TW200720453A - Apparatus and method of vacuum deposition - Google Patents
Apparatus and method of vacuum depositionInfo
- Publication number
- TW200720453A TW200720453A TW094141482A TW94141482A TW200720453A TW 200720453 A TW200720453 A TW 200720453A TW 094141482 A TW094141482 A TW 094141482A TW 94141482 A TW94141482 A TW 94141482A TW 200720453 A TW200720453 A TW 200720453A
- Authority
- TW
- Taiwan
- Prior art keywords
- nozzle
- vacuum deposition
- windpipe
- worktable
- holes
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
This present invention relates to a vacuum deposition apparatus. The apparatus includes a vacuum chamber, a nozzle, a windpipe, a diffusion device and a worktable. The worktable and the nozzle are arranged in the vacuum chamber and opposite to each other. The nozzle has a plurality of holes. The windpipe connects to the holes of the nozzle, and the diffusion device is setting on the nozzle. The present invention also relates to a vacuum deposition method that uses the above-mentioned vacuum deposition apparatus.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94141482A TWI306903B (en) | 2005-11-25 | 2005-11-25 | Apparatus and method of vacuum deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94141482A TWI306903B (en) | 2005-11-25 | 2005-11-25 | Apparatus and method of vacuum deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200720453A true TW200720453A (en) | 2007-06-01 |
TWI306903B TWI306903B (en) | 2009-03-01 |
Family
ID=45071485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94141482A TWI306903B (en) | 2005-11-25 | 2005-11-25 | Apparatus and method of vacuum deposition |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI306903B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI479040B (en) * | 2012-12-05 | 2015-04-01 | Nat Inst Chung Shan Science & Technology | Evaporating device with linear spray head |
TWI496928B (en) * | 2010-06-21 | 2015-08-21 | Semes Co Ltd | Thin film vapor deposition apparatus |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI582251B (en) | 2014-10-31 | 2017-05-11 | 財團法人工業技術研究院 | Evaporation system and evaporation method |
CN106676476B (en) * | 2015-11-11 | 2019-10-25 | 清华大学 | Vacuum deposition method |
CN106676478B (en) * | 2015-11-11 | 2019-09-17 | 清华大学 | Vacuum deposition apparatus |
-
2005
- 2005-11-25 TW TW94141482A patent/TWI306903B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI496928B (en) * | 2010-06-21 | 2015-08-21 | Semes Co Ltd | Thin film vapor deposition apparatus |
TWI479040B (en) * | 2012-12-05 | 2015-04-01 | Nat Inst Chung Shan Science & Technology | Evaporating device with linear spray head |
Also Published As
Publication number | Publication date |
---|---|
TWI306903B (en) | 2009-03-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |