WO2010087391A1 - 非接触表面形状測定方法およびその装置 - Google Patents
非接触表面形状測定方法およびその装置 Download PDFInfo
- Publication number
- WO2010087391A1 WO2010087391A1 PCT/JP2010/051102 JP2010051102W WO2010087391A1 WO 2010087391 A1 WO2010087391 A1 WO 2010087391A1 JP 2010051102 W JP2010051102 W JP 2010051102W WO 2010087391 A1 WO2010087391 A1 WO 2010087391A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- objective lens
- surface shape
- voltage difference
- measurement
- range
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Definitions
- the present invention relates to a non-contact surface shape measuring method.
- the laser probe type non-contact surface shape measuring device using laser autofocus is used to measure the shape and roughness of precision parts.
- the autofocus control with laser light is applied to the upper surface of the measurement workpiece to be measured, the measurement workpiece is scanned horizontally at a predetermined pitch, and the objective lens of the autofocus optical system is moved in the focus direction.
- This is a structure for acquiring measurement data related to the surface shape of the workpiece from the quantity.
- the objective lens is controlled so that the return light of the laser probe is received at the center of the two-divided sensor, as disclosed in Japanese Patent No. 2125498. That is, the measurement workpiece is sent at a predetermined pitch, and when the objective lens moves and the return light from the measurement workpiece is received at the center of the two-divided sensor, it is determined to be in the focus state, and the amount of movement of the objective lens is detected, It is possible to measure the height information of the surface of the measurement workpiece. By acquiring the height information of the surface of the measurement workpiece for each predetermined pitch, the surface shape of the measurement workpiece can be measured.
- the measurement workpiece is intermittently scanned at a predetermined pitch, and when the focus is obtained, height information is acquired and the next pitch is obtained. Measurement takes time due to feeding.
- the present invention has been made by paying attention to such a conventional technique, and can measure the surface shape of the measurement workpiece by continuously scanning the measurement workpiece instead of intermittent scanning.
- a measurement method can be provided.
- the non-contact surface shape measurement method detects a voltage difference between two sensors of a two-divided sensor, and the vicinity in which the detected voltage difference is linear with respect to a displacement from a focus position.
- the correction value for the focus position in the vertical direction of the objective lens is calculated, and the correction value is added to the actual vertical position of the objective lens. Then, the amount of movement of the objective lens in the vertical direction is calculated.
- the perspective view which shows the optical system above an objective lens.
- Schematic which shows the optical path of a laser beam.
- the flowchart which shows a measuring method.
- Schematic which shows the non-contact surface shape measuring apparatus which concerns on 2nd Embodiment of this invention.
- the top view which shows an internal gear and a rotation stage.
- (First embodiment) 1 to 4 are diagrams showing a first embodiment of the present invention.
- XY is two directions orthogonal to each other on a horizontal plane
- Z is a vertical direction.
- FIG. 1 is also schematically illustrated.
- the measurement workpiece 1 is assembled on an X-axis stage 2 that is slidable in the X-axis direction.
- the X-axis stage 2 is assembled on a Y-axis stage 3 that is slidable in the Y-axis direction.
- the objective lens 4 is supported above the measurement workpiece 1 by the focusing means 5 so as to be movable in the Z-axis direction.
- the position (movement amount) of the objective lens 4 in the Z-axis direction can be detected by the AF scale 6.
- the X-axis stage 2 can detect the position (movement amount) by the X-axis scale 7.
- the Y-axis stage 3 can detect the position (movement amount) by a Y-axis scale (not shown).
- the AF scale 6 of the objective lens 4 and the stage driver 8 that drives the X-axis stage 2 and the Y-axis stage 3 are connected to the main controller 9, and the movement amounts of the objective lens 4, the X-axis stage 2, and the Y-axis stage 3 are each. Are respectively input to the main controller 9.
