lens instead of the first lens 16 and the second lens 18. In that case, it is preferable to have a structure capable of correcting aberrations in the single crystal member.
  • the size of the single crystal member 10 is not particularly limited, it is preferable that the surface 10t irradiated with the laser beam B is flattened in advance, for example, made of a thick silicon wafer of ⁇ 300 mm.
  • the laser beam B is irradiated not on the peripheral surface of the single crystal member 10 but on the surface 10t from the irradiation device (not shown) through the condenser lens 15.
  • the laser beam B is composed of, for example, a pulse laser beam having a pulse width of 1 ⁇ s or less, and a wavelength of 900 nm or more, preferably 1000 nm or more is selected.
  • a YAG laser or the like is suitable. Used for.
  • a laser oscillator may be disposed above the condensing lens 15 to emit light toward the condensing lens 15, or a reflecting mirror may be disposed above the condensing lens 15 to irradiate laser light toward the reflecting mirror. And you may make it the form reflected toward the condensing lens 15 with a reflective mirror.
  • the laser beam B preferably has a wavelength of light transmittance of 1 to 80% when the single crystal substrate 10 is irradiated to a single crystal substrate having a thickness of 0.625 mm.
  • a single crystal substrate of silicon since laser light having a wavelength of 800 nm or less has a large absorption, only the surface is processed and the internal modified layer 12 cannot be formed.
  • a wavelength of 900 nm or more, preferably 1000 nm or more is selected.
  • a CO 2 laser with a wavelength of 10.64 ⁇ m has a light transmittance that is too high, so that it is difficult to process a single crystal substrate. Therefore, a YAG fundamental wave laser is preferably used.
  • the reason why the wavelength of the laser beam B is preferably 900 nm or more is that if the wavelength is 900 nm or more, the laser beam B is improved in the transmittance of the single crystal substrate made of silicon, and the modified layer 12 is reliably provided inside the single crystal substrate. It is because it can form. Laser light B is applied to the peripheral portion of the surface of the single crystal substrate or from the central portion of the surface of the single crystal substrate toward the peripheral portion.
  • Modified layer formation process As a process of forming the modified layer 12 in the single crystal member 10 by relatively moving the condenser lens 15 and the single crystal member 10, for example, the single crystal member 10 is placed on an XY stage (not shown). The single crystal member 10 is held by a vacuum chuck or an electrostatic chuck.
  • the condenser lens 15 and the single crystal member 10 are moved to the surface of the single crystal member 10 on the side where the condenser lens 15 is disposed.
  • the laser beam B condensed inside the single crystal member 10 causes a large number of rod-shaped parallel to the irradiation axis BC of the laser beam B.
  • a polycrystalline portion 12p is formed.
  • the aggregate of the polycrystalline portions 12p is the modified layer 12 described above. As a result of the formation of the modified layer 12, the internal modified layer forming single crystal member 11 is manufactured.
  • This internal modified layer forming single crystal member 11 includes a modified layer 12 formed inside the single crystal member, a single crystal layer 10u on the upper side of the modified layer 12 (that is, the irradiated side of the laser beam B), A single crystal portion 10d is provided below the material layer 12.
  • the single crystal layer 10 u and the single crystal portion 10 d are formed by dividing the single crystal member 10 by the modified layer 12.
  • laser beam deflecting means such as a galvanometer mirror or a polygon mirror may be used, and laser light scanning within the irradiation area of the condenser lens 15 may be used in combination.
  • the laser beam B is focused on the surface 10t on the irradiated side of the single crystal member 10, that is, the surface 10t of the single crystal layer 10u. A mark indicating the region is attached, and then the single crystal member 10 is cut (cleaved) based on this mark, and the peripheral portion of the modified layer 12 is exposed and the single crystal layer 10u is peeled off as described later. May be performed.
  • the modified layer 12 formed by such irradiation a large number of polycrystalline portions 12p parallel to the irradiation axis BC of the laser beam B are formed.
  • the cross section of the modified layer 12 is etched and observed with a microscope or the like, the polycrystalline portion 12p parallel to the irradiation axis BC of the laser beam B is formed side by side as shown in FIG. easily confirmed.
  • the dimensions, density, and the like of the formed polycrystalline portion 12p are preferably set in consideration of the material of the single crystal member 10 and the like from the viewpoint of easily peeling the single crystal layer 10u from the modified layer 12.
  • the internal modified layer forming single crystal member 11 is cleaved so as to cross the region to be processed by the laser beam B, that is, the modified layer 12, and a cleavage plane (for example, FIGS. 3 and 5).
  • 14a to d) may be etched and observed with a scanning electron microscope or a confocal microscope.
  • a single crystal member for example, a silicon wafer
  • the Y stage feed may be linearly processed inside the member at intervals of 6 to 50 ⁇ m, cleaved so as to cross this, and the cleaved surface may be etched and observed for easy confirmation.
  • the modified layer 12 and the single crystal layer 10u are separated.
  • the modified layer 12 is exposed on the side wall of the internal modified layer forming single crystal member 11.
