WO2008069266A1 - 圧電マイクロブロア - Google Patents
圧電マイクロブロア Download PDFInfo
- Publication number
- WO2008069266A1 WO2008069266A1 PCT/JP2007/073571 JP2007073571W WO2008069266A1 WO 2008069266 A1 WO2008069266 A1 WO 2008069266A1 JP 2007073571 W JP2007073571 W JP 2007073571W WO 2008069266 A1 WO2008069266 A1 WO 2008069266A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- diaphragm
- blower
- opening
- piezoelectric element
- piezoelectric
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 38
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 230000032258 transport Effects 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 4
- 239000000523 sample Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000001816 cooling Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 229910001369 Brass Inorganic materials 0.000 description 5
- 239000010951 brass Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910000906 Bronze Inorganic materials 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000010974 bronze Substances 0.000 description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 4
- 239000000446 fuel Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 241000723554 Pontia occidentalis Species 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 235000019788 craving Nutrition 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/06—Venting
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2201/00—Pump parameters
- F04B2201/08—Cylinder or housing parameters
- F04B2201/0806—Resonant frequency
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
Definitions
- the present invention relates to a piezoelectric microblower suitable for transporting a compressive fluid such as air.
- Piezoelectric micropumps are used as cooling water transport pumps for small electronic devices such as laptop computers and fuel transport pumps for fuel cells.
- a piezoelectric micro blower can be used as a blower for replacing a cooling fan such as a CPU or a blower for supplying oxygen necessary for power generation by a fuel cell.
- Both the piezoelectric micro pump and the piezoelectric micro blower are pumps (blowers) that use a diaphragm that bends and deforms when a voltage is applied to the piezoelectric element.
- the structure is simple, can be configured thinly, and has low power consumption. There are advantages.
- Patent Document 1 discloses a cooling system in which a pump chamber is formed between a pump body and a piezoelectric element, an inflow port is formed on a side surface of the pump chamber, and an exhaust port is formed on a surface facing the piezoelectric element.
- the inflow port is formed in a tapered shape in which the opening area gradually decreases from the outside toward the pump chamber, and the discharge port is formed in a tapered shape in which the opening force gradually decreases from the pump chamber to the outside.
- a fluid for example, air
- the force S can be omitted to omit the check valves at the inflow and discharge ports.
- Patent Document 2 discloses an ultrasonic drive body having a piezoelectric disk mounted on a stainless steel disk, a first stainless steel film body to which the ultrasonic drive body is attached, and a predetermined number from the ultrasonic drive body.
- a gas flow generator comprising a second stainless steel film body mounted substantially parallel to the ultrasonic driver with an interval of! By applying a voltage to the piezoelectric disk, the ultrasonic drive body is bent and displaced, and air is released from the hole formed in the central portion of the second stainless steel film body. Since this gas flow generator also has no check valve, the ultrasonic driver can be driven at a high frequency.
- Patent Document 2 Special Table 2006—522896
- a preferred embodiment of the present invention is to provide a piezoelectric micro blower capable of efficiently transporting a compressible fluid without using a check valve and ensuring a flow rate.
- the present invention provides a blower body, a diaphragm having an outer peripheral portion fixed to the blower body and having a piezoelectric element, and a blower chamber formed between the blower body and the diaphragm.
- a piezoelectric micro blower that transports a compressive fluid by applying a voltage to the piezoelectric element to bend and deform the diaphragm, thereby forming a blower chamber first wall with the diaphragm.
- a second wall portion spaced from the first wall portion, a second opening portion formed in a portion of the second wall portion facing the first opening portion, and the first Formed between the first wall and the second wall, Side end portion is communicated with the outside, to provide a piezoelectric My Kuroburoa comprising an inlet passage inner end portion connected to the first opening and the second opening.
- FIG. 1 shows an example of the basic structure of a piezoelectric microblower that is effective in the present invention.
- the piezoelectric microblower includes a blower body 1 and a diaphragm 2 whose outer peripheral portion is fixed to the blower body 1, and a piezoelectric element 3 is attached to the center of the back surface of the diaphragm 2.
