WO2008146736A1 - データ表示装置、データ表示方法、プログラム - Google Patents

データ表示装置、データ表示方法、プログラム Download PDF

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Publication number
WO2008146736A1
WO2008146736A1 PCT/JP2008/059534 JP2008059534W WO2008146736A1 WO 2008146736 A1 WO2008146736 A1 WO 2008146736A1 JP 2008059534 W JP2008059534 W JP 2008059534W WO 2008146736 A1 WO2008146736 A1 WO 2008146736A1
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WO
WIPO (PCT)
Prior art keywords
displayed
display
data
range
data display
Prior art date
Application number
PCT/JP2008/059534
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English (en)
French (fr)
Inventor
Kazuhiro Kawamura
Original Assignee
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Limited filed Critical Tokyo Electron Limited
Priority to JP2009516295A priority Critical patent/JP4808809B2/ja
Priority to KR1020097025371A priority patent/KR101047013B1/ko
Priority to CN2008800170166A priority patent/CN101681806B/zh
Publication of WO2008146736A1 publication Critical patent/WO2008146736A1/ja
Priority to US12/626,201 priority patent/US20100214296A1/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/048—Interaction techniques based on graphical user interfaces [GUI]
    • G06F3/0481—Interaction techniques based on graphical user interfaces [GUI] based on specific properties of the displayed interaction object or a metaphor-based environment, e.g. interaction with desktop elements like windows or icons, or assisted by a cursor's changing behaviour or appearance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2218/00—Aspects of pattern recognition specially adapted for signal processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Data Mining & Analysis (AREA)
  • Computer Hardware Design (AREA)
  • Evolutionary Biology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Artificial Intelligence (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Evolutionary Computation (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • User Interface Of Digital Computer (AREA)
  • General Factory Administration (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Controls And Circuits For Display Device (AREA)

Abstract

【課題】従来のデータ表示装置等においては、半導体プロセスから測定されたデータ等の時系列のデータを、適切に表示することができないという課題があった。 【解決手段】半導体プロセスの処理時の状態に関する時系列データである複数のプロセス関連データを、時間軸と対応付けて第一の表示幅で表示する第一表示部１３０７と、第一表示部１３０７が表示しているプロセス関連データ内の一部の範囲である表示対象範囲の指定を受け付ける範囲指定受付部１３０８と、複数のプロセス関連データのそれぞれから、表示対象範囲に対応する期間である表示期間内のプロセス関連データを取得し、時間軸と対応付けて、前記表示対象範囲の幅よりも広い第二の表示幅で表示する第二表示部１３１０と、を具備し、第一表示部１３０７が表示対象範囲を示す情報を第一表示部１３０７が表示する１以上のプロセス関連データと対応付けて表示するようにした。
PCT/JP2008/059534 2007-05-29 2008-05-23 データ表示装置、データ表示方法、プログラム WO2008146736A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009516295A JP4808809B2 (ja) 2007-05-29 2008-05-23 データ表示装置、データ表示方法、プログラム
KR1020097025371A KR101047013B1 (ko) 2007-05-29 2008-05-23 데이터 표시 장치, 데이터 표시 방법 및, 프로그램이 기록된 기록 매체
CN2008800170166A CN101681806B (zh) 2007-05-29 2008-05-23 数据显示装置、数据显示方法、程序
US12/626,201 US20100214296A1 (en) 2007-05-29 2009-11-25 Data display apparatus, data display method and program

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007141336 2007-05-29
JP2007-141336 2007-05-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/626,201 Continuation-In-Part US20100214296A1 (en) 2007-05-29 2009-11-25 Data display apparatus, data display method and program

Publications (1)

Publication Number Publication Date
WO2008146736A1 true WO2008146736A1 (ja) 2008-12-04

Family

ID=40074986

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/059534 WO2008146736A1 (ja) 2007-05-29 2008-05-23 データ表示装置、データ表示方法、プログラム

Country Status (6)

Country Link
US (1) US20100214296A1 (ja)
JP (1) JP4808809B2 (ja)
KR (1) KR101047013B1 (ja)
CN (1) CN101681806B (ja)
TW (1) TW200915383A (ja)
WO (1) WO2008146736A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011048961A1 (ja) * 2009-10-22 2011-04-28 株式会社アルバック 真空処理装置、グラフ表示方法
JP2011090529A (ja) * 2009-10-22 2011-05-06 Ulvac Japan Ltd 真空処理装置、グラフ線表示方法
JP2011090528A (ja) * 2009-10-22 2011-05-06 Ulvac Japan Ltd 真空処理装置、グラフ線表示方法
WO2011099458A1 (ja) * 2010-02-09 2011-08-18 株式会社日立国際電気 基板処理システム及び群管理装置
WO2012035965A1 (ja) * 2010-09-17 2012-03-22 株式会社日立国際電気 基板処理システム及び基板処理装置の表示方法
JP2017083985A (ja) * 2015-10-26 2017-05-18 株式会社Ｓｃｒｅｅｎホールディングス 時系列データ処理方法、時系列データ処理プログラム、および、時系列データ処理装置
US10621947B2 (en) 2015-12-21 2020-04-14 Nec Corporation Display control apparatus, display control method, and recording medium on which display control program is recorded
US10949318B2 (en) 2015-12-21 2021-03-16 Nec Corporation Display control apparatus, display control method, and recording medium on which display control program is recorded
JP2022116346A (ja) * 2018-05-18 2022-08-09 キヤノン電子株式会社 加工システム、加工機、加工機の制御方法及びプログラム
JP7215641B1 (ja) * 2021-10-18 2023-01-31 住友電気工業株式会社 解析装置、解析方法、加工システム、およびプログラム

