WO2010067837A1 - 推力発生機構、駆動装置,xyステージ及びxyzステージ - Google Patents
推力発生機構、駆動装置,xyステージ及びxyzステージ Download PDFInfo
- Publication number
- WO2010067837A1 WO2010067837A1 PCT/JP2009/070667 JP2009070667W WO2010067837A1 WO 2010067837 A1 WO2010067837 A1 WO 2010067837A1 JP 2009070667 W JP2009070667 W JP 2009070667W WO 2010067837 A1 WO2010067837 A1 WO 2010067837A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- armature
- magnetic pole
- permanent magnet
- gap
- magnetic
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
- H02P23/18—Controlling the angular speed together with angular position or phase
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
- H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
- H02P25/06—Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
- H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
- H02P25/06—Linear motors
- H02P25/062—Linear motors of the induction type
Definitions
- the present invention relates to a configuration for generating thrust, and by making the direction of magnetic flux the same direction, the leakage flux is reduced, a highly efficient thrust generation mechanism, and a drive device using electromagnetic force, which is used as a drive source.
- the present invention relates to an XY stage and an XYZ stage used in the semiconductor manufacturing apparatus and the industrial machine.
- a linear motor having a conventional thrust generating mechanism has a shape in which a rotating machine is cut open, and a large attractive force acts between a mover made of a magnet array and an armature.
- Patent Document 1 discloses a linear motor in which magnetic poles having a first polarity and a second polarity are alternately arranged in order to cancel the magnetic attractive force.
- the same armature winding is arranged in the armature core, and the magnetic flux generated by passing a current through the armature winding passes through the magnetic poles. Magnetic lower and upper magnetic poles and magnetic poles in the same direction are generated.
- a reverse magnetic pole is generated in the adjacent magnetic pole.
- Patent Document 2 describes a table configured by alternately combining magnetic pole teeth with the same winding.
- Patent Document 3 also describes a table using a driving device having a first facing portion and a second facing portion having different polarities.
- the adjacent magnetic poles are magnetic poles having different polarities, a magnetic flux is generated in the gap direction and between the magnetic poles. Since the magnetic flux between the adjacent magnetic poles becomes a magnetic flux that does not link to the magnet, it becomes a useless magnetic flux that does not contribute to the force. Therefore, there is a drawback that the magnetic utilization efficiency of the magnetic circuit is low. Furthermore, in order to generate magnetic fluxes in opposite directions with adjacent magnetic poles, it is necessary to complicate the armature core and dispose the armature winding at a position away from the magnet facing portion. Further, the conventional XYZ stage driving device has a large amount of leakage magnetic flux, and therefore becomes large and heavy. For this reason, there is a problem in that deformation due to its own weight occurs due to the heavy weight of the drive device, and the accuracy is reduced and the installation location is restricted.
- the present invention has been made to solve these drawbacks, and an object thereof is to provide a structure capable of generating a high thrust force. Another object of the present invention is to provide a small and light driving device and to provide an XY stage or an XYZ stage with improved accuracy and high response by the small and light driving device.
- the present invention provides a thrust generating mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, wherein the armature core is A magnetic pole tooth disposed opposite to the magnetic pole side of the permanent magnet via a gap; a core connecting the magnetic pole teeth; and a plurality of the armature cores, wherein the plurality of armature cores have the same polarity. It is characterized by having.
- the present invention provides a thrust generating mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable,
- the armature core, the armature core includes a magnetic pole tooth disposed opposite to the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth, and a plurality of the armature iron cores with respect to the magnetic pole pitch P of the mover
- the plurality of armature cores have the same polarity.
- the present invention provides a thrust generating mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable,
- the armature core includes the armature core, the armature core includes magnetic pole teeth opposed to the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth.
- the armature core has the same polarity.
- the present invention provides a thrust generation mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, and the armature
- the iron core includes magnetic pole teeth opposed to the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth, and has a plurality of the armature cores. The direction is the same direction.
- the present invention provides a thrust generation mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, and the armature
- the iron core includes a magnetic pole tooth disposed opposite to the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth, and has a plurality of the armature cores, and the plurality of the armature cores are the same.
- the armature core has a thickness t in the longitudinal direction of the armature P ⁇ t with respect to the magnetic pole pitch P of the mover, and the plurality of armature cores have the same polarity. It is a feature.
- the present invention provides a thrust generation mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, and the armature
- the iron core includes magnetic pole teeth arranged opposite to the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth, and has a plurality of the armature iron cores, with respect to the magnetic pole pitch P of the mover.
- the cores arranged opposite to an arbitrary winding current generate a magnetic flux in the same direction in the gap.
- the present invention provides a thrust generation mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, and the armature
- the iron core includes magnetic pole teeth opposed to the magnetic pole side of the permanent magnet via a gap, and a core that connects the magnetic pole teeth, and a plurality of the armature cores are the same for the gap at any winding current.
- the magnetic flux is generated in the same direction.
- the present invention provides a thrust generation mechanism in which an armature composed of an armature core and a winding and a mover having a permanent magnet are relatively movable, and the armature
- the iron core includes magnetic pole teeth arranged opposite to each other on the magnetic pole side of the permanent magnet via a gap, and a core connecting the magnetic pole teeth, and an arbitrary winding current is applied to a magnet array having two polarities with respect to the magnetic pole pitch P.
- the polarity generated in the air gap of the armature is one polarity.
- the thrust generating mechanism of the present invention is characterized in that a common winding is wound around the plurality of armature cores.
- the thrust generating mechanism of the present invention is characterized in that armature windings are arranged on the magnetic pole teeth arranged opposite to both sides of the permanent magnet on the magnetic pole side.
- the thrust generating mechanism of the present invention is characterized in that the magnetic pole teeth arranged opposite to both sides on the magnetic pole side of the permanent magnet are tapered toward the magnet.
- the thrust generating mechanism of the present invention is characterized in that the magnet facing surfaces of the magnetic pole teeth arranged opposite to both sides on the magnetic pole side of the permanent magnet are cut out.
- the thrust generating mechanism of the present invention is a thrust generating mechanism having a plurality of armature units as a single phase and having a plurality of phases, and a plurality of the above-mentioned adjacent to the pitch P of the magnetic poles.
- the present invention is to provide a linear motor having the thrust generation mechanism described above.
- the present invention provides magnetic pole teeth disposed on both sides of a permanent magnet via a gap, an iron core connecting these magnetic pole teeth, and an electric machine wound around the plurality of magnetic pole teeth. It is an object of the present invention to provide a stage constituted by a small and lightweight driving device by comprising an armature having a child winding and permanent magnet rows arranged so that magnetic poles are alternately arranged.
- the drive device can be configured to be small and lightweight.
- the present invention it is possible to provide a linear motor using a highly efficient thrust generating mechanism. Further, according to the present invention, since a small and light driving device can be configured, the weight of the driving unit can be reduced, and an XY stage or an XYZ stage with high accuracy and high response can be provided.
- FIG. 1 shows a thrust generation mechanism according to an embodiment of the present invention.
