TW201127946A - Detergent composition for glass substrate of flat panel display device - Google Patents

Abstract

Disclosed is a detergent composition for a glass substrate of a flat panel display device, having a pH of 12 to 14 and including a non-ionic surfactant composed of alkyleneoxide-added terpene type oil, a polyhydric alcohol-based compound, an alkaline metal hydroxide, and water.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a detergent composition for a glass substrate of a flat panel display device, which is a low foaming aqueous (aq_s) detergent. This application is filed in the Korean Patent No. 2 = Lai No. 6 of 2GG9, 1st, 3rd, and 3rd (hereby incorporated by reference in this [Previous Technology], etc., and the system is (4) Qingcheng, Material, rhyme. However, in each process, 'small particles of less than 1 micron can cause organic or inorganic materials) may adhere to the surface of the substrate instead of the possibility that these particles adhere and the substrate is subjected to subsequent procedures. Desirably reduce manufacturing yield. (10) Bridging instead of thus implementing a plurality of cleaning agents for use between the various programs. Examples of non-sequence, oxy-combustion ^ Aqueous detergents, which comprise a rotor-like interface (h) consisting of a hydrocarbon containing additional oxonium, and an additional cyclic agent. However, the addition of non-ionic interface activity is unfavorable during reading or other procedures. In addition, Korean Patent No. 10-0574607 is an alkaline pH condition cleaning liquid No. 07. However, this cleaning liquid is a =7 relic, a sub-material, such as a micro-particle heat-heating machine material which is organically 1 micron or smaller. In addition, a cleansing agent composition comprising a nonionic surfactant composed of a long-chain alcohol of an additional alkylene oxide, a short-chain glycol ether solvent, is disclosed in Japanese Unexamined Patent Publication No. Publication No. No. 2011-27946. A long-chain glycol ether solvent, a paraffinic or olefinic hydrocarbon, and water. However, flammability and drying problems may occur when using a hydrocarbon solvent. Further, in the case where the amount of carbon of the hot burnt group is increased, the viscosity of the detergent may increase and its solubility in water may decrease. SUMMARY OF THE INVENTION Accordingly, the present invention provides a detergent composition for a glass substrate of an FPD, which is a low-foaming aqueous cleaner which can completely remove contaminants from the surface of a glass substrate and thereby enhance cleaning effect and productivity. An aspect of the present invention provides a cleaning composition for a glass substrate of an FPD, which has a pH of 12 to 14 and comprises a nonionic surfactant composed of an additional oxime-type oil represented by the following formula 1. , a polysterol-based compound, an alkali metal hydroxide, and water: <Formula 1>

〇-(AO)-H where AO is an ethylene oxide group, an oxypropylene group, or a polyoxyethylene-polyoxypropylene propylene ester copolymer, and! 1 is i to 4 〇. According to the present invention, the detergent and the composition are excellent in the performance of the surface of the glass substrate of the FPD. Further, in accordance with the present invention, there is no residue after rinsing, and a large amount of deionized water is included, so that it is easy to handle and environmentally friendly. [Embodiment] 4/13 201127946 The present invention will be described in detail below. According to the present invention, the pH of the detergent composition for a glass substrate of FPD is 12 to 14' and includes a nonionic surfactant, a polyol compound, a metal hydroxide, and water. In the composition for a glass substrate of the FPD according to the present invention, the nonionic surfactant is a nonionic surfactant containing an oxime oil of the epoxy group represented by the following formula 1. <Formula 1>

