WO2009147813A1 - モータ制御装置 - Google Patents
モータ制御装置 Download PDFInfo
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- WO2009147813A1 WO2009147813A1 PCT/JP2009/002411 JP2009002411W WO2009147813A1 WO 2009147813 A1 WO2009147813 A1 WO 2009147813A1 JP 2009002411 W JP2009002411 W JP 2009002411W WO 2009147813 A1 WO2009147813 A1 WO 2009147813A1
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- notch
- frequency
- filter
- vibration
- vibration extraction
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P29/00—Arrangements for regulating or controlling electric motors, appropriate for both AC and DC motors
- H02P29/50—Reduction of harmonics
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/10—Arrangements for controlling torque ripple, e.g. providing reduced torque ripple
Definitions
- the present invention relates to a motor control apparatus that controls a motor or a load driven by the motor with respect to motion operations such as speed and position, and in particular, a motor that suppresses mechanical resonance that occurs when the load is driven.
- the present invention relates to a control device.
- Patent Document 1 A motor control device that suppresses such mechanical resonance has been disclosed in, for example, Patent Document 1.
- FIG. 9 is a block diagram of a conventional motor control device.
- the conventional motor control device 90 is connected to the motor 11 and the speed detector 13.
- a load 12 is connected to the motor 11.
- the speed detector 13 measures the speed of the motor 11 and outputs a speed detection signal Va indicating the speed of the motor 11 based on the measurement result.
- the motor control device 90 includes a plurality of notch filters 95a, 95b and 95c connected in series in order to suppress oscillation caused by mechanical resonance. Further, the motor control device 90 includes a speed control unit 94, a frequency estimation unit 97, a notch filter selection unit 98, a notch frequency setting unit 99, and a torque control unit 96.
- the frequency estimation unit 97 estimates the oscillation frequency when oscillation due to mechanical resonance occurs.
- the notch filter selection unit 98 selects one of the notch filters 95a, 95b, and 95c based on the frequency estimated by the frequency estimation unit 97, the setting state indicating whether each notch filter is valid or invalid, and the set notch frequency. Select one.
- the notch frequency setting unit 99 sets the notch frequency of one notch filter selected by the notch filter selection unit 98 to the frequency estimated by the frequency estimation unit 97.
- the speed controller 94 receives the speed command signal Vt and the speed detection signal Va and generates a torque command signal T1.
- the torque command signal T1 is supplied to the notch filter 95a, and the torque command signal T2 that is a signal filtered by the notch filters 95a, 95b, and 95c is supplied to the torque control unit 96.
- the torque control unit 96 controls the motor 11 so that the motor 11 outputs a target torque based on the torque command signal T2.
- a plurality of notch filters are based on the estimated oscillation frequency, the valid / invalid setting state of each notch filter, and the notch frequency. An appropriate one is selected and the notch frequency is reset. And since the conventional motor control apparatus 90 is provided with the several notch filter, even if it is a case where several mechanical resonance arises, the oscillation resulting from each mechanical resonance can each be suppressed appropriately.
- the conventional motor control device as described above is configured to select an appropriate one from a plurality of notch filters based on the oscillation frequency estimated by one frequency estimation unit. For this reason, when the mechanical resonance is a vibration including a plurality of frequency components, the correct vibration frequency cannot be estimated, the vibration suppression operation is performed only for one frequency among the frequency components, or The suppression operation is performed in time series for each frequency component. In other words, for mechanical resonance including a plurality of frequency components, there are problems such as an appropriate notch filter being not set and the effect of suppressing vibration not being exhibited, and the time required for suppressing vibration being required. It was.
- the motor control device of the present invention includes a control system that feedback-controls the motion of the movable part using the detected amount of movement of the motor movable part, and is disposed in the control system and is notched with respect to the input signal.
- Multiple notch filters that attenuate signal components of nearby frequencies centering on the frequency, and different frequency bands are set corresponding to each notch filter, and vibration components are extracted from the amount of motion based on the set frequency band
- a plurality of vibration extraction filters that are arranged for each of the vibration extraction filters, and a plurality of notch control units that control the notch frequencies of the corresponding notch filters so that the amplitude of the vibration component extracted by the vibration extraction filter decreases. It is the structure provided with.
- each of the plurality of frequency components is The frequency components are individually extracted in parallel. Furthermore, since the notch control unit and the notch filter operate in parallel while corresponding to individual frequency components, the vibrations can be accurately and immediately suppressed even for mechanical resonance including multiple frequency components. Is possible.
- FIG. 1 is a block diagram of a motor control device according to Embodiment 1 of the present invention.
- FIG. 2 is a diagram illustrating an example of frequency characteristics of a notch filter of the motor control device.
- FIG. 3A is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 17a of the motor control device.
- FIG. 3B is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 17b of the motor control device.
- FIG. 3C is a diagram illustrating an example of a combined frequency characteristic of the vibration extraction filter of the motor control device.
- FIG. 4 is a block diagram showing a main part of the motor control device.
- FIG. 5 is a flowchart showing a processing procedure when the motor controller is driven.
- FIG. 5 is a flowchart showing a processing procedure when the motor controller is driven.
- FIG. 6 is a block diagram of a motor control device according to Embodiment 2 of the present invention.
- FIG. 7A is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27a when the motor control device starts operation.