- FIG. 3 shows a cross-sectional view of the YZ plane of the thrust generating mechanism of FIG. Sectional drawing of the XY plane of the thrust generation mechanism of FIG. 1 is shown.
- the magnetic flux of the armature core of the thrust generation mechanism of FIG. 1 is shown.
- positioning of the armature winding of the thrust generation mechanism of FIG. 1 is shown.
- the armature core comprised with the laminated steel plate of the thrust generation mechanism of FIG. 1 is shown.
- the modification of the pitch of the magnetic pole of the thrust generation mechanism of FIG. 1 is shown.
- FIG. 1 shows an example of a shape of the magnetic pole tooth of the thrust generation mechanism of FIG. 1 .
- 2 shows an armature core unit in which three armature cores of the thrust generating mechanism of FIG. 1 are arranged in parallel.
- FIG. 11 shows a cross-sectional view of FIG. 10.
- 6 shows another thrust generating mechanism according to another embodiment of the present invention.
- An embodiment in which an auxiliary iron core is inserted between a plurality of armature iron cores is shown.
- An embodiment in which the upper magnetic pole teeth and the lower magnetic pole teeth are configured to become narrower toward the magnet is shown.
- interval of an armature core is shown.
- 3 shows another embodiment of the present invention.
- FIG. 1 shows distribution of an armature magnetic flux
- FIG. 1 shows distribution of an armature magnetic flux
- FIG. 1 shows sectional drawing of a single armature unit.
- FIG. 1 shows the distribution of the magnetic flux produced by the magnet and the magnetic flux produced by the armature
- FIG. 1 shows a cross-sectional view of a single armature unit.
- the distribution of magnetic flux when a plurality of armature units are arranged is shown.
- An embodiment in which armature units are alternately arranged is shown, (a) is a perspective view, and (b) is a plan view.
- the embodiment which made the armature iron core triangular shape is shown, (a) is a perspective view and (b) is a top view.
- FIG. 1 An embodiment of a structure in which an armature core sandwiches a magnet array from both sides is shown, a) is a perspective view, and (b) is a plan view. The embodiment of the structure which made the magnet row
- FIG. 4 shows another embodiment of the drive device of the present invention. 4 shows another embodiment of the drive device of the present invention. 4 shows another embodiment of the drive device of the present invention. 4 shows another embodiment of the drive device of the present invention. 4 shows another embodiment of the drive device of the present invention. 4 shows another embodiment of the drive device of the present invention. It is a block diagram of the control system of the drive device of this invention. It is a block diagram of the other control system of the drive device of this invention. It is a block diagram of the other control system of the drive device of this invention. The other embodiment of the drive device of this invention is shown, (a) is a perspective view, (b) is a graph which shows the thrust characteristic of a drive device. The structural example of the XYZ stage of this invention is shown. The other structural example of the XYZ stage of this invention is shown.
- FIG. 1 shows a thrust generation mechanism according to an embodiment of the present invention.
- a sectional view of the thrust generating mechanism on the YZ plane is shown in FIG. 2, and a sectional view on the XY plane is shown in FIG. 1 to 3,
- the armature core unit 100 includes an upper magnetic pole tooth 11 facing the magnet, a lower magnetic pole tooth 12 facing the magnet, an upper magnetic pole tooth 11 and a lower magnetic pole tooth 12. It is comprised by the armature core 1 which connects.
- the upper magnetic pole teeth 11 and the lower magnetic pole teeth 12 are arranged to face each other via the gap 4, and the magnet row 3 is inserted into the gap 4.
- the magnet array 3 is arranged such that rectangular magnets have a pitch P, a surface facing the magnetic pole teeth is a magnetic pole surface, and the magnetic poles are alternated by adjacent magnets.
- the armature core having the same shape as that of the armature core unit 100 is arranged so that the pitch between the armature core unit 100 and the armature core unit 100 is 2P with respect to the pitch P of the magnet.
- the armature unit 200 has a configuration in which the armature windings 2 are arranged so as to be common to the plurality of armature core units 100.
- the armature unit is a structure in which a plurality of armature cores are provided with the same armature winding, and any number of armature cores can be wound around the armature winding. is there.
- the armature windings can be arranged regardless of the location of the armature core.
- An arrangement example of the armature winding is shown in FIG. Since the position of the armature winding is not limited, the degree of freedom for the arrangement of the armature winding is improved. Therefore, even when a mover support mechanism or cooling structure is required, the mover support mechanism or cooling structure can be arranged without being affected by the position of the armature winding. Further, as shown in FIG. 5 (a), the direction of the magnetic flux of the magnetic pole teeth is also the same, so that the armature winding can be arranged at the opposing portion of the magnet, and a magnetic circuit configuration with a good magnetic flux utilization rate becomes possible. .
- the armature core can be manufactured by laminating steel plates.
- FIG. 7A shows an armature core made of laminated steel sheets.
- FIG. 7B shows a cross-sectional view of the YZ plane in FIG. It is possible to change the characteristics of the generated force by changing the shape of the tip. An example in which the tip shape is changed is shown in FIG.
- the direction of magnetic flux of the plurality of armature cores is substantially the same, and the distance between adjacent armature cores can be reduced.
- the armature core pitch is 2P with respect to the magnet pitch P
- the magnetic pole teeth facing the magnet are tapered toward the magnet, so that the magnetic flux can be concentrated and a greater force can be obtained.
- An example of the shape of the magnetic pole teeth is shown in FIG. Further, since the pulsation of the magnetic flux can be reduced by using the tapered shape, the pulsation of the thrust can be reduced.
- FIG. 10 shows an armature core unit 100 in which three armature cores 1 are arranged in parallel and an armature winding 2 installed on a core facing a magnet.
- FIG. 11 shows this cross-sectional view.
- the embodiment shown in FIG. 10 shows a case of a three-phase configuration in which one unit is composed of three units. In each phase unit, the interval between adjacent armatures is (nP + P / m).
- FIG. 2 Another embodiment of the present invention is shown in FIG.
- the present invention is a structure having a core in which magnetic pole teeth are arranged facing the upper and lower surfaces of a magnet and the upper and lower magnetic pole teeth are connected.
- the permanent magnet 203 is sandwiched between the upper magnetic pole tooth 211 and the lower magnetic pole tooth 212 with a gap.
- the upper magnetic pole tooth 211, the lower magnetic pole tooth 212, and the iron core 201 constitute a magnetic flux path.
- a plurality of armature cores 301 composed of the iron core 201, the upper magnetic pole teeth 211, and the lower magnetic pole teeth 212 are arranged.
- a common winding 202 is disposed on a plurality of armature cores.
- FIG. 3 A plurality of armature core units 301 composed of an iron core 201, upper magnetic pole teeth 211, and lower magnetic pole teeth 212 are arranged, and an auxiliary iron core 204 is inserted between the plurality of armature cores. By doing in this way, it is possible to enlarge the cross-sectional area of the iron core used as the path
- FIG. 16 shows another embodiment of the present invention.
- FIG. 16 shows an example in which an armature unit is constituted by three armature core units, and a three-phase linear motor is constituted by three armature units. And it is the figure which cut off one side of the coil in the perpendicular cross section of the relative movement direction so that the structure of a magnet part may be understood.
