WO2010059696A1 - Dual-mode mass flow verification and mass flow delivery system and method - Google Patents

Dual-mode mass flow verification and mass flow delivery system and method Download PDF

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Publication number
WO2010059696A1
WO2010059696A1 PCT/US2009/064948 US2009064948W WO2010059696A1 WO 2010059696 A1 WO2010059696 A1 WO 2010059696A1 US 2009064948 W US2009064948 W US 2009064948W WO 2010059696 A1 WO2010059696 A1 WO 2010059696A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
fluid
gas
controller
mode
Prior art date
Application number
PCT/US2009/064948
Other languages
English (en)
French (fr)
Inventor
Junhua Ding
Kaveh Zarkar
Original Assignee
Mks Instruments, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instruments, Inc. filed Critical Mks Instruments, Inc.
Priority to DE112009003602.3T priority Critical patent/DE112009003602B4/de
Priority to KR1020117013859A priority patent/KR101316075B1/ko
Priority to GB1107926.6A priority patent/GB2477247B/en
Priority to CN200980154214.1A priority patent/CN102301208B/zh
Priority to JP2011536615A priority patent/JP5688026B2/ja
Publication of WO2010059696A1 publication Critical patent/WO2010059696A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
    • G01F23/14—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measurement of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
PCT/US2009/064948 2008-11-18 2009-11-18 Dual-mode mass flow verification and mass flow delivery system and method WO2010059696A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE112009003602.3T DE112009003602B4 (de) 2008-11-18 2009-11-18 Dualmodus-Massenflussverifizierungs- und Massenflusslieferungsvorrichtung und entsprechendes Verfahren
KR1020117013859A KR101316075B1 (ko) 2008-11-18 2009-11-18 유체의 질량 유량 전달 및 유체의 질량 유량 검증용 시스템, 및 그 실행 방법
GB1107926.6A GB2477247B (en) 2008-11-18 2009-11-18 Dual-mode mass flow verification and mass flow delivery system and method
CN200980154214.1A CN102301208B (zh) 2008-11-18 2009-11-18 双模式质量流检验以及质量流递送系统和方法
JP2011536615A JP5688026B2 (ja) 2008-11-18 2009-11-18 二重モードマスフロー確証及びマスフロー送給のシステム及び方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/273,234 2008-11-18
US12/273,234 US7891228B2 (en) 2008-11-18 2008-11-18 Dual-mode mass flow verification and mass flow delivery system and method

Publications (1)

Publication Number Publication Date
WO2010059696A1 true WO2010059696A1 (en) 2010-05-27

Family

ID=41582160

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/064948 WO2010059696A1 (en) 2008-11-18 2009-11-18 Dual-mode mass flow verification and mass flow delivery system and method

Country Status (8)

Country Link
US (1) US7891228B2 (ko)
JP (1) JP5688026B2 (ko)
KR (1) KR101316075B1 (ko)
CN (1) CN102301208B (ko)
DE (1) DE112009003602B4 (ko)
GB (1) GB2477247B (ko)
TW (1) TWI472721B (ko)
WO (1) WO2010059696A1 (ko)