- a blower chamber 4 is formed between the first wall la of the probe body 1 and the diaphragm 2.
- a first opening 5 a is formed at a portion of the first wall la facing the center of the diaphragm 2.
- the blower body 1 is provided with a second wall portion lb at a distance from the first wall portion la on the opposite side of the blower chamber 4 with the first wall portion la in between and facing the first opening 5a.
- a second opening 5b is formed at the second wall portion lb. Between the first wall portion la and the second wall portion lb, the outer end portion communicates with the outside, and the inner end portion is the first opening.
- An inflow passage 7 connected to the mouth 5a and the second opening 5b is formed.
- Figures 1 (a) to 1 (e) show the blower operation when diaphragm 2 is displaced in the primary resonance mode.
- Fig. 1 (a) shows the initial state (when no voltage is applied), and diaphragm 2 is flat.
- (B) in FIG. 1 shows the first quarter period of the voltage applied to the piezoelectric element 3, and diaphragm 2 is bent convexly downward, so that the distance between first opening 5a and diaphragm 2 increases, Fluid is sucked into the blower chamber 4 through the first opening 5a. Arrows indicate fluid flow. At this time, a part of the fluid in the inflow passage 7 is sucked into the blower chamber 4.
- the openings 5a and 5b flow at a high speed as the diaphragm 2 is displaced.
- the fluid can be drawn from the inflow passage 7 into the openings 5a and 5b. That is, the fluid can be drawn into the openings 5a and 5b from the inflow passage 7 not only when the diaphragm 2 is convexly displaced downward but also when the diaphragm 2 is convexly displaced upward. Since the fluid drawn in from the inflow passage 7 and the fluid pushed out from the blower chamber 4 merge and are discharged from the second opening 5b, a discharge flow rate equal to or greater than the displacement volume of the diaphragm 2 can be obtained.
- the inflow passage 7 Since the inflow passage 7 is connected to the space between the openings 5 a and 5 b and is not directly connected to the blower chamber 4, the inflow passage 7 is not affected by the pressure change in the blower chamber 4. Therefore, it is possible to effectively increase the flow rate at which the high-speed flow flowing through the openings 5a and 5b does not flow back into the inflow passage 7 without providing a check valve.
- the second opening 5b that is the fluid outlet and the outer end of the inlet passage 7 that is the inlet can be provided at positions separated from each other.
- a cooling fan for a heat source such as a CPU
- a central space having a larger opening area than the first opening and the second opening may be formed at the inner end of the inflow passage connected to the first opening and the second opening.
- the fluid that has passed through the inflow passage is once collected in the central space and discharged together from the second opening by the flow of the fluid blown out from the first opening.
- the inflow passage is composed of a plurality of passages extending radially from the central space, and an inlet is formed at each outer end of each inflow passage, the passage area of the inflow passage can be secured. The resistance can be reduced and the flow rate can be further increased.
- the central space of the first wall portion accompanies the displacement of the diaphragm. It is preferable to set the opening area of the central space so that the portion facing the surface resonates. That is, the first wall portion can resonate following the displacement of the diaphragm by bringing the natural frequency of the portion of the first wall portion facing the central space close to the vibration frequency of the diaphragm. In this case, there is a function to increase the flow rate of the fluid generated by the diaphragm by the displacement of the first wall, and a further increase in the flow rate can be realized.
- the diaphragm in the present invention is a unimorph type in which a piezoelectric element that expands and contracts in a planar direction is attached to one surface of a resin plate or a metal plate, and a piezoelectric element that expands and contracts in opposite directions on both surfaces of a resin plate or a metal plate. It may be a bimorph type that is pasted, a bimorph type in which a laminated piezoelectric element that itself bends and deforms on one side of a resin plate or a metal plate, or a structure in which the entire diaphragm is composed of laminated piezoelectric elements. . In any case, it is sufficient that the piezoelectric element bends and vibrates in the thickness direction by applying an alternating voltage (sine wave voltage or rectangular wave voltage) to the piezoelectric element.
