US9103017B2 - Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method - Google Patents
Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method Download PDFInfo
- Publication number
- US9103017B2 US9103017B2 US14/355,946 US201214355946A US9103017B2 US 9103017 B2 US9103017 B2 US 9103017B2 US 201214355946 A US201214355946 A US 201214355946A US 9103017 B2 US9103017 B2 US 9103017B2
- Authority
- US
- United States
- Prior art keywords
- layer
- thin film
- transition metal
- bottom electrode
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 200
- 238000000034 method Methods 0.000 title claims description 184
- 230000015572 biosynthetic process Effects 0.000 title claims description 85
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 143
- 150000003624 transition metals Chemical class 0.000 claims abstract description 143
- 238000002347 injection Methods 0.000 claims abstract description 72
- 239000007924 injection Substances 0.000 claims abstract description 72
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 56
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 52
- 239000000956 alloy Substances 0.000 claims abstract description 52
- 239000000463 material Substances 0.000 claims abstract description 52
- 229910052709 silver Inorganic materials 0.000 claims abstract description 44
- 239000004332 silver Substances 0.000 claims abstract description 44
- 239000000203 mixture Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims description 85
- 239000002184 metal Substances 0.000 claims description 85
- 238000004544 sputter deposition Methods 0.000 claims description 71
- 229910052760 oxygen Inorganic materials 0.000 claims description 63
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 57
- 239000001301 oxygen Substances 0.000 claims description 57
- 239000004411 aluminium Substances 0.000 claims description 50
- 239000002245 particle Substances 0.000 claims description 48
- 239000010408 film Substances 0.000 claims description 42
- 229910052721 tungsten Inorganic materials 0.000 claims description 37
- 229910000314 transition metal oxide Inorganic materials 0.000 claims description 35
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 27
- 239000010937 tungsten Substances 0.000 claims description 26
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 24
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 13
- 230000001590 oxidative effect Effects 0.000 claims description 13
- 229910052786 argon Inorganic materials 0.000 claims description 12
- 239000011261 inert gas Substances 0.000 claims description 12
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 239000011733 molybdenum Substances 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 285
- 238000010586 diagram Methods 0.000 description 38
- -1 polyethylene Polymers 0.000 description 37
- 238000007254 oxidation reaction Methods 0.000 description 33
- 239000013077 target material Substances 0.000 description 33
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 28
- 238000005546 reactive sputtering Methods 0.000 description 25
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 22
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 16
- 229910001882 dioxygen Inorganic materials 0.000 description 16
- 238000002834 transmittance Methods 0.000 description 16
- 238000010849 ion bombardment Methods 0.000 description 14
- 239000011521 glass Substances 0.000 description 11
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 9
- 230000005525 hole transport Effects 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 239000000565 sealant Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000004458 analytical method Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 6
- 238000000635 electron micrograph Methods 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 239000002344 surface layer Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000002585 base Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 3
- 229920000178 Acrylic resin Polymers 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 3
- 206010021143 Hypoxia Diseases 0.000 description 3
- 150000004696 coordination complex Chemical class 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- GPPXJZIENCGNKB-UHFFFAOYSA-N vanadium Chemical compound [V]#[V] GPPXJZIENCGNKB-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 239000005725 8-Hydroxyquinoline Substances 0.000 description 1
- 239000005964 Acibenzolar-S-methyl Substances 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- WDECIBYCCFPHNR-UHFFFAOYSA-N Chrysene Natural products C1=CC=CC2=CC=C3C4=CC=CC=C4C=CC3=C21 WDECIBYCCFPHNR-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- YNPNZTXNASCQKK-UHFFFAOYSA-N Phenanthrene Natural products C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 1
- 229910000544 Rb alloy Inorganic materials 0.000 description 1
- 239000002262 Schiff base Substances 0.000 description 1
- 150000004753 Schiff bases Chemical class 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- PJANXHGTPQOBST-VAWYXSNFSA-N Stilbene Natural products C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 1
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 description 1
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Natural products C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 1
- BBEAQIROQSPTKN-UHFFFAOYSA-N antipyrene Natural products C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 1
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 1
- DZBUGLKDJFMEHC-UHFFFAOYSA-N benzoquinolinylidene Natural products C1=CC=CC2=CC3=CC=CC=C3N=C21 DZBUGLKDJFMEHC-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000005385 borate glass Substances 0.000 description 1
- 229960005057 canrenone Drugs 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229960000956 coumarin Drugs 0.000 description 1
- 235000001671 coumarin Nutrition 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- VPUGDVKSAQVFFS-UHFFFAOYSA-N hexabenzobenzene Natural products C1=C(C2=C34)C=CC3=CC=C(C=C3)C4=C4C3=CC=C(C=C3)C4=C2C3=C1 VPUGDVKSAQVFFS-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- UFWIBTONFRDIAS-UHFFFAOYSA-N naphthalene-acid Natural products C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 1
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N o-biphenylenemethane Natural products C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 229960003540 oxyquinoline Drugs 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 239000005365 phosphate glass Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- JEXVQSWXXUJEMA-UHFFFAOYSA-N pyrazol-3-one Chemical class O=C1C=CN=N1 JEXVQSWXXUJEMA-UHFFFAOYSA-N 0.000 description 1
- 150000003219 pyrazolines Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- KAKZBPTYRLMSJV-UHFFFAOYSA-N vinyl-ethylene Natural products C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0084—Producing gradient compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
-
- C23C4/105—
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
-
- H01L51/001—
-
- H01L51/5008—
-
- H01L51/5088—
-
- H01L51/5206—
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/865—Intermediate layers comprising a mixture of materials of the adjoining active layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/818—Reflective anodes, e.g. ITO combined with thick metallic layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H01L2251/5315—
-
- H01L27/3246—
-
- H01L51/5218—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3026—Top emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
- H10K59/80518—Reflective anodes, e.g. ITO combined with thick metallic layers
Definitions
- the present invention relates to organic display panels, organic display devices, organic light emitting devices, methods of manufacture thereof, and thin film formation methods.
- Organic light emitting elements used as light sources in organic display panels, organic display devices, organic light emitting devices, etc. are light emitting elements that make use of electroluminescence in organic material.
- a top emission type organic light emitting element for example, a thin layer (bottom electrode) composed of aluminium, silver, or similar, is formed on a substrate composed of glass. Further, on the thin layer are layers including a hole-injection layer composed of an oxide of a transition metal, an organic light emitting layer composed of a polymer material, an electron-injection layer composed of barium, and a top electrode composed of aluminium.
- the hole-injection layer of such an organic light emitting element is, for example, formed by reactive sputtering using oxygen plasma and a target material composed of a transition metal.
- a substrate 904 on which a bottom electrode 903 is formed is set up on a substrate holder 902 that is positioned inside a vacuum container 901
- a target material 906 is set up on a target material holder 905 that is positioned inside the same vacuum container 901 .
- argon gas and oxygen gas is supplied to the vacuum container 901 and sputtering is performed.
- FIG. 23A argon gas and oxygen gas is supplied to the vacuum container 901 and sputtering is performed.
- a surface of the target material 906 is oxidized, forming a surface layer 906 a composed of an oxide of the transition metal, and, as shown in FIG. 23D , the oxide of the surface layer 906 a of the target material 906 is transferred to the bottom electrode 903 , forming a hole-injection layer 907 .
- oxygen plasma used in reactive sputtering has the characteristic of very easily oxidizing aluminium, silver, etc.
- an oxidized film 908 formed by oxidation of aluminium, silver, or similar is often formed on a surface of the bottom electrode 903 .
- This is a cause of a decrease in light emission efficiency of such an organic light emitting element.
- the light emission efficiency of the organic light emitting element is decreased due to the oxidized film 908 impeding light reflection of the bottom electrode 903 , which is a reflective electrode.
- the oxidized film 908 composed of aluminium oxide since the oxidized film 908 has a characteristic of high electrical resistance, the drive voltage of the organic light emitting element increases, causing the light emission efficiency of the organic light emitting element to decrease.
- an organic light emitting element in which formation of the oxidized film 908 on a surface of the bottom electrode 903 is unlikely, an organic light emitting element has been proposed in which a light-transmissive electrically-conductive layer composed of indium tin oxide (ITO) or similar is formed on the bottom electrode 903 (Patent Literature 1).
- ITO indium tin oxide
- Patent Literature 1 Japanese Patent Application Publication No. 2009-277788
- the oxygen plasma results in formation of the oxidized film 908 on the surface of the bottom electrode 903 .
- the light-transmissive electrically-conductive layer is formed without using oxygen plasma, if the light-transmissive electrically-conductive layer and the bottom electrode 903 are in contact with each other, the aluminium, silver, or similar at the surface of the bottom electrode 903 takes oxygen from the light-transmissive electrically-conductive layer and oxidizes.
- the oxidized film 908 is formed on the surface of the bottom electrode 903 . Accordingly, even if the light-transmissive electrically-conductive layer is formed, a decrease in light emission efficiency of the organic light emitting element cannot be sufficiently suppressed. Thus, the reality is that it is difficult to obtain an organic display panel having high luminance.
