WO2011053004A3 - 저반사 및 고접촉각을 갖는 기판 및 이의 제조방법 - Google Patents

저반사 및 고접촉각을 갖는 기판 및 이의 제조방법 Download PDF

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Publication number
WO2011053004A3
WO2011053004A3 PCT/KR2010/007457 KR2010007457W WO2011053004A3 WO 2011053004 A3 WO2011053004 A3 WO 2011053004A3 KR 2010007457 W KR2010007457 W KR 2010007457W WO 2011053004 A3 WO2011053004 A3 WO 2011053004A3
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WO
WIPO (PCT)
Prior art keywords
same
pattern
substrate
production method
contact angle
Prior art date
Application number
PCT/KR2010/007457
Other languages
English (en)
French (fr)
Other versions
WO2011053004A2 (ko
Inventor
김태수
김재진
신부건
홍영준
최현
Original Assignee
주식회사 엘지화학
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to CN2010800495930A priority Critical patent/CN102597815A/zh
Priority to JP2012536678A priority patent/JP2013509610A/ja
Priority to EP10827088.5A priority patent/EP2495586A4/en
Priority to US13/504,444 priority patent/US9081134B2/en
Publication of WO2011053004A2 publication Critical patent/WO2011053004A2/ko
Publication of WO2011053004A3 publication Critical patent/WO2011053004A3/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B3/0009—Forming specific nanostructures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/46—Antireflective coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0276—Photolithographic processes using an anti-reflective coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet

Abstract

본 발명은 적어도 일면에 패턴이 구비된 기재로서, 상기 패턴의 형상에 의하여 상기 패턴의 하부영역에서의 굴절율과 상기 패턴의 상부영역에서의 굴절율이 상이한 것인 기재; 및 상기 기재의 패턴이 구비된 적어도 일면에 구비된 발수코팅층을 포함하고, 이를 포함하는 광학제품 및 상기 기판의 제조방법에 관한 것이다. 본 발명에 따른 기판은 반사방지성 및 발수성이 모두 우수하다.
PCT/KR2010/007457 2009-10-29 2010-10-28 저반사 및 고접촉각을 갖는 기판 및 이의 제조방법 WO2011053004A2 (ko)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2010800495930A CN102597815A (zh) 2009-10-29 2010-10-28 具有低反射和高接触角的基板及其制备方法
JP2012536678A JP2013509610A (ja) 2009-10-29 2010-10-28 低反射および高接触角を有する基板およびこの製造方法
EP10827088.5A EP2495586A4 (en) 2009-10-29 2010-10-28 SUBSTRATE WITH LOW REFLECTION AND HIGH CONTACT ANGLES AND MANUFACTURING METHOD THEREFOR
US13/504,444 US9081134B2 (en) 2009-10-29 2010-10-28 Substrate having low reflection and high contact angle, and production method for same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2009-0103694 2009-10-29
KR20090103694 2009-10-29

Publications (2)

Publication Number Publication Date
WO2011053004A2 WO2011053004A2 (ko) 2011-05-05
WO2011053004A3 true WO2011053004A3 (ko) 2011-11-03

Family

ID=43922836

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/007457 WO2011053004A2 (ko) 2009-10-29 2010-10-28 저반사 및 고접촉각을 갖는 기판 및 이의 제조방법

Country Status (6)

Country Link
US (1) US9081134B2 (ko)
EP (1) EP2495586A4 (ko)
JP (2) JP2013509610A (ko)
KR (1) KR101229673B1 (ko)
CN (1) CN102597815A (ko)
WO (1) WO2011053004A2 (ko)

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KR101306377B1 (ko) 2011-09-29 2013-09-09 엘지전자 주식회사 상향링크 전송 방법 및 장치
TWI536036B (zh) 2012-03-13 2016-06-01 鴻海精密工業股份有限公司 光學膜的製備方法
JP2014052432A (ja) * 2012-09-05 2014-03-20 Dexerials Corp 防汚体、表示装置、入力装置および電子機器
JP6409497B2 (ja) * 2014-10-24 2018-10-24 大日本印刷株式会社 撥水撥油性部材
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US20210333717A1 (en) * 2020-04-23 2021-10-28 Taiwan Semiconductor Manufacturing Co., Ltd. Extreme ultraviolet mask and method of manufacturing the same
KR102524138B1 (ko) * 2021-02-17 2023-04-20 (주)마이크로이미지 성장성 이물 및 헤이즈 발생이 억제된 펠리클이 부착된 포토마스크

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Publication number Priority date Publication date Assignee Title
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CN103308960B (zh) * 2012-03-14 2016-09-14 鸿富锦精密工业（深圳）有限公司 光学膜及其制备方法

Also Published As

Publication number Publication date
EP2495586A2 (en) 2012-09-05
JP2013509610A (ja) 2013-03-14
EP2495586A4 (en) 2013-06-12
KR20110047154A (ko) 2011-05-06
KR101229673B1 (ko) 2013-02-04
US9081134B2 (en) 2015-07-14
US20120212816A1 (en) 2012-08-23
WO2011053004A2 (ko) 2011-05-05
JP2015038630A (ja) 2015-02-26
CN102597815A (zh) 2012-07-18

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