- the X-axis stage 2, the Y-axis stage 3 and the stage driver 8 constitute a scanner, and the surface of the measurement work 1 is lasered by continuously scanning the measurement work 1 in the horizontal direction perpendicular to the optical axis of the objective lens 4.
- the probe L is swept in the horizontal direction.
- a beam splitter 10 is disposed above the objective lens 4.
- the beam splitter 10 has a function of transmitting 50% of light and reflecting 50%.
- laser light irradiation means 11 is disposed on the side of the beam splitter 10.
- Laser light L which is a semiconductor laser, is irradiated from the laser light irradiation means 11 in the horizontal direction.
- the laser beam L is reflected by the beam splitter 10 in a direction parallel to the Z axis, passes through the objective lens 4 and strikes the surface of the measurement workpiece 1.
- the optical center of gravity of the cross section of the laser beam L passes through a position deviated from the center of the optical axis of the objective lens 4.
- the laser light L is reflected by the surface of the measurement workpiece 1, and the return light L ′ is transmitted again through the objective lens 4, further through the beam splitter 10, and imaged by the imaging lens 12.
- the position of the spot of the return light L ′ by the imaging lens 12 is detected by the two-divided sensor S which is a photo sensor.
- the two-divided sensor S is composed of two sensors a and b arranged close to each other.
- the center of FIG. 2 shows the focus state (II), and both sides thereof show the in-focus state (I) and the out-focus state (III).
- the outputs from the two sensors a and b are input to the AF controller 13.
- the AF controller 13 includes a comparator 14, a control circuit 15, and a voltage / displacement conversion circuit 16.
- the AF controller 13 is connected to the main controller 9.
- a signal is output from the control circuit 15 to the focusing means 5 so that the outputs from the two sensors a and b are equal, and the objective lens 4 is moved, and the amount of movement of the objective lens 4 determines the surface of the measurement work 1. Height information can be detected.
- the measurement workpiece 1 is continuously scanned with respect to the laser beam L as the X-axis stage 2 moves at a constant speed (S2).
- S2 a constant speed
- the objective lens 4 when the return light L ′ hits the center (neutral position) and the outputs of the two sensors a and b become equal, the objective lens 4 is in a state of being focused on the measurement workpiece 1. However, the measurement is continuously performed without necessarily moving the objective lens 4 to the focus position.
- the voltage difference between the two sensors a and b of the two-divided sensor S is a function of the optical barycentric position of the spot corresponding to the amount of movement of the objective lens 4 to the focus position.
- the potential difference is substantially proportional to the optical barycentric position of the spot. Therefore, if the voltage difference falls within this vicinity range (linear region), the amount of movement of the objective lens 4 to the focus position is calculated by calculation without moving the objective lens 4 to the final focus position. be able to.
- the amount of movement of the objective lens 4 reaching the focus position can be calculated by adding the calculated correction value from the position to the focus position to the position of the objective lens 4 when entering the vicinity range ( S6).
- the amount of movement of the objective lens 4 can be calculated continuously during continuous scanning of the measurement workpiece 1, and the height information of the surface of the measurement workpiece 1 is continuously acquired to obtain the shape in the X-axis direction. Can be measured. By performing shape measurement in the X-axis direction while gradually shifting in the Y-axis direction, the three-dimensional shape of the surface of the measurement workpiece 1 can also be measured.
- the error when the voltage difference detected by the two-divided sensor S exceeds the vicinity range, the error may increase, or the measurement data may be lost only in the exceeding range. Even when the voltage difference exceeds the above-mentioned vicinity range and is in a non-linear region, measurement is possible if a part of the spot reaches any of the sensor elements a and b of the two-divided sensor S and the voltage difference can be detected. is there.
- the main controller 9 holds nonlinear characteristic data (table), and the amount of movement from the detected voltage difference to the focus position of the objective lens can be calculated (converted) immediately.
- (Second Embodiment) 5 and 6 are views showing a second embodiment of the present invention.