- FIG. 7B is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27b when the motor control device starts operation.
- FIG. 7C is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27c when the motor control apparatus starts operation.
- FIG. 8A is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27a when a vibration component is detected from the speed detection signal in the motor control device.
- FIG. 7A is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27a when a vibration component is detected from the speed detection signal in the motor control device.
- FIG. 8B is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27b when a vibration component is detected from the speed detection signal in the motor control device.
- FIG. 8C is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 27c when a vibration component is detected from the speed detection signal in the motor control device.
- FIG. 9 is a block diagram of a conventional motor control device.
- FIG. 1 is a block diagram of a motor control device 10 according to Embodiment 1 of the present invention.
- the motor control device 10 As shown in FIG. 1, the motor control device 10 according to the embodiment of the present invention is connected to a motor 11 and a speed detector 13.
- a load 12 is connected to the motor 11.
- the speed detector 13 measures the rotational speed of a mover (not shown) provided in the motor 11 and outputs a speed detection signal Va indicating the speed amount according to the rotational speed.
- the speed detector 13 detects the rotational speed amount of the mover as the movable portion of the motor 11 as the movement amount.
- the motor control apparatus 10 includes a speed control unit 14, notch filters 15a and 15b, a torque control unit 16, vibration extraction filters 17a and 17b, and notch control units 18a and 18b. Yes.
- the speed controller 14 receives a speed command signal Vt indicating a speed command value and a speed detection signal Va detected by the speed detector 13.
- the speed control unit 14 calculates a deviation amount between the speed command signal Vt and the speed detection signal Va, and generates and outputs a torque command signal T1 for controlling the deviation amount to zero based on the deviation amount.
- the speed control unit 14 calculates, for example, a difference value between the speed command signal Vt and the speed detection signal Va, and outputs a result obtained by proportionally integrating the difference value as the torque command signal T1.
- the torque command signal T1 is input from the speed control unit 14 to the notch filter 15a.
- the motor control device 10 includes a plurality of notch filters, a notch filter 15a and a notch filter 15b, and the notch filter 15a and the notch filter 15b are connected in series.
- the notch filters 15a and 15b are filters that give steep attenuation to a signal component having a frequency centered on a specific frequency included in the input signal from the input signal. This specific frequency is called a notch frequency, and the frequency width in the vicinity of attenuation is called a notch width.
- FIG. 2 is a diagram illustrating an example of frequency characteristics of the notch filters 15a and 15b.
- FIG. 2 shows an example of a frequency characteristic that attenuates a signal component in a frequency band of a nearby frequency having a notch width Bn around the notch frequency fn.
- the notch filters 15a and 15b are configured so that the notch frequency fn can be varied.
- each of the notch filters 15a and 15b is configured to be able to switch a filter function having frequency characteristics as shown in FIG. 2 between a valid state to be valid and a invalid state to be invalid.
- the effective state of the notch filters 15a and 15b is a state in which signal components in a frequency band centered on the notch frequency are removed from the input signal and output.
- the invalid state is a state in which the input signal is output as it is.
- a torque command signal T2 which is a signal obtained by filtering the torque command signal T1 as necessary, is output.
- the torque command signal T2 output from the notch filter 15b is input to the torque control unit 16.
- the torque control unit 16 controls the rotation operation of the motor 11 so that the motor 11 outputs a target torque.
- the motor control device 10 uses the speed detection signal Va indicating the amount of movement of the mover detected by the speed detector 13, and the rotation speed of the mover corresponds to the speed command signal Vt.
- the moving motion of the mover is feedback-controlled so that the rotational speed is achieved.
- a control system as a speed control system that feedback-controls the speed is configured.
- the motor control device 10 has a configuration in which notch filters 15a and 15b are arranged in the speed control system.
- the motor control device 10 includes a plurality of vibration extraction filters including a vibration extraction filter 17a and a vibration extraction filter 17b.
- the speed detection signal Va output from the speed detector 13 is also supplied to these vibration extraction filters 17a and 17b.
- Different frequency bands are set for the vibration extraction filters 17a and 17b in association with the notch filters 15a and 15b, respectively.
- the vibration extraction filters 17a and 17b extract a vibration component from the speed detection signal Va supplied as the movement amount of the mover of the motor 11 based on the set frequency band. That is, the vibration extraction filters 17a and 17b extract and output a vibration component appearing in the input speed detection signal Va, such as a vibration frequency component of mechanical resonance that occurs when the load 12 is driven by the motor 11, for example.
- FIG. 3A is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 17a.
- FIG. 3B is a diagram illustrating an example of frequency characteristics of the vibration extraction filter 17b.
- one vibration extraction filter 17a is a bandpass filter that passes a signal in a predetermined frequency band Ba with the center frequency fa as the center.
- the other vibration extraction filter 17b is a filter having a frequency characteristic that allows a signal outside the frequency band Ba of the vibration extraction filter 17a to pass therethrough.
- the frequency characteristics obtained by synthesizing the vibration extraction filter 17a and the vibration extraction filter 17b are combined frequency characteristics such that the frequency band Bab is centered on the center frequency fa as shown in FIG. 3C. That is, the vibration extraction filter 17b blocks the passage of a signal in the frequency band Ba centered on the center frequency fa. At the same time, the vibration extraction filter 17b has a range in the band BbL with respect to a frequency lower than the lower frequency of the frequency band Ba and a range in the band BbH with respect to a frequency higher than the upper frequency of the frequency band Ba. Let the signal pass. Thus, among the plurality of vibration extraction filters, one vibration extraction filter 17b uses the pass frequency band of the other vibration extraction filter 17a as a stop frequency band.
