WO2012011293A1 - イオン量測定装置 - Google Patents

イオン量測定装置 Download PDF

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Publication number
WO2012011293A1
WO2012011293A1 PCT/JP2011/051609 JP2011051609W WO2012011293A1 WO 2012011293 A1 WO2012011293 A1 WO 2012011293A1 JP 2011051609 W JP2011051609 W JP 2011051609W WO 2012011293 A1 WO2012011293 A1 WO 2012011293A1
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WO
WIPO (PCT)
Prior art keywords
ion
electrode
air
amount
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/051609
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English (en)
French (fr)
Japanese (ja)
Inventor
佳成 深田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koganei Corp
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Koganei Corp
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Filing date
Publication date
Application filed by Koganei Corp filed Critical Koganei Corp
Priority to US13/809,684 priority Critical patent/US8901506B2/en
Priority to KR1020127029699A priority patent/KR101390130B1/ko
Publication of WO2012011293A1 publication Critical patent/WO2012011293A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
    • H05F3/00—Carrying-off electrostatic charges
    • H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
    • G01R19/0061—Measuring currents of particle-beams, currents from electron multipliers, photocurrents, ion currents; Measuring in plasmas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
    • H01T19/00—Devices providing for corona discharge

Definitions

  • the present invention relates to an ion amount measuring apparatus for measuring the amount of ions in air ionized by corona discharge.
  • An ion generator also called an ionizer or a static elimination device, is used as a static electricity countermeasure in which a charged body charged with static electricity is used as a static elimination member and air ions are sprayed onto the static elimination member to neutralize the static elimination member.
  • An ion generating apparatus used in a production line for producing and assembling electronic parts is used to remove static electricity charged on an electronic part, a production assembly jig or the like as a member to be neutralized. By blowing air ions to the member to be neutralized, it is possible to prevent foreign matter from adhering to the electronic component or the like due to static electricity, or the electronic component from being destroyed by static electricity or adhering to the jig.
  • An ion generator used for such an application applies an AC voltage between the discharge electrode and the counter electrode under a state in which compressed air is supplied to the needle-like discharge electrode from the outside, Air is ionized by generating a corona discharge around.
  • ions are generated by an AC corona discharge method in which an AC voltage is applied to both electrodes, positive ions and negative ions are periodically generated.
  • Patent Document 1 A positive / negative ion amount measuring device that measures the positive ion amount and negative ion amount simultaneously is described in Patent Document 1, and a static eliminator that measures the amount of ions contained in ionized air is disclosed in Patent Document 2. It is described in.
  • the positive / negative ion amount measuring apparatus described in Patent Document 1 has two pairs of detectors having a pair of electrode cylinders and a collecting electrode, and one detector corresponds to the number of positive ions in ionized air.
  • the amount of positive ions and negative ions in the ionized air is measured by measuring the current value and measuring the current value corresponding to the number of negative ions with the other detector.
  • This ion content measuring device is a measuring device for testing the performance of the ion generating device, and the amount of positive ions and the amount of negative ions are determined by the current values corresponding to the number of ions in the ionized air generated by the ion generating device. And measure.
  • the ion amount measuring apparatus of Patent Document 1 uses all ions in ionized air for measurement. Therefore, when the ion generating apparatus is actually used, ions in ionized air are used. The amount cannot be measured.
  • An object of the present invention is to make it possible to measure the amount of ions in ionized air with high accuracy.
  • Another object of the present invention is to make it possible to measure the amount of ions in the ionized air with high accuracy while blowing the ionized air onto the member to be neutralized.
  • the ion amount measuring device of the present invention is an ion amount measuring device for measuring the amount of ions in ionized air with an electrode, wherein the length of the electrode is l, the flow velocity of air is U, and the detection current flowing through the electrode is I. m , time constant ⁇ , and carrier ion current I 0
  • the ion content measuring apparatus of the present invention is characterized in that the electrode is a cylindrical electrode having a passage hole through which ionized air passes.
  • the ion content measuring apparatus of the present invention includes a discharge electrode and a counter electrode that forms an ion generation space between the discharge electrode, and an AC voltage is applied to the discharge electrode and the counter electrode so that the ion is generated by corona discharge.
  • An ion generator for ionizing the air in the generation space, and the length of the electrode through which the ionized air ejected from the ion generation space passes is negative with respect to the generation period of the positive ion group generated in the ion generation space.
  • the ion content measuring apparatus of the present invention is characterized by having a flow velocity detecting means for detecting the flow velocity of ionized air.
  • the ion amount measuring apparatus according to the present invention has first and second electrodes that measure the amount of ions in the ionized air and are shifted from each other in the flow direction of the ionized air. The air velocity is calculated from the detection time difference between the detection current flowing through the detection current flowing through the second electrode and the detection current flowing through the second electrode.
  • the ion content measuring apparatus of the present invention has a flow rate setting means for setting the flow rate of air.
  • the current flowing through the electrode is detected by ions in the ionized air, and the carrier ion current is obtained by integrating the conversion coefficient obtained from the length of the electrode, the air flow rate and the time constant to the detection current,
  • the amount of carrier ions corresponding to the carrier ion current can be calculated with high accuracy. Thereby, the amount of carrier ions can be calculated with high accuracy while blowing ionized air onto the member to be neutralized.
