WO2009028525A1 - ステージ装置組み立て方法 - Google Patents

ステージ装置組み立て方法 Download PDF

Info

Publication number
WO2009028525A1
WO2009028525A1 PCT/JP2008/065243 JP2008065243W WO2009028525A1 WO 2009028525 A1 WO2009028525 A1 WO 2009028525A1 JP 2008065243 W JP2008065243 W JP 2008065243W WO 2009028525 A1 WO2009028525 A1 WO 2009028525A1
Authority
WO
WIPO (PCT)
Prior art keywords
installation site
actual installation
assembling method
auxiliary
main
Prior art date
Application number
PCT/JP2008/065243
Other languages
English (en)
French (fr)
Inventor
Yasuzo Tanaka
Junpei Yuyama
Mitsuru Yahagi
Hirofumi Minami
Makoto Takahashi
Shinya Ito
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to JP2009530138A priority Critical patent/JP5061191B2/ja
Priority to KR1020107004166A priority patent/KR101203982B1/ko
Priority to CN2008801055273A priority patent/CN101790784B/zh
Publication of WO2009028525A1 publication Critical patent/WO2009028525A1/ja
Priority to US12/710,759 priority patent/US8286318B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49764—Method of mechanical manufacture with testing or indicating
    • Y10T29/49778—Method of mechanical manufacture with testing or indicating with aligning, guiding, or instruction
    • Y10T29/4978—Assisting assembly or disassembly
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49815—Disassembling
    • Y10T29/49817—Disassembling with other than ancillary treating or assembling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining
    • Y10T29/49895—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"]
    • Y10T29/49899—Associating parts by use of aligning means [e.g., use of a drift pin or a "fixture"] by multiple cooperating aligning means

Landscapes

  • Automatic Assembly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)

Abstract

　本設置場所での組み立て精度が高く、作業が容易な組み立て方法を提供する。主載置台（１０）に設けられた主ベース板（１１）に対し、副載置台（２０ａ～２０ｄ）に設けられた副ベース板（２１）を、仮設置場所にて位置合わせし、その状態が保存されるようにした後、主載置台（１０）と副載置台（２０ａ～２０ｄ）を分離してから本設置場所に搬送し、位置決め状態を復元する。位置合わせ作業を仮設置場所でできるので、本設置場所での作業が軽減される。また、本設置場所で微調整することができるので、位置合わせ精度が向上する。
PCT/JP2008/065243 2007-08-28 2008-08-27 ステージ装置組み立て方法 WO2009028525A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009530138A JP5061191B2 (ja) 2007-08-28 2008-08-27 ステージ装置組み立て方法
KR1020107004166A KR101203982B1 (ko) 2007-08-28 2008-08-27 스테이지 장치 조립 방법
CN2008801055273A CN101790784B (zh) 2007-08-28 2008-08-27 机台装置组装方法
US12/710,759 US8286318B2 (en) 2007-08-28 2010-02-23 Stage apparatus assembling method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007221403 2007-08-28
JP2007-221403 2007-08-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/710,759 Continuation-In-Part US8286318B2 (en) 2007-08-28 2010-02-23 Stage apparatus assembling method

Publications (1)

Publication Number Publication Date
WO2009028525A1 true WO2009028525A1 (ja) 2009-03-05

Family

ID=40387243

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065243 WO2009028525A1 (ja) 2007-08-28 2008-08-27 ステージ装置組み立て方法

Country Status (6)

Country Link
US (1) US8286318B2 (ja)
JP (1) JP5061191B2 (ja)
KR (1) KR101203982B1 (ja)
CN (1) CN101790784B (ja)
TW (1) TWI385049B (ja)
WO (1) WO2009028525A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112377971A (zh) * 2020-11-16 2021-02-19 湖南瑞奇电器有限公司 一种具有辅助烘干功能的取暖桌