- the frequency characteristics of the plurality of vibration extraction filters are set to be complementary in this way. For this reason, for example, even if the mechanical resonance includes a plurality of frequency components, by providing such a plurality of vibration extraction filters, each frequency component in the plurality of frequency components is individually and in parallel. It can be extracted.
- the transfer characteristic of the vibration extraction filter 17a is Ga
- the transfer characteristic of the vibration extraction filter 17a is (1-Ga).
- Such frequency characteristics that are complementary to each other can be easily obtained.
- a wide band-pass filter having frequency characteristics as shown in FIG. 3C is connected to each vibration extraction filter in a cascade connection to obtain a synthesized frequency as shown in FIG. 3C.
- Can do That is, if a broadband bandpass filter having a transfer characteristic Gw is arranged, the transfer characteristic on the vibration extraction filter 17a side is Gw ⁇ Ga, and the transfer characteristic on the vibration extraction filter 17b side is Gw ⁇ (1-Ga). Good.
- the frequency characteristics of the plurality of vibration extraction filters can be complementary, even if the mechanical resonance includes one frequency component, it can be detected by any vibration extraction filter. At the same time, even if two frequency components are included, each frequency component can be detected.
- the vibration extraction filters 17a and 17b output a vibration component signal that is a signal obtained by extracting a vibration component appearing in the speed detection signal Va, that is, a signal that has passed based on such frequency characteristics.
- the vibration component signal extracted by the vibration extraction filter 17a is supplied to the notch control unit 18a.
- the vibration component signal extracted by the vibration extraction filter 17b is supplied to the notch control unit 18b.
- the motor control device 10 includes a plurality of notch control units including a notch control unit 18a and a notch control unit 18b arranged for the vibration extraction filters 17a and 17b, respectively.
- the notch control unit 18a controls the notch filter 15a according to the extraction result of the vibration component signal by the vibration extraction filter 17a.
- the notch control unit 18b controls the notch filter 15b according to the extraction result of the vibration component signal by the vibration extraction filter 17b.
- the notch control unit 18a determines that the vibration component signal is detected by the vibration extraction filter 17a
- the notch control unit 18a sets the notch frequency of the corresponding notch filter 15a so that the amplitude of the vibration component signal extracted by the vibration extraction filter 17a decreases.
- the notch control unit 18b determines that the vibration component signal is detected by the vibration extraction filter 17b
- the notch frequency of the corresponding notch filter 15b is decreased so that the amplitude of the vibration component signal extracted by the vibration extraction filter 17b decreases.
- the notch control units 18a and 18b also perform operations for switching the notch filters 15a and 15b between a valid state and an invalid state, respectively.
- each notch control unit determines that a vibration component signal is detected when the amplitude of the vibration component exceeds a predetermined level, and starts control of the notch frequency for the corresponding notch filter.
- FIG. 4 is a block diagram showing a main part of the motor control device 10.
- a detailed configuration for controlling the notch filter based on the vibration component signal extracted by the vibration extraction filter will be described with reference to FIG. 4 shows only the configuration of the vibration extraction filter 17a, the notch control unit 18a, and the notch filter 15a, the vibration extraction filter 17b, the notch control unit 18b, and the notch filter 15b have the same configuration. Each operation is performed in parallel.
- the notch control unit 18 a includes a detection notch filter 81 and a notch frequency changing unit 82.
- the detection notch filter 81 is a notch filter equivalent to the notch filter 15a.
- the detection notch filter 81 is supplied with the vibration component signal xa extracted by the vibration extraction filter 17a.
- the notch frequency changing unit 82 changes and controls the notch frequency of the detection notch filter 81 so that the amplitude of the output signal of the detection notch filter 81 decreases. In order to perform such change control, the output signal of the detection notch filter 81 is supplied to the notch frequency changing unit 82.
- the notch frequency changing unit 82 detects the amplitude of the output signal, generates a notch frequency control signal vfa for changing and controlling the notch frequency of the detection notch filter 81, and outputs the notch frequency control signal vfa to the detection notch filter 81. .
- the notch control unit 18a is provided to generate the notch frequency control signal vfa.
- the notch frequency control signal vfa is a control signal corresponding to a frequency at which the amplitude of the vibration component signal xa is most suppressed by the detection notch filter 81.
- the output signal of the detection notch filter 81 is regarded as an error, and it is only necessary to detect an optimum frequency that minimizes this error.
- a method for minimizing such an error for example, a method called a gradient method is known.
- the above-described notch control unit 18a may be configured to use such a gradient method, and thereby obtain the notch frequency control signal vfa corresponding to the frequency at which the amplitude of the vibration component signal xa is most suppressed. Can do. The same applies to the notch control unit 18b.
- the notch frequency changing unit 82 changes the notch frequency of the detection notch filter 81 with the notch frequency control signal vfa so that the amplitude of the output signal of the detection notch filter 81 decreases.
- the notch frequency control signal vfa is a signal corresponding to the frequency of the vibration component signal xa extracted by the vibration extraction filter 17a.