  • the present invention it is possible to measure the amount of ions transported in ionized air while blowing ionized air from the ion generator in which an ion generation space is formed between the discharge electrode and the counter electrode to the member to be neutralized.
  • the length of the electrode for measuring the detection current is obtained from the generation period of the positive ion group generated in the ionization space, that is, the period between the ion groups between the generation time and the generation period of the negative ion group, and the air flow rate.
  • the air flow rate may be such that the flow rate of air supplied to the electrode is detected, or air may be supplied to the electrode at a constant flow rate in advance.
  • two electrodes may be arranged, and the flow velocity may be detected by the difference in current detection time between both electrodes.
  • FIG. 1 is an ion current characteristic diagram showing a change in detection current when the ion current of positive ions is detected with different lengths of cylindrical electrodes by an ion amount measuring device, and (B) is a current of negative ions.
  • surface which shows the relationship between the length of an ion group, and the distance between ion groups when making the frequency of an applied voltage differ.
  • FIG. 1 shows a nozzle-type ion generator 10 equipped with an ion amount measuring device.
  • This nozzle-type ion generator 10 has a nozzle 12 in which a discharge electrode 11 is incorporated, and the nozzle 12 is formed of a conductive material in the same manner as the discharge electrode 11 to form a counter electrode.
  • the discharge electrode 11 is attached to a holder 13 made of an insulating material such as resin, and a nozzle 12 is attached to the holder 13.
  • An ion generation space 14 is formed in the nozzle 12, and air is supplied to the ion generation space 14 from an air supply port 15 formed in the holder 13.
  • the discharge electrode 11 and the nozzle 12 are electrically connected to an AC high voltage power supply 16, and when an AC high voltage is applied from the AC high voltage power supply 16 to the discharge electrode 11 and the nozzle 12, which is a counter electrode, the tip of the discharge electrode 11.
  • the air flowing in the ion generation space 14 along the line is ionized by corona discharge.
  • the ionized air is ejected downstream from the ejection port 17 at the tip of the nozzle 12. Compressed air is supplied to the air supply port 15 from the air pressure source 18 through the flow path 19.
  • An ion amount measuring device 20 is attached to the tip of the nozzle 12 and always measures the amount of ions in the ionized air in a state where ionized air is blown from the ion generator 10 to the member to be neutralized. be able to.
  • the ion amount measuring device 20 is detachably attached to the nozzle 12, and the ion generator 10 is attached to the ion generator 10 at the time of assembling manufacture or maintenance, and is ejected from the nozzle 12 on a trial basis. You may make it measure the ion in ionized air.
  • the ion amount measuring device 20 has a case body 21 attached to the nozzle 12.
  • the case body 21 is formed of a conductive material, and includes a cylindrical portion 21a and end plate portions 21b and 21c provided at both ends thereof.
  • the case body 21 is grounded by a ground wire, and one end plate portion 21 b is attached to the tip portion of the nozzle 12.
  • a cylindrical electrode 22 made of a conductive material is disposed inside the case body 21, and the cylindrical electrode 22 has a passage hole 23 through which ionized air ejected from the ejection port 17 passes. It is coaxial with the outlet 17.
  • Ring-shaped support plates 24 and 25 made of an insulating material are abutted against both end surfaces of the cylindrical electrode 22, and the outer peripheral surfaces of the respective support plates 24 and 25 are in contact with the inner peripheral surface of the case body 21.
  • a spacer 26 is disposed between the end plate portion 21 b of the case body 21 and the support plate 24, and a spacer 27 is disposed between the end plate portion 21 c and the support plate 25.
  • Each of the spacers 26 and 27 is made of a conductive material and has passage holes 26 a and 27 a corresponding to the passage hole 23. However, the spacers 26 and 27 may be formed of an insulating material.
  • the downstream end of the downstream spacer 27 is fixed to the end plate portion 21c, and the opening at the downstream end is an injection port 28 for injecting ionized air to the member to be discharged.
  • the air supplied to the ion generation space 14 is ionized by corona discharge in the ion generation space 14, and the ionized air passes through the passage hole 23 of the cylindrical electrode 22 in the ion amount measuring device 20 through the passage hole 26 a of the spacer 26. Then, it is ejected from the ejection port 28 of the passage hole 27a of the spacer 27 to the outside.
  • a measuring instrument main body 29 having a function of a Faraday cage is constituted by the case body 21 that is grounded.
  • the case body 21 and the cylindrical electrode 22 are connected to a current detector 33 by cables 31 and 32, respectively.
  • a current detector 33 By dividing the potential of the cylindrical electrode 22 by the impedance of the measurement system, an ion current corresponding to the amount of ions in the ionized air is detected by the current detector 33.
  • the amount of transport ions generated in the ion generation space 14 and transported to the passage hole 23 is calculated in the calculation unit 34, and the calculation result is displayed on the display unit 35.
  • a flow velocity detector 36 is provided in the flow path 19 as a flow velocity measuring means for measuring the flow velocity of ionized air flowing from the ion generation space 14 to the passage hole 23 of the cylindrical electrode 22, and a signal from the flow velocity detector 36 is transmitted by a cable 37. It is sent to the calculation unit 34.
  • the flow velocity in the ion generation space 14 or the flow velocity in the cylindrical electrode 22 may be directly detected by a flow velocity detector.
  • FIG. 2 is a time chart showing the applied voltage supplied to the discharge electrode and the counter electrode of the ion generator and the state of generation of ion groups corresponding to the applied voltage.
  • the ion group distance l 2 is obtained by the following equation (2).
  • the value of the period T of the applied voltage is obtained from the frequency f.
  • the ion group distance l 2 is obtained from the voltage ⁇ V 0 of the applied voltage, the discharge start / end voltage ⁇ V 1, the period T of the applied voltage, and the flow velocity U of the ionized air.
  • the ion group length l 1 of the group can also be obtained by the same formula.
  • the length l of the passage hole 23 of the cylindrical electrode 22 shown in FIG. 1 is set to be shorter than the ion group distance l 2 .
