IT201900004199A1 - Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche - Google Patents

Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche

Info

Publication number
IT201900004199A1
IT201900004199A1 IT102019000004199A IT201900004199A IT201900004199A1 IT 201900004199 A1 IT201900004199 A1 IT 201900004199A1 IT 102019000004199 A IT102019000004199 A IT 102019000004199A IT 201900004199 A IT201900004199 A IT 201900004199A IT 201900004199 A1 IT201900004199 A1 IT 201900004199A1
Authority
IT
Italy
Prior art keywords
improved characteristics
resonant mirror
piezoelectric actuation
microelectromechanical structure
biaxial resonant
Prior art date
Application number
IT102019000004199A
Other languages
English (en)
Inventor
Nicolo' Boni
Roberto Carminati
Massimiliano Merli
Original Assignee
St Microelectronics Srl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Srl filed Critical St Microelectronics Srl
Priority to IT102019000004199A priority Critical patent/IT201900004199A1/it
Priority to EP20159965.1A priority patent/EP3712676A1/en
Priority to CN202010201701.7A priority patent/CN111717884A/zh
Priority to CN202020363275.2U priority patent/CN211378154U/zh
Priority to US16/827,282 priority patent/US11520138B2/en
Publication of IT201900004199A1 publication Critical patent/IT201900004199A1/it
Priority to US17/964,672 priority patent/US11933968B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/005—Projectors using an electronic spatial light modulator but not peculiar thereto
    • G03B21/008—Projectors using an electronic spatial light modulator but not peculiar thereto using micromirror devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
IT102019000004199A 2019-03-22 2019-03-22 Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche IT201900004199A1 (it)

Priority Applications (6)

Application Number Priority Date Filing Date Title
IT102019000004199A IT201900004199A1 (it) 2019-03-22 2019-03-22 Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
EP20159965.1A EP3712676A1 (en) 2019-03-22 2020-02-28 Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics
CN202010201701.7A CN111717884A (zh) 2019-03-22 2020-03-20 具有改善特性的压电致动双轴线谐振微机电反射镜结构
CN202020363275.2U CN211378154U (zh) 2019-03-22 2020-03-20 微机电结构以及微型投影仪设备
US16/827,282 US11520138B2 (en) 2019-03-22 2020-03-23 Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics
US17/964,672 US11933968B2 (en) 2019-03-22 2022-10-12 Biaxial resonant microelectromechanical mirror structure with piezoelectric actuation having improved characteristics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT102019000004199A IT201900004199A1 (it) 2019-03-22 2019-03-22 Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche

Publications (1)

Publication Number Publication Date
IT201900004199A1 true IT201900004199A1 (it) 2020-09-22

Family

ID=66776808

Family Applications (1)

Application Number Title Priority Date Filing Date
IT102019000004199A IT201900004199A1 (it) 2019-03-22 2019-03-22 Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche

Country Status (4)

Country Link
US (2) US11520138B2 (it)
EP (1) EP3712676A1 (it)
CN (2) CN111717884A (it)
IT (1) IT201900004199A1 (it)

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IT201900004199A1 (it) * 2019-03-22 2020-09-22 St Microelectronics Srl Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
US11726183B2 (en) * 2019-10-19 2023-08-15 Beijing Voyager Technology Co., Ltd. Micromachined mirror assembly with piezoelectric actuator
US20220099960A1 (en) * 2020-09-29 2022-03-31 Stmicroelectronics S.R.L. Microelectromechanical device having a structure tiltable by piezoelectric actuation about two rotation axes
US20220317439A1 (en) * 2021-04-01 2022-10-06 Infineon Technologies Ag Driving signal parameter variation for driving mems mirrors for synchronization control and tuning lissajous scanning
US20230204944A1 (en) * 2021-12-27 2023-06-29 Beijing Voyager Technology Co., Ltd. Two-axis scanning mirror using piezoelectric drivers and looped torsion springs
US20230271823A1 (en) * 2022-02-25 2023-08-31 Meta Platforms Technologies, Llc Direct drive mems scanning micromirror
IT202200004745A1 (it) 2022-03-11 2023-09-11 St Microelectronics Srl Dispositivo microelettromeccanico di specchio biassiale con attuazione piezoelettrica
JP2023142097A (ja) * 2022-03-24 2023-10-05 富士フイルム株式会社 マイクロミラーデバイス及び光走査装置
IT202200015055A1 (it) 2022-07-18 2024-01-18 St Microelectronics Srl Dispositivo mems a specchio con attuazione piezoeletttica e relativo processo di fabbricazione
DE102022117930A1 (de) * 2022-07-18 2024-01-18 OQmented GmbH Mems-vorrichtung und verfahren zur herstellung der mems-vorrichtung
DE102023200100A1 (de) * 2023-01-09 2024-07-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mikroscanner für ein Projektionssystem