- the notch frequency of the notch filter 15a is controlled by the notch control unit 18a having such a configuration. Therefore, for example, when the vibration component signal xa is detected, the notch frequency change control for the notch filter 15a is started immediately. That is, unlike the FFT, there is no need for time for frequency estimation, and the suppression of the vibration can be started immediately.
- the notch frequency control signal vfa generated in this way is supplied to the notch filter 15a.
- the notch frequency control signal vfa is a signal corresponding to the frequency of the vibration component signal xa
- the detection notch filter 81 and the notch filter 15a are equivalent notch filters. For this reason, the vibration component included in the torque command signal T1 corresponding to the frequency of the vibration component signal xa can be suppressed by the notch filter 15a in the speed control system.
- the vibration extraction filter 17b, the notch control unit 18b, and the notch filter are arranged in parallel with the configuration of the vibration extraction filter 17a, the notch control unit 18a, and the notch filter 15a shown in FIG. 15b is provided. Therefore, even when the mechanical resonance includes a plurality of frequency components, it is possible to simultaneously and individually suppress each frequency component included in the mechanical resonance by operating in parallel. Become. As described above, the motor control device 10 of the present embodiment can always control the motor 11 stably.
- FIG. 5 is a flowchart showing a processing procedure when the motor control device 10 drives the motor.
- the operation of the motor control device 10 will be described with reference to FIG.
- the motor control device 10 sets the notch filters 15a and 15b to an invalid state (step S10). At the same time, the motor control device 10 drives and controls the motor 11 so that the rotation speed is in accordance with the speed command signal Vt. At this time, the rotational speed of the mover of the motor 11 is sequentially detected by the speed detector 13 and output as a speed detection signal Va.
- Speed detection signal Va from the speed detector 13 is supplied to the vibration extraction filters 17a and 17b.
- the notch control unit 18a determines whether or not a vibration component having a frequency in the frequency band Ba as shown in FIG. 3A is detected from the speed detection signal Va by the vibration extraction filter 17a (step S12). In order to make such a determination, the notch control unit 18a monitors, for example, whether or not the amplitude of the vibration component extracted by the vibration extraction filter 17a exceeds a predetermined level.
- step S14 the motor control device 10 determines that the amplitude has exceeded a predetermined level by the notch control unit 18a
- the motor control device 10 proceeds to step S14 in FIG. 5 to detect the vibration component, and changes the notch frequency for the notch filter 15a.
- Start control That is, first, the notch control unit 18a switches the notch filter 15a from the invalid state to the valid state (step S14).
- the notch control unit 18a supplies the generated notch frequency control signal to the notch filter 15a.
- the notch frequency of the frequency of the vibration component extracted by the vibration extraction filter 17a is set in the notch filter 15a (step S16).
- the motor control device 10 proceeds to the process of step S18.
- step S12 determines in step S12 that the amplitude of the vibration component does not exceed the predetermined level by the notch control unit 18a, the process proceeds to step S18.
- the notch control unit 18b and the vibration extraction filter 17b determine whether or not a vibration component having a frequency within the frequency band BbL or BbH outside the frequency band Ba as shown in FIG. 3B is detected from the speed detection signal Va. (Step S18). In order to make such a determination, for example, the notch control unit 18b monitors whether the amplitude of the vibration component extracted by the vibration extraction filter 17b exceeds a predetermined level.
- step S20 the motor control device 10 determines that the amplitude exceeds a predetermined level by the notch control unit 18b
- the motor control device 10 proceeds to step S20 in FIG. 5 to detect the vibration component, and changes the notch frequency for the notch filter 15b.
- Start control That is, first, the notch control unit 18b switches the notch filter 15b from the invalid state to the valid state (step S20).
- the notch control unit 18b supplies the generated notch frequency control signal to the notch filter 15b. Thereby, the notch frequency of the frequency of the vibration component extracted by the vibration extraction filter 17b is set in the notch filter 15b (step S22). Thereafter, the motor control device 10 proceeds to the process of step S24.
- step S18 determines in step S18 that the amplitude of the vibration component does not exceed the predetermined level by the notch control unit 18b, the process proceeds to step S24.
- the motor control device 10 determines whether or not a command for terminating the drive of the load 12 by the motor 11 is issued from the host device or the like (step S24). The motor control device 10 proceeds to the process of step S12 when the command to end is not given, and ends the driving of the load 12 by the motor 11 when the command to finish is given.
- FIG. 5 is a flowchart when the motor control device is driven for the first time. When the motor drive is resumed with the same device, the processing is resumed from step 12.
- the motor control device uses a plurality of notch filters arranged in the control system and the speed detection signal based on the frequency bands set to be different frequency bands.
- the configuration includes a plurality of vibration extraction filters that extract vibration components, and respective notch control units that control the notch frequencies of the notch filters so that the amplitude of the vibration components extracted by the vibration extraction filters decreases. For this reason, in the mechanical resonance that occurs when the load is driven, even if the mechanical resonance includes a plurality of frequency components, each frequency component in the plurality of frequency components is converted by the plurality of vibration extraction filters. Individually extracted in parallel. Furthermore, the notch control unit and the notch filter also operate in parallel while corresponding to individual frequency components. Therefore, according to the motor control device of the present embodiment, since the suppression operation can be executed in parallel for each frequency component with respect to mechanical resonance including a plurality of frequency components, the vibration is suppressed accurately and immediately. Is possible.
