WO2008139579A1 - 電子部品試験装置、電子部品試験システム及び電子部品の試験方法 - Google Patents

電子部品試験装置、電子部品試験システム及び電子部品の試験方法 Download PDF

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Publication number
WO2008139579A1
WO2008139579A1 PCT/JP2007/059597 JP2007059597W WO2008139579A1 WO 2008139579 A1 WO2008139579 A1 WO 2008139579A1 JP 2007059597 W JP2007059597 W JP 2007059597W WO 2008139579 A1 WO2008139579 A1 WO 2008139579A1
Authority
WO
WIPO (PCT)
Prior art keywords
testing
electronic part
contact plate
testing apparatus
inverting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/059597
Other languages
English (en)
French (fr)
Inventor
Akihiko Ito
Yoshihito Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to PCT/JP2007/059597 priority Critical patent/WO2008139579A1/ja
Priority to PCT/JP2008/057764 priority patent/WO2008139853A1/ja
Priority to JP2009514067A priority patent/JPWO2008139853A1/ja
Priority to KR1020097025220A priority patent/KR101163628B1/ko
Priority to TW097115533A priority patent/TW200912340A/zh
Publication of WO2008139579A1 publication Critical patent/WO2008139579A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

電子部品試験装置は、ＩＣデバイスのテストを行う直前に、カスタマトレイ（５）と試験専用のコンタクトプレート（６Ａ）とを重ね合わせて反転させて、カスタマトレイ（５）からコンタクトプレート（６Ａ）にＩＣデバイスを移し替える第１の反転装置（２２０）と、ＩＣデバイスをテストする際に、コンタクトプレート（６Ａ）にＩＣデバイスを保持した状態で、ＩＣデバイスをテストヘッド（４）のソケット（４１）に押し付ける押圧装置（２５０）と、を備えている。
PCT/JP2007/059597 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法 Ceased WO2008139579A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2007/059597 WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
PCT/JP2008/057764 WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
JP2009514067A JPWO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
KR1020097025220A KR101163628B1 (ko) 2007-05-09 2008-04-22 전자부품 시험장치 및 전자부품 시험 시스템
TW097115533A TW200912340A (en) 2007-05-09 2008-04-28 Electronic component testing apparatus, electronic component testing system and electronic component testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/059597 WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Publications (1)

Publication Number Publication Date
WO2008139579A1 true WO2008139579A1 (ja) 2008-11-20

Family

ID=40001811

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/JP2007/059597 Ceased WO2008139579A1 (ja) 2007-05-09 2007-05-09 電子部品試験装置、電子部品試験システム及び電子部品の試験方法
PCT/JP2008/057764 Ceased WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057764 Ceased WO2008139853A1 (ja) 2007-05-09 2008-04-22 電子部品試験装置、電子部品試験システム及び電子部品の試験方法

Country Status (4)

Country Link
JP (1) JPWO2008139853A1 (ja)
KR (1) KR101163628B1 (ja)
TW (1) TW200912340A (ja)
WO (2) WO2008139579A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146709A1 (ja) * 2009-06-19 2010-12-23 株式会社アドバンテスト 電子部品移載装置及び電子部品の移載方法
WO2010146708A1 (ja) * 2009-06-19 2010-12-23 株式会社アドバンテスト 電子部品移載装置及びそれを備えた電子部品試験装置
JP2013137286A (ja) * 2011-12-28 2013-07-11 Advantest Corp 電子部品試験装置
KR102072390B1 (ko) * 2013-06-18 2020-02-04 (주)테크윙 테스트핸들러
KR102015572B1 (ko) * 2013-10-02 2019-10-22 삼성전자주식회사 실장 장치
KR101670051B1 (ko) * 2014-07-08 2016-10-28 피에스케이 주식회사 처리 장치 및 방법
KR102145306B1 (ko) * 2014-07-21 2020-08-19 (주)테크윙 전자부품 테스트 장비
JP6104429B2 (ja) * 2016-04-26 2017-03-29 平田機工株式会社 搬送システム
JP7281250B2 (ja) * 2018-05-11 2023-05-25 株式会社アドバンテスト 試験用キャリア
KR102122760B1 (ko) * 2018-11-21 2020-06-26 정성욱 트레이 교체 시스템
JP7192620B2 (ja) * 2019-03-29 2022-12-20 新東工業株式会社 検査装置
CN113552463B (zh) * 2021-07-15 2022-04-26 中国科学院长春光学精密机械与物理研究所 一种电子元器件测试装置及其测试方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194032A (ja) * 1995-01-18 1996-07-30 Advantest Corp Ｉｃテスタ用水平搬送型ハンドラ
JPH11198988A (ja) * 1998-01-12 1999-07-27 Murata Mfg Co Ltd 収納具
JPH11326448A (ja) * 1998-05-20 1999-11-26 Advantest Corp Ｉｃ試験装置
JP2000039307A (ja) * 1998-07-22 2000-02-08 Hitachi Ltd 半導体検査装置
JP2006284384A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 半導体装置の試験装置及び試験方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01116461A (ja) * 1987-10-29 1989-05-09 Nec Yamagata Ltd 半導体装置の電気的特性測定方法
JP2000258493A (ja) * 1999-03-08 2000-09-22 Hitachi Ltd 半導体素子検査装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08194032A (ja) * 1995-01-18 1996-07-30 Advantest Corp Ｉｃテスタ用水平搬送型ハンドラ
JPH11198988A (ja) * 1998-01-12 1999-07-27 Murata Mfg Co Ltd 収納具
JPH11326448A (ja) * 1998-05-20 1999-11-26 Advantest Corp Ｉｃ試験装置
JP2000039307A (ja) * 1998-07-22 2000-02-08 Hitachi Ltd 半導体検査装置
JP2006284384A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 半導体装置の試験装置及び試験方法

Also Published As

Publication number Publication date
KR20090133141A (ko) 2009-12-31
JPWO2008139853A1 (ja) 2010-07-29
WO2008139853A1 (ja) 2008-11-20
KR101163628B1 (ko) 2012-07-09
TW200912340A (en) 2009-03-16

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