- the present invention in view of the above problem, has a primary aim of providing an organic display panel, organic display device, and organic light emitting device, all having high luminance, and a method of manufacture thereof. Further, another aim of the present invention is to provide a formation method of a thin film, upon a surface of which formation of an oxidized film is unlikely.
- an organic display panel pertaining to one aspect of the present invention comprises an organic light emitting element that includes a bottom electrode, a hole-injection layer, an organic light emitting layer, and a top electrode layered in the stated order on a substrate, wherein the bottom electrode is composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, the hole-injection layer contains an oxide of a transition metal, and the organic light emitting element further includes a mixed oxidized thin film interposed between and in contact with the bottom electrode and the hole-injection layer, the mixed oxidized thin film being composed of an oxidized mixture of the same material as the material in the bottom electrode and the same transition metal as the transition metal in the hole-injection layer.
- the organic display panel pertaining to one aspect of the present invention has a high luminance, since the mixed oxidized thin film is interposed between and in contact with the bottom electrode and the hole-injection layer.
- the mixed oxidized thin film is composed of an oxidized mixture of the same material as the material in the bottom electrode, and the same transition metal as the transition metal in the hole-injection layer.
- FIG. 1 is a schematic diagram showing an organic display panel pertaining to one aspect of the present invention.
- FIG. 2 is a perspective diagram showing a television system using an organic display device pertaining to one aspect of the present invention.
- FIG. 3 is a diagram showing an overall structure of the organic display device pertaining to one aspect of the present invention.
- FIGS. 4A and 4B are diagrams showing an organic light emitting device pertaining to one aspect of the present invention.
- FIGS. 5A through 5G are process diagrams for describing a formation process of an organic light emitting element.
- FIGS. 6A through 6E are process diagrams for describing the formation process of the organic light emitting element.
- FIG. 7 is a schematic diagram showing a thin film formation device.
- FIGS. 8A through 8G are process diagrams for describing a thin film formation method pertaining to embodiment 1.
- FIGS. 9A and 9B are conceptual diagrams for describing an oxidization process for producing a mixed oxidized thin film pertaining to embodiment 1.
- FIGS. 10A through 10H are process diagrams for describing a thin film formation method pertaining to embodiment 2.
- FIGS. 11A and 11B are conceptual diagrams for describing an oxidization process for producing a mixed oxidized thin film pertaining to embodiment 2.
- FIGS. 12A through 12G are process diagrams for describing a thin film formation method pertaining to embodiment 3.
- FIGS. 13A and 13B are conceptual diagrams for describing an oxidization process of a mixed oxidized thin film pertaining to embodiment 3.
- FIGS. 14A through 14C are electron micrographs showing cross-sections near surfaces of bottom electrodes.
- FIGS. 15A through 15C are diagrams showing results of EDS analysis of an oxidized film and a mixed oxidized thin film.
- FIG. 16 is an electron micrograph of a case in which an average thickness of the mixed oxidized thin film is 3 nm.
- FIGS. 17A through 17C are diagrams showing results of EDS analysis of cases in which the average thickness of the mixed oxidized thin film is 3 nm.
- FIG. 18 is an electron micrograph of a case in which the average thickness of the mixed oxidized thin film is 5 nm.
- FIGS. 19A through 19C are diagrams showing results of EDS analysis of cases in which the average thickness of the mixed oxidized thin film is 5 nm.
- FIGS. 20A and 20B are diagrams for describing oxidization of a transition metal deposited on the surface of the bottom electrode, due to reactive sputtering.
- FIG. 21 is a diagram showing measurements of drive voltages of organic light emitting elements.
- FIG. 22 is a diagram showing measurements of light emission efficiency of organic light emitting elements.
- FIGS. 23A through 23D are process diagrams for describing a conventional thin film formation method.
- the organic display panel pertaining to one aspect of the present invention comprises an organic light emitting element that includes a bottom electrode, a hole-injection layer, an organic light emitting layer, and a top electrode layered in the stated order on a substrate, wherein the bottom electrode is composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, the hole-injection layer contains an oxide of a transition metal, and the organic light emitting element further includes a mixed oxidized thin film interposed between and in contact with the bottom electrode and the hole-injection layer, the mixed oxidized thin film being composed of an oxidized mixture of the same material as the material in the bottom electrode and the same transition metal as the transition metal in the hole-injection layer.
- the mixed oxidized thin film may have a film thickness that allows the transition metal in the mixed oxidized thin film to oxidize into an oxide of the transition metal.
- the transition metal may be tungsten, molybdenum, or nickel.
- An organic display device pertaining to one aspect of the present invention comprises an organic light emitting element that includes a bottom electrode, a hole-injection layer, an organic light emitting layer, and a top electrode layered in the stated order on a substrate, wherein the bottom electrode is composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, the hole-injection layer contains an oxide of a transition metal, and the organic light emitting element further includes a mixed oxidized thin film interposed between and in contact with the bottom electrode and the hole-injection layer, the mixed oxidized thin film being composed of an oxidized mixture of the same material as the material in the bottom electrode and the same transition metal as the transition metal in the hole-injection layer.
- An organic light emitting device pertaining to one aspect of the present invention comprises an organic light emitting element that includes a bottom electrode, a hole-injection layer, an organic light emitting layer, and a top electrode layered in the stated order on a substrate, wherein the bottom electrode is composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, the hole-injection layer contains an oxide of a transition metal, and the organic light emitting element further includes a mixed oxidized thin film interposed between and in contact with the bottom electrode and the hole-injection layer, the mixed oxidized thin film being composed of an oxidized mixture of the same material as the material in the bottom electrode and the same transition metal as the transition metal in the hole-injection layer.
- a manufacturing method of an organic display panel pertaining to one aspect of the present invention comprises: placing in a vacuum container a substrate on which a bottom electrode has been formed and a target member, the bottom electrode being composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, and the target member being composed of a transition metal or an alloy of the transition metal; sputtering the target member under a first condition in which oxygen is not present in the vacuum container or is present at a level that does not oxidize the bottom electrode, depositing sputter particles of the transition metal on a surface of the bottom electrode; and after sputtering under the first condition, sputtering the target member under a second condition in which oxygen is present in the vacuum container at a level that oxidizes the bottom electrode, oxidizing the material and the deposited transition metal in a mixed state and forming a mixed oxidized thin film on the bottom electrode.
- a manufacturing method of an organic display device pertaining to one aspect of the present invention comprises: placing in a vacuum container a substrate on which a bottom electrode has been formed and a target member, the bottom electrode being composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, and the target member being composed of a transition metal or an alloy of the transition metal; sputtering the target member under a first condition in which oxygen is not present in the vacuum container or is present at a level that does not oxidize the bottom electrode, depositing sputter particles of the transition metal on a surface of the bottom electrode; and after sputtering under the first condition, sputtering the target member under a second condition in which oxygen is present in the vacuum container at a level that oxidizes the bottom electrode, oxidizing the material and the deposited transition metal in a mixed state and forming a mixed oxidized thin film on the bottom electrode.
- a manufacturing method of an organic light emitting device pertaining to one aspect of the present invention comprises: placing in a vacuum container a substrate on which a bottom electrode has been formed and a target member, the bottom electrode being composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, and the target member being composed of a transition metal or an alloy of the transition metal; sputtering the target member under a first condition in which oxygen is not present in the vacuum container or is present at a level that does not oxidize the bottom electrode, depositing sputter particles of the transition metal on a surface of the bottom electrode; and after sputtering under the first condition, sputtering the target member under a second condition in which oxygen is present in the vacuum container at a level that oxidizes the bottom electrode, oxidizing the material and the deposited transition metal in a mixed state and forming a mixed oxidized thin film on the bottom electrode.
- a thin film formation method pertaining to one aspect of the present invention comprises: placing in a vacuum container a substrate on which a thin layer has been formed and a target member, the thin layer being composed of a material that is aluminium, silver, or an alloy including at least one of aluminium and silver, and the target member being composed of a transition metal or an alloy of the transition metal; sputtering the target member under a first condition in which oxygen is not present in the vacuum container or is present at a level that does not oxidize the thin layer, depositing sputter particles of the transition metal on a surface of the thin layer; and after sputtering under the first condition, sputtering the target member under a second condition in which oxygen is present in the vacuum container at a level that oxidizes the thin layer, oxidizing the material and the deposited transition metal in a mixed state and forming a mixed oxidized thin film on the thin layer.
- the sputtering under the first condition may form a mixed layer on the thin layer, the mixed layer being composed of a mix of the material and the transition metal, and the sputtering under the second condition may oxidize the mixed layer, forming the mixed oxidized thin film.
- the mixed layer may have an average thickness equal to or less than 5 nm.
