WO2012081293A1 - 流体制御弁 - Google Patents
流体制御弁 Download PDFInfo
- Publication number
- WO2012081293A1 WO2012081293A1 PCT/JP2011/072503 JP2011072503W WO2012081293A1 WO 2012081293 A1 WO2012081293 A1 WO 2012081293A1 JP 2011072503 W JP2011072503 W JP 2011072503W WO 2012081293 A1 WO2012081293 A1 WO 2012081293A1
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- WO
- WIPO (PCT)
- Prior art keywords
- valve
- valve seat
- resin
- fluid control
- flow path
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/02—Construction of housing; Use of materials therefor of lift valves
- F16K27/0236—Diaphragm cut-off apparatus
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
Definitions
- the present invention includes a resin valve main body having a first flow path and a second flow path, a resin valve upper body connected to an upper surface of the resin valve main body, a resin valve main body, and a resin valve upper body.
- a resin-made diaphragm valve element sandwiched between the first port hole and the first valve hole having one end communicating with the first port and the first valve hole communicating with the valve hole at the other end.
- a communication port, the first port communication channel and the first valve hole communication channel are orthogonal, and the resin valve body includes a valve chamber, a first port communication channel, and a first valve hole communication channel.
- the present invention relates to a fluid control valve including a valve seat support portion that supports the valve seat between the two.
- a resin valve upper body 102 is connected to an upper surface of a resin valve main body 101, and a diaphragm valve body is interposed between the resin valve main body 101 and the resin valve upper body 102. 103 is held.
- the fluid control valve 100 brings the diaphragm valve body 103 into contact with the valve seat 106 by sliding the piston 105 downward by supplying air to the operation port 104 in the resin valve upper body 102.
- the piston 105 slides upward by the return spring 107, and the diaphragm valve body 103 is separated from the valve seat 106.
- the fluid flowing through the first flow path 108 passes through the valve chamber 109 and flows into the second flow path 110.
- first port communication channel 108B that communicates with the first port
- first valve hole communication channel 108A that communicates with the valve chamber 109.
- first port communication channel 108 ⁇ / b> B and the first valve hole communication channel 108 ⁇ / b> A have shapes that are orthogonal to each other immediately below the valve hole 111.
- a valve seat support 120 that supports the valve seat 106 is formed between the first port communication channel 108 ⁇ / b> B and the valve chamber 109.
- the diaphragm valve body 103 presses against the valve seat 106 in order to close the fluid control valve 100.
- the valve seat support 120 that supports the valve seat 106 is deflected.
- the valve seat support portion 120 is bent, the valve seat end 106A on the upper surface of the valve seat support portion 120 of the valve seat 106 shown in FIG. 11 is inclined. Specifically, it is inclined by an angle ⁇ compared to a line connecting the valve seat one end 116A (shown by a broken line in FIG. 11) and the valve seat other end 106B before deflection.
- the valve seat is tilted by a distance X from the valve seat end 116A before deflection to the valve seat end 106A after deflection.
- valve seat support portion 120 When the valve seat support portion 120 is bent and the valve seat end 106A of the valve seat 106 is inclined, the diaphragm valve body 103 and the valve seat end 106A of the valve seat 106 are rubbed, and the seal surface of the valve seat 106 is damaged. In particular, when the valve seat support portion 120 has a large deflection and the valve seat end 106A of the valve seat 106 is largely inclined, the seal surface of the valve seat 106 is damaged. If the sealing surface of the valve seat 106 is scratched, it causes a problem that fluid leaks from the wound.
- valve seat support part bends. Since the valve seat support portion bends, a sufficient sealing load cannot be obtained only at that location. If a sufficient seal load cannot be obtained, leakage occurs from that portion, which is a problem.
- the resin fluid control valve is easily bent. Therefore, in a state where a high-temperature fluid flows, when a sealing load is applied to the valve seat, the valve seat support portion having a low strength is deflected and the repulsive force of the valve seat support portion is reduced, so that the sealing force of the valve seat is reduced. . Therefore, there is a problem that fluid leakage is likely to occur particularly in a state where a high-temperature fluid flows. Furthermore, when the fluid pressure of the fluid is high, there is a problem that leakage is more likely to occur.
- the present invention has been made to solve the above-described problems, and the object thereof is to prevent the inclination of the valve seat due to the deflection of the valve seat support portion that occurs when the diaphragm valve body comes into contact with the valve seat.
- An object is to provide a fluid control valve.
- the fluid control valve includes a resin valve main body having a first flow path and a second flow path, and a resin valve connected to the upper surface of the resin valve main body.
- the valve seat support portion has a valve seat reinforcement portion,
- the reinforcing portion is characterized by being formed in a shape that partially closes the inside of the first flow path.
- the fluid control valve having the above-described configuration can reduce the deflection width of the valve seat support portion generated when the diaphragm valve body abuts on the valve seat. That is, since the valve seat support portion can be reinforced by the valve seat reinforcement portion, the deflection of the valve seat support portion can be reduced and the inclination of the valve seat can be reduced.
