WO2007058315A1 - Chargeur - Google Patents

Chargeur Download PDF

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Publication number
WO2007058315A1
WO2007058315A1 PCT/JP2006/322999 JP2006322999W WO2007058315A1 WO 2007058315 A1 WO2007058315 A1 WO 2007058315A1 JP 2006322999 W JP2006322999 W JP 2006322999W WO 2007058315 A1 WO2007058315 A1 WO 2007058315A1
Authority
WO
WIPO (PCT)
Prior art keywords
conveyor
port
stagger
transfer means
linear slide
Prior art date
Application number
PCT/JP2006/322999
Other languages
English (en)
Japanese (ja)
Inventor
Hiroyuki Kasahara
Original Assignee
Asyst Technologies Japan, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies Japan, Inc. filed Critical Asyst Technologies Japan, Inc.
Priority to KR1020087011848A priority Critical patent/KR101363836B1/ko
Publication of WO2007058315A1 publication Critical patent/WO2007058315A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders

Definitions

  • the present invention relates to a stock force for temporarily storing a cassette waiting for a process, a front opening unified pod (FOUP), and the like in a manufacturing process of a liquid crystal display device or a semiconductor device.
  • FOUP front opening unified pod
  • Patent Document 1 As this type of stocker, there is one disclosed in Patent Document 1.
  • the stagger crane 27 includes a transfer robot 20, a pair of support columns 25, a pair of table elevating means 26, a pair of wheels 29, and a pair of rails 28 as main components.
  • the transfer robot 20 includes a base 21, a turntable 22, an arm 23, and a gripper 24.
  • the shelves 12 are arranged on both sides of the stagger crane 27 so that cassettes 11 containing glass substrates for liquid crystal display devices and silicon substrates for semiconductor devices can be placed and stored.
  • loading of the cassette 11 into the stocker 10 is performed as follows. That is, a transport carriage (not shown) arrives at the port 14 with the cassette 11 mounted thereon, and the cassette 11 is placed at the port 14 using the transfer means equipped on the transport carriage. Next, the cassette 11 mounted on the port 14 is mounted on the transfer robot 20 mounted on the stagger crane 27, transported to the shelf position designated by the system controller (not shown), and placed on the shelf 12. Placed. Also, the cassette 11 is unloaded from the stocker 10 (the operation of taking out the cassette 11 from the shelf 12 and transferring it to the transport carriage) in the reverse order of the above.
  • Patent Document 1 Japanese Patent Laid-Open No. 2005-277326
  • Patent Document 2 discloses a stocker having another configuration.
  • a pair of ports provided on both sides of a stat force installed inside the stocker has the same structure as the stocker internal shelf.
  • Containers made in (1) are carried in and out by a belt conveyor, and one stagger robot installed in the stocker carries cassettes into and out of the shelves of the containers.
  • the cassette loaded / unloaded is loaded / unloaded to / from the stock force side arranged on both sides of the stagger robot.
  • Patent Document 2 JP 2003-163250 A
  • the stocker robot is configured to carry cassettes in and out of the shelves arranged on both sides of the stocker crane, so that it rotates at least 180 °. It must have a function (in the configuration of FIG. 9, the turntable 22).
  • the object to be transported is a glass substrate for a liquid crystal display device
  • the cassette weight of the object to be transported is several hundred kilometers or more, and a large driving torque is required to turn the robot. Therefore, the drive source for realizing this has become larger and heavier, which has become an obstacle to the compactness and light weight of the stagger crane.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to avoid an increase in the size and weight of the stagger crane when transporting a cassette such as a large liquid crystal substrate. It is to provide a stocker having a high transfer speed and high work efficiency.
  • a stock force configured as follows.
  • a plurality of storage shelves arranged in the vertical direction and the horizontal direction can be stored, a rail laid parallel to the storage shelves, a stash crane that can run on the rails, and a cover.
  • a port for loading and unloading the conveyed product against the stock force includes a transfer means including a table that can be vertically moved up and down, and a linear slide fork that is installed on the table and is movable back and forth facing the storage shelf, and the transfer means.
  • a roller conveyor for transferring the material to be transferred to the port.
  • the transfer means of the stagger crane can be configured to lower the transported object placing surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor. And prefer to be.
  • a stock force configured as follows.
  • a plurality of storage shelves that are arranged in a vertical direction and a horizontal direction can be stored, and a rail that is laid in parallel to the storage shelves, and a plurality of stacker cranes that can run on the rails, A port for loading and unloading the object to be conveyed with respect to the stock force.
  • the rails are laid so as to form a plurality of parallel and adjacent traveling routes, and the plurality of stagger cranes can travel independently of each other along the traveling routes.