- the sputtering under the first condition may form a mixed layer and a metal layer on the thin layer, the mixed layer being composed of a mix of the material and the transition metal, the metal layer being composed of the transition metal and formed on the mixed layer, and the sputtering under the second condition may mix and oxidize the mixed layer and the metal layer, forming the mixed oxidized thin film.
- a sum of the average thickness of the mixed layer and the average thickness of the metal layer may be equal to or less than 3 nm, and the average thickness of the metal layer may be equal to or less than 1 nm.
- the sputtering under the first condition may form a metal layer composed of the transition metal on the thin layer, and the sputtering under the second condition may oxidize the metal layer, forming the mixed oxidized thin film.
- the metal layer may have an average thickness equal to or less than 1 nm.
- sputtering under the second condition may be performed after the forming of the mixed oxidized thin film, depositing sputter particles of an oxide of the transition metal on the mixed oxidized thin film and forming a transition metal oxide layer on the mixed oxidized thin film.
- the transition metal oxide layer may have hole injection properties.
- the transition metal may be tungsten, molybdenum, or nickel.
- the sputtering under the first condition may be performed by using plasma of an inert gas.
- the inert gas may be argon gas.
- FIG. 1 is a schematic diagram showing an organic display panel pertaining to one aspect of the present invention.
- an organic display panel 110 pertaining to one aspect of the present invention is an organic EL display panel that has a structure of a color filter substrate 113 bonded onto an organic light emitting element 111 via a seal material 112 .
- the organic light emitting element 111 is a top emission type organic light emitting element positioned as an RGB-type sub-pixel in a line state or matrix state.
- Each sub-pixel has a layered structure in which a planarizing layer 2 , a bottom electrode 3 , a mixed oxidized thin film 4 , a hole-injection layer 5 , a bank 6 , a hole transport layer 7 , an organic light emitting layer 8 , an electron transport layer 9 , a top electrode 10 , and a sealant layer 11 are layered on a substrate 1 .
- the substrate 1 is, for example, a thin film transistor array substrate.
- the substrate 1 is formed, for example, by a base substrate and an organic light emitting element drive circuit on the base substrate.
- the base substrate is composed of an insulating material, such as alkali-free glass, soda glass, non-fluorescent glass, phosphate glass, borate glass, quartz, acrylic resin, styrene resin, polycarbonate resin, epoxy resin, polyethylene, polyester, silicone resin, alumina, etc.
- the planarizing layer 2 is, for example, composed of an organic material such as acrylic resin, polyimide resin, novolac phenolic resin, etc. or an inorganic material such as silicon dioxide (SiO 2 ), silicon nitride (Si 3 N 4 ), etc.
- the planarizing layer 2 has a function of ensuring uniformity of thickness of upper layers by planarizing surface unevenness of the substrate 1 .
- the bottom electrode 3 is one example of a thin layer composed of a metal that is aluminium or silver, or an alloy including at least one of aluminium and silver.
- the bottom electrode 3 may be composed of an aluminium alloy, a silver alloy, an alloy of silver, palladium, and copper, an alloy of silver, rubidium, and gold, etc.
- the bottom electrode 3 is a pixel electrode formed in a line state or a matrix state on the planarizing layer 2 . Note that in a case in which the bottom electrode 3 is caused to function as a reflective electrode, the bottom electrode 3 is preferably composed of a highly reflective material.
- the mixed oxidized thin film 4 is a thin film composed of the material composing the bottom electrode 3 , i.e., a metal that is aluminium or silver, or an alloy containing at least one of aluminium or silver (hereafter, “the metal or alloy”), and a transition metal that the hole-injection layer 5 is composed of, oxidized in a mixed state.
- the mixed oxidized thin film 4 has a function of suppressing oxidization of a surface (the surface facing the mixed oxidized thin film 4 ) of the bottom electrode 3 that causes formation of an oxide film composed of an oxide of the metal or alloy on the surface of the bottom electrode 3 .
- the mixed oxidized thin film 4 has a characteristic such that the likelihood is low of oxygen being taken from the mixed oxidized thin film 4 by the metal or alloy of the surface of the bottom electrode 3 .
- the mixed oxidized thin film 4 has a high light transmittance, the mixed oxidized thin film 4 does not interfere with light reflection from the bottom electrode 3 .
- the mixed oxidized thin film 4 has a low electrical resistance, the mixed oxidized thin film 4 is unlikely to increase drive voltage.
- the mixed oxidized thin film 4 does not decrease the light emission efficiency of the organic light emitting element 111 .
- the hole-injection layer 5 is composed of an oxide of a transition metal or an oxide of an alloy of the transition metal.
- the transition metal is an element from group 3 to group 11 on the periodic table.
- a transition metal that has a high hole-injection property after oxidization is preferred, such as tungsten, molybdenum, nickel, titanium, vanadium, chromium, manganese, iron, cobalt, niobium, hafnium, tantalum, etc.
- tungsten, molybdenum, and nickel are appropriate for forming the hole-injection layer 5 so as to have a high hole-injection property, since they easily form a hole-injection layer 5 that has oxygen deficiency when sputtering is performed under a condition where oxygen is present.
- the bank 6 is, for example, composed of an organic material such as acrylic resin, polyimide resin, novolac phenolic resin, etc., or an inorganic material such as SiO 2 , Si 3 N 4 , etc.
- the bank 6 defines a sub-pixel.
- the hole transport layer 7 and the organic light emitting layer 8 are layered in the stated order in an area defined by the bank 6 .
- the electron transport layer 9 , the top electrode 10 , and the sealant layer 11 are layered in the stated order, such that they extend beyond the area defined by the bank 6 , so as be continuous with the corresponding layers of an adjacent sub-pixel.
- the hole transport layer 7 is, for example, composed of poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT-PSS), a derivative (copolymer, etc.) of PEDOT-PSS, or similar.
- the hole transport layer 7 has a function of transporting holes injected from the bottom electrode 3 to the organic light emitting layer 8 .
- the organic light emitting layer 8 is, for example, composed of poly(9,9-di-n-octylfluorene-alt-benzothiadiazole) (F8BT), and has a function of emitting light using electroluminescence.
- the organic light emitting layer 8 is not limited to being composed of F8BT, and may have a structure that includes a well-known organic material.
- the organic light emitting layer 8 may be composed of a fluorescent substance such as an oxinoid compound, perylene compound, coumarin compound, azacoumarin compound, oxazole compound, oxadiazole compound, perinone compound, pyrrolo-pyrrole compound, naphthalene compound, anthracene compound, fluorene compound, fluoranthene compound, tetracene compound, pyrene compound, coronene compound, quinolone compound and azaquinolone compound, pyrazoline derivative and pyrazolone derivative, rhodamine compound, chrysene compound, phenanthrene compound, cyclopentadiene compound, stilbene compound, diphenylquinone compound, styryl compound, butadiene compound, dicyanomethylene pyran compound, dicyanom
- the electron transport layer 9 is, for example, composed of barium, phthalocyanine, lithium fluoride, a mix thereof, or similar.
- the electron transport layer 9 has a function of transporting electrons injected from the top electrode 10 to the organic light emitting layer 8 .
- the top electrode 10 is, for example, composed of ITO, indium zinc oxide (IZO), or similar. In the case of a top emission type of organic light emitting element, the top electrode 10 is preferably composed of a material that is light transmissive.
- the sealant layer 11 is, for example, composed of silicon nitride (SiN), silicon oxynitride (SiON), or similar.
- the sealant layer 11 has a function of suppressing exposure of the organic light emitting layer 8 , etc., to water, air, etc.
- the sealant layer 11 is preferably formed from a material that is light transmissive.
- the organic light emitting element 111 composed of the above structure is characterized in that an oxidized film composed of an oxide of the metal or alloy on the surface of the bottom electrode 3 is not substantially formed. Since an oxidized film on the surface of the bottom electrode 3 is not substantially formed, the organic light emitting element 111 has a high light emission efficiency.
- the organic light emitting element 111 is characterized in that the mixed oxidized thin film 4 is interposed between the bottom electrode 3 and the hole-injection layer 5 in a state of contact with the bottom electrode 3 and the hole-injection layer 5 .
- the mixed oxidized thin film 4 is characterized by not accelerating oxidization of the surface of the bottom electrode 3 , in addition to not decreasing the light emission efficiency of the organic light emitting element 111 due to having a high light transmittance and low electrical resistance.
- FIG. 2 is a perspective diagram showing a television system using an organic display device pertaining to one aspect of the present invention.
- an organic display device 100 pertaining to one aspect of the present invention is an organic EL display in which pixels that each emit one of red (R), green (G), and blue (B) light are regularly positioned in a matrix in a row direction and a column direction, and each pixel is formed by an organic EL element.
- FIG. 3 is a diagram showing an overall structure of the organic display device pertaining to one aspect of the present invention.
- the organic display device 100 pertaining to one aspect of the present invention includes the organic display panel 110 and a drive controller 120 that is connected to the organic display panel 110 .
- the drive controller 120 is formed from four drive circuits 121 - 124 , and a control circuit 125 . Note that in an actual implementation of the organic display device 100 , the positions and connections of the drive controller 120 relative to the organic display panel 110 are not limited in this way.
