WO2011052988A2 - 평판표시장치의 유리기판용 세정제 조성물 - Google Patents
평판표시장치의 유리기판용 세정제 조성물 Download PDFInfo
- Publication number
- WO2011052988A2 WO2011052988A2 PCT/KR2010/007416 KR2010007416W WO2011052988A2 WO 2011052988 A2 WO2011052988 A2 WO 2011052988A2 KR 2010007416 W KR2010007416 W KR 2010007416W WO 2011052988 A2 WO2011052988 A2 WO 2011052988A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- glass substrate
- flat panel
- panel display
- cleaning composition
- cleaning
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims abstract description 48
- 239000000758 substrate Substances 0.000 title claims abstract description 38
- 239000011521 glass Substances 0.000 title claims abstract description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000002736 nonionic surfactant Substances 0.000 claims abstract description 15
- 125000002947 alkylene group Chemical group 0.000 claims abstract description 9
- 150000008044 alkali metal hydroxides Chemical class 0.000 claims abstract description 8
- 238000004140 cleaning Methods 0.000 claims description 52
- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Substances [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims description 14
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 9
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 9
- 150000005846 sugar alcohols Polymers 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 8
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims description 6
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 claims description 4
- -1 oxypropylene group Chemical group 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 229920001400 block copolymer Polymers 0.000 claims description 3
- 125000006353 oxyethylene group Chemical group 0.000 claims description 3
- 229920002503 polyoxyethylene-polyoxypropylene Polymers 0.000 claims description 3
- 150000003505 terpenes Chemical class 0.000 claims description 3
- 235000007586 terpenes Nutrition 0.000 claims description 3
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 claims description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 claims description 2
- 241000206486 Adonis Species 0.000 claims description 2
- 241000490494 Arabis Species 0.000 claims description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 claims description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 claims description 2
- BMRWNKZVCUKKSR-UHFFFAOYSA-N butane-1,2-diol Chemical compound CCC(O)CO BMRWNKZVCUKKSR-UHFFFAOYSA-N 0.000 claims description 2
- OWBTYPJTUOEWEK-UHFFFAOYSA-N butane-2,3-diol Chemical compound CC(O)C(C)O OWBTYPJTUOEWEK-UHFFFAOYSA-N 0.000 claims description 2
- 229920000166 polytrimethylene carbonate Polymers 0.000 claims description 2
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 claims 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 claims 1
- 150000001298 alcohols Chemical class 0.000 abstract 1
- 239000000356 contaminant Substances 0.000 description 17
- 239000002245 particle Substances 0.000 description 14
- 230000000052 comparative effect Effects 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000003599 detergent Substances 0.000 description 6
- 239000004215 Carbon black (E152) Substances 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 150000002430 hydrocarbons Chemical class 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- 238000005187 foaming Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 229910021642 ultra pure water Inorganic materials 0.000 description 3
- 239000012498 ultrapure water Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 239000012459 cleaning agent Substances 0.000 description 2
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 150000002894 organic compounds Chemical class 0.000 description 2
- 239000002957 persistent organic pollutant Substances 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- OHVLMTFVQDZYHP-UHFFFAOYSA-N 1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-2-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound N1N=NC=2CN(CCC=21)C(CN1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)=O OHVLMTFVQDZYHP-UHFFFAOYSA-N 0.000 description 1
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 1
- OVSKIKFHRZPJSS-UHFFFAOYSA-N 2,4-D Chemical compound OC(=O)COC1=CC=C(Cl)C=C1Cl OVSKIKFHRZPJSS-UHFFFAOYSA-N 0.000 description 1
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 1
- VWVRASTUFJRTHW-UHFFFAOYSA-N 2-[3-(azetidin-3-yloxy)-4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound O=C(CN1C=C(C(OC2CNC2)=N1)C1=CN=C(NC2CC3=C(C2)C=CC=C3)N=C1)N1CCC2=C(C1)N=NN2 VWVRASTUFJRTHW-UHFFFAOYSA-N 0.000 description 1