- a configuration in which the magnet array side as the mover is fixed and the armature unit side is moved is also possible.
- FIG. 17A shows the distribution of the armature magnetic flux Bc at the moment when a constant current value is applied to the windings of the armature unit shown in the cross-sectional view of FIG.
- the armature magnetic flux may be reduced or reversed in the end portion of the 2P region, but it has a characteristic of having approximately one polarity.
- FIG. 18 (a) and 18 (b) show the distribution of the magnetic flux generated by the magnet and the magnetic flux generated by the armature when a current is passed through the winding wound around the armature core.
- FIG. 18 (b) there are two magnets in the gap region of the length 2P of the armature core 1.
- the armature magnetic flux Bc generated in the air gap at a certain current value has one polarity as shown in the upper side of FIG.
- the magnetic flux Bm created in the air gap by the magnet is characterized by having two polarities as shown in the lower side of FIG.
- the distribution of the armature magnetic flux Bc is as shown in FIG.
- the magnetic flux generated in the air gap by the plurality of armatures has approximately one polarity.
- force is generated by interaction with magnets having two polarities.
- the armature since the armature has only one polarity, it is possible to reduce the magnetic phase interference between the armatures.
- the polarity of the current is switched, the direction of the armature magnetic flux is also switched and has the opposite polarity, but even in that case, it has substantially one polarity.
- the armature unit of the present invention can be changed in arrangement with respect to the magnet array.
- the space between the armature units is made effective by arranging the units alternately with respect to the magnet row.
- 20A is a perspective view of a unit arrangement example
- FIG. 20B is a plan view.
- the armature unit can reduce the occupation space between the units by making the armature core unit 100 triangular along the surface of the magnet.
- FIG. 21A is a perspective view of a unit arrangement example when the armature core is triangular when viewed from above, and
- FIG. 21B is a top view thereof.
- FIG. 22A shows a perspective view of an example of a configuration sandwiched from both sides
- FIG. 22B shows a top view.
- the magnet 3 may have a round shape and the mover may have an axial shape. Furthermore, as shown in FIGS. 24 (a) and 24 (b), the magnets can be arranged with the poles facing each other, or the magnets can be spaced apart.
- linear motor has been described as an embodiment of the thrust generating mechanism of the present invention
- a vibration type linear actuator in which the mover relatively reciprocates by supplying an alternating current to the windings of the armature unit may be used. Is available.
- the embodiment of the present invention has been described as a linear motor in which magnets are linearly arranged, it can also be driven as a rotating electric machine if the magnets are arranged in an arc shape.
- the magnet array can be arranged in a disk shape or a cylindrical shape.
- FIG. 25 is a perspective view of an armature unit constituting the drive device according to the eleventh embodiment of the present invention.
- the armature unit 610 is composed of a magnet row 612 including a row of a stator 3 and a permanent magnet 604 composed of a single-phase winding 601 and a plurality of magnetic poles 602.
- FIG. 26 is a cross-sectional view of the armature unit 610 of the drive device according to the eleventh embodiment of the present invention cut along a plane perpendicular to the traveling direction of the magnet row 612.
- the magnetic pole 602 includes an upper magnetic pole tooth 606 and a lower magnetic pole tooth 607 disposed so as to face the magnet 604, and an iron core 608 connecting them.
- the winding 601 is wound around the upper and lower magnetic pole teeth 606 and 607 of the plurality of magnetic poles 602.
- the winding 601 can be wound around another part of the magnetic pole 602, and the upper and lower magnetic pole teeth 606, 607 and the iron core 608 can be integrally formed.
- the 25 includes a magnet 604 arranged so that the magnetic poles of adjacent magnets are reversed.
- the stator 603 is normally fixed to a structure or the like, and a magnet row 612 provided with magnets 604 moves relative to the stator 603. A configuration in which the magnet array 612 is fixed and the magnetic pole 602 side is moved is also possible.
- FIG. 27 is a cross-sectional view of the armature unit 610 constituting the drive device according to the eleventh embodiment of the present invention, taken along a plane parallel to the traveling direction of the magnet row 612.
- the pitch of the magnets is P
- the magnetic poles 602 are arranged at intervals of about 2 nP in the traveling direction of the magnet row 612.
- n 1, 2, 3,.
- the pitch of the magnetic poles 602 constituting the armature unit is approximately 2 nP, the pulsation of thrust can be reduced by adjusting the pitch.
- FIG. 28 shows an example of a driving device that uses three armature units 610 each composed of four magnetic poles 602 and that is driven in three phases as shown in FIG.
- the armature unit 610 is arranged with a phase difference of 2P / m (m is the number of phases of the driving device), whereby the driving device can be configured.
- m is the number of phases of the driving device
- An m-phase driving device can be configured by the m armature units 610.
- the number of magnetic poles 602 of the armature unit 610 is four, but it is not limited thereto.
- the X-axis and Y-axis drive devices By configuring the X-axis and Y-axis drive devices with the drive device of the present invention, it is possible to reduce the weight of the X-axis and Y-axis magnet arrays 721 and 722, thereby reducing the overall weight of the device. In addition, the X-axis and Y-axis drive devices are lighter, improving the responsiveness of the system and reducing the load.
- FIG. 30 shows the configuration of the twelfth embodiment of the present invention.
- a Z-axis base 741 is mounted on an XY stage in which the X-axis and the Y-axis are configured by the driving device shown in FIG. 28, and a Z-axis driving device 713 and a Z-axis magnet row 723 are provided. Further, the Z-axis drive device 713 can be directly fixed to the Y-axis drive device 712 or the like without installing the Z-axis base 741 or the like.
- the Z-axis drive device can be configured to be lightweight, a relative position change between the axes occurs due to deformation caused by the self-weight of the Z-axis that is conventionally generated when the XY-axis is driven.
- the relative position between the axes is stabilized, and the position accuracy is improved.
- the weight of the entire stage can be reduced, the responsiveness of the stage is improved by reducing the load.
- FIG. 31 shows Embodiment 13 of the present invention.
- FIG. 31 shows a configuration diagram of a Z-axis drive system according to the present invention.
- a driving device 611 is attached to the Z-axis base 741.
- the Z-axis magnet array 723 can be manufactured lightly by reducing the leakage magnetic flux.
- the Z-axis direction is a direction in which gravity acts, and the weight of the Z-axis magnet row 723 is always generated as a load. Therefore, it is necessary to supply power to the driving device 611 to support the weight of the Z-axis magnet row. .
- the lightweight Z-axis magnet row 723 can be configured, the electric power for supporting its own weight may be small.
- the magnet row when the magnet row is about to fall due to its own weight of the Z-axis magnet row 723, a force is generated in a direction that prevents the fall due to the attractive force of the magnet 604, and the fall of the magnet row can be prevented. Furthermore, since the Z-axis magnet row 723 is lightweight, it is possible to improve responsiveness and position accuracy when positioning the magnet row 723. At the same time, the overall weight of the Z-axis drive system is light and can be configured to be small, so that it is difficult to be restricted by the mounting space and the mounting workability is improved.