- the organic display device 100 composed of the above structure has a high luminance since it uses the organic light emitting element 111 , which has a high light emission efficiency.
- the organic display device pertaining to one aspect of the present invention is not limited to being an organic EL display device, and may be an inorganic EL display device, or another type of organic display device.
- FIGS. 4A and 4B are diagrams showing an organic light emitting device pertaining to one aspect of the present invention.
- FIG. 4A is a longitudinal section and FIG. 4B is a cross-section.
- an organic light emitting device 200 is an organic EL light emitting device formed from a plurality of organic light emitting elements 210 that each have a layered structure similar to that of the organic light emitting element 111 , a base 220 on an upper surface of which the organic light emitting elements 210 are mounted, and a pair of reflective members 230 that are attached to the base 220 so that the organic light emitting elements 210 are positioned therebetween.
- Each of the organic light emitting elements 210 is electrically connected to a conductive pattern (not illustrated) formed on the base 220 , and emits light due to drive power supplied by the conductive pattern. A portion of light emitted from each organic light emitting element 210 is redistributed by the reflective members 230 .
- the organic light emitting device 200 composed of the above structure has a high luminance since it uses the organic light emitting elements 210 , which have a high light emission efficiency.
- the organic light emitting device pertaining to one aspect of the present invention is not limited to being an organic EL light emitting device, and may be an inorganic EL light emitting device, or another type of organic light emitting device.
- a method of manufacture of the organic display panel, the organic display device, and the organic light emitting device, each of which pertains to one aspect of the present invention, is characterized by a formation process of an organic light emitting element thereof, and therefore only the formation process of the organic light emitting element is described below.
- FIGS. 5A-5G and 6 A- 6 E are process diagrams for describing the formation process of the organic light emitting element.
- the substrate 1 is prepared, which has a protective resist protecting an upper surface thereof as shown in FIG. 5A .
- the planarizing layer 2 (having a thickness of, for example, 3-4.5 ⁇ m) is formed on the substrate 1 , by performing a spin coating of organic resin, and photoresist/photo etching (PR/PE) patterning.
- PR/PE photoresist/photo etching
- a thin layer 3 a containing aluminium or silver is formed on the planarizing layer 2 .
- the thin layer 3 a is, for example, formed from APC by performing sputtering using APC and has, for example, a thickness of 100-400 nm. Note that the thin layer 3 a may be formed by vacuum deposition, etc.
- a layer (having a thickness of, for example, equal to or less than 5 nm) composed of a mix of the aluminium or silver in the thin layer 3 a and a transition metal is formed on the thin layer 3 a .
- a mixed layer 4 a and the bottom electrode 3 are formed. The second process is described in detail later in this document.
- the mixed layer 4 a is oxidized to form the mixed oxidized thin film 4 (having a thickness of, for example, equal to or less than 5 nm), and the hole-injection layer 5 is formed from above the mixed oxidized thin film 4 .
- the third process is described in detail later in this document.
- the hole-injection layer 5 is not only formed above the bottom electrode 3 , but is formed above the entire upper surface of the substrate 1 .
- the hole-injection layer 5 is formed by (i) forming a layer composed of an oxide of a transition metal by reactive sputtering and (ii) patterning the layer by PR/PE.
- the hole-injection layer 5 has, for example, a thickness of 5-50 nm.
- the bank 6 is formed on the hole-injection layer 5 .
- An area on the hole-injection layer 5 in which the bank 6 is formed 5 is an area corresponding to a boundary between areas in which adjacent organic light emitting layers are to be formed.
- the bank 6 is formed by (i) forming a bank material layer covering the entirety of the hole-injection layer 5 and (ii) removing a portion of the bank material layer so formed by PR/PE.
- the bank 6 has, for example, a thickness of 1-1.5 ⁇ m. Note that the bank 6 may extend in the row direction or column direction, forming a stripe in a line bank structure. Alternatively, the bank 6 may extend in the row direction and the column direction, forming a pixel bank structure, which has a grid shape in plan view.
- the hole transport layer 7 is formed by filling a concavity bounded by the bank 6 with ink that includes material for a hole transport layer, then desiccating the ink.
- the hole transport layer 7 has, for example, a thickness of 10-50 nm.
- the organic light emitting layer 8 is formed by (i) filling, by an inkjet method, the concavity bounded by the bank 6 with ink for an organic light emitting element, (ii) desiccating the ink in, for example, a 25° C. environment under reduced pressure, and (iii) a baking process.
- the organic light emitting layer 8 has, for example, a thickness of 50-150 nm.
- a method of filling the concavity bounded by the bank 6 with ink is not limited to the inkjet method, and may be a dispenser method, a nozzle coating method, a spin coating method, intaglio printing, relief printing, etc.
- the electron transport layer 9 is formed via vapor deposition so as to cover the bank 6 and the organic light emitting layer 8 .
- the electron transport layer 9 has a thickness of 50-150 nm.
- the top electrode 10 is formed on the electron transport layer 9 .
- the top electrode 10 has a different polarity to the bottom electrode 3 .
- the top electrode 10 is formed on the electron transport layer 9 by vapor deposition of a light transmissive material.
- the top electrode 10 has a thickness of 5-100 nm.
- the sealant layer 11 is formed on the top electrode 10 , by CVD.
- the sealant layer 11 has a thickness of 0.5-7 ⁇ m.
- the organic light emitting element 111 which is a top emission type, is completed.
- FIG. 7 is a schematic diagram showing a thin film formation device pertaining to one aspect of the present invention.
- a thin film formation device 20 is a magnetron sputtering device and includes, for example: a vacuum container 21 ; a substrate holder 22 and a target holder 23 inside the vacuum container 21 ; a turbomolecular pump 24 for evacuating the inside of the vacuum container 21 to a vacuum state; an oxygen gas supplier 25 for supplying oxygen gas to the inside of the vacuum container 21 ; an inert gas supplier 26 for supplying inert gas to the inside of the vacuum container 21 ; a power supply device 27 for generating plasma; and a magnet 28 for forming a desired magnetron magnetic field above a surface of a target material 30 .
- the substrate holder 22 is a flat plate for holding the substrate 1 after formation of the bottom electrode 3 (in FIG. 7 , the planarizing layer 2 is not shown).
- the substrate holder 22 has a function as a ground electrode.
- the target holder 23 is a flat plate for holding the target material 30 .
- the target holder 23 has a function as a power supply electrode. Voltage is applied by the power supply device 27 between the substrate holder 22 and the target holder 23 , generating plasma in the vacuum container 21 .
- the magnet 28 is positioned on a side of the target holder 23 opposite the side of the target holder 23 that the target material 30 is positioned on.
- the magnet 28 is passed back and forth relative to the target holder 23 as indicated by an arrow in FIG. 7 .
- a magnetic field is applied to a surface of the target material 30 by the magnet 28 , generating high-density plasma in the vicinity of the target material 30 .
- a rate of film formation is sped up.
- kinetic energy of electrons due to ionizing collisions is sufficiently reduced when escaping from the magnetic field and until incident on the substrate 1 that a temperature increase of the substrate 1 is suppressed.
- the thin film formation device pertaining to one aspect of the present invention is not limited to being a magnetron sputtering device, and may, for example, be an ion beam sputtering device, etc.
- FIGS. 8A through 8G are process diagrams for describing the thin film formation method pertaining to embodiment 1. The first process, the second process, and the third process are described using FIGS. 8A through 8G .
- the substrate 1 on which is formed the bottom electrode 3 (thin layer) composed of aluminium, silver, or an alloy including at least one of aluminium and silver, is placed on the substrate holder 22 .
- the target material 30 composed of a transition metal or an alloy of the transition metal is placed on the target holder 23 .
- the substrate 1 and the target material 30 are made to face each other.
- a transition metal that has a high hole-injection property after oxidization is preferred, such as tungsten, molybdenum, nickel, titanium, vanadium, chromium, manganese, iron, cobalt, niobium, hafnium, tantalum, etc.
- oxygen deficiency of tungsten, molybdenum, and nickel easily occurs when sputtering of the target material is performed in the presence of oxygen (hereafter, “reactive sputtering”).
- tungsten, molybdenum, and nickel have a high hole injection property and are preferred as the transition metal.
- sputtering is performed on the target material 30 under a condition in which oxygen is not present in the vacuum container 21 , or oxygen is present at a level that does not oxidize the bottom electrode 3 .
- a mixed layer 4 a is formed on the bottom electrode 3 , as shown in FIG. 8C , by causing sputter particles 30 a of the transition metal to be deposited on the surface of the bottom electrode 3 .
- inert gas is supplied, and sputtering is performed using plasma of the inert gas, scattering the sputter particles 30 a of the transition metal of the target material 30 and depositing the sputter particles 30 a on the surface of the bottom electrode 3 .