Families Citing this family (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2455728A (en) * 2007-12-18 2009-06-24 Weston Aerospace Ltd Air temperature sensing on aircraft
JP5346628B2 (ja) * 2009-03-11 2013-11-20 株式会社堀場エステック マスフローコントローラの検定システム、検定方法、検定用プログラム
JP5538119B2 (ja) * 2010-07-30 2014-07-02 株式会社フジキン ガス供給装置用流量制御器の校正方法及び流量計測方法
US9348339B2 (en) 2010-09-29 2016-05-24 Mks Instruments, Inc. Method and apparatus for multiple-channel pulse gas delivery system
US8997686B2 (en) 2010-09-29 2015-04-07 Mks Instruments, Inc. System for and method of fast pulse gas delivery
US10126760B2 (en) 2011-02-25 2018-11-13 Mks Instruments, Inc. System for and method of fast pulse gas delivery
US10353408B2 (en) * 2011-02-25 2019-07-16 Mks Instruments, Inc. System for and method of fast pulse gas delivery
US10031531B2 (en) * 2011-02-25 2018-07-24 Mks Instruments, Inc. System for and method of multiple channel fast pulse gas delivery
US9188989B1 (en) 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9958302B2 (en) 2011-08-20 2018-05-01 Reno Technologies, Inc. Flow control system, method, and apparatus
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US10031005B2 (en) * 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
US9778083B2 (en) 2013-05-16 2017-10-03 Lam Research Corporation Metrology method for transient gas flow
JP6336719B2 (ja) * 2013-07-16 2018-06-06 株式会社ディスコ プラズマエッチング装置
JP5797246B2 (ja) * 2013-10-28 2015-10-21 株式会社フジキン 流量計及びそれを備えた流量制御装置
CN106233061B (zh) * 2014-03-11 2019-07-02 Mks 仪器公司 用于实时监测穿过质量流量控制器的流量的系统以及方法
DE102015011424A1 (de) * 2015-09-01 2017-03-02 Fresenius Medical Care Deutschland Gmbh Verfahren zur Kalibrierung und / oder Überwachung eines Flusssensors
US10303189B2 (en) 2016-06-30 2019-05-28 Reno Technologies, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
US10838437B2 (en) 2018-02-22 2020-11-17 Ichor Systems, Inc. Apparatus for splitting flow of process gas and method of operating same
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
JP6767232B2 (ja) * 2016-10-14 2020-10-14 東京エレクトロン株式会社 基板処理装置の流量制御器によって出力されるガスの出力流量を求める方法
US10697848B1 (en) * 2016-12-12 2020-06-30 Kirk A. Dobbs Smart building water supply management system with leak detection and flood prevention
US10031004B2 (en) 2016-12-15 2018-07-24 Mks Instruments, Inc. Methods and apparatus for wide range mass flow verification
US10663337B2 (en) 2016-12-30 2020-05-26 Ichor Systems, Inc. Apparatus for controlling flow and method of calibrating same
US10224224B2 (en) 2017-03-10 2019-03-05 Micromaterials, LLC High pressure wafer processing systems and related methods
US10847360B2 (en) 2017-05-25 2020-11-24 Applied Materials, Inc. High pressure treatment of silicon nitride film
US10622214B2 (en) 2017-05-25 2020-04-14 Applied Materials, Inc. Tungsten defluorination by high pressure treatment
CN110678973B (zh) 2017-06-02 2023-09-19 应用材料公司 碳化硼硬掩模的干式剥除
JP6947914B2 (ja) 2017-08-18 2021-10-13 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧高温下のアニールチャンバ
US10276411B2 (en) 2017-08-18 2019-04-30 Applied Materials, Inc. High pressure and high temperature anneal chamber
CN111095524B (zh) 2017-09-12 2023-10-03 应用材料公司 用于使用保护阻挡物层制造半导体结构的设备和方法
US10643867B2 (en) 2017-11-03 2020-05-05 Applied Materials, Inc. Annealing system and method
CN117936420A (zh) 2017-11-11 2024-04-26 微材料有限责任公司 用于高压处理腔室的气体输送系统
SG11202003438QA (en) 2017-11-16 2020-05-28 Applied Materials Inc High pressure steam anneal processing apparatus
JP2021503714A (ja) 2017-11-17 2021-02-12 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧処理システムのためのコンデンサシステム
KR102649241B1 (ko) 2018-01-24 2024-03-18 어플라이드 머티어리얼스, 인코포레이티드 고압 어닐링을 사용한 심 힐링
KR20230079236A (ko) 2018-03-09 2023-06-05 어플라이드 머티어리얼스, 인코포레이티드 금속 함유 재료들을 위한 고압 어닐링 프로세스
US10591934B2 (en) * 2018-03-09 2020-03-17 Lam Research Corporation Mass flow controller for substrate processing
US10714331B2 (en) 2018-04-04 2020-07-14 Applied Materials, Inc. Method to fabricate thermally stable low K-FinFET spacer
US10950429B2 (en) 2018-05-08 2021-03-16 Applied Materials, Inc. Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom
US10566188B2 (en) 2018-05-17 2020-02-18 Applied Materials, Inc. Method to improve film stability
US11327510B2 (en) * 2018-05-23 2022-05-10 Hitachi Metals, Ltd. Multi-chamber rate-of-change system for gas flow verification
US10704141B2 (en) 2018-06-01 2020-07-07 Applied Materials, Inc. In-situ CVD and ALD coating of chamber to control metal contamination
US10748783B2 (en) 2018-07-25 2020-08-18 Applied Materials, Inc. Gas delivery module
US10675581B2 (en) 2018-08-06 2020-06-09 Applied Materials, Inc. Gas abatement apparatus
US10760944B2 (en) * 2018-08-07 2020-09-01 Lam Research Corporation Hybrid flow metrology for improved chamber matching
US10725484B2 (en) * 2018-09-07 2020-07-28 Mks Instruments, Inc. Method and apparatus for pulse gas delivery using an external pressure trigger
EP3850325B1 (en) 2018-09-14 2023-11-15 Teknologian tutkimuskeskus VTT Oy Pressure sensor
KR102528076B1 (ko) 2018-10-30 2023-05-03 어플라이드 머티어리얼스, 인코포레이티드 반도체 응용들을 위한 구조를 식각하기 위한 방법들
JP2022507390A (ja) 2018-11-16 2022-01-18 アプライド マテリアルズ インコーポレイテッド 強化拡散プロセスを使用する膜の堆積
WO2020117462A1 (en) 2018-12-07 2020-06-11 Applied Materials, Inc. Semiconductor processing system
US11404290B2 (en) * 2019-04-05 2022-08-02 Mks Instruments, Inc. Method and apparatus for pulse gas delivery
US11901222B2 (en) 2020-02-17 2024-02-13 Applied Materials, Inc. Multi-step process for flowable gap-fill film
JP7122335B2 (ja) * 2020-03-30 2022-08-19 Ckd株式会社 パルスショット式流量調整装置、パルスショット式流量調整方法、及び、プログラム
KR102437772B1 (ko) * 2020-09-07 2022-08-30 한국알프스 주식회사 압력센서를 이용한 유량 측정 장치 및 방법
JP2024512898A (ja) 2021-03-03 2024-03-21 アイコール・システムズ・インク マニホールドアセンブリを備える流体流れ制御システム
CN113203443A (zh) * 2021-04-27 2021-08-03 西安热工研究院有限公司 一种压差型在线微量气体流量计及自动检测方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US20040261492A1 (en) * 2003-06-25 2004-12-30 Kaveh Zarkar System and method for in-situ flow verification and calibration
US20060005882A1 (en) * 2004-07-09 2006-01-12 Tison Stuart A Method and system for flow measurement and validation of a mass flow controller
WO2006017116A2 (en) * 2004-07-09 2006-02-16 Celerity, Inc. Method and system for flow measurement and validation of a mass flow controller
US20060130744A1 (en) * 2004-12-17 2006-06-22 Clark William R Pulsed mass flow delivery system and method
US20060283254A1 (en) * 2005-03-25 2006-12-21 Mks Instruments, Inc. Critical flow based mass flow verifier

