WO2009078094A1 - プラズマ処理装置 - Google Patents

プラズマ処理装置 Download PDF

Info

Publication number
WO2009078094A1
WO2009078094A1 PCT/JP2007/074287 JP2007074287W WO2009078094A1 WO 2009078094 A1 WO2009078094 A1 WO 2009078094A1 JP 2007074287 W JP2007074287 W JP 2007074287W WO 2009078094 A1 WO2009078094 A1 WO 2009078094A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
plasma processor
chamber
magnet
magnet mechanism
Prior art date
Application number
PCT/JP2007/074287
Other languages
English (en)
French (fr)
Inventor
Masayoshi Ikeda
Yo Tanaka
Tsutomu Hiroishi
Original Assignee
Canon Anelva Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corporation filed Critical Canon Anelva Corporation
Priority to JP2009546108A priority Critical patent/JP5037630B2/ja
Priority to PCT/JP2007/074287 priority patent/WO2009078094A1/ja
Publication of WO2009078094A1 publication Critical patent/WO2009078094A1/ja
Priority to US12/814,979 priority patent/US8778151B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3266—Magnetic control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

　本発明に従ったプラズマ装置は、真空排気可能なチャンバーと、チャンバー内に配置された第１の電極と、第１の電極上に離れて設けられたマグネットを具備する磁石機構と、第１の電極と対向して設けられた第２の電極と、第１の電極と磁石機構との間又は第１の電極と第２の電極との間の少なくとも一方に設けられた磁気遮蔽部材とを備えたことを特徴とする。
PCT/JP2007/074287 2007-12-18 2007-12-18 プラズマ処理装置 WO2009078094A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009546108A JP5037630B2 (ja) 2007-12-18 2007-12-18 プラズマ処理装置
PCT/JP2007/074287 WO2009078094A1 (ja) 2007-12-18 2007-12-18 プラズマ処理装置
US12/814,979 US8778151B2 (en) 2007-12-18 2010-06-14 Plasma processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/074287 WO2009078094A1 (ja) 2007-12-18 2007-12-18 プラズマ処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/814,979 Continuation US8778151B2 (en) 2007-12-18 2010-06-14 Plasma processing apparatus

Publications (1)

Publication Number Publication Date
WO2009078094A1 true WO2009078094A1 (ja) 2009-06-25

Family

ID=40795220

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/074287 WO2009078094A1 (ja) 2007-12-18 2007-12-18 プラズマ処理装置

Country Status (3)

Country Link
US (1) US8778151B2 (ja)
JP (1) JP5037630B2 (ja)
WO (1) WO2009078094A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100206222A1 (en) * 2009-02-19 2010-08-19 Dong-Young Sung Mask adhesion unit and deposition apparatus using the same
WO2010119947A1 (ja) * 2009-04-16 2010-10-21 キヤノンアネルバ株式会社 プラズマ処理装置
CN103168338A (zh) * 2010-10-22 2013-06-19 于利奇研究中心有限公司 具有大靶的用于高压溅射的溅射源和溅射方法
JPWO2014199421A1 (ja) * 2013-06-14 2017-02-23 国立大学法人東北大学 プラズマ発生装置、プラズマ処理装置、プラズマ発生方法およびプラズマ処理方法
WO2020107773A1 (zh) * 2018-11-27 2020-06-04 武汉华星光电半导体显示技术有限公司 显示面板蒸镀掩膜组件冷却系统及蒸镀掩膜板

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009157186A1 (ja) * 2008-06-24 2009-12-30 キヤノンアネルバ株式会社 磁場発生装置及びプラズマ処理装置
WO2010013476A1 (ja) * 2008-07-31 2010-02-04 キヤノンアネルバ株式会社 プラズマ処理装置および電子デバイスの製造方法
JP5237748B2 (ja) * 2008-10-14 2013-07-17 アルプス電気株式会社 位置検知用磁石及び位置検知装置
JP5487302B2 (ja) 2010-11-30 2014-05-07 キヤノンアネルバ株式会社 プラズマ処理装置
JP5603433B2 (ja) * 2010-12-28 2014-10-08 キヤノンアネルバ株式会社 カーボン膜の製造方法及びプラズマｃｖｄ方法
JP6009171B2 (ja) * 2012-02-14 2016-10-19 東京エレクトロン株式会社 基板処理装置
US20130284589A1 (en) * 2012-04-30 2013-10-31 Youming Li Radio frequency tuned substrate biased physical vapor deposition apparatus and method of operation
JP6026263B2 (ja) * 2012-12-20 2016-11-16 キヤノンアネルバ株式会社 プラズマｃｖｄ装置、真空処理装置
KR102011933B1 (ko) 2013-03-06 2019-08-20 삼성전자 주식회사 비휘발성 메모리 소자 제조 방법
KR102127778B1 (ko) 2013-10-15 2020-06-29 삼성전자주식회사 반도체 장치의 제조 방법 및 이에 의해 제조된 반도체 장치
JP6284825B2 (ja) * 2014-05-19 2018-02-28 東京エレクトロン株式会社 プラズマ処理装置
DE102014110412A1 (de) * 2014-07-23 2016-01-28 Von Ardenne Gmbh Magnetron-Anordnung und Beschichtungsanordnung
JP6403269B2 (ja) * 2014-07-30 2018-10-10 株式会社神戸製鋼所 アーク蒸発源
CN105568240B (zh) * 2016-02-16 2018-11-23 武汉华星光电技术有限公司 磁控溅射装置及磁控溅射方法
KR20210010741A (ko) * 2019-07-18 2021-01-28 삼성디스플레이 주식회사 증착 장치
US11615947B2 (en) * 2020-09-01 2023-03-28 Oem Group, Llc Systems and methods for an improved magnetron electromagnetic assembly
CN113005400A (zh) * 2021-02-23 2021-06-22 京东方科技集团股份有限公司 吸附装置和蒸镀设备
US11915915B2 (en) 2021-05-28 2024-02-27 Applied Materials, Inc. Apparatus for generating magnetic fields during semiconductor processing