- the notch filter is set in an invalid state at the time when the drive control is started. That is, when a vibration component due to mechanical resonance or the like is not detected, the speed control system is configured in a state where there is no notch filter and the torque command signal T1 from the speed control unit 14 is directly supplied to the torque control unit 16. The For this reason, this speed control system operates in a wide band when mechanical resonance or the like does not occur, and can ensure sufficient responsiveness.
- each vibration extraction filter is a band-pass filter in which different pass frequency bands are set, or one vibration extraction filter among the plurality of vibration extraction filters is passed through each of the other vibration extraction filters. What is necessary is just to make a frequency band into a stop frequency band.
- FIG. 6 is a block diagram of the motor control device 20 according to the second embodiment of the present invention.
- the motor control device 20 includes three vibration extraction filters, three notch control units, and notch filters.
- the second embodiment further includes a vibration extraction filter control unit 19.
- the notch frequency control signal output from each notch control part is supplied to the vibration extraction filter control part 19.
- the vibration extraction filter control unit 19 changes and controls the frequency characteristics of each vibration extraction filter.
- FIG. 6 the same components as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.
- the speed detection signal Va output from the speed detector 13 is supplied to the speed control unit 14 and is also supplied to the vibration extraction filters 27a, 27b, and 27c.
- the vibration extraction filters 27a, 27b, and 27c have a function of extracting a vibration component from the speed detection signal Va in the same manner as the vibration extraction filter 17a of the first embodiment, and the frequency characteristics are controlled by the vibration extraction filter control unit 19. It is also configured to be changeable.
- the vibration component signal extracted by the vibration extraction filter 27a is supplied to the notch control unit 18a.
- the notch control unit 18a generates a notch frequency control signal vfa for changing and controlling the notch frequency of the notch filter 15a in accordance with the extraction result of the vibration component signal by the vibration extraction filter 27a.
- the vibration component signal extracted by the vibration extraction filter 27b is supplied to the notch control unit 18b.
- the notch control unit 18b generates a notch frequency control signal vfb for changing and controlling the notch frequency of the notch filter 15b.
- the vibration component signal extracted by the vibration extraction filter 27c is supplied to the notch control unit 18c.
- the notch control unit 18c generates a notch frequency control signal vfc for changing and controlling the notch frequency of the notch filter 15c.
- the notch frequency control signals vfa, vfb, and vfc are also supplied to the vibration extraction filter control unit 19.
- the vibration extraction filter control unit 19 generates a vibration extraction filter control signal for changing and controlling the frequency characteristics of each vibration extraction filter based on the supplied notch frequency control signal, and supplies the vibration extraction filter control signal to each vibration extraction filter.
- the notch frequency control signal vfa is a signal corresponding to the frequency of the vibration component signal xa extracted by the vibration extraction filter 27a.
- Each vibration extraction filter is frequency controlled so that, for example, the center frequency thereof is the frequency indicated by the notch frequency control signal. That is, the vibration extraction filter control unit 19 feeds back a vibration extraction filter control signal based on such a notch frequency control signal to the vibration extraction filter.
- control is performed so that the passband center frequency of the vibration extraction filter is close to or coincides with the frequency of the vibration component signal. Thereby, the extraction accuracy of the vibration component from the speed detection signal Va by the vibration extraction filter can be increased.
- 7A, 7B, and 7C are diagrams illustrating an example of frequency characteristics of each vibration extraction filter when the motor control device 20 starts operation.
- 8A, 8B, and 8C are diagrams illustrating an example of frequency characteristics of each vibration extraction filter when a vibration component is detected from the speed detection signal Va.
- FIG. 7A shows an example of the frequency characteristics of the vibration extraction filter 27a
- FIG. 7B shows an example of the frequency characteristics of the vibration extraction filter 27b
- FIG. 7C When the drive operation by the motor control device 20 is started, such as when the power is turned on, as shown in FIGS. 7A, 7B, and 7C, the vibration extraction filters 27a and 27b are connected to the vibration extraction filters 17a and 17b of the first embodiment. Similar frequency characteristics are set. That is, the vibration extraction filter 27a is set to have a band-pass filter characteristic that allows a signal in a predetermined frequency band Ba to pass around the center frequency fa0.
- the vibration extraction filter 27b is set so as to have a filter characteristic having a frequency characteristic that allows a signal outside the frequency band Ba of the vibration extraction filter 27a to pass therethrough. Then, as shown in FIG. 7C, the vibration extraction filter 27c is set to have a characteristic that does not pass a signal including all frequency components, that is, a complete cutoff characteristic, as shown in FIG. 7C.
- At least one vibration extraction filter 27a that passes a signal in the frequency band, and a pass frequency band of the vibration extraction filter 27a is set as a stop frequency band, and a signal outside the stop frequency band is passed.
- One vibration extraction filter 27b and a vibration extraction filter 27c that blocks passage of signals are provided.
- the vibration component passes through at least one of the vibration extraction filter 27a and the vibration extraction filter 27b. Then, the vibration component signal is supplied to at least one of the notch control unit 18a and the notch control unit 18b. Thereby, the notch control part 18a and the notch control part 18b start the operation
- the vibration extraction filter 27a controls the notch frequency of the notch filter 15a by the notch frequency control signal vfa.