- the inclination of one end of the valve seat can be reduced.
- the rubbing width between the diaphragm valve body and one end of the valve seat is reduced.
- damage to the seal surface at one end of the valve seat is reduced.
- the inclination of one end of the valve seat is reduced, so that it can be suppressed to scratches that do not exceed the seal surface of the valve seat, so that fluid leakage is prevented without causing fluid leakage. can do.
- the strength of the valve seat support can be maintained uniformly in the circumferential direction by reinforcing the weak seat support. Since the strength of the valve seat support portion can be maintained, it is possible to prevent the valve seat support portion having a low strength from being bent when a seal load is applied to the valve seat. Since a uniform sealing force can be generated in the circumferential direction, a reduction in sealing performance can be reduced. This is particularly effective when a high-temperature fluid is flowed and when the fluid pressure of the fluid is high.
- the valve seat reinforcement portion is a valve seat reinforcement upper portion that blocks a part of the first valve hole communication channel when the valve hole is viewed from the resin valve upper body direction. It is preferable that the valve seat reinforcement upper portion has an arcuate shape when the valve hole is viewed from the resin valve upper body direction.
- valve seat support portion can be reinforced and the strength is increased, so that the deflection of the valve seat support portion can be reduced and the inclination of the valve seat can be reduced.
- a valve seat reinforcement upper portion having an arcuate shape can be formed on the first port side of the valve hole when the valve hole is viewed from the resin valve upper body direction.
- the valve seat on the second port side of the valve hole is strong because it has a vertical support portion that separates the first flow path and the second flow path.
- the valve seat support portion on the first port side of the valve hole is weak in strength because there is no support in the vertical direction because the first flow path passes therethrough. Therefore, it is possible to prevent the valve seat support portion from being bent by forming the reinforcing upper portion in the weak portion. Thereby, the inclination of the valve seat can be reduced.
- valve seat reinforcement upper portion so as to have an arcuate shape on the first port side with respect to the valve hole, the valve seat support portion can be strengthened in the circumferential direction with respect to the valve hole. That is, when the valve seat reinforcement upper part has an arcuate shape, the connection to the tubular valve hole having strength is strengthened.
- the valve seat reinforcement upper part can increase the rigidity of the valve seat support part by utilizing the rigidity of the cylindrical valve hole having strength.
- the upper part of the valve seat reinforcement is formed so as to partially block the first valve hole communication channel, but the flow obstruction of the flowing fluid can be minimized. That is, the fluid has a property of flowing straight. Therefore, the fluid flowing through the first valve hole communication channel flows outside the R portion of the channel. For this reason, even if an arcuate valve seat reinforcement upper part is formed in the inner portion of the R portion, the influence on the fluid flow rate is small. Therefore, since the influence on the flow rate of the fluid is small, the obstruction of the fluid flowing through the first valve hole communication channel can be minimized.
- the valve seat reinforcing portion when the first port is viewed from the side surface direction of the resin valve body, the valve seat reinforcing portion becomes a valve seat reinforcing lower portion that closes a part of the first flow path.
- the lower part preferably has an arcuate shape when the first port is viewed from the side of the resin valve body.
- valve seat support can be reduced because the valve seat support can be reinforced and the strength is increased.
- a valve seat reinforcing lower portion having an arcuate shape can be formed on the valve seat support portion side in the first flow path. Since the first flow path has a circular cross section, the valve seat reinforcing lower portion can be firmly fixed by connecting a part of the circular cross section as an arcuate shape. Since the strength of the valve seat support portion can be increased by firmly fixing the valve seat reinforcing lower portion, plastic deformation of the valve seat support portion can be prevented.
- valve seat reinforcement lower portion having an arcuate shape on the valve seat support portion side in the first flow path, the deflection of the valve seat support portion is reduced. As a result, the inclination of the valve seat was reduced by 22% compared with the conventional fluid control valve.
- valve seat reinforcement upper part and the valve seat reinforcement lower part have a substantially L-shaped cross section with respect to the valve seat support part.
- valve seat reinforcement upper part and the valve seat reinforcement lower part can be used. Therefore, according to the result of this embodiment described in detail later, the deflection of the valve seat support portion can be reduced, and the inclination of the valve seat can be reduced by 92% compared to the conventional fluid control valve.
- the fluid control valve it is possible to prevent the valve seat from being tilted due to the deflection of the valve seat support portion that occurs when the diaphragm valve body comes into contact with the valve seat.
- Drawing 1 is a sectional view of fluid control valve 1 concerning a 1st embodiment, and shows a valve closed state.
- FIG. 2 is a cross-sectional view of the fluid control valve 1 according to the first embodiment, showing a valve open state.
- FIG. 3 shows a top view of the resin valve body 2.
- the fluid control valve 1 of the first embodiment is assembled in a semiconductor manufacturing apparatus and controls the supply of a chemical solution, as in the prior art.
