WO2010140301A1 - 有機elディスプレイパネルおよびその製造方法 - Google Patents
有機elディスプレイパネルおよびその製造方法 Download PDFInfo
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/824—Cathodes combined with auxiliary electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80522—Cathodes combined with auxiliary electrodes
Definitions
- the present invention relates to an organic EL display panel and a manufacturing method thereof.
- An organic EL display panel is a display panel having a light emitting element (organic EL element) using electroluminescence of an organic compound. That is, the organic EL display panel includes an organic EL element including a pixel electrode, an organic light emitting layer disposed on the pixel electrode, and a counter electrode disposed on the organic light emitting layer.
- the organic EL material contained in the organic light emitting layer can be roughly classified into a combination of a low molecular organic compound (host material and dopant material) and a high molecular organic compound. Examples of the macromolecular organic compound include polyphenylene vinylene called PPV and derivatives thereof.
- Organic EL display panels using high-molecular organic compounds can be driven at a relatively low voltage, consume less power, and are said to be easily adaptable to large display panels, and are actively researched. .
- each organic EL element in the panel shares one common counter electrode.
- the distance to the ground electrode is different from the distance from the pixel at the edge of the panel to the ground electrode.
- the wiring resistance also varies depending on the position of the pixel.
- the amount of current flowing through the counter electrode tends to be uneven. For this reason, there has been a problem that the variation in luminance becomes remarkable particularly in an active matrix organic EL display panel.
- FIG. 1 is a cross-sectional view of an organic EL device disclosed in Patent Document 1.
- the organic EL device disclosed in Patent Document 1 includes a pixel electrode 13 disposed on an insulating substrate 11, an organic layer 15 disposed on the pixel electrode 13, and an organic layer 15.
- the counter electrode 17 and the bus electrode 19 disposed on the insulating substrate 11 are provided.
- the bus electrode 19 is connected to the counter electrode 17.
- the bus electrode 19 is electrically connected to the counter electrode 17, even if the resistance of the counter electrode 17 is high, the amount of current flowing through the counter electrode 17 is constant. It is possible to prevent the luminance from varying in the organic EL display panel.
- the film thickness of the organic layer becomes non-uniform. was there. If the film thickness of the organic layer is not uniform, not only the luminance of the organic EL display panel varies, but also the life of the organic EL display panel is shortened.
- FIG. 2A is a partially enlarged view of the cross section of the organic EL display panel before the organic layer is formed.
- the organic EL display panel shown in FIG. 2A includes pixel electrodes 103R, 103G, and 103B, a bus electrode 105, and a bank 107 arranged on a substrate 101.
- the bank 107 includes a bank (hereinafter also referred to as “pixel-bus bank”) 107 a disposed between the bus electrode 105 and the pixel electrode 103 and a bank (hereinafter referred to as “inter-pixel bank”) disposed between the pixel electrodes. 107b).
- An organic layer that emits red light is disposed on the pixel electrode 103R; an organic layer that emits green light is disposed on 103G; and an organic layer that emits blue light is disposed on 103B. (See FIG. 2D).
- the bus electrode 105 is usually arranged so as to sandwich one pixel composed of three sub-pixels of RGB.
- FIG. 2B shows a state where the organic layer material liquid 130 is applied onto the pixel electrode 103 in the region defined by the bank 107. At this time, since the organic layer material liquid 130 does not exist on the bus electrode 105, the vapor concentration of the solvent of the material liquid 130 becomes low in the vicinity of the pixel-bus bank 107a.
- FIG. 2C shows how the organic layer material liquid 130 in the region defined by the bank 107 is dried.
- the vapor concentration of the solvent is low in the vicinity of the bus electrode 105, drying of the material liquid of the organic layer is promoted.
- the applied material liquid convects toward the higher drying speed, the organic layer material liquid applied on the pixel electrode 103R is drawn to the pixel-bus bank 107a side.
- the organic layer material liquid 130 applied onto the pixel electrode 103B is also drawn toward the pixel-bus bank 107a side.
- FIG. 2D shows an enlarged view of the organic layer 109R shown in FIG. 2D.
- the end 109E of the organic layer 109R on the pixel-bus bank 107a side is higher than the end 109E 'of the organic layer 109R on the inter-pixel bank 107b side.
- FIG. 3 shows the film thickness distribution of the organic layer of the organic EL display panel shown in FIG. 2D.
- the organic layers 109R and 109B formed in the regions defined in the pixel-bus bank 107a and the inter-pixel bank 107b are thicker on the pixel-bus bank 107a side. , It becomes thinner on the inter-pixel bank 107b side.
- the bus electrodes are arranged in this way, the height of the end portion of the organic layer varies, and the film thickness of the organic layer may become uneven.
- An object of the present invention is to provide an organic EL display panel having an organic layer having a uniform film thickness even when a bus electrode is provided.
- the inventor has made the height of the end of the organic layer uniform by adjusting the property of the bank disposed between the bus electrode and the pixel electrode and the property of the bank disposed between the pixel electrode.
- the inventors have found that the film thickness of the organic layer can be made uniform, and further studied and completed the invention.
- the first of the present invention relates to the organic EL display panel shown below.
- a substrate two or more pixel electrodes arranged on the substrate, a bus electrode disposed on the substrate, adjacent to at least one of the pixel electrodes, and disposed on the pixel electrode.
- An organic EL having an organic layer, two or more banks disposed on the substrate and defining a region in which the organic layer is disposed, and a counter electrode disposed on the organic layer and connected to the bus electrode
- the two or more banks include a bank disposed between the bus electrode and the pixel electrode, and a bank disposed between the pixel electrodes.
- the organic EL display panel wherein the wettability of the surface of the bank disposed between the pixel electrodes is lower than the wettability of the bank disposed between the pixel electrodes.
- 2nd of this invention is related with the organic electroluminescent display panel shown below.
- a substrate two or more pixel electrodes arranged on the substrate, a bus electrode disposed on the substrate, adjacent to at least one of the pixel electrodes, and disposed on the pixel electrode.
- An organic EL having an organic layer, two or more banks disposed on the substrate and defining a region in which the organic layer is disposed, and a counter electrode disposed on the organic layer and connected to the bus electrode
- the two or more banks include a bank disposed between the bus electrode and the pixel electrode, and a bank disposed between the pixel electrode, and the bus electrode;
- the organic EL display panel wherein a taper angle of the bank disposed between the pixel electrodes is smaller than a taper angle of the bank disposed between the pixel electrodes.
- 3rd of this invention is related with the manufacturing method of the organic electroluminescent display panel shown below.
- [3] preparing a substrate on which two or more pixel electrodes and at least one bus electrode located next to the pixel electrode are provided; and forming a photosensitive resin film on the substrate; Exposing and developing the photosensitive resin film to pattern two or more banks, wherein the two or more banks include a bank disposed between the bus electrode and the pixel electrode; A bank disposed between the pixel electrodes; firing the two or more banks and fixing the two or more banks on the substrate; and disposed between the pixel electrodes after the firing.
- the organic EL display panel manufacturing method of having having.
- 4th of this invention is related with the manufacturing method of the organic electroluminescent display panel shown below. [4] preparing a substrate on which two or more pixel electrodes and at least one bus electrode located next to the pixel electrode are provided; and forming a negative photosensitive resin film on the substrate Exposing and developing the photosensitive resin film to pattern two or more banks, wherein the two or more banks are disposed between the bus electrode and the pixel electrode.
