WO2010038415A1 - 真空排気システム、真空排気システムの運転方法、冷凍機、真空排気ポンプ、冷凍機の運転方法、二段式冷凍機の運転制御方法、クライオポンプの運転制御方法、二段式冷凍機、クライオポンプ、基板処理装置、電子デバイスの製造方法 - Google Patents
真空排気システム、真空排気システムの運転方法、冷凍機、真空排気ポンプ、冷凍機の運転方法、二段式冷凍機の運転制御方法、クライオポンプの運転制御方法、二段式冷凍機、クライオポンプ、基板処理装置、電子デバイスの製造方法 Download PDFInfo
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- WO2010038415A1 WO2010038415A1 PCT/JP2009/004967 JP2009004967W WO2010038415A1 WO 2010038415 A1 WO2010038415 A1 WO 2010038415A1 JP 2009004967 W JP2009004967 W JP 2009004967W WO 2010038415 A1 WO2010038415 A1 WO 2010038415A1
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- temperature
- cooling stage
- refrigerator
- stage
- vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/06—Several compression cycles arranged in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/02—Compressor control
- F25B2600/025—Compressor control by controlling speed
- F25B2600/0253—Compressor control by controlling speed with variable speed
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/70—Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating
Definitions
- the present invention relates to an evacuation system, an operation method of the evacuation system, a refrigerator, an evacuation pump, an operation method of the refrigerator, an operation control method of the two-stage refrigerator, an operation control method of the cryopump, a two-stage refrigerator , A cryopump, a substrate processing apparatus, and a method of manufacturing an electronic device.
- cryopump having a two-stage cooling stage capable of realizing ultra-high vacuum
- cryotrap having a one-stage cooling stage, and the like.
- Patent Document 1 describes a vacuum evacuation system in which a plurality of cryopumps are operated by one compressor.
- a helium gas from a compressor is branched between a compressor and a plurality of cryopumps, and a gas distribution device for adjusting the helium supply pressure is interposed for each branch, and the compressor has a plurality of cryogens. It is disclosed to supply helium at a supply pressure above the maximum required by the pump.
- Patent Document 2 the number of times the high pressure state and the low pressure state are repeated per unit time is feedback-controlled based on the temperature of the first cooling stage, and the temperature of the first cooling stage can be maintained by maintaining the temperature within a certain range.
- a pump is disclosed.
- Patent Document 2 when operating a plurality of cryopumps with one compressor, the pressure difference between the gas in the high pressure piping and the pressure in the low pressure piping is made constant by controlling the cycle time of the compressors. The invention to be maintained is disclosed.
- Patent Document 1 there is a problem from the viewpoint of energy consumption because it is necessary to previously generate high pressure helium more than necessary.
- FIG. 10 shows the relationship between the pressure difference of helium in the high-pressure pipe and the low-pressure pipe connecting the compressor and each cryopump and the power consumption when four cryopumps are operated by one compressor. It is a graph. Here, the heat load is kept constant throughout the experiment.
- the refrigeration capacity is proportional to the product of the operating frequency of the refrigerator and the pressure difference between the high pressure piping and the low pressure piping.
- the operating frequency of the refrigerator refers to the number of times the high pressure state and the low pressure state are repeated per unit time in the refrigerator. Therefore, in the case of FIG. 10, in consideration of the refrigeration capacity, the operating frequency itself of the refrigerator decreases as the pressure difference of gas in the high pressure piping and the low pressure piping increases.
- the energy consumption of the refrigerator itself may increase, but since the energy consumption of the refrigerator is at most 100 W, even 4 units is at most 4 100 W.
- the pressure difference between the gas in the high pressure pipe and the pressure in the low pressure pipe is increased from 1.2 MPa to 1.6 MPa, the energy consumption is increased from about 3500 W to about 4900 W.
- evacuation can be carried out at least by 1000 W or more and lower energy consumption than in the case of evacuation at a pressure difference of 1.6 MPa.
- the refrigerator can have a heat generating function by changing the operation method.
- the regeneration operation is an operation in which the temperature of the cooling unit such as a stage is raised by the heat generation operation of a refrigerator having a heat generating function, the condensed or adsorbed substance is vaporized, and removed from the cooling unit such as a stage. .
- the present invention aims to provide an evacuation technique with low energy consumption in an evacuation system in which a plurality of vacuum evacuation pumps having a cooling stage unit are connected to a compressor for operation.
- an object of the present invention is to provide an evacuation technology capable of quickly returning a refrigerator that is in start-up operation and regeneration operation to the state of operation at the time of vacuum evacuation operation.
- the vacuum pumping system is The refrigerator includes: a first cooling stage unit; and a refrigerator that cools the first cooling stage unit; and a first temperature sensor that measures a temperature of the first cooling stage unit, the temperature measured by the first temperature sensor When the temperature is higher than the predetermined temperature range, the number of times the high pressure state and the low pressure state are repeated within the unit time is increased in the refrigerator, and the temperature measured by the first temperature sensor is lower than the predetermined temperature range.
- a plurality of vacuum evacuation pumps for reducing the number of times and maintaining the number of times when the temperature measured by the first temperature sensor is within the predetermined temperature range;
- a compressor connected to the plurality of vacuum exhaust pumps;
- High-pressure piping which is a flow path through which high-pressure gas having a common pressure is supplied from the compressor to the refrigerators of the plurality of vacuum exhaust pumps;
- Low pressure piping which is a flow path through which low pressure gas is returned to the compressor from a refrigerator of the plurality of vacuum exhaust pumps;
- Control means capable of changing a pressure difference between the internal pressure of the high pressure pipe and the internal pressure of the low pressure distribution according to the number of times; And the like.
- a method of operating a vacuum exhaust system includes a first cooling stage unit, a refrigerator for cooling the first cooling stage unit, and a first method for measuring the temperature of the first cooling stage unit.
- a plurality of vacuum evacuation pumps having a temperature sensor;
- a compressor connected to the plurality of vacuum exhaust pumps;
- High-pressure piping which is a flow path through which high-pressure gas having a common pressure is supplied from the compressor to the refrigerators of the plurality of vacuum exhaust pumps;
- a method of operating a vacuum exhaust system comprising: low pressure piping, which is a flow path through which low pressure gas is returned to the compressor from refrigerators of the plurality of vacuum exhaust pumps;
- the plurality of vacuum evacuation pumps increase the number of times that the high pressure state and the low pressure state are repeated in unit time within the refrigerator, Decreasing the number of times when the temperature measured by the temperature sensor is lower than the predetermined temperature range, and maintaining the number of times when the temperature measured by the first temperature sensor is within the
- a refrigerator comprises a cooling stage; A cylinder connected to one side of the cooling stage; A plate member connected to the other axial end surface of the cylinder opposite to one end surface of the cylinder connected to the cooling stage; A space formed by the cooling stage, the cylinder, and the plate member; A channel provided in the plate member; A valve that brings the inside of the cylinder into either a high pressure state or a low pressure state via the flow path; And a piston-like displacer defining the interior of the space into one space and another space communicating with the flow path,
- the displacer is a refrigerator which is axially reciprocated inside the cylinder, is hollow inside the cylinder, and contains a substance which preserves a heat state inside the cylinder.
- a refrigerator includes a cooling stage, wherein the cooling stage is cooled by adiabatically expanding high-pressure gas.
- the cooling stage is cooled by adiabatically expanding high-pressure gas.
- the refrigerator according to another aspect of the present invention includes a cooling stage, and raises the temperature of the cooling stage to evaporate the substance being condensed or adsorbed, thereby performing high pressure state in the refrigerator. And the number of times the low pressure state is repeated within a unit time is higher than that during the low temperature normal operation, and operates to increase the pressure difference between the high pressure state and the low pressure state of the gas supplied from the compressor. I assume.
- a method of operating a refrigerator comprising: A cylinder connected to one side of the cooling stage; A plate member connected to the other axial end surface of the cylinder opposite to one end surface of the cylinder connected to the cooling stage; A space formed by the cooling stage, the cylinder, and the plate member; A channel provided in the plate member; A valve that brings the inside of the cylinder into either a high pressure state or a low pressure state via the flow path; And a piston-like displacer defining the interior of the space into one space and another space communicating with the flow path,
- the method of operating a refrigerator wherein the displacer axially reciprocates inside the cylinder, and the inside of the cylinder is hollow, and the inside of the cylinder contains a substance that preserves the heat state, Operating the valve to shift the inside of the cylinder from the low pressure state to the high pressure state, thereby adiabatically compressing the low pressure gas; And b.
- the step of the displacer passing through the adiabatically compressed gas is a value higher than that in the low temperature normal operation, and the pressure difference between the high pressure state and the low pressure state is increased. It is characterized by
- a method of operating a refrigerator including a cooling stage, wherein the cooling stage is cooled by adiabatically expanding high-pressure gas.
- the number of times the high and low pressure states of the gas are repeated in a unit time is higher than that in the low temperature normal operation, and the pressure difference between the high pressure state and the low pressure state is increased.
- an operation control method of a two-stage refrigerator comprising: a first cooling stage, a second cooling stage, a first temperature sensor for measuring a temperature of the first cooling stage, and the second cooling
- An operation control method of a two-stage refrigerator comprising: a second temperature sensor for measuring a temperature of a stage; and heating means for heating the first cooling stage,
- a first control step of feedback controlling the operating frequency of the two-stage refrigerator so as to keep the temperature of the first cooling stage constant based on the output of the first temperature sensor;
- the temperature of the second cooling stage is detected by the output of the second temperature sensor, and the output of the heating means is controlled based on the detected temperature of the second cooling stage.