- the fluid control valve 1 is a normally open type air-operated on-off valve.
- a resin valve upper body 3 is connected to an upper surface of a resin valve main body 2, and a diaphragm valve body 4 is sandwiched between the resin valve main body 2 and the resin valve upper body 3. .
- the fluid control valve 1 causes the diaphragm valve body 4 to contact or separate from the valve seat 15 by sliding the piston 25 in the resin valve upper body 3.
- an attachment plate 5 for attachment to a semiconductor manufacturing apparatus is fixed to the lower surface of the resin valve body 2.
- the resin valve body 2 is formed by molding a resin excellent in corrosion resistance and heat resistance, such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene perfluoroalkyl vinyl ether copolymer).
- PTFE polytetrafluoroethylene
- PFA tetrafluoroethylene perfluoroalkyl vinyl ether copolymer
- a valve chamber 13 is formed in a cylindrical shape on the upper surface of the resin valve main body 2.
- one end of the first flow path 21 communicating with the circular first port 23 and one end of the second flow path 22 communicating with the circular second port 24 are communicated.
- a valve hole 16 is formed in a portion where the first flow path 21 opens into the valve chamber 13.
- a valve seat 15 is integrally formed on the periphery of the valve hole 16.
- the first flow path 21 has a first port communication flow path 21 a with one end communicating with the first port 23 and a first valve hole communication flow path 21 b with the other end communicating with the valve chamber 13.
- the first port communication channel 21 a is formed in the axial direction with respect to the center of the first port 23.
- the first valve hole communication channel 21 b is formed in the axial direction of the valve hole 16.
- the first port communication channel 21a and the first valve hole communication channel 21b are vertically connected inside the resin valve body 2, and an R portion 21c is formed at the connection part.
- valve seat support portion 17 that supports the valve seat 15 is formed between the valve chamber 13 and the first port communication channel 21 a.
- the valve seat support portion 17 has a valve seat reinforcement upper portion 18.
- the valve seat reinforcement upper portion 18 when viewed from the upper surface of the resin valve main body 2, the valve seat reinforcement upper portion 18 is formed in the flow path of the first valve hole communication flow path 21b. Further, the valve seat reinforcement upper portion 18 has an arcuate shape composed of a string 18a and an arc 18b.
- the cross-sectional area of the valve seat reinforcement upper portion 18 shown in FIG. 3 can be obtained by an arcuate area formula.
- the shape of the valve hole 16 is a flow path shape having a substantially D-shaped cross section because the valve seat reinforcement upper portion 18 is formed in the flow path. As shown in FIG. 1, 45 degrees chamfering is carried out in this embodiment from the valve seat 15 of the valve seat reinforcement upper part 18 to the 1st valve hole communication flow path 21b. By being chamfered, the flow rate of the fluid flowing into the valve hole 16 can be increased.
- valve seat other end 15 a on the second flow path 22 side of the valve hole 16 is supported by a vertical support portion 20 that separates the first flow path 21 and the second flow path 22.
- the valve seat 15 is supported in a cylindrical shape by the support portion 20 and the valve seat support portion 17. A portion of the valve seat 15 other than the valve seat support portion 17 is supported by the support portion 20.
- the resin valve upper body 3 shown in FIG. 1 is made of a resin having corrosion resistance and rigidity, such as PPS (polyphenylene sulfide), PFA, PP, PVDF.
- the resin valve upper body 3 includes a cylinder 32 and a cover 33 and forms a piston chamber 34.
- the resin-made piston 35 is slidably loaded in the piston chamber 34 and is always urged upward in the figure by a return spring 31 that is contracted between the cylinder 32.
- the piston 35 moves the piston chamber 34 in the vertical direction in the drawing in accordance with the balance between the pressure of the operation air supplied from the operation port 33 a and the repulsive force of the return spring 31.
- a piston rod 36 is integrally formed with the piston 35.
- the piston rod 36 is configured integrally with the piston 35 and configured to be slidable on the cylinder 32, and is connected to the diaphragm valve body 4.
- the diaphragm valve body 4 is made of a resin having excellent corrosion resistance and heat resistance, such as PTFE (polytetrafluoroethylene), and is formed by cutting.
- the diaphragm valve body 4 has a cylindrical valve body portion 4a that contacts or separates from the valve seat 15, a thin film portion 4b connected to the outer peripheral surface of the valve body portion 4a, and a thickness along the outer edge of the thin film portion 4b. It is comprised from the provided peripheral part 4c.
- the diaphragm valve body 4 is fixed by the peripheral portion 4c being sandwiched between the resin valve main body 2 and the resin valve upper body 3 and sealing the inner wall of the annular groove 26.
- the fluid control valve 1 controls the flow rate of the fluid by contacting and separating from the valve seat 15 of the diaphragm valve body 4.
- the diaphragm valve body 4 pressurizes the valve seat 15 downward. Therefore, a load is generated in the valve seat support portion 17 that supports the valve seat 15.
