WO2008142992A1 - 単結晶の製造方法 - Google Patents
単結晶の製造方法 Download PDFInfo
- Publication number
- WO2008142992A1 WO2008142992A1 PCT/JP2008/058482 JP2008058482W WO2008142992A1 WO 2008142992 A1 WO2008142992 A1 WO 2008142992A1 JP 2008058482 W JP2008058482 W JP 2008058482W WO 2008142992 A1 WO2008142992 A1 WO 2008142992A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- increase
- single crystal
- evaporation rate
- dopant
- chamber
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
- C30B15/04—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt adding doping materials, e.g. for n-p-junction
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/515,725 US8580032B2 (en) | 2007-05-10 | 2008-05-07 | Method for manufacturing single crystal |
DE112008000034.4T DE112008000034B4 (de) | 2007-05-10 | 2008-05-07 | Verfahren zum Herstellen eines Einkristalls |
US14/046,493 US8852340B2 (en) | 2007-05-10 | 2013-10-04 | Method for manufacturing single crystal |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-125847 | 2007-05-10 | ||
JP2007125847A JP5118386B2 (ja) | 2007-05-10 | 2007-05-10 | 単結晶の製造方法 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/515,725 A-371-Of-International US8580032B2 (en) | 2007-05-10 | 2008-05-07 | Method for manufacturing single crystal |
US14/046,493 Division US8852340B2 (en) | 2007-05-10 | 2013-10-04 | Method for manufacturing single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008142992A1 true WO2008142992A1 (ja) | 2008-11-27 |
Family
ID=40031707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/058482 WO2008142992A1 (ja) | 2007-05-10 | 2008-05-07 | 単結晶の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US8580032B2 (ja) |
JP (1) | JP5118386B2 (ja) |
DE (1) | DE112008000034B4 (ja) |
WO (1) | WO2008142992A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5118386B2 (ja) * | 2007-05-10 | 2013-01-16 | Sumco Techxiv株式会社 | 単結晶の製造方法 |
JP5067406B2 (ja) * | 2009-08-26 | 2012-11-07 | 信越半導体株式会社 | シリコン単結晶の製造方法及びシリコン単結晶製造装置 |
JP5170061B2 (ja) * | 2009-11-02 | 2013-03-27 | 信越半導体株式会社 | 抵抗率計算プログラム及び単結晶の製造方法 |
JP5595318B2 (ja) * | 2011-03-29 | 2014-09-24 | グローバルウェーハズ・ジャパン株式会社 | 単結晶引上装置及び単結晶引き上げ方法 |
KR101390797B1 (ko) * | 2012-01-05 | 2014-05-02 | 주식회사 엘지실트론 | 실리콘 단결정 성장 방법 |
JP2016503964A (ja) * | 2012-12-31 | 2016-02-08 | エムイーエムシー・エレクトロニック・マテリアルズ・ソシエタ・ペル・アチオニMEMC Electronic Materials, SpA | インジウムドープシリコンウェハおよびそれを用いた太陽電池セル |
WO2018159108A1 (ja) * | 2017-02-28 | 2018-09-07 | 株式会社Sumco | シリコン単結晶インゴットの製造方法およびシリコン単結晶インゴット |
JP7080017B2 (ja) | 2017-04-25 | 2022-06-03 | 株式会社Sumco | n型シリコン単結晶のインゴット、シリコンウェーハ、およびエピタキシャルシリコンウェーハ |
JP6881560B1 (ja) * | 2019-12-24 | 2021-06-02 | 株式会社Sumco | シリコン単結晶の製造方法、シリコン単結晶 |
JP7272343B2 (ja) * | 2020-12-01 | 2023-05-12 | 株式会社Sumco | n型シリコン単結晶の製造方法 |
CN112981520A (zh) * | 2021-01-08 | 2021-06-18 | 隆基绿能科技股份有限公司 | 一种单晶硅拉晶工艺方法 |
CN115341268A (zh) * | 2021-05-13 | 2022-11-15 | 内蒙古中环协鑫光伏材料有限公司 | 一种自动控制单晶硅电阻率的方法 |
CN113564693B (zh) * | 2021-08-02 | 2022-09-27 | 宁夏中欣晶圆半导体科技有限公司 | 低电阻率重掺砷硅单晶生产方法 |
CN113584585B (zh) * | 2021-08-05 | 2022-09-27 | 宁夏中欣晶圆半导体科技有限公司 | 能够降低头部电阻率的重掺As硅单晶生产方法 |
CN114717647A (zh) * | 2022-04-06 | 2022-07-08 | 广东高景太阳能科技有限公司 | 一种晶棒的掺杂剂添加量的确定方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0570279A (ja) * | 1991-09-17 | 1993-03-23 | Nippon Steel Corp | シリコン単結晶の製造方法 |