- a tungsten flat plate having a size of 670 mm ⁇ 710 mm ⁇ 8 mm may be used as the target material 30 , and sputtering may be performed under the conditions: power: 1.3 kW, pressure: 5.0 Pa, and argon flow rate: 200 sccm.
- the condition of no oxygen being present in the vacuum container 21 is achieved.
- oxygen may be present in the vacuum container 21 at a level that does not oxidize the bottom electrode 3 , and this condition also allows suppression of an oxidized film forming on the surface of the bottom electrode 3 .
- a degree of vacuum achievable via a cryopump may be considered.
- the condition is met of oxygen being present in the vacuum container 21 at a level at which substantially no oxidization of the bottom electrode 3 occurs.
- ion bombardment which is the result of impacts due to sputtering power, causes the metal or alloy in the bottom electrode 3 and the transition metal in the sputter particles 30 a to be mixed, forming the mixed layer 4 a on the bottom electrode 3 as shown in FIG. 8C .
- An amount of sputter particles 30 a deposited on the surface of the bottom electrode 3 may be considered in terms of a theoretical case in which ion bombardment does not occur (a case in which the metal or alloy in the bottom electrode 3 and the transition metal in the sputter particles 30 a do not mix).
- the amount of sputter particles 30 a to be deposited on the surface of the bottom electrode 3 is preferably an amount that would, in such a case, form a metal layer composed of the transition metal having an average thickness equal to or less than 1 nm on the bottom electrode 3 . In other words, depositing an amount of sputter particles 30 a that would result in a metal layer having an average thickness equal to or less than 1 nm on a glass substrate is preferable.
- this amount of sputter particles 30 a forms the mixed layer 4 a having an average thickness equal to or less than 5 nm, even if all of the sputter particles 30 a become part of the mixed layer 4 a due to the ion bombardment.
- the average thickness of the mixed layer 4 a is equal to or less than 5 nm, the transition metal in the mixed layer 4 a is sufficiently oxidized.
- the average thickness of the mixed layer 4 a pry to or less than 5 nm, and the amount of the sputter particles 30 a to be deposited is preferably the amount that would result in a metal layer having an average thickness equal to or less than 1 nm on a glass substrate. Note that the amount of the sputter particles 30 a deposited is adjustable by adjusting sputtering conditions.
- sputtering reactive sputtering
- sputtering is performed under a condition in which a mixed gas of inert gas and oxygen gas is present in the vacuum container 21 , causing an oxygen plasma process on the mixed layer 4 a .
- the mixed layer 4 a is oxidized, forming the mixed oxidized thin film 4 .
- tungsten flat plate having a size of 670 mm ⁇ 710 mm ⁇ 8 mm may be used, and sputtering may be performed under the conditions: power: 1.3 kW, pressure: 4.7 Pa, argon flow rate: 100 sccm, and oxygen flow rate: 100 sccm.
- power 1.3 kW
- pressure 4.7 Pa
- oxygen flow rate 100 sccm.
- the oxygen gas preferably has a concentration equal to or greater than 50 wt %.
- the concentration of oxygen gas that includes oxygen gas in the third process should be sufficient when equal to or greater than 25 wt %. Note that supplying only oxygen gas into the vacuum container 21 is possible.
- a process of forming a transition metal oxide layer is performed during the third process.
- the surface of the target material 30 is oxidized due to the oxygen plasma, thus forming a surface layer 30 b containing a transition metal oxide as shown in FIG. 8E .
- the target material 30 is sputtered, and sputter particles of the transition metal oxide are deposited on the mixed oxidized thin film 4 , forming a transition metal oxide layer thereon.
- the surface layer 30 b of the surface of the target material 30 is sputtered, causing sputter particles 30 c of the transition metal oxide to scatter from the surface layer 30 b of the target material 30 , and causing the sputter particles 30 c to be deposited on the mixed oxidized thin film 4 .
- the hole-injection layer 5 is formed, composed of the transition metal oxide on the surface of the mixed oxidized thin film 4 , as shown in FIG. 8G .
- tungsten flat plate having a size of 670 mm ⁇ 710 mm ⁇ 8 mm may be used, and sputtering may be performed under the conditions: power: 1.3 kW, pressure: 4.7 Pa, argon flow rate: 100 sccm, and oxygen flow rate: 100 sccm. It is preferable that tungsten oxide (WO X ) that is caused to be deposited is oxidized such that x has a value from 2.5 to 2.9. This is because the hole-injection layer 5 has a high oxygen deficiency and a high hole-injection property when composed of such tungsten oxide.
- the hole-injection layer 5 is formed following on from the formation of the mixed oxidized thin film 4 , simplifying the overall process.
- FIGS. 9A and 9B are conceptual diagrams for describing the oxidization process for producing the mixed oxidized thin film pertaining to embodiment 1.
- the mixed layer 4 a is formed as shown in FIG. 9A .
- the mixed layer 4 a is formed by tungsten in the sputter particles mixing with aluminium in the bottom electrode 3 to a depth of several nanometers due to the ion bombardment.
- the oxygen plasma process causes the mixed layer 4 a to be oxidized, leading to formation of the mixed oxidized thin film 4 .
- the mixed layer 4 a is also oxidized by the transition metal oxide that is deposited thereon.
- the mixed oxidized thin film 4 formed in this way preferably has a film thickness that allows the transition metal in the mixed layer 4 a to oxidize into an oxide of the transition metal. As long as the mixed oxidized thin film 4 has such a thickness, the transition metal in the mixed oxidized thin film 4 has a high chance of being sufficiently oxidized. As described above, when the average thickness of the mixed layer 4 a is equal to or less than 5 nm, the transition metal in the mixed layer 4 a is sufficiently oxidized.
- the film thickness is, for example, an average thickness equal to or less than 5 nm in the thin film formation method pertaining to embodiment 1, such that oxidization of the transition metal by the transition metal oxide is possible.
- the mixed oxidized thin film 4 is formed on the bottom electrode 3 without oxidizing the surface of the bottom electrode 3 .
- the process of forming the transition metal oxide layer is not required.
- the mixed oxidized thin film 4 and the hole-injection layer 5 need not be formed consecutively, and the third process need only include the formation of the mixed oxidized thin film 4 .
- processing after the third process is not specifically limited.
- the mixed oxidized thin film 4 is formed, oxidization of the surface of the bottom electrode 3 is suppressed, and therefore there is no need to fear oxidization of the surface of the bottom electrode 3 from the next process onward.
- a thin film formation method pertaining to embodiment 2 is very different from the thin film formation method pertaining to embodiment 1 in that, in the second process, a metal layer 4 b is further formed on the mixed layer 4 a .
- the metal layer 4 b is not formed in the thin film formation method pertaining to embodiment 1. Only this difference is described below, and other points are abbreviated.
- FIGS. 10A through 10H are process diagrams for describing the thin film formation method pertaining to one aspect of the present invention. The first process, the second process, and the third process described using FIGS. 10A through 10H .
- the substrate 1 on which is formed the bottom electrode 3 composed of the metal or alloy is placed on the substrate holder 22 .
- the target material 30 composed of a transition metal or an alloy of the transition metal is placed on the target holder 23 .
- the substrate 1 and the target material 30 are made to face each other.
- sputtering is performed on the target material 30 , causing sputter particles 30 a of the transition metal to be deposited on the surface of the bottom electrode 3 .
- a mixed layer 4 a is formed on the bottom electrode 3
- a metal layer 4 b is formed on the mixed layer 4 a.
- the metal or alloy in the bottom electrode 3 and the transition metal in the sputter particles 30 a are mixed by the ion bombardment, thereby forming the mixed layer 4 a on the bottom electrode 3 .
- the metal layer 4 b which is composed of the transition metal in the sputter particles 30 a , is formed on the mixed layer 4 a.
- the average film thickness of the metal layer 4 b is preferably equal to or less than 1 nm. As long as the average film thickness of the metal layer 4 b is equal to or less than 1 nm, the transition metal in the metal layer 4 b can be mixed with the metal or alloy and the transition metal in the mixed layer 4 a by the ion bombardment caused by the sputtering of the third process. Further, the sum of the average thickness of the mixed layer 4 a and the average thickness of the metal layer 4 b is preferably equal to or less than 3 nm. As long as the sum of the average thickness is equal to or less than 3 nm, the transition metal in the mixed layer 4 a and the metal layer 4 b can be sufficiently oxidized. Note that the average film thickness of the mixed layer 4 a and the metal layer 4 b is adjustable by adjusting sputtering conditions.
- the target material 30 is sputtered under a condition in which oxygen is present in the vacuum container 21 , as shown in FIG. 10E .
- the mixed layer 4 a and the metal layer 4 b are oxidized, forming the mixed oxidized thin film 4 , as shown in FIG. 10F .
- the mixed oxidized thin film 4 formed in this way preferably has a film thickness that allows the transition metal in the mixed layer 4 a and the metal layer 4 b to oxidize into an oxide of the transition metal. As long as the mixed oxidized thin film 4 has such a thickness, the transition metal in the mixed oxidized thin film 4 has a high chance of being sufficiently oxidized.