- the two-stage refrigerator comprises a first cooling stage, A second cooling stage, A first temperature sensor for detecting the temperature of the first cooling stage; A second temperature sensor for detecting the temperature of the second cooling stage; Heating means for heating the first cooling stage; And a heating controller for controlling an output of the heating means in accordance with the temperature of the second cooling stage detected by the second temperature sensor.
- a two-stage refrigerator is A first cooling stage having a cooling temperature within a first operating temperature range; A second cooling stage having a cooling temperature within a second operating temperature range set to an operating temperature range lower than the first operating temperature range; Heating means for heating the first cooling stage; Control means for controlling the driving frequency of the two-stage refrigerator; A first temperature sensor that measures the temperature of the first cooling stage; A second temperature sensor that measures the temperature of the second cooling stage; When the output value of the second temperature sensor is an output value indicating a temperature higher than a predetermined value, the control means increases the amount of heat generated by the heating means to increase the drive frequency, thereby to increase the second temperature sensor The driving frequency is reduced by decreasing the amount of heat generated by the heating means when the output value of the output value indicates a temperature lower than a predetermined value.
- the heating means when the heating means is operated to raise the amount of heating heat, the driving power frequency of the refrigerator can be raised, thereby enhancing the refrigeration capacity of the second cooling stage. Conversely, if the amount of heat generated by the heating means is reduced, the driving power frequency of the refrigerator can be reduced, thereby reducing the refrigeration capacity of the second cooling stage. Therefore, according to the present invention, the refrigeration capacity of the second cooling stage can be adjusted.
- the heating means when the detected temperature of the second cooling stage is higher than the maximum value of the target temperature range, the heating means is operated to pull up the amount of heating heat. Then, feedback control is performed to maintain the temperature of the first cooling stage, the drive power frequency of the refrigerator is raised, and the refrigeration capacity of the second cooling stage is increased accordingly. Therefore, the temperature of the second cooling stage can be lowered to within the target temperature range without significantly changing the temperature of the first cooling stage.
- the heat quantity of heating of the heating means is reduced when the detected temperature of the second cooling stage is lower than the minimum value of the target temperature range. Then, feedback control is performed to maintain the temperature of the first cooling stage, and the driving power supply frequency of the refrigerator is lowered, and accordingly, the refrigeration capacity of the second cooling stage is reduced. Therefore, the temperature of the second cooling stage can be raised to within the target temperature range without reducing the temperature of the first cooling stage, and the consumption of helium gas can be reduced.
- FIG. 2 is a cross-sectional view showing the configuration of a cryopump.
- a vacuum pumping system using a cryopump includes a cryopump equipped with a refrigerator that generates cryogenic temperatures, and a compressor that supplies compressed gas such as helium to the refrigerator.
- a high pressure gas is supplied from a compressor to a refrigerator, and this high pressure gas is pre-cooled by a regenerator in the refrigerator and then filled into an expansion chamber and then expanded to generate a low temperature to cool the surroundings, and further a regenerator After cooling, repeat the cycle of returning the low pressure gas back to the compressor.
- Vacuum evacuation is performed by condensing or adsorbing the gas at the cryogenic temperature obtained by this refrigeration cycle.
- FIG. 11 is a view showing the structure of a refrigerator disclosed in FIG. 9 of the above-mentioned publication.
- FIG. 11 shows the internal structure of the cylinder of the refrigerator disposed in the pump container, and the high pressure side valve and the low pressure side valve.
- Displaced in the cylindrical cylinder 71 is a displacer 72 which reciprocates in a sliding manner.
- Ring-shaped seal members 73 and 74 are provided between the displacer 72 and the cylinder 71.
- the diameter of the lower portion in the figure is smaller, and it has a two-stage structure.
- a cooling stage 701 is connected to one end face of the cylinder 71 having a larger diameter. Further, a cooling stage 702 is connected to an end face of the cylinder 71 having a smaller diameter. A plate member 86 is connected to the other axial end face of the cylinder 71 having a larger diameter.
- the regenerators 75 and 76 basically have a structure for passing a gas, and the structures are known, so the detailed description will be omitted.
- a gas flows, for example, as indicated by a broken line 77 in accordance with the movement of the displacer 72. In the gas flow indicated by dashed line 77, all directions in which flow can occur are indicated by arrows.
- a connecting rod 78 is coupled to the upper surface of the displacer 72, and the connecting rod 78 extends outside the cylinder 71 and is coupled to a rotational drive shaft of a motor (not shown) via a crank mechanism (not shown).
- a seal member 79 is provided between the connecting rod 78 and the cylinder 71.
- a low pressure side valve 82 enabling connection with the low pressure gas chamber 81 and a high pressure side valve 84 enabling connection with the high pressure gas chamber 83 are provided.
- the open / close operation of the low pressure side valve 82 is controlled by the command signal 85
- the open / close operation of the high pressure side valve 84 is controlled by the command signal 87.
- the flow direction of the gas is one direction determined by the conditions at that time as described above, and the conditions are the movement direction of the displacer 72, the low pressure valve 82 and the high pressure side. It is given by the state of the opening and closing operation of the valve 84.
- Step (1) When the displacer 72 is located at the top dead center, only the low pressure side valve 82 is opened to expand the high pressure gas accumulated in the spaces L 1 and L 2 to generate cold. The expansion cools the surroundings (cooling stage) of the spaces L 1 and L 2 , and cools the regenerators 75 and 76 by gas movement.
- Step (2) The displacer 72 moves from the top dead center to the bottom dead center, and the low temperature gas remaining in the spaces L 1 and L 2 also passes through the regenerators 75 76 and the cold is accumulated in the coolers 75 76 Accumulated in The low pressure side valve 82 is closed when the displacer 72 is at the bottom dead center.
- Step (3) When the high pressure side valve 84 is opened, the high pressure gas enters the space U, so the gas originally existing there is adiabatically compressed, but at the same time the displacer 72 moves upward, so the high pressure gas Is cooled when passing through the regenerators 75 and 76 in the displacer 72, and moves to the spaces L 1 and L 2 .
- Step (4) The displacer 72 reaches top dead center, and the high pressure side valve 84 is closed.
- Step (5) Next, the low pressure side valve 82 is opened. This step is actually the aforementioned step (1), and thus returns to the first step (1).
- the above cycle is a basic cooling cycle.
- the high pressure side valve 84 is closed and the low pressure side valve 82 is opened when the displacer 72 is at the top dead center position, and the low pressure side valve 82 is opened when the displacer 72 is at the bottom dead center position.
- the opening and closing operation of each valve is controlled to close and open the high pressure side valve 84. Therefore, when the displacer 72 reaches the top dead center or the bottom dead center, the opening / closing timing of each valve is controlled to reverse the direction of the gas flow.
- FIG. 1 is a block diagram showing an example of a vacuum evacuation pump used in the vacuum evacuation system of the present embodiment.
- the vacuum evacuation pump shown in FIG. 1 is a cryopump mounted with a refrigerator having a two-stage cooling stage.
- 1 is a cryopump main body
- 2 is a two-stage refrigerator
- 3 is a compressor
- 4 is a refrigerator drive power supply
- 5 is an inverter built in the refrigerator drive power supply 4.
- the two-stage refrigerator 2 provided in the cryopump 1 includes a first cooling stage 6 and a second cooling stage 7 maintained at a temperature lower than the first cooling stage 6.
- the second cooling stage 7 is connected to a cryopanel 8 cooled to a cryogenic temperature by the second cooling stage 7.
- a radiation shield 9 cooled to a cryogenic temperature by the first cooling stage 6 is connected to the first cooling stage 6.
- the radiation shield 9 is configured to surround the second cooling stage 7 and the cryopanel 8.
- a louver 10 cooled to a cryogenic temperature by the first cooling stage 6 via the radiation shield 9 is provided.
- a casing 11 is provided surrounding the outside of the radiation shield 9.
- the first cooling stage 6 of the two-stage refrigerator 2 includes an electric heater 12 as heating means for heating the first cooling stage 6 and a temperature sensor for measuring the temperature of the first cooling stage 6 (first temperature Sensor) 13 is provided. Further, the second cooling stage 7 is provided with a temperature sensor (second temperature sensor) 14 for measuring the temperature of the second cooling stage.
- a high pressure pipe 15a which is a flow path through which a high pressure gas such as helium is supplied from the compressor 3 to the refrigerator 2, and a low pressure gas such as helium from the refrigerator 2 to the compressor 3 It is connected to the compressor 3 by the low pressure piping 15b which is a flow path which refluxes.
- the high pressure gas compressed by the compressor 3 is supplied to the two-stage refrigerator 2 through the high pressure pipe 15a. Then, the high pressure gas is adiabatically expanded in the first expansion chamber and the second expansion chamber (neither of which is shown) to cool the first cooling stage 6 and the second cooling stage 7, and then pass through the low pressure piping 15b. It is returned to the compressor 3.
- the two-stage refrigerator 2 is connected to a refrigerator drive power supply 4.
- the high-pressure gas supplied from the compressor 3 is adiabatically expanded to obtain a low temperature state.