- a bank and a bank disposed between the pixel electrodes after the development, re-exposing only the bank disposed between the pixel electrodes; firing the two or more banks; Fixing two or more banks on the substrate; applying an ink containing a material of an organic layer on the pixel electrode in a region defined by the two or more banks to form an organic layer; Have The organic EL display panel manufacturing method of that.
- the present invention even when a bus electrode is provided, the height of the end of the organic layer can be made uniform, and the film thickness of the organic layer can be made uniform. Therefore, according to the present invention, it is possible to provide an organic EL display panel having a small variation in the thickness of the organic layer and having excellent light emission characteristics.
- Sectional drawing of the organic EL element contained in the conventional organic EL display panel Diagram showing the behavior of the organic layer when the bus electrodes are arranged so as to sandwich the pixel Graph showing the film thickness distribution of the organic layer Graph showing the relationship between UV irradiation time and contact angle of anisole on top of bank
- Schematic diagram showing the behavior of the material liquid during the drying process Schematic diagram showing the behavior of the material liquid during the drying process
- Sectional drawing of the organic electroluminescence display panel of Embodiment 1 The figure which shows the manufacturing method of the organic electroluminescent display panel of Embodiment 1.
- FIG. The figure which shows the manufacturing method of the organic electroluminescent display panel of Embodiment 1.
- FIG. Sectional drawing of the organic electroluminescence display panel of Embodiment 2 The figure which shows the manufacturing method of the organic electroluminescent display panel of Embodiment 2.
- Organic EL Display Panel of the Present Invention has organic EL elements arranged in a matrix on a substrate. Each organic EL element has a pixel electrode, an organic layer disposed on the pixel electrode, and a counter electrode disposed on the organic layer.
- the organic layer is formed by a coating method. More specifically, the organic EL display panel of the present invention comprises 1) a substrate, 2) two or more pixel electrodes, 3) bus electrodes, 4) two or more banks, 5) two or more organic layers, and 6). It has a counter electrode. As will be described later, the organic EL display panel of the present invention is characterized by the properties of the banks.
- An object of the present invention is to suppress variation in the film thickness of the organic layer in the vicinity of the bus electrode connected to the counter electrode. Therefore, the present invention is particularly effective in an active matrix organic EL display panel that requires a bus electrode.
- each component of the organic EL display panel of the present invention will be described.
- Substrate The material of the substrate of the organic EL display panel of the present invention differs depending on whether it is a bottom emission type or a top emission type.
- the substrate in the case of the bottom emission type, the substrate is required to be transparent. Examples of such a substrate material include glass and transparent resin.
- the substrate in the case of the top emission type, the substrate does not need to be transparent. In this case, the substrate may be an insulator.
- the substrate may have a thin film transistor (driving TFT) for driving the organic EL element.
- driving TFT thin film transistor
- the source electrode or drain electrode of the TFT is connected to a pixel electrode described later.
- the organic EL element may be disposed on the same plane as the source electrode or drain electrode of the TFT device. Of course, the organic EL element may be laminated on the TFT device.
- Pixel electrode is a conductive member disposed on the substrate.
- the pixel electrode normally functions as an anode, but may function as a cathode.
- the pixel electrode is required to be transparent. Examples of the material of such a pixel electrode include ITO (indium tin oxide), IZO (indium zinc oxide), ZnO (zinc oxide), and the like.
- the pixel electrode is required to have light reflectivity.
- Examples of such pixel electrode materials include silver-containing alloys, more specifically silver-palladium-copper alloys (also referred to as APC), silver-ruthenium-gold alloys (also referred to as ARA), MoCr (molybdenum chromium). ), NiCr (nickel chromium), an aluminum-neodymium alloy (also referred to as Al—Nd), an aluminum-based alloy such as an aluminum-neodymium alloy (also referred to as Al—Nd), and the like.
- An ITO film or an IZO film may be disposed on the surface of the reflective pixel electrode. The thickness of the pixel electrode is typically 100-500 nm and can be about 150 nm.
- a hole injection layer may be disposed on the pixel electrode.
- the hole injection layer is a layer having a function of assisting injection of holes from the pixel electrode to an organic layer described later. For this reason, the hole injection layer is disposed between the pixel electrode and the organic layer.
- the material for the hole injection layer examples include poly (3,4-ethylenedioxythiophene) doped with polystyrene sulfonic acid (referred to as PEDOT-PSS) and oxides of transition metals.
- the material of the hole injection layer is preferably an oxide of a transition metal. Since the hole injection layer made of PEDOT is formed by a coating method, the thickness of the hole injection layer is difficult to be uniform. Further, since PEDOT is conductive, there is a high possibility that the organic EL element will be short-circuited. On the other hand, the hole injection layer made of a transition metal oxide has a uniform thickness because it is formed by sputtering.
- transition metals include tungsten, molybdenum, titanium, vanadium, ruthenium, manganese, chromium, nickel, iridium, and combinations thereof.
- a preferred hole injection layer material is tungsten oxide (WOx) or molybdenum oxide (MoOx).
- the thickness of the hole injection layer is typically between 10 nm and 100 nm, and can be about 30 nm. The hole injection layer may be omitted as long as holes can be efficiently injected from the pixel electrode to the organic layer.
- Bus electrode is a conductive member for correcting variations in wiring resistance. A uniform voltage can be applied to each pixel in the panel by the bus electrode.
- the bus electrode is disposed on the substrate.
- the bus electrode is electrically connected to a counter electrode described later.
- the bus electrode is disposed next to at least one pixel electrode.
- the bus electrode and the pixel electrode are insulated by a bank described later.
- the material of the bus electrode may be the same as or different from the material of the pixel electrode.
- Bank A bank is a partition that defines an arrangement region of an organic layer described later.
- the bank is disposed on the substrate.
- the bank includes a bank disposed between the bus electrode and the pixel electrode (hereinafter also referred to as “pixel-to-bus bank”), and a bank disposed between the pixel electrodes (hereinafter also referred to as “inter-pixel bank”). Is included.
- the present invention is characterized in that the property of the inter-pixel bank is different from the property of the inter-pixel bank. The properties of the pixel-bus bank and the inter-pixel bank will be described later.
- the height of the bank from the surface of the substrate is preferably 0.1 to 3 ⁇ m, and particularly preferably 0.8 to 1.2 ⁇ m.
- the height of the bank exceeds 3 ⁇ m, one counter electrode shared by all organic EL elements described later may be divided by the bank.
- the height of the bank is less than 0.1 ⁇ m, there is a possibility that the ink applied in the area defined by the bank leaks from the bank.
- the bank shape is preferably a forward tapered shape.
- the forward tapered shape means a shape in which the wall surface of the bank is inclined and the area of the bottom surface of the bank is larger than the area of the upper surface of the bank.
- the taper angle is 20 to 80 °, and particularly preferably 30 to 50 °.
- the taper angle of the bank is more than 80 °, one counter electrode shared by all organic EL elements to be described later may be divided by the bank.
- the material of the bank is not particularly limited as long as it is a resin, but preferably contains a fluorine-containing resin.
- the fluorine compound contained in the fluorine-containing resin include fluorinated resins such as vinylidene fluoride, vinyl fluoride, ethylene trifluoride, and copolymers thereof.
- the resin contained in the fluorine-containing resin include phenol-novolak resin, polyvinylphenol resin, acrylic resin, methacrylic resin, and combinations thereof.
