WO2009031608A1 - 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ - Google Patents

光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ Download PDF

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Publication number
WO2009031608A1
WO2009031608A1 PCT/JP2008/065958 JP2008065958W WO2009031608A1 WO 2009031608 A1 WO2009031608 A1 WO 2009031608A1 JP 2008065958 W JP2008065958 W JP 2008065958W WO 2009031608 A1 WO2009031608 A1 WO 2009031608A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical encoder
reflector plate
producing
same
film
Prior art date
Application number
PCT/JP2008/065958
Other languages
English (en)
French (fr)
Inventor
Satoru Oshida
Masaru Kato
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to CN2008801126349A priority Critical patent/CN101836089B/zh
Priority to JP2009531269A priority patent/JP5240198B2/ja
Priority to EP08829312A priority patent/EP2187177A4/en
Publication of WO2009031608A1 publication Critical patent/WO2009031608A1/ja
Priority to US12/714,995 priority patent/US8368004B2/en
Priority to US13/672,204 priority patent/US20130070359A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/54—Contact plating, i.e. electroless electrochemical plating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing
    • C25D11/24—Chemical after-treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optical Transform (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

　光学式エンコーダ用反射板は、反射面を有する基材（１）と、反射面の一部に形成され、無電解メッキ膜または電解酸化膜を含む膜（３）と、を備える。
PCT/JP2008/065958 2007-09-05 2008-09-04 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ WO2009031608A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2008801126349A CN101836089B (zh) 2007-09-05 2008-09-04 光学编码器用反射板及其制造方法、以及光学编码器
JP2009531269A JP5240198B2 (ja) 2007-09-05 2008-09-04 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ
EP08829312A EP2187177A4 (en) 2007-09-05 2008-09-04 REFLECTOR PLATE FOR AN OPTICAL CODING DEVICE, METHOD FOR THE PRODUCTION THEREOF, AND OPTICAL CODING DEVICE
US12/714,995 US8368004B2 (en) 2007-09-05 2010-03-01 Reflection plate for optical encoder and manufacturing method thereof, and optical encoder
US13/672,204 US20130070359A1 (en) 2007-09-05 2012-11-08 Reflection plate for optical encoder and manufacturing method thereof, and optical encoder

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-229887 2007-09-05
JP2007229887 2007-09-05
JP2007339778 2007-12-28
JP2007-339778 2007-12-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/714,995 Continuation US8368004B2 (en) 2007-09-05 2010-03-01 Reflection plate for optical encoder and manufacturing method thereof, and optical encoder

Publications (1)

Publication Number Publication Date
WO2009031608A1 true WO2009031608A1 (ja) 2009-03-12

Family

ID=40428921

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065958 WO2009031608A1 (ja) 2007-09-05 2008-09-04 光学式エンコーダ用反射板およびその製造方法、ならびに光学式エンコーダ

Country Status (6)

Country Link
US (2) US8368004B2 (ja)
EP (1) EP2187177A4 (ja)
JP (1) JP5240198B2 (ja)
CN (2) CN101836089B (ja)
TW (1) TWI454665B (ja)
WO (1) WO2009031608A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013108873A (ja) * 2011-11-22 2013-06-06 Mitsutoyo Corp 光電式エンコーダのスケール及びその製造方法
CN103348218A (zh) * 2011-02-21 2013-10-09 三菱电机株式会社 光学式编码器
US8816269B2 (en) 2011-11-07 2014-08-26 Canon Kabushiki Kaisha Reflective optical scale for encoder and reflective optical encoder
JP5925365B1 (ja) * 2015-05-13 2016-05-25 株式会社メルテック 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
JP2019082376A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2020064041A (ja) * 2018-10-17 2020-04-23 株式会社プロセス・ラボ・ミクロン 光学式エンコーダ用反射板とその製造方法

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GB2468263B (en) * 2008-08-28 2013-04-03 Faro Tech Inc Indexed optical encoder method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
WO2013100061A1 (ja) 2011-12-28 2013-07-04 株式会社ニコン エンコーダ、エンコーダ用スケールの製造方法、エンコーダの製造方法及び駆動装置
US20130221212A1 (en) * 2012-02-24 2013-08-29 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Coding Members With Embedded Metal Layers For Encoders
JP6197480B2 (ja) * 2013-08-23 2017-09-20 オムロン株式会社 光学式エンコーダ用遮光板、その製造方法およびそれを用いた光学式エンコーダ
US10317254B2 (en) * 2014-03-27 2019-06-11 Ams Sensors Singapore Pte. Ltd. Optical encoder system
CN104018203B (zh) * 2014-06-06 2016-06-01 广东南桂起重机械有限公司 一种铝型材氧化专用行车定位检测装置及专用行车
US10119842B1 (en) * 2014-08-05 2018-11-06 X Development Llc Encoder design and use
CN106929897A (zh) * 2015-12-30 2017-07-07 比亚迪股份有限公司 一种铝合金壳体及其制备方法
TWI585647B (zh) * 2016-04-07 2017-06-01 奇象光學有限公司 光學膜片以及使用者輸入系統
TWI597637B (zh) * 2016-08-12 2017-09-01 奇象光學有限公司 光學膜片以及使用者輸入系統
JP7140495B2 (ja) 2017-12-28 2022-09-21 株式会社ミツトヨ スケールおよびその製造方法
CN112444277A (zh) 2019-09-04 2021-03-05 台达电子工业股份有限公司 光学反射部件及其适用的光学编码器
CN113753846A (zh) * 2021-09-07 2021-12-07 上海晶采微纳米应用技术有限公司 高精度金属光码盘制备方法及高精度金属光码盘