- the refrigeration capacity is proportional to the number of times that adiabatic expansion is repeated within a unit time, that is, the number of times the high and low pressure states are repeated per unit time in the refrigerator.
- this number of repetitions will be referred to as the "operating frequency" of the refrigerator.
- the operating frequency of the two-stage refrigerator 2 is controlled by the inverter 5 incorporated in the refrigerator drive power supply 4.
- the first temperature sensor 13 and the second temperature sensor 14 are connected to the first temperature setting / control device 16 and the second temperature setting / control device 17, respectively.
- An allowable temperature range of the first cooling stage 6 is set in the first temperature setting / controller 16.
- the allowable temperature range refers to the set temperature range in which the first cooling stage 6 is to be maintained.
- the first cooling stage 6 is required to be maintained in a predetermined temperature range, for example, a temperature range of about 50K to 120K. If the temperature of the first cooling stage 6 is too low, it has a large vapor pressure such as argon, oxygen or nitrogen to be condensed and exhausted by the second cooling stage 7 which is originally maintained at a lower temperature than the first cooling stage 6 Gas is condensed and exhausted to the first cooling stage 6.
- the first cooling stage 6 is required to be maintained within a predetermined temperature range, that is, within the allowable temperature range.
- the first temperature setting / control device 16 performs refrigeration based on the temperature detected by the first temperature sensor 13 and the allowable temperature range of the first cooling stage 6 set.
- the inverter 5 of the machine drive power supply 4 is controlled. That is, based on the output of the first temperature sensor 13, the operating frequency of the two-stage refrigerator 2 is feedback-controlled to maintain the temperature of the first cooling stage 6 at a constant value.
- a target temperature range of the second cooling stage 7 is set in the second temperature setting / control unit 17.
- the target temperature range refers to the temperature range in which the second cooling stage 7 is maintained. Normally, as the target temperature range, the temperature of the second cooling stage 7 needs to be somewhat low in consideration of the ability to condense or adsorb the gas, while from the viewpoint of reducing energy consumption, the second There is no need to cool the stage.
- the target temperature range is set to, for example, a temperature range of 10 to 12K.
- the second temperature setting / control device 17 transmits control data to the heating controller 18 based on the temperature detected by the second temperature sensor 14 and the set target temperature range of the second cooling stage 7.
- a heating power source 19 is connected to the heating controller 18, and an electric heater 12 is further connected to the heating power source 19.
- the heating controller 18 adjusts the supplied power supplied from the heating power supply 19 to the electric heater 12 according to the control from the second temperature setting / control device 17 and operates the electric heater 12 connected to the heating power supply 19. Control.
- the first temperature setting / control device 16 controls the inverter 5 of the refrigerator drive power supply 4 so that the temperature of the first cooling stage 6 detected by the first temperature sensor 13 maintains the set allowable temperature range.
- Control the operating frequency of the refrigerator 2 Specifically, when the detected temperature of the first cooling stage 6 is higher than the upper limit temperature of the allowable temperature range, the operating frequency of the refrigerator is raised. When the operating frequency of the refrigerator is increased, the cooling capacity is enhanced by advancing the cooling cycle, and as a result, the temperature of the first cooling stage 6 can be lowered. Also, if the detected temperature of the first cooling stage 6 is lower than the lower limit temperature of the allowable temperature range, the operating frequency of the refrigerator is lowered. When the operating frequency of the refrigerator is reduced, the cooling cycle is delayed and the cooling capacity is reduced, as a result, the temperature of the first cooling stage 6 is increased.
- the second temperature setting / control device 17 heats the control data so that the temperature of the second cooling stage 7 detected by the second temperature sensor 14 maintains the set target temperature or target temperature range.
- Tell 18 The heating controller 18 controls the power supplied from the heating power source 19 based on the control data, thereby controlling the operation of the electric heater 12. Specifically, when the detected temperature of the second cooling stage 7 becomes lower than the minimum value of the target temperature range, the output of the electric heater 12 is reduced, and when the temperature of the second cooling stage 7 becomes higher than the maximum value of the target temperature range Turn up the output.
- t is the temperature of the second cooling stage 7 detected by the second temperature sensor 14, and Tmax is the target temperature range of the second cooling stage 7 set in the second temperature setting / controller 17. Is the maximum value of Further, Tmin is the minimum value of the target temperature range of the second cooling stage 7 set in the second temperature setting / control device 17.
- step S11 the cryopump is activated, and temperature control of the first cooling stage 6 is started. Thereafter, in step S12, temperature adjustment of the second cooling stage 7 is also started. It is monitored whether the temperature t of the second cooling stage 7 detected by the second temperature sensor 14 is within the target temperature range.
- step S13 when it is detected that the temperature t of the second cooling stage 7 detected by the second temperature sensor 14 becomes higher than the maximum value Tmax of the target temperature range (Yes in step S13), the second A control signal is output from the temperature setting and controller 17 to the heating controller 18.
- the heating controller 18 receiving this control signal pulls up the power supplied from the heating power supply 19 to the electric heater 12.
- the output of the electric heater 12 rises within the range of a predetermined operating frequency (step S14).
- the refrigeration capacity of the second cooling stage 7 is enhanced, and the temperature t of the second cooling stage 7 decreases.
- the temperature of the first cooling stage 6 is within the allowable temperature range because the operating frequency of the two-stage refrigerator 2 is feedback-controlled based on the temperature of the first temperature sensor 13 of the first cooling stage as described above. Maintained.
- the output of the electric heater 12 can gradually increase the power supplied from the heating power supply 19 until the temperature t of the second cooling stage 7 detected by the second temperature sensor 14 falls below the maximum value Tmax of the target temperature range. If it is detected that the temperature t of the second cooling stage 7 has become equal to or lower than the maximum value Tmax of the target temperature range by the heating of the electric heater 12 (No in step S13), this is the minimum value of the target temperature range. It is determined whether it is Tmin or more (step S15). When the temperature t of the second cooling stage 7 is equal to or higher than the minimum value Tmin of the target temperature range, the temperature t of the second cooling stage 7 is within the target temperature range.
- step S15 When it is confirmed that the temperature t of the second cooling stage 7 is within the target temperature range (No in step S15), the process is returned to step S13, and the output of the electric heater 12 at this time is maintained. Monitoring of whether the temperature t of the second cooling stage 7 is within the target temperature range is continued.
- step S15 when the temperature of the second cooling stage 7 detected by the second temperature sensor 14 becomes lower than the minimum value Tmin of the target temperature range (Yes in step S15), control from the second temperature setting and controller 17 to the heating controller 18 is performed. A signal is output. The heating controller 18 receiving this control signal reduces the power supplied from the heating power supply 19 to the electric heater 12 (step S16). As a result, when the output of the electric heater 12 falls and the heat load on the first cooling stage 6 falls, the operating temperature of the two-stage refrigerator 2 is lowered by the first temperature setting and controller 16 as described above. And the refrigeration cycle is delayed. As a result, the refrigeration capacity of the second cooling stage 7 is reduced, and the temperature t of the second cooling stage 7 is increased.
- the output of the electric heater 12 is a heating power supply until the temperature t of the second cooling stage 7 detected by the second temperature sensor 14 becomes equal to or higher than the minimum value Tmin of the target temperature range or the output of the electric heater 12 becomes zero. Power supply by 19 can be reduced gradually.
- the maximum of the target temperature range It is identified whether it is equal to or less than the value Tmax (step S13).
- the output of the electric heater 12 at this time is maintained, and the temperature t of the second cooling stage 7 is within the target temperature range. It will continue to monitor if there is any.
- the operating frequency of the refrigerator when the operating frequency of the two-stage refrigerator 2 is within the normal operating frequency range, the temperature of the first cooling stage 6 is within the allowable temperature range, and It indicates that the temperature of the second cooling stage 7 is within the target temperature range.
- the operating frequency of the refrigerator generally has an upper limit and a lower limit.
- the upper limit of the number of rotations of the motor for driving the refrigerator is from the power of the motor for driving the refrigerator, and the lower limit of the number of rotations is required to generate the required torque.
- the operating frequency of the refrigerator within the range of the upper limit and the lower limit is referred to as "normal operating frequency" throughout the specification.
- normal operating frequency 20 to 60 times per minute can be mentioned. That is, the fact that the operating frequency of the two-stage refrigerator 2 is within the range of the normal operating frequency means that the operating frequency of the refrigerator is feedback-controlled accordingly if there is any change, for example, a change in heat load. Indicates that it can maintain normal operation.
- the second temperature sensor 14 and the second temperature setting / control device 17 are included in the means required in the vacuum evacuation pump having the two cooling stages shown in FIG. Is unnecessary.
- the first temperature setting / control unit 16 and the heating control unit 18 are connected in FIG.
- the first cooling stage 6 and the second cooling stage 7 shown in FIG. 1 are one cooling stage, and thus will be described as “cooling stage 6”.
- the first temperature setting / control device 16 is a first temperature sensor 13 attached to the cooling stage 6 so that the temperature of the cooling stage 6 detected by the first temperature sensor 13 is within the set allowable temperature range.
- the operating frequency of the refrigerator 2 is feedback-controlled based on the output of. Then, if the temperature of the first stage cooling stage 6 does not become equal to or higher than the lower limit temperature of the allowable temperature range even if the operating frequency of the refrigerator of the first stage cooling stage 6 is lowered to the lower limit of the normal operation frequency, the first temperature setting and control Based on the temperature of the first temperature sensor 13 input to the heater 16, the heating controller 18 controls the heating power supply 19 until the temperature falls within the allowable temperature range.
