WO2008126811A1 - マグネトロンスパッタ装置 - Google Patents

マグネトロンスパッタ装置 Download PDF

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Publication number
WO2008126811A1
WO2008126811A1 PCT/JP2008/056819 JP2008056819W WO2008126811A1 WO 2008126811 A1 WO2008126811 A1 WO 2008126811A1 JP 2008056819 W JP2008056819 W JP 2008056819W WO 2008126811 A1 WO2008126811 A1 WO 2008126811A1
Authority
WO
WIPO (PCT)
Prior art keywords
target
magnetron sputtering
sputtering apparatus
processed
substrate
Prior art date
Application number
PCT/JP2008/056819
Other languages
English (en)
French (fr)
Inventor
Tadahiro Ohmi
Tetsuya Goto
Takaaki Matsuoka
Original Assignee
National University Corporation Tohoku University
Tokyo Electron Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National University Corporation Tohoku University, Tokyo Electron Limited filed Critical National University Corporation Tohoku University
Priority to KR1020097022976A priority Critical patent/KR101136477B1/ko
Priority to US12/594,676 priority patent/US8568577B2/en
Priority to DE112008000912T priority patent/DE112008000912T5/de
Priority to CN2008800111098A priority patent/CN101652499B/zh
Priority to JP2009509333A priority patent/JP5283084B2/ja
Publication of WO2008126811A1 publication Critical patent/WO2008126811A1/ja
Priority to US14/036,183 priority patent/US20140027278A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

　本発明の課題は、ターゲット上での瞬時瞬時のプラズマ密度を上昇させて成膜速度を向上させるようにしたマグネトロンスパッタ装置を提供することにある。 　本発明のマグネトロンスパッタ装置は、被処理基板と被処理基板に対向して設置されたターゲットと、ターゲットの被処理基板とは反対側に設置された回転磁石とを有し、ターゲット表面に複数のプラズマループが形成されると共に、当該プラズマループが回転磁石の回転にしたがって回転磁石の軸方向に発生、移動、消滅するマグネトロンスパッタ装置である。
PCT/JP2008/056819 2007-04-06 2008-04-04 マグネトロンスパッタ装置 WO2008126811A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020097022976A KR101136477B1 (ko) 2007-04-06 2008-04-04 마그네트론 스퍼터링 장치
US12/594,676 US8568577B2 (en) 2007-04-06 2008-04-04 Magnetron sputtering apparatus
DE112008000912T DE112008000912T5 (de) 2007-04-06 2008-04-04 Magnetronsputtervorrichtung
CN2008800111098A CN101652499B (zh) 2007-04-06 2008-04-04 磁控溅射装置
JP2009509333A JP5283084B2 (ja) 2007-04-06 2008-04-04 マグネトロンスパッタ装置
US14/036,183 US20140027278A1 (en) 2007-04-06 2013-09-25 Magnetron sputtering apparatus

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2007-101159 2007-04-06
JP2007101159 2007-04-06
JP2008-053981 2008-03-04
JP2008052891 2008-03-04
JP2008052934 2008-03-04
JP2008-052891 2008-03-04
JP2008-052934 2008-03-04
JP2008053981 2008-03-04

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US12/594,676 A-371-Of-International US8568577B2 (en) 2007-04-06 2008-04-04 Magnetron sputtering apparatus
US14/036,183 Division US20140027278A1 (en) 2007-04-06 2013-09-25 Magnetron sputtering apparatus

Publications (1)

Publication Number Publication Date
WO2008126811A1 true WO2008126811A1 (ja) 2008-10-23

Family

ID=39863909

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/056819 WO2008126811A1 (ja) 2007-04-06 2008-04-04 マグネトロンスパッタ装置

Country Status (7)