- the valve seat support 120 is bent by the load.
- the valve seat one end 106A on the upper surface of the valve seat support portion 120 of the valve seat 106 is inclined as shown in FIG.
- the valve seat is tilted by an angle ⁇ as compared to a line connecting the valve seat one end 116A (shown by a two-dot chain line in FIG. 11) before the deflection and the valve seat other end 106B after the deflection. Further, it is tilted by the deflection by a distance X from the valve seat one end 116A to the valve seat one end 106A.
- the valve seat support part 120 is bent and the one end 106A of the valve seat is inclined, the diaphragm valve body 103 and the one end 106A of the valve seat are rubbed, and the seal surface of the one end 106A of the valve seat is damaged.
- valve seat support portion 120 has a large deflection and the valve seat end 106A is greatly inclined, the seal surface of the valve seat end 106A is damaged. If the sealing surface of the valve seat one end 106A is damaged, a fluid leaks from the wound, which causes a problem.
- the valve seat support portion 17 has the valve seat reinforcement upper portion 18. Therefore, the width of the deflection of the valve seat support portion 17 that occurs when the diaphragm valve body 4 presses the valve seat 15 can be reduced. That is, since the valve seat support portion 17 can be reinforced by the valve seat reinforcement upper portion 18, even if the diaphragm valve body 4 applies a downward pressure to the valve seat 15, the valve seat support portion 17 is not lowered. Since it is possible to counter the directional pressure, the occurrence of deflection can be suppressed with a small width.
- the inclination width of the valve seat one end 15b can also be reduced.
- the rubbing width between the diaphragm valve body 4 and the valve seat one end 15b is reduced.
- the damage to the sealing surface of the valve seat one end 15b is reduced.
- a scratch perpendicular to the circumferential direction of the seal surface of the valve seat one end 15b is attached, a scratch is formed in a range where the width of the scratch is narrow and does not exceed the seal surface of the valve seat one end 15b. The fluid will not leak from the wound.
- valve seat support portion 17 since the deflection of the valve seat support portion 17 can be reduced, plastic deformation of the valve seat support portion 17 due to repeated fatigue can be prevented. Since the plastic deformation of the valve seat support portion 17 can be prevented, the uniformity of the sealing force over the entire circumference between the diaphragm valve body 4 and the valve seat 15 can be maintained. Since the uniformity of the sealing force can be maintained, fluid leakage can be prevented.
- the deflection of the valve seat support portion 17 can be prevented, it is possible to prevent damage beyond the seal surface of the valve seat 15. Therefore, the replacement frequency for replacing the fluid control valve 1 can be reduced, and the usage cost can be reduced.
- the plastic deformation of the valve seat support portion 17 can be prevented, the uniformity of the seal can be maintained. Therefore, the replacement frequency for replacing the fluid control valve 1 can be reduced, and the usage cost can be reduced.
- FIG. 7 shows a bar graph showing the effect of the inclination of the valve seat of the present invention.
- the vertical axis represents the ratio of the tilt angle ⁇ of the fluid control valve 100 and the ratio of the tilt angle of the present invention when the ratio of the tilt angle ⁇ of the valve seat end 106A of the conventional fluid control valve 100 is “1”. It is a comparison.
- the horizontal axis shows the ratio of the inclination angle ⁇ of the valve seat 106 of the fluid control valve 100 in (A), and (C) shows the ratio of the inclination angle of the valve seat one end 15b of the fluid control valve 1 in this embodiment.
- the inclination of the valve seat end 15b of the fluid control valve 1 of this embodiment (C) as compared to the ratio of the inclination angle ⁇ of the valve seat end 106A of the fluid control valve 100 of (A).
- the angle ratio is 0.39. That is, since the valve seat support part 17 of the fluid control valve 1 has the valve seat reinforcement upper part 18, the inclination of the valve seat could be reduced by 61%.
- valve seat reinforcement upper portion 18 has an arcuate shape when the valve hole 16 is viewed from the direction of the resin valve upper body 3, thereby reinforcing the valve seat support portion 17 and increasing the strength.
- the deflection width of the support portion 17 can be reduced, and the inclination angle of the valve seat one end 15b can be reduced.
- valve seat reinforcing upper portion 18 having an arcuate shape can be formed on the first port communication channel 21a side of the valve hole 16 when the valve hole 16 is viewed from the resin valve upper body 13 direction.
- the valve seat other end 15 a on the second flow path 22 side of the valve hole 16 has a strong strength because it includes the vertical support portion 20 that separates the first flow path 21 and the second flow path 22.
- the valve seat support portion 17 on the first port communication flow path 21a side of the valve hole 16 is not supported in the vertical direction because the first flow path 21 passes therethrough and has a low strength. Therefore, it is possible to prevent the valve seat support portion 17 from being bent by forming the valve seat reinforcement upper portion 18 in a weak portion. Thereby, the inclination of the valve seat 15 can be reduced.
