WO2011125656A1 - 放電加工装置および放電加工方法 - Google Patents
放電加工装置および放電加工方法 Download PDFInfo
- Publication number
- WO2011125656A1 WO2011125656A1 PCT/JP2011/057841 JP2011057841W WO2011125656A1 WO 2011125656 A1 WO2011125656 A1 WO 2011125656A1 JP 2011057841 W JP2011057841 W JP 2011057841W WO 2011125656 A1 WO2011125656 A1 WO 2011125656A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- discharge machining
- electric discharge
- pulse
- machining
- workpiece
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/02—Wire-cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/02—Wire-cutting
- B23H7/08—Wire electrodes
- B23H7/10—Supporting, winding or electrical connection of wire-electrode
- B23H7/107—Current pickups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/14—Electric circuits specially adapted therefor, e.g. power supply
Definitions
- the present invention relates to an electric discharge machining apparatus and an electric discharge machining that simultaneously removes or cuts a part of a workpiece from a workpiece and a machining electrode facing the workpiece at a plurality of locations to remove or cut a part of the workpiece. Regarding the method.
- an electric discharge machining pulse is applied between a workpiece and a plurality of machining electrodes that are not electrically connected to each other, and electric discharge machining is performed simultaneously (for example, Patent Document 1).
- electric discharge machining is performed with one machining electrode opposed to a workpiece at a plurality of positions, the distance between the adjacent machining electrodes is increased, or the adjacent machining electrodes are wound by coiling. Impedance with the opposite portion is improved (for example, Patent Document 2).
- the conventional electric discharge machining apparatus is composed of a plurality of machining electrodes that are not electrically connected, the machining electrode traveling system becomes complicated, and multiple parallels (for example, 10 parallels or more) and a narrow gap are formed. Realization of processing is difficult (for example, 1 mm or less).
- the present invention has been made in view of the above, and an object of the present invention is to obtain a multi-parallel and narrow-gap electric discharge machining apparatus while suppressing short-circuit current to prevent machining electrode disconnection and machining surface quality deterioration. . Furthermore, it aims at the reduction of a process preparation process and size reduction of an apparatus.
- the present invention provides a machining electrode that is a single wire having a plurality of facing portions with respect to a workpiece by being wound around a plurality of guide rollers.
- Driving means for changing a relative distance between the workpiece and the plurality of facing portions; and a plurality of pulse generating means for separately applying an electric discharge machining pulse between the workpiece and the plurality of facing portions.
- a plurality of the pulse generating means are controlled so that the application start times of the electric discharge machining pulses to the adjacent facing portions do not coincide with each other.
- the present invention it is possible to suppress concentration of an electric discharge machining current that flows frequently immediately after the start of electric discharge machining pulse application to a short-circuited portion, and to prevent abnormal consumption and cutting of the machining electrode and deterioration of the machining surface quality. .
- the apparatus can be miniaturized. Furthermore, there is an effect of shortening the preparation process before starting the processing.
- FIG. 1 is a schematic diagram of a main part of an electric discharge machining apparatus according to a first embodiment of the present invention.
- FIG. 2 is an equivalent circuit diagram of a machining electrode facing a workpiece at a plurality of locations in the electric discharge machining apparatus according to the first embodiment of the present invention.
- FIG. 3 is a circuit diagram showing the configuration of the electric discharge machining pulse generating means of the electric discharge machining apparatus according to the first embodiment of the present invention.
- FIG. 4 is a diagram showing an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the first embodiment of the present invention.
- FIG. 5 is a diagram showing a discharge current waveform during normal machining of the electric discharge machining apparatus according to the first embodiment of the present invention.
- FIG. 1 is a schematic diagram of a main part of an electric discharge machining apparatus according to a first embodiment of the present invention.
- FIG. 2 is an equivalent circuit diagram of a machining electrode facing a workpiece at a plurality of locations in the electric discharge machining
- FIG. 6 is a diagram showing a discharge current waveform when a part of the electric discharge machining apparatus according to Embodiment 1 of the present invention is short-circuited.
- FIG. 7 is a circuit diagram showing the configuration of the electric discharge machining pulse generating means of the electric discharge machining apparatus according to the second embodiment of the present invention.