- the film thickness is, for example, an average thickness equal to or less than 3 nm in the thin film formation method pertaining to embodiment 2, such that oxidization of the transition metal to the transition metal oxide is possible.
- the oxygen plasma process is performed while mixing the transition metal in the metal layer 4 b , and the metal or alloy and the transition metal in the mixed layer 4 a due to the ion bombardment caused by sputtering. In this way, the mixed layer 4 a and the metal layer 4 b are mixed and oxidized, forming the mixed oxidized thin film 4 .
- a process of forming a transition metal oxide layer is performed, and the transition metal oxide layer is formed on the mixed oxidized thin film 4 , which is the same as in the thin film formation method pertaining to embodiment 1.
- FIGS. 11A and 11B are conceptual diagrams for describing the oxidization process for producing the mixed oxidized thin film pertaining to embodiment 2.
- the mixed layer 4 a is formed as shown in FIG. 11A .
- the mixed layer 4 a is formed by the tungsten in the sputter particles mixing with the aluminium in the bottom electrode 3 to a depth of several nanometers due to the ion bombardment.
- the metal layer 4 b is formed, which is composed of the tungsten in the sputter particles.
- the tungsten in the metal layer 4 b and the tungsten and aluminium in the mixed layer 4 a are (i) mixed to a depth of several nanometers by the ion bombardment, and (ii) oxidized by the oxygen plasma process, thereby forming the mixed oxidized thin film 4 .
- oxidization also occurs due to the transition metal oxide that is deposited.
- a thin film formation method pertaining to embodiment 3 is very different from the thin film formation method pertaining to embodiment 2 in that in the second process the mixed layer 4 a is not formed.
- the mixed layer 4 a is formed in the thin film formation method pertaining to embodiment 2. Only this difference is described below, and other points are abbreviated.
- FIGS. 12A through 12G are process diagrams for describing the thin film formation method pertaining to one aspect of the present invention. The first process, the second process, and the third process are described using FIGS. 12A through 12G .
- the substrate 1 on which is formed the bottom electrode 3 composed of the metal or alloy, is placed on the substrate holder 22 .
- the target material 30 composed of a transition metal or an alloy of the transition metal is placed on the target holder 23 .
- the substrate 1 and the target material 30 are made to face each other.
- the sputter particles 30 a when causing the sputter particles 30 a to be deposited on the surface of the bottom electrode 3 , mixing of the transition metal in the sputter particles 30 a and the metal or alloy in the bottom electrode 3 is avoided by suppressing the ion bombardment.
- the metal layer 4 b composed of the transition metal in the sputter particles 30 a is formed.
- the ion bombardment can be suppressed by adjusting the sputtering conditions.
- the average film thickness of the metal layer 4 b is preferably equal to or less than 1 nm. As long as the average film thickness of the metal layer 4 b is equal to or less than 1 nm, the transition metal in the metal layer 4 b can be mixed with the metal or alloy in the bottom electrode 3 , by the ion bombardment caused by sputtering of the third process. Note that the average film thickness of the metal layer 4 b can be adjusted by adjusting sputtering conditions.
- the target material 30 is sputtered under a condition in which oxygen is present in the vacuum container 21 , as shown in FIG. 12D .
- the metal layer 4 b and the surface of the bottom electrode 3 are oxidized, forming the mixed oxidized thin film 4 , as shown in FIG. 12E .
- the oxygen plasma process is performed while mixing the transition metal in the metal layer 4 b , and the metal or alloy in the bottom electrode 3 due to the ion bombardment caused by sputtering. In this way, the metal layer 4 b and the surface of the bottom electrode 3 are mixed and oxidized, forming the mixed oxidized thin film 4 .
- a process of forming a transition metal oxide layer is performed.
- the method of forming the transition metal oxide layer on the mixed oxidized thin film 4 is the same as the thin film formation method pertaining to embodiment 2.
- FIGS. 13A and 13B are conceptual diagrams for describing the oxidization process for producing the mixed oxidized thin film pertaining to embodiment 3.
- the metal layer 4 b is formed, which is composed of the tungsten in the sputter particles.
- the tungsten in the metal layer 4 b and the aluminium in the bottom electrode 3 are mixed to a depth of several nanometers by the ion bombardment, and are oxidized by the oxygen plasma process, thereby forming the mixed oxidized thin film 4 .
- oxidization of the metal layer 4 b also occurs due to the transition metal oxide that is deposited thereon.
- the mixed oxidized thin film 4 formed in this way preferably has a film thickness such that oxidization of the transition metal in the metal layer 4 b by the transition metal oxide is possible. As long as the mixed oxidized thin film 4 has such a thickness, the transition metal component of the mixed oxidized thin film 4 has a high chance of being sufficiently oxidized.
- the metal layer 4 b preferably has a film thickness such that the transition metal in the metal layer 4 b can be oxidized into an oxide of the transition metal via the oxygen plasma process in the third process.
- the thin film formation method pertaining to an aspect of the present invention comprises: sputtering the target member under a first condition in which oxygen is not present in the vacuum container or is present at a level that does not oxidize the thin layer, depositing sputter particles of the transition metal on a surface of the thin layer; and after sputtering under the first condition, sputtering the target member under a second condition in which oxygen is present in the vacuum container at a level that oxidizes the thin layer, oxidizing the metal or alloy and the deposited transition metal in a mixed state and forming a mixed oxidized thin film on the thin layer.
- formation is suppressed of an oxidized layer composed of an oxide of the metal or alloy on the surface of the thin layer.
- the mixed oxidized thin film is formed on the thin layer, even if sputtering is later performed under a condition in which oxygen is present, exposure of the surface of the thin layer to oxygen plasma is unlikely, making oxidization of the surface of the thin layer by the oxygen plasma unlikely. Thus, formation of an oxidized film composed of an oxide of the metal or alloy on the thin layer is unlikely. Further, since the mixed oxidized thin film is formed by oxidization in a mixed state of the metal or alloy, and the transition metal, the mixed oxidized thin film is characterized in that it is difficult for the thin layer to take oxygen therefrom. Thus, oxidization of the surface of the thin layer is not accelerated. Thus, even when the mixed oxidized thin film is formed in contact with the surface of the thin layer, an oxidized layer composed of an oxide of the metal or alloy forming due to oxidization of the surface of the thin layer is unlikely.
- FIGS. 14A through 14C are electron micrographs showing cross-sections near the surfaces of bottom electrodes.
- FIG. 14A shows a conventional example 1, in which a hole-injection layer was formed directly on a bottom electrode.
- FIG. 14B shows a conventional example 2, in which a hole-injection layer was formed after formation of a light-transmissive electrically-conductive layer composed of IZO on a bottom electrode.
- FIG. 14C shows an implementation example pertaining to the present invention, in which a hole-injection layer was formed after formation of a mixed oxidized thin film having an average thickness of 1 nm on a bottom electrode.
- an oxidized film is formed on the bottom electrode.
- an oxidized film is also formed on the bottom electrode.
- the mixed oxidized thin film which is a mix of aluminium oxide and tungsten oxide, is formed on the bottom electrode.
- the mixed oxidized thin film white color portions and black color portions are mixed together.
- the white color portions suggest Al, which is a light metal, as a primary component
- the black color portions suggest W, which is a heavy metal, as a primary component.
- Al and W are mixed in the mixed oxidized thin film.
- the oxidized films shown in FIG. 14A and FIG. 14B differ from the mixed oxidized thin film of the implementation example in that they are made only of white portions that are primarily Al. Thus, it is understood that W is hardly present in these oxidized films.
- FIGS. 15A through 15C are diagrams showing results of the EDS analysis of the oxidized film and the mixed oxidized thin film.
- the oxidized film of the conventional example 2 (a portion indicated by the symbol A in FIG. 14B ) was, as shown in FIG. 15A , almost entirely composed of Al and O (oxygen atoms), and the W content was low.
- This kind of oxidized film composed of aluminium oxide (AlO X ) is commonly known to have poor electrical conductivity.
- the white portion of the mixed oxidized thin film of the implementation example (a portion indicated by the symbol B in FIG. 14C ) was, as shown in FIG. 15B , a mix of both Al and W, and O was also present.
- the black portion of the mixed oxidized thin film of the implementation example (a portion indicated by the symbol C in FIG. 14C ) was, as shown in FIG. 15C , a mix of both Al and W, and O was also present. Accordingly, the results suggest that in the mixed oxidized thin film Al and W exist in a mixed, oxidized state.
- the above-described implementation example is a case in which the hole-injection layer was formed after the mixed oxidized thin film having an average thickness of 1 nm was formed on the bottom electrode.
- a case in which the mixed oxidized thin film has an average thickness of 3 nm and a case in which the mixed oxidized thin film has an average thickness of 5 nm were observed in cross-section and subjected to EDS analysis.
- FIG. 16 is an electron micrograph of a case in which the average thickness of the mixed oxidized thin film is 3 nm.