- This embodiment includes the same components as those in the first embodiment. Therefore, the same constituent elements are denoted by common reference numerals, and redundant description is omitted.
- the measurement workpiece as a measurement target in the present embodiment is a substantially ring-shaped internal gear 17, and an inner tooth 18 is formed on the inner surface.
- the internal gear 17 is placed on a rotary stage 19 having a similar hollow structure.
- the rotary stage 19 is assembled on the X-axis stage 2 so as to be rotatable in the ⁇ direction.
- the rotary stage 19 is connected to the stage driver 8 similarly to the X-axis stage 2 and the Y-axis stage 3.
- a circular center stage 20 is provided on the X-axis stage 2 inside the rotary stage 19 having a hollow structure.
- a prism 21 as a reflecting means is installed at the edge of the center stage 20 with the square reflecting plane 22 having an angle of 45 degrees facing outward.
- the laser light L transmitted through the objective lens 4 strikes the reflection plane 22 of the prism 21.
- the laser beam L reflected by the reflection plane 22 hits the internal teeth 18 of the internal gear 17.
- the return light L ′ reflected by the internal gear 18 of the internal gear 17 is reflected again by the reflection plane 22 and enters the objective lens 4, and is transmitted again through the objective lens 4 and detected by the same optical path as in the previous embodiment. Is done. Accordingly, it is possible to measure the height dimension (unevenness dimension) of the inner teeth 2 in the X-axis direction by auto-focusing the surface of the inner teeth 18 while rotating the internal gear 17 by the rotary stage 19.
- the objective lens 4 need not be moved to the final focus position.
- the amount of movement of the objective lens 4 reaching the focus position can be calculated by calculation. Therefore, it is possible to shorten the measurement time when the internal gear 17 is continuously scanned in the rotation direction to measure the inner surface shape of the internal teeth 18.
- the voltage Calculate the correction value from the difference and add the correction value to the actual vertical position of the objective lens until the objective lens is in focus can be calculated.
- the focus state is not actually entered, it is only necessary to enter the vicinity range, so the surface shape of the measurement work can be measured by continuously scanning the measurement work, and the measurement time can be shortened. it can.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
しかしながら、このような従来の技術にあっては、測定ワークを所定ピッチごとに間欠的にスキャンし、そこでフォーカスが合った時に高さ情報を取得して、次のピッチ送りをするため、測定に時間がかかる。
図1~図4は、本発明の第1実施形態を示す図である。図中、XYは水平面上で直交する二方向で、Zは上下方向である。また、図1は概略的に図示されている。