  • the storage shelves are disposed on both sides of the plurality of travel routes.
  • Each of the stat force cranes includes a transfer means including a table that is vertically movable and a linear slide fork that is installed on the table and is capable of moving back and forth facing the storage shelf, and the transfer means. And a roller conveyor that takes over the object to be transferred and delivers it to the port.
  • the arrangement direction of the linear slide fork of the stagger crane that travels along the one travel route is opposite to the disposition direction of the linear slide fork of the stagger crane that travels adjacent to the travel route.
  • the port is located on the opposite side of the storage shelf, the object to be conveyed can be easily delivered by the roller conveyor and the port. Furthermore, it is possible to provide a stocker with a low equipment cost and a short time required for loading and unloading with a high capacity.
  • the transfer means of the stagger crane can be configured to lower the transported object placement surface of the linear slide fork to a position lower than the roller upper surface of the roller conveyor.
  • FIG. 1 is an upper perspective view showing an overall configuration of a stopping force according to an embodiment of the present invention.
  • FIG. 2 is a cross-sectional side view of a main part illustrating the operation of a roller conveyor portion of a stagger crane.
  • FIG. 3 Explanatory drawing showing how a cassette is picked up and pulled in with a linear slide fork for delivery, A) is a front view, and B) is a side sectional view.
  • FIG. 4A is a front view showing a state in which a cassette drawn into a stagger crane is lowered.
  • FIG. 4B is a side sectional view showing a state in which the cassette drawn into the stagger crane is lowered.
  • FIG. 5A is a front view showing a state where the cassette is transferred from the transfer means to the roller conveyor.
  • FIG. 5B is a side sectional view showing a state where the cassette is transferred to the transfer means force roller conveyor.
  • FIG. 6A is a front view showing a state where a cassette is transferred from a roller conveyor to a conveyor port.
  • FIG. 6B is a side cross-sectional view showing a state where the cassette is transferred to the roller conveyor force conveyor port.
  • FIG. 7 is a plan view showing a stocker having another configuration.
  • FIG. 8 is a plan view showing a further modification of the stock force in FIG.
  • FIG. 9 is an upper perspective view showing a conventional configuration of stock force.
  • FIG. 1 is an upper perspective view showing the overall structure of the stocking force according to an embodiment of the present invention
  • FIG. 2 is a side sectional view of the main part showing the operation of the roller conveyor of the stagger crane.
  • a stocker 6 of this embodiment includes a shelf body 7 of a storage shelf, a stagger crane 5 and
  • Conveyor port (port) 17 and rail 28 are provided as main components. Shelf body
  • the conveyor port 17 is disposed in an opposing position with the shelf body 7 and the rail 28 interposed therebetween.
  • the shelf body 7 includes a shelf 12 provided with a notch 38, and a stocker outer wall 15, and can store a plurality of cassettes (conveyed objects) 35 in a vertical direction and a horizontal direction. It has become.
  • Two rails 28 are laid in parallel with the shelf body 7, and one stagger crane 5 is configured to run on the rail 28.
  • This stagger crane 5 is a transfer means 3
  • a conveyor table (roller conveyor) 34, a support column 37, and wheels 29 are provided as main components.
  • the conveyor port 17 is used for loading and unloading the cassette 35 with respect to the stock force 6.
  • the port frame 13 and the roller 16 are provided.
  • a plurality of rollers 16 are arranged at appropriate intervals, and can be driven by a motor (not shown).
  • the transfer means 36 includes an elevating frame (table) 32, a linear slide fork 33, and a table elevating means 26.
  • the elevating frame 32 is configured to be vertically movable by the table elevating means 26.
  • the linear slide fork 33 is installed on the elevating frame 32, extends so as to protrude with respect to the storage shelf (shelf body 7), and is configured to be retractable. Since the linear slide fork 33 is installed on the lifting frame 32 so as not to turn, it cannot be moved away from the shelf body 7!
  • a mounting surface on which the cassette 35 can be mounted is formed on the top surface of the tip of the linear slide fork 33.
  • the conveyor table 34 is for transferring the cassette 35 from the transfer means 36 and transferring it to the conveyor port 17.
  • the conveyor table 34 is an upper open conveyor frame installed at the lower part of the stagger crane 5. 31 and a plurality of rollers 30 rotatably supported by the conveyor frame 31.
  • the roller 30 is provided such that the height of the upper surface thereof coincides with the height of the upper surface of the roller 16 of the conveyor port 17.
  • the roller 30 can be driven by a motor (not shown), and the cassette 35 placed on the roller 30 is moved along the expansion and contraction of the linear slide fork 33 (more specifically, the retraction direction of the linear slide fork 33). Can be transported to!
