WO2010016479A1 - シリコン塊を破砕するための破砕機及びかかる破砕機を複数個備えたシリコン破砕装置 - Google Patents
シリコン塊を破砕するための破砕機及びかかる破砕機を複数個備えたシリコン破砕装置 Download PDFInfo
- Publication number
- WO2010016479A1 WO2010016479A1 PCT/JP2009/063793 JP2009063793W WO2010016479A1 WO 2010016479 A1 WO2010016479 A1 WO 2010016479A1 JP 2009063793 W JP2009063793 W JP 2009063793W WO 2010016479 A1 WO2010016479 A1 WO 2010016479A1
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- WIPO (PCT)
- Prior art keywords
- crusher
- silicon
- cylinder bore
- piston
- hammer head
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C1/00—Crushing or disintegrating by reciprocating members
- B02C1/005—Crushing or disintegrating by reciprocating members hydraulically or pneumatically operated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B02—CRUSHING, PULVERISING, OR DISINTEGRATING; PREPARATORY TREATMENT OF GRAIN FOR MILLING
- B02C—CRUSHING, PULVERISING, OR DISINTEGRATING IN GENERAL; MILLING GRAIN
- B02C1/00—Crushing or disintegrating by reciprocating members
- B02C1/14—Stamping mills
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25D—PERCUSSIVE TOOLS
- B25D9/00—Portable percussive tools with fluid-pressure drive, i.e. driven directly by fluids, e.g. having several percussive tool bits operated simultaneously
- B25D9/02—Portable percussive tools with fluid-pressure drive, i.e. driven directly by fluids, e.g. having several percussive tool bits operated simultaneously of the tool-carrier piston type, i.e. in which the tool is connected to an impulse member
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25D—PERCUSSIVE TOOLS
- B25D9/00—Portable percussive tools with fluid-pressure drive, i.e. driven directly by fluids, e.g. having several percussive tool bits operated simultaneously
- B25D9/06—Means for driving the impulse member
- B25D9/08—Means for driving the impulse member comprising a built-in air compressor, i.e. the tool being driven by air pressure
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25D—PERCUSSIVE TOOLS
- B25D2250/00—General details of portable percussive tools; Components used in portable percussive tools
- B25D2250/371—Use of springs
Definitions
- the present invention includes a crusher that can be conveniently applied to crushing silicon lumps, particularly crushing rod-shaped polycrystalline silicon lumps into fist-sized pieces called nuggets, and a plurality of such crushers.
- the present invention relates to a silicon crusher.
- silicon wafers used in the manufacture of semiconductor devices produce a rod-like polycrystalline silicon mass by the Siemens method, then crush the silicon mass into fist-sized pieces, and use the crushed silicon pieces as raw materials.
- a cylindrical silicon ingot is produced by the chocolate ski method, and the silicon ingot is sliced and ground.
- Patent Document 1 listed below discloses a silicon lump crushing tool that can be used to break a silicon lump into silicon pieces.
- a silicon lump crushing tool includes a pneumatic drive means of a type in which a piston mounted on a casing movably between a retracted position and a protruding position is forced from a retracted position to a protruding position by the action of compressed air, and a casing.
- a guide cylinder connected and extending in the moving direction of the piston, and a hammer head whose rear end is movably inserted into the guide cylinder.
- Patent Document 2 discloses a silicon lump crushing device that crushes a silicon lump by sandwiching and pressing rod-shaped polycrystalline silicon between a pair of press crushing members.
- the silicon lump crushing tool disclosed in Patent Document 1 is a relatively inexpensive tool, it does not generate a large amount of useless powder, does not require an excessive work load, and Moreover, although a silicon lump can be crushed into silicon pieces without requiring skill and skill, it is not yet satisfactory and has the following problems to be solved.
- the piston With the hammer head in contact with the silicon lump, the piston is forced from the retracted position to the protruding position and impact is applied to the hammer head (the hammer head is moved toward the silicon lump from a position away from the silicon lump. Therefore, a considerable amount of energy applied to the piston by the action of compressed air is consumed by the impact of the piston against the stationary hammer head, and is not transmitted to the silicon mass with high efficiency. Further, when crushing the silicon lump, it is necessary for an operator to manually bring the tip of the hammer head into contact with the silicon lump, and the crushing of the silicon lump cannot be automated.
- the silicon lump crushing device disclosed in the above-mentioned Patent Document 2 is extremely expensive due to its complicated structure and high horsepower.
- the present invention has been made in view of the above facts, and the first technical problem thereof is that the energy applied to the piston by the compressed air is transmitted to the silicon mass with high efficiency, and also, if necessary, the operator's It is to provide a new and improved crusher that allows manual operation to be avoided and to automate the crushing of silicon chunks.
- the second technical problem of the present invention is that although it can be manufactured at a relatively low cost, it is possible to suppress the production of powder as much as possible to break the silicon lump into small pieces, and in addition to silicon It is to provide a new and improved silicon lump crushing device that makes it possible to automate lump crushing operations.
- the inventor has connected the hammer head to the piston, and when the compressed air does not act on the piston, the hammer head is elastically biased to the standby position, and when the compressed air acts on the piston, It has been found that the first technical problem can be achieved by being moved from the standby position and colliding with the silicon mass.
- a crusher that achieves the first problem
- a cylinder case for defining a cylinder bore space, a first position that is one end side of the cylinder bore, and a second end side of the cylinder bore
- a closing member fixed in the cylinder case and defining the other end of the cylinder bore, and the other end of the cylinder bore
- An open path that opens to the first position elastic biasing means that elastically biases the piston to the first position, and extends from the piston to the other end of the cylinder bore and penetrates the blocking member and protrudes from the cylinder bore
- Control valve means disposed in the communication means and selectively set to an operating state in which the cylinder bore communicates with the compressed air source and a
- the cylinder case is made of metal, and the outer surface of the cylinder case is covered with a synthetic resin cover member.
- the cover member extends beyond the front end of the cylinder case, and when the piston is elastically biased to the first position, the hammer head is inward of the front end of the cover member.
- the hammerhead protrudes beyond the front end of the cover member when the piston is forced to the second position.
- the hammer head has a cylindrical outer peripheral surface, and the inner diameter of the portion of the cover member to which the hammer head moves is made to correspond to the outer diameter of the hammer head, and the movement of the hammer head is the cover member Is preferably guided by.
- the hammerhead is conveniently made of cemented carbide.
- the present inventor has arranged a plurality of crushers having hammer heads that collide with the silicon masses, facing the silicon masses supported on the support base and mutually. It has been found that the second technical problem can be achieved by disposing them at intervals.
- a support base for supporting a substantially round bar-shaped rod-shaped polycrystalline silicon lump to be crushed, and the support base
- a plurality of crushers arranged opposite to each other and spaced apart from each other and supported by the rod-like polycrystalline silicon supported on the table, each of the crushers being supported on the support base
- a silicon lump crushing device characterized by having a hammer head that is made to collide with a silicon lump.