  • cleavage is performed along a predetermined crystal plane of the single crystal portion 10d and the single crystal layer 10u.
  • FIG. 5 a structure in which the modified layer 12 is sandwiched between the single crystal layer 10u and the single crystal portion 10d is obtained.
  • the surface 10t of the single crystal layer 10u is a surface on the side irradiated with the laser beam B.
  • the exposure work is omitted. It is possible.
  • metal substrates 28u and 28d are bonded to the upper and lower surfaces of the internal modified layer forming single crystal member 11, respectively. That is, the metal substrate 28u is bonded to the surface 10t of the single crystal layer 10u with the adhesive 34u, and the metal substrate 28d is bonded to the surface 10b of the single crystal portion 10d with the adhesive 34d.
  • Oxide layers 29u and 29d are formed on the surfaces of the metal substrates 28u and 28d, respectively.
  • the oxide layer 29u is bonded to the surface 10t
  • the oxide layer 29d is bonded to the surface 10b.
  • a SUS peeling auxiliary plate is used as the metal substrates 28u and 28d.
  • the adhesive an adhesive that is used in a normal semiconductor manufacturing process and is used as a so-called wax for fixing a commercially available silicon ingot is used.
  • the adhesive bonded with this adhesive is immersed in water, the adhesive strength of the adhesive is reduced, so that the adhesive and the adherend (single crystal layer 10u) can be easily separated.
  • the metal substrate 28u is attached to the surface 10t of the single crystal layer 10u with a temporary fixing adhesive, and the metal substrate 28u is lined and peeled by applying a force.
  • the adhesive strength of the temporary fixing adhesive only needs to be stronger than the force necessary for peeling at the interface 11u between the modified layer 12 and the single crystal layer 10u.
  • the size and density of the formed polycrystalline portion 12p may be adjusted.
  • the temporary fixing adhesive for example, an adhesive made of an acrylic two-component monomer component that cures using metal ions as a reaction initiator is used.
  • the uncured monomer and the cured reaction product are water-insoluble, it is possible to prevent the peeling surface 10f (for example, the peeling surface of the silicon wafer) of the single crystal layer 10u exposed when peeling in water from being contaminated. .
  • the coating thickness of the temporary fixing adhesive is preferably 0.1 to 1 mm, more preferably 0.15 to 0.35 mm before curing. If the application thickness of the temporary fixing adhesive is excessively large, it takes a long time to be completely cured, and cohesive failure of the temporary fixing adhesive is likely to occur when the single crystal member (silicon wafer) is cleaved. . Moreover, when application
  • the application thickness of the temporary fixing adhesive may be controlled by using a method of fixing the metal substrates 28u and 28d to be bonded to an arbitrary height, but simply using a shim plate. Can do.
  • the necessary parallelism may be obtained using one or more auxiliary plates.
  • the metal substrates 28u and 28d are bonded to the upper and lower surfaces of the internal modified layer-forming single crystal member 11 with a temporary fixing adhesive, they may be bonded one by one or may be bonded simultaneously on both sides.
  • the metal substrate is bonded to one side and the adhesive is cured, and then the metal substrate is bonded to the other side.
  • the surface to which the temporary fixing adhesive is applied may be the upper surface or the lower surface of the internal modified layer forming single crystal member 11.
  • a resin film not containing metal ions may be used as the cover layer.
  • machining such as a punch hole for fixing the apparatus may be performed.
  • the metal substrate to be bonded undergoes a peeling process in water, it is preferable to form a passive layer for the purpose of suppressing contamination of the silicon wafer, and an oxide layer (oxide film) formed for the purpose of reducing the takt time for peeling in water. A thinner layer is preferred.
  • the surface of the metal surface is easily obtained by removing the oxide layer on the metal surface by a mechanical or chemical method and providing an anchor effect.
  • a mechanical or chemical method include acid cleaning using chemicals and degreasing treatment.
  • Specific examples of the mechanical method include sand blasting and shot blasting.
  • the method of damaging the surface of a metal substrate with sand paper is the simplest, and the particle size is preferably # 80 to 2000. Considering the surface damage of the substrate made, # 150 to 800 is more preferable.
  • the method for applying the forces Fu and Fd is not particularly limited.
  • the side wall of the internal modified layer forming single crystal member 11 is etched to form grooves 36 in the modified layer 12, and as shown in FIG.
  • the forces Fu and Fd may be generated by press-fitting (for example, a cutter blade).
  • an upward force component Fu and a downward force component Fd may be generated by applying a force F from the angular direction to the internal modified layer forming single crystal member 11.
  • the peeling surface 10f of the single crystal substrate 10s obtained in this way is a rough surface as shown in FIG. 11, for example.
  • FIG. 11 is an optical micrograph of the peeling surface 10f of the single crystal substrate 10s.
  • a surface 10H cleaved in the crystal orientation plane is also generated in part and is shown.
