WO2010058565A1 - Elément de réflexion optique - Google Patents

Elément de réflexion optique Download PDF

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Publication number
WO2010058565A1
WO2010058565A1 PCT/JP2009/006190 JP2009006190W WO2010058565A1 WO 2010058565 A1 WO2010058565 A1 WO 2010058565A1 JP 2009006190 W JP2009006190 W JP 2009006190W WO 2010058565 A1 WO2010058565 A1 WO 2010058565A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode layer
vibrators
monitor
lower electrode
layer
Prior art date
Application number
PCT/JP2009/006190
Other languages
English (en)
Japanese (ja)
Inventor
平岡聡一郎
寺田二郎
中園晋輔
古川成男
Original Assignee
パナソニック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パナソニック株式会社 filed Critical パナソニック株式会社
Priority to US13/130,150 priority Critical patent/US8462411B2/en
Priority to EP09827346.9A priority patent/EP2352050A4/fr
Priority to KR1020117011342A priority patent/KR101187467B1/ko
Publication of WO2010058565A1 publication Critical patent/WO2010058565A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention porte sur un élément de réflexion optique comportant une partie miroir et un oscillateur couplé à la partie miroir. L'oscillateur comprend : une base, une couche isolante formée sur la base ; un élément de commande et un élément de surveillance qui sont formés séparément l'un de l'autre par une rainure de séparation sur la couche isolante. Chacun de l'élément de commande et de l'élément de surveillance est formé sur la couche isolante par formation de couches successives d'une couche d'électrode inférieure, d'une couche piézoélectrique et d'une couche d'électrode supérieure. Ceci améliore la précision de détection de l'élément de surveillance et réalise une commande à auto-excitation de l'élément de réflexion optique avec une grande précision.
PCT/JP2009/006190 2008-11-20 2009-11-18 Elément de réflexion optique WO2010058565A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/130,150 US8462411B2 (en) 2008-11-20 2009-11-18 Optical reflection element with drive and monitor elements separated by a separation groove
EP09827346.9A EP2352050A4 (fr) 2008-11-20 2009-11-18 Elément de réflexion optique
KR1020117011342A KR101187467B1 (ko) 2008-11-20 2009-11-18 광학 반사 소자

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-296354 2008-11-20
JP2008296354A JP5262613B2 (ja) 2008-11-20 2008-11-20 光学反射素子

Publications (1)

Publication Number Publication Date
WO2010058565A1 true WO2010058565A1 (fr) 2010-05-27

Family

ID=42198008

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/006190 WO2010058565A1 (fr) 2008-11-20 2009-11-18 Elément de réflexion optique

Country Status (5)

Country Link
US (1) US8462411B2 (fr)
EP (1) EP2352050A4 (fr)
JP (1) JP5262613B2 (fr)
KR (1) KR101187467B1 (fr)
WO (1) WO2010058565A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161943A1 (fr) * 2010-06-24 2011-12-29 パナソニック株式会社 Élément de réflexion optique

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5666955B2 (ja) 2011-03-24 2015-02-12 スタンレー電気株式会社 光偏向器
JP5816002B2 (ja) 2011-06-22 2015-11-17 スタンレー電気株式会社 光偏向器
JP5890115B2 (ja) 2011-06-22 2016-03-22 スタンレー電気株式会社 光偏向器
JP5775409B2 (ja) 2011-09-29 2015-09-09 スタンレー電気株式会社 光スキャナの製造方法
JP5989982B2 (ja) 2011-09-29 2016-09-07 スタンレー電気株式会社 光偏向器
WO2013114857A1 (fr) * 2012-01-31 2013-08-08 パナソニック株式会社 Dispositif actionneur piézoélectrique et son procédé de fabrication
JP2013200337A (ja) 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
CN104380173A (zh) 2012-06-15 2015-02-25 松下知识产权经营株式会社 致动器、光学反射元件及利用该光学反射元件的成像装置
WO2014068846A1 (fr) * 2012-10-31 2014-05-08 パナソニック株式会社 Actionneur
JP6201528B2 (ja) 2012-11-15 2017-09-27 株式会社リコー 光偏向装置、画像形成装置、ヘッドアップディスプレイ及び車両
JP6171380B2 (ja) * 2013-02-14 2017-08-02 株式会社リコー アクチュエータ駆動システムと映像機器
EP2851733B1 (fr) * 2013-08-28 2016-12-21 Ricoh Company Ltd. Dispositif de déviation optique et appareil de formation d'images
CN105336844B (zh) 2014-07-23 2018-10-02 清华大学 电热致动器的制备方法
CN105336841B (zh) 2014-07-23 2018-08-17 清华大学 电热致动器
CN105336846B (zh) 2014-07-23 2018-11-09 清华大学 电热致动复合材料及电热致动器
CN105336843B (zh) 2014-07-23 2018-10-02 清华大学 电热致动器
JP6741933B2 (ja) 2015-10-02 2020-08-19 ミツミ電機株式会社 光走査モジュール、光走査制御装置
ITUB20156807A1 (it) 2015-12-07 2017-06-07 St Microelectronics Srl Dispositivo micromeccanico dotato di una struttura orientabile tramite attuazione quasi-statica di tipo piezoelettrico
ITUA20162170A1 (it) * 2016-03-31 2017-10-01 St Microelectronics Srl Dispositivo mems oscillante intorno a due assi e dotato di un sistema di rilevamento di posizione, in particolare di tipo piezoresistivo
JP6354892B2 (ja) * 2017-05-18 2018-07-11 株式会社リコー 位置検出装置と映像機器
JP7053986B2 (ja) * 2017-12-27 2022-04-13 ミツミ電機株式会社 アクチュエータと光走査装置
DE102018215528A1 (de) * 2018-09-12 2020-03-12 Robert Bosch Gmbh Mikromechanisches Bauteil und Herstellungsverfahren für ein mikromechanisches Bauteil
EP3666727A1 (fr) 2018-12-14 2020-06-17 STMicroelectronics S.r.l. Dispositif micro-électromécanique doté d'une structure inclinable par actionnement piézo-électrique présentant de meilleures caractéristiques mécaniques et électriques
IT201900004797A1 (it) 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
JP7295404B2 (ja) * 2019-05-24 2023-06-21 ミツミ電機株式会社 光走査装置
JP7375471B2 (ja) * 2019-10-30 2023-11-08 株式会社リコー 可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両
IT201900025084A1 (it) 2019-12-20 2021-06-20 St Microelectronics Srl Dispositivo microelettromeccanico dotato di una struttura orientabile protetta da urti
US11747611B2 (en) 2020-12-16 2023-09-05 Stmicroelectronics (Research & Development) Limited Compact line scan mems time of flight system with actuated lens