- the method includes a transfer table having a V-shaped cross-sectional shape and a receiving groove extending in a longitudinal direction formed on an upper surface, and the silicon mass is placed on the receiving groove of the transfer table, A transfer table is carried onto the support base.
- a movable support member is disposed on the support base, and a receiving groove having a V-shaped cross section and extending in the longitudinal direction is formed on the upper surface of the movable support member.
- Two transport tables are mounted in parallel, and the movable support member includes a first operation position in which one of the transport tables is positioned below the crusher and the other is displaced to one side with respect to the crusher.
- the other one of the transport bases is positioned below the crusher and the one is positioned with a second operation position that is displaced to the other side with respect to the crusher, and the movable support member is positioned at the first operation position.
- the silicon lump placed in the one receiving groove of the transport table is crushed by the crusher, and the silicon lump to be crushed is carried into the other of the transport table,
- the movable support member is positioned at the second operating position, the other of the transport table
- the silicon lump placed in the receiving groove is crushed by the crusher, and the silicon lump to be crushed is carried into the one of the transport tables.
- the movable support member further includes a first discharge position displaced to the one side beyond the first operation position and a second position displaced to the other side beyond the second operation position.
- the transport table is mounted so as to be pivotable about a swivel axis extending in the longitudinal direction, and when the movable support member is positioned at the first discharge position, The other is swiveled over an angle of 90 degrees or more about the swiveling axis extending in the longitudinal direction, and the crushed silicon lump on the receiving groove is discharged downward, and the movable support member is moved to the second When positioned at the discharge position, the one of the carriages is swung over an angle of 90 degrees or more about the swivel axis extending in the longitudinal direction, and the crushed silicon lump on the receiving groove is moved downward. It is preferable to be discharged That.
- the crusher is mounted on a liftable support frame positioned at an action position and a non-action position raised from the action position, and extends upwardly surrounding the receiving groove on each of the transport stands.
- a cover wall is attached, and the support frame is attached with a cover wall that surrounds the crusher and extends downward.
- the movable support member is positioned at the first operation position, and the support frame is attached to the support frame.
- a closed space is defined by the cooperation of the one cover wall of the carrier and the cover wall of the support frame, and the movable support member is positioned at the second operating position.
- the closed space is preferably defined by the cooperation of the other cover wall of the transport table and the cover wall of the support frame.
- both side surfaces of the receiving groove form an angle of 110 to 130 degrees with each other.
- the crusher includes a first crusher positioned directly above the silicon lump supported on the support base and both sides of the first crusher as viewed in the outer peripheral surface direction of the silicon lump.
- the second and third crushers are preferably positioned at an angular interval of 30 to 80 degrees with respect to the first crusher.
- the hammer head of each of the first, second and third crushers is projected towards the central axis of the silicon mass and collided with the silicon mass.
- a plurality of crusher sets including the first, second, and third crushers are arranged at intervals in the longitudinal direction of the silicon lump supported on the support base. .
- the crusher of the present invention when the piston is forced from the first position to the second position by the action of compressed air, the hammer head connected to the piston via the rod member responds to the high-speed movement of the piston. It is made to move at high speed and collide with the silicon mass. Therefore, the energy applied to the piston is added to the silicon mass with high efficiency without being wasted. If the silicon lump to be crushed is automatically and sequentially fed to the crushing position, and the silicon lump crusher cylinder case is attached to the silicon lump fed to the crushing position, the silicon lump crusher Is not required to be manually positioned with respect to the silicon mass, and by simply operating the control valve means, the silicon mass can be crushed and the silicon mass can be crushed automatically.
- the silicon lump crushing operation can be automated to suppress the generation of powder as much as possible, although it can be manufactured at a relatively low cost. Can be broken into small pieces.
- sequence form of the crusher in the silicon lump crushing apparatus of FIG. The front view which shows the principal part of the silicon lump crushing apparatus of FIG. Sectional drawing which shows the crusher in the silicon lump breaking apparatus of FIG.
- FIG. 1 schematically shows a main part of a first embodiment of a silicon lump crushing device configured according to the present invention.
- the illustrated silicon lump breaking device includes a stationary support base 2 that is supported at a required position by appropriate support legs (not shown) and extends substantially horizontally.
- the support base 2 can be formed from a highly rigid material such as stainless steel.
- a support frame 4 is disposed above and opposite the support base 2.
- the support frame 4 is suspended by an appropriate suspension means (not shown) so as to be reciprocally movable in the longitudinal direction of the support base 2, that is, movable in the directions indicated by arrows 6a and 6b in FIG. It is reciprocated in the directions shown by arrows 6a and 6b by driving means (not shown) including a motor.
- the support frame 4 has a top plate 8 that extends substantially horizontally, and two pieces are provided on the bottom surface of the top plate 8 at intervals in the longitudinal direction.
- the support member 9 is fixed.
- a plurality of crushers are mounted on the support member 9.
- three crushers 12a, 12b and 12c (first crusher 12a, second crusher 12b and third crusher) constituting the first crusher set 10 on one support member 9 are shown.
- the crusher 12c) is mounted, and the other crusher 16a, 16b and 16c (first crusher 16a, second crusher 16b and A third crusher 16c) is mounted.
- the three crushers 12a, 12b, and 12c constituting the first crusher set 10 have substantially the same arrangement position in the longitudinal direction of the support base 2 (more specifically, the three crushers 12a, 12b And 12c, the longitudinal center axis of the hammerhead described later is located on a common plane perpendicular to the longitudinal center axis of the support base 2), and the crusher 12a is substantially perpendicular to the support base 2.
- the crushers 12b and 12c are respectively disposed at both sides of the crusher 12a at an angle ⁇ , and are respectively downward at an angle ⁇ with respect to the vertical line. It is inclined and extended inward.
- the angle ⁇ is preferably 30 to 80 degrees, in particular 55 to 65 degrees, in particular 60 degrees, and the longitudinal central axes of the hammerheads of the three crushers 12a, 12b and 12c which will be described later are also crushing. It is preferably extended towards the central axis of the silicon mass to be produced.
- the second crusher set 14 is disposed apart from the first crusher set 10 by a pitch P in the longitudinal direction of the support base 2. As in the case of the first crusher set 10, the crusher 16 a is supported.
- the crushers 16b and 16c extend substantially perpendicularly to the base 2 (and thus vertically), and are disposed at both sides of the crusher 16a at an angle ⁇ , and are perpendicular to the vertical line.
- Each of them extends at an angle ⁇ and inwardly inclined downward.
- two sets of crushers a first crusher set 10 and a second crusher set 14, are provided.
- an appropriate interval is provided in the longitudinal direction of the support base 2. 3 or more sets of crushers can be arranged.
- the configuration of the crushers 12a, 12b and 12c and 16a, 16b and 16c is substantially the same.
- the configuration of the crusher 12a will be described in detail with reference to FIG. 4.
- the crusher 12a includes a cylinder case 24 that can be formed from a suitable metal such as stainless steel.
- the cylinder case 24 includes a front end portion 26 having a square cross-sectional shape and a main portion 28 having a projecting portion protruding upward and having a vertically long cross-sectional shape.