  • the conveyor table 34 has a shape that does not interfere with the lifting frame 32 and the linear slide fork 33.
  • the side wall portion of the conveyor frame 31 of the conveyor table 34 is formed with a gap portion that can receive the lifting frame 32 configured in a frame shape, and the linear slide fork 33 is accommodated between the side wall portions. A possible space is formed.
  • A) is a front view and B) is a side sectional view.
  • FIG. 3 shows a situation in which the cassette 35 is taken out of the shelf 12 and the linear slide fork 33 is to be retracted therefrom.
  • Fig. 4 As shown, the cassette 35 and the linear slide fork 33 are positioned directly above the lifting frame 32.
  • the stagger crane 5 operates the table elevating means 26 to lower the elevating frame 32.
  • Lifting frame 32 and the linear slide fork 33 is constructed Do interfere to as co down bare table 3 4 above, as, Runode, the lift frame 32 is slip through down the conveyor table 34 from above, of the conveyor table 34 It can enter and descend to the bottom (strictly speaking, inside the conveyor frame 31).
  • stocker 6 shown in a plan view in FIG. 7 has a plurality of (three) stagger cranes 5 installed on common rail 28 having the same configuration as that in FIG. 1 is different from the configuration of FIG. 1 in that three inline ports 18 are provided adjacent to the shelf body 7.
  • the in-line port 18 is a port used when the liquid crystal manufacturing apparatus 8 directly enters and exits the cassette 35 with respect to the stock force 6.
  • the inline port 18 is provided on the same side as the shelf body 7, and the delivery of the cassette 35 to and from the stagger crane 5 is performed by the linear slide fork 33 of the transfer means 36.
  • the cassette 35 can be delivered between the linear slide fork 33 and the inline port 18.
  • the in-line port 18 of the liquid crystal manufacturing apparatus 8 is a port for connecting the stocker 6 and the liquid crystal manufacturing apparatus 8 and can be directly connected by a roller conveyor or connected via a transfer robot.
  • the stagger crane 5 raises the lifting frame 32 from the lower limit position. At this time, the cassette 35 placed on the conveyor table 34 rises integrally with the lifting frame 32. Scooped by. Thereafter, the stagger crane 5 moves horizontally on the rail 28 along the shelf 12, raises the lifting frame 32, and stops with the transfer means 36 facing the target shelf position.
  • the transfer means 36 After stopping the stagger crane 5, the transfer means 36 extends the fork to the placement position of the shelf 12 while the cassette 35 is placed on the linear slide fork 33, and at the tip of the fork (ie, cassette 35). Align. Next, when the elevating frame 32 is lowered by a small amount, the fore end of the fork passes through the notch 38 downward, and the upper surface of the fore end of the fork becomes lower than the shelf surface. , Remains on shelf 12. Thus, the storage of the cassette 35 to the stock force 6 is completed, and then the stagger crane 5 retracts the fork of the linear slide fork 33 and proceeds to the next operation.
  • the stagger crane 5 moves the transfer means 36 to the shelf position in which the target cassette 35 is stored, advances the linear slide fork 33, and then the tip of the linear slide fork 33 has the notch 38. Ascend the lifting frame 32 slightly so that it passes from the bottom to the top, and scoop up the cassette 35 onto the mounting surface ( Figure 3). Then, the linear slide fork 33 is retracted as shown in FIG. 4 and the cassette 35 is pulled into the stagger crane 5 to Drive to Bearport 17 position.
  • the stagger crane 5 While traveling to the conveyor port 17, the stagger crane 5 lowers the elevating frame 32. After reaching the conveyor port 17, the elevating frame 32 is further lowered below the conveyor table 34 to convey the cassette 35 to the conveyor. Inherit to port 17 ( Figure 5). Next, the rollers 30 and 16 of the conveyor 34 and the conveyor port 17 are driven, and the cassette 35 is transferred to the conveyor table 34 force conveyor port (FIG. 6). The cassette 35 placed on the conveyor port 17 is transferred to a transport cart or the like and carried out to the outside.
  • the stocker 6 of the present embodiment includes the shelf body 7 that can store a plurality of cassettes 35 arranged in the vertical direction and the horizontal direction, and rails laid in parallel to the shelf body 7. 28, a stagger crane 5 capable of traveling on the rail 28, and a conveyor port 17 for loading and unloading the cassette 35 with respect to the stock force 6.
  • the stat force crane 5 includes a lifting frame 32 that can be vertically moved and a linear slide fork 33 that is installed on the lifting frame 32 and can be moved back and forth facing the shelf body 7. 36 and a conveyor table 34 that can transfer the cassette 35 from the transfer means 36 to the conveyor port 17.