- FIG. 32 shows a fourteenth embodiment of the present invention.
- FIG. 32 shows an example in which a driving device is constituted by three armature units.
- a small and light drive device can be configured by changing the number of magnetic poles of the armature unit according to a required thrust pattern.
- FIG. 32 shows an example in which the driving device is configured with two armature units 703 having four magnetic poles and one armature unit 702 having two magnetic poles.
- a small and light drive device can be configured by changing the number of magnetic poles of the armature unit.
- FIG. 33 shows an example in which a driving device is constituted by an armature unit 703 having four magnetic poles, an armature unit 701 having three magnets, and an armature unit 702 having two magnets.
- FIG. 34 shows an example in which a drive device is configured with two armature units 703 having four magnetic poles and two armature units 702 having two magnetic poles.
- FIG. 35 shows a fifteenth embodiment of the present invention.
- FIG. 35 shows an embodiment in which the number of windings or the cross-sectional area of the wires arranged in the armature unit 610 of the drive device shown in FIG. 28 is changed for each armature unit.
- FIG. 35 shows an example in which the driving device 611 is configured by three armature units 610.
- Each armature unit is composed of four magnetic poles, but is not limited thereto, and the number of magnetic poles may be different for each armature unit.
- a thrust corresponding to a required thrust pattern can be generated by changing the number of turns of the windings 901, 902, and 903 installed in the armature unit.
- an armature unit that requires a large thrust can be realized by increasing the number of turns. Furthermore, if there is an armature unit for which heat generation is desired to be reduced, this can be achieved by increasing the cross-sectional area of the winding of the armature unit.
- the winding cross-sectional area of the armature unit in the central portion is increased, and the windings in the armature units at both ends are the windings in the central portion. It is possible to control the heat generation part by making it small with respect to the cross-sectional area.
- a small and lightweight drive device can be configured by changing the number of windings and the cross-sectional area of the armature unit in consideration of the thrust pattern and heat generation.
- the inductance, resistance, and the like of each armature unit change, and it becomes possible to control responsiveness for each armature unit.
- FIG. 36 shows a sixteenth embodiment of the present invention.
- a drive device 611 in FIG. 36 shows the drive device shown in FIG. 28 and discloses these control systems.
- a linear scale 805 for detecting a relative position between the stator and the magnet array is disposed.
- the linear scale 805 can be installed anywhere as long as the relative position between the stator and the magnet array can be detected.
- the position information obtained from the linear scale is fed back to the current controller 803 as magnetic pole position (phase) information, and is controlled so as to maintain a predetermined phase difference between the magnetic flux of the magnet array and the magnetic flux generated by the stator.
- the information of the linear scale 805 is fed back to the position controller 801 and the speed controller 802 as position information and speed information, and the current flowing through the windings of the armature unit of the drive unit is calculated from these values by the current controller. Looking for.
- the output of the power amplifier 804 is adjusted so that the current value is obtained.
- Information on the current value of the output of the power amplifier 804 is fed back to the current controller and controlled so that the thrust of the driving device becomes a predetermined value.
- a highly responsive and accurate drive system can be constructed by a light magnet array and a drive device capable of generating a large thrust. .
- FIG. 37 shows Embodiment 17 of the present invention.
- FIG. 37 is a block diagram of a control system in the case where the drive device is configured by three armature units.
- the three armature units 610 have the same number of magnetic poles.
- a linear scale 805 is attached to a magnet row 612 that is commonly arranged in the three armature units.
- the phase current command 806 the value of current flowing through each armature unit 610 is calculated.
- the current controller 803 adjusts the current, and power is supplied by the power amplifier 804.
- each armature unit 610 has an independent current control system. By doing so, it is possible to control the unbalance in manufacturing the armature unit by the current value. In addition, the influence of other disturbances can be reduced.
- FIG. 38 is a control block diagram in the case where the number of magnetic poles of the armature unit to be configured is different. The controllability is improved because the unbalance of armature units with different number of magnetic poles arranged according to the required thrust pattern can be individually controlled. Further, by controlling the current values individually, it is possible to control detents and thrust pulsations for each armature unit.
- FIG. 38 shows, as an example, a block diagram in the case where the number of magnetic poles of the armature unit 610 is configured as 4 poles, 3 poles, and 2 poles, respectively.
- FIG. 39 shows Embodiment 18 of the present invention.
- FIG. 39 shows a control system that feeds back the magnetic pole position, velocity, and position from a linear scale signal that detects the relative positional relationship between the magnet array 612 and the armature unit 610 that are arranged in common in the three armature units 610. It is configured.
- the current command values iu * , iv * , and iw * of each phase are based on the position information of the linear scale 805. It is calculated by a value calculation 807 and a phase current command 806.
- a current command value i * is obtained from the relationship between the current and the thrust at the position of each magnet row. Based on the current command value i * , the current is distributed to each phase. In accordance with the phase current command values iu * , iv * , iw * , current control of each armature unit is performed. For example, control is possible even when the thrust with respect to the unit current is reduced due to magnetic saturation of the magnetic pole, and the controllable range is expanded and controllability is improved. In addition, it is possible to correct disturbances generated in the armature unit individually and to perform precise control.
- the thrust is controlled by changing the current command i * with respect to the thrust command f * according to the position of the magnet row 612.
- the current command i * from the thrust instruction f *, it is possible to suppress the imbalance or disturbance of the armature unit by calculating using the position information of the magnet array.
- FIG. 40 shows Embodiment 19 of the present invention.
- FIG. 40 (a) shows a driving device including armature units 703a and 703b configured with four poles and an armature unit 702 configured with two poles.
- Each armature unit is arranged so that the phase difference is 120 ° when the magnet pitch is 180 °.
- the magnet pitch P is 12 mm.
- the graph of FIG. 40 (b) shows that the thrust of the driving device changes depending on the position of the magnet row.
- a graph 815 shows the necessary thrust required for the driving device, and graphs 811, 812, 813 show the thrust of the armature units 703a, 703b, 702, respectively.
- a graph 814 shows the total thrust of the armature units 703a, 703b, and 702.
- the maximum value of the thrust 811 of the armature unit 703a and the maximum thrust of the thrust 812 of the armature unit 703b are 400N, whereas the maximum value of the thrust 813 of the armature unit 702 is 200N.
- the necessary thrust is 500 N when the magnet row position is in the range of 0 to 6 mm
- 650 N is required when the magnet position is 6 to 10 mm
- the required thrust changes small to 550 N when the magnet position is 10 to 12 mm.
- the necessary thrust 815 is provided, the number of poles of the armature unit 3 in a small thrust range can be reduced to reduce the size and weight.
- FIG. 41 shows an example of an XYZ stage according to the present invention.
- the XY stage is composed of a total of four drive devices, two X-axis drive devices 711 and two Y-axis drive devices 712, a Z-axis base 741 is installed outside the stage, and a Z-axis drive device 713 is mounted on the Z-axis base 741.
- FIG. 42 shows an example of an XYZ stage according to the present invention. It is possible to arrange the magnet rows horizontally or combine them depending on the layout of the stage and restrictions on the arrangement of the magnet rows.