  • the energy of the laser beam B can be concentrated on the thin thickness portion in the single crystal member 10 with the condenser lens 15 having a large NA. Therefore, the internal modified layer forming single crystal member 11 in which the modified layer (working region) 12 having a small thickness T (length along the irradiation axis BC of the laser beam B) is formed in the single crystal member 10 is manufactured. be able to. Then, it is easy to manufacture the thin single crystal substrate 10 s by peeling the single crystal layer 10 u from the modified layer 12. Further, such a thin single crystal substrate 10s can be easily manufactured in a relatively short time. In addition, since the number of single crystal substrates 10 s can be obtained from the single crystal member 10 by suppressing the thickness of the modified layer 12, the product rate can be improved.
  • the modified layer 12 an aggregate of polycrystalline portions 12p parallel to the irradiation axis BC of the laser beam B is formed. Thereby, peeling of the modified layer 12 and the single crystal layer 10 is easy.
  • the peeling surface 10f is roughened by peeling from the interface 11u on the laser light irradiated side of the interfaces 11u and 11d.
  • a roughened peeling surface 10f as a surface to be irradiated with sunlight, it is possible to improve the light collection efficiency when applied to a solar cell.
  • the single crystal substrate 10s is obtained by bonding and peeling the metal substrate 28u having the oxide layer 29u on the surface to the surface of the single crystal layer 10u. Therefore, an adhesive used in a normal semiconductor manufacturing process can be used for bonding to a metal substrate, and a cyanoacrylate adhesive having a strong adhesive force used when bonding an acrylic plate must be used. That's it. Moreover, since the adhesive strength of the adhesive is greatly reduced by being immersed in water after peeling, the single crystal substrate 10s can be easily separated from the metal substrate 28u.
  • the metal substrates 28u and 28d are respectively attached to the upper and lower surfaces of the internal modified layer forming single crystal member 11, and the metal substrates 28u and 28d are peeled by applying force to the single crystal substrate. Although it has been described by forming 10 s, it may be removed by removing the modified layer 12 by etching.
  • the single crystal member 10 is not limited to a silicon wafer, but an ingot of a silicon wafer, an ingot of single crystal sapphire, SiC, or a wafer cut from the ingot, or another crystal (GaN, GaAs, InP) on this surface. Etc.) can be applied. Further, the plane orientation of the single crystal member 10 is not limited to (100), and other plane orientations can be used.
  • Example 1 The inventor prepared a single-crystal silicon wafer 10 (thickness: 625 ⁇ m) that was mirror-polished as the single-crystal member 10.
  • the silicon wafer 10 is placed on an XY stage, and the second plano-convex lens is used as the second lens 18 at a distance of 0.34 mm from the surface 10t on the laser beam irradiated side of the silicon wafer 10. 18 was placed.
  • the second plano-convex lens 18 is a lens having a radius of curvature of 7.8 mm, a thickness of 3.8 mm, and a refractive index of 1.58.
  • a first plano-convex lens 16 having an NA of 0.55 is disposed as the first lens 16.
  • the modified layer 12 is formed inside the silicon wafer 10 by irradiating the laser beam B having a wavelength of 1064 nm, a repetition frequency of 100 kHz, a pulse width of 60 seconds, and an output of 1 W, and passing through the first plano-convex lens 16 and the second plano-convex lens 18. did.
  • the depth D from the silicon wafer surface 10t to the processing region, that is, the depth D to the modified layer 12 was controlled by adjusting the mutual position of the first plano-convex lens 16 and the silicon wafer surface 10t.
  • the thickness T of the modified layer 12 was controlled by adjusting the mutual position of the second plano-convex lens 18 and the silicon wafer surface 10t.
  • the laser beam B is irradiated while being moved at a constant speed of 15 mm on the X stage, then sent 1 ⁇ m on the Y stage, and this is repeated to repeat the laser beam in an area of 15 mm ⁇ 15 mm.
  • the modified layer 12 was formed by performing internal irradiation. As a result, the internal modified layer forming single crystal member 11 having the single crystal layer 10u on the upper side of the modified layer 12 (that is, the irradiated side of the laser beam B) and the single crystal part 10d on the lower side of the modified layer 12 is obtained.
  • the single crystal layer 10 u and the single crystal portion 10 d are formed by dividing the silicon wafer 10 by the modified layer 12.
  • the silicon wafer 10 was cleaved so as to cross the modified layer 12, the cleaved surface was etched, and observed with an optical microscope (scanning electron microscope). An optical micrograph of the cleaved surface observed is shown in FIG. It was confirmed that polycrystalline layers 12p having a width of less than 1 ⁇ m are arranged in the modified layer 12.
  • the modified layer 12 was formed by changing the above-described implementation conditions only by sending the Y stage at 10 ⁇ m instead of 1 ⁇ m.
  • the silicon wafer 10 was cleaved and etched so as to cross the modified layer 12, and the cleaved surface was observed with an optical microscope (scanning electron microscope). An optical micrograph of the observed cleavage plane is shown in FIG. It was confirmed that polycrystalline layers 12p having a width of less than 10 ⁇ m are arranged in the modified layer 12.
  • Example 3 after irradiating the laser beam as in Example 2, the laser beam was repeatedly irradiated while being moved at a constant speed on the Y stage after being fed by 10 ⁇ m on the X stage. That is, the laser beam was irradiated in a lattice shape.
