WO2009139477A8 - 磁気記録媒体の製造方法、磁気記録媒体および磁気記録再生装置 - Google Patents

磁気記録媒体の製造方法、磁気記録媒体および磁気記録再生装置 Download PDF

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Publication number
WO2009139477A8
WO2009139477A8 PCT/JP2009/059098 JP2009059098W WO2009139477A8 WO 2009139477 A8 WO2009139477 A8 WO 2009139477A8 JP 2009059098 W JP2009059098 W JP 2009059098W WO 2009139477 A8 WO2009139477 A8 WO 2009139477A8
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic recording
recording medium
magnetic
reproducing
recording layer
Prior art date
Application number
PCT/JP2009/059098
Other languages
English (en)
French (fr)
Other versions
WO2009139477A1 (ja
Inventor
正人 福島
Original Assignee
昭和電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昭和電工株式会社 filed Critical 昭和電工株式会社
Priority to US12/992,831 priority Critical patent/US8802188B2/en
Priority to CN2009801273840A priority patent/CN102099858A/zh
Publication of WO2009139477A1 publication Critical patent/WO2009139477A1/ja
Publication of WO2009139477A8 publication Critical patent/WO2009139477A8/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

本発明は、磁気的に分離した磁気記録パターンを有する磁気記録媒体の製造方法、その磁気記録媒体および磁気記録再生装置に関する。本発明の製造方法は、非磁性基板上に連続した記録層を形成した後、該記録層を一部被覆しないようにＰｔ、Ｒｕ、Ｐｄの元素群から選ばれた何れか１種以上の元素から成るマスク層をこの記録層上に形成し、その後、記録層の表面でマスク層に覆われていない箇所を、反応性プラズマ、もしくは当該反応性プラズマ中に生成した反応性イオンに晒して該箇所の記録層を非晶質化し、前記箇所の磁気特性を改質する磁気特性改質工程により、磁気的に分離した磁気記録パターンを形成する。
PCT/JP2009/059098 2008-05-15 2009-05-11 磁気記録媒体の製造方法、磁気記録媒体及び磁気記録再生装置 WO2009139477A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/992,831 US8802188B2 (en) 2008-05-15 2009-05-11 Method for manufacturing magnetic recording medium, magnetic recording medium, and magnetic recording and reproducing apparatus
CN2009801273840A CN102099858A (zh) 2008-05-15 2009-05-15 磁记录介质的制造方法、磁记录介质和磁记录再生装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-127816 2008-05-15
JP2008127816A JP5247231B2 (ja) 2008-05-15 2008-05-15 磁気記録媒体の製造方法

Publications (2)

Publication Number Publication Date
WO2009139477A1 WO2009139477A1 (ja) 2009-11-19
WO2009139477A8 true WO2009139477A8 (ja) 2011-06-09

Family

ID=41318835

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/059098 WO2009139477A1 (ja) 2008-05-15 2009-05-11 磁気記録媒体の製造方法、磁気記録媒体及び磁気記録再生装置

Country Status (5)

Country Link
US (1) US8802188B2 (ja)
JP (1) JP5247231B2 (ja)
CN (1) CN102099858A (ja)
TW (1) TW201009827A (ja)
WO (1) WO2009139477A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090199768A1 (en) * 2008-02-12 2009-08-13 Steven Verhaverbeke Magnetic domain patterning using plasma ion implantation
US8551578B2 (en) * 2008-02-12 2013-10-08 Applied Materials, Inc. Patterning of magnetic thin film using energized ions and thermal excitation
US8535766B2 (en) * 2008-10-22 2013-09-17 Applied Materials, Inc. Patterning of magnetic thin film using energized ions

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0138251B1 (ko) * 1991-02-05 1998-05-15 다니이 아끼오 자기기록매체 및 그 제조방법
JPH05205257A (ja) 1992-01-28 1993-08-13 Toshiba Corp 磁気記録媒体
JPH06131658A (ja) * 1992-10-21 1994-05-13 Sony Corp 磁気記録媒体の製造方法
US6168845B1 (en) * 1999-01-19 2001-01-02 International Business Machines Corporation Patterned magnetic media and method of making the same using selective oxidation
JP3886802B2 (ja) 2001-03-30 2007-02-28 株式会社東芝 磁性体のパターニング方法、磁気記録媒体、磁気ランダムアクセスメモリ
JP2004164692A (ja) 2002-11-08 2004-06-10 Toshiba Corp 磁気記録媒体及びその製造方法
US7147790B2 (en) 2002-11-27 2006-12-12 Komag, Inc. Perpendicular magnetic discrete track recording disk
US20050036223A1 (en) 2002-11-27 2005-02-17 Wachenschwanz David E. Magnetic discrete track recording disk
US7161753B2 (en) 2005-01-28 2007-01-09 Komag, Inc. Modulation of sidewalls of servo sectors of a magnetic disk and the resultant disk
JP2006286159A (ja) * 2005-04-05 2006-10-19 Canon Inc 磁気記録媒体及びその製造方法
JP2006309841A (ja) 2005-04-27 2006-11-09 Tdk Corp 磁性パターン形成方法、磁気記録媒体、磁気記録再生装置
JP2007149155A (ja) * 2005-11-24 2007-06-14 Hitachi Ltd 磁気記録媒体、その作製方法、及び磁気ディスク装置
TW200802329A (en) * 2005-12-16 2008-01-01 Ingenia Technology Ltd Modification
JP2007213716A (ja) 2006-02-10 2007-08-23 Fujitsu Ltd 磁気記録媒体製造方法
WO2007108462A1 (ja) * 2006-03-20 2007-09-27 Ulvac, Inc. エッチング方法
JP2007329340A (ja) * 2006-06-08 2007-12-20 Canon Inc 接続孔の形成方法及び磁性デバイスの製造方法
US20090201722A1 (en) * 2008-02-12 2009-08-13 Kamesh Giridhar Method including magnetic domain patterning using plasma ion implantation for mram fabrication

Also Published As

Publication number Publication date
US20110109992A1 (en) 2011-05-12
TW201009827A (en) 2010-03-01
JP2009277296A (ja) 2009-11-26
JP5247231B2 (ja) 2013-07-24
WO2009139477A1 (ja) 2009-11-19
US8802188B2 (en) 2014-08-12
CN102099858A (zh) 2011-06-15

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