- an alternating voltage sine wave voltage or rectangular wave voltage
- the primary resonance mode is a mode in which the central part and the peripheral part of the diaphragm are displaced in the same direction
- the tertiary resonance mode is a direction in which the central part and the peripheral part of the diaphragm are displaced in the opposite directions. It is a mode.
- the force S can be brought close to the blower body that holds the outer peripheral part of the diaphragm, so if wiring is connected to the outer peripheral part of the piezoelectric element, Wiring work is easier and reliability is improved.
- the diaphragm is bent and vibrated, whereby the fluid in the inflow passage is sucked into the blower chamber through the first opening, and the second opening is provided.
- Exists in the inflow passage outside the blower chamber together with the high-speed flow pushed out of the blower chamber from Fluid can be rolled in and pushed out together.
- a discharge flow rate greater than the diaphragm displacement volume can be obtained, and a large flow rate blower can be realized.
- the high-speed flow flowing through both openings can be prevented from flowing back into the inflow passage without using a check valve, the flow rate can be effectively increased.
- FIG. 2 to FIG. 5 show a first embodiment of a piezoelectric microblower that is effective in the present invention.
- the piezoelectric micro blower A in this example is an example used as an air cooling blower for an electronic device.
- the top plate (second wall portion) 10 the flow path forming plate 20, the separator (first wall portion) 30, the blower frame
- the body 40, the diaphragm 50, and the bottom plate 60 are laminated and fixed in order from the top.
- the outer peripheral portion of the diaphragm 50 is bonded and fixed between the blower frame 40 and the bottom plate 60.
- the parts 10, 2 0, 30, 40, 60 excluding the diaphragm 50 constitute the blower body 1 and are made of a rigid flat plate material such as a metal plate or a hard resin plate!
- the top plate 10 is formed of a rectangular flat plate, and a discharge port (second opening) 11 penetrating the front and back is formed at the center of the top plate 10.
- the flow path forming plate 20 is also a flat plate having the same outer shape as the top plate 10, and as shown in FIG. 5, a central hole (central space) 21 larger in diameter than the discharge port 11 is formed in the center thereof. Has been. A plurality of (four in this case) inflow passages 22 extending in the radial direction from the central hole 21 to the four corners are formed. In the case of the piezoelectric micro blower A of this example, since the inflow passage 22 communicates with the central hole 21 from four directions, the fluid is attracted to the central hole 21 without resistance along with the bombing operation of the diaphragm 50, The flow rate can be further increased.
- the separator 30 is also a flat plate having the same outer shape as the top plate 10, and a through-hole 31 (first opening) having substantially the same diameter as the discharge port 11 is located at the center of the separator 30 at a position facing the discharge port 11. Is formed.
- the discharge port 11 and the through hole 31 may have the same diameter or different diameters, but have a diameter that is at least smaller than the central hole 21.
- an inflow hole 32 is formed at a position corresponding to the outer end of the inflow passage 22.
- the blower frame 40 is also a flat plate having the same outer shape as the top plate 10, and a large-diameter cavity 41 is formed at the center thereof. In the vicinity of the four corner portions, inflow holes 42 are formed at positions corresponding to the inflow holes 32.
- the blower chamber 4 is formed by the cavity 41 of the blower frame 40 by bonding the separator 30 and the diaphragm 50 with the blower frame 40 interposed therebetween. Note that the blower chamber 4 need not be a closed space and may be partially opened. For example, a slit is formed in the cavity 41 formed in the center of the blower frame 40 and communicates with the outside of the blower frame 40, or a block-shaped blower frame is formed only near the inflow hole 42. Also good. In other words, the blower chamber 4 of the present invention may be a space defined by the separator 30 and the diaphragm 50! /.
- the bottom plate 60 is also a flat plate having the same outer shape as the top plate 10, and a hollow portion 61 having substantially the same shape as the blower chamber 3 is formed at the center thereof.
- the bottom plate 60 is formed thicker than the sum of the thickness of the piezoelectric element 52 and the displacement amount of the diaphragm 51. Even when the micro blower A is mounted on a substrate or the like, the bottom plate 60 does not contact the substrate. Can be prevented.