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006293116A (ja) * 2005-04-13 2006-10-26 National Institute Of Advanced Industrial & Technology 光走査装置
JP2006320089A (ja) * 2005-05-11 2006-11-24 Brother Ind Ltd アクチュエータ、アクチュエータの製造方法、焦点可変装置、光走査装置及び画像表示装置
JP2008040240A (ja) 2006-08-08 2008-02-21 Stanley Electric Co Ltd 光偏向器及びその製造方法

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KR100647690B1 (ko) * 2005-04-22 2006-11-23 삼성에스디아이 주식회사 박막 트랜지스터 및 이를 구비한 평판 디스플레이 장치
JP2008039810A (ja) * 2006-08-01 2008-02-21 Matsushita Electric Ind Co Ltd 光学反射素子
JP4328980B2 (ja) * 2006-12-18 2009-09-09 セイコーエプソン株式会社 圧電振動子およびその製造方法、並びに、ｍｅｍｓデバイスおよびその製造方法
JP5446122B2 (ja) * 2008-04-25 2014-03-19 パナソニック株式会社 ミアンダ形振動子およびこれを用いた光学反射素子
DE102008049647B4 (de) * 2008-09-30 2011-11-24 Technische Universität Dresden Mikromechanisches Element und Verfahren zum Betreiben eines mikromechanischen Elements
US8139280B2 (en) * 2009-07-17 2012-03-20 Xingtao Wu MEMS hierarchically-dimensioned deformable mirror

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006293116A (ja) * 2005-04-13 2006-10-26 National Institute Of Advanced Industrial & Technology 光走査装置
JP2006320089A (ja) * 2005-05-11 2006-11-24 Brother Ind Ltd アクチュエータ、アクチュエータの製造方法、焦点可変装置、光走査装置及び画像表示装置
JP2008040240A (ja) 2006-08-08 2008-02-21 Stanley Electric Co Ltd 光偏向器及びその製造方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MASANAO TANI ET AL.: "Atsuden MEMS Hikari Scanner ni yoru Gazo Display", THE REVIEW OF LASER ENGINEERING, vol. 36, no. 4, 15 April 2008 (2008-04-15), pages 183 - 189, XP008146919 *
See also references of EP2352050A4 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011161943A1 (fr) * 2010-06-24 2011-12-29 パナソニック株式会社 Élément de réflexion optique
CN102959454A (zh) * 2010-06-24 2013-03-06 松下电器产业株式会社 光学反射元件
JPWO2011161943A1 (ja) * 2010-06-24 2013-08-19 パナソニック株式会社 光学反射素子
US8964273B2 (en) 2010-06-24 2015-02-24 Panasonic Intellectual Property Management Co., Ltd. Optical reflection element
US9025228B1 (en) 2010-06-24 2015-05-05 Panasonic Intellectual Property Management Co., Ltd. Optical reflecting device

Also Published As

Publication number Publication date
JP5262613B2 (ja) 2013-08-14
US8462411B2 (en) 2013-06-11
US20110292479A1 (en) 2011-12-01
KR101187467B1 (ko) 2012-10-02
EP2352050A4 (fr) 2014-01-29
EP2352050A1 (fr) 2011-08-03
JP2010122480A (ja) 2010-06-03
KR20110071137A (ko) 2011-06-28

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