- the operating frequency of the refrigerator 2 is raised to increase the refrigeration capacity.
- the detected temperature of the cooling stage 6 is lower than the lower limit temperature of the allowable temperature range, the operating frequency of the refrigerator is lowered to reduce the refrigeration capacity. As a result, the temperature of the cooling stage 6 rises.
- the temperature of the cooling stage 6 does not become equal to or higher than the lower limit temperature of the allowable temperature range even if the operating frequency of the refrigerator of the one-stage cooling stage 6 is lowered to the lower limit of the normal operating frequency, input to the first temperature setting and controller 16
- the heating controller 18 controls the heating power supply 19 until the temperature falls within the allowable temperature range based on the temperature of the first temperature sensor 13. Therefore, when the operating frequency of the refrigerator is within the normal operating frequency range, the temperature of the cooling stage 6 is within the allowable temperature range, and the operating frequency is feedback-controlled accordingly when any change occurs. Indicates that it can maintain normal operation.
- the temperature of the first cooling stage is within the allowable temperature range
- the temperature of the second cooling stage is within the target temperature range. It will be inside.
- the inverter 5, the refrigerator drive power supply 4, the first temperature setting / control device 16, the second temperature setting / control device 17, the heating controller 18 and the heating power supply 19 have been described as individual devices. However, it is also possible to store them in one unit. In the following description, it is assumed that each evacuation pump is controlled by each controller having such a function. Alternatively, each refrigerator may not be controlled by an individual controller, but may be controlled entirely by a single controller.
- FIG. 3 is an explanatory view illustrating the configuration of the vacuum evacuation system according to the first embodiment of the present invention.
- the embodiment shown in FIG. 3 relates to the case where a vacuum pumping pump having a plurality of single-stage cooling stages is operated by a single compressor.
- 3 is a compressor, and 15a and 15b are high pressure piping and low pressure piping, respectively.
- Reference numerals 30a to 30d denote vacuum evacuation pumps having one cooling stage, and reference numerals 31a to 31d denote controllers for the vacuum evacuation pumps 30a to 30d.
- Reference numerals 32 and 33 denote pressure gauges for high pressure piping and low pressure piping, respectively.
- Reference numeral 34 denotes a frequency control unit including, for example, an inverter.
- the frequency control unit 34 obtains the difference between the pressure from the pressure gauge 32 and the pressure from the pressure gauge 33, and controls the drive frequency of the compressor 3, and 35 controls the controllers 31a to 31d of the respective vacuum exhaust pumps. It is a controller to control.
- Reference numerals 37a to 37d denote single-stage refrigerators.
- the controller 35 and the frequency control unit 34 function as control means.
- the controllers 31a to 31d have the functions of the first temperature setting / controller 16, the refrigerator drive power supply, the inverter, the heating controller 18, and the heating power supply 19 described with reference to FIG.
- reference numerals 30a to 30d denote vacuum evacuation pumps having one cooling stage, which use a cryotrap here.
- FIG. 4 is a block diagram showing the configuration of the vacuum pump shown in FIG. 3, and corresponds to the vacuum pump (cryotop) 30a surrounded by an alternate long and short dash line in FIG.
- the vacuum evacuation pump 30a includes a cooling stage 406, a cooling panel 408, a temperature sensor 413, an electric heater 412, a single-stage refrigerator 37a, a high pressure pipe 15a, and a low pressure pipe 15b.
- the temperature sensor 413 and the electric heater 412 are connected to the controller 31 a, and the high pressure pipe 15 a and the low pressure pipe 15 b are connected to the compressor 3.
- the controllers 31a to 31d monitor the operating frequencies of the single-stage refrigerators 37a to 37d of the vacuum evacuation pumps (cryotraps) 30a to 30d. Each of the controllers 31a to 31d outputs the operating frequency of the refrigerator 37a to 37d of the cryotrap to the controller 35 (step S21).
- the controller 35 acquires data of the operating frequencies of the refrigerators 37a to 37d of all the cryotraps (step S22). Then, the controller 35 determines whether the operating frequencies of the refrigerators 37a to 37d of all the cryotraps fall within the range of the normal operating frequency of the cooler (step S23). Then, when the operating frequency of all the refrigerators does not fall within the range of the normal operating frequency (No in step S23), the controller 35 issues, for example, an alarm or the like to notify that effect.
- step S23 determines whether there is room to reduce the pressure difference between the high pressure piping and the low pressure piping. Is determined (step S24). If there is room to reduce the pressure difference (Yes in step S24), the controller 35 decreases the pressure difference (step S25), and returns to step S22. When there is no room to lower the pressure difference (No in step S24), the controller 35 acquires data of the operating frequency of the next refrigerator (step S26).
- the refrigeration capacity of the refrigerators 37a to 37d is proportional to the product of the operating frequency of the refrigerator and the pressure difference between the high pressure piping and the low pressure piping.
- a cryotrap is used as a vacuum evacuation pump having a single cooling stage. Then, as shown in FIG. 10, in order to ensure a constant cooling capacity and a low energy consumption as the whole vacuum pumping system, the operating frequency of the refrigerator is increased in a range that can be increased to increase the pressure in the high pressure piping and the low pressure piping. It is good to reduce the pressure difference of the gas as much as possible.
- the pressure difference between the gas in the high pressure piping and the pressure in the low pressure piping has an upper limit and a lower limit.
- the upper limit is 1.8 MPa (about 18 atm)
- the lower limit is 1.1 MPa (about 11 atm).
- the central pressure difference is 1.4 MPa.
- the pressure difference between the gas in the high pressure piping and the low pressure piping is controlled based on this standard.
- FIG. 6 is a characteristic diagram for explaining a method of reducing the pressure difference between gases in the high pressure piping and the low pressure piping.
- the pressure difference of helium in the high pressure piping 15a and the low pressure piping is decreased by 0.05 MPa as long as the operating frequency of the refrigerator 37a to 37d is within the range of the normal operating frequency.
- A1 to A3 indicate the maximum value of the operating frequency of the refrigerator when the pressure difference between helium in the high pressure piping and the low pressure piping is 1.2 MPa, 1.25 MPa and 1.30 MPa.
- B1 to B3 show the maximum value of the operating frequency of the refrigerator when the pressure difference of helium in the high pressure piping and the low pressure piping is reduced by 0.05 MPa respectively from A1 to A3.
- the pressure difference is reduced by 0.05 MPa because it is judged that the reduction of the 0.05 MPa differential pressure does not exceed 60 times per minute.
- a straight line B that complements the maximum value of the operating frequency of the B1 to B3 refrigerator is determined. From this straight line B, it can be seen that if the differential pressure difference between helium in the high pressure piping and the low pressure piping is further reduced by 0.05 MPa, the allowable operating frequency exceeds 60 times per minute.
- the controller 35 determines that there is no room for lowering the operating frequency (No in step S24).
- the controller 35 is an operating condition in which the combination of the pressure difference of helium in the high pressure piping and the low pressure piping of B3 and the maximum value of the operating frequency of the refrigerator shown in FIG. In this state, the vacuum evacuation system is controlled to continue the operation until the next opportunity to acquire data of the operating frequency of the refrigerator (step S26).
- complementation straight line was calculated from three points, it is not necessarily limited to three points.
- interpolation method although the least squares method was used, the present invention is not limited thereto, and polynomial approximation, logarithmic approximation, power approximation, exponential approximation, etc. can be applied.
- the upper limit or the lower limit of the control operating frequency is controlled as a numerical value within a range of the allowable operating frequency by a predetermined value. Specifically, it is assumed that the upper and lower limits of the operating frequency are 60 and 20 times per minute, respectively. Assuming that the frequency within the allowable operating frequency range is 3 times per minute, the upper and lower limits of the control operating frequency are controlled as 57 and 23 times per minute, respectively. Then, change the pressure difference between the high pressure piping and the low pressure piping, and change the pressure difference between gases such as helium in the high pressure piping and the low pressure piping when the control upper limit or lower limit is exceeded once. Stop.
- the maximum operating frequency of the refrigerator is 50 times per minute at 1.25 MPa
- the maximum operating frequency of the refrigerator is 54 times per minute at 1.20 MPa.
- the pressure difference between helium in the high pressure piping and the low pressure piping is stopped to fall below 1.15 MPa. Then, the operation is continued at 1.15 MPa.
- the start-up operation is a vacuum exhaust pump that cools the cooling stage using the low temperature generated by the adiabatic expansion of high-pressure gas, condenses or adsorbs the gas to the site cooled thereby, and exhausts the gas, After roughing the inside, cooling by a refrigerator is started, and an operation of cooling to a temperature state necessary to exhibit a function as a vacuum evacuation pump is called start-up operation. During this operation, since the vacuum exhaust pump does not have the exhausting ability, the shorter the time of start-up operation, the better.
- the inventors of the present invention can operate the refrigerator at a high operating frequency at the start-up operation than at the normal evacuation operation and with a large pressure difference between the gas in the high pressure piping and the low pressure piping. We found that it was desirable.
- the vacuum exhaust pump used in the present embodiment is a so-called reservoir type pump which condenses or adsorbs the gas in the vacuum chamber and exhausts it on the low temperature surface generated by the cooling refrigerator. Therefore, when the condensed or adsorbed gas in the low temperature part becomes equal to or more than a predetermined amount, the condensed or adsorbed gas is vaporized so that the gas is not condensed or adsorbed on the condensation surface or the adsorption surface. It is required to return.