- SXAMGRAIZSSWIH-UHFFFAOYSA-N 2-[3-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-1,2,4-oxadiazol-5-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1=NOC(=N1)CC(=O)N1CC2=C(CC1)NN=N2 SXAMGRAIZSSWIH-UHFFFAOYSA-N 0.000 description 1
- WZFUQSJFWNHZHM-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)CC(=O)N1CC2=C(CC1)NN=N2 WZFUQSJFWNHZHM-UHFFFAOYSA-N 0.000 description 1
- JVKRKMWZYMKVTQ-UHFFFAOYSA-N 2-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]pyrazol-1-yl]-N-(2-oxo-3H-1,3-benzoxazol-6-yl)acetamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C=1C=NN(C=1)CC(=O)NC1=CC2=C(NC(O2)=O)C=C1 JVKRKMWZYMKVTQ-UHFFFAOYSA-N 0.000 description 1
- YJLUBHOZZTYQIP-UHFFFAOYSA-N 2-[5-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]-1,3,4-oxadiazol-2-yl]-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C1=NN=C(O1)CC(=O)N1CC2=C(CC1)NN=N2 YJLUBHOZZTYQIP-UHFFFAOYSA-N 0.000 description 1
- CONKBQPVFMXDOV-QHCPKHFHSA-N 6-[(5S)-5-[[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]methyl]-2-oxo-1,3-oxazolidin-3-yl]-3H-1,3-benzoxazol-2-one Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C[C@H]1CN(C(O1)=O)C1=CC2=C(NC(O2)=O)C=C1 CONKBQPVFMXDOV-QHCPKHFHSA-N 0.000 description 1
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000000809 air pollutant Substances 0.000 description 1
- 231100001243 air pollutant Toxicity 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 150000003868 ammonium compounds Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002981 blocking agent Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910000000 metal hydroxide Inorganic materials 0.000 description 1
- 150000004692 metal hydroxides Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- CRSOQBOWXPBRES-UHFFFAOYSA-N neopentane Chemical compound CC(C)(C)C CRSOQBOWXPBRES-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000011146 organic particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- ULWHHBHJGPPBCO-UHFFFAOYSA-N propane-1,1-diol Chemical compound CCC(O)O ULWHHBHJGPPBCO-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/66—Non-ionic compounds
- C11D1/72—Ethers of polyoxyalkylene glycols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/02—Inorganic compounds ; Elemental compounds
- C11D3/04—Water-soluble compounds
- C11D3/044—Hydroxides or bases
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2065—Polyhydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/18—Glass; Plastics
Definitions
- the name of the invention Detergent composition for glass substrate of flat panel display
- the present invention relates to a glass substrate cleaning composition of a flat tube display device which is a low-foaming aqueous cleaning agent.
- the present invention claims the benefit of the filing date of Korean Patent Application No. 10-2009-0104416 filed with the Korea Patent Office on October 30, 2009, the entire contents of which are incorporated herein.
- FPDC flat panel display devices like semiconductor devices, are manufactured through processes such as film formation, exposure, and etching.
- adhesion contamination occurs due to very small particles having a size of one or less of various organic materials and inorganic materials on the substrate surface.
- pinholes, pits, disconnection of wires or bridges are generated, and the yield of the product is reduced.
- Korean Patent Laid-Open Publication No. 2003-0039408 discloses an aqueous cleaner including a non-ionic surfactant having an alkylene oxide added to an aromatic alcohol and a nonionic surfactant having an alkylene oxide added to a hydrocarbon alcohol.
- a nonionic surfactant having an alkylene oxide added to a long chain hydrocarbon is used, Bubbles are generated in the process.
- Korean Patent No. 10-0574607 proposes a cleaning solution containing deionized water, an organic compound and an ammonium compound in an acidic pH environment.
- Japanese Patent Laid-Open No. 7-133496 discloses a cleaning composition comprising a nonionic surfactant in which alkylene oxide is added to a long chain alcohol, a short chain glycol ether solvent, a long chain glycol ether solvent, a paraffinic or olefinic hydrocarbon and water. Suggested.
- a cleaning composition comprising a nonionic surfactant in which alkylene oxide is added to a long chain alcohol, a short chain glycol ether solvent, a long chain glycol ether solvent, a paraffinic or olefinic hydrocarbon and water. Suggested.
- hydrocarbon solvents there is a possibility of flammability and drying problems when using hydrocarbon solvents.
- the carbon number of the terminal alkyl group is increased, the viscosity of the detergent and the solubility in water may decrease.
