WO2008117718A1 - ショットキーバリアダイオードおよびその製造方法 - Google Patents

ショットキーバリアダイオードおよびその製造方法 Download PDF

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Publication number
WO2008117718A1
WO2008117718A1 PCT/JP2008/055089 JP2008055089W WO2008117718A1 WO 2008117718 A1 WO2008117718 A1 WO 2008117718A1 JP 2008055089 W JP2008055089 W JP 2008055089W WO 2008117718 A1 WO2008117718 A1 WO 2008117718A1
Authority
WO
WIPO (PCT)
Prior art keywords
barrier diode
schottky barrier
manufacturing
same
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055089
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Tomihito Miyazaki
Makoto Kiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to CA002652948A priority Critical patent/CA2652948A1/en
Priority to EP08722464A priority patent/EP2043157A4/en
Priority to US12/301,944 priority patent/US20100224952A1/en
Priority to JP2009506303A priority patent/JP5644105B2/ja
Publication of WO2008117718A1 publication Critical patent/WO2008117718A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/60—Schottky-barrier diodes 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/64—Electrodes comprising a Schottky barrier to a semiconductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/01—Manufacture or treatment
    • H10D8/043—Manufacture or treatment of planar diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00—Diodes
    • H10D8/01—Manufacture or treatment
    • H10D8/051—Manufacture or treatment of Schottky diodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
    • H10D62/85—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group III-V materials, e.g. GaAs
    • H10D62/8503—Nitride Group III-V materials, e.g. AlN or GaN

Landscapes

  • Electrodes Of Semiconductors (AREA)
PCT/JP2008/055089 2007-03-26 2008-03-19 ショットキーバリアダイオードおよびその製造方法 Ceased WO2008117718A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA002652948A CA2652948A1 (en) 2007-03-26 2008-03-19 Schottky barrier diode and method of producing the same
EP08722464A EP2043157A4 (en) 2007-03-26 2008-03-19 SCHOTTKY BARRIER DIODE AND MANUFACTURING METHOD THEREFOR
US12/301,944 US20100224952A1 (en) 2007-03-26 2008-03-19 Schottky barrier diode and method of producing the same
JP2009506303A JP5644105B2 (ja) 2007-03-26 2008-03-19 ショットキーバリアダイオードの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007078275 2007-03-26
JP2007-078275 2007-03-26

Publications (1)

Publication Number Publication Date
WO2008117718A1 true WO2008117718A1 (ja) 2008-10-02

Family

ID=39788454

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055089 Ceased WO2008117718A1 (ja) 2007-03-26 2008-03-19 ショットキーバリアダイオードおよびその製造方法

Country Status (8)

Country Link
US (1) US20100224952A1 (enExample)
EP (1) EP2043157A4 (enExample)
JP (2) JP5644105B2 (enExample)
KR (1) KR20090127035A (enExample)
CN (1) CN101542736A (enExample)
CA (1) CA2652948A1 (enExample)
TW (1) TW200845401A (enExample)
WO (1) WO2008117718A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011210751A (ja) * 2010-03-26 2011-10-20 Nec Corp Ｉｉｉ族窒化物半導体素子、ｉｉｉ族窒化物半導体素子の製造方法、および電子装置
JP2016162785A (ja) * 2015-02-27 2016-09-05 豊田合成株式会社 半導体装置およびその製造方法
JP2016533028A (ja) * 2013-07-11 2016-10-20 シックスポイント マテリアルズ， インコーポレイテッド Ｉｉｉ族窒化物半導体を用いた電子デバイスおよびその製造方法、および該電子デバイスを製作するためのエピタキシャル多層ウエハ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8772144B2 (en) * 2011-11-11 2014-07-08 Alpha And Omega Semiconductor Incorporated Vertical gallium nitride Schottky diode
CN103208534A (zh) * 2013-04-03 2013-07-17 上海安微电子有限公司 一种制程简化的肖特基器件及制造方法
CN103199120A (zh) * 2013-04-23 2013-07-10 上海安微电子有限公司 一种台平面肖特基势垒二极管及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4813273B1 (enExample) * 1968-10-18 1973-04-26
JPS4822390B1 (enExample) * 1969-03-18 1973-07-05
JPS4827504B1 (enExample) * 1969-08-13 1973-08-23
JP2005530334A (ja) 2002-04-30 2005-10-06 クリー・インコーポレーテッド 高電圧スイッチング素子およびそれを形成するためのプロセス

