TWI512099B - Detergent composition for glass substrate of flat panel display device - Google Patents

Description

Cleaner composition for glass substrate of flat display device

The present invention relates to a detergent composition for a glass substrate of a flat panel display device (FPD) which is a low foaming aqueous detergent.

The present application claims the benefit of the Korean Patent Application No. 10-2009-0104416, filed on Oct. 30, 2009, which is hereby incorporated by reference.

Like semiconductor devices, FPDs are fabricated using film formation, exposure, etching, and the like. However, in each process, minute particles (such as various organic or inorganic materials) having a size of 1 micron or less may adhere to the surface of the substrate and do not cause contamination as desired. If such particles are attached and the substrate is subjected to subsequent procedures, pinholes or pitting of the film, or interruption or bridging of the wires may occur, undesirably reducing manufacturing yield.

Therefore, a cleaning procedure for removing contaminants is carried out between the respective programs, and thus various cleaning agents have been proposed. For example, Korean Unexamined Patent Publication No. 2003-0039408 discloses an aqueous cleaning agent comprising a nonionic surfactant composed of an aromatic alcohol of an additional alkylene oxide, and a hydrocarbon derived from an additional alkylene oxide (hydrocarbon). A nonionic surfactant composed of alcohol). However, this cleaner is disadvantageous in that it may be foamed during spraying or other procedures because of the use of a nonionic surfactant, which is an adduct of alkylene oxide and long-chain hydrocarbons. In addition, Korean Patent No. 10-0574607 discloses an acidic pH condition cleaning liquid comprising deionized water, an organic compound, and an ammonium compound. However, this cleaning liquid is acidic, and it is unfortunately impossible to sufficiently remove minute particles such as organic or inorganic materials having a size of 1 μm or less at the initial stage of the cleaning procedure. In addition, Japanese Unexamined Patent Publication No. Hei No. No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei No. Hei. A chain glycol ether solvent, a paraffinic or olefinic hydrocarbon, and water. However, flammability and drying problems may occur when using a hydrocarbon solvent. Further, in the case where the amount of carbon of the hot alkyl group is increased, the viscosity of the detergent may increase and its solubility in water may decrease.

Accordingly, the present invention provides a detergent composition for a glass substrate of an FPD which is a low foaming aqueous cleaner which can completely remove contaminants from the surface of the glass substrate and thereby enhance the cleaning effect and productivity.

An aspect of the present invention provides a detergent composition for a glass substrate of an FPD, which has a pH of 12 to 14 and comprises a nonionic surfactant composed of an oxime-type oil of an alkylene oxide represented by the following formula 1. , polyol compounds, alkali metal hydroxides, and water:

Wherein AO is an oxyethylene group, an oxypropylene group, or a polyoxyethylene-polyoxypropylene block copolymer, and n is from 1 to 40.

According to the present invention, the detergent composition is excellent in the performance of removing organic contaminants and particles from the surface of the glass substrate of the FPD. Further, the detergent composition according to the present invention does not leave a residue after completion of rinsing, and includes a large amount of deionized water, and thus is easy to handle and environmentally friendly.

The invention is described in detail below.

According to the present invention, the detergent composition for a glass substrate of FPD has a pH of 12 to 14, and includes a nonionic surfactant, a polyol compound, an alkali metal hydroxide, and water.

In the composition for a glass substrate of the FPD according to the present invention, the nonionic surfactant is a nonionic surfactant containing a hydrazine-type oil containing an alkylene oxide represented by the following formula 1.

In Formula 1, AO is an oxyethylene group, an oxypropylene group, or a polyoxyethylene-polyoxypropylene block copolymer, and n is from 1 to 40.

The nonionic surfactant represented by Formula 1 produces a small amount of foam during the spraying process, so that it is easy to remove contaminants from the glass substrate.

The nonionic surfactant represented by Formula 1 is used in an amount of 0.01 to 5% by weight, preferably 0.1 to 2% by weight, based on the total mass of the composition.

