WO2010041409A1 - 基板管理方法 - Google Patents
基板管理方法 Download PDFInfo
- Publication number
- WO2010041409A1 WO2010041409A1 PCT/JP2009/005148 JP2009005148W WO2010041409A1 WO 2010041409 A1 WO2010041409 A1 WO 2010041409A1 JP 2009005148 W JP2009005148 W JP 2009005148W WO 2010041409 A1 WO2010041409 A1 WO 2010041409A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- gas
- wafer
- state
- chuck
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
Definitions
- the present invention relates to a substrate management method, and more specifically, a silicon wafer is mainly used as a substrate to be processed, and when a predetermined process is performed in a state where the substrate is attracted and held by a so-called bipolar electrostatic chuck,
- the present invention relates to a substrate for managing the substrate state so that the substrate is not damaged during and before the wafer is adsorbed.
- a so-called electrostatic chuck is provided to position and hold a silicon wafer (hereinafter referred to as “wafer”) to be processed in a processing chamber in a vacuum atmosphere.
- a so-called bipolar type in which a chuck plate as a dielectric is mounted on an upper surface of a chuck body in which positive and negative electrodes are embedded is known from, for example, Patent Document 1.
- the wafer may be heated to a predetermined temperature.
- a resistance heating type heating means is incorporated in the chuck body, and the back surface of the wafer (predetermined A rib portion that is in surface contact with the outer peripheral edge portion on the side opposite to the surface on which the above processing is performed is formed, and a plurality of support portions are erected concentrically, for example, in an internal space surrounded by the rib portion, and the chuck plate Is known to constitute.
- an inert gas such as Ar gas is supplied to the internal space through a gas passage formed in the chuck body, and the internal space defined by the rib portion and the wafer back surface is inert.
- the present invention provides a chuck body having a plurality of electrodes, a rib portion capable of surface contact with an outer peripheral edge portion of a substrate to be processed, and an internal space surrounded by the rib portion.
- a chuck plate as a dielectric having a plurality of support portions standing at intervals, and gas introduction means for introducing a predetermined gas into the internal space, and applying a predetermined voltage between the electrodes;
- a substrate management method for managing wherein an alternating current passing through the electrostatic capacity of the chuck plate is passed through an alternating current power source and the current value is monitored, and the gas is flowed through a gas introducing means to control the gas flow rate. Monitor And performing current value and management from at least one of the amount of change of the gas flow rate of the substrate state.
- the gap between the rib portion and the outer peripheral surface of the substrate is increased by performing predetermined processing such as heat treatment or film formation while the substrate is attracted by the electrostatic chuck having the above-described configuration.
- predetermined processing such as heat treatment or film formation
- the amount of gas leakage from the internal space through the gap changes, so that the gas supply amount from the gas introduction means changes.
- the warpage of the substrate increases in the direction in which the central portion of the substrate is separated from the internal space (compression direction)
- the impedance increases due to the change in capacitance, thereby changing the current value.
- the gas flow rate or impedance, and hence the alternating current is accordingly increased.
- the change in the current value increases, it is possible to accurately grasp the state of the substrate that leads to substrate damage.
- the present invention when the amount of change of at least one of the current value and the gas flow rate exceeds a predetermined threshold value, it is determined that the substrate is in a state of being connected to the substrate, and the DC voltage applied between both electrodes and
- an alternating current is supplied to monitor the current value, and when the predetermined threshold value is exceeded, it is determined that the substrate is defective. If it is adopted, it may be possible to prevent the substrate having warped more than necessary from being damaged by forcibly adsorbing it with an electrostatic chuck.
- the state in which the substrate can be detached from the chuck plate is determined from the current value after the application of voltage is stopped from the adsorption state of the substrate, it is affected by the residual charge immediately after the adsorption is released. In a state where the substrate is still adsorbed, it is possible to reliably prevent the substrate from being damaged in the processing chamber by, for example, lifting up to transfer the substrate or accessing the transfer robot.
- the figure explaining the structure of an electrostatic chuck The figure which illustrates typically the curvature of the wafer which is a board
- a substrate to be processed is a wafer W, and a static treatment disposed in a vacuum processing apparatus that performs a film forming process such as a PVD method or a CVD method, an ion implantation process, a heat treatment or an etching process.
- a film forming process such as a PVD method or a CVD method, an ion implantation process, a heat treatment or an etching process.
