WO2008114818A1 - 圧電振動子、および振動ジャイロ - Google Patents
圧電振動子、および振動ジャイロ Download PDFInfo
- Publication number
- WO2008114818A1 WO2008114818A1 PCT/JP2008/055085 JP2008055085W WO2008114818A1 WO 2008114818 A1 WO2008114818 A1 WO 2008114818A1 JP 2008055085 W JP2008055085 W JP 2008055085W WO 2008114818 A1 WO2008114818 A1 WO 2008114818A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vibration
- piezoelectric vibrator
- leg
- leakage
- drive
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/532,313 US20100116052A1 (en) | 2007-03-20 | 2008-03-19 | Piezoelectric vibrator, and vibration gyro |
JP2009505236A JP5201738B2 (ja) | 2007-03-20 | 2008-03-19 | 圧電振動子、および振動ジャイロ |
CN2008800089198A CN101636634B (zh) | 2007-03-20 | 2008-03-19 | 压电振动器以及振动陀螺仪 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-072652 | 2007-03-20 | ||
JP2007072652 | 2007-03-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008114818A1 true WO2008114818A1 (ja) | 2008-09-25 |
Family
ID=39765922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/055085 WO2008114818A1 (ja) | 2007-03-20 | 2008-03-19 | 圧電振動子、および振動ジャイロ |
Country Status (4)
Country | Link |
---|---|
US (1) | US20100116052A1 (ja) |
JP (1) | JP5201738B2 (ja) |
CN (1) | CN101636634B (ja) |
WO (1) | WO2008114818A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010171966A (ja) * | 2008-12-27 | 2010-08-05 | Epson Toyocom Corp | 屈曲振動片及び電子部品 |
JP2012098091A (ja) * | 2010-10-29 | 2012-05-24 | Tdk Corp | 圧電振動型ヨーレートセンサ |
JP2013036869A (ja) * | 2011-08-09 | 2013-02-21 | Seiko Epson Corp | 物理量検出素子、物理量検出装置および電子機器 |
JP2013190305A (ja) * | 2012-03-13 | 2013-09-26 | Seiko Epson Corp | ジャイロセンサーおよび電子機器 |
JP2013205328A (ja) * | 2012-03-29 | 2013-10-07 | Seiko Epson Corp | 振動片、センサーユニット、電子機器 |
JP2015141182A (ja) * | 2014-01-30 | 2015-08-03 | 京セラクリスタルデバイス株式会社 | 角速度センサ及びセンサ素子 |
JP2016176892A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
JP2016176891A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009250859A (ja) * | 2008-04-09 | 2009-10-29 | Epson Toyocom Corp | 加速度検知装置 |
JP6007541B2 (ja) * | 2012-03-28 | 2016-10-12 | セイコーエプソン株式会社 | 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体 |
JP6171475B2 (ja) * | 2013-03-28 | 2017-08-02 | セイコーエプソン株式会社 | 振動片の製造方法 |
JP6264839B2 (ja) * | 2013-10-29 | 2018-01-24 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP6435631B2 (ja) * | 2014-04-23 | 2018-12-12 | 株式会社デンソー | 角速度センサ |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07128068A (ja) * | 1993-10-28 | 1995-05-19 | Toyota Motor Corp | 振動子 |
JP2000074673A (ja) * | 1998-08-27 | 2000-03-14 | Miyota Kk | 複合運動センサ |
JP2003156337A (ja) * | 2001-09-07 | 2003-05-30 | Citizen Watch Co Ltd | 振動ジャイロ |
JP2004317387A (ja) * | 2003-04-18 | 2004-11-11 | Ngk Insulators Ltd | 物理量測定装置 |
JP2005016976A (ja) * | 2003-06-23 | 2005-01-20 | Seiko Epson Corp | 振動片の製造方法、振動子、ジャイロセンサおよび電子機器 |
JP2005274360A (ja) * | 2004-03-25 | 2005-10-06 | Citizen Watch Co Ltd | 振動ジャイロ |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5386726A (en) * | 1989-10-03 | 1995-02-07 | Akai Electric Co., Ltd. | Vibratory gyroscope |
JP4668739B2 (ja) * | 2005-08-29 | 2011-04-13 | シチズンホールディングス株式会社 | 振動ジャイロ |
-
2008
- 2008-03-19 US US12/532,313 patent/US20100116052A1/en not_active Abandoned
- 2008-03-19 JP JP2009505236A patent/JP5201738B2/ja not_active Expired - Fee Related
- 2008-03-19 WO PCT/JP2008/055085 patent/WO2008114818A1/ja active Application Filing
- 2008-03-19 CN CN2008800089198A patent/CN101636634B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07128068A (ja) * | 1993-10-28 | 1995-05-19 | Toyota Motor Corp | 振動子 |
JP2000074673A (ja) * | 1998-08-27 | 2000-03-14 | Miyota Kk | 複合運動センサ |
JP2003156337A (ja) * | 2001-09-07 | 2003-05-30 | Citizen Watch Co Ltd | 振動ジャイロ |
