WO2008111397A1 - 流体移送装置 - Google Patents

流体移送装置 Download PDF

Info

Publication number
WO2008111397A1
WO2008111397A1 PCT/JP2008/053384 JP2008053384W WO2008111397A1 WO 2008111397 A1 WO2008111397 A1 WO 2008111397A1 JP 2008053384 W JP2008053384 W JP 2008053384W WO 2008111397 A1 WO2008111397 A1 WO 2008111397A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
piezoelectric element
transportation device
substrate
fluid transportation
Prior art date
Application number
PCT/JP2008/053384
Other languages
English (en)
French (fr)
Inventor
Gaku Kamitani
Atsuhiko Hirata
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to EP08720932A priority Critical patent/EP2123913A1/en
Priority to JP2009503960A priority patent/JP4873075B2/ja
Publication of WO2008111397A1 publication Critical patent/WO2008111397A1/ja
Priority to US12/476,395 priority patent/US8308454B2/en
Priority to US13/105,927 priority patent/US8287253B2/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure with non-rectangular cross-section orthogonal to the stacking direction, e.g. polygonal, circular
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Abstract

【課題】流体を効率よく移送でき、構造が簡単で小型の流体移送装置を提供する。 【解決手段】基板１０と、この基板上に変位可能に配置された円板状の圧電素子２０とを備えた流体移送装置である。圧電素子２０には同心円状の複数の分割電極２３ａ～２３ｅが形成されており、それぞれの分割電極に電圧Ｅ１～Ｅ４を位相をずらして印加することにより、圧電素子２０に環状の波打ち状屈曲変形を発生させる。圧電素子２０と基板１０との間に生成される環状のポケット室を半径方向に移動させることにより、流体を外周部から中心部へと移送し、中心部から流体を吐出する。
PCT/JP2008/053384 2007-03-12 2008-02-27 流体移送装置 WO2008111397A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP08720932A EP2123913A1 (en) 2007-03-12 2008-02-27 Fluid transportation device
JP2009503960A JP4873075B2 (ja) 2007-03-12 2008-02-27 流体移送装置
US12/476,395 US8308454B2 (en) 2007-03-12 2009-06-02 Fluid conveyance device
US13/105,927 US8287253B2 (en) 2007-03-12 2011-05-12 Fluid conveyance device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007061703 2007-03-12
JP2007-061703 2007-03-12

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/476,395 Continuation US8308454B2 (en) 2007-03-12 2009-06-02 Fluid conveyance device

Publications (1)

Publication Number Publication Date
WO2008111397A1 true WO2008111397A1 (ja) 2008-09-18

Family

ID=39759339

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053384 WO2008111397A1 (ja) 2007-03-12 2008-02-27 流体移送装置

Country Status (4)

Country Link
US (2) US8308454B2 (ja)
EP (1) EP2123913A1 (ja)
JP (1) JP4873075B2 (ja)
WO (1) WO2008111397A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011145544A1 (ja) * 2010-05-21 2011-11-24 株式会社村田製作所 流体ポンプ
JPWO2016013390A1 (ja) * 2014-07-25 2017-04-27 株式会社村田製作所 気体制御装置
JP2020018288A (ja) * 2018-07-20 2020-02-06 株式会社リコー 液滴形成装置、液滴形成方法、及び分注装置