- FIG. 8 is a diagram showing an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the second embodiment of the present invention.
- FIG. 9 is a diagram showing a discharge current waveform when a part of the electric discharge machining apparatus according to the second embodiment of the present invention is short-circuited.
- FIG. 10 is a schematic diagram of a main part of an electric discharge machining apparatus according to the third embodiment of the present invention.
- FIG. 11 is a diagram illustrating an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the third embodiment of the present invention.
- FIG. 12 is a flowchart for determining an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the fourth embodiment of the present invention.
- FIG. 1 is a schematic view showing a main part of an electric discharge machining apparatus according to Embodiment 1 of the present invention.
- a processing electrode 2 made of one wire fed out from the processing electrode bobbin 8 is wound in the order of guide rollers 7a, 7b, 7c, 7d, 7a, 7b, 7c, 7d.
- the machining electrode 2 and the workpiece 1 (workpiece) are opposed portions 2a, 2b, 2c, 2d, 2e, 2f, 2g, 2h, 2i which are a large number of parallel wires formed by the wound machining electrode 2.
- 2j are opposed to each other in a working fluid (for example, deionized water) (not shown).
- the number of the facing portions 2a to 2j is 10 as an example, and is not limited to this number.
- the workpiece 1 is fixed to the drive table 6, and the relative distance between the facing portions 2 a to 2 j of the machining electrode 2 and the workpiece 1 can be changed by the motor 3 driving the drive table 6.
- the pulse control means 5 transmits a control signal for generating an electric discharge machining pulse to the pulse generation means 4a, 4b, 4c, 4d, 4e, 4f, 4g, 4h, 4i, 4j.
- Electric discharge machining pulses generated by the pulse generating means 4a to 4j are fed to the facing portions 2a to 2j of the machining electrode 2 through the supply electrons 9a, 9b, 9c, 9d, 9e, 9f, 9g, 9h, 9i, 9j. Yes.
- FIG. 2 is an equivalent circuit diagram of a machining electrode facing a workpiece at a plurality of locations in the electric discharge machining apparatus according to Embodiment 1 of the present invention.
- the resistors 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h, and 10i indicate equivalent resistances (for example, 100 ⁇ or less) between the facing portions of the processing electrodes.
- FIG. 3 is a circuit diagram showing a configuration of the electric discharge machining pulse generating means 4a to 4j of the electric discharge machining apparatus according to the first embodiment of the present invention.
- the capacitor 12 is charged from the DC power source 11 via the charging resistor 13 by cutting the electric discharge machining pulse application switch 14.
- the switch 14 can be constituted by, for example, a transistor (including a field effect transistor).
- FIG. 4 is a diagram showing an electric discharge machining pulse pattern of the electric discharge machining apparatus according to Embodiment 1 of the present invention.
- the pulse control means 5 instructs the pulse generation means 4a, 4e, 4i to start applying the electric discharge machining pulse at time 0, stop at time 1, and then apply the electric discharge machining pulse again at time 2.
- the pulse control means 5 starts to apply the electric discharge machining pulse to the pulse generation means 4b, 4f, 4j at time 0.5, stops at time 1.5, and further applies the electric discharge machining pulse at time 2.5. Command to apply.
- the pulse control means 5 applies the electric discharge machining pulse to the pulse generation means 4c, 4g from time 1 to 2, and applies the electric discharge machining pulse to the pulse generation means 4d, 4h from time 1.5 to 2.5. We are sending instructions from.
- pulse generation means 5 uses the pulse generating means 4a to 4a to make a difference so that the start times of applying the electric discharge machining pulses to the adjacent opposing parts (for example, the opposing part 2a and the opposing part 2b) of the means 4a to 4j do not coincide. 4j is controlled.
- FIG. 5 shows a discharge in which the distances between the facing portions 2a, 2b, 2c, 2d, 2e, 2f, 2g, 2h, 2i, and 2j of the workpiece 1 and the machining electrode 2 are all normal in the first embodiment of the present invention.
- the current waveforms flowing in the facing portions 2a, 2b, 2c, 2d, 2e, 2f, 2g, 2h, 2i, and 2j of the processing electrode 2 when the generated distance (for example, several to several tens of ⁇ m) are shown.