JPH07232994A (ja) * | 1993-12-28 | 1995-09-05 | Res Dev Corp Of Japan | 単結晶引上げ用Si融液の調整方法 |
JPH09227275A (ja) * | 1996-02-28 | 1997-09-02 | Sumitomo Sitix Corp | ドープ剤添加装置 |
JP2000233994A (ja) * | 1999-02-10 | 2000-08-29 | Mitsubishi Materials Silicon Corp | シリコン単結晶の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0777995B2 (ja) * | 1989-11-16 | 1995-08-23 | 信越半導体株式会社 | 単結晶の比抵抗コントロール方法 |
JPH0777994B2 (ja) | 1989-11-16 | 1995-08-23 | 信越半導体株式会社 | 単結晶の酸素濃度コントロール方法及び装置 |
US5292487A (en) * | 1991-04-16 | 1994-03-08 | Sumitomo Electric Industries, Ltd. | Czochralski method using a member for intercepting radiation from raw material molten solution and apparatus therefor |
DE69428302T2 (de) * | 1993-03-29 | 2002-07-04 | Japan Res Dev Corp | Regulierung der Sauerstoffkonzentration in einem Einkristall, der aus einer ein Gruppe V Element enthaltenden Schmelze gezogenen wird. |
US5477805A (en) | 1993-12-28 | 1995-12-26 | Research Development Corporation Of Japan | Preparation of silicon melt for use in pull method of manufacturing single crystal |
US5904768A (en) * | 1996-10-15 | 1999-05-18 | Memc Electronic Materials, Inc. | Process for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic |
US6592662B2 (en) | 2000-02-28 | 2003-07-15 | Shin-Etsu Handotai Co., Ltd. | Method for preparing silicon single crystal and silicon single crystal |
DE10250822B4 (de) | 2002-10-31 | 2006-09-28 | Siltronic Ag | Verfahren zur Herstellung eines mit leichtflüchtigem Fremdstoff dotierten Einkristalls aus Silicium |
JP4813313B2 (ja) * | 2006-09-29 | 2011-11-09 | Sumco Techxiv株式会社 | シリコン単結晶引上げ装置及び該装置に使用される黒鉛部材並びに黒鉛部材の劣化防止方法 |
JP5118386B2 (ja) * | 2007-05-10 | 2013-01-16 | Sumco Techxiv株式会社 | 単結晶の製造方法 |
-
2007
- 2007-05-10 JP JP2007125847A patent/JP5118386B2/ja active Active
-
2008
- 2008-05-07 US US12/515,725 patent/US8580032B2/en active Active
- 2008-05-07 DE DE112008000034.4T patent/DE112008000034B4/de active Active
- 2008-05-07 WO PCT/JP2008/058482 patent/WO2008142992A1/ja active Application Filing
-
2013
- 2013-10-04 US US14/046,493 patent/US8852340B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0570279A (ja) * | 1991-09-17 | 1993-03-23 | Nippon Steel Corp | シリコン単結晶の製造方法 |
JPH07232994A (ja) * | 1993-12-28 | 1995-09-05 | Res Dev Corp Of Japan | 単結晶引上げ用Si融液の調整方法 |
JPH09227275A (ja) * | 1996-02-28 | 1997-09-02 | Sumitomo Sitix Corp | ドープ剤添加装置 |
JP2000233994A (ja) * | 1999-02-10 | 2000-08-29 | Mitsubishi Materials Silicon Corp | シリコン単結晶の製造方法 |
Non-Patent Citations (1)
Title |
---|
HUANG X. ET AL.: "Effect of Background Gas Pressure on Evaporation of Oxides from Sb-Doped Si Melt", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 33, no. 7A, 1 July 1994 (1994-07-01), pages L902 - L904 * |
Also Published As
Publication number | Publication date |
---|---|
DE112008000034B4 (de) | 2020-02-27 |
JP5118386B2 (ja) | 2013-01-16 |
US8580032B2 (en) | 2013-11-12 |
US8852340B2 (en) | 2014-10-07 |
DE112008000034T5 (de) | 2009-08-13 |
JP2008280211A (ja) | 2008-11-20 |
US20140033967A1 (en) | 2014-02-06 |
US20100071612A1 (en) | 2010-03-25 |
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