- the regeneration operation is the operation of an evacuation pump that cools the cooling stage using the low temperature generated by adiabatically expanding high-pressure gas and condenses or adsorbs the gas on the site cooled thereby, thereby evacuating the gas. Since the heat generation function can be provided by changing the method of, the operation that regenerates the pump using that function is said.
- the temperature of the cooling stage is raised to vaporize the substance condensed or adsorbed and removed from the cooling unit such as the stage.
- the refrigerator mounted on the pump is connected to the cooling stage, the cylinder connected to one side of the cooling stage, and the other axial end face of the cylinder opposite to the end face on the connection side of the cooling stage And a space formed by the cooling stage, the cylinder, and the plate member.
- a flow path is provided in the plate member, and the inside of the cylinder is operated to a high pressure state or a low pressure state by valve operation through the flow path.
- a piston-like displacer is disposed which is divided into one space and another space communicating with the flow passage, and axially reciprocates in the cylinder.
- the inside of the displacer is hollow, and the inside is filled with a substance that preserves the thermal condition.
- the valve operation is performed so that the high pressure state and the inside of the cylinder are connected.
- This operation adiabatically compresses the low-pressure gas that has already been inside the cylinder and adiabatically compresses it in the space opposite to the plate member of the displacer in the cylinder, so that the temperature rises.
- the heated gas is allowed to pass through the displacer, the heated state is stored in the material that preserves the heat state inside the displacer.
- the valve operation is performed so that the low pressure state is established inside the cylinder.
- the high pressure gas in the cylinder is adiabatically expanded and its temperature decreases.
- Most of the space (gas) in the cylinder is between the displacer and the plate member where the flow path is provided, so most of the low temperature gas does not pass through the displacer (it does not preserve the low temperature state) ) It is discharged from the refrigerator as it is cold. That is, a low temperature gas flow does not occur across the material that stores the thermal condition that is filled inside the displacer.
- the cooling stage is not cooled by the low temperature gas.
- the above-mentioned action gradually raises the temperature of the substance that preserves the heat state inside the displacer, and finally raises the stage temperature.
- the substance condensed or adsorbed in the cooling unit can be vaporized and removed from the cooling unit such as a stage.
- the inventors of the present invention have found that the temperature raising capacity at the time of regeneration operation is such that the higher the operating frequency of the refrigerator, the higher the pressure difference between the gas in the high pressure pipe and the low pressure pipe supplied to the refrigerator. It was found that the larger, the larger.
- Regeneration can be realized in a short time by performing heat generation operation reverse to the normal cooling operation of the cryopump (see, for example, Japanese Examined Patent Publication No. 4-195). That is, in the cylinder of the refrigerator, a piston-like member called a displacer reciprocates coaxially with the cylinder of the refrigerator. And, a central portion of the displacer is filled with a heat storage agent, which allows a gas to pass through in the reciprocating direction.
- the heat generation operation shifts the phase of opening and closing of the valve which is responsible for introducing high pressure gas and low pressure gas into the container of the refrigerator with respect to the displacer by 180 degrees as compared with the case of performing the cooling operation. It is realized by driving.
- the displacer performs single vibration movement by a drive source such as a motor, but in a normal cooling operation, the low pressure valve is opened when the space on the valve side is the smallest with respect to the displacer, and the valve Open the high pressure valve when the space on the side is the largest.
- the high pressure valve is opened when the space on the valve side is the smallest with respect to the displacer, and the low pressure valve is opened when the space on the valve side is the largest with respect to the displacer.
- the temperature of the first stage and the second stage rises, and the gas condensed or adsorbed there is vaporized in a short time, and the condensation surface or the adsorption surface is regenerated.
- At least one of the plurality of vacuum exhaust pumps 30a to 30d performs the regeneration operation, and the valve operates to shift the inside of the cylinder from the low pressure state to the high pressure state, thereby adiabatic compression of low pressure gas.
- the operation is repeated, which includes the steps of: allowing the displacer to pass through the adiabatically compressed gas.
- at least one of the plurality of vacuum exhaust pumps 30a to 30d performs a normal operation, and the operation of the valve causes the inside of the cylinder to shift from the high pressure state to the low pressure state.
- An operation is repeated by repeating the operation including the step of adiabatically expanding the gas and the step of the displacer passing through the adiabatically expanded gas.
- the vacuum exhaust pump during start-up operation or regeneration operation has a constant operating frequency higher than that during normal operation. I will drive.
- the operating frequency of the refrigerator is, for example, 20 to 60 times per minute, but is operated at a constant value, for example, 75 times per minute.
- the vacuum pumping system of the present embodiment is configured as a vacuum pumping system
- the normal process can be performed in the vacuum chamber to which the vacuum pumping pump is not connected for starting operation or regeneration operation.
- the pressure difference between the high pressure piping and the low pressure piping can be increased while maintaining For other vacuum pumps other than those in start-up operation or regeneration operation, the pressure of the gas in the high-pressure piping and in the low-pressure piping while confirming that the operating frequency is within the normal operating frequency range. You should raise the difference to the limit.
- the controller 35 By performing such an operation through the controller 35, the vacuum evacuation performed during the start-up operation and the regeneration operation while performing the normal process in the vacuum chamber to which the vacuum exhaust pump performing the start-up operation or the regeneration operation is not connected.
- the pump can be quickly returned to the normal operation state.
- the controllers 31a to 31d monitor the operating frequencies of the single-stage refrigerators 37a to 37d of the vacuum evacuation pumps (cryotraps) 30a to 30d (step S31).
- the operating frequencies of the cryocoolers 37a to 37d are sent to the controller 35 (step S32).
- the controller 35 determines whether the operating frequencies of all the cryotraps other than during start-up operation or regeneration operation fall within the range of the normal operating frequency of the cooler (step S33). Then, when the operating frequencies of all the refrigerators other than during the start-up operation or the regeneration operation are not within the range of the normal operation frequency (No in step S33), an alarm or the like is issued to notify that.
- step S34 when the operating frequencies of all the refrigerators other than those in start-up operation or regeneration operation are within the range of the normal operation frequency (Yes in step S33), the pressure difference between the gas in the high pressure pipe 15a and the pressure in the low pressure pipe 15b is The controller 35 determines whether or not there is room to increase it (step S34).
- the operating frequency of the cryotrap in start-up operation or regeneration operation is maintained at a value higher than the normal operation frequency, for example, 75 times per minute.
- the normal operation frequency for example, 75 times per minute.
- step S34 it is determined whether the operating frequency remains within the normal operating frequency range in a refrigerator other than those in start-up operation or regeneration operation even if the pressure difference of the gas in high-pressure pipe 15a and low-pressure pipe 15b is further increased by 0.05 MPa. .
- the pressure difference between the gas in the high-pressure pipe 15a and the low-pressure pipe 15b is increased, the operating frequency of the refrigerator other than in the start-up operation or the regeneration operation is decreased, so the refrigerator other than in the start-up operation or the regeneration operation It is determined whether the minimum value of the operating frequency does not fall below the lower limit. If it does not fall below (Yes in step S34), the pressure difference between the high pressure piping 15a and the low pressure piping 15b is increased by, for example, 0.05 MPa (step S35). Then, control is returned to R.
- the operating state of the vacuum pumping system finally reached maintains the operating frequency of all the cryotraps except during the starting operation or the regenerating operation within the normal operating frequency range, that is, the normal operating condition
- the pressure difference between the high pressure piping 15a and the low pressure piping 15b is in the vicinity of the maximum of the pressure difference that can be reached while maintaining the As a result, while maintaining the other cryotraps in the normal operation state, the cryotraps in the start-up operation or the regeneration operation state can be brought into the normal operation state quickly.
- a cryopump is used as a vacuum evacuation pump having a two-stage cooling stage.
- 1a to 1e denote cryopumps
- 2a to 2e denote refrigerators
- 3 denotes a compressor
- 15a and 15b denote high pressure piping and low pressure piping
- 36a to 36e denote controllers of the cryopumps 1a to 1e.
- 32 and 33 are pressure gauges for high pressure piping and low pressure piping respectively
- 34 is a frequency control for obtaining the difference between the pressure from the pressure gauge 32 and the pressure from the pressure gauge 33 and controlling the drive frequency of the compressor 3 It is a department.
- Reference numeral 35 denotes a controller that controls the controllers 36a to 36e of the respective cryopumps.
- the control method of the second embodiment is similar to that described in FIG. 5 and FIG. The only difference is that the cryopump is within the normal operating frequency range, but the temperature of the first cooling stage is within the allowable temperature range and the temperature of the second cooling stage is within the target temperature range. Differs in that the
- the normal process is performed in the vacuum chamber to which the cryopump which is not in the start operation or the regeneration operation is connected.
- the cryopump in operation and regeneration operation can be quickly returned to the state of normal operation.
- a cryopump is used as a vacuum evacuation unit having two cooling stages
- a cryotrap is used as a vacuum evacuation unit having one cooling stage.
- 1a to 1c denote cryopumps
- 2a to 2c denote two-stage refrigerators of cryopumps
- 3 denotes a compressor
- 15a and 15b denote high pressure piping and low pressure piping, respectively
- 30a and 30b denote cryotraps.