Country Link
US (2) US8568577B2 (ja)
JP (1) JP5283084B2 (ja)
KR (1) KR101136477B1 (ja)
CN (1) CN101652499B (ja)
DE (1) DE112008000912T5 (ja)
TW (1) TWI438293B (ja)
WO (1) WO2008126811A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010131521A1 (ja) * 2009-05-15 2010-11-18 国立大学法人東北大学 回転マグネットスパッタ装置
JP2013122080A (ja) * 2011-12-12 2013-06-20 Ulvac Japan Ltd スパッタリング装置
JP2017226905A (ja) * 2016-06-24 2017-12-28 株式会社トヨタプロダクションエンジニアリング 摩耗予測装置、摩耗予測方法、摩耗予測プログラム

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9812302B2 (en) * 2007-03-16 2017-11-07 National University Corporation Tohoku University Magnetron sputtering apparatus
KR101275672B1 (ko) * 2011-03-15 2013-06-17 (주)울텍 스퍼터링 마그네트론
DE102011086111B4 (de) * 2011-11-10 2016-03-17 Fhr Anlagenbau Gmbh Anordnung zur Einspeisung von HF-Strom für Rohrkathoden
KR20140116183A (ko) * 2012-10-26 2014-10-01 고쿠리츠다이가쿠호진 도호쿠다이가쿠 마그네트론 스퍼터 장치 및 마그네트론 스퍼터 방법
US9257265B2 (en) * 2013-03-15 2016-02-09 Applied Materials, Inc. Methods for reducing etch nonuniformity in the presence of a weak magnetic field in an inductively coupled plasma reactor
CN104563965A (zh) * 2015-01-12 2015-04-29 中国科学院大学 磁场产生装置
US20170062192A1 (en) * 2015-08-28 2017-03-02 Semiconductor Energy Laboratory Co., Ltd. Film forming apparatus
CN106392072B (zh) * 2016-10-20 2020-04-10 中国人民解放军装甲兵工程学院 磁控激光熔覆成形设备与方法
JP7097172B2 (ja) * 2017-11-21 2022-07-07 キヤノントッキ株式会社 スパッタリング装置
DE102018213534A1 (de) * 2018-08-10 2020-02-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Herstellung von Schichten mit verbesserter Uniformität bei Beschichtungsanlagen mit horizontal rotierender Substratführung
CN113755808A (zh) * 2021-09-28 2021-12-07 北海惠科半导体科技有限公司 磁控溅射装置及其控制方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204882A (ja) * 1984-03-28 1985-10-16 Anelva Corp 放電反応処理装置
JPH05148642A (ja) * 1991-11-28 1993-06-15 Hitachi Ltd マグネトロンスパツタ装置
JPH05209267A (ja) * 1991-08-27 1993-08-20 Leybold Ag 円環状被着膜面を成膜するためのマグネトロン原理に基づくスパッタリングカソードユニット
JP2001032067A (ja) * 1999-07-22 2001-02-06 Sanyo Shinku Kogyo Kk 成膜用磁石とそれを用いた成膜方法及びその装置
JP2001523770A (ja) * 1997-11-19 2001-11-27 シンバコ・ナムローゼ・フエンノートシャップ 移動磁石アセンブリを有する平面マグネトロン