- the notch frequency control signal vfa is supplied to the vibration extraction filter control unit 19.
- the vibration extraction filter control unit 19 controls the frequency of the vibration extraction filter 27a so that the center frequency of the vibration extraction filter 27a becomes a frequency corresponding to the notch frequency control signal vfa.
- FIG. 8A shows the frequency characteristics of the vibration extraction filter 27a controlled in this way.
- the vibration extraction filter 27a is changed and controlled by the vibration extraction filter control unit 19 from the initial center frequency fa0 to the center frequency fa1 that is the frequency of the vibration component signal or a frequency in the vicinity thereof as shown in FIG. 8A. .
- the vibration extraction filter control unit 19 in order to extract the vibration component with higher accuracy together with the change control of the center frequency, for example, a configuration may be adopted in which the change control of the frequency band is performed to narrow the frequency band Ba.
- the frequency characteristics of the vibration extraction filter 27b are also changed with the change control of the vibration extraction filter 27a.
- the transfer characteristic of the vibration extraction filter 27a is changed from Gw ⁇ Ga0 to Gw ⁇ Ga1
- the transfer characteristic of the vibration extraction filter 27b is changed from Gw ⁇ (1-Ga0) to Gw ⁇ (1-Ga1). Be changed.
- the transfer characteristic Gw is a broadband bandpass filter characteristic as shown in FIG. 3C
- the transfer characteristics Ga0 and Ga1 are bandpass filter characteristics as shown in FIG. 8A.
- the vibration extraction filter control unit 19 determines whether or not a vibration component has been detected in all the vibration extraction filters for which the pass band is set after the change control to the vibration extraction filter. When the vibration extraction filter control unit 19 determines that the vibration component is not detected in all, for example, when the vibration component is detected only by the vibration extraction filter 27a, the vibration extraction filters 27a and 27b are in this manner. It is controlled to change. Similarly, when the vibration component is detected only by the vibration extraction filter 27b, the same change control is performed.
- vibration extraction filter 27b when a vibration component is detected by the vibration extraction filter 27b in addition to the vibration extraction filter 27a, the following operation is further performed.
- vibration components including frequency components in the upper passband are further generated in the vibration extraction filter 27b with the upper and lower passbands.
- the notch control unit 18b controls the notch frequency of the notch filter 15b with the notch frequency control signal vfb.
- the notch frequency control signal vfb is supplied to the vibration extraction filter control unit 19. Then, the vibration extraction filter control unit 19 controls the frequency of the vibration extraction filter 27b so that the center frequency of the upper passband of the vibration extraction filter 27b becomes a frequency corresponding to the notch frequency control signal vfb.
- the vibration extraction filter control unit 19 monitors the number of vibration components detected and determines that the vibration components are detected in all the vibration extraction filters for which the pass band is set as described above, the vibration extraction filter control unit 19 performs vibration extraction. The following control is performed on the filter.
- the frequency characteristics of the vibration extraction filter 27b are, as shown in FIG. 8B, a bandpass filter centered on a center frequency fbH1 that is the frequency of the vibration component signal or a frequency in the vicinity thereof. Is changed to a characteristic. That is, in the present embodiment, when all of the vibration extraction filters in a state of passing a signal extract vibration components, the vibration extraction filter control unit 19 first passes the vibration extraction filter 27b that passes a signal outside the stop frequency band. Is changed to a frequency characteristic that passes a signal in a frequency band including the frequency of the extracted vibration component.
- the vibration extraction filter control unit 19 sets the frequency characteristics of the vibration extraction filter 27c using the information on the frequency characteristics set in the vibration extraction filter 27a and the vibration extraction filter 27b. Specifically, as shown in FIG. 8C, the vibration extraction filter control unit 19 has a filter characteristic having a frequency characteristic that becomes a stop band with respect to the pass bands of the vibration extraction filter 27a and the vibration extraction filter 27b.
- the vibration extraction filter 27c is set. In other words, a frequency characteristic is set such that a signal outside the band between the frequency band Ba of the vibration extraction filter 27a and the frequency band BbH of the vibration extraction filter 27b is passed.
- the vibration extraction filter control unit 19 when all of the vibration extraction filters in a state of passing a signal extract vibration components, the vibration extraction filter control unit 19 further passes the signal in the frequency band through the vibration extraction filter 27c.
- the pass frequency bands of the vibration extraction filter 27a and the vibration extraction filter 27b to be set are set as the stop frequency bands, and the frequency characteristics are changed to pass signals outside the stop frequency band.
- the vibration extraction filter 27c is controlled to be changed from the complete cutoff characteristic to the transfer characteristic Gw ⁇ (1-Ga1-Gb).
- the transfer characteristic Gw is a broadband bandpass filter characteristic as shown in FIG. 3C, and the transfer characteristics Ga0, Ga1, and Gb are bandpass filter characteristics.
- the vibration extraction filters in two pairs for example, the frequency characteristics are set to be complementary as shown in FIGS. 7A and 7B. Further, the other pairs of vibration extraction filters are set to have a complete cutoff characteristic as shown in FIG. 7C.
- the frequency characteristic of the third vibration extraction filter is set as described above.