- the hollow portion 61 forms a hollow portion surrounding the periphery of the piezoelectric element 52 of the diaphragm 50 described later. In the vicinity of the four corners of the bottom plate 60, inflow holes 62 are formed at positions corresponding to the inflow holes 32, 42.
- the diaphragm 50 has a structure in which a circular piezoelectric element 52 is attached to the lower surface of the central portion of the diaphragm 51.
- a circular piezoelectric element 52 is attached to the lower surface of the central portion of the diaphragm 51.
- various metal materials such as stainless steel and brass can be used, and a resin plate made of a resin material such as a glass epoxy resin may be used.
- the piezoelectric element 52 is a disk having a smaller diameter than the hollow portion 41 of the blower frame 40 described above.
- a single-plate piezoelectric ceramic having electrodes on the front and back surfaces is used as the piezoelectric element 52, and this is attached to the back surface (the surface opposite to the blower chamber 3) of the vibration plate 51 to form a unimorph diaphragm. Configured.
- the piezoelectric element 52 By applying an alternating voltage (sine wave or rectangular wave) to the piezoelectric element 52, the piezoelectric element 52 expands and contracts in the plane direction, so that the entire diaphragm 50 is bent and deformed in the plate thickness direction. Bending displacement of diaphragm 50 to piezoelectric element 52 in primary resonance mode or tertiary resonance mode By applying the alternating voltage to be applied, the displacement volume of the diaphragm 50 can be remarkably increased and the flow rate can be greatly increased as compared with the case of applying voltages of other frequencies.
- alternating voltage sine wave or rectangular wave
- inflow holes 51a are formed at positions corresponding to the inflow holes 32, 42, 62.
- an inflow port 8 having one end opened downward and the other end communicating with the inflow passage 22 is formed.
- the inlet 8 of the piezoelectric microblower A is opened downward from the blower body 1, and the discharge port 11 is opened on the upper surface side. Compressible fluid can be sucked in from the inlet 8 on the back side of the piezoelectric micro-port A and discharged from the outlet 11 on the front side, making it a suitable structure as a fuel cell air supply blower or CPU air cooling blower .
- the inflow port 8 may be opened to the outer periphery as long as it does not need to be opened downward.
- a force using a diaphragm 50 composed of a diaphragm 51 and a piezoelectric element 52 As shown in FIG. 6, a diaphragm 50a in which an intermediate plate 53 is provided between the diaphragm 51 and the piezoelectric element 52. May be used.
- the intermediate plate 53 can be a metal plate such as SUS.
- the operation of the piezoelectric microblower A of the present embodiment is almost the same as that shown in FIG.
- the central space 21 having an opening area larger than the first opening 31 and the second opening 11 is formed at the inner end of the inflow passage 22, and the separator 30 is formed of a thin metal plate. It is. Therefore, the operation shown in Fig. 7 can be performed, and a further increase in flow rate can be realized.
- FIG. 7 is a schematic diagram for explaining the operation of the piezoelectric microblower A, and the displacement is greatly represented for easy understanding.
- 7A shows the initial state (when no voltage is applied)
- FIGS. 7B to 7E show the diaphragm 50 and the separator 30 every 1/4 period of the voltage applied to the piezoelectric element 52 (for example, sin wave).
- the displacement of is illustrated.
- the operations (b) to (e) are periodically repeated.
- diaphragm 50 The separator 30 resonates with the vibration, and the separator 30 vibrates with a phase delayed by about 90 ° with respect to the diaphragm 50.
- FIG. 7 shows an example in which the diaphragm 50 is displaced in the primary resonance mode, but the same applies to the case where the diaphragm 50 is displaced in the tertiary resonance mode.
- the displacement amount of the separator 30 is smaller than the diaphragm 50 due to the size of the central space 21, the Young's modulus and the thickness of the separator 30, etc.
- the phase delay of the separator 30 with respect to the diaphragm 50 is not limited to 90 °.
- the separator 30 may vibrate together with a certain phase lag with respect to the diaphragm 50, so that the distance force between the diaphragm 50 and the separator 30 changes more greatly than when the separator 30 does not vibrate. That's fine.