  • FIG. 4 is a schematic diagram showing the basic structure of the ion content measuring apparatus shown in FIG. 1.
  • the hyperbolic relaxation law based on the charge density decay model in the ion content measuring apparatus is expressed by the following equation.
  • ⁇ i is the initial charge density
  • ⁇ is the charge density at time t
  • ⁇ is the time constant.
  • the time constant ⁇ is as follows.
  • ⁇ 0 represents the dielectric constant of vacuum
  • ⁇ represents the mobility of ions
  • d indicates the transport distance and U indicates the average ion flow velocity.
  • the transport ion current I 0 of the ions to be transported from the ion generating space 14, and the detected current I m measured by the cylindrical electrode 22, a discharge current through the cylindrical electrode 22 is sprayed onto the charge removing member I has the following relationship from the continuity of current.
  • Each ion current is expressed as follows.
  • ⁇ 0 is the charge density of the carrier ion current I 0 .
  • the detected current I m is when a constant flow rate U like air, will vary with the length of the cylinder electrode 22.
  • the peak value of the applied voltage is ⁇ 4.5 kV
  • the frequency of the applied voltage is 1 Hz
  • the air flow rate U is 90 m / s
  • the relationship between the detection current Im and the length of the cylindrical electrode 22 is expressed by the equation (11 ) Results in the characteristic diagram shown in FIG.
  • the length of the cylindrical electrode 22 is set, and the carrier ion current I 0 of the carrier ions generated in the ion generation space 14 based on the relationship between the length and the detected current Im is expressed by the equations (7) and (11). ) Can be obtained as follows.
  • Value obtained by subtracting the I m of the right side of equation (12) is a conversion factor for obtaining the transport ion current I 0 by integrating the detected current I m, the length l of the cylindrical electrode 22, and the flow velocity U of the air , And a constant value set by the time constant ⁇ .
  • Equation (12) can be expressed as follows.
  • the carrier ion current I 0 may be calculated based on this equation (13).
  • the detected current I m is detected by the current detector 33, by calculating the transport ion current I 0 based on the conversion coefficient by the equation (12) by the arithmetic unit 34, to determine the transport ion current I 0 Can do. Moreover, it is also possible to determine the actual amount of ions blown from the transport and the detected current I m ion current I 0 to the charge removing member from even ion current I. Thus, the detected current I m flowing through the current detector 33 is part of a conveying ion current I 0, it is possible to calculate the transport ion content from some of the current, the remaining ions consumed in the detection Can be sprayed on the member to be discharged. Thereby, the ion amount produced
  • the display unit 35 Since the display unit 35 displays the amount of carrier ions corresponding to the value of the carrier ion current I 0 , it is generated by the ion generator 10 in a state where ionized air is blown onto the member to be neutralized. The amount of ions can be confirmed.
  • the operator When the discharge performance deteriorates due to wear or the like of the discharge electrode 11, the operator is notified of a decrease in function or abnormality of the ion generator 10 based on the amount of ions transported displayed on the display unit 35.
  • a function deterioration occurs in the ion generator 10, it may be notified by a buzzer, voice, or the like.
  • the ion amount measuring apparatus shown in FIG. 5 has a first cylindrical electrode 22a and a second cylindrical electrode 22b that are arranged so as to be shifted in the flow direction of ionized air, and detection of the respective cylindrical electrodes 22a and 22b.
  • the signal is sent to the current detector 33.
  • the detection current I 'm flowing through the first cylindrical electrode 22a the flow rate of air by the time difference of the detected current I m flowing through the second cylindrical electrode 22b.
  • the flow velocity U of the ionized air may be calculated based on the detection signal from the flow velocity detector 36, or may be calculated based on the time difference between the signals sent to the two cylindrical electrodes 22a and 22b. May be.
  • the flow rate of the air supplied to the ion generation space 14 may be set to a constant flow rate by a flow control valve or the like.
  • the value of the flow rate U is stored in a memory (not shown) and is calculated from the memory.
  • a speed signal is sent to the unit 34.
  • the carrier ion current I 0 described above is calculated based on the sent speed signal.
  • FIG. 7 is a table showing the relationship between the ion group length l 1 and the ion group distance l 2 when the flow velocity U of ionized air is 90 m / s and the frequency f of the applied voltage is varied.
  • the frequency f of the applied voltage is 1000 Hz
  • the ion group length l 1 is 24.1 mm
  • the ion group distance l 2 is 20.9 mm. Therefore, when the frequency of the applied voltage is 1000 Hz, the length l of the cylindrical electrode 22 is set to 20.9 mm or less.
  • the applied voltage of another frequency is used, the length l of the cylindrical electrode 22 than the ionic groups distance l 2 obtained in accordance with each frequency is set shorter.
  • the current flowing through the cylindrical electrode 22 is The current value is based on an ion group having only one polarity of positive and negative polarities.
  • the carrier ion current I 0 is calculated from the detection current I m in which a part of ions of each ion group flows through the cylindrical electrode 22, the amount of carrier ions is obtained, so that the carrier generated in the ion generation space 14 is obtained.
  • the amount of ions can be measured with high accuracy, and ionized air can be blown onto the member to be neutralized while measuring the amount of carrier ions.
  • FIG. 1 shows a nozzle type ion generator 10, but the ion amount measuring apparatus of the present invention can also be applied to measure the ion amount of ionized air generated by a fan type ion generator. it can.
  • This ion content measuring device can be used to measure the amount of ions from an ion generating device used in a production line for electronic components for manufacturing and assembling electronic components.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Elimination Of Static Electricity (AREA)
PCT/JP2011/051609 2010-07-22 2011-01-27 イオン量測定装置 Ceased WO2012011293A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US13/809,684 US8901506B2 (en) 2010-07-22 2011-01-27 Air ion measuring apparatus
KR1020127029699A KR101390130B1 (ko) 2010-07-22 2011-01-27 공기 이온 측정 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010165206A JP5005074B2 (ja) 2010-07-22 2010-07-22 イオン量測定装置
JP2010-165206 2010-07-22