- fluorine-containing resin examples include, for example, Lumiflon (registered trademark, Asahi Glass), which is a copolymer of a fluorine-containing polymer (fluoroethylene) and vinyl ether described in JP-T-2002-543469. Etc. are included.
- the bank according to the present invention is characterized by low wettability on the upper surface of the bank.
- the “upper surface of the bank” means a surface including the top of the bank.
- the contact angle of water on the upper surface of the bank is 80 ° or more, preferably 90 ° or more; the contact angle with anisole on the upper surface of the bank is preferably 30 ° to 70 °.
- the contact angle of water and anisole can be measured using an automatic liquid crystal glass cleaning / processing inspection device manufactured by Kyowa Interface Science.
- the wettability of the bank wall surface is preferably higher than the wettability of the upper surface of the bank.
- the “bank wall surface” means a surface including a surface in contact with an organic layer described later.
- a bank having a low upper surface wettability and a high wall surface wettability can be formed by baking (baking) a fluorine-containing resin film patterned into a desired shape.
- Table 1 is a table showing the relationship between the thickness (height) of the baked fluorine-containing resin and the wettability of the surface of the fluorine-containing resin film.
- the wettability of the surface of the fluorine-containing resin film is indicated by the contact angle of water and anisole. It means that wettability is low, so that the contact angle of water or anisole becomes large.
- the contact angles of water and anisole were measured with an automatic liquid crystal glass cleaning / processing inspection device manufactured by Kyowa Interface Science.
- Table 1 is also a table showing the relationship between the thickness (height) of the baked fluorine-containing resin and the fluorine concentration on the surface of the fluorine-containing resin film.
- the fluorine atom concentration was measured with an X-ray photoelectron spectroscopic analyzer (PHI Quantera SXM (manufactured by ULVAC PHI)).
- the bank may be plasma treated with fluorine gas.
- the bank material is preferably polyimide or acrylic resin.
- polyimide is preferable as a bank material because of its low water absorption.
- the present invention is characterized in that the characteristics of the pixel-bus bank and the characteristics of the inter-pixel bank are different.
- the “bank property” means the wettability of the bank surface, the taper angle of the bank, and the like. That is, the inter-pixel-bus bank and the inter-pixel bank may be different in either one of wettability and taper angle, or may be different in both.
- the characteristics of the pixel-bus bank and the inter-pixel bank will be described separately for i) wettability and ii) bank taper angle.
- the wettability of the surface of the bank between the pixels and the bus is preferably lower than the wettability of the surface of the bank between the pixels. More specifically, the contact angle of anisole on the upper surface of the bank between pixels and buses is preferably 40 ° or more and 55 ° or less; on the other hand, the contact angle of anisole on the upper surface of the bank between pixels is 30 ° or more and 40 °. It is preferably less than °.
- the wettability of the wall surface of the bank between the pixels and the bus is preferably lower than the wettability of the wall surface of the bank between the pixels.
- the height of the edge of the organic layer formed in the region defined by the bank between pixels and bus and the bank between pixels can be made uniform, and the film thickness of the organic layer can be made uniform (see Embodiment Mode 1).
- the bank between pixels may be irradiated with actinic rays to improve the wettability of the bank between pixels.
- the wettability of the bank formed of the fluorine-containing resin depends on the height of the bank. Therefore, by setting the pixel-bus bank higher than the inter-pixel bank, the pixel-bus bank The wettability may be reduced.
- the taper angle on the pixel electrode side of the pixel-bus bank (hereinafter, also simply referred to as “the taper angle of the pixel-bus bank”) is smaller than the taper angle of the inter-pixel bank Is preferred. More specifically, the taper angle of the bank between the pixels and the bus is preferably 20 ° or more and 30 ° or less, and the taper angle of the bank between the pixels is preferably more than 30 ° and 60 ° or less.
- the height of the edge of the organic layer formed in the region defined by the pixel-bus bank and the inter-pixel bank can be made uniform, and the film thickness of the organic layer can be made uniform (see Embodiment Mode 2).
- the inter-pixel bank In order to make the taper angle of the inter-pixel bank smaller than the inter-pixel bank taper angle, for example, as described later, only the inter-pixel bank may be exposed again after patterning the bank (see FIG. 11).
- Organic layer is a layer including at least an organic light emitting layer and disposed on the pixel electrode.
- the organic layer is formed by applying the organic layer material liquid to a region defined by the bank.
- the organic layer material liquid in which the organic layer material is dissolved in an organic solvent such as anisole or cyclohexylbenzene
- a coating method such as inkjet
- the conventional organic EL display panel having bus electrodes has a problem that the height of the end of the organic layer formed in the region defined by the pixel-bus bank and the inter-pixel bank varies (see FIG. 2E). ).
- the edge of the organic layer formed in the region defined by the pixel-bus bank and the inter-pixel bank is adjusted by adjusting the properties of the pixel-bus bank and the inter-pixel bank as described above.
- the height is uniform, and the film thickness of the organic layer is uniform.
- the “end of the organic layer” means the end of the surface of the organic layer on the counter electrode side.
- the organic EL material contained in the organic light emitting layer may be a polymer or a low molecule as long as the organic light emitting layer can be formed by a coating method.
- the low molecular weight organic EL material includes a combination of a dopant material and a host material.
- dopant materials include BCzVBi (4,7-diphenyl-1,10-phenanthroline), coumarin, rubrene, DCJTB ([2-tert-butyl-6- [2- (2,3,6,7-tetrahydro- 1,1,7,7-tetramethyl-1H, 5H-benzo [ij] quinolizin-9-yl) vinyl] -4H-pyran-4-ylidene] malononitrile), and examples of host materials include DPVBi (4,4′-bis (2,2-diphenylethenyl) biphenyl), Alq3 (tris (8-quinolinolato) aluminum) and the like are included.
- the polymer organic EL material examples include polyphenylene vinylene and derivatives thereof, polyacetylene (Polyacetylene) and derivatives thereof, polyphenylene (Polyphenylene) and derivatives thereof, polyparaphenyleneethylene and derivatives thereof, poly 3 -Hexylthiophene (Poly 3-hexyl thiophene (P3HT)) and its derivatives, polyfluorene (Poly fluorene (PF)) and its derivatives, etc. are included. Since the organic light emitting layer containing the polymer organic EL material is easily formed by a coating method, the organic EL material contained in the organic light emitting layer is preferably a polymer organic EL material.
- examples of the low molecular organic EL material include tris (8-quinolinolato) aluminum.
- the organic EL material is appropriately selected so that a desired color (red R, green G, blue B) is generated from each sub-pixel.
- a green subpixel is arranged next to the red subpixel
- a blue subpixel is arranged next to the green subpixel
- a red subpixel is arranged next to the blue subpixel.
- the thickness of the organic layer is preferably about 50 to 150 nm (for example, 60 nm).
- the organic layer may further have a hole transport layer (interlayer), an electron transport layer, and the like.
- the hole transport layer has a role of blocking intrusion of electrons into the pixel electrode or the hole injection layer and a role of efficiently transporting holes to the organic light emitting layer, and is a layer made of, for example, a polyaniline-based material. . Therefore, the hole transport layer is disposed between the pixel electrode or the hole injection layer and the organic light emitting layer.
- the thickness of the hole transport layer is usually 5 nm or more and 100 nm or less, preferably 10 nm or more and 50 nm or less (for example, about 20 nm). Further, the hole transport layer may be omitted as long as holes can be efficiently transported to the organic light emitting layer.