In Formula 1, AO is an oxyethylene group, an oxypropylene group, or a polyethylene oxide-polyoxypropylene block copolymer, and η is 1 to 4 Å. The nonionic surfactant represented by Formula 1 produces a small amount of foam during the spraying process, so that it is easy to remove contaminants from the glass substrate. The nonionic surfactant represented by Formula 1 is used in an amount of 0.01 to 5% by weight, preferably ο.% by weight based on the total weight of the composition. If the amount of this component is less than the above lower limit, the cleaning liquid cannot rapidly permeate into the interface between the surface of the glass substrate and the contaminants (e.g., particles), and the ability to remove the contaminants is degraded. On the contrary, if the amount exceeds the upper limit of the crucible, the wet permeability becomes strong and the composition is left on the surface of the glass substrate. Also, the surfactant may remain on the substrate even after the rinsing process has been completed. In addition, since the viscosity of the clean back J composition may increase, the amount of foam generated may become large, and the program operation may be undesirably undesired. 5/13 201127946 Examples of nonionic surfactants represented by Formula 1 include commercially available products such as Rhododean ASP, Rhodoclean MSC, Rhodoclean EFC, and Rhodoclean HP (both available from Rhodia). In the detergent composition for a glass substrate of the FPD according to the present invention, the function of the polyol compound is to increase the wettability of the surface of the glass substrate, thereby enhancing the removal of the oil component from the surface of the glass substrate (only the formula 1 is used) The ability of nonionic surfactants to remove oil components). Further, the polyterpene alcohol-based compound enhances the solubility and cleaning power of the detergent composition according to the present invention in water. The polyol compound is used in an amount of from 1 to 5 % by weight, preferably from 0.1 to 3 % by weight based on the total mass of the composition. If the amount of this component is less than the above lower limit, the wettability of the surface of the glass substrate is insufficient. Conversely, if the amount exceeds the upper limit, it negatively affects cost-effectiveness. The polyol compound may be selected from the group consisting of ethylene glycol, propylene glycol, hydrazine-3-propanol, 1,2-butanol, 1,3-butanediol, 2,3-butanediol, and 14-butanol. 2-mercapto-1,3-propanediol, glycerol, tri-propyl mercapto, di-mercaptopropane, pentaerythritol, xylitol, mannitol, sorbitol, erythritol, ribitol, threose One or more of the group consisting of alcohol, arabitol, and talitol. ― In the detergent substrate for a glass substrate of the FPD according to the present invention, the alkali metal hydroxide has a high basicity, thereby reducing the molecular weight of the high-eight organic pollutant or the oily organic compound, and the masking force of the glass substrate The ability to remove the glass substrate becomes clean. The alkali metal hydroxide is used in an amount of 〇% by weight, preferably 〇1 to 2% by weight, based on the total weight of the composition. If the content of this component is below the lower limit, it is not easy to remove particles or organic from the surface of the glass substrate. 6/13 201127946. On the contrary, if the amount exceeds the upper limit, the cleaning effect cannot be further increased, and the cleaning liquid becomes expensive, thereby adversely affecting the cost efficiency and causing environmental problems. The alkali metal hydroxide may be any one selected from the group consisting of 'KOH, NaOH, and a mixture thereof, which is convenient because it imparts high alkalinity and is easy to obtain and economically advantageous. In the detergent composition for a glass substrate of the FPD according to the present invention, water is deionized water suitable for semiconductor processing and having a mass of 18 million ohm·cm or more. The remaining amount is composed of water so that the total weight of the composition is 100%. In addition to the above ingredients, the detergent composition according to the present invention may further comprise a typical additive. The additive may include a chelating agent, a pH controlling agent, and the like. The detergent composition according to the present invention exhibits an excellent ability to remove organic contaminants and particles from the surface of the glass substrate of the FPD. Further, the detergent composition according to the present invention does not leave residue after completion of rinsing, and includes a large amount of deionized water, and thus is easy to handle and environmentally friendly. The following examples and test examples are set forth to illustrate, but not to limit, the scope of the invention. Real package {column 1~1 7 and b匕 Fortunately hand you J 1~4 : Clean ij, preparation of the composition using a mixer equipped with a stirrer, the components shown in Table 1 below are shown in Table 1. The detergent composition was prepared by mixing and stirring at room temperature at 500 rpm for 1 hour. 201127946 Table 1 Surfactant (% by weight) Polyol Show (Heavy i, Compound P/o) Metal hydroxide (% by weight) Water Example 1 1) 1 a) 1 KOH 1 The remaining Example 2 1) 1 a) 0.5 KOH 1 remaining Example 3 1) 1 a) 3 KOH 1 remaining example 4 1) 0.5 a) 2 KOH 0.5 remaining example 5 1) 1 b) 1 KOH 1 remaining example 6 1) 0.5 b ) 0.5 KOH 2 remaining Example 7 1) 1 b) 0.1 KOH 4 remaining Example 8 2) 1 a) 1 KOH 1 remaining Example 9 2) 1 b) 1 KOH 1 remaining example 10 2) 1 c) 1 KOH 1 remaining Example 11 3) 1 c) 1 KOH 0.5 remaining Example 12 3) 1 a) 1 NaOH 1 remaining Example 13 3) 0.5 a) 2 NaOH 0.5 remaining Example 14 1) 2 a) 1 NaOH 0.5 The remaining Example 15 1) 0.2 b) 2 NaOH 1 remaining Example 16 2) 1 c) 1 NaOH 1 remaining Example 17 2) 0.5 c) 2 NaOH 1 remaining comparative example 1 - - - - KOH 5 remaining comparative example 2 1) 1 a) 2 - - Remaining Comparative Example 3 - - a) 0.05 KOH 0.1 remaining Comparative Example 4 2) 3 - - TMAH 1 remaining note) a) Sorbitol b) Glycerin c) Ethylene glycol