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JP5796994B2 (ja) * 2010-06-08 2015-10-21 株式会社日立国際電気 処理システム、基板処理装置、処理システムのデータ処理方法、収集ユニット及び記録媒体並びに半導体装置の製造方法
JP6001234B2 (ja) * 2010-09-13 2016-10-05 株式会社日立国際電気 基板処理システム、基板処理装置、データ処理方法およびプログラム
US9158614B2 (en) * 2010-10-20 2015-10-13 Nec Corporation Service management device, display method, and information storage medium
JP6171152B2 (ja) * 2012-05-28 2017-08-02 ピーアンドダブリューソリューションズ株式会社 情報処理装置、方法及びプログラム
JP2014142822A (ja) * 2013-01-24 2014-08-07 Azbil Corp データ作成装置および方法
US9405755B1 (en) 2013-10-03 2016-08-02 Initial State Technologies, Inc. Apparatus and method for processing log file data
US9405651B1 (en) * 2013-10-03 2016-08-02 Initial State Technologies, Inc. Apparatus and method for processing log file data
US20150235395A1 (en) * 2014-02-19 2015-08-20 Mckesson Financial Holdings Method And Apparatus For Displaying One Or More Waveforms
US20150235394A1 (en) * 2014-02-19 2015-08-20 Mckesson Financial Holdings Method And Apparatus For Displaying One Or More Waveforms
US9646395B2 (en) 2014-02-27 2017-05-09 Change Healthcare Llc Method and apparatus for comparing portions of a waveform
US9836817B2 (en) * 2014-06-05 2017-12-05 General Electric Company Synchronized zooming across multiple plots
CN109254985A (zh) * 2017-07-11 2019-01-22 阿里巴巴集团控股有限公司 数据库的数据展示方法及装置、电子设备

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Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102576658A (zh) * 2009-10-22 2012-07-11 株式会社爱发科 真空处理装置、图表显示方法
JP2011090529A (ja) * 2009-10-22 2011-05-06 Ulvac Japan Ltd 真空処理装置、グラフ線表示方法
JP2011090528A (ja) * 2009-10-22 2011-05-06 Ulvac Japan Ltd 真空処理装置、グラフ線表示方法
WO2011048961A1 (ja) * 2009-10-22 2011-04-28 株式会社アルバック 真空処理装置、グラフ表示方法
TWI474143B (zh) * 2010-02-09 2015-02-21 Hitachi Int Electric Inc 基板處理系統及其資料處理方法、群管理裝置及其資料處理方法、半導體處理裝置之製造方法暨電腦可讀取記錄媒體
WO2011099458A1 (ja) * 2010-02-09 2011-08-18 株式会社日立国際電気 基板処理システム及び群管理装置
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WO2012035965A1 (ja) * 2010-09-17 2012-03-22 株式会社日立国際電気 基板処理システム及び基板処理装置の表示方法
JP2017083985A (ja) * 2015-10-26 2017-05-18 株式会社Ｓｃｒｅｅｎホールディングス 時系列データ処理方法、時系列データ処理プログラム、および、時系列データ処理装置
US10621947B2 (en) 2015-12-21 2020-04-14 Nec Corporation Display control apparatus, display control method, and recording medium on which display control program is recorded
US10949318B2 (en) 2015-12-21 2021-03-16 Nec Corporation Display control apparatus, display control method, and recording medium on which display control program is recorded
JP2022116346A (ja) * 2018-05-18 2022-08-09 キヤノン電子株式会社 加工システム、加工機、加工機の制御方法及びプログラム
JP7433366B2 (ja) 2018-05-18 2024-02-19 キヤノン電子株式会社 加工システム、加工機、加工機の制御方法及びプログラム
JP7215641B1 (ja) * 2021-10-18 2023-01-31 住友電気工業株式会社 解析装置、解析方法、加工システム、およびプログラム

Also Published As

Publication number Publication date
KR101047013B1 (ko) 2011-07-06
CN101681806B (zh) 2012-03-28
JPWO2008146736A1 (ja) 2010-08-19
JP4808809B2 (ja) 2011-11-02
US20100214296A1 (en) 2010-08-26
KR20100005159A (ko) 2010-01-13
TW200915383A (en) 2009-04-01
CN101681806A (zh) 2010-03-24

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