- a diaphragm was prepared in which a piezoelectric element made of a PZT single plate having a thickness of 0.15 mm and a diameter of 12.7 mm was attached on a SUS plate having a thickness of 0.1 mm.
- a separator made of a brass plate, a top plate made of a SUS plate, a flow path forming plate, a blower frame, and a bottom plate were prepared.
- a second opening with a diameter of 0.8 mm is provided at the center of the top plate, and a first opening with a diameter of 0.6 mm is provided at the center of the separator.
- a central space with a diameter of 6 mm and a height of 0.4 mm is provided at the center of the flow path forming plate.
- the above components are stacked and bonded in the order of the bottom plate, diaphragm, blower frame, separator, flow path forming plate, and top plate to produce a blower body that is 20mm long x 20mm wide x 2.4mm high. did.
- the blower chamber of the blower body is designed with a height of 0.15 mm and a diameter of 18 mm.
- Table 1 shows the difference in flow rate when the driving frequency of the diaphragm 50 and the diameter of the central space 21 are changed.
- the unit of flow rate is L / min.
- the thickness of the 42Ni plate at a driving frequency of 24.4 kHz was 0.08 mm, and the thickness of the 42Ni plate at a driving frequency of 25.5 kHz was 0.1 mm.
- FIG. 8 shows an experimental result of the micro blower B using the diaphragm 50 a in which the intermediate plate 53 is provided between the vibration plate 51 and the piezoelectric element 52.
- Table 2 the flow rates when the material and thickness of the separator 30 were changed were compared.
- Sample 1 used phosphor bronze with a thickness of 0.05 mm as a separator
- sample 2 used SUS304 with a thickness of 0.1 mm as a separator.
- the other configuration is the same as micro blower A.
- the configuration other than the separator was common to Sample 1 and Sample 2, and the drive frequency was 24.4 kHz.
- Top plate material Western white Western white Hole diameter of second opening (mm) 0.8 0.8
- Blower chamber material Western white Western white Blower chamber height (mm) 0.15 0.15 Blower chamber diameter ( mm ) 16 16
- FIG. 8 (a) For example, when compared at an applied voltage of 20 Vpp, it is approximately 0.42 L / min in sample 2, whereas it is approximately 0.778 L / min in sample 1.
- the flow rate of 1 is about twice that of sample 2. In other words, it can be seen that the vibration of the separator part greatly contributes to the increase in flow rate.
- Figure 8 (b) compares the flow rates based on power consumption. Because the impedance changes, the power consumption also changes, but it can be seen that Sample 1 is more advantageous when compared with the same power consumption.
- FIG. 9 shows a second embodiment of the microblower according to the present invention.
- the same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.
- a ring-shaped piezoelectric element 52a having a cavity at the center is used as a piezoelectric element, and the outer peripheral part of the piezoelectric element 52a is held by the outer peripheral part of the diaphragm 50b 1 It is close to.
- FIG. 10 shows the displacement in the third-order resonance mode of a diaphragm using a disk-shaped piezoelectric element and a ring-shaped piezoelectric element.
- the piezoelectric element 52 When the disk-shaped piezoelectric element 52 is used, as shown in (a), the piezoelectric element is attached to the center position (Omm position) force and the position of 6 mm.
- ring-shaped piezoelectric element 52b When ring-shaped piezoelectric element 52b is used, as shown in (b), there is a cavity from the center position (position of Omm) to the position of 2.5 mm, and the piezoelectric element is in the range of 2.5 mm to 8 mm. Is attached. In either case, an area of 8 mm or more on the outer peripheral side of the diaphragms 50 and 50b is fixed by the blower body 1.
- the node point is located in the intermediate region (4 mm position) of the piezoelectric element 52.
- the node point is in the middle part of the piezoelectric element 52 and is a point, it is a small area when trying to connect so as not to be disconnected by vibration. Therefore, high-precision positioning is required and wiring is difficult.
- the outer peripheral portion of the piezoelectric element 52a can be brought close to the blower body 1 as shown in FIG. If the wiring is connected to the wire, the connection position is hardly vibrated, so wiring is easy and reliability is improved.