  • the silicon wafer 10 was cleaved and etched so as to cross the modified layer 12, and the cleaved surface was observed with an optical microscope (scanning electron microscope). It was confirmed more clearly than in Example 2 that polycrystalline portions 12p having a width of less than 10 ⁇ m were arranged in the modified layer 12.
  • Example 2 ⁇ Test Example 2>
  • the inventor uses the same silicon wafer as the silicon wafer 10 used in Test Example 1 and forms the internal modified layer-forming single crystal member 11 formed by forming the modified layer 12 under the conditions of Example 1.
  • the single crystal layer 10u was peeled off using the metal substrates 28u and 28d to obtain a single crystal substrate 10s.
  • the peeling surface 10f of the single crystal substrate 10s was observed with a laser confocal microscope, the measurement diagram shown in FIG. 14 was obtained, and it was confirmed that irregularities having a particle size of 50 to 100 ⁇ m were formed on the peeling surface 10f.
  • the horizontal axis is the unevenness dimension ( ⁇ m display), and the vertical axis is the surface roughness (% display).
  • the present inventor measured the state of the modified layer 12 by observing transmitted light with an infrared microscope while sequentially changing the position in the depth direction after the modified layer 12 was peeled from the single crystal layer 10u. Infrared micrographs obtained by the measurement are shown in FIGS. 15 shows the state of polycrystalline grains on the peeling surface of the modified layer 12 on the single crystal layer 10u side, FIG. 16 shows the state of polycrystalline grains at a slightly deeper position, and FIG. 17 shows a deeper position. The state of polycrystal grains at.
  • the particle diameter became coarser in the depth direction from the irradiated side of the laser beam.
  • ⁇ Test Example 4> The inventor irradiates a single crystal silicon wafer with laser light to form the modified layer 12 in the silicon wafer. And about this modified layer 12, the measurement by X-ray diffraction (XRD) was performed and crystallinity evaluation was performed. The figure obtained by the measurement is shown in FIG. As can be seen from FIG. 18, it was confirmed that single crystal silicon was polycrystallized. Accordingly, it has been found that the melting and solidification process is caused by the irradiation of the laser beam.
  • XRD X-ray diffraction
  • Example 5 The present inventor prepared a single crystal silicon wafer 10 (thickness: 625 ⁇ m) having a mirror polished surface on both sides as the single crystal member 10.
  • this silicon wafer 10 was placed on an XY stage and irradiated with a pulsed laser beam having a wavelength of 1064 nm to form a modified layer 12 having a square shape in a plan view with a side of 5 mm.
  • the silicon wafer (internally modified layer-forming single crystal member) was cleaved to expose the cross section of the modified layer 12, and this cross section was observed with a scanning electron microscope.
  • the thickness of the modified layer 12 was 30 ⁇ m.
  • FIG. 20 is a schematic bird's-eye view of the single-crystal member internal processing apparatus used for explaining the single-crystal substrate manufacturing method and the internal modified layer-forming single crystal member according to this embodiment.
  • the single crystal member internal processing apparatus 69 used in this embodiment includes a rotary stage 70 that holds the single crystal member 10 placed on the upper surface side, and a rotary stage control means 72 that controls the number of rotations of the rotary stage 70. Substrate rotating means 74 is provided.
  • the single crystal member internal processing device 69 includes a laser light source 76, a condensing lens 15, and a focal position adjusting tool (not shown) that adjusts the distance from the condensing lens 15 to the rotary stage 70. 80.
  • the single crystal member internal processing apparatus 1 includes an X-direction moving stage 84 that relatively moves the rotary stage 70 and the condenser lens 15 between the rotary shaft 70c of the rotary stage 70 and the outer periphery of the rotary stage 70, and A Y-direction moving stage 86 is provided.
  • the single crystal member internal processing apparatus 69 is used to place the single crystal member 10 on the rotary stage 70, and while rotating the single crystal member 10 at a constant speed on the rotary stage 70, Similarly, the laser beam B is irradiated, and then the rotary stage 70 is moved by the X direction moving stage 84 and the Y direction moving stage 86, and the irradiation position of the laser light B is set at a predetermined interval (1 ⁇ m,
  • the two-dimensional modified layer can be formed inside the single crystal member 10 by repeating irradiation after being sent at 5 ⁇ m, 10 ⁇ m, etc.
  • the polycrystalline portion generated by condensing the laser beam is located on this circle. Then, after the irradiation position of the laser beam B is sent at a predetermined interval in the radial direction of the rotary stage 70, the polycrystalline portion can be positioned concentrically by repeating the irradiation. Then, such an internal modified layer-forming single crystal member can be manufactured, and a single crystal substrate can be manufactured by peeling in the same manner as in the first embodiment.
  • a plurality of square-shaped single crystal members may be arranged on the rotary stage 70 symmetrically with respect to the rotary shaft 70c with an interval.
  • the polycrystal part by condensing of the laser beam B can be arrange
  • the thinly cut single crystal substrate can be applied to a solar cell as long as it is a Si substrate, and a sapphire substrate such as a GaN-based semiconductor device.
  • a solar cell as long as it is a Si substrate, and a sapphire substrate such as a GaN-based semiconductor device.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Laser Beam Processing (AREA)