- FIG. 6 shows the first embodiment of the present invention in which the workpiece 1 and the facing portion 2e of the machining electrode 2 are in contact with each other, and the workpiece 1 and the facing portions 2a, 2b, 2c, 2d, and the other machining electrodes 2 are in contact with each other.
- Reference numerals 2f, 2g, 2h, 2i, and 2j denote current waveforms when the distances generate normal discharge.
- a machining current peak due to the machining pulse appears in the facing portion 2e. This is the same as in an electric discharge machining apparatus in which the machining electrode is opposed to the workpiece. This is almost the same as when the electric discharge machining pulse is applied and the machining electrode and the workpiece are in electrical contact.
- power feeding is not started simultaneously to the facing portion 2e of the machining electrode in contact with the workpiece 1 and the facing portions 2d and 2f adjacent thereto. For this reason, in the time zone in which the peak current is generated, the impedance to the nearest facing portion where power feeding is started simultaneously becomes four times as compared with the case where power feeding is started simultaneously to all the facing portions of the machining electrode 2. Therefore, even when a short circuit occurs, it is possible to greatly suppress the energy that the electric discharge machining pulse fed to the other facing part goes into the short circuit part via the machining electrode.
- machining electrode 2 is supplied from one machining electrode bobbin 8, and the adjacent facing portions of the machining electrodes are only interposed via the guide rollers 7a to 7d, a plurality of parallel ( For example, 10 or more) and a narrow gap (for example, 1 mm or less) can be easily realized.
- the electric discharge machining pulse can be simultaneously controlled at the adjacent opposing portions 2a to 2j, and the machining electrode can be obtained without lowering the electric discharge frequency.
- a high-speed electric discharge machining apparatus can be provided by simultaneously generating electric discharges at a plurality of non-adjacent opposing portions while suppressing the energy that wraps around through 2.
- the apparatus can be miniaturized. Further, since the guide rollers 7a to 7d may be wound around one by one in order, the preparation process before the start of processing is shortened.
- the machining electrode 2 and the workpiece 1 are opposed to each other at 10 positions as an example, but the discharge has the machining electrode facing the workpiece at M (M is 2 or more).
- M is 2 or more.
- M is 2 or more.
- the same effect can be obtained with the processing apparatus.
- the effect increases as M increases.
- an equal difference is provided in the application start time of the electric discharge machining pulse applied to the adjacent portion adjacent to the machining electrode, but a difference equal to or greater than the current peak time (for example, 0.1 ⁇ sec) can be provided. Even if the difference is not uniform, the same effect can be obtained.
- the electric discharge machining apparatus suppresses the concentration of the electric discharge machining current, which flows frequently immediately after the electric discharge machining pulse application starts, to the short-circuited portion, thereby causing abnormal consumption and cutting of the machining electrode and deterioration of the machining surface quality. It becomes possible to prevent. In addition, it is possible to prevent abnormal consumption and cutting of the machining electrode and deterioration of the machining surface quality while maintaining the machining speed regardless of the application time of the electric discharge machining pulse and the ratio of the pause time. Further, since the gap can be narrowed, the apparatus can be miniaturized. Furthermore, it is possible to shorten the preparation process before the start of processing.
- the electric discharge machining apparatus immediately after the start of applying the electric discharge machining pulse, as in the method of applying an electric discharge machining pulse between the workpiece and the machining electrode by electrically connecting a capacitor in which charges are stored in advance to the workpiece and the machining electrode.
- the electric discharge machining apparatus is particularly effective.
- one machining electrode 2 is opposed to the workpiece 1 at a plurality of opposed portions 2a to 2j.
- the distance between the processing electrodes is narrow (for example, 1 mm or less) and a long distance (for example, 150 mm or more).
- Between the opposing portions of the adjacent processed electrodes has a resistance of about several hundred ⁇ or less, and the same effect as in the present embodiment can be obtained.
- FIG. 7 is a circuit diagram showing the configuration of the electric discharge machining pulse generating means 4a to 4j of the electric discharge machining apparatus according to the second embodiment of the present invention.
- the electric discharge machining pulse application switch 14 can be constituted by, for example, a transistor (including a field effect transistor).
- FIG. 8 is a diagram showing an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the present embodiment.