- the cylinder case 24 is formed with a cavity opened on the front surface (right side surface in FIG. 4).
- the cavity having a circular cross-sectional shape has a rear end portion 34 having a slightly smaller diameter than the main portion 32 and a somewhat larger diameter than the main portion 32 in addition to the main portion 32 having a cylindrical shape extending in the axial direction.
- the intermediate step portion 36 and the front end portion 38 having a slightly larger diameter than the intermediate step portion 36.
- One end or rear end (left end in FIG. 4) of the cavity is closed by a rear end wall 40 of the cylinder case 24.
- a conical recess 42 is formed on the inner surface of the rear end wall 40.
- a closing member 44 is attached to the other end portion, that is, the front end portion (right end portion in FIG. 1) of the cavity, and the cavity is closed by the closing member 44.
- a cylinder bore 46 having one end defined by the rear end wall 40 and the other end defined by the closing member 44 is formed in the cylinder case 24.
- the blocking member 44 is formed with a through hole 48 extending in the central axis direction.
- the cross-sectional shape of the through hole 48 is circular.
- the closing member 44 includes a large-diameter front portion 49 having an outer diameter corresponding to the inner diameter of the hollow front end portion 38 formed in the cylinder case 24, and a main portion having an outer diameter corresponding to the inner diameter of the hollow intermediate step portion 36. 50 and a rear portion 52 having an outer diameter somewhat smaller than the inner diameter of the main portion 32 of the cavity.
- a male thread is formed on the outer peripheral surface of the front portion 49 of the closing member 44, and the male thread is screwed into a female thread formed on the inner peripheral surface defining the front end portion 38 of the cavity.
- the closing member 44 is fixed to the front portion of the cylinder case 24 by caulking.
- An annular groove is formed on the outer peripheral surface of the main portion 50 of the closing member 44, and a seal ring 54 that can be formed from synthetic rubber is accommodated in the annular groove.
- An annular groove is formed on the inner peripheral surface of the through hole 48 of the closing member 44, and a seal ring 56 that can be formed of synthetic rubber is accommodated in the annular groove.
- a piston 58 is accommodated so as to be slidable between a first position indicated by a solid line and a second position indicated by a two-dot chain line.
- a through-hole 60 extending in the direction of the central axis is formed in the piston 58 that can be formed of an appropriate metal such as hard anodized or stainless steel.
- the cross-sectional shape of the through hole 60 is circular, and the piston 58 is generally cylindrical.
- the annular protrusion 62 formed on the front surface (right side surface in FIG. 4) of the piston 58 is brought into contact with the rear surface of the closing member 44.
- the outer diameter of the piston 58 corresponds to the inner diameter of the cylinder bore 46 (that is, the inner diameter of the main portion 32 of the cavity).
- An annular groove is formed on the outer peripheral surface of the piston 58, and a seal ring 64 that can be formed of synthetic rubber is accommodated in the annular groove.
- a rod member 66 is fixed to the piston 58.
- the rod member 66 which can be formed from a suitable metal such as stainless steel, is in the form of a round bar and has a main portion 68 and a rear portion 70 having a relatively small diameter.
- the outer diameter of the rear portion 70 is made to correspond to the inner diameter of the through hole 60 formed in the piston 58.
- the rod member 66 is fixed to the piston 58 by inserting the rear portion 70 of the rod member 66 into the through hole 60 and screwing the fastening nut 72 into the protruding portion protruding backward from the through hole 60.
- a main portion 68 of the rod member 66 extends forward (rightward in FIG. 1) from the piston 58 and is inserted through a through hole 48 formed in the closing member 44.
- the outer diameter of the main portion 68 is made to correspond to the outer diameter of the through hole 48, and the two are sealed by a seal ring 56.
- a hammer head 74 is fixed to the protruding end of the rod member 66 that protrudes beyond the closing member 44.
- the hammer head 74 has a cylindrical shape, and a female screw hole is formed at the rear end thereof.
- a male screw is formed at the protruding end portion of the rod member 66, and the hammer head 74 is fixed to the protruding end portion of the rod member 66 by screwing the male screw into the female screw hole of the hammer head 74.
- the hammer head 74 is advantageously formed from a cemented carbide having a Rockwell A hardness (HRA) of 80 or more, such as a cemented carbide based on tungsten carbide and cobalt.
- HRA Rockwell A hardness
- an elastic biasing means 76 that elastically biases the piston 58 to a first position indicated by a solid line is disposed.
- the elastic biasing means 76 is constituted by a compression coil spring, and its front end portion is fitted on the rear portion of the closing member 44 and its rear end portion is formed on the front surface of the piston 58. It is fitted on the strip 62.
- Two communication holes 78 and 80 extending from the cylinder bore 46 to the upper surface are formed on the upper wall of the main portion 28 of the cylinder case 24.
- the communication hole 78 is located at a position corresponding to the rear end of the cylinder bore 46, that is, behind the piston 58 located at the first position.
- the communication hole 78 is connected to a compressed air source 82 by appropriate communication means (not shown) such as a flexible hose (this compressed air source 82 includes six crushers 12a, 12b and 12c, and 16a, 16b and 16c can be arranged separately, but it is convenient to arrange a common compressed air source 82).
- the communication means is provided with a control valve means 84 that is selectively set to an operation state in which the communication hole 78 is communicated with the compressed air source 82 and an inoperative state in which the communication hole 78 is opened to the atmosphere.
- the communication hole 80 is located at a position corresponding to the front end of the cylinder bore 46, that is, behind the closing member 44, and defines a release path that directly releases the cylinder bore 46 to the atmosphere.
- the outer surface of the cylinder case 24 is preferably covered with a synthetic resin cover member such as nylon.
- a cover member 90 provided on the upper surface and a cover member 92 provided on the shoulder surface existing at the boundary between the main portion 28 and the front end portion 26 of the cylinder case 24 are illustrated, the main portion 26 of the cylinder case 24 and Cover members (not shown) are also provided on both side surfaces of the front end portion 28.
- cover member 90 applied to the upper surface of front end portion 28 of cylinder case 24, cover member 88 applied to the lower surface of main portion 26 and front end portion 28 of cylinder case 24, and cover members applied to both side surfaces of cylinder case 24 (Not shown) is preferably extended beyond the front end (right end in FIG. 4) of the cylinder case 24.
- the front end of the hammer head 74 is preferably retracted rearward from the front ends of the cover members 90 and 88 and two cover members not shown. .
- the portions of the cover members 90 and 88 and the two cover members (not shown) that extend forward beyond the front end of the cylinder case 24 increase in thickness by bulging inward in the radial direction.
- the guide hole 98 having an inner diameter corresponding to the outer diameter of the hammer head 74 and having a circular cross-sectional shape is preferably defined.
- the control valve means 84 set to the non-operating state is switched to the operating state for a predetermined time (for example, 2 seconds) by appropriate manual or automatic control means (not shown). It is done.
- the compressed air source 82 is communicated with the rear end portion of the cylinder bore 46 for a predetermined time through communication means (not shown), and the compressed air is caused to flow into the rear end portion of the cylinder bore 46.