- a diaphragm having a ring-shaped piezoelectric element.
- a diaphragm was prepared in which a piezoelectric element made of a ring-shaped PZT single plate having a thickness of 0.2 mm, an outer diameter of 18 mm, and an inner diameter of 5 mm was attached to a brass plate having a thickness of 0.1 mm.
- a separator made of a brass plate, a top plate made of a SUS plate, a flow path forming plate, a blower frame, and a bottom plate were prepared.
- Omm is provided at the center of the top plate, and a first opening with a diameter of 0.8 mm is provided at the center of the separator.
- a central space with a diameter of 6mm and a height of 0.5mm is provided at the center of the flow path forming plate.
- a voltage of a sin waveform with a frequency of 25.2 kHz, 60 Vp-p is applied to the micro blower C having the above configuration.
- a flow rate of 700 ml / min at the time of lOOPa: a maximum generated pressure of 0.7 kPa was obtained.
- This is an example of driving in the tertiary mode, but it can also be driven in the primary mode.
- FIG. 10 (b) when the ring-shaped piezoelectric element 52a is used, the amount of displacement at the center of the diaphragm 50b becomes very large.
- a brass plate with a thickness of 0.1 mm and a diameter of 5 mm has a natural frequency of about 25 kHz.
- the thickness of the diaphragm 51 is 0.1 mm and the inner diameter of the ring-shaped piezoelectric element 52 a is 5 mm, it is driven at around 25 kHz. Then, since the central portion of the diaphragm 50b resonates due to the bending of the ring-shaped piezoelectric element 52a, a very large displacement is obtained in the central portion of the diaphragm 5 Ob, and an increase in flow rate can be realized. In addition, since there is no piezoelectric element in the maximum displacement portion, the displacement / driving speed of the piezoelectric element can be reduced, and durability can be improved.
- FIG. 11 to 13 show a third embodiment of the microblower according to the present invention.
- the same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.
- a rectangular central space 23 that also serves as an inflow passage is formed in the central portion of the flow path forming plate 20.
- the central space 23 has a larger opening area than the hollow portion 41 of the blower frame 40 constituting the blower chamber 4.
- Notches 33, 43, 63 and 51b are formed in the two corners of the separator (first wall) 30, the blower frame 40, the bottom plate 60 and the diaphragm 50, respectively. It corresponds to the corner portion of the central space 23, and these notches constitute the inflow port 8.
- a diaphragm was prepared, in which a piezoelectric element made of a PZT single plate having a thickness of 0.2 mm and a diameter of 12.7 mm was attached on a SUS plate having a thickness of 0.1 mm.
- a separator made of a SUS plate, a top plate, a flow path forming plate, a blower frame, and a bottom plate were prepared.
- a second opening with a diameter of 0.6 mm is provided at the center of the top plate, and a first opening with a diameter of 2.0 mm is provided at the center of the separator.
- the flow path forming plate is provided with a central space of 20mm in length X 20mm in width. It is. Subsequently, the constituent members were stacked and bonded in the order of a bottom plate, a diaphragm, a blower frame, a separator, a flow path forming plate, and a top plate to produce a blower body 22 mm long ⁇ 22 mm wide ⁇ 2 mm high.
- the blower chamber of the blower body is designed to have a height of 0.1 mm and a diameter of 18 mm.
- micro-blower C configured as described above was driven by applying a sinusoidal voltage with a frequency of 16kHz and 60Vp-p, a flow rate of 90ml / min was obtained at lOOPa.
- This is an example of driving in the third resonance mode, but it can also be driven in the first resonance mode.
- the central space 23 functions as an inflow passage that opens in all directions around the openings 11 and 31, so that the air resistance of the inflowing air can be reduced.
- the separator 30 since almost the entire area of the separator 30 facing the blower chamber is opened by the central space 23, a wide area of the separator 30 can vibrate together with the vibration of the diaphragm 50. Therefore, the separator 30 can be made to resonate even when the diaphragm 50 vibrates in the primary resonance mode.
