WO2012074271A3 - 전계방출 표시장치와 그 제조방법 - Google Patents

전계방출 표시장치와 그 제조방법 Download PDF

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Publication number
WO2012074271A3
WO2012074271A3 PCT/KR2011/009156 KR2011009156W WO2012074271A3 WO 2012074271 A3 WO2012074271 A3 WO 2012074271A3 KR 2011009156 W KR2011009156 W KR 2011009156W WO 2012074271 A3 WO2012074271 A3 WO 2012074271A3
Authority
WO
WIPO (PCT)
Prior art keywords
display device
manufacturing
field emission
emission display
diffusion barrier
Prior art date
Application number
PCT/KR2011/009156
Other languages
English (en)
French (fr)
Other versions
WO2012074271A2 (ko
Inventor
이춘래
김학웅
Original Assignee
(주)에스엔디스플레이
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110025131A external-priority patent/KR101157215B1/ko
Priority claimed from KR1020110047395A external-priority patent/KR101141760B1/ko
Priority claimed from KR1020110120642A external-priority patent/KR101266055B1/ko
Application filed by (주)에스엔디스플레이 filed Critical (주)에스엔디스플레이
Priority to EP11845718.3A priority Critical patent/EP2648205A2/en
Priority to CN201180058047.8A priority patent/CN103270571B/zh
Priority to JP2013539781A priority patent/JP2014500593A/ja
Priority to US13/990,859 priority patent/US20130249382A1/en
Publication of WO2012074271A2 publication Critical patent/WO2012074271A2/ko
Publication of WO2012074271A3 publication Critical patent/WO2012074271A3/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/18—Assembling together the component parts of electrode systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123—Flat display tubes
    • H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/14—Manufacture of electrodes or electrode systems of non-emitting electrodes
    • H01J9/148—Manufacture of electrodes or electrode systems of non-emitting electrodes of electron emission flat panels, e.g. gate electrodes, focusing electrodes or anode electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/02—Electrodes other than control electrodes
    • H01J2329/04—Cathode electrodes
    • H01J2329/0407—Field emission cathodes
    • H01J2329/0439—Field emission cathodes characterised by the emitter material
    • H01J2329/0444—Carbon types
    • H01J2329/0455—Carbon nanotubes (CNTs)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00—Electron emission display panels, e.g. field emission display panels
    • H01J2329/46—Arrangements of electrodes and associated parts for generating or controlling the electron beams
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
    • Y10S977/952—Display

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

본 발명은 전계방출 표시장치와 그 제조방법에 관한 것으로, 그 하판은 기판 상에 형성되는 캐소드전극; 상기 캐소드전극 상에 형성되는 확산 차단층; 상기 확산 차단층 상에 형성되는 씨드 금속층; 상기 씨드 금속층의 그레인들 상에서 단결정으로 성장된 탄소나노튜브들; 상기 탄소나노튜브들을 덮도록 상기 캐소드전극, 상기 확산 차단층, 및 상기 씨드 금속층이 형성된 기판 상에 형성되는 게이트 절연층; 및 상기 게이트 절연층 상에 형성된 게이트전극을 포함한다.
PCT/KR2011/009156 2010-12-01 2011-11-29 전계방출 표시장치와 그 제조방법 WO2012074271A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP11845718.3A EP2648205A2 (en) 2010-12-01 2011-11-29 Field emission display device and manufacturing method thereof
CN201180058047.8A CN103270571B (zh) 2010-12-01 2011-11-29 场发射显示器装置及其制造方法
JP2013539781A JP2014500593A (ja) 2010-12-01 2011-11-29 電界放出表示装置とその製造方法
US13/990,859 US20130249382A1 (en) 2010-12-01 2011-11-29 Field emission display and fabrication method thereof

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR10-2010-0121469 2010-12-01
KR20100121469 2010-12-01
KR1020110025131A KR101157215B1 (ko) 2010-12-01 2011-03-22 전계방출 표시장치와 그 제조방법
KR10-2011-0025131 2011-03-22
KR1020110047395A KR101141760B1 (ko) 2011-05-19 2011-05-19 전계방출 표시장치와 그 제조방법
KR10-2011-0047395 2011-05-19
KR1020110120642A KR101266055B1 (ko) 2011-11-18 2011-11-18 전계방출 표시장치와 그 제조 방법
KR10-2011-0120642 2011-11-18

Publications (2)

Publication Number Publication Date
WO2012074271A2 WO2012074271A2 (ko) 2012-06-07
WO2012074271A3 true WO2012074271A3 (ko) 2012-10-04

Family

ID=46172386

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009156 WO2012074271A2 (ko) 2010-12-01 2011-11-29 전계방출 표시장치와 그 제조방법

Country Status (6)

Country Link
US (1) US20130249382A1 (ko)
EP (1) EP2648205A2 (ko)
JP (1) JP2014500593A (ko)
CN (1) CN103270571B (ko)
TW (1) TWI436941B (ko)
WO (1) WO2012074271A2 (ko)

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US9159669B2 (en) * 2014-01-30 2015-10-13 Infineon Technologies Ag Nanotube structure based metal damascene process
JP6589124B2 (ja) * 2015-04-09 2019-10-16 パナソニックＩｐマネジメント株式会社 樹脂構造体とその構造体を用いた電子部品、電子機器
CN104882345A (zh) 2015-05-13 2015-09-02 京东方科技集团股份有限公司 阵列基板及制作方法、显示面板及制作方法和显示装置
KR102492733B1 (ko) 2017-09-29 2023-01-27 삼성디스플레이 주식회사 구리 플라즈마 식각 방법 및 디스플레이 패널 제조 방법
CN110299388B (zh) * 2019-06-24 2021-07-06 深圳市华星光电半导体显示技术有限公司 一种显示面板及其制备方法
US11664474B2 (en) 2020-08-12 2023-05-30 Tcl China Star Optoelectronics Technology Co., Ltd Array substrate, fabrication method for array substrate, and display panel
CN111987111B (zh) * 2020-08-12 2023-09-05 Tcl华星光电技术有限公司 一种阵列基板、阵列基板制程方法及显示面板
US11776793B2 (en) * 2020-11-13 2023-10-03 Applied Materials, Inc. Plasma source with ceramic electrode plate
KR102526595B1 (ko) * 2021-01-22 2023-04-28 주식회사 일렉필드퓨처 캐소드 에미터 기판의 제조방법, 이에 의해 제조된 캐소드 에미터 기판 그리고, 이를 포함하는 엑스레이소스
CN113675058B (zh) * 2021-08-31 2022-05-31 重庆大学 一种阈值电压可调的大电流场发射二极管及其加工方法

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Also Published As

Publication number Publication date
US20130249382A1 (en) 2013-09-26
EP2648205A2 (en) 2013-10-09
WO2012074271A2 (ko) 2012-06-07
TWI436941B (zh) 2014-05-11
TW201223855A (en) 2012-06-16
CN103270571A (zh) 2013-08-28
JP2014500593A (ja) 2014-01-09
CN103270571B (zh) 2016-04-06

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