- the piston 58 is moved to the second position against the elastic bias of the elastic biasing means 76 by the action of the compressed air, and the hammer head 74 is protruded beyond the front ends of the cover members 90 and 88 and the like.
- the compressed air supplied to the cylinder bore 46 preferably has a pressure of about 0.5 to 1.0 MPa, and the hammer head 74 collides with the silicon mass at a speed of 5 to 35 m / sec, particularly 10 to 20 m / sec. It is preferred that When the piston 58 is moved from the first position to the second position, the air existing in the front portion of the cylinder bore 46 from the piston 58 is released to the atmosphere through the communication hole 80 that forms an open path. .
- control valve means 84 when the control valve means 84 is returned to the non-operating state after a predetermined time which may be about 2 seconds, the rear end side of the cylinder bore 46 is also communicated with the atmosphere via the communication hole 78 and the communication means (not shown). .
- the piston 58 is returned to the first position by the elastic biasing action of the elastic biasing means 76, and the hammer head 74 is retracted into the cover members 90 and 88 and the like.
- a separately formed transport table 100 is used. It is important that the transport table 100 is made of a material that has sufficient strength but does not contaminate the silicon mass placed thereon, such as nylon.
- a receiving groove 102 having a V-shaped cross-sectional shape and extending in the longitudinal direction over the entire length of the transport table 100 is formed on the upper surface of the transport table 100 that is elongated. Both side surfaces of the receiving groove 102 form an angle ⁇ which is preferably 110 to 130 degrees, in particular 120 degrees.
- the back surface of the carrier 100 may be a flat surface.
- the polycrystalline silicon mass 104 produced by the Siemens method has a substantially round bar shape.
- Such a silicon mass 104 is placed on the receiving groove 102 so as to extend along the receiving groove 102 of the transport table 100.
- the silicon lump 104 is placed on a predetermined position on the support base 2 (more specifically, the silicon lump 104
- the longitudinal center axis line is positioned at a position that coincides with the center axis line of the hammer head 74 of the crushers 12a and 16a.
- the control valve means 84 of each of the six crushers 12a, 12b, and 12c and 16a, 16b, and 16c are put into an operating state.
- the hammer heads 74 of the crushers 12a, 12b and 12c and 16a, 16b and 16c are projected and collided with the silicon mass 104 placed on the transport table 100, thereby crushing the silicon mass 104. Is done.
- the crushing means 12a, 12b and 12c and 16a, 16b and 16c are fixed.
- the support frame 4 is appropriately moved in the direction shown by the arrow 6a or 6b in FIG.
- the crushers 12a, 12b and 12c and the 16a, 16b and 16c are positioned at the portions where the silicon lump 104 has not yet been crushed. Later, the crushers 12a, 12b and 12c and 16a, 16b and 16c are put into operation again. If necessary, the movement of the support frame 4 and the operation of the crushing means 12a, 12b and 12c and 16a, 16b and 16c can be repeatedly performed a plurality of times.
- the crushers 12a, 12b and 12c and 16a, 16b and 16c instead of operating all of the crushers 12a, 12b and 12c and 16a, 16b and 16c, for example, only two crushers 12a and 16a are selectively operated, or four crushers 12b and 12c and Only 16b and 16c can be selectively activated.
- the size of the silicon piece obtained by crushing is changed by selecting which of the six crushers 12a, 12b and 12c and 16a, 16b and 16c is to be operated. can do.
- the number of crushers to be operated increases, the average size of the obtained silicon pieces decreases, and when the number of crushers to be operated decreases, the average size of the obtained silicon pieces tends to increase.
- the silicon pieces that are crushed and scattered beyond the support base 2 can be collected in a collection case (not shown) disposed below the support base 2. Silicon pieces scattered over the transport table 100 and falling on the support base 2 can be dropped into the collection case by an appropriate collection means such as a rubbing blade. The silicon pieces remaining on the transfer table 100 are unloaded from the support base 2 together with the transfer table 100 and can be collected in an appropriate collection case (not shown).
- the stationary support base 202 is composed of a pair of support beam members 204 extending in the width direction at intervals in the longitudinal direction (direction perpendicular to the paper surface in FIG. 6).
- Each of the support beam members 204 supported in a required position by appropriate support legs (not shown) has a top surface 206 extending substantially horizontally and both side surfaces 208 extending in a substantially arc shape.
- a movable support member 210 extending in the longitudinal direction is mounted on the pair of support beam members 204 so as to be slidable in the width direction.
- An auxiliary support member 212 extending on both sides in the width direction beyond both side surfaces of the movable support member 210 (only one auxiliary support member 212 is shown in FIG. 5 and FIG. Is shown) is fixed.
- two transport stands 214a and 214b are mounted on the auxiliary support member 212. More specifically, a connecting portion (not shown) that protrudes downward is formed at both ends of the lower surface of each of the transport stands 214a and 214b, and a through hole is formed in the connecting portion.
- pivot pins 218a and 218b are fixed to the auxiliary support member 212.
- the carriages 214a and 214b are rotatably mounted on the auxiliary support member 212.
- the lower surfaces of the transport stands 214 a and 214 b are in contact with the upper surface 206 of the support beam member 204.
- One transport base 214 a is disposed adjacent to one side (right side in FIG. 6) of the movable support member 210 and extends in the longitudinal direction along the movable support member 210.
- the other carrier 214b is disposed adjacent to the other side (left side in FIG. 6) of the movable support member 210 and extends in the longitudinal direction along the movable support member 210.
- Each of the carriages 214a and 214b which can be formed from a suitable material such as nylon that does not contaminate the silicon mass, has receiving portions 220a and 220b in the central region thereof, and the upper surfaces of the receiving portions 220a and 220b. Are formed with V-shaped receiving grooves 222a and 222b extending in the longitudinal direction. Further, cover plates 214a and 214b are formed with cover walls surrounding the receiving portions 220a and 220b at a slight distance from the receiving portions 220a and 220b.
- Such cover walls are upright four side walls, ie, both side walls 224a and 224b, and front and rear walls 2226a and 226b (both side walls 224a and 224b and front walls 226a and 226b are shown in FIG. 5, but the rear wall is not shown). It is composed of
- a connecting portion 228 that hangs downward from the front end and the rear end of the movable support member 210 (only a connecting portion that hangs downward from the front end is shown in FIG. 5). Is attached.
- a female screw hole penetrating in the width direction (left-right direction in FIG. 6) is formed in the connecting portion 228 depending from the front end of the movable support member 210.
- a guide hole penetrating in the width direction is formed in the connecting portion depending from the rear end of the movable support member 210.
- a pair of bearing members 230 are supported by appropriate support legs (not shown) at an interval in the width direction below the front end of the movable support member 210.
- a male screw member 232 is rotatably mounted on the pair of bearing members 230.
- the male screw member 232 is screwed into the through screw hole formed in the connecting portion 228.
- An electric motor (not shown) is incorporated in one of the pair of bearing members 230, and the electric motor is drivingly connected to the male screw member 232.