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3069702D1 (en) * 1980-08-08 1985-01-10 Battelle Development Corp Apparatus for coating substrates by high-rate cathodic sputtering, as well as sputtering cathode for such apparatus
US5399253A (en) 1992-12-23 1995-03-21 Balzers Aktiengesellschaft Plasma generating device
CN1067118C (zh) * 1994-07-08 2001-06-13 松下电器产业株式会社 磁控管溅射装置
KR100262768B1 (ko) * 1996-04-24 2000-08-01 니시히라 순지 스퍼터성막장치
JP3803520B2 (ja) 1999-02-22 2006-08-02 忠弘 大見 マグネット回転スパッタ装置
JP2002069634A (ja) * 2000-08-29 2002-03-08 Canon Inc 薄膜作製方法および薄膜作製装置
US20030029715A1 (en) * 2001-07-25 2003-02-13 Applied Materials, Inc. An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems
CN2609940Y (zh) * 2002-09-18 2004-04-07 衡阳市真空机电设备有限公司 新型磁场旋转外圆柱靶
US6896773B2 (en) * 2002-11-14 2005-05-24 Zond, Inc. High deposition rate sputtering
US20060172536A1 (en) * 2005-02-03 2006-08-03 Brown Karl M Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece
RU2385967C2 (ru) * 2005-10-07 2010-04-10 Тохоку Юниверсити Аппарат магнетронного распыления
JP2007101159A (ja) 2005-10-07 2007-04-19 Denso Corp エジェクタ式冷凍サイクル
WO2007068133A1 (en) * 2005-12-13 2007-06-21 Oc Oerlikon Balzers Ag Improved sputter target utilization
EP1969613B1 (en) * 2005-12-22 2012-08-22 Oerlikon Solar AG, Trübbach Method of manufacturing at least one sputter-coated substrate and sputter source
JP4707151B2 (ja) 2006-07-25 2011-06-22 日立マクセル株式会社 テープカートリッジ
JP2008052934A (ja) 2006-08-22 2008-03-06 Hitachi High-Technologies Corp 検査装置および検査方法
JP4742316B2 (ja) 2006-08-24 2011-08-10 カシオ計算機株式会社 撮像装置、撮像方法及び撮像制御プログラム
US9812302B2 (en) * 2007-03-16 2017-11-07 National University Corporation Tohoku University Magnetron sputtering apparatus
KR101166396B1 (ko) * 2007-03-30 2012-07-23 도쿄엘렉트론가부시키가이샤 회전 마그넷 스퍼터 장치
KR101243661B1 (ko) * 2008-03-04 2013-03-14 도쿄엘렉트론가부시키가이샤 회전 마그넷 스퍼터 장치
KR20120008528A (ko) * 2009-05-15 2012-01-30 고쿠리츠다이가쿠호진 도호쿠다이가쿠 회전 마그넷 스퍼터 장치, 스퍼터 방법, 전자 장치의 제조 방법 및 회전 마그넷 스퍼터 장치의 냉각 방법

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60204882A (ja) * 1984-03-28 1985-10-16 Anelva Corp 放電反応処理装置
JPH05209267A (ja) * 1991-08-27 1993-08-20 Leybold Ag 円環状被着膜面を成膜するためのマグネトロン原理に基づくスパッタリングカソードユニット
JPH05148642A (ja) * 1991-11-28 1993-06-15 Hitachi Ltd マグネトロンスパツタ装置
JP2001523770A (ja) * 1997-11-19 2001-11-27 シンバコ・ナムローゼ・フエンノートシャップ 移動磁石アセンブリを有する平面マグネトロン
JP2001032067A (ja) * 1999-07-22 2001-02-06 Sanyo Shinku Kogyo Kk 成膜用磁石とそれを用いた成膜方法及びその装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010131521A1 (ja) * 2009-05-15 2010-11-18 国立大学法人東北大学 回転マグネットスパッタ装置
CN102421932A (zh) * 2009-05-15 2012-04-18 国立大学法人东北大学 旋转磁铁溅镀装置
CN102421932B (zh) * 2009-05-15 2014-02-19 国立大学法人东北大学 旋转磁铁溅镀装置
JP2013122080A (ja) * 2011-12-12 2013-06-20 Ulvac Japan Ltd スパッタリング装置
JP2017226905A (ja) * 2016-06-24 2017-12-28 株式会社トヨタプロダクションエンジニアリング 摩耗予測装置、摩耗予測方法、摩耗予測プログラム

Also Published As

Publication number Publication date
DE112008000912T5 (de) 2010-02-18
KR20090127948A (ko) 2009-12-14
US20140027278A1 (en) 2014-01-30
JP5283084B2 (ja) 2013-09-04
US20100059368A1 (en) 2010-03-11
CN101652499B (zh) 2013-09-25
TW200916597A (en) 2009-04-16
CN101652499A (zh) 2010-02-17
KR101136477B1 (ko) 2012-04-23
TWI438293B (zh) 2014-05-21
US8568577B2 (en) 2013-10-29
JPWO2008126811A1 (ja) 2010-07-22

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