WO2009028178A1 - 産業用ロボット - Google Patents

産業用ロボット Download PDF

Info

Publication number
WO2009028178A1
WO2009028178A1 PCT/JP2008/002319 JP2008002319W WO2009028178A1 WO 2009028178 A1 WO2009028178 A1 WO 2009028178A1 JP 2008002319 W JP2008002319 W JP 2008002319W WO 2009028178 A1 WO2009028178 A1 WO 2009028178A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
hand
industrial robot
holding
pivot center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/002319
Other languages
English (en)
French (fr)
Inventor
Takayuki Yazawa
Hiroto Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Instruments Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to CN200880105098.XA priority Critical patent/CN101790441A/zh
Priority to US12/675,807 priority patent/US8882430B2/en
Publication of WO2009028178A1 publication Critical patent/WO2009028178A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/02—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Program-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Program-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

産業用ロボット（１）は、複数の搬送対象物（２）を搭載する第１ハンド（３）、第２ハンド（４）と、第１ハンド（３）、第２ハンド（４）をそれぞれ保持する第１アーム（５）、第２アーム（６）と、第１アーム（５）および第２アーム（６）を保持する共通アーム（７）と、共通アーム（７）に対する第１アーム（５）、第２アーム（６）のそれぞれの回動中心となる第１回動中心部（３１）、第２回動中心部（４１）と、共通アーム（７）を保持する本体部とを備えている。第１ハンド（３）と第２ハンド（４）とはロボット（１）の旋回動作時に重なるように配置され、第１ハンド（３）および第２ハンド（４）には、第１回動中心部（３１）および第２回動中心部（４１）との干渉を防止するための逃げ部（４３、４４）が形成されている。これにより、産業用ロボット（１）は、旋回径を小さくしつつ、１回の搬入動作あるいは搬出動作で複数の搬送対象物（２）を搬送することが可能となる。
PCT/JP2008/002319 2007-08-31 2008-08-27 産業用ロボット Ceased WO2009028178A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880105098.XA CN101790441A (zh) 2007-08-31 2008-08-27 工业用机器人
US12/675,807 US8882430B2 (en) 2007-08-31 2008-08-27 Industrial robot

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-225687 2007-08-31
JP2007225687A JP5102564B2 (ja) 2007-08-31 2007-08-31 産業用ロボット

Publications (1)

Publication Number Publication Date
WO2009028178A1 true WO2009028178A1 (ja) 2009-03-05

Family

ID=40386918

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/002319 Ceased WO2009028178A1 (ja) 2007-08-31 2008-08-27 産業用ロボット

Country Status (6)