また、電圧差が上記近傍範囲を超えて非線形領域にある場合でも、二分割センサーSのセンサー素片a,bのいずれにもスポットの一部が到達して電圧差が検出できれば測定は可能である。すなわち、対物レンズ4のフォーカス位置までの移動量に対応するスポットの重心位置と電圧差の対応関係(非線形特性)が既知であるため、近傍範囲を二分割センサーSの非線形領域まで拡張して形状測定することは可能であるが測定誤差が増大する。この場合には非線形特性のデータ(テーブル)をメインコントローラ9が保持し、検出された電圧差から即座に対物レンズのフォーカス位置までの移動量を算出(変換)することができる。
図5及び図6は本発明の第2実施形態を示す図である。本実施形態は、前記第1実施形態と同様の構成要素を備えている。よって、それら同様の構成要素については共通の符号を付すとともに、重複する説明を省略する。
本発明によれば、測定ワークからの戻り光が二分割センサーの中心に合致しなくても、二分割センサーの2つのセンサーの電圧差が近傍範囲に入った際には、その電圧差から補正値を算出し、その補正値を対物レンズの実際の上下方向での位置に加算することにより、対物レンズがフォーカス状態になるまで(戻り光が二分割センサーの中心に合致するまで)の移動量を算出することができる。このように、実際にフォーカス状態にならなくても、近傍範囲に入れば良いため、測定ワークを連続スキャンして測定ワークの表面形状を測定することができ、測定時間の短縮化を図ることができる。
本国際特許出願は米国指定に関し、2009年2月2日に出願された日本国特許出願第2009-21903(2009年2月2日出願)について米国特許法第119条(a)に基づく優先権の利益を援用し、当該開示内容を引用する。
Claims (6)
- 測定ワークの表面に対して、上下方向でレーザープローブによるオートフォーカス制御を施しながら、測定ワークを水平方向へ連続的にスキャンさせ、レーザープローブの戻り光が二分割センサーの中心で受光されるように制御されるオートフォーカス光学系の対物レンズの上下方向での移動量から測定ワークの表面形状を測定する非接触表面形状測定方法であって、
前記二分割センサーの2つのセンサー間の電圧差を検出し、検出した電圧差がフォーカス位置からの変位に対してリニアになる近傍範囲内にあるかを検出し、
電圧差が近傍範囲内にあるときに対物レンズの上下方向でのフォーカス位置に対する補正値を算出し、
補正値を対物レンズの実際の上下方向での位置に加算して対物レンズの上下方向での移動量を算出することを特徴とする非接触表面形状測定方法。 - 前記検出した電圧差が前記近傍範囲内にないときには、前記近傍範囲に入るまで前記水平方向への連続スキャンを停止することを特徴とする請求項1記載の非接触表面形状測定方法。
- 前記近傍範囲を、前記二分割センサーが電位差を検出できる範囲であって、検出した電位差がフォーカス位置からの変位に対して非線形な範囲まで拡張したことを特徴とする請求項1または2に記載の非接触表面形状測定方法。
- 測定ワークの表面に対して、上下方向でレーザープローブによるオートフォーカス制御を施しながら、オートフォーカス光学系の対物レンズの上下方向での移動量から測定ワークの表面形状を測定する非接触表面形状測定装置であって、
前記測定ワークを前記対物レンズの光軸に対して水平方向へ連続的にスキャンするスキャナーと、
前記レーザープローブの戻り光が二分割センサーの中心で受光されるように前記対物レンズの上下方向の移動量を制御するコントローラと
を具備し、
前記コントローラは、
前記二分割センサーの2つのセンサー間の電圧差を検出し、検出した電圧差がフォーカス位置からの変位に関連づけられる近傍範囲内にあるかを検出し、
電圧差が近傍範囲内にあるときに対物レンズの上下方向でのフォーカス位置に対する補正値を算出し、
補正値を対物レンズの実際の上下方向での位置に加算して対物レンズの上下方向での移動量を算出することを特徴とする非接触表面形状測定装置。 - 前記近傍範囲は前記検出した電位差がフォーカス位置からの変位と線形関係にある範囲であることを特徴とする請求項4記載の非接触表面形状測定装置。
- 前記コントローラは、
前記検出した電圧差が前記近傍範囲内にないときには、前記近傍範囲に入るまで前記水平方向への連続スキャンを停止させることを特徴とする請求項4または5に記載の非接触表面形状測定装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112010000683.0T DE112010000683B4 (de) | 2009-02-02 | 2010-01-28 | Verfahren und Vorrichtung für ein nicht-kontaktierendes Messen einer Oberflächenform |
SG2011055126A SG173479A1 (en) | 2009-02-02 | 2010-01-28 | Method for noncontact measurement of surface shape and device thereof |
US13/146,665 US8570532B2 (en) | 2009-02-02 | 2010-01-28 | Noncontact surface shape measuring method and apparatus thereof |
JP2010548544A JP5584140B2 (ja) | 2009-02-02 | 2010-01-28 | 非接触表面形状測定方法およびその装置 |
CN2010800060799A CN102301200A (zh) | 2009-02-02 | 2010-01-28 | 非接触表面形状测量方法及其装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009021903 | 2009-02-02 | ||
JP2009-021903 | 2009-02-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010087391A1 true WO2010087391A1 (ja) | 2010-08-05 |