- the counter electrode is a conductive member disposed on the organic layer.
- the counter electrode normally functions as a cathode.
- the material of the counter electrode differs depending on whether the organic EL display panel is a bottom emission type or a top emission type. In the case of the top emission type, the counter electrode needs to be transparent, and examples of the material of the counter electrode include ITO and IZO. Further, in the case of the top emission type, an organic buffer layer may be disposed between the organic layer and the counter electrode.
- the counter electrode does not need to be transparent. Therefore, the material of the counter electrode is arbitrary as long as it is conductive. Examples of such a material for the counter electrode include barium (Ba), barium oxide (BaO), aluminum (Al), and the like.
- the counter electrode is usually formed by sputtering. Moreover, all the organic EL elements included in the organic EL display panel may share one counter electrode.
- a sealing film may be further disposed on the counter electrode.
- the sealing film is a film for protecting the organic layer, the pixel electrode, and the like from moisture, heat, impact, and the like.
- Examples of the material of the sealing film include silicon nitride and silicon oxynitride.
- a preferable thickness of the sealing film is 20 to 500 nm.
- the organic EL display panel of the present invention can be produced by any method as long as the effects of the present invention are not impaired.
- An example of a preferred production method is 1) a first step of preparing a substrate on which two or more pixel electrodes and bus electrodes are arranged; 2) a second step of forming two or more banks on the substrate; 3) a third step of forming an organic layer in the region defined by the bank; 4) a fourth step of forming a counter electrode on the organic layer; Have Hereinafter, each step will be described.
- a substrate on which two or more pixel electrodes and bus electrodes are arranged is prepared.
- the pixel electrode and the bus electrode may be formed, for example, by patterning a conductive thin film formed on the substrate by sputtering or the like by etching.
- the bus electrode material and the pixel electrode material are the same, the bus electrode and the pixel electrode may be formed at the same time.
- the bank includes a pixel-bus bank and an inter-pixel bank.
- the step of forming a bank on the substrate further comprises: i) forming a photosensitive resin film on the substrate i; ii) exposing and developing the formed photosensitive resin film and patterning the bank ii; Iii) firing the patterned bank and fixing the bank to the substrate iii.
- step i a photosensitive resin film is formed on the substrate.
- the photosensitive resin composition is applied onto the substrate by spin coating, die coating, slit coating, or the like, and the applied film is baked. .
- the baking conditions are not particularly limited, but may be left at 80 to 100 ° C. (for example, 100 ° C.) for 2 to 3 minutes.
- step ii the photosensitive resin film formed on the substrate is exposed and developed to pattern the bank.
- the pixel electrode and the bus electrode are exposed by patterning the bank.
- the exposure conditions are not particularly limited, but the exposure amount may be 100 to 300 mJ / cm 2 (for example, 200 mJ / cm 2 ), and the exposure light may be i-line with 365 nm as the main peak.
- the exposed photosensitive resin film may be immersed in, for example, 0.2% TMAH (tetramethylammonium hydroxide) solution for 60 seconds, and then rinsed with pure water for 60 seconds.
- TMAH tetramethylammonium hydroxide
- step iii the patterned bank is fired to fix the bank to the substrate.
- the firing conditions are not particularly limited.
- the temperature is about 200 ° C. or higher (eg, 220 ° C.), and the time is about 1 hour.
- the bank immediately after patterning has a taper angle of about 90 ° and is not a forward taper shape (see FIG. 11C), but the elastic modulus of the bank is lowered by heat during baking, and the edge of the bank spreads on the substrate.
- the bank becomes a forward tapered shape (see FIG. 11E).
- the present invention provides that the wettability of the pixel-to-bus bank is lower than the wettability of the inter-pixel bank; or that the taper angle of the pixel-to-bus bank is smaller than the taper angle of the inter-pixel bank. It is a feature.
- A) means for lowering the wettability of the bank between pixels and buses than the wettability of the bank between pixels
- A) Means for lowering the wettability of the bank between pixels and buses to be lower than the wettability of the bank between pixels (see Embodiment 1)
- actinic rays In order to make the wettability of the bank between the pixels and the bus lower than the wettability of the bank between pixels, for example, after forming the bank on the substrate, only the bank between pixels may be irradiated with actinic rays.
- a mask may be used to irradiate only the inter-pixel bank with actinic rays.
- the actinic rays to be irradiated include ultraviolet rays, electron beams, radiation, and plasma.
- the actinic ray is preferably ultraviolet rays because of easy handling. Examples of the ultraviolet rays include excimer UV having a wavelength of 172 nm.
- the irradiation time is usually 2 to 10 seconds.
- FIG. 4 is a graph showing the relationship between irradiation time and bank wettability (decrease in contact angle of anisole) when a bank formed of a fluorine-containing resin is irradiated with ultraviolet rays (wavelength 172 nm).
- the longer the ultraviolet irradiation time the smaller the anisole contact angle (the better the wettability).
- the contact angle of anisole on the surface of the bank is reduced by about 10 ° by ultraviolet irradiation for 5 seconds.
- the wettability of the inter-pixel bank can be improved by irradiating the inter-pixel bank with ultraviolet rays.
- the wettability of the bank between the pixels and the bus can be made lower than the wettability of the bank between the pixels.
- the wettability of the bank formed of the fluorine-containing resin depends on the height of the bank, so the bank material is made of fluororesin, and the pixel-bus bank is made higher than the inter-pixel bank.
- the wettability of the bank between the pixels and the bus may be reduced.
- the photosensitive resin film may be exposed through a halftone mask having a different transmittance.
- a means for making the taper angle of the pixel-to-bus bank smaller than the taper angle of the inter-pixel bank is not particularly limited, but the photosensitive resin film is a negative photosensitive resin film, and after step ii and before step iii Only the inter-pixel bank needs to be exposed again. By exposing the inter-pixel bank again, the glass transition temperature and the elastic modulus of the inter-pixel bank are increased.
- the mechanism by which the glass transition temperature and the elastic modulus of the bank are increased by re-exposure is not particularly limited, but the resin material that has not been sufficiently photopolymerized and photo-cured in the exposure of step ii is exposed again. Further, it is for photopolymerization and photocuring.
- the exposure amount at the time of re-exposure is not particularly limited, but is, for example, 200 to 400 mJ / cm 2 , and preferably about 300 mJ / cm 2 .
- the elastic modulus of the inter-pixel bank is not decreased by the heat of the baking process, and the edge of the inter-bank is not so wide. For this reason, the taper angle of the inter-pixel bank becomes large.
- the elastic modulus of the pixel-bus bank is lowered by the heat of the baking process, and the edge of the pixel-bus bank is reduced. And the taper angle of the pixel-bus bank becomes smaller (see FIG. 11E). Thereby, the taper angle of the bank between pixels and buses can be made smaller than the taper angle of the bank between pixels.
- an organic layer is formed in the region defined by the bank.
- the organic layer is formed by drying the material liquid of the organic layer applied in the region defined by the bank.
- the organic layer may then be immobilized by baking.
- the material liquid of the organic layer to be applied includes the material of the organic layer and a solvent.
- the solvent include aromatic solvents such as anisole and cyclohexylbenzene.
- the means for applying the organic layer material liquid include ink jet, dispenser, nozzle coat, spin coat, intaglio printing, and relief printing.