Country Link
US (1) US8882430B2 (ja)
JP (1) JP5102564B2 (ja)
KR (1) KR101574357B1 (ja)
CN (2) CN104647368B (ja)
TW (1) TWI462812B (ja)
WO (1) WO2009028178A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160007420A (ko) 2014-07-10 2016-01-20 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2008316467A1 (en) * 2007-10-24 2009-04-30 Oc Oerlikon Balzers Ag Method for manufacturing workpieces and apparatus
WO2012125572A2 (en) 2011-03-11 2012-09-20 Brooks Automation, Inc. Substrate processing tool
JP5818345B2 (ja) * 2011-04-27 2015-11-18 日本電産サンキョー株式会社 回転機構、産業用ロボットおよび回転体の原点位置復帰方法
JP5871550B2 (ja) * 2011-10-07 2016-03-01 株式会社アルバック 搬送ロボット及び真空装置
CN104380452B (zh) * 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
JP2014093420A (ja) * 2012-11-02 2014-05-19 Toyota Motor Corp ウェハを支持ディスクに接着する治具、および、それを用いた半導体装置の製造方法
CN103802100B (zh) * 2012-11-08 2016-06-01 沈阳新松机器人自动化股份有限公司 机械手
CN103802090A (zh) * 2012-11-08 2014-05-21 沈阳新松机器人自动化股份有限公司 一种双臂搬运机械手
CN103802099A (zh) * 2012-11-08 2014-05-21 沈阳新松机器人自动化股份有限公司 一种机械手机构
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
JP6487267B2 (ja) * 2015-04-27 2019-03-20 日本電産サンキョー株式会社 製造システム
JP6487266B2 (ja) * 2015-04-27 2019-03-20 日本電産サンキョー株式会社 製造システム
KR102139934B1 (ko) * 2018-02-21 2020-08-03 피에스케이홀딩스 (주) 기판 처리 장치, 및 이를 이용하는 기판 처리 방법
KR101931290B1 (ko) 2018-09-12 2018-12-20 주식회사 싸이맥스 7축 이송로봇
JP6880519B2 (ja) * 2019-11-11 2021-06-02 株式会社安川電機 ロボットシステム、ロボットの制御方法、半導体製造システム
US12283508B2 (en) * 2020-04-07 2025-04-22 Kawasaki Jukogyo Kabushiki Kaisha In-vacuum twin-arm robot
JP2023054397A (ja) * 2021-10-04 2023-04-14 日本電産サンキョー株式会社 産業用ロボット
KR102824300B1 (ko) * 2022-02-17 2025-06-25 니덱 인스트루먼츠 가부시키가이샤 수평 다관절 로봇
JP2025014358A (ja) 2023-07-18 2025-01-30 ニデックインスツルメンツ株式会社 産業用ロボットの補正値算出方法および産業用ロボットの制御方法
JP2025014359A (ja) * 2023-07-18 2025-01-30 ニデックインスツルメンツ株式会社 産業用ロボットおよび産業用ロボットの制御方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04258148A (ja) * 1991-02-12 1992-09-14 Tokyo Electron Ltd 板状体の搬送装置
JPH07142552A (ja) * 1993-11-20 1995-06-02 Tokyo Electron Ltd 搬送アーム装置及びこれを用いた処理室集合装置
JPH11325102A (ja) * 1998-05-19 1999-11-26 Yasuhito Itagaki ショックリミッターおよびそれを用いた搬送ロボット
JP2001185596A (ja) * 1999-12-22 2001-07-06 Jel:Kk 搬送アーム
JP2002504744A (ja) * 1997-11-28 2002-02-12 マットソン テクノロジイ インコーポレイテッド 真空処理を行う非加工物を、低汚染かつ高処理能力で取扱うためのシステムおよび方法
JP2002222845A (ja) * 2001-01-24 2002-08-09 Meidensha Corp 基板搬送用ロボット
JP2002299413A (ja) * 2001-03-30 2002-10-11 Shibaura Mechatronics Corp ロボット装置及び処理装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2580489B2 (ja) 1993-11-04 1997-02-12 株式会社ハイテック・プロダクト 多関節搬送装置，その制御方法及び半導体製造装置
JPH10163296A (ja) * 1996-11-27 1998-06-19 Rootsue Kk 基板搬送装置
JPH11188671A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
TW471084B (en) * 1999-12-22 2002-01-01 Jel Kk Transfer arm
US20030029479A1 (en) * 2001-08-08 2003-02-13 Dainippon Screen Mfg. Co, Ltd. Substrate cleaning apparatus and method
CN100461363C (zh) * 2004-12-10 2009-02-11 株式会社爱发科 搬运机械手以及搬运装置
JP5004612B2 (ja) * 2007-02-15 2012-08-22 大日本スクリーン製造株式会社 基板処理装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04258148A (ja) * 1991-02-12 1992-09-14 Tokyo Electron Ltd 板状体の搬送装置
JPH07142552A (ja) * 1993-11-20 1995-06-02 Tokyo Electron Ltd 搬送アーム装置及びこれを用いた処理室集合装置
JP2002504744A (ja) * 1997-11-28 2002-02-12 マットソン テクノロジイ インコーポレイテッド 真空処理を行う非加工物を、低汚染かつ高処理能力で取扱うためのシステムおよび方法
JPH11325102A (ja) * 1998-05-19 1999-11-26 Yasuhito Itagaki ショックリミッターおよびそれを用いた搬送ロボット
JP2001185596A (ja) * 1999-12-22 2001-07-06 Jel:Kk 搬送アーム
JP2002222845A (ja) * 2001-01-24 2002-08-09 Meidensha Corp 基板搬送用ロボット
JP2002299413A (ja) * 2001-03-30 2002-10-11 Shibaura Mechatronics Corp ロボット装置及び処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20160007420A (ko) 2014-07-10 2016-01-20 니혼 덴산 산쿄 가부시키가이샤 산업용 로봇

Also Published As

Publication number Publication date
JP5102564B2 (ja) 2012-12-19
US8882430B2 (en) 2014-11-11
JP2009056545A (ja) 2009-03-19
CN104647368A (zh) 2015-05-27
CN101790441A (zh) 2010-07-28
TWI462812B (zh) 2014-12-01
KR20100058515A (ko) 2010-06-03
TW200914219A (en) 2009-04-01
US20100284770A1 (en) 2010-11-11
KR101574357B1 (ko) 2015-12-03
CN104647368B (zh) 2017-04-19

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