  • the transfer means 36 of the stagger crane 5 is arranged such that the top end surface (cassette mounting surface) of the linear slide fork 33 is lower than the top surface of the roller 30 of the conveyor table 34. It is configured to be able to be lowered. [0043] Thereby, the cassette 35 can be inherited to the conveyor table 34 by simply lowering the lifting frame 32, so that a simpler configuration can be realized. Further, the cassette 35 can be quickly relayed from the transfer means 36 to the conveyor table 34, so that the time required for the delivery of the cassette 35 can be further shortened. In addition, since the cassette 35 can be transferred from the conveyor table 34 to the transfer means 36 only by raising the elevating frame 32 at the time of warehousing, the time required for warehousing is of course shortened.
  • FIG. 8 shows a modified example, and this stocker 6 has a configuration in which two stockers in FIG. 7 are arranged to face each other.
  • the rail 48 and the rail 47 are divided at the conveyor port 17 and arranged on a straight line, and are laid parallel to the rail 28, respectively.
  • the distance between the rail 48 and the rail 28 and the distance between the rail 47 and the rail 28 are the same, and the stagger crane 5 can run independently on the rail 28, the rail 47, and the rail 48.
  • the shelf bodies 7a and 7b of the storage shelf are arranged on both sides of the three pairs of rails so as to sandwich the three pairs of rails 28, 47 and 48.
  • the stagger crane 5 traveling on the rail 28 takes out the cassette 35 from the predetermined shelf 12 and is positioned at the competitor port 17. Stop at the same time.
  • the cassette is transported to the conveyor port 44 via the comparison table 34, the conveyor port 17 and the conveyor 45 of the stagger crane 5 and is delivered to the stagger crane 5 traveling on the rail 48.
  • the cassette 35 is transferred through the reverse path. Note that the shelf body 7b that the rail 47 opposes from the shelf body 7b that the rail 48 opposes.
  • the stagger crane 5 traveling on the rail 48 takes out the predetermined shelf 12 force cassette 35.
  • the cassette 35 is transferred to the compare port 43 via the conveyor table 34, conveyor port 44, conveyor 46, conveyor port 17, conveyor 45 of the stagger crane 5 and delivered to the stagger crane 5 running on the rail 47. It is.
  • the linear slide fork 33 of the transfer means 36 is installed so as to be able to advance relative to the upper shelf body 7 in the figure.
  • the arrangement direction of the linear slide fork 33 of the stat force crane 5 is reversed between the upper side and the lower side in the figure.
  • the cassette 35 can be easily delivered to the shelf body 7 disposed on both sides of the rail 28.
  • each travel path is divided into a plurality of stagger cranes. 5 can run independently of each other.
  • the shelf body 7 is arranged on both sides of the plurality of travel routes, and the arrangement direction of the linear slide fork 33 of the stacker crane 5 traveling on the one travel route and the travel routes adjacent thereto are arranged.
  • the installation direction of the linear slide fork 33 of the traveling stagger crane 5 is opposite.
  • FIG. 8 is functionally similar to the conventional configuration of FIG. 9, according to the inventor's knowledge, the configuration of FIG. It has been confirmed that both the time required and the equipment cost are excellent.
  • the conveyor port 17 can also be disposed on the same side as the shelf body 7 connected to the opposite side of the shelf body 7. Further, the conveyor port 17 is not limited to the case of serving as an entry / exit, and can be arranged separately for a port dedicated to entry and a port dedicated to delivery. Further, the above-mentioned FOUP or the like can be adopted as the transported object instead of the cassette 35.
  • the lifting frame 32 and the conveyor table 34 are not limited to the shape shown in FIG. However, it is advantageous as described above that the transfer means 36 and the conveyor table 34 are formed in a shape that does not interfere with each other so that the transfer means 36 can be lowered below the upper surface of the roller 30 of the conveyor table 34.
  • a linear slide fork is used as the transfer means of the stagger crane, and the turning function is omitted.
  • the apparatus can be reduced in size and weight, and the apparatus can be operated lightly, and the time required for loading and unloading can be shortened.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un chargeur qui comprend un corps de râtelier (7)(râtelier de stockage) capable de stocker une pluralité de cassettes (35) agencées dans les directions verticale et horizontale, des rails (28) prévus parallèlement au corps de râtelier (7), un pont roulant gerbeur (5) capable de se déplacer sur les rails (28), et une ouverture de transport (17) pour charger et décharger les cassettes (35) sur et à partir du chargeur (6). Le pont roulant gerbeur (5) comprend un moyen de transfert (36) qui possède un cadre de levage (32) mobile dans la direction verticale, et une fourche coulissante linéaire (33) installée sur le cadre de levage (32) et mobile vers l’avant et vers l’arrière dans la direction tournée vers le corps de râtelier (7) et une table de transport (34) avec des rouleaux (30) pour recevoir les cassettes (35) à partir du moyen de transfert (36) et les distribuer à l’ouverture de transport (17).
PCT/JP2006/322999 2005-11-18 2006-11-17 Chargeur WO2007058315A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020087011848A KR101363836B1 (ko) 2005-11-18 2006-11-17 스토커