- 31a and 31b are cryotrap controllers
- 32 and 33 are pressure gauges for high pressure piping and low pressure piping, respectively.
- Reference numeral 34 denotes a frequency control unit which obtains the difference between the pressure from the pressure gauge 32 and the pressure from the pressure gauge 33, and controls the drive frequency of the compressor 3
- 36a to 36c are controllers of the cryopumps 1a to 1c.
- Reference numeral 35 denotes a controller that integrally controls the controllers 36a to 36c of the cryopumps 1a to 1c and the controllers 36a and 36b of the cryotraps 37a and 37b.
- the control method of the third embodiment is the same as that described in FIG. 5 and FIG. The only difference is that the operating frequency of the refrigerator is within the range of the normal operating frequency, the temperature of the first stage is within the allowable temperature range for a cryopump having a two-stage stage and the second stage Is within the target temperature range, and it indicates that the temperature of the first stage is within the allowable temperature range for a cryotrap having a single stage.
- the start-up operation and the regeneration operation are performed in the vacuum chamber to which the vacuum evacuation pump which is not in the start-up operation or the regeneration operation is connected.
- the evacuating pump can be quickly returned to the normal operation state.
- FIG. 12 shows a substrate processing apparatus 1200 using the vacuum evacuation system of the present invention.
- the present substrate processing apparatus is a cluster type sputtering apparatus for forming source and drain electrodes in a liquid crystal panel.
- a substrate transfer chamber 1201 is located at the center of the apparatus to exchange substrates between the substrate processing chambers.
- a substrate transfer robot (not shown) is disposed at the central portion to exchange the substrates between the substrate processing chambers.
- 1202 and 1203 are load lock chambers
- 1204 is a substrate heating chamber
- 1205 is a first Ti film forming chamber
- 1206 is an Al film forming chamber
- 1207 is a second Ti film forming chamber.
- a gate valve 1208 is disposed between the substrate transfer chamber 1201 and each substrate processing chamber.
- respective targets 1209a, 1209b, and 1209c are disposed to face the substrate.
- a source and a drain of a bottom gate thin film transistor employed in a liquid crystal display device.
- TFT Thin Film Transistor
- 1301 is a glass substrate
- 1302 is an insulating layer, for example, a silicon nitride film
- 1303 is a semiconductor layer made of amorphous Si
- 1304 is a source electrode and a drain electrode
- 1305 is a gate electrode
- 1306 is a silicon nitride film, for example.
- the protective layer and 1307 are, for example, indium tin oxide (Indium Tin Oxide, hereinafter abbreviated as ITO) which is a transparent conductive film.
- ITO Indium Tin Oxide
- the source and drain electrodes 1304 have a three-layer structure of Ti / Al / Ti, so that good adhesion with the semiconductor layer 1303 can be ensured, and an Al semiconductor layer Diffusion to amorphous Si, which is 1303 can be prevented.
- Cryopumps 1210 a to 1210 e are attached to the substrate heating chamber 1204, the first Ti film forming chamber 1205, the Al film forming chamber 1206, the second Ti film forming chamber 1207, and the substrate transfer chamber 1201, respectively.
- vertical cryopumps (shown by dotted lines) are attached to the lower side of each substrate processing chamber via gate valves (not shown).
- Each cryopump is connected to a controller 1211 that controls each cryopump.
- Each controller 1211 is connected to a general controller 1212 that controls the whole.
- each cryopump 1210 corresponds to the controllers 36a to 36e in FIG. 8
- the general controller 1212 corresponds to the controller 35 in FIG.
- the state of each cryopump 1210 is input to a general controller 1212 that controls the entire system through controllers 1211a to 1211e that monitor each cryopump.
- He gas is supplied from the compressor 1214 to the respective cryopumps 1210 through the high pressure piping and the low pressure piping 1216, and reflux is performed.
- a differential pressure between the He high pressure pipe and the He low pressure pipe is measured by a differential pressure gauge 1215 and input to a frequency control unit 1213 which drives the compressor.
- the supply and recovery of He are performed by different pipes, but are shown as one for simplification.
- the differential pressure between the high pressure He and the low pressure He from the compressor is necessary and minimized during normal operation of the plurality of cryopumps disposed in the plurality of processing chambers. By doing this, the energy consumption during normal operation can be reduced.
- the other substrate processing chambers continue the normal substrate processing and start the operation or the regenerating operation.
- the start-up operation or the regeneration operation can be completed in a short time, and normal substrate processing can be quickly returned.
- FIG. 13 semiconductor layers 1303 and below are fabricated on a glass substrate 1301 With the gate valve 1208 defining the load lock chamber 1202 or 1203 and the substrate transfer chamber 1201 closed, the cassette in which a plurality of substrates are stored is returned to the state of atmospheric pressure inside the load lock chamber 1202 or 1203, It is placed in the load lock chamber 1202 or 1203. Next, the inside of the load lock chamber 1202 or 1203 is evacuated by a low vacuum exhaust pump such as a dry pump.
- a low vacuum exhaust pump such as a dry pump.
- the gate valve 1208 between the substrate transfer chamber 1201 and the load lock chamber 1202 or 1203 is opened. Then, the arm of the substrate transfer robot disposed at the central portion of the substrate transfer chamber 1201 is rotated and extended to a position where the substrate is located, and picks up the substrate. The substrate transfer robot having picked up the substrate contracts the arm and rotates around the center of the substrate transfer chamber 1201 to direct the direction of the arm to the substrate heating chamber 1204. Thereafter, the gate valve between the substrate transfer chamber 1201 and the load lock chamber 1202 or 1203 is closed.
- the gate valve 1208 between the substrate transfer chamber 1201 and the substrate heating chamber 1204 is opened, and the substrate is carried into the substrate heating chamber 1204 by the substrate transfer robot.
- the arm of the substrate transfer robot is contracted, and then the gate valve 1208 between the substrate transfer chamber 1201 and the substrate heating chamber 1204 is closed.
- the substrate heating chamber 1204 the substrate is kept heated at 120 to 150 ° C. by heating means such as a halogen lamp.
- the heated substrate is transferred to the next first Ti film forming chamber 1205 by the substrate transfer robot in the same operation as described above, and the next substrate is transferred from the cassette in the load lock chamber 1202 or 1203 to the substrate transfer chamber 1201. And is transferred to the substrate heating chamber 1204.
- the substrate in the cassette and the processed substrates in each chamber are loaded from the load lock chamber 1202 or 1203 to the substrate heating chamber 1204, the first Ti film forming chamber 1205, the Al film forming chamber 1206, and the second Ti film forming.
- the substrate which has been sequentially fed to the chamber 1207 and on which the film formation of the third layer (Ti film) is finished is returned to the non-storage shelf of the cassette of the load lock chamber 1202 or 1203.
- the cassette in which the processing substrate is stored is removed from the load lock chamber 1202 or 1203. Then, a cassette containing a new substrate is stored in the load lock chamber 1202 or 1203, and the process is repeated in the same procedure.
- the Ti film formation in the first Ti film forming chamber 1205 and the second Ti film forming chamber 1207 is a low pressure of 0.2 to 0.4 Pa, and a film having a thickness of about 50 nm is formed.
- a film having a film thickness of 200 to 300 nm is formed at a low pressure of 0.2 to 0.4 Pa.
- a mask is formed on the substrate taken out of the substrate processing apparatus 1200 with resist in the form of a source electrode and a drain electrode, and then anisotropically etched by a dry etching apparatus.
- a protective film 1306 is formed by a CVD method or a sputtering method to obtain the TFT of FIG.
- the present invention is not limited to this. It is needless to say that the present invention is applicable to a cluster type substrate processing apparatus or an in-line type substrate processing apparatus that requires a plurality of refrigerators to be operated.
- the device suitable for manufacturing using the vacuum evacuation system of the present invention is not limited to the liquid crystal display device described above, and it is necessary to process a multilayer consistently with vacuum consistent magnetic random access memory (MRAM) As described above, a head for a hard disk, a DRAM (Dynamic Random Access Memory, hereinafter abbreviated as above) and the like can be mentioned.
- MRAM vacuum consistent magnetic random access memory
- the term "electronic device” refers to an electronic device in general including a display device using electronic technology, an MRAM, a head of a hard disk, a DRAM, and the like.
- the present invention is applied to a vacuum pumping system in which a plurality of vacuum pumping pumps having a cooling stage are connected to a compressor to operate, and a method of operating the same.
- a cryopump, a cryotrap, or a vacuum pump having a cryopump and a cryotrap can be used for the system.