- a preferred application means is ink jet.
- FIGS. 5A to 5C and FIGS. 6A to 6E are schematic views showing the basic behavior shown in the process of drying the material liquid.
- FIG. 5A is a schematic diagram showing a state immediately after the material liquid of the organic layer is applied in the region defined by the bank.
- the material liquid 130 is applied to the upper surface of the bank 107 formed on the substrate 101 so as not to overflow to the adjacent subpixels partitioned by the bank.
- the contact angle of the droplet end 131 becomes ⁇ due to the balance of the surface tension at the droplet end 131.
- the contact angle is determined from ⁇ by evaporation of the solvent while the droplet end 131 is fixed. reduced to a receding angle ⁇ R.
- This drying mode is called a CCR (Constant Contact Radius) mode because the droplet diameter is constant.
- the receding angle theta R is the nature of the material liquid (viscosity etc.) and varies according to the physical properties of the bank surface (such as surface free energy). For example, the lower the wettability of the surface of the bank, receding angle theta R increases.
- the contact angle reference plane changes from the upper surface of the bank to the wall surface of the bank, so that the contact angle increases to ⁇ ′.
- the contact angle becomes larger than the receding contact angle, so that the surface tension at the droplet end 131 is balanced again.
- the droplet end 131 is fixed to the corner of the bank 107, and the contact angle decreases from ⁇ ′ to the receding contact angle ⁇ R ′ due to the evaporation of the solvent (CCR mode). ).
- the drying of the solution proceeds while alternately repeating the CCR mode and the CCA mode.
- the receding contact angle is increased. For this reason, when the solvent evaporates, the contact angle of the droplet end 131 immediately reaches the receding contact angle, the droplet end 131 moves, and the time during which the droplet volume decreases (CCA mode drying) becomes longer. . If the time for drying in the CCA mode is long, the droplet end 131 can move to the lower part of the wall surface of the bank 107 until the concentration of the solute near the droplet end 131 reaches the critical concentration. As a result, the height of the position where the droplet end 131 is fixed on the wall surface of the bank 107 (the height of the end of the organic layer) is reduced. Thus, when the wettability of the bank is lowered, the height of the end portion of the organic layer on the wall surface of the bank where the wettability is lowered can be lowered.
- the contact angle of the droplet end 131 is reduced when the bank wall surface is used as a reference plane. Therefore, when the solvent evaporates, the contact angle of the droplet end 131 immediately reaches the receding contact angle ⁇ R ′, and the droplet end 131 moves to reduce the droplet volume (CCA mode drying). Becomes longer. If the time for drying in the CCA mode is long, the droplet end 131 moves to the lower part of the wall surface of the bank 107 until the concentration of the solute near the droplet end 131 reaches the critical concentration. As a result, the height of the position where the droplet end 131 is fixed on the wall surface of the bank 107 (the height of the end of the organic layer) is reduced. Thus, when the taper angle of the bank is reduced, the height of the end portion of the organic layer on the wall surface of the bank with the reduced taper angle can be reduced.
- the conventional organic EL display panel has a problem that the edge of the organic layer formed in the region defined by the pixel-bus bank and the inter-pixel bank becomes higher on the side of the pixel-bus bank.
- the present invention is characterized in that the wettability of the bank between the pixels and the bus is lowered; the taper angle of the bank between the pixels and the bus is reduced. Therefore, the height of the end portion of the organic layer on the pixel-bus bank side can be reduced, and an organic layer having a uniform film thickness can be formed.
- a counter electrode is formed on the organic layer.
- the counter electrode is preferably formed by a sputtering method or the like.
- the height of the end portion of the organic layer can be made uniform, and the film thickness of the organic layer can be made uniform. Therefore, according to the present invention, an organic EL display panel having excellent light emission characteristics can be provided.
- Embodiment 1 In the first embodiment, a mode in which the wettability of the pixel-bus bank is low will be described. Moreover, the organic EL display panel of Embodiment 1 is a top emission type.
- FIG. 7 is a partially enlarged view of a cross section of the organic EL display panel 100 according to Embodiment 1 of the present invention.
- the organic EL display panel 100 includes a substrate 101, a reflective pixel electrode 103, a bus electrode 105, a hole injection layer 111, a hole transport layer 113, and red, green, and blue three colors.
- the substrate 101 is, for example, a glass plate.
- the reflective pixel electrode 103 is an APC alloy layer having a thickness of 100 to 200 nm, for example.
- the bus electrode 105 is made of the same material as that of the reflective pixel electrode 103.
- the hole injection layer 111 is a layer made of tungsten oxide (WOx) having a thickness of 20 to 50 nm disposed on the reflective pixel electrode 103.
- WOx tungsten oxide
- the hole transport layer 113 is a layer having a thickness of 20 to 150 nm made of polyaniline and disposed on the hole injection layer 111.
- the organic light emitting layer 115 is a layer having a thickness of 50 to 150 nm made of a polyfluorene derivative and disposed on the hole transport layer 113.
- the bank 107 is disposed on the substrate 101 and defines regions of the hole transport layer 113 and the organic light emitting layer 115.
- the bank 107 is disposed so as to cover a part of the hole injection layer 111 and the bus electrode 105.
- the bank 107 includes a pixel-bus bank 107 a disposed between the bus electrode 105 and the pixel electrode 103 and an inter-pixel bank 107 b disposed between the pixel electrodes 103.
- the wettability of the surface of the inter-pixel bank 107a is lower than the wettability of the surface of the inter-pixel bank 107b.
- the contact angle of anisole on the upper surface of the pixel-bus bank 107a is preferably 40 ° or more and 55 ° or less.
- the contact angle of anisole on the upper surface of the inter-pixel bank 107b is preferably 30 ° or more and less than 40 °.
- the height of the end of the organic layer (hole transport layer, organic light emitting layer) can be reduced.
- An organic layer having a uniform film thickness can be obtained.
- the counter electrode 117 is, for example, ITO.
- the sealing film 119 is a layer having a thickness of 20 to 500 nm made of, for example, silicon nitride.
- FIGS. 9A to 9C are schematic views showing an example of a method for manufacturing the organic EL display panel 100.
- FIG. 8A to 8D and FIGS. 9A to 9C are schematic views showing an example of a method for manufacturing the organic EL display panel 100.
- FIG. 8D and FIGS. 9A to 9C are schematic views showing an example of a method for manufacturing the organic EL display panel 100.
- the manufacturing method of the organic EL display panel 100 is as follows: 1) First step of preparing the substrate 101 on which the reflective pixel electrodes 103 and the bus electrodes 105 are arranged (FIG. 8A). 2) Second step of forming the hole injection layer 111 on the reflective pixel electrode 103 (FIG. 8B), 3) Third step of forming the bank 107 on the substrate 101 (FIG. 8C), 4) Inter-pixel bank 4th step of irradiating only 107b with ultraviolet rays (FIG. 8D), 5) 5th step (FIG.
- the substrate 101 on which the reflective pixel electrode 103 and the bus electrode 105 are arranged is prepared.
- the reflective pixel electrode 103 and the bus electrode 105 may be patterned by etching a conductive film formed on the substrate 101 by sputtering, for example.
- the hole injection layer 111 is formed on the reflective pixel electrode 103 by, for example, sputtering.
- the bank 107 is formed by a photolithography method.
- the hole transport layer 113 is formed on the hole injection layer 111.