If the amount of the component is less than the lower limit, the cleaning liquid cannot rapidly penetrate into the interface between the surface of the glass substrate and the contaminant (e.g., particles), and the ability to remove the contaminant is undesirably deteriorated. Conversely, if the amount exceeds the upper limit, the wet permeability becomes strong and the detergent composition may remain on the surface of the glass substrate. Also, the surfactant may remain on the substrate even after the rinsing process has been completed. In addition, since the viscosity of the detergent composition may increase, the amount of foam generated may become large, and the program operation may be undesirably undesired.

Examples of nonionic surfactants represented by Formula 1 include commercially available products such as Rhodoclean ASP, Rhodoclean MSC, Rhodoclean EFC, and Rhodoclean HP (both available from Rhodia).

In the detergent composition for a glass substrate of the FPD according to the present invention, the function of the polyol-based compound is to increase the wettability of the surface of the glass substrate, thereby enhancing the removal of the oil component from the surface of the glass substrate (only the formula 1 is used) The ability of nonionic surfactants to remove oil components). Further, the polyol-based compound enhances the solubility and cleaning power of the detergent composition according to the present invention in water.

The polyol compound is used in an amount of 0.01 to 5% by weight, preferably 0.1 to 3% by weight based on the total weight of the composition. If the amount of this component is less than the above lower limit, the wettability of the surface of the glass substrate is insufficient. Conversely, if the amount exceeds the upper limit, it negatively affects cost-effectiveness.

The polyol compound may be selected from the group consisting of ethylene glycol, propylene glycol, 1,3-propanediol, 1,2-butanediol, 1,3-butanediol, 2,3-butanediol, and 1,4-butane. Alcohol, 2-methyl-1,3-propanediol, glycerin, trimethylolethane, trimethylolpropane, pentaerythritol, xylitol, mannitol, sorbitol, erythritol, ribitol, One or more of the group consisting of threitol, arabitol, and talitol.

In the detergent composition for a glass substrate of the FPD according to the present invention, the alkali metal hydroxide has a high basicity, thereby reducing the molecular weight of the polymer organic pollutant or the oily organic compound, and increasing the ability to remove from the glass substrate. The glass substrate is made clean.

The alkali metal hydroxide is used in an amount of 0.05 to 5% by weight, preferably 0.1 to 2% by weight, based on the total mass of the composition. If the amount of this component is less than the above lower limit, it is difficult to remove particles or organic contaminants from the surface of the glass substrate. Conversely, if the amount exceeds the upper limit, the cleaning effect cannot be further increased, and the cleaning liquid becomes expensive, thereby adversely affecting cost effectiveness and causing environmental problems.

The alkali metal hydroxide may be any one selected from the group consisting of KOH, NaOH, and a mixture thereof, which is convenient because it is highly alkaline and easy to obtain and economically advantageous.

In the detergent composition for a glass substrate of the FPD according to the present invention, water is suitable for semiconductor processing and is 18 million ohms. Distilled or larger deionized water. The remaining amount is composed of water such that the total weight of the composition is 100%.

In addition to the above ingredients, the detergent composition according to the present invention may further comprise a typical additive. The additive may include a chelating agent, a pH controlling agent, and the like.

The detergent composition according to the present invention exhibits an excellent ability to remove organic contaminants and particles from the surface of the glass substrate of the FPD. Further, the detergent composition according to the present invention does not leave a residue after completion of rinsing, and includes a large amount of deionized water, and thus is easy to handle and environmentally friendly.

The following examples and test examples are set forth to illustrate, but not to limit, the scope of the invention.

Examples 1 to 17 and Comparative Examples 1 to 4: Preparation of detergent composition

The detergent composition was prepared by mixing the ingredients shown in Table 1 below in the amounts shown in Table 1 and stirring at 500 rpm for 1 hour at room temperature using a mixer equipped with a stirrer.

Test case: Assessment of the nature of detergent compositions

<Evaluation of the ability to remove air pollutants>

100 ml of each of the detergent compositions of Examples 1 to 17 and Comparative Examples 1 to 4 was placed in a 250 ml beaker. At this time, a 5 cm × 5 cm glass substrate was erected in the air for 3 days to be contaminated, and the ability to remove air pollutants was evaluated.