- An object of the present invention is to provide a glass substrate cleaning composition of a flat panel display device which is a low-aqueous water-based cleaner that can increase the cleaning effect and productivity by completely removing contaminants present on the glass substrate.
- the present invention is a nonionic surfactant to which the alkylene oxide is added to the terpene-based oil represented by the formula (1); Alkali metal hydroxides; And water and a pH 12 to pH 14 cleaner for the flat panel display glass substrate.
- a composition :
- AO is an oxyethylene group, an oxypropylene group or a polyoxyethylene-polyoxypropylene block copolymer, and n is 1 to 40.
- the cleaning composition of the present invention is excellent in removing organic contaminants and particles on the surface of the glass substrate of the flat panel display device.
- the detergent composition of the present invention is easy to handle and environmentally advantageous because it contains no residue after rinsing and contains a large amount of deionized water.
- Example 1 is a photograph showing a contact angle before cleaning using the cleaning composition of Example 9.
- FIG. 2 is a photograph showing a contact angle after cleaning using the cleaning composition of Example 9.
- Glass substrate cleaning composition of the flat panel display device of the present invention is PH12 to pH14, and it contains a nonionic surfactant, a polyhydric alcohol type compound, alkali metal hydroxide, and water.
- the nonionic surfactant contained in the glass substrate cleaning composition of the flat panel display device of the present invention is a nonionic surfactant in which alkylene oxide is added to a terpene-based oil represented by the following formula (1).
- AO is an oxyethylene group, an oxypropylene group or a polyoxyethylene polyoxypropylene block copolymer, and n is 1 to 40.
- the nonionic surfactant represented by Chemical Formula 1 exhibits low foaming properties in the spraying process, and easily removes contaminants from the organic substrate by improving wet penetration.
- the nonionic surfactant represented by Chemical Formula 1 is preferably included in 0.01 to 5 heavy rings, more preferably 0.1 to 2% by weight, based on the total weight of the composition. If it is contained below the above-mentioned range, it is difficult to quickly infiltrate the cleaning liquid into the interface between the glass substrate surface and the contaminants such as particles, so that there is a problem that the cleaning power to the contaminants is reduced. If it exceeds the above-mentioned range, the wet penetrating force is strong so that the cleaning composition remains on the glass substrate surface. do. In the rinse process, the surfactant remains on the substrate. In addition, the degree of foaming due to the increase in viscosity of the cleaning composition is severe, there is a problem that the workability is reduced in the process.
- nonionic surfactant represented by Formula 1 commercially available products may be used, such as Rhodoclean ASP, Rhodoclean MSC, Rhodoclean EFC, and Rhodoclean HP (above, manufactured by Rhodia).
- the polyhydric alcohol-based compound included in the glass substrate cleaning composition of the flat panel display device of the present invention increases the wettability of the surface of the glass substrate to remove oil components on the surface of the glass substrate that are difficult to remove only by the nonionic surfactant represented by Chemical Formula 1. Improve the ability, ie cleaning power.
- the polyhydric alcohol-based compound improves the dissolving and rinsing power of the cleaning composition of the present invention to water.
- the polyhydric alcohol-based compound based on the total weight of the composition, is preferably included in 0.01 to 5 heavy rings 3 ⁇ 4, more preferably contained in 0.1 to 3 heavy rings ⁇ When included in less than the above range, wettability to the surface of the glass substrate Lack of grant If it exceeds the above-mentioned range, it is uneconomical.
- the polyhydric alcohol compound is ethylene glycol, propylene glycol, 1,3-propanediol, 1,2-butanediol, 1,3-butanediol, 2,3-butanediol, 1,4-butanedi, 2-methyl-1, 3 ⁇ propanediol, glycerol, trimethyl ethane, trimethylolpropane, pentaerythri, xylly, manny, sorby, erydri, adoni, tray, arabi, and tally It is preferable that it is 1 type, or 2 or more types chosen from.
- Alkali contained in the cleaning composition for glass substrates of the flat panel display device of this invention Metal hydroxides have high alkalinity. This lowers the molecular weight of the organic contaminants or oily organic compounds of the polymer and increases the peelability to the glass substrate, thereby imparting cleaning power to the glass substrate.