- the hole transport layer 113 is formed by applying the material liquid of the hole transport layer 113 in the region defined by the bank 107 by, for example, an inkjet method.
- the organic light emitting layer 115 is formed on the hole transport layer 113.
- the organic light emitting layer 115 is formed by applying the material liquid of the organic light emitting layer 115 in the region defined by the bank 107 by, for example, an ink jet method.
- an end of a pixel-bus bank side of an organic layer (hole transport layer, organic light emitting layer) formed in a region defined by a pixel-bus bank and an inter-pixel bank is There was a problem of high (see FIG. 2E).
- the wettability of the pixel-bus bank 107a is lower than the wettability of the inter-pixel bank 107b, so that the height of the end portion of the organic layer on the pixel-bus bank side is increased. Can be lowered. Thereby, the film thickness of an organic layer can be made uniform.
- the counter electrode 117 and the sealing film 119 are formed.
- the counter electrode 117 is formed by, for example, a vapor deposition method
- the sealing film 119 is formed by, for example, a CVD (Chemical Vapor Deposition) method.
- the edge of the organic layer is reduced by making the wettability of the bank between the pixels and the bus lower than the wettability of the bank between the pixels.
- the height of the portion can be made uniform, and an organic layer having a uniform film thickness can be obtained.
- the secondary effect of removing the residue of the bank on the hole injection layer is also obtained by irradiation with ultraviolet rays.
- the light emission characteristics of the organic EL display panel can be improved by removing the bank residue on the pixel electrode.
- FIG. 10A is a partially enlarged view of a cross section of the organic EL display panel 200 according to Embodiment 2 of the present invention.
- the organic EL display panel of the second embodiment is the same as the organic EL display panel 100 of the first embodiment except that the shape of the bank between the pixels and the buses is different.
- the same components as those of the organic EL display panel 100 are denoted by the same reference numerals, and description thereof is omitted.
- the organic EL display panel 200 includes a pixel-bus bank 207a and an inter-pixel bank 207b.
- FIG. 10B is an enlarged view of a region surrounded by a square X in FIG. 10A.
- the taper angle ⁇ of the inter-pixel bank 207a is smaller than the taper angle ⁇ of the inter-pixel bank 207b.
- the taper angle ⁇ of the bank 207a between the pixels and the bus is preferably 20 ° or more and 30 ° or less, and the taper angle ⁇ of the bank 207b between the pixels is preferably more than 30 ° and 60 ° or less.
- the taper angle of the pixel-bus bank 207a smaller than the taper angle of the inter-pixel bank 207b, the height of the end portion of the organic layer (hole transport layer, organic light emitting layer) can be made uniform. And an organic layer having a uniform film thickness can be obtained.
- the manufacturing method of the organic EL display panel 200 is the same as the manufacturing method of the organic EL display panel 100 except that the bank manufacturing method is different. Accordingly, only the bank manufacturing method of the organic EL display panel 200 manufacturing method will be described below.
- FIGS. 11A to 11E are schematic views showing an example of a method for manufacturing a bank of the organic EL display panel 200.
- the method for manufacturing the bank 207 of the organic EL display panel 200 includes 1) a first step (FIG. 11A) of forming a negative photosensitive resin film 106 on the substrate 101; 2) a second step (FIG. 11B, FIG. 11C) for patterning the bank 207 by exposing and developing the photosensitive resin film 106; and 3) a third step (FIG. 11D) for exposing the inter-pixel bank 207b again. And 4) a fourth step (FIG. 11E) for firing the bank 207 and fixing the bank 207 on the substrate 101.
- a negative photosensitive resin film 106 is formed on the substrate 101 on which the bus electrode 105, the pixel electrode 103, and the hole injection layer 111 are arranged.
- the photosensitive resin composition is applied onto the substrate by spin coating, die coating, slit coating, or the like, and the applied film is baked. That's fine.
- the photosensitive resin film 106 is exposed and developed to pattern the bank 207.
- the bank 207 By patterning the bank 207, the hole injection layer 111 and the bus electrode 105 are exposed.
- the inter-pixel bank 207b is exposed again. This step is performed after the second step and before the fourth step.
- the exposure amount at the time of exposing again is, for example, 300 mJ / cm 2 .
- the patterned bank 207 is baked. As described above, since the glass transition temperature and the elastic modulus of the pixel bank 207b are high, the elastic modulus of the inter-pixel bank 207b is not lowered by the heat of the baking process, and the edge of the inter-pixel bank 207b is not so wide. For this reason, the taper angle of the inter-pixel bank 207b is increased.
- the elastic modulus of the pixel-bus bank 207a is lowered by the heat of the baking process, and the pixel-bus bank The edge of 207a spreads, and the taper angle of the pixel-bus bank 207a becomes smaller. Thereby, the taper angle of the bank between pixels and buses can be made smaller than the taper angle of the bank between pixels.
- an end of a pixel-bus bank side of an organic layer (hole transport layer, organic light emitting layer) formed in a region defined by a pixel-bus bank and an inter-pixel bank is There was a problem of high (see FIG. 2E).
- the taper angle of the pixel-bus bank 207a is made smaller than the taper angle of the inter-pixel bank 207b, thereby increasing the height of the end of the organic layer on the pixel-bus bank 207a side. Can be reduced. Thereby, the film thickness of an organic layer can be made uniform.
- the edge of the organic layer is reduced by making the taper angle of the bank between the pixels and the bus lower than the taper angle of the bank between pixels.
- the height of the portion can be made uniform, and an organic layer having a uniform film thickness can be obtained.
- an organic EL display panel that can suppress variations in the film thickness of the organic layer and has excellent light emission characteristics even when having a bus electrode.