- Application of the electric discharge machining pulse from the pulse control means 5 to the pulse generating means 4a, 4c, 4e, 4g, 4i is started at time 0, stopped at time 0.5, and further, application of the electric discharge machining pulse is started at time 1.
- a command is given to apply the electric discharge machining pulse so that the electric discharge machining pulse is applied at 1.5, stopped at time 2, and stopped at time 2.5.
- the electric discharge machining pulse is transmitted from the pulse control means 5 to the pulse generation means 4b, 4d, 4f, 4h, 4j at time 0.5 to 1.0, 1.5 to 2.0, 2.5 to 3.0. Command to apply.
- the pulse control means 5 in the present embodiment does not simultaneously apply the electric discharge machining pulse to the adjacent facing portions (for example, the facing portion 2a and the facing portion 2b), that is, to the adjacent facing portions.
- the pulse generating means 4a to 4j are controlled so as not to provide a time zone during which the electric discharge machining pulse is applied.
- FIG. 9 shows a current waveform when the workpiece 1 and the facing portion 2e of the machining electrode 2 are in contact with each other and the workpiece 1 and the other facing portion of the machining electrode 2 are not in contact in the second embodiment. .
- power is not simultaneously supplied to the facing portions 2d and 2f adjacent to the facing portion 2e.
- the impedance to the nearest opposed portion where electric power feeding is started simultaneously is doubled. Therefore, even when a short circuit occurs, it is possible to greatly suppress the energy that the electric discharge machining pulse fed to the other facing part goes into the short circuit part via the machining electrode.
- machining electrode 2 is supplied from one machining electrode bobbin 8, and the adjacent facing portions of the machining electrodes are only interposed via the guide rollers 7a to 7d, a plurality of parallel ( For example, 10 or more) and a narrow gap (for example, 1 mm or less) can be easily realized.
- the apparatus can be miniaturized. Further, since the guide rollers 7a to 7d may be wound around one by one in order, the preparation process before the start of processing is shortened.
- the machining electrode 2 and the workpiece 1 are opposed to each other at 10 positions as an example, but the discharge has the machining electrode facing the workpiece at M (M is 2 or more).
- M is 2 or more.
- the electric discharge machining pulse applied to the facing portion adjacent to the machining electrode is provided with an equal difference in the application start time. However, if the electric discharge machining pulse is not simultaneously applied to the adjacent facing portion, the difference is provided. The same effect can be obtained even if is not uniform.
- the electric discharge machining pulse is not applied to the adjacent machining electrode, this is equivalent to at least double the impedance between the machining electrodes facing the workpiece. In addition, abnormal consumption and cutting of the machining electrode and deterioration of the machining surface quality can be prevented. Further, since the gap can be narrowed, the electric discharge machining apparatus can be reduced in size. Furthermore, the preparation process before the start of processing is shortened. This is particularly effective when pulse generating means for applying a rectangular wave-shaped electric discharge machining pulse using a resistor and a transistor (including a field effect transistor) is used.
- one machining electrode 2 is opposed to the workpiece 1 at a plurality of opposed portions 2a to 2j.
- the interval between the machining electrodes is narrow (for example, 1 mm or less) and parallel over a long distance (for example, 150 mm or more)
- the resistance between adjacent parts of the processing electrodes is about several hundred ⁇ or less, the same effect as in the present embodiment can be obtained.
- FIG. 10 is a schematic diagram of a main part of an electric discharge machining apparatus according to the third embodiment of the present invention.
- pulse pattern storage means 16 is further provided.
- the pulse generating means 4a to 4j are divided into groups of, for example, five pulse generating means in order from 4a, and the pulse pattern storage means 16 stores the order in which the electric discharge machining pulses are applied in each group. Specifically, for example, the following order patterns are stored.
- the pulse control means 5 that has read the order of the electric discharge machining pulses from the pulse pattern storage means 16 instructs the pulse generation means 4a, 4b, 4c, 4d, and 4e to start applying the electric discharge machining pulses in the following order. To do.
- FIG. 11 is a diagram showing an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the present embodiment.
- the pulse controller 5 instructs the pulse generators 4a and 4f to start applying the electric discharge machining pulse at time 0, stop at time 0.6, and then apply the electric discharge machining pulse again at times 1 to 1.6. ing.