- valve seat reinforcement upper portion 18 By forming the valve seat reinforcement upper portion 18 so as to have an arcuate shape on the first port communication flow path 21a side with respect to the valve hole 16, the valve seat support portion 17 is formed in the valve hole 16 as shown in FIG. On the other hand, it can be strengthened in the circumferential direction S. That is, when the valve seat reinforcement upper portion 18 has an arcuate shape, the connection to the tubular valve hole 16 having strength is strengthened.
- the valve seat reinforcement upper portion 18 can increase the rigidity of the valve seat support portion 17 by utilizing the rigidity of the cylindrical valve hole 16 having strength by the support portion 20. As a result, the deflection of the valve seat support portion 17 can be reduced, and the inclination of the valve seat 15 can be reduced by 61% compared to the conventional fluid control valve 1.
- valve seat reinforcing upper portion 18 is formed so as to partially block the first valve hole communication channel 21b, the obstruction of the fluid flow can be minimized. That is, since the fluid has a property of flowing straight, a large amount of the fluid flowing through the first valve hole communication channel 21b flows through the outer portion of the R portion 21c of the channel. Therefore, even if the bow-shaped valve seat reinforcing upper portion 18 is formed in the inner portion of the R portion 21c, the influence on the fluid flow rate is small. As a result, the obstruction of the fluid flowing through the first valve hole communication channel 21b can be minimized.
- the strength of the valve seat support portion 17 and the support portion 20 can be maintained uniformly in the circumferential direction. Since the strength of the valve seat support portion 17 can be maintained, it is possible to prevent the valve seat support portion 17 having a low strength from being bent when the valve seat 15 receives a sealing load. Since a uniform sealing force can be generated in the circumferential direction, a reduction in sealing performance can be reduced. This is particularly effective when a high temperature state or an excessive seal load is applied to the valve seat.
- FIG. 4 shows a cross-sectional view of the resin valve body 50.
- FIG. 5 shows a side view of the resin valve main body 50.
- valve seat support portion 17 of the resin valve main body 2 in the fluid control valve 1 of the first embodiment is different, and the other structures are the same. Therefore, the valve seat support portion 57 of the resin valve main body 50 of the second embodiment which is changed from the valve seat support portion 17 of the resin valve main body 2 of the first embodiment will be described with reference to FIGS. 4 and 5. The description of other structures is omitted by using the same reference numerals as those in the first embodiment.
- a valve seat support portion 57 that supports the valve seat 15 is formed between the valve chamber 13 and the first port communication channel 21a.
- the valve seat support portion 57 has a valve seat reinforcement lower portion 59.
- the valve seat reinforcing lower portion 59 is formed in the flow path of the first port communication flow path 21a.
- the valve seat reinforcing lower portion 59 has an arcuate shape composed of a string 59a and an arc 59b.
- the cross-sectional area of the valve seat reinforcing lower portion 59 shown in FIG. 5 can be obtained by an arcuate area formula.
- the arcuate area of the valve seat reinforcing lower portion 59 occupies a ratio of about 10 percent of the area when the first port 23 is circular.
- the shape of the first port communication channel 21a is a channel shape having a substantially D-shaped cross section because the valve seat reinforcing lower portion 59 is formed in the channel.
- the valve seat support portion 57 has the valve seat reinforcement lower portion 59. Therefore, since the valve seat support part 57 can be reinforced and the strength is increased, the deflection width of the valve seat support part 57 can be reduced, and the inclination angle of the valve seat one end 15b can be reduced.
- a valve seat reinforcing lower portion 59 having an arcuate shape can be formed on the valve seat support portion 57 side in the first port communication channel 21 a.
- the valve seat reinforcement lower portion 59 can be firmly fixed by connecting a part of the circular cross section as an arcuate shape. Since the valve seat reinforcing lower portion 59 can be firmly fixed, the strength of the valve seat support portion 57 can be increased, so that the deflection width of the valve seat support portion 57 can be reduced. Therefore, the strength of the valve seat support portion 57 can be increased by forming the valve seat reinforcement lower portion 59 having an arcuate shape on the valve seat support portion 57 side in the first port communication channel 21a.
- FIG. 7 shows a bar graph showing the effect of the inclination of the valve seat of the present invention.
- the vertical axis represents the ratio of the inclination angle ⁇ of the valve seat end 106A of the fluid control valve 100 and the ratio of the inclination angle ⁇ of the valve seat end 106A of the conventional fluid control valve 100 to “1”. The ratio of the inclination angle is compared.
- the horizontal axis shows the ratio of the inclination angle ⁇ of the valve seat end 106A of the fluid control valve 100 in (A), and (B) shows the ratio of the inclination angle of the valve seat end 15b of the fluid control valve in this embodiment.
- the inclination angle of the valve seat end 15b of the fluid control valve according to the present embodiment shown in FIG. 7B is compared with the ratio of the inclination angle ⁇ of the valve seat end 106A of the fluid control valve 100 shown in FIG.