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WO2012011293A1 true WO2012011293A1 (ja) 2012-01-26

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JP (1) JP5005074B2 (enExample)
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WO (1) WO2012011293A1 (enExample)

Cited By (1)

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Publication number Priority date Publication date Assignee Title
JP2014145627A (ja) * 2013-01-28 2014-08-14 Ngk Spark Plug Co Ltd 外部ガス流を利用した微粒子センサ

Families Citing this family (6)

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KR101750740B1 (ko) * 2013-04-11 2017-06-27 가부시키가이샤 고가네이 이온 발생기
WO2015076155A1 (ja) * 2013-11-20 2015-05-28 株式会社コガネイ イオン発生器
KR102498445B1 (ko) 2015-10-20 2023-02-13 삼성전자주식회사 이온의 농도를 검출하는 검출기 및 이를 구비하는 이온 크로마토그래피 장치
EP3225982A1 (en) 2016-03-28 2017-10-04 Naturion Pte. Ltd. Device for measuring ion concentration
KR102382561B1 (ko) * 2020-02-21 2022-04-04 에스케이하이닉스 주식회사 이온 발생기의 모니터링 장치 및 시스템
CN113447529B (zh) * 2021-08-11 2022-05-27 漳州市东南电子技术研究所有限公司 单位时间空气负离子产生量的测试方法及装置

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US8901506B2 (en) 2014-12-02
KR20130008064A (ko) 2013-01-21
KR101390130B1 (ko) 2014-04-28
US20130105700A1 (en) 2013-05-02
JP5005074B2 (ja) 2012-08-22
JP2012026850A (ja) 2012-02-09

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