- the present invention is applied to a thrust generation mechanism using an electromagnetic force or a linear motor, and a drive device using an electromagnetic force, an XY stage and an XYZ stage used in a semiconductor manufacturing apparatus and an industrial machine using the drive device as a drive source. Is possible.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Linear Motors (AREA)
Abstract
Description
また、従来のステージでは駆動源として円筒型のアクチュエータや磁極歯を交互に並べた駆動装置が利用されている。〔特許文献2〕には、同一巻線で磁極歯を交互に組み合わせて構成されたテーブルが記載されている。また、〔特許文献3〕にも、極性の異なる第一の対向部と第二の対向部を有する駆動装置を用いたテーブルが記載されている。
また、従来のXYZステージの駆動装置は漏れ磁束が多いため、大きく重くなる。そのため、駆動装置の重量が重いことにより自重による変形が発生し、精度低下や取り付け場所の制約を受ける等の課題がある。
また、本発明の他の目的は、小型軽量な駆動装置を提供するとともに、小型軽量な駆動装置により精度向上、及び高応答のXYステージ又はXYZステージを提供することにある。
また、本発明によれば、小型軽量な駆動装置を構成できるため、駆動部の重量を低減でき、高精度および高応答なXYステージ又はXYZステージを提供できる。
以下、本発明の実施形態について図面を用いて説明する。
本発明の他の実施形態を図12以降に示す。
電機子鉄心の磁束の方向が略同一であるので、複数個の電機子鉄心間に補助鉄心を挿入することも可能である。その形状説明図を図13に示す。鉄心201と上側磁極歯211と下側磁極歯212で構成された電機子鉄心ユニット301を複数個並べ、複数個の電機子鉄心の間に補助鉄心204を挿入している。このようにすることで、磁束の経路となる鉄心の断面積を広くすることが可能である。
上側の磁極歯と下側の磁極歯を磁石に向かって細くなるように構成すれば、図14に示すように、発生する力の脈動を低減できる。また、磁石を磁極歯に対して斜めにすることでさらに脈動を低減できる。
上側の磁極歯と下側の磁極歯を磁石に向かって細くなるように構成した場合、図15に示すように、電機子鉄心の間隔を狭く、または接触した状態で構成でき小型化が可能になる。
図16は本発明の他の実施形態を示したものである。
また、本発明の電機子ユニットは、磁石列に対して配置を変えることが可能である。巻線の占有範囲を効果的に配置するために、図20(a)(b)に示すように、各ユニットを磁石列に対して交互に配置することにより電機子ユニット間の空間を有効に利用できる。図20(a)はユニット配置例の斜視図を、図20(b)は平面図を示す。
電機子ユニットは、図21に示すように、磁石の面に沿って電機子鉄心ユニット100を三角状にすることで、ユニット間の占有空間を小さくすることが可能である。図21(a)は、電機子鉄心を上面から見て三角状にした場合のユニット配置例の斜視図を、図21(b)はその上面図を示す。
また、図22のように、磁石列の両側から挟みこむ構造も可能である。両側から挟みこんだ構成の1例の斜視図を図22(a)に、上面図を図22(b)に示す。
図23に示すように、磁石3の形状を丸型にし、可動子を軸状にして構成も可能である。さらに、磁石の配置は図24(a)および(b)に示すように、極と極を向かい合わせて配置したり、磁石の間隔を狭めた構成が可能である。
次に、本発明の他の実施形態について図面を用いて以下説明する。
図25は本発明の実施形態11による駆動装置を構成する電機子ユニットの斜視図である。電機子ユニット610は、1相分の巻線601,複数の磁極602で構成される固定子3および永久磁石604の列を含む磁石列612からなる。図26は、本発明の実施形態11による駆動装置の電機子ユニット610を磁石列612の進行方向と直角の面で切断した断面図である。磁極602は図26に示すように、磁石604に対向するように配置された上磁極歯606と下磁極歯607およびそれらをつなぐ鉄心608で構成される。巻線601は複数の磁極602の上下磁極歯606,607の部分に同一にまかれている。巻線601は磁極602の他の部分に巻くことも可能であり、上下磁極歯606,607および鉄心608は一体で構成することも可能である。
図30は、本発明の実施形態12の構成を示している。X軸およびY軸を図28に示す駆動装置で構成したXYステージに、Z軸ベース741を搭載し、Z軸駆動装置713およびZ軸磁石列723を備えている。また、Z軸ベース741等を設置しなくても、Y軸駆動装置712等に直接Z軸駆動装置713を固定することも可能である。本実施形態では、Z軸の駆動装置を軽量に構成できるため、従来はXY軸が駆動した際に発生する、Z軸の自重等による変形によって、各軸間の相対的な位置の変化が発生しまっていたが、駆動部の重量を低減することで、各軸間の相対的な位置が安定し、位置精度が向上する。さらに、ステージ全体の重量の低減ができるため負荷低減によりステージの応答性が向上する。
図31は本発明の実施形態13を示している。図31は本発明によるZ軸駆動システムの構成図を示す。Z軸ベース741に駆動装置611が取り付けられている。本実施形態の構成では、漏れ磁束の低減によりZ軸磁石列723を軽量に製作することが可能である。Z軸方向は重力の働く方向であり、Z軸磁石列723の重量が常に負荷として発生している、このためZ軸磁石列の自重を支えるために駆動装置611に電力を供給する必要がある。本発明では、軽量なZ軸磁石列723を構成できるので、自重を支えるための電力が小さくてよい。また、Z軸磁石列723の自重により磁石列が落下しようとする際に、磁石604の吸引力により落下を妨げる方向に力が発生し、磁石列の落下も防止できる。さらに、Z軸磁石列723が軽量であることから、磁石列723の位置決めをする際の応答性や位置精度を向上させることが可能である。同時に、Z軸駆動システム全体の重量が軽く、小さく構成できるため取り付け空間の制約を受けにくく、取り付け作業性も向上する。
図32は本発明の実施形態14を示している。図32は3つの電機子ユニットで駆動装置を構成した例である。本発明の駆動装置では、必要な推力パターンに応じて電機子ユニットの磁極の数を変えることにより、小型軽量な駆動装置が構成できることを示している。図32は、磁極数4極の電機子ユニット703が2台、磁石数2極の電機子ユニット702を1台として駆動装置を構成した例である。たとえば、磁石列612の位置によって必要な推力が異なる場合、電機子ユニットの磁極数を変えて構成することにより小型軽量な駆動装置が構成できる。
図35は、本発明の実施形態15を示している。図35は、図28で示した駆動装置の電機子ユニット610に配置される巻線の巻数または線の断面積を電機子ユニット毎に変えた場合の実施形態である。
図36は本発明の実施形態16を示している。図36の駆動装置611は、図28で示した駆動装置を示しており、これらの制御系を開示している。この駆動装置においては、固定子と磁石列の相対的な位置を検出するリニアスケール805が配置される。リニアスケール805は、固定子と磁石列の相対的な位置が検出できれば設置場所を問わない。リニアスケールより得られた位置情報は、磁極位置(位相)情報として電流制御器803にフィードバックされ、磁石列の磁束と固定子の作る磁束を所定の位相差を保つように制御される。リニアスケール805の情報は、位置情報および速度情報として位置制御器801,速度制御器802にフィードバックされ、それらの値から電流制御器によって駆動装置の電機子ユニットの巻線に流す電流を演算して求めている。その電流値になるようにパワーアンプ804の出力を調整する。パワーアンプ804の出力の電流値の情報は電流制御器にフィードバックされ駆動装置の推力が所定の値になるように制御される。
図37は、本発明の実施形態17を示している。図37は、3つの電機子ユニットで駆動装置を構成した場合の制御系のブロック線図である。3つの電機子ユニット610の磁極の数は同じ数で構成されている。3つの電機子ユニットに共通に配置された磁石列612にリニアスケール805が取り付けられている。その信号をもとに、磁石列と電機子ユニットの間の磁極位置,速度,位置の情報を相電流指令806、速度制御器802および位置制御器801にフィードバックしている。相電流指令806において各電機子ユニット610に流す電流値を演算する。その指令に従って電流制御器803において電流を調整し、パワーアンプ804によって電力を供給する。本発明の構成では、1つの電機子ユニット610に対して、それぞれの独立した電流制御系をもつことが特徴である。このようにすることで、電機子ユニットの製作上のアンバランスを電流値によって制御することが可能である。また、その他の外乱などの影響も低減できる。図38は、構成する電機子ユニットの磁極の数が異なる場合の制御ブロック線図を示す。必要な推力パターンに応じて配置した磁極数の異なる電機子ユニットのアンバランス等を個別にコントロール可能になり制御性が向上する。また、電流値を個々に制御することにより電機子ユニット毎にディテントや推力の脈動などの制御も可能になる。図38はその一例として、電機子ユニット610の磁極の数をそれぞれ4極,3極および2極として構成した場合のブロック線図を示す。