- the ratio is 0.78. That is, since the valve seat support portion 57 of the fluid control valve has the valve seat reinforcement lower portion 59, the inclination of the valve seat support portion 57 can be reduced by 22%.
- FIG. 6 shows a cross-sectional view of the resin valve body 60.
- valve seat support portion 17 of the resin valve main body 2 in the fluid control valve 1 of the first embodiment is different, and the other structures are the same.
- valve seat support part 67 of the resin valve main body 60 of the third embodiment which is changed from the valve seat support part 17 of the resin valve main body 2 of the first embodiment will be described with reference to FIG. The description of the structure is omitted by using the same reference numerals as those in the first embodiment.
- valve seat support part 67 which supports the valve seat 15 is formed.
- the valve seat support 67 has a valve seat reinforcement upper portion 68 and a valve seat reinforcement lower portion 69.
- the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69 make the valve seat reinforcement portion substantially L-shaped in section with respect to the valve seat support portion 67.
- the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69 are separated from the valve seat support portion 67 so that it can be easily understood that the valve seat reinforcement portion is substantially L-shaped in cross section with respect to the valve seat support portion 67.
- the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69 may be integrally formed with the valve seat support portion 67 and the L shape may not be recognized.
- valve seat reinforcement upper portion 68 is the same as the configuration of the valve seat reinforcement upper portion 18 of the first embodiment.
- structure of the valve seat reinforcement lower part 69 is the same structure as the valve seat reinforcement lower part 59 of 2nd Embodiment. Therefore, a detailed description is omitted.
- the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69 form a substantially L-shaped cross section with respect to the valve seat support portion 67, whereby the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69.
- Strength can be used. Therefore, the strength of the valve seat support portion 67 can be increased as compared with the conventional fluid control valve 1. That is, since the valve seat support part 67 can maintain strength compared to the conventional art by forming the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69, the deflection width can be reduced. For this reason, it is possible to reduce the inclination of the valve seat one end 15b, and thus it is possible to prevent unevenness of the seal between the diaphragm valve body 4 and the valve seat 15.
- FIG. 7 shows a bar graph showing the effect of preventing the tilt of the valve seat of the present invention.
- the vertical axis is a comparison between the inclination of the fluid control valve 100 and the inclination of the present invention when the inclination of the fluid control valve 100 according to the prior art is “1”.
- the horizontal axis shows (A) the inclination of the valve seat 106 of the fluid control valve 100, and (D) shows the inclination of the valve seat 15 of the fluid control valve in this embodiment.
- the inclination of the valve seat one end 15b of the fluid control valve of this embodiment of (D) becomes 0.08. . That is, since the valve seat support portion 67 of the fluid control valve has the valve seat reinforcement upper portion 68 and the valve seat reinforcement lower portion 69, the inclination of the valve seat support portion 67 can be reduced by 92%.
- FIG. 8 shows a cross-sectional view of the resin valve body 70.
- FIG. 9 shows a side view of the resin valve body 70.
- valve seat support portion 17 of the resin valve main body 2 in the fluid control valve 1 of the first embodiment is different, and the other structures are the same. Therefore, the valve seat support portion 77 of the resin valve main body 70 of the fourth embodiment, which is changed from the valve seat support portion 17 of the resin valve main body 2 of the first embodiment, will be described with reference to FIGS. 8 and 9. The description of other structures is omitted by using the same reference numerals as those in the first embodiment.
- a valve seat support portion 77 that supports the valve seat 15 is formed between the valve chamber 13 and the first port communication channel 21a.
- the valve seat support part 77 has a valve seat reinforcement part 78.
- the valve seat reinforcing portion 78 is formed in the flow path of the first port communication flow path 21a.
- the valve seat reinforcing portion 78 is formed in the axial direction with respect to the first port communication channel 21 a in order to reinforce the valve seat support portion 77.
- the valve seat reinforcing portion 78 is rod-shaped and has a streamline shape with an elliptical cross section so that fluid can easily flow in the radial direction. Since it has a streamline shape with an elliptical cross section, even if a fluid flows from the first flow path 21 to the second flow path 22 or vice versa, the flow of the fluid is not significantly disturbed.
- the valve seat support part 77 has the valve seat reinforcement part 78. Therefore, since the strength of the valve seat support portion 77 is increased, the valve seat one end 15b due to the deflection of the valve seat 15 can be prevented from sinking.
- valve seat reinforcing portion 78 can directly support the valve seat supporting portion 77 with a role of a stick. Therefore, since the valve seat support portion 77 can be directly supported, the strength of the valve seat support portion 77 can be directly increased.
- the shape of the upper part of the valve seat reinforcement for reinforcing the valve seat support part can be a crescent-shaped arcuate shape.
- a crescent-shaped arcuate shape By adopting a crescent-shaped arcuate shape, the width of the first flow path can be increased, and the flow of fluid flowing through the first flow path can be further improved.