- a pair of support members 234 (only one of which is shown in FIG. 5) is also supported by appropriate support legs (not shown) below the rear end of the movable support member 210 in the width direction.
- the guide rod 236 is fixed between the pair of support members 234. The guide rod 236 is inserted through the guide hole formed in the connecting portion.
- Guide chutes 238a and 238b are disposed on both sides of the pair of support beam members 204.
- the guide chutes 238 a and 238 b are disposed on the outer side in the width direction than the pair of support beam members 204 and below the pair of support beam members 204.
- Roller conveyors 240a and 240b extending in the longitudinal direction are disposed below the guide chutes 238a and 238b.
- the roller conveyors 240a and 240b convey a box-shaped container 242 whose upper surface is open.
- a top plate 244 is arranged to be movable up and down above the center region in the width direction of the pair of support beam members 204.
- Appropriate lifting and lowering means (not shown) is attached to the top plate 244, and the top plate 244 is shown in FIG. 5 and FIG. 6 by a solid line and a double-dot chain line in FIG. It is selectively positioned at the actuated position (upward position).
- a plurality of support members 246 are fixed to the lower surface of the top plate 244 at intervals in the longitudinal direction, and in the illustrated case, six support members 246 are fixed, and a crusher set 248 is attached to each of the support members 246.
- Each of the crushing groups 248 includes three crushers 250a, 250b and 250c (a first crusher 250a and a second crusher 250b, as in the case of the first embodiment illustrated in FIGS. And a third crusher 250c) are mounted (thus, 18 crushers are equipped in the second embodiment shown in FIGS. 5 and 6).
- the three crushers 250a, 250b, and 250b may be the same as the three crushers 12a, 12b, and 12c (or 16a, 16b, and 16b) in the first embodiment illustrated in FIGS.
- the top plate 244 is further provided with a cover wall that surrounds the crushers 250a, 250b, and 250c.
- the cover wall is composed of both side walls 252 and both end walls 254 depending downward. As clearly understood by referring to FIG.
- the rectangular cross-sectional shape defined by the lower end portions of both side walls 252 and both end walls 254 (FIG. 5) constituting the cover wall is the same as the cover walls of the transport bases 214a and 214b.
- the side walls 224a and 224b and the both side walls 226a and 226b are set to be slightly smaller than the rectangular cross-sectional shape defined by the two side walls 224a and 224b.
- the lower ends of the 252 and the both end walls 254 enter inside the both side walls 224a (or 224b) and the both end walls 226a (or 226b) constituting the cover wall, and a closed space is defined by the both cover walls.
- the operation of the silicon lump crusher as described above will be described in summary as follows.
- the movable support member 210 When the movable support member 210 is positioned at the position indicated by the solid line in FIG. 5 and FIG. 6, that is, the first working position, one of the carriages 214a is positioned below the crushers 250a, 250b and 250c, The conveyance stand 214b is displaced to one side (left side in FIG. 6) with respect to the crushers 250a, 250b and 250c.
- a rod-shaped silicon lump 256 to be crushed in the previous carrying-in process is carried into the receiving groove 222a of the carrying table 214a.
- the length of the rod-shaped silicon lump 256 may correspond to the area where the 18 crushers 250a, 250b and 250c attached to the top plate 244 are present.
- the top plate 244 and the crushers 250a, 250b, and 250c attached to the top plate 244 are positioned at the operation positions indicated by solid lines in FIG. In such a state, for example, all of the 18 crushers 250a, 250b and 250c are operated, and the hammer heads of the crushers 250a, 250b and 250c (see FIG. 4) are moved to the silicon lump 256 accommodated in the transport table 214a. ) Are collided and the silicon mass 256 is crushed.
- the top plate 244 and the crushers 250a, 250b and 250c attached to the top plate 244 are raised to the actuated position indicated by the two-dot chain line in FIG.
- the movable support member 210 moves to the other side, that is, to the right side in FIG. 6, to a second discharge position indicated by a two-dot chain line 210-B in FIG. 6 (over a second operation position 210-A described later).
- the transfer table 214a is moved beyond the upper surfaces of the pair of support beam members 204, and as shown by a two-dot chain line in FIG. 6, the timepiece in FIG.
- the crushed silicon lump on the transport table 214a is discharged downward and accommodated in the container 242 through the guide chute 238a.
- the container 242 containing the crushed silicon lump is conveyed to a required place by the roller conveyor 240a, and the next empty container 242 is carried below the guide chute 238a.
- the movable support member 210 is moved to one side, that is, the left side in FIG. 6, and is positioned at the second operation position indicated by a two-dot chain line 210-A.
- one transport table 214a is displaced and positioned on the other side (right side in FIG. 6) with respect to the crushers 250a, 250b and 250c, and the other transport table 214b is positioned on the crushers 250a, 250b and 250c. It is positioned below.
- the top plate 244 and the crushers 250a, 250b and 250c attached to the top plate 244 are lowered to the operation position indicated by the solid line in FIG.
- the top plate 244 and the crushers 250a, 250b and 250c attached to the top plate 244 are raised to the actuated position indicated by the two-dot chain line in FIG.
- the movable support member 210 is moved to one side, that is, the left side in FIG. 6 to the first discharge position indicated by a two-dot chain line 210-C in FIG. 6 beyond the first operation position.
- the transfer table 214b is moved beyond the upper surfaces of the pair of support beam members 204, and is opposite to the angle in FIG. 6 over an angle of 90 degrees or more, for example, about 110 degrees, as shown by a two-dot chain line in FIG.
- the movable support member 210 is moved to the other side, that is, the right side in FIG. 6, and is positioned at the first operation position indicated by the solid line.
- one transport table 214a is positioned below the crushers 250a, 250b and 250c, and the other transport table 214b is displaced to one side (left side in FIG. 6) with respect to the crushers 250a, 250b and 250c. Be positioned.
- the top plate 244 and the crushers 250a, 250b and 250c attached to the top plate 244 are lowered to the operation position indicated by the solid line in FIG. Thereafter, the operation as described above is repeated.
- the silicon lump was crushed using the silicon lump crusher as shown in FIGS.
- the silicon lump was polycrystalline silicon having a substantially round bar shape, the average diameter was 120 mm, and the length was 800 mm.
- the gap between the peripheral surface of the silicon lump carried into the support base and the tips of the cover members of the six crushing means while being placed on the receiving groove of the carrier was approximately 20 mm.
- the pitch P between the first crusher group and the second crusher group was 80 mm.
- the first crusher is arranged vertically, and the second and third crushers are spaced at an angular interval of 60 degrees on both sides of the first crusher. And extended at an incline of 60 degrees downward.
- the separation length between the peripheral surface of the silicon lump carried into the support base in the state of being placed on the receiving groove of the conveyance table and the tip of the hammer head in the six crushers was 50 mm.
- the hammer head in each of the crushers was made of a cemented carbide mainly composed of tungsten carbide and cobalt, and had a diameter of 30 mm and a length of 50 mm.