- a command to apply an electric discharge machining pulse is given to the pulse generators 4e and 4j at time 0.4 to 1.0 and 1.4 to 2.0.
- the optimum electric discharge machining pulse application start order for increasing the difference in the electric discharge machining pulse application start time to the adjacent facing portion of the machining electrode 2 can be stored.
- the influence of the electric discharge machining pulse applied to the other facing portion can be eliminated. Accordingly, it is possible to provide a high-speed electric discharge machining apparatus by generating electric discharge at a plurality of locations simultaneously while preventing abnormal consumption and cutting of the machining electrode and deterioration of the machining surface quality.
- FIG. 12 is a flowchart for determining an electric discharge machining pulse pattern of the electric discharge machining apparatus according to the fourth embodiment of the present invention. This flowchart is executed by the pulse control means 5, for example. First, the application time of the electric discharge machining pulse and the pause time are compared (step S1).
- the difference D is provided by one fifth of the sum of the application time and the rest time in the following order (step S2) (step S5). ) Start applying electric discharge machining pulse.
- step S5 the minimum interval D of the time difference when the application start time of the electric discharge machining pulse to different facing parts is not simultaneous is determined by the following equation.
- step S1 determines whether the application time of the electric discharge machining pulse is equal to or less than the pause time.
- N ′ (rounded down ((pause time / application time)) is calculated (step S3).
- the pulse control means 5 does not simultaneously apply the electric discharge machining pulse application start time based on the applied electric discharge machining pulse pattern application time and pause time.
- the number N of two adjacent adjacent portions, the minimum interval D of the difference in time when the electric discharge machining pulse application start time is not simultaneous, and the order in which the plurality of pulse generating means apply the electric discharge machining pulses. Determine the pattern.
- the embodiment selected in step S1 is not limited to the above. Therefore, it is needless to say that the present embodiment is not limited to the above-described embodiment, and various variations can be considered in this embodiment, including a change in the pattern of the electric discharge machining pulse.
- the pulse generation pattern can be controlled in accordance with the discharge energy and the oscillation frequency, and the discharge energy does not circulate from the adjacent facing portion of the machining electrode, and the machining electrode is abnormally consumed or cut. Deterioration of the processed surface quality can be prevented. Since it becomes unnecessary for the user to examine and set the pulse generation pattern, processing and automation by an unskilled person are facilitated.
- the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention in the implementation stage.
