WO2009057717A1 - 水素分離膜および水素分離膜の孔径制御方法 - Google Patents
水素分離膜および水素分離膜の孔径制御方法 Download PDFInfo
- Publication number
- WO2009057717A1 WO2009057717A1 PCT/JP2008/069802 JP2008069802W WO2009057717A1 WO 2009057717 A1 WO2009057717 A1 WO 2009057717A1 JP 2008069802 W JP2008069802 W JP 2008069802W WO 2009057717 A1 WO2009057717 A1 WO 2009057717A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- separation membrane
- hydrogen separation
- porous substrate
- reactor
- pore diameter
- Prior art date
Links
- 239000001257 hydrogen Substances 0.000 title abstract 4
- 229910052739 hydrogen Inorganic materials 0.000 title abstract 4
- 125000004435 hydrogen atom Chemical class [H]* 0.000 title abstract 4
- 239000012528 membrane Substances 0.000 title abstract 4
- 239000011148 porous material Substances 0.000 title abstract 4
- 238000000926 separation method Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 10
- 239000000377 silicon dioxide Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 3
- 239000001301 oxygen Substances 0.000 abstract 3
- 229910052760 oxygen Inorganic materials 0.000 abstract 3
- 239000011261 inert gas Substances 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 150000001875 compounds Chemical class 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 239000008246 gaseous mixture Substances 0.000 abstract 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 abstract 1
- 150000004756 silanes Chemical class 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/024—Oxides
- B01D71/027—Silicium oxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/10—Supported membranes; Membrane supports
- B01D69/108—Inorganic support material
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
- C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/08—Specific temperatures applied
- B01D2323/081—Heating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/22—Thermal or heat-resistance properties
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Combustion & Propulsion (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
水素分離膜は、シリカ源は少なくとも1つ以上のメトキシ基と少なくとも1つ以上の嵩高い基を有するシラン類、テトラアリールオキシシラン類からなる群から選択される少なくとも1種を用い、酸素と不活性ガスとからなる混合ガスと気化させたシリカ源とを化学蒸着法によって多孔質基材の細孔を一部閉塞するように又は狭めるようにシリカを製膜させてなる。水素分離膜の孔径制御方法は、反応器内の多孔質基材11を一定温度に保ち酸素ボンベ20から反応器の側面導入口42に酸素を供給するとともに、不活性ガスにより気化させた気化シリカ源とを側面導入口42から反応器に導入させ、他端口46より吸引し反応器内を減圧にし、多孔質基材11の片側ともう一方側とに差圧を設け多孔質基材11の細孔内にシリカ膜を製膜する。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007284764A JP4728308B2 (ja) | 2007-11-01 | 2007-11-01 | 水素分離膜および水素分離膜の製造方法 |
JP2007-284764 | 2007-11-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009057717A1 true WO2009057717A1 (ja) | 2009-05-07 |
Family
ID=40591101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/069802 WO2009057717A1 (ja) | 2007-11-01 | 2008-10-30 | 水素分離膜および水素分離膜の孔径制御方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4728308B2 (ja) |
WO (1) | WO2009057717A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105466967A (zh) * | 2014-09-23 | 2016-04-06 | 张洪 | 量热仪及其氧弹 |
EP3057678A4 (en) * | 2013-10-14 | 2017-07-12 | Melior Innovations Inc. | Gas-selective polymer derived ceramic membranes, gas separation systems, and methods |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101133099B1 (ko) | 2011-01-24 | 2012-04-04 | 한국에너지기술연구원 | 수소 분리막의 제조방법 |
JP5425839B2 (ja) * | 2011-06-03 | 2014-02-26 | 株式会社ノリタケカンパニーリミテド | ガス分離材の製造方法 |
WO2016104049A1 (ja) | 2014-12-26 | 2016-06-30 | 日本碍子株式会社 | ガス分離方法 |
JP6636948B2 (ja) | 2014-12-26 | 2020-01-29 | 日本碍子株式会社 | ガス分離方法 |
JP6732474B2 (ja) * | 2016-02-25 | 2020-07-29 | 公益財団法人地球環境産業技術研究機構 | 水素ガス分離材および膜反応器の製造方法、並びに、水素ガス分離材を用いた水素含有ガスの製造方法 |
WO2024204658A1 (ja) * | 2023-03-31 | 2024-10-03 | 学校法人工学院大学 | 分離方法及び分離装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0838864A (ja) * | 1994-07-29 | 1996-02-13 | Nok Corp | 水素分離膜およびその製造法 |
JP2005254161A (ja) * | 2004-03-12 | 2005-09-22 | Shinichi Nakao | 水素分離膜およびその製造方法 |
JP2006239663A (ja) * | 2005-03-07 | 2006-09-14 | Noritake Co Ltd | 水素ガス分離膜の製造方法 |
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2007
- 2007-11-01 JP JP2007284764A patent/JP4728308B2/ja active Active
-
2008
- 2008-10-30 WO PCT/JP2008/069802 patent/WO2009057717A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0838864A (ja) * | 1994-07-29 | 1996-02-13 | Nok Corp | 水素分離膜およびその製造法 |
JP2005254161A (ja) * | 2004-03-12 | 2005-09-22 | Shinichi Nakao | 水素分離膜およびその製造方法 |
JP2006239663A (ja) * | 2005-03-07 | 2006-09-14 | Noritake Co Ltd | 水素ガス分離膜の製造方法 |
Non-Patent Citations (4)
Title |
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KURAOKA K. ET AL.: "Methanol vapor separation through the silica membrane prepared by the CVD method with the aid of evacuation", SEPARATION AND PURIFICATION TECHNOLOGY, vol. 25, 2001, pages 161 - 166 * |
NAGAYO T. ET AL.: "Bunshi Furui Silica Maku no Saikokei Seigyo no Kento", THE SOCIETY OF CHEMICAL ENGINEERS, JAPAN KENKYU HAPPYO KOEN YOSHISHU, vol. 72, 19 March 2007 (2007-03-19), pages 750 * |
NOMURA M. ET AL.: "Ko Koritsu Suiso Seizo o Jitsugen suru Ceramic Maku no Saizensen Taiko Kakusan CVD-ho ni yoru Suiso Sentaku Toka Silica Maku Kaihatsu", CERAMICS, vol. 41, no. 11, 1 November 2006 (2006-11-01), pages 917 - 920 * |
NOMURA M. ET AL.: "Pore Size Control of a Molecular Sieve Silica Membrane Prepared by a Counter Diffusion CVD Method", JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, vol. 40, no. 13, 10 October 2007 (2007-10-10), pages 1235 - 1241 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3057678A4 (en) * | 2013-10-14 | 2017-07-12 | Melior Innovations Inc. | Gas-selective polymer derived ceramic membranes, gas separation systems, and methods |
CN105466967A (zh) * | 2014-09-23 | 2016-04-06 | 张洪 | 量热仪及其氧弹 |
CN105466967B (zh) * | 2014-09-23 | 2018-08-31 | 张洪 | 量热仪及其氧弹 |
Also Published As
Publication number | Publication date |
---|---|
JP4728308B2 (ja) | 2011-07-20 |
JP2009106912A (ja) | 2009-05-21 |
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