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104070415A (zh) * 2014-06-19 2014-10-01 成都飞机工业（集团）有限责任公司 一种机床联动偏差预警装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11340692A (ja) * 1998-05-27 1999-12-10 Tenryuu Technics:Kk 電子部品装着装置およびその方法
JP2000167734A (ja) * 1998-12-07 2000-06-20 Shinx Ltd 加工機械などの組付け構造
JP2004172500A (ja) * 2002-11-21 2004-06-17 Fuji Mach Mfg Co Ltd 電子回路部品装着システム
JP2008093651A (ja) * 2006-09-12 2008-04-24 Shibaura Mechatronics Corp ペースト塗布装置
JP2008246653A (ja) * 2007-03-30 2008-10-16 Sumitomo Heavy Ind Ltd 石材連結構造及び石材連結方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3841315B2 (ja) * 1995-12-26 2006-11-01 キヤノン株式会社 プリント装置およびこの装置に用いられるプリント方法
US6652054B2 (en) * 2000-02-01 2003-11-25 Aprion Digital Ltd. Table and a motion unit for adjusting the height thereof
US6782596B2 (en) * 2001-02-13 2004-08-31 University Of North Carolina At Charlotte Fiducial calibration systems and methods for manufacturing, inspection, and assembly
KR100600860B1 (ko) * 2004-05-20 2006-07-14 (주)브레인유니온시스템 액상형 물질 도포기의 승강 장치
JP4413789B2 (ja) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP4554397B2 (ja) * 2005-02-23 2010-09-29 東京エレクトロン株式会社 ステージ装置および塗布処理装置
JP2007073688A (ja) 2005-09-06 2007-03-22 Shinko Electric Co Ltd Ｘｙステージ装置及びその製造方法
WO2007105455A1 (ja) * 2006-02-28 2007-09-20 Ulvac, Inc. ステージ装置
KR100969554B1 (ko) * 2006-03-06 2010-07-12 가부시키가이샤 알박 스테이지 장치
JP4086879B2 (ja) * 2006-04-19 2008-05-14 シャープ株式会社 液滴塗布装置
EP2068349A4 (en) * 2006-09-29 2011-03-30 Nikon Corp STAGE EQUIPMENT AND EXPOSURE DEVICE
JPWO2009028527A1 (ja) * 2007-08-28 2010-12-02 株式会社アルバック ステージ装置
JP5186501B2 (ja) * 2007-08-28 2013-04-17 株式会社アルバック ステージ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11340692A (ja) * 1998-05-27 1999-12-10 Tenryuu Technics:Kk 電子部品装着装置およびその方法
JP2000167734A (ja) * 1998-12-07 2000-06-20 Shinx Ltd 加工機械などの組付け構造
JP2004172500A (ja) * 2002-11-21 2004-06-17 Fuji Mach Mfg Co Ltd 電子回路部品装着システム
JP2008093651A (ja) * 2006-09-12 2008-04-24 Shibaura Mechatronics Corp ペースト塗布装置
JP2008246653A (ja) * 2007-03-30 2008-10-16 Sumitomo Heavy Ind Ltd 石材連結構造及び石材連結方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112377971A (zh) * 2020-11-16 2021-02-19 湖南瑞奇电器有限公司 一种具有辅助烘干功能的取暖桌
CN112377971B (zh) * 2020-11-16 2022-02-22 湖南瑞奇电器有限公司 一种具有辅助烘干功能的取暖桌

Also Published As

Publication number Publication date
JP5061191B2 (ja) 2012-10-31
US20100146762A1 (en) 2010-06-17
CN101790784A (zh) 2010-07-28
CN101790784B (zh) 2013-03-27
TW200927362A (en) 2009-07-01
US8286318B2 (en) 2012-10-16
KR101203982B1 (ko) 2012-11-23
TWI385049B (zh) 2013-02-11
JPWO2009028525A1 (ja) 2010-12-02
KR20100050519A (ko) 2010-05-13

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