WO2008111351A1 - 全反射テラヘルツ波測定装置 - Google Patents
全反射テラヘルツ波測定装置 Download PDFInfo
- Publication number
- WO2008111351A1 WO2008111351A1 PCT/JP2008/052336 JP2008052336W WO2008111351A1 WO 2008111351 A1 WO2008111351 A1 WO 2008111351A1 JP 2008052336 W JP2008052336 W JP 2008052336W WO 2008111351 A1 WO2008111351 A1 WO 2008111351A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- total reflection
- hertz wave
- tera hertz
- tera
- face
- Prior art date
Links
- 238000001514 detection method Methods 0.000 abstract 2
- 238000005259 measurement Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 230000010287 polarization Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
全反射テラヘルツ波測定装置1は、テラヘルツ波を用いて全反射測定法により測定対象物Sの情報を取得するものであって、光源11、分岐部12、チョッパ13、光路長差調整部14、偏光子15、ビームスプリッタ17、テラヘルツ波発生素子20、内部全反射プリズム31、テラヘルツ波検出素子40、1/4波長板51、偏光分離素子52、光検出器53A、光検出器53B、差動増幅器54およびロックイン増幅器55を備える。内部全反射プリズム31は、いわゆる無収差プリズムであって、入射面31a,出射面31bおよび反射面31cを有する。内部全反射プリズム31の入射面31aにテラヘルツ波発生素子20が一体に設けられ、内部全反射プリズム31の出射面31bにテラヘルツ波検出素子40が一体に設けられている。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08711194.4A EP2128600B1 (en) | 2007-03-13 | 2008-02-13 | Total reflection tera hertz wave measuring apparatus |
US12/530,897 US8354644B2 (en) | 2007-03-13 | 2008-02-13 | Total reflection tera hertz wave measuring apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-063878 | 2007-03-13 | ||
JP2007063878A JP4871176B2 (ja) | 2007-03-13 | 2007-03-13 | 全反射テラヘルツ波測定装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008111351A1 true WO2008111351A1 (ja) | 2008-09-18 |
Family
ID=39759294
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/052336 WO2008111351A1 (ja) | 2007-03-13 | 2008-02-13 | 全反射テラヘルツ波測定装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8354644B2 (ja) |
EP (1) | EP2128600B1 (ja) |
JP (1) | JP4871176B2 (ja) |
WO (1) | WO2008111351A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2273254A1 (en) * | 2008-04-30 | 2011-01-12 | Hamamatsu Photonics K.K. | Total reflection terahertz wave measurement device |
JP2013190311A (ja) * | 2012-03-13 | 2013-09-26 | Canon Inc | センサ装置 |
CN104316498A (zh) * | 2014-11-13 | 2015-01-28 | 中国科学院上海微系统与信息技术研究所 | 一种表面等离子体共振的太赫兹传感器 |
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JP5601562B2 (ja) * | 2009-09-04 | 2014-10-08 | 独立行政法人理化学研究所 | 移動度測定装置及びその方法、並びに、抵抗率測定装置及びその方法 |
US8416396B2 (en) | 2010-07-18 | 2013-04-09 | David H. Parker | Methods and apparatus for optical amplitude modulated wavefront shaping |
JP2012083166A (ja) * | 2010-10-08 | 2012-04-26 | Hamamatsu Photonics Kk | 全反射分光計測装置 |
JP5550521B2 (ja) * | 2010-10-20 | 2014-07-16 | 浜松ホトニクス株式会社 | 全反射分光計測装置 |
JP5877942B2 (ja) * | 2010-11-29 | 2016-03-08 | 浜松ホトニクス株式会社 | 全反射分光計測装置 |
JP5723643B2 (ja) * | 2011-03-22 | 2015-05-27 | 浜松ホトニクス株式会社 | 全反射分光計測方法 |
WO2012132647A1 (ja) | 2011-03-29 | 2012-10-04 | 浜松ホトニクス株式会社 | テラヘルツ波分光計測装置 |
JP5607566B2 (ja) * | 2011-03-29 | 2014-10-15 | 浜松ホトニクス株式会社 | テラヘルツ波分光計測装置 |
EP2693199B1 (en) | 2011-03-29 | 2018-07-11 | Hamamatsu Photonics K.K. | Terahertz-wave spectrometer and prism member |
JP2013195281A (ja) * | 2012-03-21 | 2013-09-30 | Furukawa Co Ltd | 電気抵抗測定装置及び電気抵抗測定方法 |
US9435919B2 (en) | 2012-03-26 | 2016-09-06 | Konica Minolta, Inc. | Prism and sensor chip |
JP5957294B2 (ja) * | 2012-05-29 | 2016-07-27 | 浜松ホトニクス株式会社 | プリズム部材、テラヘルツ波分光計測装置、及びテラヘルツ波分光計測方法 |
WO2014046170A1 (ja) * | 2012-09-24 | 2014-03-27 | 日本碍子株式会社 | テラヘルツ波検出素子とその作製方法、接合体、および観察装置 |
JP2014142309A (ja) * | 2013-01-25 | 2014-08-07 | Canon Inc | 測定物情報取得装置とその取得方法 |
EP2966482B1 (en) * | 2013-03-08 | 2023-03-01 | National Yang-Ming University | Prism and optical detection system applying same |
KR102100931B1 (ko) * | 2014-01-03 | 2020-04-14 | 삼성전자주식회사 | 광전도 안테나 |