- Compressed air of 0.9 MPa was supplied to operate all six crushers to crush the silicon mass.
- the support frame is moved every 90 mm in the longitudinal direction of the support base and the silicon lump is crushed 8 times.
- the crushed silicon piece has a maximum dimension D of D ⁇ 120 mm, and 120 mm> D ⁇ 10 mm.
- the results were classified into those having 10 mm> D, and the respective yields (weights) were determined.
- Support base 4 Support frame 10: First crushing means group 12a: Crusher (first crusher) 12b: Crusher (second crusher) 12c: Crusher (third crusher) 14: Second crusher set 16a: Crusher (first crusher) 16b: Crusher (second crusher) 16c: Crusher (third crusher) 24: Cylinder case 44: Closing member 46: Cylinder bore 58: Piston 66: Rod member 74: Hammer head 76: Elastic biasing means 82: Compressed air source 84: Control valve means 100: Movable conveying table 102: Receiving groove 104: Silicon lump 202: Support base 210: Movable support member 214a: Transport base 214b: Transport base 222a: Receiving groove 222b: Receiving groove 248: Crusher set 250a: Crusher (first crusher) 250b: Crusher (second crusher) 250c: Crusher (third crusher) 256: Silicon mass
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Abstract
Description
図1乃至図4に図示するとおりのシリコン塊破砕装置を使用して、シリコン塊を破砕した。シリコン塊は略丸棒形状の多結晶シリコンであり、その平均直径は120mmで、長さは800mmであった。搬送台の受け溝上に載置された状態で支持基台に搬入されたシリコン塊の周表面と6個の破砕手段のカバー部材先端との間隙は略20mmであった。第一の破砕機組と第二の破砕機組とのピッチPは80mmであった。第一の破砕機組及び第二の破砕機組の各々において、第一の破砕機は鉛直に配置され、第二及び第三の破砕機は第一の破砕機の両側に60度の角度間隔をおいて配置されて下方に向かって内側に60度傾斜して延在した。搬送台の受け溝上に載置された状態で支持基台に搬入されたシリコン塊の周表面と6個の破砕機におけるハンマーヘッド先端との間の離間長さは50mmであった。破砕機の各々におけるハンマーヘッドはタングステンカーバイドとコバルトとを主成分とする超硬合金から形成され、その直径は30mmで長さは50mmであった。
第一の破砕機組及び第二の破砕機組の双方において、中央に位置する第一の破砕機は作動せしめることなく第二に破砕機及び第三の破砕機のみを作動せしめたことを除いて、実験例1と同様な実験を遂行して、同様な収率を求めたところ下記表1のとおりであった。
第一の破砕機組及び第二の破砕機組の双方において、第二の破砕機及び第三の破砕機は作動せしめることなく中央に位置する第一の破砕機のみを作動せしめたことを除いて、実験例1と同様な実験を遂行して、同様な収率を求めたところ下記表1のとおりであった。
4:支持枠
10:第一の破砕手段組
12a:破砕機(第一の破砕機)
12b:破砕機(第二の破砕機)
12c:破砕機(第三の破砕機)
14:第二の破砕機組
16a:破砕機(第一の破砕機)
16b:破砕機(第二の破砕機)
16c:破砕機(第三の破砕機)
24:シリンダケース
44:閉塞部材
46:シリンダボア
58:ピストン
66:ロッド部材
74:ハンマーヘッド
76:弾性偏倚手段
82:圧縮空気源
84:制御弁手段
100:可動搬送台
102:受け溝
104:シリコン塊
202:支持基台
210:可動支持部材
214a:搬送台
214b:搬送台
222a:受け溝
222b:受け溝
248:破砕機組
250a:破砕機(第一の破砕機)
250b:破砕機(第二の破砕機)
250c:破砕機(第三の破砕機)
256:シリコン塊
Claims (20)
- シリンダボア空間を規定するためのシリンダケースと、該シリンダボアの片端側である第一の位置と該シリンダボアの他端側である第二の位置との間を滑動自在に該シリンダボア内に収容されたピストンと、該シリンダケース内に固定され該シリンダボアの他端を規定する閉塞部材と、該シリンダボアの該他端側を大気に開放する開放路と、該ピストンを該第一の位置に弾性的に偏倚する弾性偏倚手段と、該ピストンから該シリンダボアの該他端側に延出し該閉塞部材を貫通して該シリンダボアから突出するロッド部材と、該ロッド部材の突出端部に固定されたハンマーヘッドと、圧縮空気源と、該シリンダボアの該片端側と該圧縮空気源との間に配設された連通手段と、該連通手段に配設され該シリンダボアを該圧縮空気源に連通せしめる作動状態と該シリンダボアの該片端側を大気に開放する非作動状態とに選択的に設定される制御弁手段とを具備し、該制御弁手段が該非作用状態に設定されているときには、該弾性偏倚手段の弾性偏倚作用によって該ピストンは該第一の位置に弾性的に偏倚せしめられており、該制御弁手段が該作用状態に設定されると、該圧縮空気源から該シリンダボアの該片端側に供給される圧縮空気によって該ピストンが該弾性偏倚手段の弾性偏倚作用に抗して該第二の位置に強制される、ことを特徴とするシリコン塊を破砕するための破砕機。
- 該シリンダケースは金属製であり、該シリンダケースの外側面は合成樹脂製カバー部材によって覆われている、請求項1記載の破砕機。
- 該カバー部材は該シリンダケースの前端を越えて延在せしめられており、該ピストンが該第一の位置に弾性的に偏倚されているときには、該ハンマーヘッドは該カバー部材の前端よりも内側に位置しているが、該ピストンが該第二の位置に強制されると該ハンマーヘッドは該カバー部材の該前端を越えて突出する、請求項2記載の破砕機。
- 該ハンマーヘッドは円筒形外周面を有し、該カバー部材の、該ハンマーヘッドが移動する部位の内径は、該ハンマーヘッドの外径に対応せしめられていて、該ハンマーヘッドの移動が該カバー部材によって案内される、請求項3記載の破砕機。
- 該ハンマーヘッドは超硬合金製である、請求項1から4までのいずれかに記載の破砕機。
- 破砕すべき略丸棒形状の棒状多結晶シリコン塊を支持するための支持基台と、該支持基台上に支持される棒状多結晶シリコンに対向して且つ相互に間隔をおいて配設された複数個の破砕機とを具備し、該破砕機の各々は該支持基台上に支持されているシリコン塊に衝突せしめられるハンマーヘッドを有する、ことを特徴とするシリコン塊破砕装置。
- V字断面形状を有し且つ長手方向に延在する受け溝が上面に形成されている搬送台を含み、シリコン塊は該搬送台の該受け溝上に載置され、該搬送台が該支持基台上に搬入される、請求項6記載のシリコン塊破砕装置。
- 該支持基台上には可動支持部材が配設されており、該可動支持部材上にはV字断面形状を有し且つ長手方向に延在する受け溝が上面に形成されている搬送台が2個並列に装着されており、該可動支持部材は該搬送台の一方が該破砕機の下方に位置し他方が該破砕機に対して片側に変位する第一の作用位置と該搬送台の該他方が該破砕機の下方に位置し該一方が該破砕機に対して他側に変位する第二の作用位置との位置せしめられ、該可動支持部材が該第一の作用位置に位置せしめられている時に、該搬送台の該一方の該受け溝に載置されているシリコン塊が該破砕機によって破砕され、該搬送台の該他方に破砕すべきシリコン塊が搬入され、該可動支持部材が該第二の作用位置に位置せしめられている時に、該搬送台の該他方の該受け溝に載置されているシリコン塊が該破砕機によって破砕され、該搬送台の該一方に破砕すべきシリコン塊が搬入される、請求項6記載のシリコン塊破砕装置。