- the electrostatic chuck C includes a chuck body 1 disposed at the bottom of a processing chamber (not shown), and a chuck plate 2 that is a dielectric provided on the upper surface of the chuck body 1.
- positive and negative electrodes 3a and 3b are incorporated in the chuck body 1 made of aluminum nitride via an insulating layer (not shown) so that a DC voltage can be applied from a DC power supply E1 of a known chuck power supply E.
- a gas passage 4 penetrating in the vertical direction is formed in the chuck body 1, and the lower end of the gas passage 4 accommodates an inert gas such as Ar gas through a gas pipe 6 provided with a mass flow controller 5.
- These components communicate with the gas source 7 and constitute the gas introducing means of the present embodiment.
- the chuck main body 1 incorporates a resistance heating type heater 8 having a known structure so that the wafer W can be heated and held at a predetermined temperature. In the present embodiment, the case where only the heater 8 is provided is described as an example. However, the present invention is not limited to this, and a known cooling unit may be assembled.
- the chuck plate 2 is made of, for example, aluminum nitride, and has a plurality of ribs 2a that are concentrically arranged in an annular rib portion 2a that can contact the outer peripheral edge of the back surface of the wafer W and an inner space 2b that is surrounded by the rib portion 2a. And a bar-shaped support portion 2c.
- the height of the support portion 2c is set to be slightly smaller than the height of the rib portion 2a.
- the wafer W is adsorbed on the surface of the chuck plate 2 by electrostatic force generated by applying a DC voltage between the electrodes 3 a and 3 b.
- the outer peripheral edge portion of the back surface of the wafer W is in surface contact with the rib portion 2a over the entire circumference thereof, whereby the internal space 2b is substantially sealed.
- Ar gas is supplied through the gas introduction means, an Ar gas atmosphere can be formed in the internal space 2b.
- the wafer 8 is heated by operating the heater 8, the heat transfer to the wafer W is assisted by forming an Ar gas atmosphere in the internal space 2b defined by the rib portion 2a and the back surface of the wafer W.
- the wafer W can be efficiently heated.
- the wafer W is warped in the compression direction or the tensile direction due to, for example, the stress of itself or the stress of the thin film formed on the surface of the wafer W.
- the electrostatic chuck C When adsorbing such a wafer W to the electrostatic chuck C, the wafer W is adsorbed by the electrostatic chuck C and heated or formed, or after the processing, the electrostatic chuck C is released and conveyed. It is necessary to manage the substrate so that the substrate is not damaged (such as cracking or cracking).
- an AC power source E2 is connected in series to a DC power source E1 in the chuck power source E (not shown), and the electrostatic chuck 1 is electrostatically connected from the AC power source E2.
- An alternating current is passed through the capacitor, and the impedance is monitored from the current value measured by a known ammeter A.
- the Ar gas is connected to the gas pipe 6 downstream of the mass flow controller 5 via a known mass flow meter 9. It was decided to monitor the gas flow rate.
- the state of the wafer W can be managed by taking as an example the case where the wafer W is warped in the compression direction when the warped wafer W is attracted by the electrostatic chuck C. Will be explained.
- a known laser displacement meter is arranged above the center position of the wafer W as indicated by a virtual line in FIG. 1, and the amount of displacement at the center position is measured.
- the two-dot chain line a in FIG. 3 indicates the impedance change
- the solid line b indicates the gas flow rate change
- the one-dot chain line c indicates the displacement
- the dotted line d indicates the current value
- the solid line e indicates the electrode.
- the change of the DC voltage is shown.
- an alternating current is passed through the alternating current power source E2, and the impedance of the electrostatic capacitance is measured from the current value of the ammeter A at that time. Then, the displacement amount at the center position of the wafer W is measured.
- a predetermined DC voltage for example, 400 V
- a predetermined DC voltage for example, 400 V
- the DC power source E1 of the chuck power source E to attract the wafer W to the surface of the chuck plate 2.
- the outer peripheral edge portion of the back surface of the wafer W is in surface contact with the rib portion 2a over the entire circumference thereof, so that the wafer W is in a substantially horizontal state (see FIG. 1).
- the impedance and the center position at this time are measured, the impedance is reduced (about 10 k ⁇ reduction), and the center position of the wafer W is also displaced to the chuck plate 2 side.
- the current value measured by the ammeter is substantially constant.
- the impedance is also substantially constant, and the gas flow rate and displacement are hardly changed.
- the introduction of the heater 8 and Ar gas is stopped, the application of voltage between the electrodes 3a and 3b is stopped, and the current value and thus the impedance at this time are measured.