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Abstract
Description
[1]基板と、前記基板上に配列された2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置し、前記基板上に配置されたバス電極と、前記画素電極上に配置された有機層と、前記基板上に配置され、前記有機層の配置領域を規定する2以上のバンクと、前記有機層上に配置され、前記バス電極と接続された対向電極と、を有する有機ELディスプレイパネルであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクとが、含まれ、前記バス電極と前記画素電極との間に配置されたバンクの表面の濡れ性は、前記画素電極間に配置されたバンクの濡れ性よりも低い、有機ELディスプレイパネル。
[2]基板と、前記基板上に配列された2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置し、前記基板上に配置されたバス電極と、前記画素電極上に配置された有機層と、前記基板上に配置され、前記有機層の配置領域を規定する2以上のバンクと、前記有機層上に配置され、前記バス電極と接続された対向電極と、を有する有機ELディスプレイパネルであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ、前記バス電極と前記画素電極との間に配置されたバンクの前記画素電極側のテーパ角度は、前記画素電極間に配置されたバンクのテーパ角度よりも小さい、有機ELディスプレイパネル。
[3]2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置するバス電極と、が配置された基板を準備するステップと;前記基板上に感光性樹脂膜を形成するステップと;前記感光性樹脂膜を露光し、現像して、2以上のバンクをパターニングするステップであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ;前記2以上のバンクを焼成して、前記2以上のバンクを前記基板上に固定するステップと;前記焼成後、前記画素電極間に配置されたバンクのみに選択的に活性光線を照射するステップと;前記2以上のバンクによって規定された領域内の前記画素電極上に有機層の材料を含むインクを塗布して、有機層を形成するステップと;を有する有機ELディスプレイパネルの製造方法。
[4]2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置するバス電極と、が配置された基板を準備するステップと;前記基板上にネガ型の感光性樹脂膜を形成するステップと;前記感光性樹脂膜を露光し、現像して、2以上のバンクをパターニングするステップであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ;前記現像後、前記画素電極間に配置されたバンクのみを再度露光するステップと;前記2以上のバンクを焼成して、前記2以上のバンクを前記基板上に固定するステップと;前記2以上のバンクによって規定された領域内の前記画素電極上に有機層の材料を含むインクを塗布して、有機層を形成するステップと;を有する有機ELディスプレイパネルの製造方法。
本発明の有機ELディスプレイパネルは、基板上にマトリクス状に配置された有機EL素子を有する。各有機EL素子は、画素電極と、画素電極上に配置された有機層と、有機層上に配置された対向電極とを有する。本発明では有機層は塗布法で形成される。
より具体的には、本発明の有機ELディスプレイパネルは、1)基板、2)2以上の画素電極、3)バス電極、4)2以上のバンク、5)2以上の有機層、および6)対向電極を有する。後述するように本発明の有機ELディスプレイパネルは、バンクの性状に特徴を有する。
本発明の有機ELディスプレイパネルの基板は、ボトムエミッション型か、トップエミッション型かによって、その材料が異なる。例えば、ボトムエミッション型の場合は、基板が透明であることが求められる。このような基板の材料の例には、ガラスや透明樹脂などが含まれる。一方、トップエミッション型の場合は、基板が透明である必要はない。この場合、基板は絶縁体であればよい。
画素電極は基板上に配置された導電性部材である。本発明の有機ELディスプレイパネルでは、2以上の画素電極がマトリクス状に配列される。画素電極は、通常陽極として機能するが陰極として機能してもよい。
ボトムエミッション型有機ELディスプレイパネルでは、画素電極が透明であることが求められる。このような画素電極の材料の例には、ITO(酸化インジウム・スズ)やIZO(酸化インジウム・亜鉛)、ZnO(酸化亜鉛)などが含まれる。
トップエミッション型有機ELディスプレイパネルでは、画素電極に光反射性が求められる。このような画素電極の材料の例には、銀を含む合金、より具体的には銀-パラジウム-銅合金(APCとも称する)や銀-ルテニウム-金合金(ARAとも称する)、MoCr(モリブデンクロム)、NiCr(ニッケルクロム)、アルミニウム-ネオジム合金(Al-Ndとも称する)、アルミニウム-ネオジム合金(Al-Ndとも称する)などのアルミニウム系合金などが含まれる。また反射性の画素電極の表面には、ITO膜またはIZO膜が配置されていてもよい。画素電極の厚さは、通常、100~500nmであり、約150nmでありうる。
バス電極は、配線抵抗のばらつきを補正するための導電性部材である。バス電極によってパネル内の各画素に均一な電圧を印加することができる。バス電極は基板上に配置される。バス電極は、後述対向電極と電気的に接続されている。バス電極は、少なくとも一つの画素電極の隣に配置される。バス電極と画素電極とは、後述するバンクによって絶縁されている。バス電極の材料は画素電極の材料と同じであってもよいし、異なってもよい。
バンクは後述する有機層の配置領域を規定する隔壁である。また、バンクは、基板上に配置される。バンクには、バス電極と画素電極との間に配置されたバンク(以下「画素-バス間バンク」とも称する)と、画素電極間に配置されたバンク(以下「画素間バンク」とも称する)とが含まれる。本発明は、画素-バス間バンクの性状と画素間バンクの性状とが異なることを特徴とする。画素-バス間バンクおよび画素間バンクの性状については後述する。
上述したように本発明は、画素-バス間バンクの性状と、画素間バンクの性状とが異なることを特徴とする。ここで「バンクの性状」とは、バンクの表面の濡れ性やバンクのテーパ角度などを意味する。すなわち画素-バス間バンクと画素間バンクとは、濡れ性およびテーパ角度のいずれか一方で異なっていてもよいし、両方で異なっていてもよい。以下異なる性状がi)濡れ性である場合と、ii)バンクのテーパ角度である場合とに分けて、画素-バス間バンクおよび画素間バンクの性状について説明する。
この場合、画素-バス間バンクの表面の濡れ性は、画素間バンクの表面の濡れ性よりも低いことが好ましい。より具体的には、画素-バス間バンクの上面におけるアニソールの接触角は、40°以上55°以下であることが好ましく;一方、画素間バンクの上面におけるアニソールの接触角度は、30°以上40°未満であることが好ましい。また画素-バス間バンクの壁面の濡れ性は、画素間バンクの壁面の濡れ性よりも低いことが好ましい。画素-バス間バンクの濡れ性を画素間バンクの濡れ性よりも低くすることで、画素-バス間バンクと画素間バンクとによって規定された領域内に形成された有機層の端部の高さを均一にすることができ、有機層の膜厚を均一にすることができる(実施の形態1参照)。
この場合画素-バス間バンクの画素電極側のテーパ角度(以下、単に「画素-バス間バンクのテーパ角度」とも称する)は、画素間バンクのテーパ角度よりも小さいことが好ましい。より具体的には、画素-バス間バンクのテーパ角度が20°以上30°以下であることが好ましく、画素間バンクのテーパ角度が30°超60°以下であることが好ましい。画素-バス間バンクのテーパ角度を画素間バンクのテーパ角度よりも小さくすることで、画素-バス間バンクと画素間バンクとによって規定された領域内に形成された有機層の端部の高さを均一にすることができ、有機層の膜厚を均一にすることができる(実施の形態2参照)。
有機層は、少なくとも有機発光層を含み、画素電極上に配置された層である。有機層は、バンクによって規定される領域に有機層の材料液を塗布することで形成される。有機層の材料液(有機層の材料をアニソールやシクロヘキシルベンゼンなどの有機溶媒に溶解したインク)を、インクジェットなどの塗布法によって塗布することによって、容易かつ他の材料に損傷を与えることなく有機層を形成することができる。
対向電極は有機層上に配置される導電性部材である。対向電極は通常陰極として機能する。対向電極の材料は、有機ELディスプレイパネルがボトムエミッション型か、トップエミッション型かによって異なる。トップエミッション型の場合には、対向電極が透明である必要があるので、対向電極の材料の例にはITOやIZOなどが含まれる。さらに、トップエミッション型の場合、有機層と対向電極との間に有機バッファー層を配置してもよい。
本発明の有機ELディスプレイパネルは、本発明の効果を損なわない限り、任意の方法で製造され得る。
1)2以上の画素電極およびバス電極が配置された基板を準備する第1ステップと、
2)基板上に2以上のバンクを形成する第2ステップと、