Using a spray-type glass substrate cleaning apparatus, the contaminated substrates were cleaned for 1 minute at each room temperature with each of the cleaning compositions of Examples 1 to 17 and Comparative Examples 1 to 4. After cleaning, the substrate was washed with ultrapure water for 30 seconds and then dried with nitrogen. The degree of contaminant removal was evaluated by measuring the contact angle using a contact angle meter before and after cleaning, based on the amount of decrease in contact angle. The results are shown in Table 2 below.

<Evaluation of the ability to remove organic pollutants>

In order to evaluate the ability to remove organic contaminants, a 5 cm x 5 cm glass substrate was contaminated with human fingerprints, and the contaminated substrate was cleaned at room temperature using a spray type device to clean each of Examples 1-17 and Comparative Examples 1-4. The composition was cleaned for 2 minutes. After cleaning, the substrate was washed with ultrapure water for 30 seconds and then dried with nitrogen. The degree of contaminant removal was evaluated by measuring the contact angle using a contact angle meter before and after cleaning, based on the amount of decrease in contact angle. The results are shown in Table 2 below.

<Evaluation of the ability to remove particles>

The glass substrate was contaminated with a solution of organic particles having an average particle size of 0.8 μm, spin-dried at 3000 rpm for 1 minute, and then sprayed at room temperature using Examples 3, 4, 9, 10, 17, and Comparative Example 2. 4 each detergent composition was cleaned for 2 minutes. After cleaning, the substrate was washed with ultrapure water for 30 seconds and then dried with nitrogen. The number of particles having a size of 0.3 μm or more was measured using a surface particle counter (Topcon WM-1500) before and after cleaning. The results are shown in Table 3 below.

<Evaluation of the ability to remove air pollutants>

◎: Excellent (reduced 40° or more)

○: Good (reduced 40°~30°)

△: Yes (reduced by 30 ° ~ 20 °)

X: bad (less than 20° reduction)

<Evaluation of the ability to remove organic pollutants>

◎: Excellent (reduced by 30° or more)

○: Good (reduced by 30° to 20°)

△: Yes (reduced by 20 ° ~ 10 °)

X: bad (less than 10° reduction)

Referring to Tables 2 and 3, the detergent compositions of Examples 1-17 remove all types of contaminants, particularly the ability to remove organic contaminants because the contact angle is reduced by 30 or more. In addition, it is known that the ability to remove particles is excellent. However, it is understood that the detergent compositions of Comparative Examples 1 to 4 do not exhibit the ability to remove all types of contaminants, but only the specified types of contaminants. The ability to remove particles is not excellent.

1 is a photograph showing the contact angle before cleaning using the detergent composition of Example 9, which shows an angle of 57 degrees before cleaning; and FIG. 2 shows the contact angle after cleaning using the detergent composition of Example 9. The photo shows a 14 degree angle after cleaning.

Referring to Figures 1 and 2, the contact angle is reduced after cleaning, so that air pollutants can be effectively removed.

1 is a photograph showing a contact angle of 57° before cleaning using the detergent composition of Example 9; and FIG. 2 is a photograph showing a contact angle of 14° after cleaning using the detergent composition of Example 9.

Claims (3)

A cleaning agent composition for a glass substrate of a flat panel display device, which has a pH of 12 to 14 and which comprises, based on the total weight of the composition, 0.01 to 5% by weight of an additional alkylene oxide represented by the following formula 1: a nonionic surfactant of a type oil; 0.01 to 5% by weight of a polyol compound; 0.05 to 5% by weight of an alkali metal hydroxide; and the balance being water, Wherein AO is an oxyethylene group, an oxypropylene group, or a polyoxyethylene-polyoxypropylene block copolymer, and n is from 1 to 40. The detergent composition of claim 1, wherein the polyol compound is selected from the group consisting of ethylene glycol, propylene glycol, 1,3-propanediol, 1,2-butanediol, 1,3-butanediol, 2 , 3-butanediol, 1,4-butanediol, 2-methyl-1,3-propanediol, glycerin, trimethylolethane, trimethylolpropane, pentaerythritol, xylitol, mannitol One or more of the group consisting of sorbitol, erythritol, ribitol, threitol, arabitol, and talitol. The detergent composition of claim 1, wherein the alkali metal hydroxide is selected from the group consisting of KOH, NaOH, and mixtures thereof.