- the amount of displacement was larger than that before adsorption, and the warpage of the wafer W in the compression direction was increased.
- the warpage state of the wafer W can be accurately managed from the impedance.
- the impedance and the amount of displacement of the wafer W are correlated with each other, and it is understood that the relationship is approximately proportional. From the above, the amount of warpage of the wafer W can be determined by measuring the impedance and thus the current value, and if this is managed, the state leading to the breakage of the wafer W can be properly managed.
- the damage of the wafer W in the processing chamber can be surely prevented to improve the product yield. However, productivity can be improved.
- the impedance and thus the current value change beyond a predetermined threshold during processing, it can be determined that the wafer is damaged.
- an excessive stress is applied to the wafer W by controlling at least one of the DC voltage applied between the electrodes 3a and 3b and the gas flow rate from the gas introduction means while appropriately stopping the predetermined process. Eliminate the state of joining. Thereby, damage to the wafer W in the processing chamber can be prevented.
- the threshold value may be set as appropriate in consideration of the size and thickness of the wafer W.
- an alternating current is applied after applying the DC voltage to the electrodes 3a and 3b after the wafer W is placed on the chuck plate 2 and the current value. Then, the impedance is monitored, and if it exceeds a predetermined threshold value, it is determined that the warp more than necessary has occurred in the wafer W and can be damaged if it is attracted by the electrostatic chuck C. Damage to the wafer W can be prevented.
- the case where the warping in the compressing direction is mainly described has been described.
- the wafer W is warped in the tensile direction during the processing and before and after the processing.
- the rib portion 2a and the outer peripheral edge portion of the wafer W are not in surface contact with each other, and a gap between the two becomes large and the amount of leaked gas increases.
- the gas flow rate measured by the mass flow meter 9 also changes.
- the gas flow rate since there is a correlation between the gas flow rate and the warpage amount of the wafer W in the pulling direction, if the gas flow rate is managed, the warpage amount of the wafer W can be determined, and if this is managed, the wafer W is damaged. It is possible to properly manage the state leading to, and to prevent damage to the wafer W in the processing chamber in the same manner as described above.
- Electrostatic chuck 1 Chuck body 2 Chuck plate 2a Rib 2b Internal space 2c Support 3a, 3b Electrode 5 Mass flow controller (gas introduction means) 7 Gas source (gas introduction means) 9 Mass flow meter A Ammeter E Chuck power W Wafer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
1 チャック本体
2 チャックプレート
2a リブ部
2b 内部空間
2c 支持部
3a、3b 電極
5 マスフローコントローラ(ガス導入手段)
7 ガス源(ガス導入手段)
9 マスフローメータ
A 電流計
E チャック電源
W ウエハ
Claims (4)
- 複数個の電極を有するチャック本体と、処理すべき基板の外周縁部が面接触可能なリブ部及び前記リブ部で囲繞された内部空間に所定の間隔を存して立設された複数個の支持部を有する誘電体たるチャックプレートと、前記内部空間に所定のガスを導入するガス導入手段とを備え、電極間に所定の電圧を印加してチャックプレートで基板を吸着し、かつ、前記内部空間に所定のガスを供給してガス雰囲気の形成し得る静電チャックにて基板を保持する場合、当該基板の破損を招かないように基板状態を管理する基板管理方法であって、
交流電源を介してチャックプレートの静電容量を通る交流電流を流してその電流値を監視すると共に、ガス導入手段を介して前記ガスを流して当該ガス流量を監視し、電流値及びガス流量のうち少なくとも一方の変化量から前記基板状態の管理を行うことを特徴とする基板管理方法。 - 前記電流値及びガス流量のうち少なくとも一方の変化量が所定の閾値を超えると、基板の破損につながる基板状態であると判断し、両電極間に印加する直流電圧及びガス導入手段からのガスの流量のうち少なくとも一方を制御して前記基板状態を解消することを特徴とする請求項1記載の基板管理方法。
