WO2009078124A1 - エピタキシャル成長方法 - Google Patents
エピタキシャル成長方法 Download PDFInfo
- Publication number
- WO2009078124A1 WO2009078124A1 PCT/JP2008/003359 JP2008003359W WO2009078124A1 WO 2009078124 A1 WO2009078124 A1 WO 2009078124A1 JP 2008003359 W JP2008003359 W JP 2008003359W WO 2009078124 A1 WO2009078124 A1 WO 2009078124A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- reaction chamber
- growth method
- crystal substrate
- upper wall
- epitaxial growth
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000013078 crystal Substances 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 239000012159 carrier gas Substances 0.000 abstract 2
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020107012967A KR101526895B1 (ko) | 2007-12-14 | 2008-11-18 | 에피텍셜 성장방법 |
DE112008003330.7T DE112008003330B4 (de) | 2007-12-14 | 2008-11-18 | Epitaktisches Wachstumsverfahren |
US12/743,976 US8038793B2 (en) | 2007-12-14 | 2008-11-18 | Epitaxial growth method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007322814A JP5029340B2 (ja) | 2007-12-14 | 2007-12-14 | エピタキシャル成長方法 |
JP2007-322814 | 2007-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009078124A1 true WO2009078124A1 (ja) | 2009-06-25 |
Family
ID=40795248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/003359 WO2009078124A1 (ja) | 2007-12-14 | 2008-11-18 | エピタキシャル成長方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8038793B2 (ja) |
JP (1) | JP5029340B2 (ja) |
KR (1) | KR101526895B1 (ja) |
DE (1) | DE112008003330B4 (ja) |
TW (1) | TWI445053B (ja) |
WO (1) | WO2009078124A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI706446B (zh) * | 2017-12-25 | 2020-10-01 | 日商Sumco股份有限公司 | 磊晶成長裝置及使用此裝置的半導體磊晶晶圓的製造方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008034260B4 (de) * | 2008-07-16 | 2014-06-26 | Siltronic Ag | Verfahren zum Abscheiden einer Schicht auf einer Halbleiterscheibe mittels CVD in einer Kammer und Kammer zum Abscheiden einer Schicht auf einer Halbleiterscheibe mittels CVD |
JP6052070B2 (ja) * | 2013-06-17 | 2016-12-27 | 株式会社Sumco | エピタキシャルウェーハの製造方法及びその製造装置 |
DE102016225137A1 (de) | 2016-12-15 | 2018-06-21 | Siltronic Ag | Vorrichtung und Verfahren zum Abscheiden einer von Prozessgas stammenden Materialschicht auf einer Substratscheibe |
CN110277304A (zh) * | 2018-03-14 | 2019-09-24 | 胜高股份有限公司 | 外延晶片的制造方法及其制造装置 |
CN109273378B (zh) * | 2018-09-20 | 2021-11-02 | 长江存储科技有限责任公司 | 平衡晶圆弯曲度分布的方法 |
US20220056583A1 (en) * | 2020-08-18 | 2022-02-24 | Globalwafers Co., Ltd. | Window for chemical vapor deposition systems and related methods |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001044125A (ja) * | 1999-07-29 | 2001-02-16 | Applied Materials Inc | エピタキシャル成長装置及び方法 |
JP2001512901A (ja) * | 1997-08-06 | 2001-08-28 | アプライド マテリアルズ インコーポレイテッド | 大気圧又は大気圧以上で応力が減少したドーム型ウェハリアクタ容器窓 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4322592A (en) * | 1980-08-22 | 1982-03-30 | Rca Corporation | Susceptor for heating semiconductor substrates |
JP2714802B2 (ja) * | 1988-03-18 | 1998-02-16 | 三菱化学株式会社 | 有機金属化学気相反応装置 |
-
2007
- 2007-12-14 JP JP2007322814A patent/JP5029340B2/ja active Active
-
2008
- 2008-11-18 US US12/743,976 patent/US8038793B2/en active Active
- 2008-11-18 DE DE112008003330.7T patent/DE112008003330B4/de active Active
- 2008-11-18 KR KR1020107012967A patent/KR101526895B1/ko active IP Right Grant
- 2008-11-18 WO PCT/JP2008/003359 patent/WO2009078124A1/ja active Application Filing
- 2008-11-24 TW TW097145390A patent/TWI445053B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001512901A (ja) * | 1997-08-06 | 2001-08-28 | アプライド マテリアルズ インコーポレイテッド | 大気圧又は大気圧以上で応力が減少したドーム型ウェハリアクタ容器窓 |
JP2001044125A (ja) * | 1999-07-29 | 2001-02-16 | Applied Materials Inc | エピタキシャル成長装置及び方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI706446B (zh) * | 2017-12-25 | 2020-10-01 | 日商Sumco股份有限公司 | 磊晶成長裝置及使用此裝置的半導體磊晶晶圓的製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200947520A (en) | 2009-11-16 |
DE112008003330T5 (de) | 2010-12-02 |
US20100251958A1 (en) | 2010-10-07 |
TWI445053B (zh) | 2014-07-11 |
KR101526895B1 (ko) | 2015-06-08 |
JP5029340B2 (ja) | 2012-09-19 |
US8038793B2 (en) | 2011-10-18 |
DE112008003330B4 (de) | 2017-11-30 |
KR20100093563A (ko) | 2010-08-25 |
JP2009147105A (ja) | 2009-07-02 |
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