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Abstract
Description
第一冷却ステージ部を含み、前記第一冷却ステージ部を冷却する冷凍機と、前記第一冷却ステージ部の温度を測定する第一温度センサとを有し、前記第一温度センサの測定した温度が所定の温度範囲より高いときは前記冷凍機内で高圧状態と低圧状態が単位時間内に繰り返される回数を増大させ、前記第一温度センサの測定した温度が前記所定の温度範囲より低いときは前記回数を減少させ、前記第一温度センサの測定した温度が前記所定の温度範囲内のときは前記回数を維持する複数の真空排気ポンプと、
前記複数の真空排気ポンプに繋がれた圧縮機と、
前記圧縮機から共通の圧力の高圧のガスが前記複数の真空排気ポンプの冷凍機に供給される流路である高圧配管と、
前記複数の真空排気ポンプの冷凍機から低圧のガスが前記圧縮機に還流する流路である低圧配管と、
前記回数に応じて、前記高圧配管の内圧と前記低圧配の内圧との圧力差を変化させることが出来る制御手段と、
を備えることを特徴とする。
前記複数の真空排気ポンプに繋がれた圧縮機と、
前記圧縮機から共通の圧力の高圧のガスが前記複数の真空排気ポンプの冷凍機に供給される流路である高圧配管と、
前記複数の真空排気ポンプの冷凍機から低圧のガスが前記圧縮機に還流する流路である低圧配管とを有する真空排気システムの運転方法であって、
前記複数の真空排気ポンプは、前記第一温度センサの測定した温度が所定の温度範囲より高いときは前記冷凍機内で高圧状態と低圧状態が単位時間内に繰り返される回数を増大させ、前記第一温度センサの測定した温度が前記所定の温度範囲より低いときは前記回数を減少させ、前記第一温度センサの測定した温度が前記所定の温度範囲内のときは前記回数を維持する工程と、
前記冷凍機における前記回数が所定の範囲内に収まる範囲で、前記圧縮機で生成される前記高圧配管内と前記低圧配管内とのガスの圧力差を減少させる工程と、を有する。
前記冷却ステージの一の面に接続されたシリンダと、
前記冷却ステージに接続された前記シリンダの一の端面とは反対側の、前記シリンダの軸方向の他の端面に接続された板部材と、
前記冷却ステージ、前記シリンダ及び前記板部材より囲まれて形成される空間と、
前記板部材に設けられている流路と、
前記流路を介して前記シリンダの内部を高圧状態及び低圧状態のいずれかの状態にするバルブと、
前記空間の内部を一の空間と前記流路と通じる他の空間とに画するピストン状のディスプレーサとを有し、
前記ディスプレーサは前記シリンダの内部で軸方向に往復運動し、前記シリンダの内部が中空で、前記内部に熱状態を保存する物質が含まれている冷凍機であって、
前記バルブが動作することにより前記シリンダの内部が前記低圧状態から前記高圧状態に移行することにより、前記低圧状態のガスが断熱圧縮される工程と、
前記断熱圧縮したガス中を前記ディスプレーサが通過する工程と、を含む動作を繰り返す運転をする際に、
前記冷凍機内で前記高圧状態と前記低圧状態とが単位時間内に繰り返される回数が、低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする。
常温状態から真空排気運転の状態に至らせるときに、
前記冷凍機内で前記ガスの高圧状態と低圧状態が単位時間内に繰り返される回数が前記の低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする。
前記冷却ステージの一の面に接続されたシリンダと、
前記冷却ステージに接続された前記シリンダの一の端面とは反対側の、前記シリンダの軸方向の他の端面に接続された板部材と、
前記冷却ステージ、前記シリンダ及び前記板部材より囲まれて形成される空間と、
前記板部材に設けられている流路と、
前記流路を介して前記シリンダの内部を高圧状態及び低圧状態のいずれかの状態にするバルブと、
前記空間の内部を一の空間と前記流路と通じる他の空間とに画するピストン状のディスプレーサとを有し、
前記ディスプレーサは前記シリンダの内部で軸方向に往復運動し、前記シリンダの内部が中空で、前記内部に熱状態を保存する物質が含まれている冷凍機の運転方法であって、
前記バルブが動作することにより前記シリンダの内部が前記低圧状態から前記高圧状態に移行することにより、前記低圧状態のガスが断熱圧縮される工程と、
前記断熱圧縮したガス中を前記ディスプレーサが通過する工程と、を含む動作を繰り返す運転をする際に、
前記冷凍機内で前記高圧状態と前記低圧状態とが単位時間内に繰り返される回数が、低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする。
常温状態から真空排気運転の状態に至らせるときに、
前記冷凍機内で前記ガスの高圧状態と低圧状態が単位時間内に繰り返される回数が前記の低温通常運転の時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする。
前記第一温度センサの出力を元に、前記第一冷却ステージの温度を一定に保つように前記二段式冷凍機の作動周波数をフィードバック制御する第一制御工程と、
前記第二温度センサの出力により前記第二冷却ステージの温度を検出し、この検出した該第二冷却ステージの温度に基づいて、前記加熱手段の出力を制御することにより前記二段式冷凍機の作動周波数を変更させて前記第二冷却ステージの冷凍能力を制御する第二制御工程と、を有することを特徴とする。
第二冷却ステージと、
前記第一冷却ステージの温度を検知する第一温度センサと、
前記第二冷却ステージの温度を検知する第二温度センサと、
前記第一冷却ステージを加熱する加熱手段と、
前記第二温度センサにより検知された前記第二冷却ステージの温度に応じて前記加熱手段の出力を制御する加熱制御器と、を備えることを特徴とする。
第一稼動温度幅以内の冷却温度となる第一冷却ステージと、
前記第一稼動温度幅より低い稼動温度幅に設定した第二稼動温度幅以内の冷却温度となる第二冷却ステージと、
前記第一冷却ステージを加熱するための加熱手段と、
二段式冷凍機の駆動周波数を制御する制御手段と、
前記第一冷却ステージの温度を測定する第一温度センサと、
前記第二冷却ステージの温度を測定する第二温度センサと、を備え、
前記制御手段は、前記第二温度センサの出力値が所定値より高い温度を示す出力値のとき、前記加熱手段の加熱熱量を増大することにより、前記駆動周波数を増大させ、前記第二温度センサの出力値が所定値より低い温度を示す出力値のとき、前記加熱手段の加熱熱量を減少させることにより、前記駆動周波数を減少させることを特徴とする。
Claims (43)
- 第一冷却ステージ部を含み、前記第一冷却ステージ部を冷却する冷凍機と、前記第一冷却ステージ部の温度を測定する第一温度センサとを有し、前記第一温度センサの測定した温度が所定の温度範囲より高いときは前記冷凍機内で高圧状態と低圧状態が単位時間内に繰り返される回数を増大させ、前記第一温度センサの測定した温度が前記所定の温度範囲より低いときは前記回数を減少させ、前記第一温度センサの測定した温度が前記所定の温度範囲内のときは前記回数を維持する複数の真空排気ポンプと、
前記複数の真空排気ポンプに繋がれた圧縮機と、
前記圧縮機から共通の圧力の高圧のガスが前記複数の真空排気ポンプの冷凍機に供給される流路である高圧配管と、
前記複数の真空排気ポンプの冷凍機から低圧のガスが前記圧縮機に還流する流路である低圧配管と、
前記回数に応じて、前記高圧配管の内圧と前記低圧配の内圧との圧力差を変化させることが出来る制御手段と、
を備えることを特徴とする真空排気システム。 - 前記複数の真空排気ポンプの少なくとも1台は、更に前記第一冷却ステージ部より低温に冷却される第二冷却ステージ部と、前記第二冷却ステージ部の温度を測定する第二温度センサと、前記第一冷却ステージ部の加熱手段とを有し、
前記加熱手段は、前記第一冷却ステージ部の温度が前記所定の温度範囲内で、且つ前記第二冷却ステージ部の温度が所定の温度の範囲内に維持されるように、前記第二温度センサの出力に基づいて加熱が制御されることを特徴とする請求項1に記載の真空排気システム。 - 前記複数の真空排気ポンプは、クライオトラップを含んでいることを特徴とする請求項1に記載の真空排気システム。
- 前記複数の真空排気ポンプは、クライオポンプを含んでいることを特徴とする請求項1に記載の真空排気システム。
- 前記第二冷却ステージ部と、第二温度センサとを有する、前記少なくとも1台の真空排気ポンプはクライオポンプである請求項2に記載の真空排気システム。
- 第一冷却ステージ部を含み、前記第一冷却ステージ部を冷却する冷凍機と、前記第一冷却ステージ部の温度を測定する第一温度センサとを有する複数の真空排気ポンプと、
前記複数の真空排気ポンプに繋がれた圧縮機と、
前記圧縮機から共通の圧力の高圧のガスが前記複数の真空排気ポンプの冷凍機に供給される流路である高圧配管と、
前記複数の真空排気ポンプの冷凍機から低圧のガスが前記圧縮機に還流する流路である低圧配管とを有する真空排気システムの運転方法であって、
前記複数の真空排気ポンプは、前記第一温度センサの測定した温度が所定の温度範囲より高いときは前記冷凍機内で高圧状態と低圧状態が単位時間内に繰り返される回数を増大させ、前記第一温度センサの測定した温度が前記所定の温度範囲より低いときは前記回数を減少させ、前記第一温度センサの測定した温度が前記所定の温度範囲内のときは前記回数を維持する工程と、
前記冷凍機における前記回数が所定の範囲内に収まる範囲で、前記圧縮機で生成される前記高圧配管内と前記低圧配管内とのガスの圧力差を減少させる工程と、