Family
ID=42395649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/051102 WO2010087391A1 (ja) | 2009-02-02 | 2010-01-28 | 非接触表面形状測定方法およびその装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8570532B2 (ja) |
JP (1) | JP5584140B2 (ja) |
CN (1) | CN102301200A (ja) |
DE (1) | DE112010000683B4 (ja) |
SG (1) | SG173479A1 (ja) |
WO (1) | WO2010087391A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016125830A (ja) * | 2014-12-26 | 2016-07-11 | 三鷹光器株式会社 | 非接触エッジ形状測定方法及びその装置 |
JP2018116006A (ja) * | 2017-01-20 | 2018-07-26 | 三鷹光器株式会社 | 非接触表面高さ測定方法およびその装置 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120194651A1 (en) * | 2011-01-31 | 2012-08-02 | Nikon Corporation | Shape measuring apparatus |
US10100393B2 (en) | 2013-02-21 | 2018-10-16 | Nlight, Inc. | Laser patterning of multi-layer structures |
US10464172B2 (en) | 2013-02-21 | 2019-11-05 | Nlight, Inc. | Patterning conductive films using variable focal plane to control feature size |
US9842665B2 (en) | 2013-02-21 | 2017-12-12 | Nlight, Inc. | Optimization of high resolution digitally encoded laser scanners for fine feature marking |
US9537042B2 (en) * | 2013-02-21 | 2017-01-03 | Nlight, Inc. | Non-ablative laser patterning |
US10618131B2 (en) | 2014-06-05 | 2020-04-14 | Nlight, Inc. | Laser patterning skew correction |
CN105720463B (zh) | 2014-08-01 | 2021-05-14 | 恩耐公司 | 光纤和光纤传输的激光器中的背向反射保护与监控 |
JP6402029B2 (ja) | 2014-12-25 | 2018-10-10 | 株式会社エンプラス | 測定方法 |
US9837783B2 (en) | 2015-01-26 | 2017-12-05 | Nlight, Inc. | High-power, single-mode fiber sources |
US10050404B2 (en) | 2015-03-26 | 2018-08-14 | Nlight, Inc. | Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss |
CN107924023B (zh) | 2015-07-08 | 2020-12-01 | 恩耐公司 | 具有用于增加的光束参数乘积的中心折射率受抑制的纤维 |
US10074960B2 (en) | 2015-11-23 | 2018-09-11 | Nlight, Inc. | Predictive modification of laser diode drive current waveform in order to optimize optical output waveform in high power laser systems |
US11179807B2 (en) | 2015-11-23 | 2021-11-23 | Nlight, Inc. | Fine-scale temporal control for laser material processing |
US10434600B2 (en) | 2015-11-23 | 2019-10-08 | Nlight, Inc. | Fine-scale temporal control for laser material processing |
EP3389915B1 (en) | 2016-01-19 | 2021-05-05 | NLIGHT, Inc. | Method of processing calibration data in 3d laser scanner systems |
EP3519871A1 (en) | 2016-09-29 | 2019-08-07 | NLIGHT, Inc. | Adjustable beam characteristics |
US10730785B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Optical fiber bending mechanisms |
US10732439B2 (en) | 2016-09-29 | 2020-08-04 | Nlight, Inc. | Fiber-coupled device for varying beam characteristics |
EP3607389B1 (en) | 2017-04-04 | 2023-06-07 | Nlight, Inc. | Optical fiducial generation for galvanometric scanner calibration |