- the force shown in the example in which the portion of the separator (first wall portion) corresponding to the central space resonates with the vibration of the diaphragm.
- the vibration of the diaphragm that does not necessarily require the separator to resonate.
- the separator is vibrated and the separator vibrates with a predetermined phase delay with respect to the diaphragm, an increase in flow rate can be achieved.
- the blower body is configured by laminating and bonding a plurality of plate-like members.
- the present invention is not limited to this.
- the top plate 10 and the flow path forming plate 20, the separator 30 and the blower frame body 40, and the flow path forming plate 20 and the separator 30 can be integrally formed of resin or metal.
- the shape of the inflow passage is not limited to the shape linearly extending in the radial direction as shown in FIG.
- the number of inflow passages is also arbitrary and can be selected according to the flow rate and noise level.
- FIG. 1 is an operation principle diagram of a piezoelectric microblower according to an embodiment of the present invention.
- FIG. 2 is an overall perspective view of a first embodiment of a piezoelectric microblower according to the present invention.
- FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG.
- FIG. 5 is a cross-sectional view of the V-V spring in FIG.
- FIG. 6 is a cross-sectional view of a modification of the piezoelectric microblower shown in FIG.
- FIG. 7 is a schematic operation diagram of the piezoelectric microblower shown in FIG.
- Fig. 10 Comparison of the displacement of a diaphragm using a disk-shaped piezoelectric element and a diaphragm using a ring-shaped piezoelectric element.
- FIG. 11 A perspective view of a third embodiment of the piezoelectric microblower according to the present invention.
- FIG. 12 is a cross-sectional view taken along line XII—XII in FIG.
- FIG. 13 is an exploded perspective view of the piezoelectric microblower shown in FIG.
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Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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KR1020097011063A KR101088943B1 (ko) | 2006-12-09 | 2007-12-06 | 압전 마이크로 블로어 |
EP07859726.7A EP2090781B1 (en) | 2006-12-09 | 2007-12-06 | Piezoelectric micro-blower |
JP2008548326A JP4873014B2 (ja) | 2006-12-09 | 2007-12-06 | 圧電マイクロブロア |
CN2007800442645A CN101542122B (zh) | 2006-12-09 | 2007-12-06 | 压电微型鼓风机 |
US12/472,833 US8678787B2 (en) | 2006-12-09 | 2009-05-27 | Piezoelectric micro-blower |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
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JP2006332693 | 2006-12-09 | ||
JP2006-332693 | 2006-12-09 | ||
JP2007268503 | 2007-10-16 | ||
JP2007-268503 | 2007-10-16 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US12/472,833 Continuation US8678787B2 (en) | 2006-12-09 | 2009-05-27 | Piezoelectric micro-blower |
Publications (1)
Publication Number | Publication Date |
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WO2008069266A1 true WO2008069266A1 (ja) | 2008-06-12 |
Family
ID=39492144
Family Applications (1)
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PCT/JP2007/073571 WO2008069266A1 (ja) | 2006-12-09 | 2007-12-06 | 圧電マイクロブロア |
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US (2) | US8678787B2 (ja) |
EP (1) | EP2090781B1 (ja) |
JP (1) | JP4873014B2 (ja) |
KR (1) | KR101088943B1 (ja) |
CN (1) | CN101542122B (ja) |
WO (1) | WO2008069266A1 (ja) |
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Also Published As
Publication number | Publication date |
---|---|
CN101542122B (zh) | 2011-05-04 |
JP4873014B2 (ja) | 2012-02-08 |
EP2090781A1 (en) | 2009-08-19 |
US20090232682A1 (en) | 2009-09-17 |
US8678787B2 (en) | 2014-03-25 |
US20090232683A1 (en) | 2009-09-17 |
EP2090781A4 (en) | 2011-01-12 |
KR101088943B1 (ko) | 2011-12-01 |
JPWO2008069266A1 (ja) | 2010-03-25 |
EP2090781B1 (en) | 2018-08-22 |
CN101542122A (zh) | 2009-09-23 |
KR20090077001A (ko) | 2009-07-13 |
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