JP2004317387A (ja) * | 2003-04-18 | 2004-11-11 | Ngk Insulators Ltd | 物理量測定装置 |
JP2005016976A (ja) * | 2003-06-23 | 2005-01-20 | Seiko Epson Corp | 振動片の製造方法、振動子、ジャイロセンサおよび電子機器 |
JP2005274360A (ja) * | 2004-03-25 | 2005-10-06 | Citizen Watch Co Ltd | 振動ジャイロ |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010171966A (ja) * | 2008-12-27 | 2010-08-05 | Epson Toyocom Corp | 屈曲振動片及び電子部品 |
US8816574B2 (en) | 2008-12-27 | 2014-08-26 | Seiko Epson Corporation | Flexural vibration element and electronic component |
US8823248B2 (en) | 2008-12-27 | 2014-09-02 | Seiko Epson Corporation | Flexural vibration element and electronic component |
JP2012098091A (ja) * | 2010-10-29 | 2012-05-24 | Tdk Corp | 圧電振動型ヨーレートセンサ |
JP2013036869A (ja) * | 2011-08-09 | 2013-02-21 | Seiko Epson Corp | 物理量検出素子、物理量検出装置および電子機器 |
JP2013190305A (ja) * | 2012-03-13 | 2013-09-26 | Seiko Epson Corp | ジャイロセンサーおよび電子機器 |
JP2013205328A (ja) * | 2012-03-29 | 2013-10-07 | Seiko Epson Corp | 振動片、センサーユニット、電子機器 |
JP2015141182A (ja) * | 2014-01-30 | 2015-08-03 | 京セラクリスタルデバイス株式会社 | 角速度センサ及びセンサ素子 |
JP2016176892A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
JP2016176891A (ja) * | 2015-03-23 | 2016-10-06 | セイコーエプソン株式会社 | 角速度検出素子、角速度検出デバイス、電子機器および移動体 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008114818A1 (ja) | 2010-07-08 |
CN101636634B (zh) | 2013-07-17 |
JP5201738B2 (ja) | 2013-06-05 |
US20100116052A1 (en) | 2010-05-13 |
CN101636634A (zh) | 2010-01-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2008114818A1 (ja) | 圧電振動子、および振動ジャイロ | |
CN205479069U (zh) | 一种基于局域共振声子晶体的箱式三向隔振器 | |
WO2005084267A3 (en) | Harmonic cmut devices and fabrication methods | |
WO2014163894A3 (en) | Substantially planate parametric emitter and associated methods | |
TW200504572A (en) | Acoustic device using higher order harmonic piezoelectric element | |
SE0402312D0 (sv) | Method and device for separating particles | |
TW200623929A (en) | Transducer | |
WO2010047529A3 (en) | Vibration motor | |
WO2006098743A3 (en) | Internal electrostatic transduction structures for bulk-mode micromechanical resonators | |
EP2886210A3 (en) | Ultrasonic sensor and measuring method using the same, and method of manufacturing ultrasonic sensor | |
NO20075217L (no) | Moppovertrekk | |
WO2009002524A3 (en) | Electric-field-enhancement structure and detection apparatus using same | |
EP2159787A3 (en) | Acoustic structure and acoustic room | |
WO2010089398A3 (de) | Akustischer absorber, akustischer wandler und verfahren zum herstellen eines akustischen absorbers oder eines akustischen wandlers | |
EP4027517A4 (en) | BULKY ACOUSTIC WAVES RESONATOR WITH PIEZOELECTRIC LAYER HAVING AN INSERT STRUCTURE, AND FILTER AND ELECTRONIC DEVICE | |
CN104141720A (zh) | 一种具有隔振特性的正方形栅格板 | |
GB201208162D0 (en) | Musical effects devices | |
WO2011148778A8 (ja) | 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン | |
CN104966511A (zh) | 一种二元嵌入式圆柱空腔吸声覆盖层 | |
JP2015520963A5 (ja) | ||
GB2507693A (en) | Saw filter having planar barrier layer and method of making | |
WO2006104611A3 (en) | Coating medical appliances using vibration | |
FR2911448B1 (fr) | Resonateur acoustique en volume a frequence de resonance reglable et utilisation d'un tel resonateur dans le domaine de la telephonie | |
CN104329408A (zh) | 减振垫及冰箱 | |
FI20115485A (fi) | Akustiikkalevy |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880008919.8 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08738678 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2009505236 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12532313 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08738678 Country of ref document: EP Kind code of ref document: A1 |