CN109341605B (zh) * | 2018-11-08 | 2020-07-10 | 广西师范大学 | 一种基于激光外差干涉技术的复合测头 |
CN110044277B (zh) * | 2019-04-04 | 2020-11-24 | 深圳市华星光电技术有限公司 | 框胶检测装置和框胶检测方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0589480A (ja) * | 1991-09-26 | 1993-04-09 | Sony Magnescale Inc | 変位検出装置 |
JPH10148506A (ja) * | 1996-11-15 | 1998-06-02 | Ricoh Co Ltd | 光学式変位計およびこれを用いた面形状測定装置、変位測定方法およびこれを用いた面形状測定方法、変位測定方法および面形状測定方法をコンピュータに実行させるプログラムを格納したコンピュータが読取可能な記憶媒体 |
JPH1172311A (ja) * | 1997-08-29 | 1999-03-16 | Nikon Corp | 断面形状測定装置 |
JP2004145009A (ja) * | 2002-10-24 | 2004-05-20 | Mitsutoyo Corp | フォーカシングサーボ装置、画像測定装置及びフォーカシングサーボ方法 |
JP2005201656A (ja) * | 2004-01-13 | 2005-07-28 | Mitaka Koki Co Ltd | 非接触表面形状測定方法 |
JP2008268122A (ja) * | 2007-04-24 | 2008-11-06 | Mitaka Koki Co Ltd | 非接触形状測定装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4958826A (ja) * | 1972-10-04 | 1974-06-07 | ||
US4300167A (en) * | 1980-02-07 | 1981-11-10 | Circon Corporation | Automatic iris control system |
US4577967A (en) * | 1983-05-20 | 1986-03-25 | Citizen Watch Co., Ltd. | Surface shape measurement apparatus |
DE3536700C3 (de) * | 1985-10-15 | 1994-07-07 | Focus Mestechnik Gmbh & Co Kg | Gerät zum Ermitteln des lokalen Abstandes einer Prüffläche von einer Referenzfläche, deren geometrische Lage in bezug auf das Gerät bekannt ist |
DE3719422A1 (de) * | 1986-12-19 | 1988-06-30 | Hommelwerke Gmbh | Vorrichtung zur beruehrungsfreien messung eines abstandes von einer oberflaeche, insbesondere zur abtastung einer kontur einer oberflaeche eines werkstueckes laengs eines messweges |
JPH02125498A (ja) | 1988-11-04 | 1990-05-14 | Hitachi Chem Co Ltd | 高密度配線板およびその製造法 |
EP0505717B1 (de) * | 1991-03-25 | 1998-07-29 | Heidelberger Druckmaschinen Aktiengesellschaft | Verfahren und Vorrichtung zur optischen Messung von Distanzen |
DE4219311C2 (de) | 1991-06-13 | 1996-03-07 | Sony Magnescale Inc | Verschiebungsdetektor |
JPH0812046B2 (ja) * | 1993-05-24 | 1996-02-07 | 三鷹光器株式会社 | 二段検出式非接触位置決め装置 |
JP2003100246A (ja) * | 2001-09-25 | 2003-04-04 | Toshiba Corp | 荷電ビーム装置並びにパターン測定方法およびパターン描画方法 |
US7286246B2 (en) * | 2003-03-31 | 2007-10-23 | Mitutoyo Corporation | Method and apparatus for non-contact three-dimensional surface measurement |
JP4513832B2 (ja) | 2007-07-13 | 2010-07-28 | ヤマハ株式会社 | D級増幅回路 |
JP5153582B2 (ja) * | 2008-02-20 | 2013-02-27 | 三洋電機株式会社 | 対物レンズ駆動装置の検査方法、検査装置 |
-
2010
- 2010-01-28 US US13/146,665 patent/US8570532B2/en not_active Expired - Fee Related
- 2010-01-28 CN CN2010800060799A patent/CN102301200A/zh active Pending
- 2010-01-28 DE DE112010000683.0T patent/DE112010000683B4/de not_active Expired - Fee Related
- 2010-01-28 JP JP2010548544A patent/JP5584140B2/ja active Active
- 2010-01-28 SG SG2011055126A patent/SG173479A1/en unknown