Abstract

La présente invention vise à fournir un procédé de production de substrat monocristallin capable de produire facilement un substrat monocristallin relativement large et mince et un organe monocristallin renfermant une couche modifiée. Le procédé comprend les étapes suivantes: une étape pour la disposition dans un état sans contact d'un moyen de concentration laser sur un organe monocristallin; une étape pour l'irradiation, avec un faisceau laser, d'une surface (10t) de l'organe monocristallin à l'aide d'un moyen de concentration laser, et la concentration du faisceau laser sur l'intérieur de l'organe monocristallin (10) ; une étape pour le déplacement du moyen de concentration laser et de l'organe monocristallin (10) l'un par rapport à l'autre, et la formation d'une couche bidimensionnelle modifiée (12) produite par la partie polycristalline parallèle à l'axe d'irradiation du faisceau laser à l'intérieur de l'organe monocristallin ; et une étape pour la formation d'un substrat monocristallin (10s) par la séparation depuis l'interface avec la couche modifiée (12) d'une couche monocristalline (10u) formée en conséquence de la segmentation par la couche modifiée (12).
PCT/JP2011/052950 2011-02-10 2011-02-10 Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée WO2012108055A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2011/052950 WO2012108055A1 (fr) 2011-02-10 2011-02-10 Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée
JP2012556741A JP5875122B2 (ja) 2011-02-10 2011-02-10 単結晶基板製造方法および内部改質層形成単結晶部材
KR1020137021348A KR20130103624A (ko) 2011-02-10 2011-02-10 단결정 기판 제조 방법 및 내부 개질층 형성 단결정 부재