- the fourth frequency characteristic is such that the pass band of the three vibration extraction filters becomes a stop band.
- the frequency characteristic of the vibration extraction filter may be set so that the frequency characteristic as described above is obtained from the complete cutoff characteristic every time a new vibration component is detected.
- one of the vibration extraction filters having a complete cutoff characteristic is controlled to be changed to the transfer characteristic Gw ⁇ (1-Ga). Then, as described above, the vibration extraction filter having the complete cutoff characteristic is set to the signal pass filter in response to the vibration component passing through each vibration extraction filter being sequentially detected. Such a configuration is also possible.
- the motor control device 20 prepares a plurality of pairs including a vibration extraction filter, a notch control unit, and a notch filter, and the frequency characteristics of the vibration extraction filter in two of them. Are set to be complementary, and the vibration extraction filters in the other pairs are set to have complete cutoff characteristics. Then, each time the vibration extraction filter control unit 19 detects more than two new vibration components, the pass band of the set vibration extraction filter is set as the stop band for the vibration extraction filter having the complete cutoff characteristic. Such a frequency characteristic is set. By adopting such a configuration, it is possible to start the vibration suppression operation accurately and immediately with respect to a mechanical resonance including a plurality of frequency components, and to a complicated mechanical resonance including a large number of frequency components. However, the vibration can be suppressed corresponding to each frequency.
- a speed control system that detects the rotational speed of the mover that is the movable part, and feedback-controls the movement of the movable part using the detected speed amount.
- the present invention is not limited to such a configuration, and may be a position control system that detects the position of the movable part and feedback-controls the movement operation of the movable part using the detected position information.
- the vibration frequency may be estimated from the detected position information.
- a configuration may be provided in which a detector that takes in a signal for extracting a vibration component is provided separately.
- the present invention is not limited to such a configuration.
- a configuration in which a vibration component is extracted by a signal from a load or a detector provided in the vicinity of the load may be used.
- a motor provided with a mover that rotates as a movable part
- the present invention is not limited to such a configuration, and may be a motor that performs a motion operation other than rotation, such as a linear motor.
- the present invention is not limited to such a configuration, and may be a motor control method that is realized, for example, by executing a process in each block according to a procedure.
- a program that sequentially executes the steps corresponding to the processing of each block is stored in a memory or the like, for example, a CPU such as a microprocessor sequentially reads the program stored in the memory and reads the program The processing may be performed according to the above.
- the motor control device is capable of suppressing the vibration accurately and immediately even for mechanical resonance including a plurality of frequency components, and can always stably control the motor. It is an apparatus that uses a motor such as a component mounter or a semiconductor manufacturing apparatus, and is particularly suitable for a motor control apparatus that drives an apparatus that causes mechanical resonance.