- 前記基板をチャックプレートに載置した後、前記電極に電圧を印加する前に交流電流を流してその電流値を監視し、所定の閾値を超えていると、基板不良と判断することを特徴とする請求項1または請求項2記載の基板管理方法。
- 前記基板の吸着状態から電圧の印加を停止した後、前記電流値からチャックプレートからの基板の脱離可能状態を判断することを特徴とする請求項1乃至請求項3のいずれか1項に記載の基板管理方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009801399641A CN102177578A (zh) | 2008-10-07 | 2009-10-05 | 基板管理方法 |
US13/119,985 US8389411B2 (en) | 2008-10-07 | 2009-10-05 | Method of managing substrate |
DE112009002400T DE112009002400T5 (de) | 2008-10-07 | 2009-10-05 | Verfahren zum Handhaben eines Substrats |
JP2010532800A JP5232868B2 (ja) | 2008-10-07 | 2009-10-05 | 基板管理方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-260562 | 2008-10-07 | ||
JP2008260562 | 2008-10-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010041409A1 true WO2010041409A1 (ja) | 2010-04-15 |
Family
ID=42100371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/005148 WO2010041409A1 (ja) | 2008-10-07 | 2009-10-05 | 基板管理方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8389411B2 (ja) |
JP (1) | JP5232868B2 (ja) |
KR (1) | KR20110082166A (ja) |
CN (1) | CN102177578A (ja) |
DE (1) | DE112009002400T5 (ja) |
RU (1) | RU2011118201A (ja) |
TW (1) | TWI505395B (ja) |
WO (1) | WO2010041409A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019054061A (ja) * | 2017-09-13 | 2019-04-04 | 東芝メモリ株式会社 | 半導体製造装置およびウェハ保持方法 |
WO2020003746A1 (ja) * | 2018-06-28 | 2020-01-02 | アルバックテクノ株式会社 | 静電チャック用の給電装置及び基板管理方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101316804B1 (ko) * | 2008-12-25 | 2013-10-11 | 가부시키가이샤 알박 | 정전척용의 척 플레이트의 제조 방법 |
JP5592833B2 (ja) * | 2011-05-20 | 2014-09-17 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置および静電チャック装置 |
KR102098741B1 (ko) * | 2013-05-27 | 2020-04-09 | 삼성디스플레이 주식회사 | 증착용 기판 이동부, 이를 포함하는 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
CN110544663A (zh) * | 2018-10-31 | 2019-12-06 | 北京北方华创微电子装备有限公司 | 静电吸附卡盘的循环液系统 |
CN110434363A (zh) * | 2019-09-20 | 2019-11-12 | 咸阳圣亚机电设备有限公司 | 端面定位工件夹持结构以及检测方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01321136A (ja) * | 1988-06-24 | 1989-12-27 | Fujitsu Ltd | 静電チャックの劣化検出回路 |
JPH07130827A (ja) * | 1993-11-04 | 1995-05-19 | Hitachi Ltd | ウエーハ静電吸着装置 |
JPH09283608A (ja) * | 1996-04-15 | 1997-10-31 | Kyocera Corp | 静電チャック |
JP2008112751A (ja) * | 2006-10-27 | 2008-05-15 | Tokyo Electron Ltd | 静電チャックの診断方法、真空処理装置及び記憶媒体 |
JP2008159875A (ja) * | 2006-12-25 | 2008-07-10 | Ulvac Japan Ltd | 基板吸着システムおよび半導体製造装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1988009054A1 (en) * | 1987-05-06 | 1988-11-17 | Labtam Limited | Electrostatic chuck using ac field excitation |
US5761023A (en) * | 1996-04-25 | 1998-06-02 | Applied Materials, Inc. | Substrate support with pressure zones having reduced contact area and temperature feedback |
WO2003021642A2 (en) * | 2001-08-31 | 2003-03-13 | Applied Materials, Inc. | Method and apparatus for processing a wafer |
KR20040070008A (ko) * | 2003-01-29 | 2004-08-06 | 쿄세라 코포레이션 | 정전척 |
US7138629B2 (en) * | 2003-04-22 | 2006-11-21 | Ebara Corporation | Testing apparatus using charged particles and device manufacturing method using the testing apparatus |
US7582491B2 (en) | 2006-10-27 | 2009-09-01 | Tokyo Electron Limited | Method for diagnosing electrostatic chuck, vacuum processing apparatus, and storage medium |
US7558045B1 (en) * | 2008-03-20 | 2009-07-07 | Novellus Systems, Inc. | Electrostatic chuck assembly with capacitive sense feature, and related operating method |
-
2009