- valve seat reinforcement upper part and the valve seat reinforcement lower part are integrally formed with the valve seat support part, but the valve seat reinforcement upper part and the valve seat reinforcement lower part can include metal or the like. By including metal or the like, the strength can be further increased as compared with the resin valve seat reinforcement upper portion and the valve seat reinforcement lower portion.
- the valve seat reinforcement upper part and the valve seat reinforcement lower part when integrally molding with a valve seat support part, although a valve seat reinforcement upper part and a valve seat reinforcement lower part appear outside as a shape, they do not appear outside as a material.
- the portion of the conventional fluid control valve that is shaped to close the flow path from the first flow path is the valve seat. Reinforcement upper part or valve seat reinforcement lower part.
Abstract
Description
<流体制御弁の全体構成>
図1は、第1実施形態に係る流体制御弁1の断面図であって、弁閉状態を示す。図2は、第1実施形態に係る流体制御弁1の断面図であって、弁開状態を示す。図3は、樹脂製弁本体2の上面図を示す。
樹脂製弁本体2は、PTFE(ポリテトラフルオロエチレン)やPFA(四フッ化エチレンパーフルオロアルキルビニルエーテル共重合体)等、耐腐食性や耐熱性に優れた樹脂を成形したものである。
図1に示す樹脂製弁上体3は、PPS(ポリフェニレンサルファイド)やPFA、PP、PVDF等、耐腐食性や剛性を有する樹脂を材質とする。樹脂製弁上体3は、シリンダ32とカバー33とで構成され、ピストン室34を形成する。樹脂製のピストン35は、ピストン室34に摺動可能に装填され、シリンダ32との間に縮設される復帰ばね31により図中上向きに常時付勢されている。ピストン35は、操作ポート33aからピストン室34供給される操作エアの圧力と復帰ばね31の反発力とのバランスに応じて、ピストン室34を図中上下方向に移動する。ピストン35には、ピストンロッド36が一体成形されている。ピストンロッド36は、ピストン35に一体的に構成されシリンダ32に摺動可能に構成され、ダイアフラム弁体4に連結されている。
ダイアフラム弁体4は、PTFE(ポリテトラフルオロエチレン)等、耐腐食性及び耐熱性に優れた樹脂を材質とし、切削により形作られている。ダイアフラム弁体4は、弁座15に当接又は離間する円柱状の弁体部4aと、弁体部4aの外周面に接続する薄膜部4bと、薄膜部4bの外縁に沿って肉厚に設けられた周縁部4cとから構成されている。ダイアフラム弁体4は、周縁部4cが樹脂製弁本体2と樹脂製弁上体3との間で挟み込まれて環状溝26の内壁にシールすることにより固定されている。
(流体の入力出力)
図2に示すように、流体制御弁1は、第1流路21に第1ポート23と第2流路22に第2ポート24が接続される。流体制御弁1は、操作ポート33aに操作エアが供給されない場合には、ダイアフラム弁体4を弁座15から復帰ばね31の力により離間させている。そのため、第1ポート23から第1流路21に流入した流体は、弁孔16を介して弁室13、第2流路22へ供給され第2ポート24へ出力される。
流体制御弁1は、上記ダイアフラム弁体4の弁座15に対し当接離間することにより流体の流量の制御を行う。しかし、ダイアフラム弁体4は、弁座15に対して下方向に加圧する。そのため、弁座15を支持する弁座支持部17には負荷が生じる。その結果、図10に示す従来の流体制御弁100においては、弁座支持部120が負荷によりたわんでいた。弁座支持部120がたわむと、図11に示すように弁座106の弁座支持部120の上面にある弁座一端106Aが傾く。具体的には、たわみ前の弁座一端116A(図11中二点鎖線で示す。)とたわみ後の弁座他端106Bを結んだ線と比較して角度θだけ傾く。また、弁座一端116Aから弁座一端106Aまでの距離Xだけたわみにより傾く。弁座支持部120がたわみ弁座一端106Aが傾くことによりダイアフラム弁体103と弁座一端106Aがこすれ、弁座一端106Aのシール面に対して傷がつく。特に弁座支持部120のたわみが大きく弁座一端106Aが大きく傾くと弁座一端106Aのシール面に傷が入る。弁座一端106Aのシール面に傷が入ると、その傷口から流体が漏れる原因となるため問題となる。
<樹脂製弁本体の構成>
図4に、樹脂製弁本体50の断面図を示す。図5に、樹脂製弁本体50の側面図を示す。
流体の入力出力の作用効果については、第1実施形態の流体制御弁1と同様であるため説明を割愛する。
本実施形態によれば、弁座支持部57は弁座補強下部59を有する。そのため、弁座支持部57を補強することができ強度が増すため、弁座支持部57のたわみ幅を小さくすることができ弁座一端15bの傾き角度を低減することができる。
<樹脂製弁本体の構成>
図6に、樹脂製弁本体60の断面図を示す。
流体の入力出力の作用効果については、第1実施形態の流体制御弁1と同様であるため説明を割愛する。