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Abstract
Description
図1は、本発明の実施の形態1におけるモータ制御装置10のブロック図である。
図6は、本発明の実施の形態2におけるモータ制御装置20のブロック図である。実施の形態2では、モータ制御装置20が振動抽出フィルタ、ノッチ制御部およびノッチフィルタをそれぞれ3つ備えた一例を挙げて説明する。また、実施の形態1との比較において、実施の形態2では、振動抽出フィルタ制御部19をさらに備えている。振動抽出フィルタ制御部19には、それぞれのノッチ制御部から出力されたノッチ周波数制御信号が供給される。振動抽出フィルタ制御部19は、供給されたノッチ周波数制御信号に基づき、それぞれの振動抽出フィルタの周波数特性を変更制御する。なお、図6において、図1と同一の構成要素については同一の符号を付しており詳細な説明は省略する。
11 モータ
12 負荷
13 速度検出器
14,94 速度制御部
15a,15b,15c,95a,95b,95c ノッチフィルタ
16,96 トルク制御部
17a,17b,27a,27b,27c 振動抽出フィルタ
18a,18b,18c ノッチ制御部
19 振動抽出フィルタ制御部
81 検出用ノッチフィルタ
82 ノッチ周波数変更部
97 周波数推定部
98 ノッチフィルタ選択部
99 ノッチ周波数設定部
Claims (9)
- 検出されたモータ可動部の動き量を利用して、前記可動部の動き動作をフィードバック制御する制御系を備えたモータ制御装置であって、
前記制御系内に配置され、入力信号に対してノッチ周波数を中心とした近傍周波数の信号成分を減衰させる複数のノッチフィルタと、
前記ノッチフィルタのそれぞれに対応づけて異なった周波数帯域が設定され、設定された前記周波数帯域に基づき、前記動き量から振動成分を抽出する複数の振動抽出フィルタと、
前記振動抽出フィルタそれぞれに対して配置され、前記振動抽出フィルタが抽出した前記振動成分の振幅が減少するように、対応するノッチフィルタの前記ノッチ周波数を制御する複数のノッチ制御部とを備えたことを特徴とするモータ制御装置。 - 前記ノッチ制御部は、前記振動抽出フィルタが抽出した前記振動成分の振幅が所定のレベルを超えたとき、対応するノッチフィルタに対して、前記ノッチ周波数の制御を開始することを特徴とする請求項1に記載のモータ制御装置。
- 前記ノッチフィルタは、前記ノッチ周波数の制御が可能であるとともに、フィルタ機能を有効とする有効状態と無効とする無効状態とに切り替え可能であり、
前記ノッチ制御部は、
対応するノッチフィルタが無効状態であり、かつ前記振動抽出フィルタが抽出した前記振動成分の振幅が所定のレベルを超えたとき、対応するノッチフィルタを有効状態とし、前記振動成分の振幅が減少するように前記ノッチ周波数の可変制御を開始することを特徴とする請求項1に記載のモータ制御装置。 - 前記ノッチ制御部は、対応するノッチフィルタと同等の検出用ノッチフィルタと、前記検出用ノッチフィルタの出力信号の振幅が減少するように、前記検出用ノッチフィルタのノッチ周波数を変更制御するノッチ周波数制御信号を生成するノッチ周波数変更部とを備え、
前記ノッチ制御部は、前記ノッチ周波数制御信号を対応するノッチフィルタに供給することで、対応するノッチフィルタの前記ノッチ周波数を制御することを特徴とする請求項1に記載のモータ制御装置。 - 複数の前記振動抽出フィルタの中で、1つの前記振動抽出フィルタは、他の前記振動抽出フィルタそれぞれの通過周波数帯域を、阻止周波数帯域としたことを特徴とする請求項1から4までのいずれか1項に記載のモータ制御装置。
- 複数の前記振動抽出フィルタとして2つの前記振動抽出フィルタを備え、一方の振動抽出フィルタは、所定の周波数帯域内の信号を通過させるバンドパスフィルタであり、他方の振動抽出フィルタは、前記一方の振動抽出フィルタの周波数帯域外の信号を通過させるような周波数特性を有したフィルタであることを特徴とする請求項1から4までのいずれか1項に記載のモータ制御装置。
- 前記ノッチ制御部は、前記振動抽出フィルタが抽出した前記振動成分の振幅が減少するように、対応するノッチフィルタの前記ノッチ周波数を制御するとともに、前記振動抽出フィルタの中心周波数が前記ノッチ周波数へと近づくように前記振動抽出フィルタの中心周波数を制御することを特徴とする請求項1に記載のモータ制御装置。
- 周波数帯域内の信号を通過させる前記振動抽出フィルタと、
信号の通過を遮断した少なくとも1つの前記振動抽出フィルタとを含み、
それぞれの前記振動抽出フィルタを制御する振動抽出フィルタ制御部をさらに備え、
前記振動抽出フィルタ制御部は、
前記振動抽出フィルタが振動成分を抽出したとき、
前記信号の通過を遮断した前記振動抽出フィルタの1つを、前記周波数帯域内の信号を通過させる前記振動抽出フィルタそれぞれの通過周波数帯域を阻止周波数帯域とし、前記阻止周波数帯域外の信号を通過させる周波数特性に変更することを特徴とする請求項1に記載のモータ制御装置。 - 周波数帯域内の信号を通過させる少なくとも1つの前記振動抽出フィルタと、
前記周波数帯域内の信号を通過させる前記振動抽出フィルタそれぞれの通過周波数帯域を阻止周波数帯域とし、前記阻止周波数帯域外の信号を通過させる1つの前記振動抽出フィルタと、
信号の通過を遮断した前記振動抽出フィルタとを含み、
それぞれの前記振動抽出フィルタを制御する振動抽出フィルタ制御部をさらに備え、
前記振動抽出フィルタ制御部は、
前記周波数帯域内の信号を通過させる前記振動抽出フィルタと、前記阻止周波数帯域外の信号を通過させる前記振動抽出フィルタとのすべてが振動成分を抽出したとき、
前記阻止周波数帯域外の信号を通過させる前記振動抽出フィルタを、前記抽出した振動成分の周波数を含む周波数帯域内の信号を通過させる周波数特性に変更するとともに、
前記信号の通過を遮断した前記振動抽出フィルタを、前記周波数帯域内の信号を通過させる前記振動抽出フィルタそれぞれの通過周波数帯域を阻止周波数帯域とし、前記阻止周波数帯域外の信号を通過させる周波数特性に変更することを特徴とする請求項1に記載のモータ制御装置。
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CN2009801000773A CN101772884B (zh) | 2008-06-04 | 2009-06-01 | 电动机控制装置 |
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JP2003228422A (ja) * | 2002-02-04 | 2003-08-15 | Canon Inc | ステージ制御装置及び露光装置並びにデバイスの製造方法 |
JP2004274976A (ja) * | 2003-03-12 | 2004-09-30 | Matsushita Electric Ind Co Ltd | 電動機の制御装置 |
JP2006288124A (ja) * | 2005-04-01 | 2006-10-19 | Mitsubishi Electric Corp | モータ制御装置 |
Cited By (1)
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EP2579453A4 (en) * | 2010-05-28 | 2017-05-31 | Panasonic Corporation | Motor control apparatus |
Also Published As
Publication number | Publication date |
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US20130113409A1 (en) | 2013-05-09 |
US8378615B2 (en) | 2013-02-19 |
DE112009000017T5 (de) | 2010-06-02 |
US8901872B2 (en) | 2014-12-02 |
JP2009296746A (ja) | 2009-12-17 |
CN101772884B (zh) | 2012-07-25 |
CN101772884A (zh) | 2010-07-07 |
US20110221378A1 (en) | 2011-09-15 |
JP5332321B2 (ja) | 2013-11-06 |
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