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005334037A JP4967318B2 (ja) 2005-11-18 2005-11-18 ストッカ
JP2005-334037 2005-11-18

Publications (1)

Publication Number Publication Date
WO2007058315A1 true WO2007058315A1 (fr) 2007-05-24

Family

ID=38048697

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2006/322999 WO2007058315A1 (fr) 2005-11-18 2006-11-17 Chargeur

Country Status (5)

Country Link
JP (1) JP4967318B2 (fr)
KR (1) KR101363836B1 (fr)
CN (1) CN101312894A (fr)
TW (1) TWI388479B (fr)
WO (1) WO2007058315A1 (fr)

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WO2010089667A1 (fr) * 2009-02-05 2010-08-12 Azer Geris Gurgis Gamil Meuble à casiers pour garder des objets avec système automatique d'accès et de stockage
CN102341323A (zh) * 2009-03-02 2012-02-01 安塔尔宗博里 储存用设备，尤其是用于该设备的仓库货架和装卸机械
WO2014019242A1 (fr) * 2012-07-31 2014-02-06 深圳市华星光电技术有限公司 Système de mise en stock de cargaison
EP2716577A1 (fr) * 2011-05-31 2014-04-09 Murata Machinery, Ltd. Dispositif de tiroir et dispositif de stockage
ES2433679R1 (es) * 2012-02-29 2014-10-31 Dario Toncelli Instalación para la formación de paquetes de losas y procedimiento correspondiente
WO2014161644A3 (fr) * 2013-04-04 2014-12-31 Atlantic C Handels- Und Beratungs Gmbh Entrepôt
WO2015036123A1 (fr) * 2013-09-13 2015-03-19 Schaefer Förderanlagen- und Maschinenbau GmbH Dispositif de chargement/déchargement d'un porte-charge tel qu'une palette et analogues
WO2015061451A1 (fr) * 2013-10-23 2015-04-30 Applied Materials, Inc Appareil universel de levage de composants, ensembles et procédés pour la fabrication de dispositifs électroniques
DE102013006524B4 (de) * 2013-04-16 2020-03-05 Mimot Gmbh Einrichtung zum Lagern von in Gurtspulen aufgenommenen elektrischen Bauelementen
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CN111703798B (zh) * 2020-06-09 2024-01-02 北京极智嘉科技股份有限公司 一种搬运机器人、取箱方法、上货方法及仓储物流系统
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CN114887904A (zh) * 2022-04-28 2022-08-12 浙江凯乐士科技集团股份有限公司 分拣系统
CN115783609B (zh) * 2023-01-09 2023-11-28 青岛华新华义齿技术有限公司 一种可控抓取力度的机械手臂