3)バンクによって規定された領域内に有機層を形成する第3ステップと、
4)有機層上に対向電極を形成する第4ステップと、
を有する。
以下、それぞれのステップについて説明する。
画素-バス間バンクの濡れ性を画素間バンクの濡れ性よりも低くするには、例えば、基板上にバンクを形成した後、画素間バンクのみに活性光線を照射すればよい。画素間バンクのみに活性光線を照射するには、マスクを用いればよい。照射する活性光線の例には、紫外線や電子線、放射線、プラズマなどが含まれる。活性光線は、取り扱いの容易さから、紫外線であることが好ましい。紫外線の例には、波長172nmのエキシマーUVが含まれる。照射時間は、通常2~10秒である。
図4に示されるように、紫外線の照射時間が長いほど、アニソールの接触角が減少(濡れ性が向上)する。具体的には、5秒間の紫外線照射によって、バンクの表面におけるアニソールの接触角は、約10°減少する。このように、画素間バンクに紫外線を照射することによって画素間バンクの濡れ性を高めることができる。これにより画素-バス間バンクの濡れ性を画素間バンクの濡れ性よりも低くすることができる。
画素-バス間バンクのテーパ角度を画素間バンクのテーパ角度よりも小さくする手段は特に限定されないが、感光性樹脂膜をネガ型の感光性樹脂膜とし、ステップiiの後、ステップiiiの前に、画素間バンクのみを再度露光すればよい。画素間バンクを再度露光することにより、画素間バンクのガラス転移温度および弾性率が上昇する。再度露光することによって、バンクのガラス転移温度および弾性率が上昇するメカニズムは、特に限定されないが、ステップiiの露光において十分に光重合および光硬化しなかった樹脂材料が、再度露光することにより、さらに光重合および光硬化するためである。再度露光する際の、露光量は特に限定されないが、例えば200~400mJ/cm2であり、約300mJ/cm2であることが好ましい。
この結果、液滴端部131がバンク107の壁面上に固定される位置の高さ(有機層の端部の高さ)が低くなる。このようにバンクの濡れ性を低くした場合、濡れ性を低くしたバンクの壁面上の有機層の端部の高さを低くできる。
この結果、液滴端部131がバンク107の壁面上に固定される位置の高さ(有機層の端部の高さ)が低くなる。このようにバンクのテーパ角度を小さくした場合、テーパ角度を小さくしたバンクの壁面上の有機層の端部の高さを低くできる。
実施の形態1では、画素-バス間バンクの濡れ性が低い態様について説明する。また、実施の形態1の有機ELディスプレイパネルは、トップエミッション型である。
実施の形態1では、画素-バス間バンクの濡れ性が画素間バンクの濡れ性よりも低い形態について説明した。実施の形態2では、画素-バス間バンクのテーパ角度が画素間バンクのテーパ角度よりも小さい例について説明する。
101 基板
103 画素電極
105 バス電極
106 感光性樹脂膜
107 バンク
107a、207a 画素-バス間バンク
107b、207b 画素間バンク
109 有機層
111 正孔注入層
113 正孔輸送層
115 有機発光層
117 対向電極
119 封止膜
120 マスク
130 材料液
131 液滴端部
Claims (10)
- 基板と、
前記基板上に配列された2以上の画素電極と、
少なくとも一つの前記画素電極の隣に位置し、前記基板上に配置されたバス電極と、
前記画素電極上に配置された有機層と、
前記基板上に配置され、前記有機層の配置領域を規定する2以上のバンクと、
前記有機層上に配置され、前記バス電極と接続された対向電極と、を有する有機ELディスプレイパネルであって、
前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクとが、含まれ、
前記バス電極と前記画素電極との間に配置されたバンクの表面の濡れ性は、前記画素電極間に配置されたバンクの濡れ性よりも低い、有機ELディスプレイパネル。 - 前記画素電極間に配置されたバンクの上面におけるアニソールの接触角は、30°以上40°未満であり、
前記バス電極と前記画素電極との間に配置されたバンクの上面におけるアニソールの接触角は、40°以上55°以下である、請求項1に記載の有機ELディスプレイパネル。 - 前記2以上のバンクは、それぞれフッ素含有樹脂を含む、請求項1に記載の有機ELディスプレイパネル。
- 前記画素電極上に配置された正孔注入層をさらに有し、
前記有機層は、前記正孔注入層上に配置された正孔輸送層と、前記正孔輸送層上に配置された有機発光層とを含む、請求項1に記載の有機ELディスプレイパネル。 - 基板と、
前記基板上に配列された2以上の画素電極と、
少なくとも一つの前記画素電極の隣に位置し、前記基板上に配置されたバス電極と、
前記画素電極上に配置された有機層と、
前記基板上に配置され、前記有機層の配置領域を規定する2以上のバンクと、
前記有機層上に配置され、前記バス電極と接続された対向電極と、を有する有機ELディスプレイパネルであって、
前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ、
前記バス電極と前記画素電極との間に配置されたバンクの前記画素電極側のテーパ角度は、前記画素電極間に配置されたバンクのテーパ角度よりも小さい、有機ELディスプレイパネル。 - 前記バス電極と前記画素電極との間に配置されたバンクの前記画素電極側のテーパ角度は、20°以上30°以下であり、
前記画素電極間に配置されたバンクのテーパ角度は、30°超60°以下である、請求項5に記載の有機ELディスプレイパネル。 - 前記2以上のバンクは、それぞれフッ素含有樹脂を含む、請求項5に記載の有機ELディスプレイパネル。
- 前記画素電極上に配置された正孔注入層をさらに有し、
前記有機層は、前記正孔注入層上に配置された正孔輸送層と、前記正孔輸送層上に配置された有機発光層とを含む、請求項5に記載の有機ELディスプレイパネル。 - 2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置するバス電極と、が配置された基板を準備するステップと;
前記基板上に感光性樹脂膜を形成するステップと;
前記感光性樹脂膜を露光し、現像して、2以上のバンクをパターニングするステップであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ;
前記2以上のバンクを焼成して、前記2以上のバンクを前記基板上に固定するステップと;
前記焼成後、前記画素電極間に配置されたバンクのみに選択的に活性光線を照射するステップと;
前記2以上のバンクによって規定された領域内の前記画素電極上に有機層の材料を含むインクを塗布して、有機層を形成するステップと;を有する有機ELディスプレイパネルの製造方法。 - 2以上の画素電極と、少なくとも一つの前記画素電極の隣に位置するバス電極と、が配置された基板を準備するステップと;
前記基板上にネガ型の感光性樹脂膜を形成するステップと;
前記感光性樹脂膜を露光し、現像して、2以上のバンクをパターニングするステップであって、前記2以上のバンクには、前記バス電極と前記画素電極との間に配置されたバンクと、前記画素電極間に配置されたバンクと、が含まれ;
前記現像後、前記画素電極間に配置されたバンクのみを再度露光するステップと;
前記2以上のバンクを焼成して、前記2以上のバンクを前記基板上に固定するステップと;
前記2以上のバンクによって規定された領域内の前記画素電極上に有機層の材料を含むインクを塗布して、有機層を形成するステップと;を有する有機ELディスプレイパネルの製造方法。
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US13/132,171 US20110233572A1 (en) | 2009-06-04 | 2010-05-11 | Organic el display panel and method for manufacturing same |
EP10783089.5A EP2391187B1 (en) | 2009-06-04 | 2010-05-11 | Organic el display panel and method for manufacturing same |
CN201080002165.2A CN102106186B (zh) | 2009-06-04 | 2010-05-11 | 有机电致发光显示面板 |
JP2010534308A JP4621818B1 (ja) | 2009-06-04 | 2010-05-11 | 有機elディスプレイパネルおよびその製造方法 |
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EP2391187A4 (en) | 2012-07-04 |
CN102106186A (zh) | 2011-06-22 |
US20110233572A1 (en) | 2011-09-29 |
EP2391187B1 (en) | 2013-04-24 |
EP2391187A1 (en) | 2011-11-30 |
JPWO2010140301A1 (ja) | 2012-11-15 |
CN102106186B (zh) | 2014-04-09 |
JP4621818B1 (ja) | 2011-01-26 |
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