- FIGS. 17A through 17C are diagrams showing results of EDS analysis of the case in which the average thickness of the mixed oxidized thin film is 3 nm.
- FIG. 17A shows an analysis result of a portion indicated by the symbol A in FIG. 16 .
- FIG. 17B shows an analysis result of a portion indicated by the symbol B in FIG. 16 .
- FIG. 17C shows an analysis result of a portion indicated by the symbol C in FIG. 16 .
- the mixed oxidized thin film has an average thickness of 3 nm
- both Al and W are mixed, and O is also present in the mixed oxidized thin film, as shown in FIG. 17A .
- the hole-injection layer is composed of W and O.
- FIG. 18 is an electron micrograph of a case in which the average thickness of the mixed oxidized thin film is 5 nm.
- FIGS. 19A through 19C are diagrams showing results of EDS analysis of the case in which the average thickness of the mixed oxidized thin film is 5 nm.
- FIG. 19A shows an analysis result of a portion indicated by the symbol A in FIG. 18 .
- FIG. 19B shows an analysis result of a portion indicated by the symbol B in FIG. 18 .
- FIG. 19C shows an analysis result of a portion indicated by the symbol C in FIG. 18 .
- both Al and W are mixed, and O is also present in the mixed oxidized thin film, as shown in FIG. 19A .
- the hole-injection layer is composed of W and O.
- the bottom electrode is composed of Al and O.
- the thickness of the mixed oxidized thin film is preferably equal to or less than 5 nm.
- FIGS. 20A and 20B are diagrams for describing results of oxidization due to reactive sputtering.
- a sample 1 was manufactured by (i) forming a transition metal layer 302 composed of tungsten and having an average thickness of 1 nm on a glass substrate 301 having a thickness of 0.7 mm, and (ii) forming a transition metal oxide layer 303 composed of oxidized tungsten and having an average thickness of 12 nm on the transition metal layer 302 by reactive sputtering. Further, a sample 2 was manufactured by forming the transition metal layer 302 composed of tungsten and having an average thickness of 1 nm on the glass substrate 301 having a thickness of 0.7 mm. Then, by measuring light transmittance of both samples, results were obtained as shown in FIG. 20B .
- sample 1 when comparing the light transmittance of both samples, in wavelengths of 400 to 800 nm, sample 1 had a higher light transmittance than sample 2. Especially in the range of wavelengths of 600 to 800 nm, the light transmittance of sample 1 was at least 5% higher than the light transmittance of sample 2.
- the transition metal oxide layer 302 a has a relatively high light transmittance. This is clear because the sample 1, in which the transition metal oxide layer 303 having an average thickness of 12 nm is formed, has a higher light transmittance than the sample 2, in which the transition metal oxide layer 303 is not formed. Next, the transition metal layer 302 has a lower light transmittance than the transition metal oxide layer 302 a .
- FIG. 21 is a diagram showing measurements of drive voltages of organic light emitting elements.
- the organic light emitting element of the implementation example had a lower drive voltage than the organic light emitting element of the conventional example 1 and the organic light emitting element of the conventional example 2, whether emitting red (R) light, green (G) light, or blue (B) light. It is considered that this is because an oxidized film was not present on the bottom electrode 3 , and therefore an increase in electrical resistance due to such an oxidized film did not occur.
- FIG. 22 is a diagram showing measurements of light emission efficiency of organic light emitting elements. As shown in FIG. 22 , depending on the light emission color there was some variation in light emission efficiency. However, overall, the organic light emitting element of the implementation example had a higher light emission efficiency than the organic light emitting element of the conventional example 1 and the organic light emitting element of the conventional example 2.
- the mixed oxidized thin film was formed by deposition of an amount of sputter particles that would result in a metal layer having an average thickness of equal to or less than 1 nm on a glass substrate.
- an organic light emitting element in which the mixed oxidized thin film was formed by deposition of an amount of sputter particles that would result in a metal layer having an average thickness of equal to or less than 2 nm on a glass substrate was formed, and light emission efficiency was measured.
- the light emission efficiency of the organic light emitting element of the comparative example was lower than the light emission efficiency of the organic light emitting element of the implementation example. This is considered to be because the transition metal of the deposited sputter particles were not sufficiently oxidized by the reactive sputtering such that a portion remained as the transition metal, decreasing the reflectance of the bottom electrode.
- the thin film formation method, manufacturing method of the organic display panel, manufacturing method of the organic display device, manufacturing method of the organic light emitting device, the organic display panel, the organic display device, and the organic light emitting device each pertaining to one aspect of the present invention are specifically described above.
- the above-described embodiments are examples used to describe the structure and effects of the present invention in a way that is easy to understand, and the present invention is not limited to the above-described embodiments.
- a light emission color of the organic display panel is not mentioned in detail, but the present invention may also be applied to a full-color display and a single-color display.
- organic light emitting elements correspond to sub-pixels of each color of RGB, and adjacent RGB sub-pixels combine to form a pixel. Pixels are arranged in a matrix to form an image display area.
- the thin film formation method pertaining to one aspect of the present invention can be widely used in manufacturing processes of organic display panels manufactured by sputtering methods. Further, the manufacturing method of the organic display panel, the manufacturing method of the organic display device, the manufacturing method of the organic light emitting device, the organic display panel, the organic display device, and the organic light emitting device each pertaining to one aspect of the present invention can be widely used in, for example, the general fields of passive matrix type and active matrix type organic display devices and organic light emitting devices, etc.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
- 1 substrate
- 3 thin layer (bottom electrode)
- 4 mixed oxidized thin film
- 4 a mixed layer
- 4 b metal layer
- 5 transition metal oxide layer (hole-injection layer)
- 21 vacuum container
- 30 target material
- 110 organic display panel
- 100 organic display device
- 200 organic light emitting device
Claims (20)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-246594 | 2011-11-10 | ||
JP2011246594 | 2011-11-10 | ||
PCT/JP2012/007140 WO2013069274A1 (en) | 2011-11-10 | 2012-11-07 | Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method |
Publications (2)
Publication Number | Publication Date |
---|---|
US20140312336A1 US20140312336A1 (en) | 2014-10-23 |
US9103017B2 true US9103017B2 (en) | 2015-08-11 |
Family
ID=48289485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/355,946 Active US9103017B2 (en) | 2011-11-10 | 2012-11-07 | Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method |
Country Status (3)
Country | Link |
---|---|
US (1) | US9103017B2 (en) |
JP (1) | JPWO2013069274A1 (en) |
WO (1) | WO2013069274A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201039382A (en) * | 2009-03-06 | 2010-11-01 | Du Pont | Process for forming an electroactive layer |
WO2015125458A1 (en) * | 2014-02-24 | 2015-08-27 | 株式会社Joled | Light-emitting device and production method for light-emitting device |
JP6277534B2 (en) * | 2014-05-21 | 2018-02-14 | 株式会社Joled | ORGANIC EL ELEMENT AND METHOD FOR PRODUCING ORGANIC EL ELEMENT |
JPWO2015182130A1 (en) * | 2014-05-30 | 2017-04-20 | 株式会社Joled | Organic EL element and organic EL light emitting device |
DE112017006074T5 (en) * | 2016-11-30 | 2019-08-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
JP2018181970A (en) * | 2017-04-07 | 2018-11-15 | 株式会社ジャパンディスプレイ | Display, and method for manufacturing display |
Citations (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05163488A (en) | 1991-12-17 | 1993-06-29 | Konica Corp | Electroluminescent element of organic thin film |
US5443922A (en) | 1991-11-07 | 1995-08-22 | Konica Corporation | Organic thin film electroluminescence element |
JP2006294261A (en) | 2005-04-05 | 2006-10-26 | Fuji Electric Holdings Co Ltd | Organic el light-emitting element and its manufacturing method |
US20060279190A1 (en) | 2005-05-27 | 2006-12-14 | Fuji Photo Film Co., Ltd | Organic EL device |
JP2007005784A (en) | 2005-05-27 | 2007-01-11 | Fujifilm Holdings Corp | Organic el device |
US20070290604A1 (en) | 2006-06-16 | 2007-12-20 | Matsushita Electric Industrial Co., Ltd. | Organic electroluminescent device and method of producing the same |