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JPH01276114A (ja) * 1988-04-27 1989-11-06 Murata Mfg Co Ltd 光学素子駆動用アクチュエータ
US6379510B1 (en) * 2000-11-16 2002-04-30 Jonathan S. Kane Method of making a low voltage micro-mirror array light beam switch
US20040008400A1 (en) * 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US20050094931A1 (en) * 2002-01-21 2005-05-05 Kazuo Yokoyama Optical switch and production method therefor, information transmission device using it
US20120320379A1 (en) * 2011-06-15 2012-12-20 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Deflection device for a scanner with lissajous scanning
EP3173843A1 (en) 2015-11-30 2017-05-31 STMicroelectronics Srl Resonant biaxial mems reflector with piezoelectric actuators, and projective mems system including the same
EP3287830A1 (en) * 2016-08-24 2018-02-28 Murata Manufacturing Co., Ltd. A scanning mems reflector system

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JP2007206480A (ja) * 2006-02-03 2007-08-16 Toko Inc 光走査素子
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JP5318359B2 (ja) * 2007-03-29 2013-10-16 コニカミノルタ株式会社 画像投影装置
JP5577742B2 (ja) 2010-02-23 2014-08-27 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
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JP6879391B2 (ja) * 2019-02-15 2021-06-02 株式会社村田製作所 同期フレームを有する多軸ジャイロスコープ
IT201900004199A1 (it) * 2019-03-22 2020-09-22 St Microelectronics Srl Struttura microelettromeccanica di specchio risonante biassiale ad attuazione piezoelettrica con migliorate caratteristiche
IT201900004797A1 (it) * 2019-03-29 2020-09-29 St Microelectronics Srl Dispositivo mems di tipo risonante avente una struttura orientabile comandata piezoelettricamente, in particolare un microspecchio
CN212276107U (zh) * 2020-05-28 2021-01-01 觉芯电子(无锡)有限公司 一种角度放大式准静态微镜装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01276114A (ja) * 1988-04-27 1989-11-06 Murata Mfg Co Ltd 光学素子駆動用アクチュエータ
US6379510B1 (en) * 2000-11-16 2002-04-30 Jonathan S. Kane Method of making a low voltage micro-mirror array light beam switch
US20040008400A1 (en) * 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
US20050094931A1 (en) * 2002-01-21 2005-05-05 Kazuo Yokoyama Optical switch and production method therefor, information transmission device using it
US20120320379A1 (en) * 2011-06-15 2012-12-20 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Deflection device for a scanner with lissajous scanning
EP3173843A1 (en) 2015-11-30 2017-05-31 STMicroelectronics Srl Resonant biaxial mems reflector with piezoelectric actuators, and projective mems system including the same
EP3287830A1 (en) * 2016-08-24 2018-02-28 Murata Manufacturing Co., Ltd. A scanning mems reflector system

Also Published As

Publication number Publication date
US11520138B2 (en) 2022-12-06
US20200301130A1 (en) 2020-09-24
US11933968B2 (en) 2024-03-19
EP3712676A1 (en) 2020-09-23
CN211378154U (zh) 2020-08-28
US20230035607A1 (en) 2023-02-02
CN111717884A (zh) 2020-09-29

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