- the alkali metal hydroxide is preferably contained in 0.05 to 5% by weight, more preferably in 0.1 to 2% by weight of the total weight of the composition. If included below the above range, it is not easy to remove the particles or organic contaminants attached to the glass substrate. When the above range is exceeded, the cleaning effect is no longer increased, and the price of the cleaning liquid is increased, which may cause uneconomical and environmental problems.
- the alkali metal hydroxide is preferably one selected from the group consisting of KOH, NaOH, and mixtures thereof. The reason is that it is easy to obtain and economical while giving high alkalinity.
- Water included in the glass substrate cleaning composition of the flat panel display device of the present invention means deionized water and is used for a semiconductor process, and preferably 18 ⁇ . Water of ⁇ or more is used. With respect to the total weight of the composition, the water is contained in a balance such that the total weight of the detergent composition of the present invention is 100% by weight.
- the glass substrate cleaning composition of the present invention may further include a conventional additive in addition to the above components, and the additive may include a metal ion blocking agent, a ⁇ control agent, and the like.
- the cleaning composition of the present invention is excellent in removing organic contaminants and particles on the surface of the glass substrate of the flat panel display device. After cleaning the cleaning composition of the present invention It is easy to handle and environmentally beneficial as it contains no residue and contains a large amount of deionized water. Mode for Carrying Out the Invention Hereinafter, the present invention will be described in more detail with reference to Examples and Test Examples. However, the scope of the present invention is not limited by the following examples and test examples. Examples 1 to 17, Comparative Examples 1 to 4: Preparation of the cleaning composition In a mixing tank equipped with a stirrer, the components shown in Table 1 below were mixed according to the composition ratios shown in Table 1, and at room temperature for 1 hour. The cleaner composition was prepared by stirring at a speed of 500 rpm. Table 1 Surfactant Polyhydric Alcohol Compound Alkali Metal Hydroxide Water
- Rhodoclean MSC Rhodoclean EFC
- TMAH Tet r amethy 1 ammoni umhydroxi de
- the detergent compositions 100 ⁇ of Examples 1-17 and Comparative Examples 1-4 were each placed in a beaker of a capacity of 250. Meanwhile, in order to evaluate the removal power of the contaminants, the glass substrate was formed in a 5 cm 5 cm size and left for 3 days to contaminate.
- the contaminated substrate was cleaned with the cleaning composition of Examples 1 to 17 and Comparative Examples 1 to 4 for 1 minute at room temperature using a spray glass substrate cleaning apparatus. After washing for 30 seconds in ultrapure water and dried with nitrogen. The degree of removal of contaminants was evaluated by the contact angle reduction before and after cleaning using a contact angle measuring device, and the results are shown in Table 2.
- the surface of the glass substrate formed by 5 cm x 5 cm was contaminated with human fingerprint marks, and the contaminated substrate was compared with Examples 1 to 17 in real conditions for 2 minutes using a spray glass substrate cleaning device. It wash
- the glass substrate was contaminated with an organic particle solution having an average particle size of 0.8, spin dried at 3000 rpm for 1 minute, and then sprayed at a room temperature for 2 minutes using a glass substrate cleaner.
- Examples 3, 4 and 4 It wash
- the number of particles before and after cleaning was measured by the surface particle counter (Topcon ⁇ -1500) and the number of particles above 0.3 ⁇ 4 was shown in Table 3.