本実施形態によれば、弁座補強上部68と弁座補強下部69とにより弁座支持部67に対して断面略L形状となることにより、弁座補強上部68と弁座補強下部69との強度を用いることができる。そのため、弁座支持部67の強度を従来の流体制御弁1と比較して強くすることができる。すなわち、弁座補強上部68と弁座補強下部69とが形成されることにより弁座支持部67が従来よりも強度を保つことができるため、たわみ幅を小さくすることができる。そのため、弁座一端15bが傾くことを低減させることができるため、ダイアフラム弁体4と弁座15との間のシールの不均一を防止することができる。
<樹脂製弁本体の構成>
図8に、樹脂製弁本体70の断面図を示す。図9に、樹脂製弁本体70の側面図を示す。
流体の入力出力の作用効果については、第1実施形態の流体制御弁1と同様であるため説明を割愛する。
本実施形態によれば、弁座支持部77は、弁座補強部78を有する。そのため、弁座支持部77の強度が上がるため、弁座15のたわみによる弁座一端15bが沈むことを防止することができる。
13 弁室
15 弁座
16 弁孔
17 弁座支持部
18、68 弁座補強上部
59、69 弁座補強下部
2 樹脂製弁本体
21 第1流路
21a 第1ポート連通流路
21b 第1弁孔連通流路
23 第1ポート
24 第2ポート
3 樹脂製弁上体
4 ダイアフラム弁体
Claims (5)
- 第1流路と第2流路を備える樹脂製弁本体と、前記樹脂製弁本体の上面に連結される樹脂製弁上体と、前記樹脂製弁本体と前記樹脂製弁上体との間に狭持される樹脂製のダイアフラム弁体とを備えること、
前記第1流路は、一端が第1ポートに連通する第1ポート連通流路と他端が弁孔に連通する第1弁孔連通流路とを備え、前記第1ポート連通流路と前記第1弁孔連通流路が連通すること、
前記樹脂製弁本体は、弁室と前記第1ポート連通流路と前記第1弁孔連通流路との間に弁座を支持する弁座支持部を備える流体制御弁において、
前記弁座支持部は弁座補強部を有すること、
前記弁座補強部は前記第1流路内を一部塞ぐ形状で形成されていること、
を特徴とする流体制御弁。 - 請求項1に記載する流体制御弁において、
前記弁座補強部は、前記弁孔を前記樹脂製弁上体方向から見たとき、前記第1弁孔連通流路の一部を塞ぐ弁座補強上部となること、
前記弁座補強上部は、前記弁孔を前記樹脂製弁上体方向から見たとき、弓形となること、
を特徴とする流体制御弁。 - 請求項1に記載する流体制御弁において、
前記弁座補強部は、前記第1ポートを前記樹脂製弁本体側面方向から見たとき、前記第1流路の一部を塞ぐ弁座補強下部となること、
前記弁座補強下部は、前記第1ポートを前記樹脂製弁本体側面方向から見たとき、弓形となること、
を特徴とする流体制御弁。 - 請求項2に記載する流体制御弁において、
前記弁座補強上部と前記弁座補強下部が前記弁座支持部に対して断面略L形状となること、
を特徴とする流体制御弁。 - 請求項3に記載する流体制御弁において、
前記弁座補強上部と前記弁座補強下部が前記弁座支持部に対して断面略L形状となること、
を特徴とする流体制御弁。
Priority Applications (3)
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CN201180034294.4A CN102985734B (zh) | 2010-12-17 | 2011-09-30 | 流体控制阀 |
KR1020137002035A KR101880916B1 (ko) | 2010-12-17 | 2011-09-30 | 유체제어밸브 |
US13/811,533 US8840082B2 (en) | 2010-12-17 | 2011-09-30 | Fluid control valve |
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JP2010-282149 | 2010-12-17 | ||
JP2010282149A JP5249310B2 (ja) | 2010-12-17 | 2010-12-17 | 流体制御弁 |
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WO2012081293A1 true WO2012081293A1 (ja) | 2012-06-21 |
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PCT/JP2011/072503 WO2012081293A1 (ja) | 2010-12-17 | 2011-09-30 | 流体制御弁 |
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US (1) | US8840082B2 (ja) |
JP (1) | JP5249310B2 (ja) |
KR (1) | KR101880916B1 (ja) |
CN (1) | CN102985734B (ja) |
TW (1) | TWI541461B (ja) |
WO (1) | WO2012081293A1 (ja) |
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TWI541461B (zh) | 2016-07-11 |
KR20130140607A (ko) | 2013-12-24 |
US8840082B2 (en) | 2014-09-23 |
CN102985734B (zh) | 2015-04-22 |
JP2012127487A (ja) | 2012-07-05 |
JP5249310B2 (ja) | 2013-07-31 |
CN102985734A (zh) | 2013-03-20 |
TW201239224A (en) | 2012-10-01 |
US20130119290A1 (en) | 2013-05-16 |
KR101880916B1 (ko) | 2018-07-23 |
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