- the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent requirements. For example, even if some constituent elements are deleted from all the constituent elements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and is described in the column of the effect of the invention. When an effect is obtained, a configuration in which this configuration requirement is deleted can be extracted as an invention.
- the constituent elements over different embodiments may be appropriately combined.
- the electric discharge machining apparatus and the electric discharge machining method according to the present invention provide an electric discharge machining between a workpiece and a machining electrode by electrically connecting a capacitor in which charges are stored in advance to the workpiece and the machining electrode. This is useful for a method of applying a pulse, and is particularly suitable when a large machining current flows immediately after the start of applying an electric discharge machining pulse.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
Description
図1は本発明の実施の形態1にかかる放電加工装置の要部を示す概略図である。加工電極ボビン8から繰り出される1本のワイヤからなる加工電極2がガイドローラ7a,7b,7c,7d,7a,7b,7c,7d…の順に巻回されている。加工電極2と被加工物1(工作物)は、巻回された加工電極2が形成する多数本の並列ワイヤである対向部2a,2b,2c,2d,2e,2f,2g,2h,2i,2jの10箇所で加工液(例えば、脱イオン水)(図示せず)中で対向している。対向部2a~2jを10箇所としたのは一例であり、この数に限定されない。
本発明の実施の形態2にかかる放電加工装置の要部の概略図は実施の形態1と同様、図1で示される。図7は本発明の実施の形態2にかかる放電加工装置の放電加工パルス発生手段4a~4jの構成を示す回路図である。放電加工パルス印加スイッチ14を接続することで直流電源11から供給されるエネルギを電流制限抵抗15によって制限し、給電子9a~9jを介して加工電極2の対向部2a~2jに給電する。ここで放電加工パルス印加スイッチ14は例えばトランジスタ(電界効果トランジスタを含む)によって構成することができる。
図10は本発明の実施の形態3にかかる放電加工装置の要部の概略図である。図1に加えて、パルスパターン記憶手段16をさらに備えている。
図12は本発明の実施の形態4にかかる放電加工装置の放電加工パルスパターンを決定するフローチャートである。このフローチャートは、例えばパルス制御手段5によって実行される。まず、放電加工パルスの印加時間と休止時間を比較する(ステップS1)。
2 加工電極
2a、…、2j 加工電極の被加工物との対向部
3 テーブル駆動用モータ
4a、…、4j パルス発生手段
5 パルス制御手段
6 駆動テーブル
7a、7b、7c、7d ガイドローラ
8 加工電極ボビン
9a、…、9j 給電子
10a、…、10i 隣接する加工電極の対向部間の等価抵抗
11 直流電源
12 コンデンサ
13 充電抵抗
14 放電加工パルス印加スイッチ
15 電流制限抵抗
16 パルスパターン記憶手段
Claims (8)
- 複数のガイドローラに巻回されることにより被加工物に対して複数の対向部を有する1本のワイヤである加工電極と、
前記被加工物と複数の前記対向部との相対距離を変化させる駆動手段と、
前記被加工物と複数の前記対向部との間にそれぞれ別個に放電加工パルスを印加する複数のパルス発生手段とを備え、
隣接する前記対向部への放電加工パルスの印加開始時刻が同時にはならないように複数の前記パルス発生手段を制御することを特徴とする放電加工装置。 - 隣接する前記対向部への放電加工パルスの同時印加を行わないように複数の前記パルス発生手段を制御することを特徴とする請求項1に記載の放電加工装置。
- 複数の前記パルス発生手段が放電加工パルスを印加する順番についての情報を保持する記憶手段をさらに備え、
前記情報に基づいて複数の前記パルス発生手段が放電加工パルスを印加する順番を制御することを特徴とする請求項1または2に記載の放電加工装置。 - 放電加工パルスパターンの印加時間と休止時間とに基づいて、放電加工パルスの印加開始時刻が全て異なる連続して隣接する前記対向部の数と、放電加工パルスの印加開始時刻が異なるときの当該時刻の差異の最小間隔Dと、放電加工パルスを印加する順番とを定めて、複数の前記パルス発生手段を制御する
ことを特徴とする請求項1、2または3に記載の放電加工装置。 - 複数のガイドローラに巻回されることにより被加工物に対して複数の対向部を有する1本のワイヤである加工電極を用いて、
前記被加工物と複数の前記対向部との相対距離を変化させ、
前記被加工物と複数の前記対向部との間にそれぞれ別個に放電加工パルスを印加し、
隣接する前記対向部への放電加工パルスの印加開始時刻が同時にはならないように制御する
ことを特徴とする放電加工方法。 - 隣接する前記対向部への放電加工パルスの同時印加を行わないように制御する
ことを特徴とする請求項5に記載の放電加工方法。 - 放電加工パルスを印加する順番についての情報を保持し、
前記情報に基づいて放電加工パルスを印加する順番を制御する
ことを特徴とする請求項5または6に記載の放電加工方法。 - 放電加工パルスパターンの印加時間と休止時間とに基づいて、放電加工パルスの印加開始時刻が全て異なる連続して隣接する前記対向部の数と、放電加工パルスの印加開始時刻が異なるときの当該時刻の差異の最小間隔Dと、放電加工パルスを印加する順番とを定めて、複数の前記パルス発生手段を制御する
ことを特徴とする請求項5、6または7に記載の放電加工方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/579,970 US20120312787A1 (en) | 2010-04-09 | 2011-03-29 | Electrical discharge machining apparatus and electrical discharge machining method |
DE112011101259T DE112011101259T5 (de) | 2010-04-09 | 2011-03-29 | Elektroerosive Bearbeitungsvorrichtung und elektroerosives Bearbeitungsverfahren |