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07258838A (ja) * 1994-03-24 1995-10-09 Hitachi Ltd スパッタリング成膜装置
JP2000317303A (ja) * 2000-01-01 2000-11-21 Hitachi Ltd プラズマ処理装置及びこれを用いたプラズマ処理方法
JP2004228409A (ja) * 2003-01-24 2004-08-12 Anelva Corp 表面処理装置
JP2004530256A (ja) * 2001-02-23 2004-09-30 カウフマン アンド ロビンソン，インコーポレイテッド 小型クローズド・ドリフト・スラスタ用の磁場
JP2005179716A (ja) * 2003-12-17 2005-07-07 Sony Corp スパッタリング装置

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JPS624862A (ja) * 1985-06-29 1987-01-10 Anelva Corp 真空蒸着用電子銃
US4622122A (en) * 1986-02-24 1986-11-11 Oerlikon Buhrle U.S.A. Inc. Planar magnetron cathode target assembly
JPS649606A (en) * 1987-07-01 1989-01-12 Matsushita Electric Ind Co Ltd Sputtering apparatus having superconducting magnet
JPH045131Y2 (ja) 1987-07-06 1992-02-14
JPH02243763A (ja) * 1989-03-17 1990-09-27 Seiko Epson Corp マグネトロンカソードのマグネット
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JP3076367B2 (ja) * 1990-11-29 2000-08-14 キヤノン株式会社 プラズマ処理装置
JP2953222B2 (ja) * 1992-10-30 1999-09-27 日本電気株式会社 マイクロ波プラズマ処理装置
JPH08181074A (ja) * 1994-12-21 1996-07-12 Asahi Glass Co Ltd マグネトロンスパッタリング装置及びその成膜方法
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JP4201066B2 (ja) * 1999-09-10 2008-12-24 パナソニック株式会社 スパッタ方法と装置
JP2000306901A (ja) * 2000-01-01 2000-11-02 Hitachi Ltd プラズマ処理装置及びプラズマ処理方法
JP4656697B2 (ja) * 2000-06-16 2011-03-23 キヤノンアネルバ株式会社 高周波スパッタリング装置
US6456011B1 (en) 2001-02-23 2002-09-24 Front Range Fakel, Inc. Magnetic field for small closed-drift ion source
TW554420B (en) * 2001-08-06 2003-09-21 Anelva Corp Surface processing device
JP4251817B2 (ja) * 2002-04-26 2009-04-08 キヤノンアネルバ株式会社 プラズマ生成用ポイントカスプ磁界を作るマグネット配列およびプラズマ処理装置
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JP2006016634A (ja) * 2004-06-30 2006-01-19 Neomax Co Ltd 磁界発生装置及びマグネトロン・スパッタ装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07258838A (ja) * 1994-03-24 1995-10-09 Hitachi Ltd スパッタリング成膜装置
JP2000317303A (ja) * 2000-01-01 2000-11-21 Hitachi Ltd プラズマ処理装置及びこれを用いたプラズマ処理方法
JP2004530256A (ja) * 2001-02-23 2004-09-30 カウフマン アンド ロビンソン，インコーポレイテッド 小型クローズド・ドリフト・スラスタ用の磁場
JP2004228409A (ja) * 2003-01-24 2004-08-12 Anelva Corp 表面処理装置
JP2005179716A (ja) * 2003-12-17 2005-07-07 Sony Corp スパッタリング装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100206222A1 (en) * 2009-02-19 2010-08-19 Dong-Young Sung Mask adhesion unit and deposition apparatus using the same
CN101812662A (zh) * 2009-02-19 2010-08-25 三星移动显示器株式会社 掩模附着单元和使用该掩模附着单元的沉积设备
WO2010119947A1 (ja) * 2009-04-16 2010-10-21 キヤノンアネルバ株式会社 プラズマ処理装置
CN103168338A (zh) * 2010-10-22 2013-06-19 于利奇研究中心有限公司 具有大靶的用于高压溅射的溅射源和溅射方法
US20130199924A1 (en) * 2010-10-22 2013-08-08 Forschungszentrum Jülich GmbH Sputtering sources for high-pressure sputtering with large targets and sputtering method
CN103168338B (zh) * 2010-10-22 2015-11-25 于利奇研究中心有限公司 具有大靶的用于高压溅射的溅射源和溅射方法
EP2630650B1 (de) * 2010-10-22 2016-10-05 Forschungszentrum Jülich GmbH Sputterquellen für hochdrucksputtern mit grossen targets und sputterverfahren
US9481928B2 (en) * 2010-10-22 2016-11-01 Forschungszentrum Juelich Gmbh Sputtering sources for high-pressure sputtering with large targets and sputtering method
JPWO2014199421A1 (ja) * 2013-06-14 2017-02-23 国立大学法人東北大学 プラズマ発生装置、プラズマ処理装置、プラズマ発生方法およびプラズマ処理方法
WO2020107773A1 (zh) * 2018-11-27 2020-06-04 武汉华星光电半导体显示技术有限公司 显示面板蒸镀掩膜组件冷却系统及蒸镀掩膜板

Also Published As

Publication number Publication date
US8778151B2 (en) 2014-07-15
US20100294656A1 (en) 2010-11-25
JP5037630B2 (ja) 2012-10-03
JPWO2009078094A1 (ja) 2011-04-28

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