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/052950 WO2012108055A1 (fr) 2011-02-10 2011-02-10 Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée

Publications (1)

Publication Number Publication Date
WO2012108055A1 true WO2012108055A1 (fr) 2012-08-16

Family

ID=46638293

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/052950 WO2012108055A1 (fr) 2011-02-10 2011-02-10 Procédé de production de substrat monocristallin et organe monocristallin renfermant une couche modifiée

Country Status (3)

Country Link
JP (1) JP5875122B2 (fr)
KR (1) KR20130103624A (fr)
WO (1) WO2012108055A1 (fr)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169363A (ja) * 2011-02-10 2012-09-06 Saitama Univ 基板加工方法
JP2014161908A (ja) * 2013-02-28 2014-09-08 Saitama Univ 内部加工層形成方法、内部加工層形成部材、および、表面３次元構造部材
JP2015032771A (ja) * 2013-08-06 2015-02-16 株式会社ディスコ ウェーハの製造方法
JP2016043401A (ja) * 2014-08-26 2016-04-04 信越ポリマー株式会社 基板加工方法及び基板
KR20170008163A (ko) * 2015-07-13 2017-01-23 가부시기가이샤 디스코 다결정 SiC 웨이퍼의 생성 방법
JP2020141009A (ja) * 2019-02-27 2020-09-03 パナソニックＩｐマネジメント株式会社 基板材料およびレーザ加工方法
JP2020160210A (ja) * 2019-03-26 2020-10-01 ウシオ電機株式会社 微細穴光学素子の製造方法および改質装置
DE102014215187B4 (de) 2013-08-02 2024-02-29 Disco Corporation Verfahren zum Bearbeiten eines geschichteten Wafers

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6358940B2 (ja) * 2014-12-04 2018-07-18 株式会社ディスコ ウエーハの生成方法
JP6399914B2 (ja) * 2014-12-04 2018-10-03 株式会社ディスコ ウエーハの生成方法
JP6399913B2 (ja) * 2014-12-04 2018-10-03 株式会社ディスコ ウエーハの生成方法
JP6358941B2 (ja) * 2014-12-04 2018-07-18 株式会社ディスコ ウエーハの生成方法
JP6391471B2 (ja) * 2015-01-06 2018-09-19 株式会社ディスコ ウエーハの生成方法
JP6395613B2 (ja) * 2015-01-06 2018-09-26 株式会社ディスコ ウエーハの生成方法
JP6395633B2 (ja) * 2015-02-09 2018-09-26 株式会社ディスコ ウエーハの生成方法
JP6395632B2 (ja) * 2015-02-09 2018-09-26 株式会社ディスコ ウエーハの生成方法
JP6395634B2 (ja) * 2015-02-09 2018-09-26 株式会社ディスコ ウエーハの生成方法
JP6429715B2 (ja) * 2015-04-06 2018-11-28 株式会社ディスコ ウエーハの生成方法
JP6425606B2 (ja) * 2015-04-06 2018-11-21 株式会社ディスコ ウエーハの生成方法
JP6482389B2 (ja) * 2015-06-02 2019-03-13 株式会社ディスコ ウエーハの生成方法
JP6472333B2 (ja) * 2015-06-02 2019-02-20 株式会社ディスコ ウエーハの生成方法
JP6478821B2 (ja) * 2015-06-05 2019-03-06 株式会社ディスコ ウエーハの生成方法
JP6562819B2 (ja) * 2015-11-12 2019-08-21 株式会社ディスコ ＳｉＣ基板の分離方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09331077A (ja) * 1996-06-10 1997-12-22 Ion Kogaku Kenkyusho:Kk 太陽電池およびその製造方法
JP2005294325A (ja) * 2004-03-31 2005-10-20 Sharp Corp 基板製造方法及び基板製造装置
JP2007142000A (ja) * 2005-11-16 2007-06-07 Denso Corp レーザ加工装置およびレーザ加工方法
JP2009226457A (ja) * 2008-03-24 2009-10-08 Laser System:Kk レーザ加工方法
JP2011003624A (ja) * 2009-06-17 2011-01-06 Shin Etsu Polymer Co Ltd 半導体ウェーハの製造方法及びその装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102308372A (zh) * 2008-12-05 2012-01-04 新加坡科技研究局 晶片切割方法及其系统