図39は、本発明の実施形態18を示している。図39は、3つの電機子ユニット610に共通に配置された磁石列612と電機子ユニット610の相対的な位置関係を検出するリニアスケールの信号から磁極位置,速度,位置をフィードバックし制御系が構成されている。構成される3つの電機子ユニット610をU相,V相,W相をとした場合、各相の電流指令値iu*,iv*,iw*はリニアスケール805の位置情報をもとに、電流値演算807および相電流指令806によって演算される。電流値演算807では、各磁石列の位置における電流と推力の関係から電流指令値i*が求められる。その電流指令値i*をもとに各相への電流の振り分けが行われる。その相電流指令値iu*,iv*,iw*に従って、各電機子ユニットの電流制御を行う。たとえば、磁極の磁気飽和により単位電流に対する推力の低下が発生した場合にも制御が可能になり、制御できる範囲が拡大し制御性が向上する。また、電機子ユニットに個別に発生した外乱の補正や精密な制御が可能になる。
図40は本発明の実施形態19を示している。
3 磁石列
4 空隙
11,12 磁極歯
100 電機子鉄心ユニット
200 電機子ユニット
601,901,902,903 巻線
602 磁極
603 固定子
604 磁石
606 上磁極歯
607 下磁極歯
608 鉄心
610 電機子ユニット
611 駆動装置
612 磁石列
613,131 磁石列固定台
614 ベース
615 レール
616 ステージ
701 電機子ユニット(3極)
702 電機子ユニット(2極)
703,703a,703b 電機子ユニット(4極)
711 X軸駆動装置
712 Y軸駆動装置
713 Z軸駆動装置
721 X軸磁石列
722 Y軸磁石列
723 Z軸磁石列
741 Z軸ベース
751 レール台
801 位置制御器
802 速度制御器
803 電流制御器
804 パワーアンプ
805 リニアスケール
806 相電流指令807 電流値演算
Claims (26)
- 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
かつ、前記電機子鉄心を複数個有し、複数個の前記電機子鉄心は同じ極性を有することを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
複数個の前記電機子鉄心を備え、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
可動子の磁極ピッチPに対して、複数個の電機子鉄心のピッチを2nP(nは整数、n=1,2,3・・・)として、複数個の前記電機子鉄心が同じ極性をすることを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
複数個の前記電機子鉄心を備え、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
可動子の磁極ピッチPに対して、複数個の電機子鉄心のピッチを2nP±P/2m(nは整数、n=1,2,3・・・、mは相の数m=1,2,3・・・)として、
複数個の前記電機子鉄心が同じ極性を有することを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
かつ、前記電機子鉄心を複数個有し、隣り合う前記電機子鉄心の磁束の方向が同方向であることを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心が永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
かつ、前記電機子鉄心を複数個有し、
複数個の前記電機子鉄心は同じ極性を有し、
可動子の磁極ピッチPに対して、前記電機子鉄心の、可動子長手方向の厚さtがP≦tであり、複数個の前記電機子鉄心が同じ極性を有することを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
可動子の磁極ピッチPに対して2Pの範囲の空隙に、任意の巻線電流に対して前記対向配置されたコアが前記空隙に同一方向の磁束を発生することを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、前記磁極歯をつなぐコアを備え、
任意の巻線電流において、前記空隙に対して複数個の前記電機子鉄心が同じ同一方向の磁束を発生させることを特徴とする推力発生機構。 - 電機子鉄心と巻線からなる電機子と、永久磁石を有する可動子とが相対的に移動可能である推力発生機構であって、
前記電機子鉄心は永久磁石の磁極側に空隙を介して対向配置された磁極歯と、該磁極歯をつなぐコアを備え、
磁極ピッチPに対して2つの極性を有する磁石列に対し、任意の巻線電流に対して前記電機子が空隙に発生する極性が1極性であることを特徴とする推力発生機構。 - 請求の範囲第1項から請求の範囲第8項に記載の推力発生機構であって、複数個の前記電機子鉄心に共通の巻線を捲いたことを特徴とする推力発生機構。
- 請求の範囲第1項から請求の範囲第8項のいずれかに記載の推力発生機構であって、永久磁石の磁極側の両側に対向配置された前記磁極歯に電機子巻線を配置した推力発生機構。
- 請求の範囲第1項から請求の範囲第8項のいずれかに記載の推力発生機構であって、永久磁石の磁極側の両側に対向配置された前記磁極歯を磁石に向かって先細り形状にしたことを特徴とする推力発生機構。
- 請求の範囲第1項から請求の範囲第8項のいずれかに記載の推力発生機構であって、永久磁石の磁極側の両側に対向配置された磁極歯の磁石対向面を切り取った形状にしたことを特徴とする推力発生機構。
- 請求の範囲第1項から請求の範囲第8項のいずれかに記載の推力発生機構であって、複数個の電機子からなるユニットを1相とし、複数個の相を有する推力発生機構であって、
磁極のピッチPに対して、複数個の隣り合う前記電機子からなる相の、各相間のピッチ
を(nP+P/m)(n=0,1,2,3・・・、mは相の数m=1,2,3・・・)と
することを特徴とする推力発生機構。 - 請求の範囲第1項から請求の範囲第8項のいずれかに記載の推力発生機構を有するリニアモータ。
- 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した駆動装置を備えることを特徴とするXYステージ。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した駆動装置を備えることを特徴とするXYZステージ。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した駆動装置を備えることを特徴とするZ軸用の駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
該複数個の電機子ユニットを構成する磁極の数が電機子ユニット毎に異なることを特徴とした駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
該複数個の電機子ユニットを構成する巻線の巻数、かつ/または該巻線の巻線断面積が電機子ユニット毎に異なることを特徴とした駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
磁石列と電機子ユニットの相対的な位置を検出するセンサと、その信号をフィードバックする制御部と、電力を供給するパワードライブ部からなるクローズドループ制御システムを構成することを特徴した駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
磁石列と電機子ユニットの相対的な位置を検出するセンサと、その信号をフィードバックする制御部と、電力を供給するパワードライブ部を備えたクローズドループ制御システムを構成し、
前記複数個の電機子ユニットに対して複数個の前記パワードライブ部を備えたことを特徴とする駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
磁石列と電機子ユニットの相対的な位置を検出するセンサと、その信号をフィードバックする制御部と、電力を供給するパワードライブ部を備えたクローズドループ制御システムを構成し、
前記複数個の電機子ユニットに対して与えられた複数個の電機子ユニットの電流と推力の特性に応じて制御を行うことを特徴とした制御システムを構成することを特徴とした駆動装置。 - 磁極と巻線からなる電機子ユニットと、永久磁石を有する磁石列とが相対的に移動可能である駆動装置において、
前記磁極が永久磁石の両側に空隙を介して対向配置された磁極歯を有し、
かつ、空隙を介して対向配置された磁極歯をつなぐ鉄心を有し、
かつ、前記磁極を複数個有し、複数個の磁極が同じ極性を有した電機子ユニットを複数個配置し、
磁石列と電機子ユニットの相対的な位置を検出するセンサと、その信号をフィードバックする制御部と、電力を供給するパワードライブ部を備えたクローズドループ制御システムを構成し、
