WO2009028527A1 - ステージ装置 - Google Patents

ステージ装置 Download PDF

Info

Publication number
WO2009028527A1
WO2009028527A1 PCT/JP2008/065245 JP2008065245W WO2009028527A1 WO 2009028527 A1 WO2009028527 A1 WO 2009028527A1 JP 2008065245 W JP2008065245 W JP 2008065245W WO 2009028527 A1 WO2009028527 A1 WO 2009028527A1
Authority
WO
WIPO (PCT)
Prior art keywords
main
stage apparatus
auxiliary
rails
base plate
Prior art date
Application number
PCT/JP2008/065245
Other languages
English (en)
French (fr)
Inventor
Yasuzo Tanaka
Junpei Yuyama
Mitsuru Yahagi
Hirofumi Minami
Makoto Takahashi
Shinya Ito
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to KR1020107004167A priority Critical patent/KR101204067B1/ko
Priority to CN200880105619.1A priority patent/CN101790785B/zh
Priority to JP2009530140A priority patent/JPWO2009028527A1/ja
Publication of WO2009028527A1 publication Critical patent/WO2009028527A1/ja
Priority to US12/712,579 priority patent/US8100524B2/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H1/00—Supports or magazines for piles from which articles are to be separated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J11/00—Devices or arrangements  of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
    • B41J11/02—Platens
    • B41J11/06—Flat page-size platens or smaller flat platens having a greater size than line-size platens
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2405/00—Parts for holding the handled material
    • B65H2405/30—Other features of supports for sheets
    • B65H2405/31—Supports for sheets fully removable from the handling machine, e.g. cassette
    • B65H2405/312—Trolley, cart, i.e. support movable on the floor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00—Handled material; Storage means
    • B65H2701/10—Handled articles or webs
    • B65H2701/11—Dimensional aspect of article or web
    • B65H2701/113—Size
    • B65H2701/1131—Size of sheets
    • B65H2701/11312—Size of sheets large formats, i.e. above A3
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65H—HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2801/00—Application field
    • B65H2801/03—Image reproduction devices
    • B65H2801/15—Digital printing machines

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Automatic Assembly (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Coating Apparatus (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

　本設置場所での組み立て精度が高く、作業が容易なステージ装置を提供する。本発明のステージ装置（５）では、主ベース板（１１）上の第一、第二の主レール（１７ａ，１７ｂ）にそれぞれ接続され、第一、第二の主レール（１７ａ，１７ｂ）を延長させる副レール（１８）が、別々の副ベース板（２１）上に設けられている。従って、副ベース板（２１）を位置合わせして主ベース板（１１）に固定する際に、既に主ベース板（１１）に固定されている副ベース（２１）板の位置合わせ精度に影響が及ばない。
PCT/JP2008/065245 2007-08-28 2008-08-27 ステージ装置 WO2009028527A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020107004167A KR101204067B1 (ko) 2007-08-28 2008-08-27 스테이지 장치
CN200880105619.1A CN101790785B (zh) 2007-08-28 2008-08-27 机台装置
JP2009530140A JPWO2009028527A1 (ja) 2007-08-28 2008-08-27 ステージ装置
US12/712,579 US8100524B2 (en) 2007-08-28 2010-02-25 Stage apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-221405 2007-08-28
JP2007221405 2007-08-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/712,579 Continuation US8100524B2 (en) 2007-08-28 2010-02-25 Stage apparatus

Publications (1)

Publication Number Publication Date
WO2009028527A1 true WO2009028527A1 (ja) 2009-03-05

Family

ID=40387245

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065245 WO2009028527A1 (ja) 2007-08-28 2008-08-27 ステージ装置

Country Status (6)

Country Link
US (1) US8100524B2 (ja)
JP (1) JPWO2009028527A1 (ja)
KR (1) KR101204067B1 (ja)
CN (1) CN101790785B (ja)
TW (1) TWI406734B (ja)
WO (1) WO2009028527A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011059003A1 (ja) * 2009-11-10 2011-05-19 株式会社アルバック 検査装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009028525A1 (ja) * 2007-08-28 2009-03-05 Ulvac, Inc. ステージ装置組み立て方法
CN102529442A (zh) * 2011-12-08 2012-07-04 苏州工业园区高登威科技有限公司 可调节式打标装置
JP5939089B2 (ja) * 2012-08-31 2016-06-22 セイコーエプソン株式会社 インクジェット記録装置
TWI804412B (zh) * 2022-08-09 2023-06-01 京元電子股份有限公司 機台對接調整裝置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07124831A (ja) * 1993-06-11 1995-05-16 Mori Seiki Co Ltd リニアガイド装置
JP2004209411A (ja) * 2003-01-06 2004-07-29 Seiko Epson Corp 液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2008023699A (ja) * 2007-03-27 2008-02-07 Sumitomo Heavy Ind Ltd ステージ装置
JP2008093651A (ja) * 2006-09-12 2008-04-24 Shibaura Mechatronics Corp ペースト塗布装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3562736B2 (ja) * 1995-06-08 2004-09-08 東京エレクトロン株式会社 処理装置およびその製造方法
US6652054B2 (en) * 2000-02-01 2003-11-25 Aprion Digital Ltd. Table and a motion unit for adjusting the height thereof
JP2003121572A (ja) * 2001-10-10 2003-04-23 Fuji Photo Optical Co Ltd 載物ステージ
CN2693441Y (zh) * 2004-04-02 2005-04-20 青岛地恩地机电科技股份有限公司 分体式木工车床
JP2007073688A (ja) * 2005-09-06 2007-03-22 Shinko Electric Co Ltd Ｘｙステージ装置及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07124831A (ja) * 1993-06-11 1995-05-16 Mori Seiki Co Ltd リニアガイド装置
JP2004209411A (ja) * 2003-01-06 2004-07-29 Seiko Epson Corp 液滴吐出装置、電気光学装置、電気光学装置の製造方法および電子機器
JP2008093651A (ja) * 2006-09-12 2008-04-24 Shibaura Mechatronics Corp ペースト塗布装置
JP2008023699A (ja) * 2007-03-27 2008-02-07 Sumitomo Heavy Ind Ltd ステージ装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011059003A1 (ja) * 2009-11-10 2011-05-19 株式会社アルバック 検査装置
JPWO2011059003A1 (ja) * 2009-11-10 2013-04-04 株式会社アルバック 検査装置

Also Published As

Publication number Publication date
TW200927364A (en) 2009-07-01
KR20100050520A (ko) 2010-05-13
TWI406734B (zh) 2013-09-01
CN101790785B (zh) 2013-02-06
JPWO2009028527A1 (ja) 2010-12-02
US20100177153A1 (en) 2010-07-15
US8100524B2 (en) 2012-01-24
CN101790785A (zh) 2010-07-28
KR101204067B1 (ko) 2012-11-23

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