JP2012509485A JPWO2011125656A1 (ja) | 2010-04-09 | 2011-03-29 | 放電加工装置および放電加工方法 |
CN2011800164896A CN102821901A (zh) | 2010-04-09 | 2011-03-29 | 放电加工装置以及放电加工方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010090902 | 2010-04-09 | ||
JP2010-090902 | 2010-04-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011125656A1 true WO2011125656A1 (ja) | 2011-10-13 |
Family
ID=44762603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2011/057841 WO2011125656A1 (ja) | 2010-04-09 | 2011-03-29 | 放電加工装置および放電加工方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120312787A1 (ja) |
JP (1) | JPWO2011125656A1 (ja) |
CN (1) | CN102821901A (ja) |
DE (1) | DE112011101259T5 (ja) |
WO (1) | WO2011125656A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014166674A (ja) * | 2013-01-29 | 2014-09-11 | Canon Marketing Japan Inc | ワイヤ放電加工装置およびワイヤ放電加工方法。 |
JP6072236B2 (ja) * | 2013-05-20 | 2017-02-01 | 三菱電機株式会社 | ワイヤ放電加工装置、これを用いた薄板の製造方法及び半導体ウエハの製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9089916B2 (en) * | 2010-10-01 | 2015-07-28 | Mitsubishi Electric Corporation | Wire electric discharge machining apparatus, wire electric discharge machining method, thin plate manufacturing method, and semiconductor wafer manufacturing method |
DE112012005697B4 (de) | 2012-01-18 | 2020-06-10 | Mitsubishi Electric Corporation | Drahterodiervorrichtung und Drahterodierverfahren |
DE102013201932A1 (de) * | 2013-02-06 | 2014-08-07 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Bearbeiten eines Werkstücks |
CN104708131B (zh) * | 2013-12-13 | 2018-06-29 | 通用电气公司 | 加工装置和加工方法 |
CN111558753B (zh) * | 2020-05-11 | 2021-08-03 | 杭州台业机械设备有限公司 | 一种慢走丝伺服跟踪电压检测控制方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009154199A1 (ja) * | 2008-06-16 | 2009-12-23 | 三菱電機株式会社 | ワイヤ放電加工装置およびワイヤ放電加工方法、半導体ウエハ製造装置および半導体ウエハ製造方法、太陽電池ウエハ製造装置および太陽電池ウエハ製造方法 |
WO2010010927A1 (ja) * | 2008-07-24 | 2010-01-28 | 三菱電機株式会社 | 放電加工装置、放電加工方法および半導体基板の製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2000069B (en) * | 1977-06-14 | 1982-01-27 | Inoue Japax Res | Improvements relating to electrical machining |
DE4107910A1 (de) * | 1991-03-12 | 1992-09-17 | Agie Ag Ind Elektronik | Impulsgenerator fuer funkenerosive bearbeitung sowie hierfuer geeignetes verfahren |
JPH09248719A (ja) | 1996-03-12 | 1997-09-22 | Shin Etsu Handotai Co Ltd | エピタキシャル・ウエハ用半導体インゴットの切断方法およびその装置 |
JP2000094221A (ja) * | 1998-09-24 | 2000-04-04 | Toyo Advanced Technologies Co Ltd | 放電式ワイヤソー |
JP2000107941A (ja) | 1998-10-01 | 2000-04-18 | Toyo Advanced Technologies Co Ltd | ワイヤ放電加工方法及び放電式ワイヤソー |
US6259053B1 (en) * | 1999-03-01 | 2001-07-10 | Modern Hard Chrome Service Company | Method and apparatus for controlling the position and power of electrodes in an electric-discharge texturing machine |
JP3659858B2 (ja) * | 2000-03-27 | 2005-06-15 | 三菱重工業株式会社 | 放電加工装置 |
JP2003260617A (ja) * | 2002-03-04 | 2003-09-16 | Japan Science & Technology Corp | パラレル放電加工方法及びパラレル放電加工装置 |
WO2005072900A1 (ja) * | 2004-01-29 | 2005-08-11 | Mitsubishi Denki Kabushiki Kaisha | 放電加工装置及び放電加工方法 |
JP2009226504A (ja) * | 2008-03-19 | 2009-10-08 | Mitsubishi Electric Corp | ワイヤ放電加工装置 |
JP2010005735A (ja) * | 2008-06-26 | 2010-01-14 | Mitsubishi Electric Corp | マルチワイヤ放電加工装置 |
-
2011