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475949A (en) * 1967-07-20 1969-11-04 Andrew Truhan Gas meter calibration apparatus
US6363958B1 (en) * 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
EP1631801B1 (en) * 2003-06-11 2019-02-27 Micro Motion, Inc. Device for continuous calibration of a gas mass flow measurement device
US7628860B2 (en) * 2004-04-12 2009-12-08 Mks Instruments, Inc. Pulsed mass flow delivery system and method
JP4648098B2 (ja) * 2005-06-06 2011-03-09 シーケーディ株式会社 流量制御機器絶対流量検定システム
JP4856905B2 (ja) * 2005-06-27 2012-01-18 国立大学法人東北大学 流量レンジ可変型流量制御装置
JP4788920B2 (ja) * 2006-03-20 2011-10-05 日立金属株式会社 質量流量制御装置、その検定方法及び半導体製造装置
WO2009091935A1 (en) * 2008-01-18 2009-07-23 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684245A (en) * 1995-11-17 1997-11-04 Mks Instruments, Inc. Apparatus for mass flow measurement of a gas
US20040261492A1 (en) * 2003-06-25 2004-12-30 Kaveh Zarkar System and method for in-situ flow verification and calibration
US20060005882A1 (en) * 2004-07-09 2006-01-12 Tison Stuart A Method and system for flow measurement and validation of a mass flow controller
WO2006017116A2 (en) * 2004-07-09 2006-02-16 Celerity, Inc. Method and system for flow measurement and validation of a mass flow controller
US20060130744A1 (en) * 2004-12-17 2006-06-22 Clark William R Pulsed mass flow delivery system and method
US20060283254A1 (en) * 2005-03-25 2006-12-21 Mks Instruments, Inc. Critical flow based mass flow verifier

Also Published As

Publication number Publication date
CN102301208B (zh) 2014-06-18
GB2477247B (en) 2017-04-19
JP5688026B2 (ja) 2015-03-25
DE112009003602T5 (de) 2012-11-08
TWI472721B (zh) 2015-02-11
GB2477247A (en) 2011-07-27
KR101316075B1 (ko) 2013-10-10
TW201037283A (en) 2010-10-16
US20100125424A1 (en) 2010-05-20
CN102301208A (zh) 2011-12-28
DE112009003602B4 (de) 2016-03-31
KR20110082087A (ko) 2011-07-15
JP2012509528A (ja) 2012-04-19
GB201107926D0 (en) 2011-06-22
US7891228B2 (en) 2011-02-22

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