- FIG. 1 is a photograph which shows the contact angle before washing
- FIG. 2 is a photograph showing a contact angle after cleaning using the cleaning composition of Example 9.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Inorganic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Detergent Compositions (AREA)
- Surface Treatment Of Glass (AREA)
- Liquid Crystal (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012536672A JP5603948B2 (ja) | 2009-10-30 | 2010-10-27 | 平板表示装置のガラス基板用洗浄剤組成物 |
| CN201080038754.6A CN102482616B (zh) | 2009-10-30 | 2010-10-27 | 平面显示器装置的玻璃基板用清洁剂组成物 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2009-0104416 | 2009-10-30 | ||
| KR1020090104416A KR101673589B1 (ko) | 2009-10-30 | 2009-10-30 | 평판표시장치의 유리기판용 세정제 조성물 |
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| WO2011052988A2 true WO2011052988A2 (ko) | 2011-05-05 |
| WO2011052988A3 WO2011052988A3 (ko) | 2011-11-03 |
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| JP (1) | JP5603948B2 (zh) |
| KR (1) | KR101673589B1 (zh) |
| CN (1) | CN102482616B (zh) |
| TW (1) | TWI512099B (zh) |
| WO (1) | WO2011052988A2 (zh) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103160385B (zh) * | 2013-04-03 | 2014-10-08 | 济南瑞东实业有限公司 | 一种炼油装置油垢清洗剂及其制备方法 |
| CN104232371A (zh) * | 2014-09-13 | 2014-12-24 | 滁州斯迈特复合材料有限公司 | 保湿喷雾瓶用清洁剂 |
| CN104830549B (zh) * | 2015-04-13 | 2019-03-19 | 蓝思科技（长沙）有限公司 | 一种用于玻璃丝印后脱垢的清洗剂 |
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| KR20020066756A (ko) * | 2001-02-13 | 2002-08-21 | 주식회사 아담스테크놀로지 | 액정디스플레이 패널용 수계 세정제 조성물 |
| KR20020089655A (ko) * | 2001-05-23 | 2002-11-30 | 애경산업(주) | 터핀 오일을 포함하는 ｏ／ｗ 타입 마이크로에멀젼 세정제조성물 및 그 제조 방법 |
| JP2004002778A (ja) * | 2002-03-29 | 2004-01-08 | Sanyo Chem Ind Ltd | アルカリ洗浄剤 |
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| KR20090076938A (ko) * | 2006-09-25 | 2009-07-13 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 웨이퍼 재작업 적용을 위한 포토레지스트의 제거를 위한 조성물 및 방법 |
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| FR2721921B1 (fr) * | 1994-07-01 | 1996-10-31 | Rhone Poulenc Chimie | Derives d'origine terpenique, composition tensioactive et/ou parfumante en contenant et formulation detergente a base de cette composition |
| FR2757508B1 (fr) * | 1996-12-20 | 1999-02-26 | Rhodia Chimie Sa | Composes terpeniques polyalcoxyles, leur procede de preparation et leur utilisation comme agents demoussants |
| FR2777898B1 (fr) * | 1998-04-28 | 2000-06-23 | Rhodia Chimie Sa | Compositions liquides de desencrage a base de composes terpeniques polyalkoxyles et leur utilisation pour le desencrage du papier |
| FR2794476B1 (fr) * | 1999-06-07 | 2001-11-16 | Rhodia Chimie Sa | Utilisation de derives terpeniques polyalcoxyles dans le traitement de fibres textiles |
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- 2010-10-27 JP JP2012536672A patent/JP5603948B2/ja active Active
- 2010-10-27 CN CN201080038754.6A patent/CN102482616B/zh active Active
- 2010-10-28 TW TW099136970A patent/TWI512099B/zh active
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| KR20020066756A (ko) * | 2001-02-13 | 2002-08-21 | 주식회사 아담스테크놀로지 | 액정디스플레이 패널용 수계 세정제 조성물 |
| KR20020089655A (ko) * | 2001-05-23 | 2002-11-30 | 애경산업(주) | 터핀 오일을 포함하는 ｏ／ｗ 타입 마이크로에멀젼 세정제조성물 및 그 제조 방법 |
| JP2004002778A (ja) * | 2002-03-29 | 2004-01-08 | Sanyo Chem Ind Ltd | アルカリ洗浄剤 |
| KR20060121360A (ko) * | 2005-05-24 | 2006-11-29 | 동우 화인켐 주식회사 | 저기포성 수계세정제 조성물 |
| KR20090076938A (ko) * | 2006-09-25 | 2009-07-13 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 웨이퍼 재작업 적용을 위한 포토레지스트의 제거를 위한 조성물 및 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI512099B (zh) | 2015-12-11 |
| CN102482616A (zh) | 2012-05-30 |
| WO2011052988A3 (ko) | 2011-11-03 |
| KR101673589B1 (ko) | 2016-11-07 |
| TW201127946A (en) | 2011-08-16 |
| JP5603948B2 (ja) | 2014-10-08 |
| CN102482616B (zh) | 2014-05-28 |
| KR20110047693A (ko) | 2011-05-09 |
| JP2013509482A (ja) | 2013-03-14 |
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