WO2015174463A1 (ja) | 2014-05-14 | 2015-11-19 | コニカミノルタ株式会社 | 検出デバイスおよびその製造方法 |
JP6407635B2 (ja) * | 2014-09-03 | 2018-10-17 | 有限会社スペクトルデザイン | 電磁波の偏光方位計測方法及び装置 |
JP6455519B2 (ja) * | 2014-09-24 | 2019-01-23 | コニカミノルタ株式会社 | プリズム、プリズムの製造方法、金型およびセンサーチップ |
CN106248616B (zh) * | 2016-09-27 | 2017-10-24 | 深圳市太赫兹科技创新研究院有限公司 | 太赫兹全偏振态检测光谱仪 |
US10508985B2 (en) * | 2017-06-05 | 2019-12-17 | Northwestern University | Systems and methods for pump-probe spectroscopy |
JP6843013B2 (ja) | 2017-07-19 | 2021-03-17 | 浜松ホトニクス株式会社 | テラヘルツ波分光計測装置およびテラヘルツ波分光計測方法 |
CN109444084B (zh) * | 2018-11-05 | 2023-12-12 | 天津大学 | 一种基于双模式的太赫兹波高灵敏度成像装置 |
DE102018133037B4 (de) * | 2018-12-20 | 2021-02-25 | Leibniz-Institut für Photonische Technologien e. V. | Anordnung und Verfahren zur Erfassung von optischen Eigenschaften einer Probe, insbesondere zum selektiven Nachweis von biologischen Molekülen und zum Auslesen einer Molekülbelegung |
JP6735368B2 (ja) * | 2019-01-15 | 2020-08-05 | 東日本電信電話株式会社 | 検査装置 |
JP7505948B2 (ja) * | 2020-09-23 | 2024-06-25 | 浜松ホトニクス株式会社 | テラヘルツ波全反射減衰分光方法、テラヘルツ波全反射減衰分光装置及び圧力付与装置 |
WO2023074761A1 (ja) * | 2021-10-27 | 2023-05-04 | 浜松ホトニクス株式会社 | 結晶形態判別方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2000348367A (ja) * | 1999-06-04 | 2000-12-15 | Olympus Optical Co Ltd | 光学ユニットおよび光ピックアップ |
JP2004354246A (ja) | 2003-05-29 | 2004-12-16 | Aisin Seiki Co Ltd | 反射型テラヘルツ分光測定装置及び測定方法 |
JP2006184078A (ja) | 2004-12-27 | 2006-07-13 | Canon Inc | 被対象物を透過した電磁波の状態を検出するための検出装置 |
Family Cites Families (5)
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US6166866A (en) * | 1995-02-28 | 2000-12-26 | Canon Kabushiki Kaisha | Reflecting type optical system |
GB2371618B (en) * | 2001-01-30 | 2004-11-17 | Teraprobe Ltd | A probe, apparatus and method for examining a sample |
JP4280654B2 (ja) * | 2004-02-17 | 2009-06-17 | アイシン精機株式会社 | マルチチャンネルテラヘルツ波スペクトル測定法及び測定装置 |
JP3913253B2 (ja) * | 2004-07-30 | 2007-05-09 | キヤノン株式会社 | 光半導体装置およびその製造方法 |
JP4546326B2 (ja) * | 2004-07-30 | 2010-09-15 | キヤノン株式会社 | センシング装置 |
-
2007
- 2007-03-13 JP JP2007063878A patent/JP4871176B2/ja active Active
-
2008
- 2008-02-13 EP EP08711194.4A patent/EP2128600B1/en active Active
- 2008-02-13 US US12/530,897 patent/US8354644B2/en active Active
- 2008-02-13 WO PCT/JP2008/052336 patent/WO2008111351A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000348367A (ja) * | 1999-06-04 | 2000-12-15 | Olympus Optical Co Ltd | 光学ユニットおよび光ピックアップ |
JP2004354246A (ja) | 2003-05-29 | 2004-12-16 | Aisin Seiki Co Ltd | 反射型テラヘルツ分光測定装置及び測定方法 |
JP2006184078A (ja) | 2004-12-27 | 2006-07-13 | Canon Inc | 被対象物を透過した電磁波の状態を検出するための検出装置 |
Non-Patent Citations (2)
Title |
---|
HIRORI H. ET AL.: "Destructive interference effect on surface plasmon resonance in terahertz attenuated total reflection", OPICS EXPRESS, vol. 13, no. 26, 26 December 2005 (2005-12-26), pages 10801 - 10814, XP008118065 * |
See also references of EP2128600A4 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2273254A1 (en) * | 2008-04-30 | 2011-01-12 | Hamamatsu Photonics K.K. | Total reflection terahertz wave measurement device |
EP2273254A4 (en) * | 2008-04-30 | 2014-02-26 | Hamamatsu Photonics Kk | TERRAHERTZIAN WAVE MEASURING DEVICE FOR TOTAL REFLECTION |
JP2013190311A (ja) * | 2012-03-13 | 2013-09-26 | Canon Inc | センサ装置 |
CN104316498A (zh) * | 2014-11-13 | 2015-01-28 | 中国科学院上海微系统与信息技术研究所 | 一种表面等离子体共振的太赫兹传感器 |
Also Published As
Publication number | Publication date |
---|---|
JP2008224449A (ja) | 2008-09-25 |
EP2128600A4 (en) | 2014-02-26 |
US20100091266A1 (en) | 2010-04-15 |
EP2128600B1 (en) | 2016-05-04 |
EP2128600A1 (en) | 2009-12-02 |
JP4871176B2 (ja) | 2012-02-08 |
US8354644B2 (en) | 2013-01-15 |
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