- 該可動支持持部材は、更に、該第一の作用位置を越えて更に該片側に変位せしめられた第一の排出位置と該第二の作用位置を越えて該他側に変位せしめられた第二の排出位置に位置せしめられ、該搬送台は長手方向に延びる旋回軸線を中心として旋回自在に装着されており、該可動支持部材が該第一の排出位置に位置せしめられると、該搬送台の該他方はその長手方向に延びる旋回軸線を中心として90度以上の角度に渡って旋回せしめられて、その受け溝上の破砕されたシリコン塊が下方に排出され、該可動支持部材が該第二の排出位置に位置せしめられると、該搬送台の該一方はその長手方向に延びる旋回軸線を中心として90度以上の角度に渡って旋回せしめられて、その受け溝上の破砕されたシリコン塊が下方に排出される、請求項8記載のシリコン塊破砕装置。
- 該破砕機は作用位置と該作用位置から上昇せしめられた非作用位置とに位置付けられる昇降自在な支持枠に装着されており、該搬送台の各々には該受け溝を囲繞して上方に延びるカバー壁が付設されており、該支持枠には該破砕機を囲繞して下方に延びるカバー壁が付設されており、該可動支持部材が該第一の作用位置に位置付けられ該支持枠が該作用位置に下降せしめられると、該搬送台の該一方の該カバー壁と該支持枠の該カバー壁との協働によって閉空間が規定され、該可動支持部材が該第二の作用位置に位置付けられ該支持枠が該作用位置に下降せしめられると、該搬送台の該他方の該カバー壁と該支持枠の該カバー壁との協働によって閉空間が規定される、請求項8又は9記載のシリコン塊破砕装置。
- 該受け溝の両側面は相互に110乃至130度の角度をなす、請求項7から10のいずれかに記載のシリコン塊破砕装置。
- 該破砕機は、該支持基台上に支持されたシリコン塊の真上に位置する第一の破砕機、シリコン塊の外周面方向に見て該第一の破砕機の両側に夫々等角度間隔をおいて位置する第二及び第三の破砕機を含む、請求項1から11までのいずれかに記載のシリコン塊破砕装置。
- 該第二及び第三の破砕機は該第一の破砕機に対して夫々30乃至80度の角度間隔をおいて位置する、請求項12記載のシリコン塊破砕装置。
- 該第一、第二及び第三の破砕機の各々の該ハンマーヘッドは、シリコン塊の中心軸線に向けて突出せしめられてシリコン塊に衝突せしめられる、請求項13記載のシリコン塊破砕装置。
- 該第一、第二、及び第三の破砕機からなる破砕機組が、該支持基台上に支持されたシリコン塊の長手方向に間隔をおいて複数個配設されている、請求項12から14までのいずれかに記載のシリコン塊破砕装置。
- 該破砕機の各々は、シリンダボア空間を規定するためのシリンダケースと、該シリンダボアの片端側である第一の位置と該シリンダボアの他端側である第二の位置との間を滑動自在に該シリンダボア内に収容されたピストンと、該シリンダケース内に固定され該シリンダボアの他端を規定する閉塞部材と、該シリンダボアの該他端側を大気に開放する開放路と、該ピストンを該第一の位置に弾性的に偏倚する弾性偏倚手段と、該ピストンから該シリンダボアの該他端側に延出し該閉塞部材を貫通して該シリンダボアから突出するロッド部材と、該ロッド部材の突出端部に固定されたハンマーヘッドと、圧縮空気源と、該シリンダボアの該片端側と該圧縮空気源との間に配設された連通手段と、該連通手段に配設され該シリンダボアを該圧縮空気源に連通せしめる作動状態と該シリンダボアの該片端側を大気に開放する非作動状態とに選択的に設定される制御弁手段とを具備し、該制御弁手段が該非作用状態に設定されているときには、該弾性偏倚手段の弾性偏倚作用によって該ピストンは該第一の位置に弾性的に偏倚せしめられており、該制御弁手段が該作用状態に設定されると、該圧縮空気源から該シリンダボアの該片端側に供給される圧縮空気によって該ピストンが該弾性偏倚手段の弾性偏倚作用に抗して該第二の位置に強制される、請求項6から15までのいずれかに記載のリシコン破砕装置。
- 該シリンダケースは金属製であり、該シリンダケースの外側面は合成樹脂製カバー部材によって覆われている、請求項16記載のシリコン破砕装置。
- 該カバー部材は該シリンダケースの前端を越えて延在せしめられており、該ピストンが該第一の位置に弾性的に偏倚されているときには、該ハンマーヘッドは該カバー部材の前端よりも内側に位置しているが、該ピストンが該第二の位置に強制されると該ハンマーヘッドは該カバー部材の該前端を越えて突出する、請求項17記載のシリコン破砕装置。
- 該ハンマーヘッドは円筒形外周面を有し、該カバー部材の、該ハンマーヘッドが移動する部位の内径は、該ハンマーヘッドの外径に対応せしめられていて、該ハンマーヘッドの移動が該カバー部材によって案内される、請求項18記載のリシコン破砕装置。
- 該ハンマーヘッドは超硬合金製である、請求項16から19までのいずれかに記載のシリコン破砕装置。
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JP2010523858A JP5627461B2 (ja) | 2008-08-06 | 2009-08-04 | シリコン塊を破砕するための破砕機及びかかる破砕機を複数個備えたシリコン破砕装置 |
EP09804962.0A EP2308598B1 (en) | 2008-08-06 | 2009-08-04 | Silicon crushing apparatus having a plurality of crushers |
US12/992,059 US8418946B2 (en) | 2008-08-06 | 2009-08-04 | Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers |
CA2726715A CA2726715A1 (en) | 2008-08-06 | 2009-08-04 | Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers |
US13/837,144 US20130200190A1 (en) | 2008-08-06 | 2013-03-15 | Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers |
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US13/837,144 Division US20130200190A1 (en) | 2008-08-06 | 2013-03-15 | Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers |
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EP (1) | EP2308598B1 (ja) |
JP (1) | JP5627461B2 (ja) |
KR (1) | KR101614972B1 (ja) |
CA (1) | CA2726715A1 (ja) |
MY (1) | MY160034A (ja) |
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Cited By (4)
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WO2013046270A1 (ja) * | 2011-09-29 | 2013-04-04 | 株式会社テオス | 原料シリコン破砕装置 |
CN107790211A (zh) * | 2017-11-27 | 2018-03-13 | 亦臻包装科技(苏州)有限公司 | 一种化妆品生产用研磨装置 |
JP2022508581A (ja) * | 2018-10-08 | 2022-01-19 | ワッカー ケミー アクチエンゲゼルシャフト | 空気圧式チッピングハンマー |
JP7427516B2 (ja) | 2020-04-27 | 2024-02-05 | 高純度シリコン株式会社 | 多結晶シリコン製造用シードの製造方法 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6094388U (ja) * | 1983-11-30 | 1985-06-27 | 三菱電機株式会社 | レ−ザ−加工装置 |
JPH02152554A (ja) | 1988-12-02 | 1990-06-12 | Koujiyundo Silicon Kk | 多結晶シリコンの破砕装置 |
JPH0523977A (ja) * | 1991-07-16 | 1993-02-02 | Oorueyaa Kk | ハンマ装置 |
JPH05104457A (ja) * | 1991-10-14 | 1993-04-27 | Mitsubishi Electric Corp | 打撃ハンマー装置 |
JP2007253254A (ja) * | 2006-03-22 | 2007-10-04 | Toshiba Ceramics Co Ltd | シリコン単結晶の円筒研削方法 |
