WO2008142993A1 - 単結晶の製造方法 - Google Patents

単結晶の製造方法 Download PDF

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Publication number
WO2008142993A1
WO2008142993A1 PCT/JP2008/058483 JP2008058483W WO2008142993A1 WO 2008142993 A1 WO2008142993 A1 WO 2008142993A1 JP 2008058483 W JP2008058483 W JP 2008058483W WO 2008142993 A1 WO2008142993 A1 WO 2008142993A1
Authority
WO
WIPO (PCT)
Prior art keywords
oxygen concentration
single crystal
conditions
controlled
relationship
Prior art date
Application number
PCT/JP2008/058483
Other languages
English (en)
French (fr)
Inventor
Yasuhito Narushima
Shinichi Kawazoe
Fukuo Ogawa
Tsuneaki Tomonaga
Yasuyuki Ohta
Toshimichi Kubota
Shinsuke Nishihara
Original Assignee
Sumco Techxiv Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumco Techxiv Corporation filed Critical Sumco Techxiv Corporation
Priority to DE112008000033.6T priority Critical patent/DE112008000033B4/de
Priority to US12/515,730 priority patent/US8110042B2/en
Publication of WO2008142993A1 publication Critical patent/WO2008142993A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

　引き上げ装置（１）を利用して、チャンバ（３０）内のガス流量（Ｖ）を４０L/min～４００L/min、炉内圧力（Ｐ）を５３３２Pa～７９９８０Paに設定した条件で単結晶（６）を製造する際に、液面直上位置（Ｑ）における不活性ガスの流速が速くなるに従って単結晶（６）の酸素濃度が低下する関係に基づいて、単結晶（６）における引上所定位置の酸素濃度を制御する。このため、上述した関係に基づいて、酸素濃度を上昇させる制御を適宜実施でき、所望の酸素濃度の単結晶（６）を製造できる。また、ガス流速を比較的遅くした条件下に対応する条件で酸素濃度を制御するため、単結晶における所望の酸素濃度プロファイルと、実際の酸素濃度プロファイルと、の差異を従来の構成と比べて小さくすることができる。
PCT/JP2008/058483 2007-05-10 2008-05-07 単結晶の製造方法 WO2008142993A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112008000033.6T DE112008000033B4 (de) 2007-05-10 2008-05-07 Verfahren zum Herstellen eines Einkristalls
US12/515,730 US8110042B2 (en) 2007-05-10 2008-05-07 Method for manufacturing single crystal

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007125848A JP5172202B2 (ja) 2007-05-10 2007-05-10 単結晶の製造方法
JP2007-125848 2007-05-10

Publications (1)

Publication Number Publication Date
WO2008142993A1 true WO2008142993A1 (ja) 2008-11-27

Family

ID=40031708

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058483 WO2008142993A1 (ja) 2007-05-10 2008-05-07 単結晶の製造方法

Country Status (4)

Country Link
US (1) US8110042B2 (ja)
JP (1) JP5172202B2 (ja)
DE (1) DE112008000033B4 (ja)
WO (1) WO2008142993A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5226496B2 (ja) * 2008-12-17 2013-07-03 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 シリコン単結晶引上装置
EP2611952B1 (en) * 2010-09-03 2021-12-29 GTAT IP Holding LLC Method of preparing a silicon single crystal doped with gallium, indium or aluminum
KR101252915B1 (ko) * 2010-09-06 2013-04-09 주식회사 엘지실트론 단결정 잉곳 제조방법
KR101303422B1 (ko) * 2011-03-28 2013-09-05 주식회사 엘지실트론 단결정 잉곳의 제조방법 및 이에 의해 제조된 단결정 잉곳과 웨이퍼
DE112012003652B4 (de) * 2011-09-01 2019-11-14 Shin-Etsu Handotai Co., Ltd. Verfahren zur Herstellung eines Siliziumkristalls
KR101384060B1 (ko) 2012-08-03 2014-04-09 주식회사 엘지실트론 실리콘 단결정 잉곳 성장 방법
CN113417003A (zh) * 2021-06-22 2021-09-21 宁夏中欣晶圆半导体科技有限公司 能够降低头部氧含量的大直径单晶硅生产方法及装置
JP7359241B2 (ja) * 2022-03-15 2023-10-11 株式会社Sumco シリコン単結晶の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0570279A (ja) * 1991-09-17 1993-03-23 Nippon Steel Corp シリコン単結晶の製造方法
JP2000233994A (ja) * 1999-02-10 2000-08-29 Mitsubishi Materials Silicon Corp シリコン単結晶の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0777994B2 (ja) * 1989-11-16 1995-08-23 信越半導体株式会社 単結晶の酸素濃度コントロール方法及び装置
EP0509312B1 (en) * 1991-04-16 1995-08-23 Sumitomo Electric Industries, Limited Czochralski method using a member for intercepting radiation from raw material molten solution and apparatus therefor
JP2760932B2 (ja) * 1993-03-29 1998-06-04 科学技術振興事業団 単結晶引上げ用Ｓｉ融液の酸素濃度制御方法
DE69428302T2 (de) * 1993-03-29 2002-07-04 Kabushiki Kaisha Toshiba, Kawasaki Regulierung der Sauerstoffkonzentration in einem Einkristall, der aus einer ein Gruppe V Element enthaltenden Schmelze gezogenen wird.
US5477805A (en) * 1993-12-28 1995-12-26 Research Development Corporation Of Japan Preparation of silicon melt for use in pull method of manufacturing single crystal
JP2691393B2 (ja) 1993-12-28 1997-12-17 科学技術振興事業団 単結晶引上げ用Ｓｉ融液の調整方法
JPH09227275A (ja) 1996-02-28 1997-09-02 Sumitomo Sitix Corp ドープ剤添加装置
US5904768A (en) * 1996-10-15 1999-05-18 Memc Electronic Materials, Inc. Process for controlling the oxygen content in silicon wafers heavily doped with antimony or arsenic
TW554093B (en) * 2000-02-28 2003-09-21 Shinetsu Handotai Kk Method for preparing silicon single crystal and silicon single crystal
DE10250822B4 (de) 2002-10-31 2006-09-28 Siltronic Ag Verfahren zur Herstellung eines mit leichtflüchtigem Fremdstoff dotierten Einkristalls aus Silicium
JP4153293B2 (ja) * 2002-12-17 2008-09-24 コバレントマテリアル株式会社 シリコン単結晶引上方法
JP2007112663A (ja) * 2005-10-20 2007-05-10 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体単結晶製造装置および製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0570279A (ja) * 1991-09-17 1993-03-23 Nippon Steel Corp シリコン単結晶の製造方法
JP2000233994A (ja) * 1999-02-10 2000-08-29 Mitsubishi Materials Silicon Corp シリコン単結晶の製造方法

Also Published As

Publication number Publication date
DE112008000033B4 (de) 2020-02-27
US20100050931A1 (en) 2010-03-04
JP2008280212A (ja) 2008-11-20
DE112008000033T5 (de) 2009-10-08
JP5172202B2 (ja) 2013-03-27
US8110042B2 (en) 2012-02-07

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