JP2007335737A (en) | 2006-06-16 | 2007-12-27 | Matsushita Electric Ind Co Ltd | Organic electroluminescence element and its manufacturing method |
US20080116438A1 (en) | 2006-11-16 | 2008-05-22 | Samsung Electronics Co., Ltd. | Resistive random access memory having a solid solution layer and method of manufacturing the same |
JP2008244018A (en) | 2007-03-26 | 2008-10-09 | Ulvac Japan Ltd | Manufacturing method of semiconductor device |
JP2009277788A (en) | 2008-05-13 | 2009-11-26 | Panasonic Corp | Organic electroluminescent element and method of manufacturing the same |
WO2010038356A1 (en) | 2008-09-30 | 2010-04-08 | パナソニック株式会社 | Organic el device and method for manufacturing same |
US20110068327A1 (en) * | 2007-08-10 | 2011-03-24 | Sumitomo Chemical Company, Limited | Organic electroluminescence element including metal doped molybdenum oxide layer and method for producing the same |
JP2011091093A (en) | 2009-10-20 | 2011-05-06 | Panasonic Corp | Organic el element |
JP2011107476A (en) | 2009-11-18 | 2011-06-02 | Panasonic Corp | Method for manufacturing electronic device |
US20110233572A1 (en) * | 2009-06-04 | 2011-09-29 | Panasonic Corporation | Organic el display panel and method for manufacturing same |
WO2012164797A1 (en) | 2011-06-03 | 2012-12-06 | パナソニック株式会社 | Thin film formation method, thin film formation device, production method for display panel, production method for display device, and production method for light-emitting device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2011040238A1 (en) * | 2009-09-30 | 2013-02-28 | 凸版印刷株式会社 | ORGANIC ELECTROLUMINESCENT ELEMENT, DISPLAY DEVICE USING SAME, AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT ELEMENT |
-
2012
- 2012-11-07 US US14/355,946 patent/US9103017B2/en active Active
- 2012-11-07 JP JP2013542846A patent/JPWO2013069274A1/en active Pending
- 2012-11-07 WO PCT/JP2012/007140 patent/WO2013069274A1/en active Application Filing
Patent Citations (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5443922A (en) | 1991-11-07 | 1995-08-22 | Konica Corporation | Organic thin film electroluminescence element |
JPH05163488A (en) | 1991-12-17 | 1993-06-29 | Konica Corp | Electroluminescent element of organic thin film |
JP2006294261A (en) | 2005-04-05 | 2006-10-26 | Fuji Electric Holdings Co Ltd | Organic el light-emitting element and its manufacturing method |
US20060279190A1 (en) | 2005-05-27 | 2006-12-14 | Fuji Photo Film Co., Ltd | Organic EL device |
JP2007005784A (en) | 2005-05-27 | 2007-01-11 | Fujifilm Holdings Corp | Organic el device |
US20070290604A1 (en) | 2006-06-16 | 2007-12-20 | Matsushita Electric Industrial Co., Ltd. | Organic electroluminescent device and method of producing the same |
JP2007335737A (en) | 2006-06-16 | 2007-12-27 | Matsushita Electric Ind Co Ltd | Organic electroluminescence element and its manufacturing method |
US20080116438A1 (en) | 2006-11-16 | 2008-05-22 | Samsung Electronics Co., Ltd. | Resistive random access memory having a solid solution layer and method of manufacturing the same |
JP2008153633A (en) | 2006-11-16 | 2008-07-03 | Samsung Electronics Co Ltd | Resistive memory element, and its manufacturing method |
JP2008244018A (en) | 2007-03-26 | 2008-10-09 | Ulvac Japan Ltd | Manufacturing method of semiconductor device |
US20110068327A1 (en) * | 2007-08-10 | 2011-03-24 | Sumitomo Chemical Company, Limited | Organic electroluminescence element including metal doped molybdenum oxide layer and method for producing the same |
US8928028B2 (en) * | 2007-08-10 | 2015-01-06 | Sumitomo Chemical Company, Limited | Organic electroluminescence element including metal doped molybdenum oxide layer and method for producing the same |
JP2009277788A (en) | 2008-05-13 | 2009-11-26 | Panasonic Corp | Organic electroluminescent element and method of manufacturing the same |
US20120178191A1 (en) | 2008-05-13 | 2012-07-12 | Panasonic Corporation | Organic electroluminescence element and manufacturing method thereof |
US20110156079A1 (en) | 2008-09-30 | 2011-06-30 | Panasonic Corporation | Organic el device and method for manufacturing same |
WO2010038356A1 (en) | 2008-09-30 | 2010-04-08 | パナソニック株式会社 | Organic el device and method for manufacturing same |
US20110233572A1 (en) * | 2009-06-04 | 2011-09-29 | Panasonic Corporation | Organic el display panel and method for manufacturing same |
JP2011091093A (en) | 2009-10-20 | 2011-05-06 | Panasonic Corp | Organic el element |
JP2011107476A (en) | 2009-11-18 | 2011-06-02 | Panasonic Corp | Method for manufacturing electronic device |
WO2012164797A1 (en) | 2011-06-03 | 2012-12-06 | パナソニック株式会社 | Thin film formation method, thin film formation device, production method for display panel, production method for display device, and production method for light-emitting device |
Non-Patent Citations (3)
Title |
---|
International Preliminary Report on Patentability PCT/JP2012/00714 dated Jun. 10, 2014. * |
International Search Report for PCT/JP2012/007140, which was mailed on Feb. 19, 2013. |
Written Opinion of the International Search Authority PCT/JP2012/00714 dated Feb. 19, 2013. * |
Also Published As
Publication number | Publication date |
---|---|
WO2013069274A1 (en) | 2013-05-16 |
JPWO2013069274A1 (en) | 2015-04-02 |
US20140312336A1 (en) | 2014-10-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8957412B2 (en) | Organic electroluminescence panel, method of manufacturing organic electroluminescence panel, organic light emitting apparatus using organic electroluminescence panel, and organic display apparatus using organic electroluminescence panel | |
US8927976B2 (en) | Organic EL element and production method for same | |
US9029842B2 (en) | Organic electroluminescence element and method of manufacturing thereof | |
US9103017B2 (en) | Organic display panel, organic display device, organic light emitting device, method of manufacture of these, and thin film formation method | |
US8569774B2 (en) | Organic EL display panel and method of manufacturing the same | |
WO2012153445A1 (en) | Organic el display panel and organic el display device | |
JP5574456B2 (en) | LIGHT EMITTING ELEMENT, MANUFACTURING METHOD THEREOF, AND LIGHT EMITTING DEVICE | |
CN108417600B (en) | Organic EL display panel and method for manufacturing organic EL display panel | |
US9722006B2 (en) | Organic light-emitting device and method for producing same | |
US9490445B2 (en) | Organic el element, organic el panel, organic el light-emitting apparatus, organic el display apparatus, and method of manufacturing organic el element | |
US9048448B2 (en) | Organic electroluminescence element and method of manufacturing thereof | |
WO2013179361A1 (en) | Organic el element, organic el panel, organic el light emitting apparatus, and organic el display apparatus | |
US9287520B2 (en) | Organic EL element, organic EL panel having organic EL element, organic EL light-emitting apparatus, and organic EL display apparatus | |
KR101702703B1 (en) | Method for producing organic light-emitting element | |
JP5620495B2 (en) | LIGHT EMITTING ELEMENT, LIGHT EMITTING DEVICE HAVING LIGHT EMITTING ELEMENT, AND LIGHT EMITTING ELEMENT MANUFACTURING METHOD | |
US20160163985A1 (en) | Manufacturing method of organic light-emitting element and organic light-emitting element | |
JP2019016496A (en) | Organic el display panel and manufacturing method of organic el display panel | |
JP2008527636A (en) | Process for forming electronic devices and electronic devices formed by such processes | |
KR101699119B1 (en) | Method for producing organic light-emitting element | |
WO2012164797A1 (en) | Thin film formation method, thin film formation device, production method for display panel, production method for display device, and production method for light-emitting device | |
WO2015182130A1 (en) | Organic el element and organic el light-emitting device | |
JP2018156882A (en) | Organic el display panel and manufacturing method thereof | |
WO2015125458A1 (en) | Light-emitting device and production method for light-emitting device | |
JP2017188345A (en) | Method of manufacturing light emitting panel and light emitting panel | |
JP2016115714A (en) | Organic EL panel |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: PANASONIC CORPORATION, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:ABE, YUUKI;NENDAI, KENICHI;MIZUSAKI, NAOKO;SIGNING DATES FROM 20140228 TO 20140305;REEL/FRAME:033301/0189 |
|
AS | Assignment |
Owner name: JOLED INC, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:PANASONIC CORPORATION;REEL/FRAME:035187/0483 Effective date: 20150105 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 4 |
|
FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
AS | Assignment |
Owner name: INCJ, LTD., JAPAN Free format text: SECURITY INTEREST;ASSIGNOR:JOLED, INC.;REEL/FRAME:063396/0671 Effective date: 20230112 |
|
AS | Assignment |
Owner name: JOLED, INC., JAPAN Free format text: CORRECTION BY AFFIDAVIT FILED AGAINST REEL/FRAME 063396/0671;ASSIGNOR:JOLED, INC.;REEL/FRAME:064067/0723 Effective date: 20230425 |
|
FEPP | Fee payment procedure |
Free format text: 7.5 YR SURCHARGE - LATE PMT W/IN 6 MO, LARGE ENTITY (ORIGINAL EVENT CODE: M1555); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |
|
AS | Assignment |
Owner name: JDI DESIGN AND DEVELOPMENT G.K., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:JOLED, INC.;REEL/FRAME:066382/0619 Effective date: 20230714 |