WO2008047850A1 (fr) | 2006-10-16 | 2008-04-24 | Tokuyama Corporation | Outil de broyeur de blocs de silicium |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB312595A (en) * | 1928-02-28 | 1929-05-28 | Ernesto Curti | Improvements in or in connection with pneumatically operated percussive tools |
US3428231A (en) * | 1967-04-12 | 1969-02-18 | Beatrice Foods Co | Separation of frozen hog skins |
US3567089A (en) * | 1968-09-12 | 1971-03-02 | Foundry Suppliers Inc | Engine block breaking apparatus |
US3670971A (en) * | 1970-12-17 | 1972-06-20 | Ardal Og Sunndal Verk | Crushing machine for coarse crushing of brittle materials |
US3802629A (en) * | 1971-12-30 | 1974-04-09 | Mobil Auto Crushers Corp | Engine block scrap processor |
US3841569A (en) * | 1972-11-20 | 1974-10-15 | Kartridg Pak Co | Separating meat from bones |
AU536689B2 (en) * | 1981-11-24 | 1984-05-17 | John Bennetto | Rock breaking apparatus |
JPH08109013A (ja) * | 1994-10-12 | 1996-04-30 | Tokuyama Corp | シリコン種の製造方法 |
CA2402506A1 (en) * | 1999-03-10 | 2000-09-14 | Cameron M.L. Clokie | Oral craniofacial bone mill |
US6598815B2 (en) * | 2001-12-07 | 2003-07-29 | Yung-Tsung Hsieh | Breaker of reinforced glass |
US7431230B2 (en) * | 2005-03-16 | 2008-10-07 | Medtronic Ps Medical, Inc. | Apparatus and method for bone morselization for surgical grafting |
DE102005019873B4 (de) * | 2005-04-28 | 2017-05-18 | Wacker Chemie Ag | Vorrichtung und Verfahren zum maschinellen Zerkleinern von Halbleitermaterialien |
MY160034A (en) * | 2008-08-06 | 2017-02-15 | Tokuyama Corp | Crusher for crushing a silicon lump, and silicon lump crushing apparatus having a plurality of crushers |
-
2009
- 2009-08-04 MY MYPI2010006065A patent/MY160034A/en unknown
- 2009-08-04 WO PCT/JP2009/063793 patent/WO2010016479A1/ja active Application Filing
- 2009-08-04 RU RU2011108304/13A patent/RU2011108304A/ru not_active Application Discontinuation
- 2009-08-04 KR KR1020117002924A patent/KR101614972B1/ko active IP Right Grant
- 2009-08-04 CA CA2726715A patent/CA2726715A1/en not_active Abandoned
- 2009-08-04 EP EP09804962.0A patent/EP2308598B1/en active Active
- 2009-08-04 JP JP2010523858A patent/JP5627461B2/ja active Active
- 2009-08-04 US US12/992,059 patent/US8418946B2/en active Active
- 2009-08-05 TW TW098126343A patent/TWI465290B/zh active
-
2013
- 2013-03-15 US US13/837,144 patent/US20130200190A1/en not_active Abandoned
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6094388U (ja) * | 1983-11-30 | 1985-06-27 | 三菱電機株式会社 | レ−ザ−加工装置 |
JPH02152554A (ja) | 1988-12-02 | 1990-06-12 | Koujiyundo Silicon Kk | 多結晶シリコンの破砕装置 |
JPH0523977A (ja) * | 1991-07-16 | 1993-02-02 | Oorueyaa Kk | ハンマ装置 |
JPH05104457A (ja) * | 1991-10-14 | 1993-04-27 | Mitsubishi Electric Corp | 打撃ハンマー装置 |
JP2007253254A (ja) * | 2006-03-22 | 2007-10-04 | Toshiba Ceramics Co Ltd | シリコン単結晶の円筒研削方法 |
WO2008047850A1 (fr) | 2006-10-16 | 2008-04-24 | Tokuyama Corporation | Outil de broyeur de blocs de silicium |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013046270A1 (ja) * | 2011-09-29 | 2013-04-04 | 株式会社テオス | 原料シリコン破砕装置 |
CN107790211A (zh) * | 2017-11-27 | 2018-03-13 | 亦臻包装科技(苏州)有限公司 | 一种化妆品生产用研磨装置 |
JP2022508581A (ja) * | 2018-10-08 | 2022-01-19 | ワッカー ケミー アクチエンゲゼルシャフト | 空気圧式チッピングハンマー |
JP7259057B2 (ja) | 2018-10-08 | 2023-04-17 | ワッカー ケミー アクチエンゲゼルシャフト | 空気圧式チッピングハンマー |
US11992927B2 (en) | 2018-10-08 | 2024-05-28 | Wacker Chemie Ag | Pneumatic chipping hammer |
JP7427516B2 (ja) | 2020-04-27 | 2024-02-05 | 高純度シリコン株式会社 | 多結晶シリコン製造用シードの製造方法 |
Also Published As
Publication number | Publication date |
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JP5627461B2 (ja) | 2014-11-19 |
RU2011108304A (ru) | 2012-09-20 |
US20130200190A1 (en) | 2013-08-08 |
US8418946B2 (en) | 2013-04-16 |
US20110068206A1 (en) | 2011-03-24 |
TWI465290B (zh) | 2014-12-21 |
EP2308598A1 (en) | 2011-04-13 |
JPWO2010016479A1 (ja) | 2012-01-26 |
KR101614972B1 (ko) | 2016-04-22 |
CA2726715A1 (en) | 2010-02-11 |
KR20110052606A (ko) | 2011-05-18 |
TW201008648A (en) | 2010-03-01 |
EP2308598B1 (en) | 2018-09-26 |
MY160034A (en) | 2017-02-15 |
EP2308598A4 (en) | 2017-11-22 |
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