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09331077A (ja) * 1996-06-10 1997-12-22 Ion Kogaku Kenkyusho:Kk 太陽電池およびその製造方法
JP2005294325A (ja) * 2004-03-31 2005-10-20 Sharp Corp 基板製造方法及び基板製造装置
JP2007142000A (ja) * 2005-11-16 2007-06-07 Denso Corp レーザ加工装置およびレーザ加工方法
JP2009226457A (ja) * 2008-03-24 2009-10-08 Laser System:Kk レーザ加工方法
JP2011003624A (ja) * 2009-06-17 2011-01-06 Shin Etsu Polymer Co Ltd 半導体ウェーハの製造方法及びその装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012169363A (ja) * 2011-02-10 2012-09-06 Saitama Univ 基板加工方法
JP2014161908A (ja) * 2013-02-28 2014-09-08 Saitama Univ 内部加工層形成方法、内部加工層形成部材、および、表面３次元構造部材
DE102014215187B4 (de) 2013-08-02 2024-02-29 Disco Corporation Verfahren zum Bearbeiten eines geschichteten Wafers
JP2015032771A (ja) * 2013-08-06 2015-02-16 株式会社ディスコ ウェーハの製造方法
JP2016043401A (ja) * 2014-08-26 2016-04-04 信越ポリマー株式会社 基板加工方法及び基板
KR20170008163A (ko) * 2015-07-13 2017-01-23 가부시기가이샤 디스코 다결정 SiC 웨이퍼의 생성 방법
KR102346916B1 (ko) 2015-07-13 2022-01-04 가부시기가이샤 디스코 다결정 SiC 웨이퍼의 생성 방법
JP2020141009A (ja) * 2019-02-27 2020-09-03 パナソニックＩｐマネジメント株式会社 基板材料およびレーザ加工方法
JP2020160210A (ja) * 2019-03-26 2020-10-01 ウシオ電機株式会社 微細穴光学素子の製造方法および改質装置
JP7196718B2 (ja) 2019-03-26 2022-12-27 ウシオ電機株式会社 微細穴光学素子の製造方法および改質装置

Also Published As

Publication number Publication date
JPWO2012108055A1 (ja) 2014-07-03
KR20130103624A (ko) 2013-09-23
JP5875122B2 (ja) 2016-03-02

Similar Documents

Publication Publication Date Title
JP5875122B2 (ja) 単結晶基板製造方法および内部改質層形成単結晶部材
JP6004338B2 (ja) 単結晶基板製造方法および内部改質層形成単結晶部材
JP5875121B2 (ja) 単結晶基板の製造方法および内部改質層形成単結晶部材の製造方法
JP5843393B2 (ja) 単結晶基板の製造方法、単結晶基板、および、内部改質層形成単結晶部材の製造方法
JP6004339B2 (ja) 内部応力層形成単結晶部材および単結晶基板製造方法
JP4908652B2 (ja) 切断起点領域が形成された基板
TWI524960B (zh) 基板及基板加工方法
TWI321828B (en) Manufacturing method of a semiconductor device
JP5509448B2 (ja) 基板スライス方法
JP2014019120A (ja) 内部加工層形成単結晶部材の製造方法
JP6032789B2 (ja) 単結晶加工部材の製造方法、および、単結晶基板の製造方法
JP6531885B2 (ja) 内部加工層形成単結晶部材およびその製造方法
JP5561666B2 (ja) 基板スライス方法
JP2015119076A (ja) 内部加工層形成単結晶部材およびその製造方法
JP2005277136A (ja) 基板製造方法および基板製造装置
JP2012169363A (ja) 基板加工方法
JP6202695B2 (ja) 単結晶基板製造方法
JP6202696B2 (ja) 単結晶基板製造方法
JP2012169361A (ja) 基板加工方法及び基板
JP6265522B2 (ja) 表面３次元構造部材の製造方法
JP2005294656A (ja) 基板製造方法及び基板製造装置
US10373855B2 (en) Method for processing a wafer and method for processing a carrier
JP2006024782A (ja) 基板製造方法、および基板製造装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11858057

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2012556741

Country of ref document: JP

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20137021348

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 11858057

Country of ref document: EP

Kind code of ref document: A1