前記複数個の電機子ユニットに対して与えられた推力指令に対して、磁石列の位置情報を用いて電流指令を計算する制御システムを構成することを特徴とした駆動装置。 - 請求の範囲第18項から請求の範囲第23項のいずれかに記載の駆動装置を搭載したことを特徴とするXYステージ。
- 請求の範囲第18項から請求の範囲第23項のいずれかに記載の駆動装置を搭載したことを特徴とするXYZステージ。
- 請求の範囲第18項から請求の範囲第23項のいずれかに記載の駆動装置を搭載したことを特徴とするZ軸駆動装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/133,966 US9000626B2 (en) | 2008-12-10 | 2009-12-10 | Thrust generation mechanism, drive device, XY stage and XYZ stage |
CN200980149538.6A CN102246401B (zh) | 2008-12-10 | 2009-12-10 | 推力产生机构、驱动装置、xy工作台以及xyz工作台 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008313846A JP2010141978A (ja) | 2008-12-10 | 2008-12-10 | 推力発生機構 |
JP2008-313846 | 2008-12-10 | ||
JP2009-083979 | 2009-03-31 | ||
JP2009083979A JP5277040B2 (ja) | 2009-03-31 | 2009-03-31 | 駆動装置,xyステージ及びxyzステージ |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010067837A1 true WO2010067837A1 (ja) | 2010-06-17 |
Family
ID=42242824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/070667 WO2010067837A1 (ja) | 2008-12-10 | 2009-12-10 | 推力発生機構、駆動装置,xyステージ及びxyzステージ |
Country Status (3)
Country | Link |
---|---|
US (1) | US9000626B2 (ja) |
CN (1) | CN102246401B (ja) |
WO (1) | WO2010067837A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102904414A (zh) * | 2011-07-29 | 2013-01-30 | 三星电机株式会社 | 线性电机 |
CN103854914A (zh) * | 2012-11-29 | 2014-06-11 | 株式会社日立制作所 | 气体断路器 |
CN103854915A (zh) * | 2012-11-29 | 2014-06-11 | 株式会社日立制作所 | 三相一并操作式断路器 |
WO2014118875A1 (ja) * | 2013-01-29 | 2014-08-07 | 株式会社日立製作所 | 開閉装置 |
EP2611011A4 (en) * | 2010-08-23 | 2017-12-20 | Kovery Co., Ltd. | Linear motor |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8358039B2 (en) * | 2008-10-17 | 2013-01-22 | Massachusetts Institute Of Technology | High-scan rate positioner for scanned probe microscopy |
WO2013150929A1 (ja) * | 2012-04-06 | 2013-10-10 | 株式会社 日立製作所 | ガス遮断器 |
GB2503015A (en) * | 2012-06-14 | 2013-12-18 | Isis Innovation | Stator core module and reinforced armature in a linear electromechanical transducer |
EP2895755A4 (en) * | 2012-09-12 | 2016-06-01 | Memorial University Of Newfoundland | PARALLEL KINEMATIC MECHANISM AND SUPPORT AND ACTUATORS THEREOF |
WO2014064785A1 (ja) | 2012-10-24 | 2014-05-01 | 株式会社日立製作所 | リニアモータ及びリニアモータ駆動システム |
JP2014107181A (ja) * | 2012-11-29 | 2014-06-09 | Hitachi Ltd | 並列コンデンサ付きガス遮断器 |
JPWO2014192058A1 (ja) * | 2013-05-27 | 2017-02-23 | 株式会社安川電機 | リニアモータ及びステージ装置 |
US20150016051A1 (en) * | 2013-07-15 | 2015-01-15 | Toshiba Global Commerce Solutions Holdings Corporation | Display assembly having graduated magnetic fastening characteristics |
FR3018405B1 (fr) * | 2014-03-05 | 2017-11-03 | Jean Baptiste Drevet | Generateur electrique a aimants permanents dote d`un collecteur de flux magnetique |
CN107155395B (zh) * | 2015-01-07 | 2019-08-23 | 株式会社日立制作所 | 马达系统以及压缩机 |
SE539016C2 (en) * | 2015-07-17 | 2017-03-21 | Hagnestål Anders | A generator for generating electric energy from movements of sea water |
US10651718B2 (en) | 2015-07-20 | 2020-05-12 | Motx Ltd. | Transverse flux linear motor |
CN105490499A (zh) * | 2016-01-21 | 2016-04-13 | 珠海格力节能环保制冷技术研究中心有限公司 | 一种直线振荡电机以及压缩机 |
US10476364B2 (en) * | 2016-06-15 | 2019-11-12 | Asm Technology Singapore Pte Ltd | Magnet assembly mounting arrangement for an electromagnetic motor |
KR102652589B1 (ko) * | 2016-06-23 | 2024-04-01 | 엘지전자 주식회사 | 횡자속형 왕복동 모터 및 이를 구비한 왕복동식 압축기 |
JP7240872B2 (ja) * | 2018-12-25 | 2023-03-16 | 日立グローバルライフソリューションズ株式会社 | リニアモータ、電磁サスペンションおよび洗濯機 |
CN109728705B (zh) * | 2019-01-11 | 2021-02-09 | 哈尔滨工业大学 | 初级、次级无轭型双边次级结构的永磁直线同步电机 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02246761A (ja) * | 1989-03-18 | 1990-10-02 | Hitachi Ltd | リニアモータ |
JPH04276363A (ja) * | 1991-03-01 | 1992-10-01 | Hitachi Ltd | ディスク装置、リニアアクチュエータ |
JPH10174418A (ja) * | 1996-12-04 | 1998-06-26 | Yaskawa Electric Corp | リニアモータ |
JP2005051869A (ja) * | 2003-07-31 | 2005-02-24 | Hitachi Ltd | 駆動装置及びそれを用いたxyテーブル |
JP2005287185A (ja) * | 2004-03-30 | 2005-10-13 | Hitachi Ltd | リニアモータ |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4528533A (en) * | 1982-07-28 | 1985-07-09 | General Scanning, Inc. | Actuator with compensating flux path |
