WO2011099643A8 - 局所クリーンゾーン形成装置 - Google Patents

局所クリーンゾーン形成装置 Download PDF

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Publication number
WO2011099643A8
WO2011099643A8 PCT/JP2011/053315 JP2011053315W WO2011099643A8 WO 2011099643 A8 WO2011099643 A8 WO 2011099643A8 JP 2011053315 W JP2011053315 W JP 2011053315W WO 2011099643 A8 WO2011099643 A8 WO 2011099643A8
Authority
WO
WIPO (PCT)
Prior art keywords
forming apparatus
air blowing
zone forming
clean zone
local clean
Prior art date
Application number
PCT/JP2011/053315
Other languages
English (en)
French (fr)
Other versions
WO2011099643A1 (ja
Inventor
藤代　祐樹
恒造 新田
裕仁 久保田
Original Assignee
興研株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 興研株式会社 filed Critical 興研株式会社
Priority to KR1020127023985A priority Critical patent/KR101698503B1/ko
Priority to CA2789747A priority patent/CA2789747C/en
Priority to JP2011553924A priority patent/JP5389194B2/ja
Priority to AU2011215148A priority patent/AU2011215148B2/en
Priority to EP11742381.4A priority patent/EP2522921B1/en
Priority to CN201180008971.5A priority patent/CN102762925B/zh
Priority to US13/578,938 priority patent/US9791161B2/en
Publication of WO2011099643A1 publication Critical patent/WO2011099643A1/ja
Publication of WO2011099643A8 publication Critical patent/WO2011099643A8/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F9/00—Use of air currents for screening, e.g. air curtains
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/02—Air-pressure chambers; Air-locks therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ventilation (AREA)
  • Air-Flow Control Members (AREA)

Abstract

作業性に優れ設置場所や作業の対象を制限することなしに優れた清浄空気空間を与えることのできる局所クリーンゾーン形成装置を提供する。 一様空気流を形成するための整流機構を空気吹出面に内設してもつ一対のプッシュフードを、互いの該空気吹出面どうしを平行に且つ該空気吹出面の中心どうしが正対しない位置関係で該プッシュフードから吹き出される一様空気流どうしを対向させて衝突するように配置すると共に、該一様空気流を該空気吹出面に対して斜め方向に角度をもって吹き出すように構成してなる局所クリーンゾーン形成装置。
PCT/JP2011/053315 2010-02-15 2011-02-09 局所クリーンゾーン形成装置 WO2011099643A1 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
KR1020127023985A KR101698503B1 (ko) 2010-02-15 2011-02-09 국소 클린 존 형성장치
CA2789747A CA2789747C (en) 2010-02-15 2011-02-09 Local clean zone forming apparatus
JP2011553924A JP5389194B2 (ja) 2010-02-15 2011-02-09 局所クリーンゾーン形成装置
AU2011215148A AU2011215148B2 (en) 2010-02-15 2011-02-09 Local clean zone forming apparatus
EP11742381.4A EP2522921B1 (en) 2010-02-15 2011-02-09 Local clean zone forming apparatus
CN201180008971.5A CN102762925B (zh) 2010-02-15 2011-02-09 局部洁净区形成装置
US13/578,938 US9791161B2 (en) 2010-02-15 2011-02-09 Local clean zone forming apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010030046 2010-02-15
JP2010-030046 2010-02-15

Publications (2)

Publication Number Publication Date
WO2011099643A1 WO2011099643A1 (ja) 2011-08-18
WO2011099643A8 true WO2011099643A8 (ja) 2012-08-16

Family

ID=44367904

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/053315 WO2011099643A1 (ja) 2010-02-15 2011-02-09 局所クリーンゾーン形成装置

Country Status (8)

Country Link
US (1) US9791161B2 (ja)
EP (1) EP2522921B1 (ja)
JP (1) JP5389194B2 (ja)
KR (1) KR101698503B1 (ja)
CN (1) CN102762925B (ja)
AU (1) AU2011215148B2 (ja)
CA (1) CA2789747C (ja)
WO (1) WO2011099643A1 (ja)

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JP5808986B2 (ja) * 2011-09-06 2015-11-10 興研株式会社 空気吹き出し装置
JP5568620B2 (ja) * 2012-12-07 2014-08-06 興研株式会社 局所空気清浄化装置
CN102937318A (zh) * 2012-12-08 2013-02-20 桂林电子科技大学 一种通风装置
FR3008782B1 (fr) * 2013-07-18 2017-12-29 Institut National De Recherche En Sciences Et Tech Pour L'environnement Et L'agriculture (Irstea) Dispositif de protection d'une zone d'operation et procede correspondant
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EP3754205A4 (en) * 2018-02-23 2021-10-20 Daikin Industries, Ltd. AIR BLOWING DEVICE AND AIR CONDITIONING DEVICE
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US20220120459A1 (en) * 2020-10-21 2022-04-21 Paul Bemis Tabletop bio-safty air curtain

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Also Published As

Publication number Publication date
CN102762925B (zh) 2015-04-01
US20120322356A1 (en) 2012-12-20
EP2522921A1 (en) 2012-11-14
WO2011099643A1 (ja) 2011-08-18
CN102762925A (zh) 2012-10-31
US9791161B2 (en) 2017-10-17
CA2789747A1 (en) 2011-08-18
KR20120129966A (ko) 2012-11-28
EP2522921A4 (en) 2018-03-21
JP5389194B2 (ja) 2014-01-15
CA2789747C (en) 2017-06-13
KR101698503B1 (ko) 2017-01-20
JPWO2011099643A1 (ja) 2013-06-17
EP2522921B1 (en) 2019-03-06
AU2011215148B2 (en) 2014-03-27
AU2011215148A1 (en) 2012-08-30

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