1) Rhodoclean ASP

2) Rhodoclean MSC 3) Rhodoclean EFC TMAH: Hydroxyl Hydroxide Test Example: Evaluation of the Properties of the Cleaner Composition <Evaluation of the Ability to Remove Air Pollutants> 100 ml of Examples 1 to 17 and Each of the cleaning agents of Comparative Examples 1 to 4 8/13 201127946 The composition was placed in a 250 ml beaker. At this time, the 5 cm χ 580 glass substrate was erected in the air for 3 days to be directly "n air pollutants. ^, broken / wood, and the evaluation was removed, using a spray-type glass substrate cleaning device at room temperature. The substrate of the dyed dye is given in the examples!~17 and the comparative example i is called 舲, raw, cut 〗 8 丄 + <合,月> 糸 组成 composition 4. After cleaning, the substrate is washed with ultrapure water 3 Leap seconds, ..., and then dryness. The degree of contaminant removal is measured by using a contact angle meter before and after cleaning, and the sweat is estimated based on the contact angle. The results are shown in Table 2 below. Evaluation of the ability to remove organic contaminants > In order to estimate the ability to remove organic contaminants, 5 cm x 5 cm glass substrates are contaminated with human fingerprints, and (iv) money two temperatures will be contaminated substrates as in Examples ~ 17 and compared Example 4 = Cleaner composition cleaned for 2 minutes. After cleaning, the substrate is washed with ultrapure water:: 3 sec, then dried with nitrogen. Degree of removal of contaminants: Use of contact angle measuring instrument before and after cleaning Measuring the contact angle, based on the reduction in the contact angle The results are shown in Table 2 below. <Evaluation of the ability to remove particles> The glass substrate was dyed in a solution of organic particles having an average particle size of 〇8 μm 'rotating at 3000 rpm for a minute' and then using a spray type device The two detergent compositions of Examples 3, 4, 9, 1G, 17, and Comparative Examples 2 and 4 were cleaned for 2 minutes at room temperature. After cleaning, the substrate was washed with ultrapure water for 3 〇. The number of particles having a size of 〇3 μm or larger was measured before and after cleaning using a surface particle counter (Topcon WM_丨5〇〇). The results are shown in Table 3 below. 9/13 201127946 Table 2

The ability to remove air pollutants to remove organic pollutants Example 1 〇〇 Example 2 〇〇 Example 3 ◎ 〇 Example 4 ◎ 〇 Example 5 〇〇 Example 6 〇〇 Example 7 〇〇 Example 8 〇〇 Example 9 ◎ ◎ Example 10 ◎ 〇 Example 11 ◎ 〇 Example 12 ◎ 〇 Example 13 〇〇 Example 14 〇〇 Example 15 〇〇 Example 16 〇〇 Example 17 ◎ ◎ Comparative Example 1 Δ Δ Comparative Example 2 X Δ Comparative Example 3 〇X Comparative Example 4 〇X <Evaluation of ability to remove air pollutants> ◎: Excellent (reduced by 40° or more) 〇: Good (reduced by 40°~ 30°) △: achievable (reduced by 30° to 20°) X: bad (reduced by less than 20°) <Evaluation of the ability to remove organic pollutants> ◎: Excellent (reduced by 30° or more) 〇: good (reduced by 30°~20°) △: ok (reduced by 20~10°) X: bad (less than less than 10°) 10/13 201127946 Table 3 Number of particles before cleaning Cleaned particles Quantity removal (%) Example 3 2752 384 86 Example 4 2854 355 87 Example 9 2908 427 85 Implementation Example 10 2893 307 89 Example 17 2912 292 90 Comparative Example 2 2741 1560 43 Comparative Example 4 2804 1033 63 Referring to Tables 2 and 3, the detergent compositions of Examples 1 to 17 remove all types of contaminants, particularly The ability to remove organic contaminants because the contact angle is reduced by 30° or more. In addition, it is known that the ability to remove particles is excellent. However, it is understood that the detergent compositions of Comparative Examples 1 to 4 do not exhibit the ability to remove all types of contaminants, but only the specified types of contaminants. The ability to remove particles is not excellent. Fig. 1 is a photograph showing the contact angle before cleaning using the detergent composition of Example 9, and Fig. 2 is a photograph showing the contact angle after cleaning using the detergent composition of Example 9. Referring to Figures 1 and 2, the contact angle is reduced after cleaning, so that air pollutants can be effectively removed. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a photograph showing the contact angle before cleaning using the detergent composition of Example 9; and Fig. 2 is a photograph showing the contact angle after cleaning using the detergent composition of Example 9. [Main component symbol description] Benefit 11/13

Claims (1)

201127946 * VII. Patent application scope: 1. The glass substrate of the flat display device is 12-14, and the system comprises: a composition J comprising an additional epoxy surfactant represented by the following formula 1; a non-isolated polyol compound of a molding oil; a metal hydroxide; and water <Formula 1> ί: a diethylene group, an oxypropylene group, or a polyoxyethylene-t-deuterated propylene block copolymer, and η is from 1 to 40. Slave clean (4) silk, which comprises a nonionic surfactant of the epoxy-based adhesive oil represented by Formula 1 according to the weight % of the composition; 0.01 to 5% by weight of the polyol compound; 〇 5 to 5 wt% of an alkali metal hydroxide; and the balance being water. 3. The detergent composition compound according to the scope of claim 2 is selected from the group consisting of ethylene glycol, propylene glycol, u. propylene glycol, di-alcohol, U-butylene glycol, 2,3-butanediol, M_butyl Alcohol, 2 methyl _u_ propylene glycol, glycerin, trimethyl ethene, trimethyl methacrylate, penta 12/13 201127946 tetraol, xylitol, mannitol, sorbitol, erythritol One or more of the group consisting of ribitol, threitol, arabitol, and talitol. 4. The detergent composition of claim 1, wherein the metal hydroxide is selected from the group consisting of KOH, NaOH, and mixtures thereof. 13/13