を有する真空排気システムの運転方法。 - 前記複数の真空排気ポンプの少なくとも1台は、更に前記第一冷却ステージ部より低温に冷却される第二冷却ステージ部と、前記第二冷却ステージ部の温度を測定する第二温度センサと、前記第一冷却ステージ部の加熱手段とを有し、
前記第一冷却ステージ部の温度が前記所定の温度範囲内で、且つ前記第二冷却ステージ部の温度が所定の温度の範囲内に維持されるように、前記第二温度センサの出力に基づいて前記加熱手段を作動させる工程を更に有することを特徴とする請求項6に記載の真空排気システムの運転方法。 - 冷却ステージと、
前記冷却ステージの一の面に接続されたシリンダと、
前記冷却ステージに接続された前記シリンダの一の端面とは反対側の、前記シリンダの軸方向の他の端面に接続された板部材と、
前記冷却ステージ、前記シリンダ及び前記板部材より囲まれて形成される空間と、
前記板部材に設けられている流路と、
前記流路を介して前記シリンダの内部を高圧状態及び低圧状態のいずれかの状態にするバルブと、
前記空間の内部を一の空間と前記流路と通じる他の空間とに画するピストン状のディスプレーサとを有し、
前記ディスプレーサは前記シリンダの内部で軸方向に往復運動し、前記シリンダの内部が中空で、前記内部に熱状態を保存する物質が含まれている冷凍機であって、
前記バルブが動作することにより前記シリンダの内部が前記低圧状態から前記高圧状態に移行することにより、前記低圧状態のガスが断熱圧縮される工程と、
前記断熱圧縮したガス中を前記ディスプレーサが通過する工程と、を含む動作を繰り返す運転をする際に、
前記冷凍機内で前記高圧状態と前記低圧状態とが単位時間内に繰り返される回数が、低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする冷凍機。 - 前記低温通常運転時より高い値は、一定値であることを特徴とする請求項8に記載の冷凍機。
- 前記一定値は、前記冷凍機の作動周波数の最大値であることを特徴とする請求項9に記載の冷凍機。
- 請求項8乃至請求項10のいずれか1項に記載の冷凍機を有することを特徴とする真空排気ポンプ。
- 請求項11に記載の真空排気ポンプはクライオポンプを含んでいることを特徴とする真空排気ポンプ。
- 請求項11に記載の真空排気ポンプはクライオトラップを含んでいることを特徴とする真空排気ポンプ。
- 冷却ステージを含み、前記冷却ステージを高圧のガスが断熱膨張することにより冷却する冷凍機において、
常温状態から真空排気運転の状態に至らせるときに、
前記冷凍機内で前記ガスの高圧状態と低圧状態が単位時間内に繰り返される回数が前記の低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする冷凍機。 - 前記低温通常運転時より高い値は、一定値であることを特徴とする請求項14に記載の冷凍機。
- 前記一定値は、前記冷凍機の作動周波数の最大値であることを特徴とする請求項15に記載の冷凍機。
- 請求項14乃至請求項16のいずれか1項に記載の冷凍機を有することを特徴とする真空排気ポンプ。
- 請求項17に記載の真空排気ポンプはクライオポンプを含んでいることを特徴とする真空排気ポンプ。
- 請求項17に記載の真空排気ポンプはクライオトラップを含んでいることを特徴とする真空排気ポンプ。
- 冷却ステージを含み、前記冷却ステージの温度を昇温することで、凝縮又は吸着している物質を気化させる再生運転時において、前記冷凍機内で高圧状態と低圧状態が単位時間内に繰り返される回数が低温通常運転時より高い値であり、且つ圧縮機から供給されるガスの前記高圧状態と低圧状態の圧力差を大きくするように動作することを特徴とする冷凍機。
- 前記低温通常運転時より高い値は、一定値であることを特徴とする請求項20に記載の冷凍機。
- 前記一定値は、前記冷凍機の作動周波数の最大値であることを特徴とする請求項21に記載の冷凍機。
- 請求項20乃至請求項22のいずれか1項に記載の冷凍機を有することを特徴とする真空排気ポンプ。
- 請求項23に記載の真空排気ポンプはクライオポンプを含んでいることを特徴とする真空排気ポンプ。
- 請求項23に記載の真空排気ポンプはクライオトラップを含んでいることを特徴とする真空排気ポンプ。
- 冷却ステージと、
前記冷却ステージの一の面に接続されたシリンダと、
前記冷却ステージに接続された前記シリンダの一の端面とは反対側の、前記シリンダの軸方向の他の端面に接続された板部材と、
前記冷却ステージ、前記シリンダ及び前記板部材より囲まれて形成される空間と、
前記板部材に設けられている流路と、
前記流路を介して前記シリンダの内部を高圧状態及び低圧状態のいずれかの状態にするバルブと、
前記空間の内部を一の空間と前記流路と通じる他の空間とに画するピストン状のディスプレーサとを有し、
前記ディスプレーサは前記シリンダの内部で軸方向に往復運動し、前記シリンダの内部が中空で、前記内部に熱状態を保存する物質が含まれている冷凍機の運転方法であって、
前記バルブが動作することにより前記シリンダの内部が前記低圧状態から前記高圧状態に移行することにより、前記低圧状態のガスが断熱圧縮される工程と、
前記断熱圧縮したガス中を前記ディスプレーサが通過する工程と、を含む動作を繰り返す運転をする際に、
前記冷凍機内で前記高圧状態と前記低圧状態とが単位時間内に繰り返される回数が、低温通常運転時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする冷凍機の運転方法。 - 冷却ステージを含み、前記冷却ステージを高圧のガスが断熱膨張することにより冷却する冷凍機の運転方法において、
常温状態から真空排気運転の状態に至らせるときに、
前記冷凍機内で前記ガスの高圧状態と低圧状態が単位時間内に繰り返される回数が前記の低温通常運転の時より高い値であり、且つ前記高圧状態と前記低圧状態との圧力差を大きくするように動作することを特徴とする冷凍機の運転方法。 - 第一冷却ステージ及び第二冷却ステージと、前記第一冷却ステージの温度を測定する第一温度センサと、前記第二冷却ステージの温度を測定する第二温度センサと、前記第一冷却ステージを加熱するための加熱手段と、を有する二段式冷凍機の運転制御方法であって、
前記第一温度センサの出力を元に、前記第一冷却ステージの温度を一定に保つように前記二段式冷凍機の作動周波数をフィードバック制御する第一制御工程と、
前記第二温度センサの出力により前記第二冷却ステージの温度を検出し、この検出した該第二冷却ステージの温度に基づいて、前記加熱手段の出力を制御することにより前記二段式冷凍機の作動周波数を変更させて前記第二冷却ステージの冷凍能力を制御する第二制御工程と、
を有することを特徴とする二段式冷凍機の運転制御方法。 - 前記第二制御工程は、検出した前記第二冷却ステージの温度が、目標温度範囲の最小値より低くなった時に前記加熱手段の出力を下げ、目標温度範囲の最大値より高くなった時に前記加熱手段の出力を上げることを特徴とする請求項28に記載の二段式冷凍機の運転制御方法。
- 前記加熱手段が、電気ヒータであることを特徴とする請求項28に記載の二段式冷凍機の運転制御方法。
- 二段式冷凍機を有するクライオポンプの運転制御方法において、
請求項28乃至30のいずれか1項に記載の二段式冷凍機の運転制御方法により二段式冷凍機の運転を制御することを特徴とするクライオポンプの運転制御方法。 - 二段式冷凍機であって、
第一冷却ステージと、
第二冷却ステージと、
前記第一冷却ステージの温度を検知する第一温度センサと、
前記第二冷却ステージの温度を検知する第二温度センサと、
前記第一冷却ステージを加熱する加熱手段と、
前記第二温度センサにより検知された前記第二冷却ステージの温度に応じて前記加熱手段の出力を制御する加熱制御器と、
を備えることを特徴とする二段式冷凍機。 - 二段式冷凍機であって、
第一稼動温度幅以内の冷却温度となる第一冷却ステージと、
前記第一稼動温度幅より低い稼動温度幅に設定した第二稼動温度幅以内の冷却温度となる第二冷却ステージと、
前記第一冷却ステージを加熱するための加熱手段と、
二段式冷凍機の駆動周波数を制御する制御手段と、
前記第一冷却ステージの温度を測定する第一温度センサと、
前記第二冷却ステージの温度を測定する第二温度センサと、を備え、
前記制御手段は、前記第二温度センサの出力値が所定値より高い温度を示す出力値のとき、前記加熱手段の加熱熱量を増大することにより、前記駆動周波数を増大させ、前記第二温度センサの出力値が所定値より低い温度を示す出力値のとき、前記加熱手段の加熱熱量を減少させることにより、前記駆動周波数を減少させることを特徴とする二段式冷凍機。 - 前記加熱手段は、電気ヒータであることを特徴とする請求項32に記載の二段式冷凍機。
- 前記加熱手段は、電気ヒータ、高温部からの熱伝達状態を切り換える熱スイッチ、冷媒ガスの循環パイプからの循環入熱量の調整器又は誘導加熱装置であることを特徴とする請求項33に記載の二段式冷凍機。
- 請求項32に記載の二段式冷凍機を有することを特徴とするクライオポンプ。
- 請求項33に記載の二段式冷凍機を有することを特徴とするクライオポンプ。
- 請求項36に記載のクライオポンプを有することを特徴とする基板処理装置。
- 請求項37に記載のクライオポンプを有することを特徴とする基板処理装置。
- 前記基板処理装置は、スパッタリング装置であることを特徴とする請求項38に記載の基板処理装置。
- 前記基板処理装置は、スパッタリング装置であることを特徴とする請求項39に記載の基板処理装置。
- 請求項1乃至5のいずれか1項に記載の真空排気システムを有することを特徴とする基板処理装置。
- 請求項38乃至42のいずれか1項に記載の基板処理装置で処理される工程を有することを特徴とする電子デバイスの製造方法。
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