- 2009-10-05 WO PCT/JP2009/005148 patent/WO2010041409A1/ja active Application Filing
- 2009-10-05 US US13/119,985 patent/US8389411B2/en active Active
- 2009-10-05 RU RU2011118201/28A patent/RU2011118201A/ru not_active Application Discontinuation
- 2009-10-05 CN CN2009801399641A patent/CN102177578A/zh active Pending
- 2009-10-05 KR KR1020117010245A patent/KR20110082166A/ko not_active Application Discontinuation
- 2009-10-05 DE DE112009002400T patent/DE112009002400T5/de active Pending
- 2009-10-05 JP JP2010532800A patent/JP5232868B2/ja active Active
- 2009-10-07 TW TW098133960A patent/TWI505395B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01321136A (ja) * | 1988-06-24 | 1989-12-27 | Fujitsu Ltd | 静電チャックの劣化検出回路 |
JPH07130827A (ja) * | 1993-11-04 | 1995-05-19 | Hitachi Ltd | ウエーハ静電吸着装置 |
JPH09283608A (ja) * | 1996-04-15 | 1997-10-31 | Kyocera Corp | 静電チャック |
JP2008112751A (ja) * | 2006-10-27 | 2008-05-15 | Tokyo Electron Ltd | 静電チャックの診断方法、真空処理装置及び記憶媒体 |
JP2008159875A (ja) * | 2006-12-25 | 2008-07-10 | Ulvac Japan Ltd | 基板吸着システムおよび半導体製造装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019054061A (ja) * | 2017-09-13 | 2019-04-04 | 東芝メモリ株式会社 | 半導体製造装置およびウェハ保持方法 |
WO2020003746A1 (ja) * | 2018-06-28 | 2020-01-02 | アルバックテクノ株式会社 | 静電チャック用の給電装置及び基板管理方法 |
JPWO2020003746A1 (ja) * | 2018-06-28 | 2021-03-11 | アルバックテクノ株式会社 | 静電チャック用の給電装置及び基板管理方法 |
US11257702B2 (en) | 2018-06-28 | 2022-02-22 | Ulvac Techno, Ltd. | Power supply apparatus for electrostatic chuck and substrate control method |
Also Published As
Publication number | Publication date |
---|---|
US20110201139A1 (en) | 2011-08-18 |
CN102177578A (zh) | 2011-09-07 |
KR20110082166A (ko) | 2011-07-18 |
TWI505395B (zh) | 2015-10-21 |
JP5232868B2 (ja) | 2013-07-10 |
US8389411B2 (en) | 2013-03-05 |
DE112009002400T5 (de) | 2012-01-19 |
RU2011118201A (ru) | 2012-11-20 |
JPWO2010041409A1 (ja) | 2012-03-01 |
TW201021149A (en) | 2010-06-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5232868B2 (ja) | 基板管理方法 | |
JP5597695B2 (ja) | 基板保持装置及び基板保持方法 | |
JP5224855B2 (ja) | 電極ユニット、基板処理装置及び電極ユニットの温度制御方法 | |
TWI613752B (zh) | 原位可移除式靜電吸盤 | |
TWI343618B (ja) | ||
TWI475610B (zh) | Electrode construction and substrate processing device | |
US20100307686A1 (en) | Substrate processing apparatus | |
JP7454976B2 (ja) | 基板支持台、プラズマ処理システム及びエッジリングの交換方法 | |
TWI390628B (zh) | Plasma processing device | |
JP5090536B2 (ja) | 基板処理方法及び基板処理装置 | |
JP2003060019A (ja) | ウエハステージ | |
US20150132967A1 (en) | Method of processing substrate and substrate processing apparatus | |
JP2010123810A (ja) | 基板保持装置及び基板温度制御方法 | |
JP4839294B2 (ja) | 半導体ウエハ保持装置 | |
WO2004021427A1 (ja) | プラズマ処理方法及びプラズマ処理装置 | |
JPH10284475A (ja) | 処理方法 | |
JPH1187480A (ja) | 被吸着物の吸着状態モニター方法及び真空装置 | |
JP4602528B2 (ja) | プラズマ処理装置 | |
JP4495687B2 (ja) | 静電チャック | |
JP2010245304A (ja) | 静電チャックの再生方法 | |
JP5957248B2 (ja) | 基板保持装置の再生方法 | |
JP2019216215A (ja) | 基板処理装置及び基板処理方法 | |
JP2013110440A (ja) | 電極ユニット及び基板処理装置 | |
JP2004218052A (ja) | 真空成膜装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200980139964.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 09818949 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010532800 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 13119985 Country of ref document: US |
|
ENP | Entry into the national phase |
Ref document number: 20117010245 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011118201 Country of ref document: RU |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 09818949 Country of ref document: EP Kind code of ref document: A1 |