- 2010-01-28 WO PCT/JP2010/051102 patent/WO2010087391A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0589480A (ja) * | 1991-09-26 | 1993-04-09 | Sony Magnescale Inc | 変位検出装置 |
JPH10148506A (ja) * | 1996-11-15 | 1998-06-02 | Ricoh Co Ltd | 光学式変位計およびこれを用いた面形状測定装置、変位測定方法およびこれを用いた面形状測定方法、変位測定方法および面形状測定方法をコンピュータに実行させるプログラムを格納したコンピュータが読取可能な記憶媒体 |
JPH1172311A (ja) * | 1997-08-29 | 1999-03-16 | Nikon Corp | 断面形状測定装置 |
JP2004145009A (ja) * | 2002-10-24 | 2004-05-20 | Mitsutoyo Corp | フォーカシングサーボ装置、画像測定装置及びフォーカシングサーボ方法 |
JP2005201656A (ja) * | 2004-01-13 | 2005-07-28 | Mitaka Koki Co Ltd | 非接触表面形状測定方法 |
JP2008268122A (ja) * | 2007-04-24 | 2008-11-06 | Mitaka Koki Co Ltd | 非接触形状測定装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016125830A (ja) * | 2014-12-26 | 2016-07-11 | 三鷹光器株式会社 | 非接触エッジ形状測定方法及びその装置 |
JP2018116006A (ja) * | 2017-01-20 | 2018-07-26 | 三鷹光器株式会社 | 非接触表面高さ測定方法およびその装置 |
Also Published As
Publication number | Publication date |
---|---|
US8570532B2 (en) | 2013-10-29 |
US20110279826A1 (en) | 2011-11-17 |
DE112010000683T5 (de) | 2012-10-31 |
CN102301200A (zh) | 2011-12-28 |
JPWO2010087391A1 (ja) | 2012-08-02 |
DE112010000683B4 (de) | 2014-05-15 |
SG173479A1 (en) | 2011-09-29 |
JP5584140B2 (ja) | 2014-09-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5584140B2 (ja) | 非接触表面形状測定方法およびその装置 | |
CN102818528B (zh) | 用于在增强景深的情形下检查物体的装置和方法 | |
JP3923945B2 (ja) | 非接触表面形状測定方法 | |
JP2010261949A (ja) | 正反射面の相対位置を測定する方法及び装置 | |
JP5242940B2 (ja) | 非接触形状測定装置 | |
CN102043352B (zh) | 调焦调平检测装置 | |
JP5439218B2 (ja) | 画像測定機 | |
JPH0122977B2 (ja) | ||
JP2010014656A (ja) | 非接触側面形状測定装置 | |
JP4532556B2 (ja) | 測定物体を測定するためのミラー装置を備えた干渉計 | |
JP4467599B2 (ja) | ボンディング装置 | |
JP6014902B2 (ja) | 焦点制御装置及びその方法 | |
JP2018031824A (ja) | 露光装置 | |
US9594230B2 (en) | On-axis focus sensor and method | |
KR101751414B1 (ko) | 초정밀 측정 기능을 갖는 3차원 측정장치 | |
TWI507663B (zh) | 線性平台之量測裝置及其量測方法 | |
JP5346670B2 (ja) | 非接触表面形状測定装置 | |
JP2019163946A (ja) | 非接触表面形状測定装置 | |
JPS63201509A (ja) | 表面粗さ測定装置 | |
US20230042985A1 (en) | Laser Straightness Measuring Apparatus | |
JP2018119817A (ja) | 形状測定装置および形状測定方法 | |
JP6567410B2 (ja) | 非接触凹部形状測定装置 | |
JP2016017854A (ja) | 形状測定装置 | |
JP2001091211A (ja) | 高さ測定装置 | |
JP2012002573A (ja) | 非接触形状測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080006079.9 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10735856 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010548544 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13146665 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 112010000683 Country of ref document: DE Ref document number: 1120100006830 Country of ref document: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 10735856 Country of ref document: EP Kind code of ref document: A1 |