US4945268A (en) * | 1987-12-26 | 1990-07-31 | Hitachi, Ltd. | Permanent magnet type linear pulse motor |
JPH0947008A (ja) | 1995-08-02 | 1997-02-14 | Hitachi Ltd | リニアモータ |
JP3395155B2 (ja) | 1999-05-07 | 2003-04-07 | 株式会社日立製作所 | リニアモータ及びその製造方法 |
JP3945148B2 (ja) | 2000-11-02 | 2007-07-18 | 株式会社日立製作所 | Xyテーブル及びxyzテーブル |
JP3945150B2 (ja) * | 2000-11-06 | 2007-07-18 | 株式会社日立製作所 | リニアモータ |
JP3861593B2 (ja) * | 2000-12-11 | 2006-12-20 | 株式会社日立製作所 | リニアモータ |
CN1289371C (zh) * | 2001-06-07 | 2006-12-13 | 里特纺织机械法国公司 | 用于将纱线缠绕成卷装的往复装置 |
KR100440389B1 (ko) * | 2001-12-26 | 2004-07-14 | 한국전기연구원 | 2상 횡자속형 영구자석 여자 선형 전동기 |
JP3855873B2 (ja) * | 2002-07-31 | 2006-12-13 | 株式会社日立製作所 | 直線駆動装置及びそれを用いた製造装置 |
JP3821101B2 (ja) * | 2003-02-04 | 2006-09-13 | 株式会社日立製作所 | 直線駆動装置、その制御方法及びxyテーブル |
JP2005065425A (ja) | 2003-08-14 | 2005-03-10 | Yaskawa Electric Corp | 磁気吸引力相殺形リニアモータ |
DE102005017481B4 (de) * | 2005-04-15 | 2007-08-30 | Compact Dynamics Gmbh | Linearaktor |
JP2007020270A (ja) | 2005-07-06 | 2007-01-25 | Konica Minolta Medical & Graphic Inc | リニアモータ |
CN101013843B (zh) * | 2007-02-02 | 2011-05-11 | 哈尔滨工业大学 | 平板形三相直线永磁同步电机 |
TWI411199B (zh) * | 2007-03-08 | 2013-10-01 | Sanyo Electric Co | 線性電動機 |
-
2009
- 2009-12-10 WO PCT/JP2009/070667 patent/WO2010067837A1/ja active Application Filing
- 2009-12-10 US US13/133,966 patent/US9000626B2/en active Active
- 2009-12-10 CN CN200980149538.6A patent/CN102246401B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02246761A (ja) * | 1989-03-18 | 1990-10-02 | Hitachi Ltd | リニアモータ |
JPH04276363A (ja) * | 1991-03-01 | 1992-10-01 | Hitachi Ltd | ディスク装置、リニアアクチュエータ |
JPH10174418A (ja) * | 1996-12-04 | 1998-06-26 | Yaskawa Electric Corp | リニアモータ |
JP2005051869A (ja) * | 2003-07-31 | 2005-02-24 | Hitachi Ltd | 駆動装置及びそれを用いたxyテーブル |
JP2005287185A (ja) * | 2004-03-30 | 2005-10-13 | Hitachi Ltd | リニアモータ |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2611011A4 (en) * | 2010-08-23 | 2017-12-20 | Kovery Co., Ltd. | Linear motor |
CN102904414A (zh) * | 2011-07-29 | 2013-01-30 | 三星电机株式会社 | 线性电机 |
CN103854914A (zh) * | 2012-11-29 | 2014-06-11 | 株式会社日立制作所 | 气体断路器 |
CN103854915A (zh) * | 2012-11-29 | 2014-06-11 | 株式会社日立制作所 | 三相一并操作式断路器 |
WO2014118875A1 (ja) * | 2013-01-29 | 2014-08-07 | 株式会社日立製作所 | 開閉装置 |
JP5883516B2 (ja) * | 2013-01-29 | 2016-03-15 | 株式会社日立製作所 | 開閉装置 |
Also Published As
Publication number | Publication date |
---|---|
CN102246401A (zh) | 2011-11-16 |
US20110241449A1 (en) | 2011-10-06 |
CN102246401B (zh) | 2015-10-21 |
US9000626B2 (en) | 2015-04-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2010067837A1 (ja) | 推力発生機構、駆動装置,xyステージ及びxyzステージ | |
JP5956993B2 (ja) | リニアモータ | |
JP5477126B2 (ja) | リニアモータ | |
KR101652842B1 (ko) | 가동자 및 리니어 모터 | |
US20060012252A1 (en) | Linear motor for use in machine tool | |
US8044541B2 (en) | Multi-degree-of-freedom actuator and stage device | |
EP1617546A2 (en) | Linear motor for use in machine tool | |
JP2010141978A (ja) | 推力発生機構 | |
JP5796575B2 (ja) | リニアモータおよびそれを用いた位置決め装置 | |
US11296587B2 (en) | High force and low noise linear fine-tooth motor | |
WO2019007201A1 (zh) | 线性马达及其定子 | |
TW201136107A (en) | Linear motor | |
JP2006025476A (ja) | 直線駆動装置 | |
JP2005065488A (ja) | 電動モータ、電動モータにより移動可能なケージを備えたリフト、ケージ及びケージに対する案内素子の移動用の電動モータを備えたリフト | |
US5962937A (en) | X-Y table for moving loads in a highly exact and dynamic manner | |
JP5678025B2 (ja) | 推力発生機構 | |
JP5277040B2 (ja) | 駆動装置,xyステージ及びxyzステージ | |
CN107925336A (zh) | 横向磁通线性电机 | |
JPH1052025A (ja) | リニアモータおよびその制御方法 | |
JPH11113238A (ja) | リニアモータ | |
US6975048B2 (en) | Drive apparatus and XY table utilizing the same | |
JP2006034016A (ja) | 工作機械用リニアモータ | |
JP2005169523A (ja) | テーブル位置決め装置 | |
WO2022130539A1 (ja) | リニアモータ及びリニアモータの製造方法 | |
KR20130008725A (ko) | 전동기 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980149538.6 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09831941 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13133966 Country of ref document: US |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09831941 Country of ref document: EP Kind code of ref document: A1 |