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WO2006065884A2 (en) * 2004-12-14 2006-06-22 Mark Banister Actuator pump system
EP2041214A4 (en) 2006-07-10 2009-07-08 Medipacs Inc SUPERELASTIC EPOXY HYDROGEL
JP4858546B2 (ja) * 2006-12-27 2012-01-18 株式会社村田製作所 圧電バルブ
WO2008111397A1 (ja) * 2007-03-12 2008-09-18 Murata Manufacturing Co., Ltd. 流体移送装置
US9995295B2 (en) 2007-12-03 2018-06-12 Medipacs, Inc. Fluid metering device
WO2011032011A1 (en) 2009-09-10 2011-03-17 Medipacs, Inc. Low profile actuator and improved method of caregiver controlled administration of therapeutics
US9500186B2 (en) 2010-02-01 2016-11-22 Medipacs, Inc. High surface area polymer actuator with gas mitigating components
EP2847249A4 (en) 2012-03-14 2016-12-28 Medipacs Inc SMART POLYMER MATERIALS WITH EXCESSIVE REACTIVE MOLECULES
DE102012013681A1 (de) * 2012-07-11 2014-01-16 Pfeiffer Vacuum Gmbh Pumpenmodul, sowie Verdrängerpumpe
FR3012443B1 (fr) * 2013-10-24 2021-04-30 Univ Sciences Technologies Lille Procede pour generer un ecoulement de fluide
TWI557321B (zh) * 2015-06-25 2016-11-11 科際精密股份有限公司 壓電泵及其操作方法
CN105508209B (zh) * 2016-03-04 2017-07-25 青岛农业大学 大流量阻流体无阀压电泵
TWI686538B (zh) * 2016-11-24 2020-03-01 研能科技股份有限公司 氣冷散熱裝置
RU175857U1 (ru) * 2016-12-28 2017-12-21 федеральное государственное бюджетное научное учреждение "Научно-исследовательский институт перспективных материалов и технологий" Пьезоэлектрический микронасос
BR112021000234A2 (pt) * 2018-05-02 2021-04-06 Ultrahaptics Ip Ltd Estrutura da placa de bloqueio para melhorar a eficiência da transmissão acústica
EP3597298A1 (en) * 2018-07-20 2020-01-22 Ricoh Company, Ltd. Droplet forming device, droplet forming method, and dispensing apparatus
US11464140B2 (en) 2019-12-06 2022-10-04 Frore Systems Inc. Centrally anchored MEMS-based active cooling systems
US11710678B2 (en) 2018-08-10 2023-07-25 Frore Systems Inc. Combined architecture for cooling devices
RU2702624C1 (ru) * 2018-10-19 2019-10-09 Федеральное государственное бюджетное учреждение науки Институт проблем управления им. В.А. Трапезникова Российской академии наук Пьезоэлектрический электроструйный преобразователь
CN114586479A (zh) 2019-10-30 2022-06-03 福珞尔系统公司 基于mems的气流系统
CN112768599A (zh) * 2019-11-04 2021-05-07 科际精密股份有限公司 致动器
US11510341B2 (en) 2019-12-06 2022-11-22 Frore Systems Inc. Engineered actuators usable in MEMs active cooling devices
US11796262B2 (en) 2019-12-06 2023-10-24 Frore Systems Inc. Top chamber cavities for center-pinned actuators
JP2023522132A (ja) * 2020-04-13 2023-05-26 ステレクト・プロプライエタリー・リミテッド 超音波トランスデューサ
KR20230075503A (ko) 2020-10-02 2023-05-31 프로리 시스템스 인코포레이티드 능동 방열판

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JPH0354383A (ja) * 1989-07-20 1991-03-08 Olympus Optical Co Ltd 圧電式ポンプ
JPH0381585A (ja) * 1989-08-24 1991-04-05 Mitsubishi Kasei Corp 圧電ポンプ
JPH10511165A (ja) * 1995-09-15 1998-10-27 インスティチュート フア マイクロ−ウント インフォメーションズテクニック ハーン−シッカート−ゲゼルシャフト 逆止弁を有しない流体ポンプ
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354383A (ja) * 1989-07-20 1991-03-08 Olympus Optical Co Ltd 圧電式ポンプ
JPH0381585A (ja) * 1989-08-24 1991-04-05 Mitsubishi Kasei Corp 圧電ポンプ
JPH10511165A (ja) * 1995-09-15 1998-10-27 インスティチュート フア マイクロ−ウント インフォメーションズテクニック ハーン−シッカート−ゲゼルシャフト 逆止弁を有しない流体ポンプ
JP2002130135A (ja) * 2000-10-26 2002-05-09 Matsushita Electric Ind Co Ltd ダイヤフラム及び該ダイヤフラムを備えたポンプ装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011145544A1 (ja) * 2010-05-21 2011-11-24 株式会社村田製作所 流体ポンプ
JP5494801B2 (ja) * 2010-05-21 2014-05-21 株式会社村田製作所 流体ポンプ
JP2014098396A (ja) * 2010-05-21 2014-05-29 Murata Mfg Co Ltd 流体ポンプ
US8747080B2 (en) 2010-05-21 2014-06-10 Murata Manufacturing Co., Ltd. Fluid pump
JPWO2016013390A1 (ja) * 2014-07-25 2017-04-27 株式会社村田製作所 気体制御装置
JP2020018288A (ja) * 2018-07-20 2020-02-06 株式会社リコー 液滴形成装置、液滴形成方法、及び分注装置
JP7268392B2 (ja) 2018-07-20 2023-05-08 株式会社リコー 液滴形成装置、液滴形成方法、及び分注装置

Also Published As

Publication number Publication date
US20090232685A1 (en) 2009-09-17
EP2123913A1 (en) 2009-11-25
US20110229356A1 (en) 2011-09-22
US8287253B2 (en) 2012-10-16
US8308454B2 (en) 2012-11-13
JPWO2008111397A1 (ja) 2010-06-24
JP4873075B2 (ja) 2012-02-08

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