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50156174A (fr) * 1974-06-06 1975-12-17
JPH02119411U (fr) * 1989-03-10 1990-09-26
JPH0556810U (ja) * 1992-01-16 1993-07-27 村田機械株式会社 自動倉庫の入出庫コンベア
JPH06305514A (ja) * 1993-04-27 1994-11-01 Nippon Filing Co Ltd 物品保管装置
JPH10120188A (ja) * 1996-10-23 1998-05-12 Murata Mach Ltd 物品取上げ装置
JPH11246005A (ja) * 1998-02-27 1999-09-14 Daifuku Co Ltd 物品移載装置
JP2002093876A (ja) * 2000-09-11 2002-03-29 Nec Kagoshima Ltd 半導体製品の搬送装置および搬送方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50156174A (fr) * 1974-06-06 1975-12-17
JPH02119411U (fr) * 1989-03-10 1990-09-26
JPH0556810U (ja) * 1992-01-16 1993-07-27 村田機械株式会社 自動倉庫の入出庫コンベア
JPH06305514A (ja) * 1993-04-27 1994-11-01 Nippon Filing Co Ltd 物品保管装置
JPH10120188A (ja) * 1996-10-23 1998-05-12 Murata Mach Ltd 物品取上げ装置
JPH11246005A (ja) * 1998-02-27 1999-09-14 Daifuku Co Ltd 物品移載装置
JP2002093876A (ja) * 2000-09-11 2002-03-29 Nec Kagoshima Ltd 半導体製品の搬送装置および搬送方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010089667A1 (fr) * 2009-02-05 2010-08-12 Azer Geris Gurgis Gamil Meuble à casiers pour garder des objets avec système automatique d'accès et de stockage
CN102341323A (zh) * 2009-03-02 2012-02-01 安塔尔宗博里 储存用设备，尤其是用于该设备的仓库货架和装卸机械
EP2716577A1 (fr) * 2011-05-31 2014-04-09 Murata Machinery, Ltd. Dispositif de tiroir et dispositif de stockage
EP2716577A4 (fr) * 2011-05-31 2015-04-22 Murata Machinery Ltd Dispositif de tiroir et dispositif de stockage
ES2433679R1 (es) * 2012-02-29 2014-10-31 Dario Toncelli Instalación para la formación de paquetes de losas y procedimiento correspondiente
WO2014019242A1 (fr) * 2012-07-31 2014-02-06 深圳市华星光电技术有限公司 Système de mise en stock de cargaison
WO2014161644A3 (fr) * 2013-04-04 2014-12-31 Atlantic C Handels- Und Beratungs Gmbh Entrepôt
DE102013006524B4 (de) * 2013-04-16 2020-03-05 Mimot Gmbh Einrichtung zum Lagern von in Gurtspulen aufgenommenen elektrischen Bauelementen
WO2015036123A1 (fr) * 2013-09-13 2015-03-19 Schaefer Förderanlagen- und Maschinenbau GmbH Dispositif de chargement/déchargement d'un porte-charge tel qu'une palette et analogues
WO2015061451A1 (fr) * 2013-10-23 2015-04-30 Applied Materials, Inc Appareil universel de levage de composants, ensembles et procédés pour la fabrication de dispositifs électroniques
US10071887B2 (en) 2013-10-23 2018-09-11 Applied Materials, Inc. Universal component lift apparatus, assemblies, and methods for electronic device manufacturing
CN110963222A (zh) * 2019-12-10 2020-04-07 华北理工大学 一种图书馆图书借阅装置

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