IT201900004797A1 - Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio - Google Patents

Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio

Info

Publication number
IT201900004797A1
IT201900004797A1 IT102019000004797A IT201900004797A IT201900004797A1 IT 201900004797 A1 IT201900004797 A1 IT 201900004797A1 IT 102019000004797 A IT102019000004797 A IT 102019000004797A IT 201900004797 A IT201900004797 A IT 201900004797A IT 201900004797 A1 IT201900004797 A1 IT 201900004797A1
Authority
IT
Italy
Prior art keywords
mirror
micro
mems device
adjustable structure
resonant type
Prior art date
Application number
IT102019000004797A
Other languages
English (en)
Inventor
Roberto Carminati
Nicolo' Boni
Massimiliano Merli
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102019000004797A priority Critical patent/IT201900004797A1/it
Priority to US16/830,920 priority patent/US11327295B2/en
Priority to CN202020418918.9U priority patent/CN212864129U/zh
Priority to EP20166471.1A priority patent/EP3715317B1/en
Priority to CN202010231155.1A priority patent/CN111751980B/zh
Publication of IT201900004797A1 publication Critical patent/IT201900004797A1/it
Priority to US17/715,639 priority patent/US11933966B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
IT102019000004797A 2019-03-29 2019-03-29 Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio IT201900004797A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102019000004797A IT201900004797A1 (it) 2019-03-29 2019-03-29 Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
US16/830,920 US11327295B2 (en) 2019-03-29 2020-03-26 Resonant MEMS device having a tiltable, piezoelectrically controlled structure, in particular a micromirror
CN202020418918.9U CN212864129U (zh) 2019-03-29 2020-03-27 微机电设备和微型投影仪装置
EP20166471.1A EP3715317B1 (en) 2019-03-29 2020-03-27 Resonant mems device having a tiltable, piezoelectrically controlled structure, in particular a micromirror
CN202010231155.1A CN111751980B (zh) 2019-03-29 2020-03-27 具有可倾斜的受压电控制的结构的谐振mems设备
US17/715,639 US11933966B2 (en) 2019-03-29 2022-04-07 Resonant MEMS device having a tiltable, piezoelectrically controlled micromirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102019000004797A IT201900004797A1 (it) 2019-03-29 2019-03-29 Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio

Publications (1)

Publication Number Publication Date
IT201900004797A1 true IT201900004797A1 (it) 2020-09-29

Family

ID=67002285

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102019000004797A IT201900004797A1 (it) 2019-03-29 2019-03-29 Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio

Country Status (4)

Country Link
US (2) US11327295B2 (it)
EP (1) EP3715317B1 (it)
CN (2) CN212864129U (it)
IT (1) IT201900004797A1 (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201900004199A1 (it) * 2019-03-22 2020-09-22 St Microelectronics Srl Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
IT201900004797A1 (it) * 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
US11831255B2 (en) * 2020-04-25 2023-11-28 Ultimems, Inc. Scanner driven by piezoelectric actuators and method of making the same
US11693233B2 (en) * 2020-06-19 2023-07-04 Microsoft Technology Licensing, Llc Microelectromechanical system (MEMS) scanner having actuator pairs cantilevered adjacent to opposite sides of a scanning mirror
IT202100009635A1 (it) 2021-04-16 2022-10-16 St Microelectronics Srl Dispositivo mems con struttura orientabile e controllo migliorato
IT202100013106A1 (it) 2021-05-20 2022-11-20 St Microelectronics Srl Dispositivo microelettromeccanico di specchio ad attuazione piezoelettrica e rilevamento piezoresistivo con proprieta' di auto-calibrazione
US20230384581A1 (en) * 2022-05-26 2023-11-30 Microsoft Technology Licensing, Llc Piezoelectrically-actuated resonant scanning mirror
CN114865946B (zh) * 2022-07-07 2022-09-27 上海隐冠半导体技术有限公司 一种微动平台

Citations (3)

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Publication number Priority date Publication date Assignee Title
US20070268950A1 (en) * 2006-05-16 2007-11-22 Spinelli Luis A Low power Q-switched solid-state lasers
US20110292479A1 (en) 2008-11-20 2011-12-01 Panasonic Corporation Optical reflection element
EP3178783A1 (en) 2015-12-07 2017-06-14 STMicroelectronics Srl Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
JP3775276B2 (ja) * 2001-10-24 2006-05-17 株式会社デンソー 静電アクチュエータ
JP4285568B2 (ja) * 2007-01-10 2009-06-24 セイコーエプソン株式会社 アクチュエータ、光スキャナおよび画像形成装置
CN103038694A (zh) * 2010-07-29 2013-04-10 日本电气株式会社 光学扫描器件和图像显示设备
JP5916668B2 (ja) * 2013-07-17 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
CN105301761B (zh) * 2015-10-30 2017-09-12 西安交通大学 基于粗压电纤维复合材料的二维偏转装置及其偏转方法
IT201600121010A1 (it) * 2016-11-29 2018-05-29 St Microelectronics Srl Dispositivo mems con azionamento piezoelettrico, sistema mems proiettivo includente il dispositivo mems e relativo metodo di pilotaggio
CN108761773A (zh) * 2018-06-15 2018-11-06 重庆大学 一种压电非均匀折叠梁驱动的moems扫描光栅微镜
IT201900004797A1 (it) * 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070268950A1 (en) * 2006-05-16 2007-11-22 Spinelli Luis A Low power Q-switched solid-state lasers
US20110292479A1 (en) 2008-11-20 2011-12-01 Panasonic Corporation Optical reflection element
EP3178783A1 (en) 2015-12-07 2017-06-14 STMicroelectronics Srl Micromechanical device having a structure tiltable by a quasi-static piezoelectric actuation

Also Published As

Publication number Publication date
CN212864129U (zh) 2021-04-02
EP3715317B1 (en) 2022-05-25
CN111751980B (zh) 2023-06-20
US20200310110A1 (en) 2020-10-01
EP3715317A1 (en) 2020-09-30
CN111751980A (zh) 2020-10-09
US11327295B2 (en) 2022-05-10
US20220229287A1 (en) 2022-07-21
US11933966B2 (en) 2024-03-19

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