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JPS60217361A (ja) * 1984-04-13 1985-10-30 Alps Electric Co Ltd 光反射式コ−ド板
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JPH0961195A (ja) 1995-08-30 1997-03-07 Nikon Corp ロータリエンコーダ及びその組み立て装置
JPH0989591A (ja) 1995-09-22 1997-04-04 Nikon Corp 多回転アブソリュートエンコーダ
JPH09273943A (ja) 1996-04-05 1997-10-21 Nikon Corp 多回転アブソリュート・エンコーダ
JP2004045063A (ja) * 2002-07-09 2004-02-12 Topcon Corp 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板
JP2005121593A (ja) 2003-10-20 2005-05-12 Sendai Nikon:Kk アブソリュートエンコーダ
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JPS60217361A (ja) * 1984-04-13 1985-10-30 Alps Electric Co Ltd 光反射式コ−ド板
JPS6145923A (ja) * 1984-08-10 1986-03-06 Aronshiya:Kk 反射式ロ−タリ−エンコ−ダ−用回転デイスクの製作方法
JPS62153710A (ja) * 1985-12-27 1987-07-08 Furukawa Alum Co Ltd ロ−タリエンコ−ダ用反射基板の製造方法
JPH0961195A (ja) 1995-08-30 1997-03-07 Nikon Corp ロータリエンコーダ及びその組み立て装置
JPH0989591A (ja) 1995-09-22 1997-04-04 Nikon Corp 多回転アブソリュートエンコーダ
JPH09273943A (ja) 1996-04-05 1997-10-21 Nikon Corp 多回転アブソリュート・エンコーダ
JP2004045063A (ja) * 2002-07-09 2004-02-12 Topcon Corp 光学式ロータリーエンコーダ板の製造方法および光学式ロータリーエンコーダ板
JP2005121593A (ja) 2003-10-20 2005-05-12 Sendai Nikon:Kk アブソリュートエンコーダ
JP2007119851A (ja) * 2005-10-27 2007-05-17 Nippon Kanizen Kk 黒色めっき膜およびその形成方法、めっき膜を有する物品
JP2007121142A (ja) 2005-10-28 2007-05-17 Sendai Nikon:Kk エンコーダディスクおよびエンコーダ

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See also references of EP2187177A4 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103348218A (zh) * 2011-02-21 2013-10-09 三菱电机株式会社 光学式编码器
US8816269B2 (en) 2011-11-07 2014-08-26 Canon Kabushiki Kaisha Reflective optical scale for encoder and reflective optical encoder
JP2013108873A (ja) * 2011-11-22 2013-06-06 Mitsutoyo Corp 光電式エンコーダのスケール及びその製造方法
US9258007B2 (en) 2011-11-22 2016-02-09 Mitutoyo Corporation Scale of photoelectric encoder including base member having roughened surface and manufacturing method of scale
JP5925365B1 (ja) * 2015-05-13 2016-05-25 株式会社メルテック 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
WO2016182005A1 (ja) * 2015-05-13 2016-11-17 株式会社メルテック 光学式エンコーダ用格子板および光学式エンコーダ用格子板の製造方法
JP2019082376A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 エンコーダースケール、エンコーダースケールの製造方法、エンコーダー、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP2020064041A (ja) * 2018-10-17 2020-04-23 株式会社プロセス・ラボ・ミクロン 光学式エンコーダ用反射板とその製造方法

Also Published As

Publication number Publication date
EP2187177A1 (en) 2010-05-19
TWI454665B (zh) 2014-10-01
EP2187177A4 (en) 2012-12-26
US8368004B2 (en) 2013-02-05
TW200912261A (en) 2009-03-16
JPWO2009031608A1 (ja) 2010-12-16
CN101836089B (zh) 2013-06-05
US20100193671A1 (en) 2010-08-05
US20130070359A1 (en) 2013-03-21
CN102980602B (zh) 2016-07-06
JP5240198B2 (ja) 2013-07-17
CN101836089A (zh) 2010-09-15
CN102980602A (zh) 2013-03-20

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