- 2011-03-29 US US13/579,970 patent/US20120312787A1/en not_active Abandoned
- 2011-03-29 CN CN2011800164896A patent/CN102821901A/zh active Pending
- 2011-03-29 JP JP2012509485A patent/JPWO2011125656A1/ja active Pending
- 2011-03-29 WO PCT/JP2011/057841 patent/WO2011125656A1/ja active Application Filing
- 2011-03-29 DE DE112011101259T patent/DE112011101259T5/de not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009154199A1 (ja) * | 2008-06-16 | 2009-12-23 | 三菱電機株式会社 | ワイヤ放電加工装置およびワイヤ放電加工方法、半導体ウエハ製造装置および半導体ウエハ製造方法、太陽電池ウエハ製造装置および太陽電池ウエハ製造方法 |
WO2010010927A1 (ja) * | 2008-07-24 | 2010-01-28 | 三菱電機株式会社 | 放電加工装置、放電加工方法および半導体基板の製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014166674A (ja) * | 2013-01-29 | 2014-09-11 | Canon Marketing Japan Inc | ワイヤ放電加工装置およびワイヤ放電加工方法。 |
TWI574764B (zh) * | 2013-01-29 | 2017-03-21 | Canon Marketing Japan Kk | Wire EDM and Wire EDM |
JP6072236B2 (ja) * | 2013-05-20 | 2017-02-01 | 三菱電機株式会社 | ワイヤ放電加工装置、これを用いた薄板の製造方法及び半導体ウエハの製造方法 |
US10220459B2 (en) | 2013-05-20 | 2019-03-05 | Mitsubishi Electric Corporation | Wire electric discharge machining apparatus and manufacturing method for thin plate and manufacturing method for semiconductor wafer using wire electric discharge machining apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPWO2011125656A1 (ja) | 2013-07-08 |
CN102821901A (zh) | 2012-12-12 |
US20120312787A1 (en) | 2012-12-13 |
DE112011101259T5 (de) | 2013-05-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2011125656A1 (ja) | 放電加工装置および放電加工方法 | |
US9421632B2 (en) | Multi-output engine welder supplying full electrical power capacity to a single welding output | |
ATE402780T1 (de) | Elektrische lichtbogenvorrichtung mit einem gesteuerten wellenformprofil für kernelektroden | |
US9107283B2 (en) | Method for magnetic control of plasma arc | |
JP2010005735A (ja) | マルチワイヤ放電加工装置 | |
JP2009226504A (ja) | ワイヤ放電加工装置 | |
TW201422354A (zh) | 非自耗電極焊接系統以及其焊接方法 | |
JP2011062764A (ja) | ワイヤ放電加工装置 | |
CN103958106A (zh) | 电弧焊接控制方法及电弧焊接装置 | |
JPH07227718A (ja) | ワイヤ放電加工用電源回路及び電源用回路装置 | |
JP2015037813A (ja) | 加工用電源を切り替えてワイヤ切断用に使用するワイヤ放電加工機 | |
WO2010010927A1 (ja) | 放電加工装置、放電加工方法および半導体基板の製造方法 | |
WO2014068684A1 (ja) | ワイヤ放電加工装置 | |
WO2008050404A1 (fr) | Dispositif de décharge de fil | |
US6140600A (en) | Electric discharge machining apparatus | |
JP5797118B2 (ja) | マルチワイヤ放電加工装置およびマルチワイヤ放電加工方法 | |
JP6523402B2 (ja) | アーク溶接時のバーンバック処理制御装置及び方法 | |
JP5495957B2 (ja) | ワイヤ放電加工装置 | |
JPWO2019180839A1 (ja) | プラズマ装置、プラズマ生成方法 | |
CN110971171A (zh) | 一种多绕组并联开关磁阻电机驱动系统 | |
JP5044898B2 (ja) | 放電加工機用電源装置及びワイヤ放電加工装置 | |
JP6754935B2 (ja) | アーク溶接制御方法 | |
JPH07185937A (ja) | 放電加工方法と装置 | |
US20200198037A1 (en) | Wire electrical discharge machine and control method of wire electrical discharge machine | |
JP4132609B2 (ja) | 微細加工用ワイヤ電極案内装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201180016489.6 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 11765556 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012509485 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13579970 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120111012594 Country of ref document: DE Ref document number: 112011101259 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 11765556 Country of ref document: EP Kind code of ref document: A1 |