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
US3523223A (en) * 1967-11-01 1970-08-04 Texas Instruments Inc Metal-semiconductor diodes having high breakdown voltage and low leakage and method of manufacturing
NL167277C (nl) * 1970-08-29 1981-11-16 Philips Nv Halfgeleiderinrichting met een plaatvorming half- geleiderlichaam met over althans een deel van de dikte van het halfgeleiderlichaam afgeschuinde randen, dat is voorzien van een metalen elektrode die een gelijkrichtende overgang vormt met het halfgeleider- lichaam en werkwijze ter vervaardiging van de halfgeleiderinrichting.
JPS5158866A (ja) * 1974-11-18 1976-05-22 Matsushita Electronics Corp Shotsutokiishohekigatahandotaisochi oyobi sonoseizohoho
JPS5712565A (en) * 1980-06-26 1982-01-22 Nec Corp Schottky barrier element
JPS5982774A (ja) * 1982-11-02 1984-05-12 Nec Corp 半導体装置
JPS59232467A (ja) * 1983-06-16 1984-12-27 Toshiba Corp ガ−ドリング付きシヨツトキ−バリヤ−ダイオ−ド
GB8413170D0 (en) * 1984-05-23 1984-06-27 British Telecomm Production of semiconductor devices
JPH08139341A (ja) * 1994-11-11 1996-05-31 Murata Mfg Co Ltd ショットキ−バリアダイオ−ド
US5895260A (en) * 1996-03-29 1999-04-20 Motorola, Inc. Method of fabricating semiconductor devices and the devices
DE19804580C2 (de) * 1998-02-05 2002-03-14 Infineon Technologies Ag Leistungsdiode in Halbleitermaterial
US6362495B1 (en) * 1998-03-05 2002-03-26 Purdue Research Foundation Dual-metal-trench silicon carbide Schottky pinch rectifier
US7253015B2 (en) * 2004-02-17 2007-08-07 Velox Semiconductor Corporation Low doped layer for nitride-based semiconductor device
EP1739726A4 (en) * 2004-03-26 2009-08-26 Kansai Electric Power Co BIPOLAR SEMICONDUCTOR ELEMENT AND PROCESS FOR ITS MANUFACTURE
TWI375994B (en) * 2004-09-01 2012-11-01 Sumitomo Electric Industries Epitaxial substrate and semiconductor element
JP2007036052A (ja) * 2005-07-28 2007-02-08 Toshiba Corp 半導体整流素子
US8026568B2 (en) * 2005-11-15 2011-09-27 Velox Semiconductor Corporation Second Schottky contact metal layer to improve GaN Schottky diode performance

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4813273B1 (enExample) * 1968-10-18 1973-04-26
JPS4822390B1 (enExample) * 1969-03-18 1973-07-05
JPS4827504B1 (enExample) * 1969-08-13 1973-08-23
JP2005530334A (ja) 2002-04-30 2005-10-06 クリー・インコーポレーテッド 高電圧スイッチング素子およびそれを形成するためのプロセス

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2043157A4

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011210751A (ja) * 2010-03-26 2011-10-20 Nec Corp Ｉｉｉ族窒化物半導体素子、ｉｉｉ族窒化物半導体素子の製造方法、および電子装置
JP2016533028A (ja) * 2013-07-11 2016-10-20 シックスポイント マテリアルズ， インコーポレイテッド Ｉｉｉ族窒化物半導体を用いた電子デバイスおよびその製造方法、および該電子デバイスを製作するためのエピタキシャル多層ウエハ
JP2016162785A (ja) * 2015-02-27 2016-09-05 豊田合成株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
CA2652948A1 (en) 2008-10-02
JP2014241436A (ja) 2014-12-25
US20100224952A1 (en) 2010-09-09
KR20090127035A (ko) 2009-12-09
TW200845401A (en) 2008-11-16
JPWO2008117718A1 (ja) 2010-07-15
EP2043157A1 (en) 2009-04-01
JP5644105B2 (ja) 2014-12-24
CN101542736A (zh) 2009-09-23
EP2043157A4 (en) 2011-11-16

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